Ceramic Wafer End Effector Design: Material, Weight, Flatness and Particle Control
A ceramic wafer end effector—also called a wafer handling blade, robot blade or wafer transfer arm—is the part of a semiconductor robot that directly supports and transfers wafers between process chambers, load ports, aligners, inspection stations and wafer carriers. Although its geometry may appear simple, the end effector directly affects wafer positioning accuracy, transfer speed, […]
Ceramic Wafer End Effector Design: Material, Weight, Flatness and Particle Control Đọc thêm »