Q3: \u5857\u5c64\u77f3\u58a8\u6258\u76e4\u8207\u5168 CVD SiC \u6258\u76e4\u6709\u4f55\u5dee\u7570\uff1f<\/span><\/h3>\n\u5857\u5c64\u77f3\u58a8\u6258\u76e4\u4f7f\u7528\u77f3\u58a8\u6838\u5fc3\u8207\u4fdd\u8b77\u6027 SiC \u5c64\uff0c\u800c\u5168 CVD SiC \u6258\u76e4\u662f\u55ae\u7247\u7d50\u69cb\uff0c\u5177\u6709\u66f4\u9ad8\u7684\u7d14\u5ea6\u3001\u66f4\u597d\u7684\u8010\u8150\u8755\u6027\u548c\u66f4\u9577\u7684\u4f7f\u7528\u58fd\u547d\u3002.<\/p>","protected":false},"excerpt":{"rendered":"
The SiC ceramic tray plate is a high-performance wafer carrier designed for advanced semiconductor processes such as MOCVD, epitaxy, and ICP etching. It is available in two structures: Graphite substrate with CVD SiC coating Monolithic high-purity CVD SiC tray (\u226599.99%) Compared with conventional graphite carriers, this product offers significantly improved thermal stability, corrosion resistance, and 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![\"\"](\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-3-300x300.png\")
SiC \u9676\u74f7\u6258\u677f\u662f\u5c08\u70ba\u5148\u9032\u534a\u5c0e\u9ad4\u88fd\u7a0b\uff08\u5982 MOCVD\u3001\u78ca\u6676\u548c ICP \u8755\u523b\uff09\u800c\u8a2d\u8a08\u7684\u9ad8\u6027\u80fd\u6676\u5713\u8f09\u9ad4\u3002\u5b83\u6709\u5169\u7a2e\u7d50\u69cb\u53ef\u4f9b\u9078\u64c7\uff1a<\/p>\n![\"\"](\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-300x300.png\")
![\"\"](\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-1-300x300.png\")
![\"\"](\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-2-300x300.png\")
<\/p>\n