The Customized Silicon Carbide (SiC) Ceramic Boat Carrier is a precision-engineered wafer support and transportation solution developed for high-temperature semiconductor manufacturing environments. Manufactured from high-purity SiC ceramic material, this carrier provides excellent thermal stability, superior corrosion resistance, high mechanical strength, and ultra-low contamination performance.
Designed for critical wafer handling processes, SiC ceramic boats are widely used in diffusion furnaces, oxidation systems, CVD reactors, RTP processes, epitaxial growth equipment, and advanced semiconductor production lines.
Compared with conventional quartz or graphite wafer boats, SiC ceramic carriers provide significantly longer service life, lower particle generation, and better process stability, making them ideal for semiconductor fabs, photovoltaic manufacturing, LED production, and power electronics industries.
Its high thermal conductivity and low thermal expansion coefficient enable uniform heat distribution and minimize wafer stress under extreme processing conditions.
Key Features of SiC Ceramic Boat Carrier
Exceptional High Temperature Resistance
The SiC ceramic structure maintains excellent mechanical stability under extremely high temperatures:
- Up to 1600°C in oxidizing atmosphere
- Up to 1950°C in inert atmosphere
The material resists deformation, sagging, and thermal fatigue during repeated heating cycles.
Excellent Chemical Resistance
High-purity silicon carbide exhibits outstanding resistance to:
- Acids
- Alkalis
- Plasma environments
- 腐食性プロセスガス
Compatible with aggressive semiconductor process media including:
- SiH₄
- NH₃
- HCl
- POCl₃
- H₂Se
This ensures extended operational life in harsh processing environments.
Ultra-Low Particle Generation
Surface polishing and precision manufacturing minimize particle contamination during wafer processing.
に適している：
- Advanced semiconductor nodes
- Epitaxial deposition
- EUV processes
- Cleanroom manufacturing
Low particle generation helps improve wafer yield and reduce defect rates.
High Thermal Conductivity
Thermal conductivity:
160 W/m-K
Benefits include:
- Uniform wafer heating
- Improved temperature consistency
- Reduced thermal gradients
- Better process repeatability
高い機械的強度
SiC ceramic provides:
- Excellent hardness
- High compressive strength
- 優れた耐摩耗性
- 耐熱衝撃性
Maintains dimensional stability even under long-term industrial operation.
Fully Customized Design
Customized solutions available according to customer requirements:
Wafer diameter
Slot quantity
Slot spacing
Boat dimensions
Surface finish
Structure optimization
Supported wafer sizes include:
- 150 mm (6″)
- 200 mm (8″)
- 300 mm (12″)
- Customized sizes available
技術仕様
| プロパティ | 単位 | 価値 |
|---|---|---|
| Silicon Carbide Content | % | >99.5 |
| Average Grain Size | μm | 4–10 |
| Bulk Density | kg/dm³ | >3.14 |
| Apparent Porosity | Vol % | <0.5 |
| Vickers Hardness | Kg/mm² | 2800 |
| 曲げ強度 | MPa | 450 |
| Compression Strength | MPa | 3900 |
| 弾性係数 | GPa | 420 |
| Fracture Toughness | MPa·m1/2 | 3.5 |
| 熱伝導率 | W/m-K | 160 |
| 電気抵抗率 | Ohm·cm | 10⁶–10⁸ |
| 熱膨張係数 | 10-⁶/K | 4.3 |
| Maximum Temperature (Oxidizing) | °C | 1600 |
| Maximum Temperature (Inert) | °C | 1950 |
Applications of SiC Ceramic Boat Carrier
半導体製造
Widely used in semiconductor wafer fabrication processes including:
Diffusion Furnaces
Provides stable wafer support during high-temperature processing while minimizing thermal distortion.
Oxidation Systems
Maintains excellent dimensional accuracy and contamination control.
Rapid Thermal Processing
Low thermal expansion minimizes wafer warpage.
Ion Implantation
Excellent resistance to radiation and high-energy particle exposure.
CVD and Epitaxial Growth
に適している：
- SiC epitaxy
- GaN growth
- Silicon deposition
- Compound semiconductor processing
Excellent gas corrosion resistance extends service life.
SiC and Power Device Manufacturing
Used for:
- SiC power devices
- GaN-on-SiC
- MOSFET production
- Advanced power modules
The thermal expansion coefficient closely matches SiC wafers, reducing thermal stress during high-temperature growth.
Photovoltaic Industry
に適している：
PERC Solar Cells
Resistant to phosphorus diffusion environments.
TOPCon Production
Stable performance under repeated thermal cycles.
Thin Film Solar Manufacturing
Excellent corrosion resistance in complex process atmospheres.
Compared with quartz wafer boats, SiC boats provide:
- 長寿命
- Lower maintenance costs
- Better process stability
LED and Optoelectronics
Used in:
- Mini LED
- Micro LED
- Compound semiconductor production
Precision slot design reduces wafer edge damage and improves handling safety.
SiC Ceramic Boat vs Quartz Boat
| Comparison Item | SiC Ceramic Boat | Quartz Boat |
|---|---|---|
| 最高温度 | 1950°C | Approximately 1250°C |
| 耐用年数 | 5–10 Years | 1–2 Years |
| 熱伝導率 | 素晴らしい | 低い |
| Particle Generation | Very Low | Moderate |
| 耐薬品性 | 素晴らしい | ミディアム |
| Mechanical Strength | 高い | 低い |
SiC ceramic boats provide superior durability and lower operating costs for long-term semiconductor production.
Why Choose Our SiC Ceramic Boat Carrier
- High purity SiC material >99.5%
- 精密加工能力
- Low contamination manufacturing process
- Custom design support
- Strict quality control
- Stable long-term production capability
- Fast response for customized projects
Our engineering team works closely with customers to develop customized wafer handling solutions for demanding industrial applications.
よくあるご質問
Q1: What wafer sizes can be supported?
Standard wafer sizes include:
- 150mm (6″)
- 200mm (8″)
- 300mm (12″)
Custom dimensions are available according to customer requirements.
Q2: Can slot quantity and spacing be customized?
Yes. We can customize:
- Slot number
- Slot pitch
- Structure design
- Surface treatment
- Overall dimensions
Q3: What is the lead time?
Standard products:
4–6 weeks
Customized designs:
8–12 weeks
Lead time may vary depending on complexity.
Q4: Why choose SiC instead of quartz or graphite boats?
Compared with conventional materials, SiC ceramic offers:
- Higher operating temperature
- Better contamination control
- 長寿命
- Improved corrosion resistance
- Superior mechanical strength
Q5: Can you manufacture according to drawings?
Yes. We support custom manufacturing based on customer drawings, samples, or detailed specifications.
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