{"id":2100,"date":"2026-05-12T03:59:56","date_gmt":"2026-05-12T03:59:56","guid":{"rendered":"https:\/\/www.xkh-ceramics.com\/?post_type=product&#038;p=2100"},"modified":"2026-05-12T03:59:56","modified_gmt":"2026-05-12T03:59:56","slug":"%e7%94%a8%e6%96%bc%e6%99%b6%e5%9c%93%e8%99%95%e7%90%86%e7%9a%84%e5%ae%a2%e8%a3%bd%e5%8c%96-sic-%e9%99%b6%e7%93%b7%e6%9c%ab%e7%ab%af%e5%9f%b7%e8%a1%8c%e5%99%a8","status":"publish","type":"product","link":"https:\/\/www.xkh-ceramics.com\/zh\/product\/customized-sic-ceramic-end-effector-for-wafer-handling\/","title":{"rendered":"\u7528\u65bc\u6676\u5713\u8655\u7406\u7684\u5ba2\u88fd\u5316 SiC \u9676\u74f7\u672b\u7aef\u57f7\u884c\u5668"},"content":{"rendered":"<p data-start=\"737\" data-end=\"989\"><img fetchpriority=\"high\" decoding=\"async\" class=\"size-medium wp-image-2101 alignright\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-3-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-3-300x300.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-3-150x150.png 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-3-768x768.png 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-3-12x12.png 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-3-600x600.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-3-100x100.png 100w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-3.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>\u78b3\u5316\u77fd (SiC) \u9676\u74f7\u672b\u7aef\u57f7\u884c\u5668\u662f\u5c08\u70ba\u534a\u5c0e\u9ad4\u81ea\u52d5\u5316\u7cfb\u7d71\u6240\u8a2d\u8a08\u7684\u9ad8\u7cbe\u5ea6\u6676\u5713\u8655\u7406\u5143\u4ef6\uff0c\u5305\u62ec\u6676\u5713\u50b3\u8f38\u6a5f\u68b0\u624b\u3001AMHS \u7cfb\u7d71\u3001EUV \u5149\u523b\u8a2d\u5099\u548c\u9ad8\u6eab\u88fd\u7a0b\u5de5\u5177\u3002.<\/p>\n<p data-start=\"991\" data-end=\"1308\">\u6b64\u672b\u7aef\u6548\u61c9\u5668\u7531\u9ad8\u7d14\u5ea6 CVD SiC \u6216\u5de5\u7a0b SSiC \u88fd\u6210\uff0c\u5177\u6709\u6975\u4f73\u7684\u525b\u6027\u3001\u8d85\u4f4e\u7684\u5fae\u7c92\u751f\u6210\u91cf\u4ee5\u53ca\u51fa\u8272\u7684\u71b1\u7a69\u5b9a\u6027\u548c\u5316\u5b78\u7a69\u5b9a\u6027\u3002\u5b83\u5ee3\u6cdb\u7528\u65bc\u5c0d\u6c61\u67d3\u63a7\u5236\u548c\u5b9a\u4f4d\u7cbe\u5ea6\u8981\u6c42\u6975\u9ad8\u7684 300mm \u548c\u5148\u9032\u7bc0\u9ede\u534a\u5c0e\u9ad4\u6676\u5713\u5ee0\u3002.<\/p>\n<p data-start=\"1310\" data-end=\"1470\">\u8207\u50b3\u7d71\u92c1\u8cea\u6216\u77f3\u82f1\u672b\u7aef\u6548\u61c9\u5668\u76f8\u6bd4\uff0cSiC \u9676\u74f7\u89e3\u6c7a\u65b9\u6848\u53ef\u5927\u5e45\u6539\u5584\u88fd\u7a0b\u7a69\u5b9a\u6027\u3001\u6676\u5713\u5b89\u5168\u6027\u53ca\u8a2d\u5099\u4f7f\u7528\u58fd\u547d\u3002.