The Customized Silicon Carbide (SiC) Ceramic Boat Carrier is a precision-engineered wafer support and transportation solution developed for high-temperature semiconductor manufacturing environments. Manufactured from high-purity SiC ceramic material, this carrier provides excellent thermal stability, superior corrosion resistance, high mechanical strength, and ultra-low contamination performance.
Designed for critical wafer handling processes, SiC ceramic boats are widely used in diffusion furnaces, oxidation systems, CVD reactors, RTP processes, epitaxial growth equipment, and advanced semiconductor production lines.
Compared with conventional quartz or graphite wafer boats, SiC ceramic carriers provide significantly longer service life, lower particle generation, and better process stability, making them ideal for semiconductor fabs, photovoltaic manufacturing, LED production, and power electronics industries.
Its high thermal conductivity and low thermal expansion coefficient enable uniform heat distribution and minimize wafer stress under extreme processing conditions.
Key Features of SiC Ceramic Boat Carrier
Exceptional High Temperature Resistance
The SiC ceramic structure maintains excellent mechanical stability under extremely high temperatures:
- Up to 1600°C in oxidizing atmosphere
- Up to 1950°C in inert atmosphere
The material resists deformation, sagging, and thermal fatigue during repeated heating cycles.
Excellent Chemical Resistance
High-purity silicon carbide exhibits outstanding resistance to:
- Ácidos
- Álcalis
- Ambientes de plasma
- Gases de processo corrosivos
Compatible with aggressive semiconductor process media including:
- SiH₄
- NH₃
- HCl
- POCl₃
- H₂Se
This ensures extended operational life in harsh processing environments.
Ultra-Low Particle Generation
Surface polishing and precision manufacturing minimize particle contamination during wafer processing.
Adequado para:
- Advanced semiconductor nodes
- Epitaxial deposition
- EUV processes
- Cleanroom manufacturing
Low particle generation helps improve wafer yield and reduce defect rates.
Alta condutividade térmica
Thermal conductivity:
160 W/m-K
As vantagens incluem:
- Uniform wafer heating
- Improved temperature consistency
- Gradientes térmicos reduzidos
- Better process repeatability
Elevada resistência mecânica
SiC ceramic provides:
- Excellent hardness
- High compressive strength
- Resistência superior ao desgaste
- Resistência ao choque térmico
Maintains dimensional stability even under long-term industrial operation.
Fully Customized Design
Customized solutions available according to customer requirements:
Wafer diameter
Slot quantity
Slot spacing
Boat dimensions
Acabamento da superfície
Structure optimization
Supported wafer sizes include:
- 150 mm (6″)
- 200 mm (8″)
- 300 mm (12″)
- Customized sizes available
Especificações técnicas
| Imóveis | Unidade | Valor |
|---|---|---|
| Silicon Carbide Content | % | >99.5 |
| Average Grain Size | μm | 4–10 |
| Bulk Density | kg/dm³ | >3.14 |
| Apparent Porosity | Vol % | <0.5 |
| Vickers Hardness | Kg/mm² | 2800 |
| Resistência à flexão | MPa | 450 |
| Compression Strength | MPa | 3900 |
| Módulo de elasticidade | GPa | 420 |
| Resistência à fratura | MPa·m1/2 | 3.5 |
| Condutividade térmica | W/m-K | 160 |
| Resistividade eléctrica | Ohm·cm | 10⁶–10⁸ |
| Coeficiente de expansão térmica | 10-⁶/K | 4.3 |
| Maximum Temperature (Oxidizing) | °C | 1600 |
| Maximum Temperature (Inert) | °C | 1950 |
Applications of SiC Ceramic Boat Carrier
Fabrico de semicondutores
Widely used in semiconductor wafer fabrication processes including:
Diffusion Furnaces
Provides stable wafer support during high-temperature processing while minimizing thermal distortion.
Oxidation Systems
Maintains excellent dimensional accuracy and contamination control.
Rapid Thermal Processing
Low thermal expansion minimizes wafer warpage.
Ion Implantation
Excellent resistance to radiation and high-energy particle exposure.
CVD and Epitaxial Growth
Adequado para:
- SiC epitaxy
- GaN growth
- Silicon deposition
- Compound semiconductor processing
Excellent gas corrosion resistance extends service life.
SiC and Power Device Manufacturing
Utilizado para:
- SiC power devices
- GaN-on-SiC
- MOSFET production
- Advanced power modules
The thermal expansion coefficient closely matches SiC wafers, reducing thermal stress during high-temperature growth.
Indústria fotovoltaica
Adequado para:
PERC Solar Cells
Resistant to phosphorus diffusion environments.
TOPCon Production
Stable performance under repeated thermal cycles.
Thin Film Solar Manufacturing
Excellent corrosion resistance in complex process atmospheres.
Compared with quartz wafer boats, SiC boats provide:
- Vida útil mais longa
- Lower maintenance costs
- Better process stability
LED and Optoelectronics
Utilizado em:
- Mini LED
- Micro LED
- Compound semiconductor production
Precision slot design reduces wafer edge damage and improves handling safety.
SiC Ceramic Boat vs Quartz Boat
| Comparison Item | SiC Ceramic Boat | Quartz Boat |
|---|---|---|
| Temperatura máxima | 1950°C | Approximately 1250°C |
| Vida útil | 5–10 Years | 1–2 Years |
| Condutividade térmica | Excelente | Baixa |
| Geração de partículas | Muito baixo | Moderado |
| Resistência química | Excelente | Médio |
| Resistência mecânica | Elevado | Baixa |
SiC ceramic boats provide superior durability and lower operating costs for long-term semiconductor production.
Why Choose Our SiC Ceramic Boat Carrier
- High purity SiC material >99.5%
- Capacidade de maquinagem de precisão
- Low contamination manufacturing process
- Custom design support
- Strict quality control
- Stable long-term production capability
- Fast response for customized projects
Our engineering team works closely with customers to develop customized wafer handling solutions for demanding industrial applications.
FAQ
Q1: What wafer sizes can be supported?
Standard wafer sizes include:
- 150mm (6″)
- 200mm (8″)
- 300mm (12″)
Custom dimensions are available according to customer requirements.
Q2: Can slot quantity and spacing be customized?
Yes. We can customize:
- Slot number
- Slot pitch
- Structure design
- Surface treatment
- Overall dimensions
Q3: What is the lead time?
Standard products:
4–6 weeks
Customized designs:
8–12 weeks
Lead time may vary depending on complexity.
Q4: Why choose SiC instead of quartz or graphite boats?
Em comparação com os materiais convencionais, a cerâmica SiC oferece:
- Higher operating temperature
- Better contamination control
- Vida útil mais longa
- Improved corrosion resistance
- Superior mechanical strength
Q5: Can you manufacture according to drawings?
Yes. We support custom manufacturing based on customer drawings, samples, or detailed specifications.
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