Pinos de suporte para pastilhas cerâmicas: seleção de materiais, planicidade e controlo de partículas
Ceramic wafer support pins are small but critical components in semiconductor processing equipment. They support, lift, position or temporarily separate wafers during transfer between a robot arm, process chamber, electrostatic chuck, vacuum chuck or wafer stage. Although their geometry is relatively simple, wafer support pins directly contact or approach sensitive wafer surfaces. Variations in pin […]