<\/p>\n<hr data-start=\"1472\" data-end=\"1475\" \/>\n<h2 data-section-id=\"ruuu6i\" data-start=\"1477\" data-end=\"1494\">\u4e3b\u8981\u512a\u52e2<\/h2>\n<h3 data-section-id=\"1igp1it\" data-start=\"1496\" data-end=\"1532\">\u8d85\u4f4e\u5fae\u7c92\u6c61\u67d3<\/h3>\n<ul data-start=\"1533\" data-end=\"1664\">\n<li data-section-id=\"1lx1qmw\" data-start=\"1533\" data-end=\"1587\">\u5fae\u7c92\u7522\u751f\u91cf\uff1a&lt;0.1\/cm\u00b2 (\u7b26\u5408 SEMI F57 \u6a19\u6e96)<\/li>\n<li data-section-id=\"8gkyog\" data-start=\"1588\" data-end=\"1618\">\u7121\u91d1\u5c6c\u96e2\u5b50\u6c61\u67d3<\/li>\n<li data-section-id=\"m28nyw\" data-start=\"1619\" data-end=\"1664\">\u9069\u7528\u65bc EUV \u8207\u5148\u9032\u7bc0\u9ede\u88fd\u7a0b<\/li>\n<\/ul>\n<hr data-start=\"1666\" data-end=\"1669\" \/>\n<h3 data-section-id=\"nha58o\" data-start=\"1671\" data-end=\"1710\">\u9ad8\u525b\u6027\u8207\u7cbe\u5bc6\u7a69\u5b9a\u5ea6<\/h3>\n<ul data-start=\"1711\" data-end=\"1837\">\n<li data-section-id=\"n58wtx\" data-start=\"1711\" data-end=\"1740\">\u694a\u6c0f\u6a21\u6578\uff1a ~420 GPa<\/li>\n<li data-section-id=\"wiw01d\" data-start=\"1741\" data-end=\"1790\">\u9632\u6b62\u9707\u52d5\u5f15\u8d77\u7684\u6676\u5713\u932f\u4f4d<\/li>\n<li data-section-id=\"kx1hzh\" data-start=\"1791\" data-end=\"1837\">\u78ba\u4fdd\u7a69\u5b9a\u7684\u9ad8\u901f\u6a5f\u5668\u4eba\u50b3\u8f38<\/li>\n<\/ul>\n<hr data-start=\"1839\" data-end=\"1842\" \/>\n<h3 data-section-id=\"2ge170\" data-start=\"1844\" data-end=\"1875\">\u512a\u7570\u7684\u71b1\u7a69\u5b9a\u6027<\/h3>\n<ul data-start=\"1876\" data-end=\"2015\">\n<li data-section-id=\"ibg0yp\" data-start=\"1876\" data-end=\"1927\">\u64cd\u4f5c\u6eab\u5ea6\uff1a\u9ad8\u9054 1600\u00b0C\uff08\u6c27\u5316\u6027\uff09<\/li>\n<li data-section-id=\"1e7mmjn\" data-start=\"1928\" data-end=\"1963\">\u9ad8\u9054 1950\u00b0C (\u60f0\u6027\u6c23\u6c1b)<\/li>\n<li data-section-id=\"j5ees9\" data-start=\"1964\" data-end=\"2015\">\u9069\u7528\u65bc\u6975\u7aef\u534a\u5c0e\u9ad4\u74b0\u5883<\/li>\n<\/ul>\n<hr data-start=\"2017\" data-end=\"2020\" \/>\n<h3 data-section-id=\"1twxua8\" data-start=\"2022\" data-end=\"2063\">\u512a\u7570\u7684\u8010\u5316\u5b78\u6027\u8207\u8010\u96fb\u6f3f\u6027<\/h3>\n<ul data-start=\"2064\" data-end=\"2212\">\n<li data-section-id=\"x6lsw\" data-start=\"2064\" data-end=\"2120\">\u8010\u9178\u3001\u9e7c\u53ca\u96fb\u6f3f\u74b0\u5883<\/li>\n<li data-section-id=\"1c1d6qm\" data-start=\"2121\" data-end=\"2169\">CVD \/ PVD \/ \u8755\u523b\u5ba4\u7121\u8150\u8755<\/li>\n<li data-section-id=\"1o7zcce\" data-start=\"2170\" data-end=\"2212\">\u5728 SiH\u2084\u3001NH\u2083\u3001HCl \u52a0\u5de5\u6c23\u9ad4\u4e2d\u7a69\u5b9a<\/li>\n<\/ul>\n<hr data-start=\"2214\" data-end=\"2217\" \/>\n<h3 data-section-id=\"14bamzt\" data-start=\"2219\" data-end=\"2252\">\u7121\u78e8\u640d\u4e14\u4f7f\u7528\u58fd\u547d\u9577<\/h3>\n<ul data-start=\"2253\" data-end=\"2380\">\n<li data-section-id=\"10g9b8f\" data-start=\"2253\" data-end=\"2283\">\u7dad\u6c0f\u786c\u5ea6\uff1a ~2800 HV<\/li>\n<li data-section-id=\"14dvdy4\" data-start=\"2284\" data-end=\"2335\">\u9577\u671f\u904b\u4f5c\u7121\u5fae\u7c92\u812b\u843d<\/li>\n<li data-section-id=\"12rqc97\" data-start=\"2336\" data-end=\"2380\">\u512a\u7570\u7684\u8868\u9762\u8010\u4e45\u6027 (Ra &lt; 0.2 \u03bcm)<\/li>\n<\/ul>\n<hr data-start=\"2382\" data-end=\"2385\" \/>\n<h2 data-section-id=\"1xqplm3\" data-start=\"2387\" data-end=\"2418\">\u7d50\u69cb\u8207\u8a2d\u8a08\u7279\u8272<\/h2>\n<h3 data-section-id=\"1nh5g76\" data-start=\"2420\" data-end=\"2457\">\u7cbe\u5bc6\u6676\u5713\u8655\u7406\u5e7e\u4f55<\/h3>\n<p data-start=\"2458\" data-end=\"2467\">\u652f\u63f4\uff1a<\/p>\n<ul data-start=\"2468\" data-end=\"2596\">\n<li data-section-id=\"15tpg53\" data-start=\"2468\" data-end=\"2508\">150 \u516c\u91d0 \/ 200 \u516c\u91d0 \/ 300 \u516c\u91d0 \/ 450 \u516c\u91d0\u6676\u5713<\/li>\n<li data-section-id=\"1rnwp5m\" data-start=\"2509\" data-end=\"2563\">\u908a\u7de3\u6293\u53d6\/\u51f9\u69fd\u5c0d\u9f4a\/\u5e73\u9762\u652f\u6490\u8a2d\u8a08<\/li>\n<li data-section-id=\"qm27un\" data-start=\"2564\" data-end=\"2596\">\u5ba2\u88fd\u5316\u6a5f\u68b0\u624b\u81c2\u6574\u5408<\/li>\n<\/ul>\n<hr data-start=\"2598\" data-end=\"2601\" \/>\n<h3 data-section-id=\"1yw23gm\" data-start=\"2603\" data-end=\"2643\">\u9ad8\u525b\u6027\u8f15\u91cf\u7d50\u69cb<\/h3>\n<ul data-start=\"2644\" data-end=\"2768\">\n<li data-section-id=\"tt3pyh\" data-start=\"2644\" data-end=\"2677\">\u9ad8\u525b\u6027\u91cd\u91cf\u6bd4<\/li>\n<li data-section-id=\"1sb17em\" data-start=\"2678\" data-end=\"2721\">\u9069\u7528\u65bc\u9ad8\u901f\u6a5f\u68b0\u624b\u7cfb\u7d71<\/li>\n<li data-section-id=\"1j6yie2\" data-start=\"2722\" data-end=\"2768\">\u5c07\u904b\u52d5\u6642\u7684\u52d5\u614b\u504f\u79fb\u6e1b\u81f3\u6700\u4f4e<\/li>\n<\/ul>\n<hr data-start=\"2770\" data-end=\"2773\" \/>\n<h3 data-section-id=\"97w9la\" data-start=\"2775\" data-end=\"2809\">\u8d85\u6f54\u6de8\u8868\u9762\u8655\u7406<\/h3>\n<ul data-start=\"2810\" data-end=\"2905\">\n<li data-section-id=\"1lu1i7j\" data-start=\"2810\" data-end=\"2844\">\u7cbe\u5bc6\u7814\u78e8\u8207\u62cb\u5149<\/li>\n<li data-section-id=\"1amctgl\" data-start=\"2845\" data-end=\"2870\">\u4f4e\u8868\u9762\u7c97\u7cd9\u5ea6<\/li>\n<li