The Alumina Ceramic Multi-Hole Plate is a high-precision engineered component designed for demanding industrial environments requiring excellent dimensional stability, electrical insulation, and long-term mechanical reliability.
Manufactured from 95–99.5% high-purity alumina (Al₂O₃), this ceramic plate integrates precision-machined micro-hole arrays and slot structures, enabling controlled gas flow, accurate alignment, and stable mechanical positioning in advanced equipment systems.
It is widely used in semiconductor processing, laser systems, microfluidics, high-temperature fixtures, and precision automation equipment.
主な特徴
High-Purity Alumina Material
Made from 95%, 96%, 99%, or 99.5% Al₂O₃ with excellent hardness, insulation, and chemical stability.
High-Precision Micro-Machining
Features laser-drilled or ultrasonically machined micro-holes (down to 0.1 mm) with tight positional accuracy.
優れた熱安定性
Stable operation in environments up to 1600°C, suitable for high-temperature and thermal cycling conditions.
Outstanding Electrical Insulation
High dielectric strength and volume resistivity make it ideal for high-voltage and RF environments.
耐薬品性および耐プラズマ性
Resistant to acids, alkalis, solvents, and plasma exposure for long service life.
Fully Customizable Design
All structures can be customized including:
- Hole diameter & spacing
- Slot geometry & layout
- Thickness & dimensions
- Surface finish & coatings
アプリケーション
- Semiconductor wafer processing fixtures
- Gas distribution and microflow control plates
- Laser and optical system alignment components
- Vacuum and plasma-compatible chambers
- High-voltage insulation and support structures
- Precision automation and calibration platforms
- Microfluidic and laboratory devices
Material Properties
- Material: Alumina Ceramic (Al₂O₃) 95–99.5%
- Color: Ivory / White
- Density: 3.80–3.95 g/cm³
- Hardness: ≥ 1200 HV
- Compressive Strength: ≥ 2000 MPa
- Flexural Strength: 300–400 MPa
- Dielectric Strength: ≥ 15 kV/mm
- Volume Resistivity: ≥ 10¹⁴ Ω·cm
- Max Working Temperature: 1100–1600°C
- Thermal Expansion: 7.2–8.0 × 10⁻⁶ /K
Precision & Tolerance
- Flatness: ≤ 0.02–0.05 mm
- Thickness tolerance: ±0.02 mm
- Hole position accuracy: ±0.03 mm
- Surface roughness: Ra 0.2–0.8 μm (optional polishing available)
- Micro-hole diameter: 0.1–0.6 mm
製造能力
We utilize advanced ceramic processing technologies including:
- Cold isostatic pressing (CIP) forming
- 高温焼結
- CNC precision machining
- Laser drilling & ultrasonic machining
- Surface grinding & polishing
- Optional metallization (Mo-Mn, W) and Ni/Au plating
カスタマイズ・オプション
We support full OEM customization:
- Material grade selection (95% / 96% / 99% / 99.5%)
- Complex hole arrays and slot patterns
- Structural design optimization
- Tight-tolerance machining
- Surface polishing or lapping
- Conductive layer integration (metallization)
Advantages Over Conventional Materials
Compared with metals or plastics, alumina ceramic offers:
- より高い耐熱性
- Better dimensional stability
- Superior electrical insulation
- 長寿命
- Resistance to corrosion and plasma environments
よくあるご質問
Q1: Can this ceramic plate be used in high-temperature environments?
Yes, it can operate stably up to 1100–1600°C depending on material grade.
Q2: What is the smallest hole size you can produce?
Micro-holes as small as 0.1 mm can be achieved using laser or ultrasonic machining.
Q3: Can I customize the hole layout?
Yes, all patterns, spacing, and geometries can be fully customized based on drawings.
Q4: Do you support metallization or conductive coatings?
Yes, Mo-Mn, tungsten metallization, and Ni/Au plating are available.
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