Wafer Boat Slot Geometry Guide: V-Groove, U-Groove, Contact Area and Wafer Edge Protection
Wafer boat performance depends on more than the boat material, wafer capacity and overall dimensions. The geometry of each wafer slot directly affects wafer positioning, edge contact, loading stability, thermal movement and the risk of chipping or particle generation. A slot that is too narrow may grip the wafer edge too tightly. A slot that […]