data-section-id=\"1js4nxo\" data-start=\"2871\" data-end=\"2905\">\u7121\u5875\u5ba4\u76f8\u5bb9\u7d50\u69cb<\/li>\n<\/ul>\n<hr data-start=\"2907\" data-end=\"2910\" \/>\n<h3 data-section-id=\"50i47d\" data-start=\"2912\" data-end=\"2944\">\u5ba2\u88fd\u5316\u5de5\u7a0b\u4ecb\u9762<\/h3>\n<ul data-start=\"2945\" data-end=\"3063\">\n<li data-section-id=\"1dle0c1\" data-start=\"2945\" data-end=\"2981\">\u6a5f\u68b0\u624b\u81c2\u5b89\u88dd\u76f8\u5bb9\u6027<\/li>\n<li data-section-id=\"19fhsyz\" data-start=\"2982\" data-end=\"3018\">AMHS \u7cfb\u7d71\u7684 OEM \u6574\u5408<\/li>\n<li data-section-id=\"3wahd3\" data-start=\"3019\" data-end=\"3063\">\u5ba2\u88fd\u5316\u5b54\u4f4d\u8207\u593e\u5177\u8a2d\u8a08<\/li>\n<\/ul>\n<hr data-start=\"3065\" data-end=\"3068\" \/>\n<h2 data-section-id=\"rb24ym\" data-start=\"3070\" data-end=\"3089\">\u6750\u6599\u9078\u9805<\/h2>\n<h3 data-section-id=\"87v3o9\" data-start=\"3091\" data-end=\"3124\">CVD \u78b3\u5316\u77fd (CVD SiC)<\/h3>\n<ul data-start=\"3125\" data-end=\"3232\">\n<li data-section-id=\"1qjlbs6\" data-start=\"3125\" data-end=\"3146\">\u8d85\u9ad8\u7d14\u5ea6<\/li>\n<li data-section-id=\"1856ohe\" data-start=\"3147\" data-end=\"3198\">\u6700\u9069\u5408 EUV \/ \u5148\u9032\u534a\u5c0e\u9ad4\u88fd\u7a0b<\/li>\n<li data-section-id=\"1lwpzbt\" data-start=\"3199\" data-end=\"3232\">\u8d85\u4f4e\u6c61\u67d3\u6c34\u5e73<\/li>\n<\/ul>\n<hr data-start=\"3234\" data-end=\"3237\" \/>\n<h3 data-section-id=\"gwj4n0\" data-start=\"3239\" data-end=\"3274\">\u71d2\u7d50\u78b3\u5316\u77fd (SSiC)<\/h3>\n<ul data-start=\"3275\" data-end=\"3402\">\n<li data-section-id=\"1hi8oju\" data-start=\"3275\" data-end=\"3312\">\u9ad8\u5f37\u5ea6\u8207\u8010\u78e8\u6027<\/li>\n<li data-section-id=\"1rnk9x7\" data-start=\"3313\" data-end=\"3363\">\u9069\u7528\u65bc\u5de5\u696d\u6676\u5713\u8655\u7406\u7cfb\u7d71<\/li>\n<li data-section-id=\"67fp04\" data-start=\"3364\" data-end=\"3402\">\u5353\u8d8a\u7684\u6027\u50f9\u6bd4\u5e73\u8861<\/li>\n<\/ul>\n<hr data-start=\"3404\" data-end=\"3407\" \/>\n<h2 data-section-id=\"1cgu054\" data-start=\"3409\" data-end=\"3436\">\u6280\u8853\u898f\u683c<\/h2>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"3438\" data-end=\"3888\">\n<thead data-start=\"3438\" data-end=\"3462\">\n<tr data-start=\"3438\" data-end=\"3462\">\n<th class=\"last:pe-10\" data-start=\"3438\" data-end=\"3445\" data-col-size=\"sm\">\u9805\u76ee<\/th>\n<th class=\"last:pe-10\" data-start=\"3445\" data-end=\"3462\" data-col-size=\"sm\">\u898f\u683c<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"3487\" data-end=\"3888\">\n<tr data-start=\"3487\" data-end=\"3516\">\n<td data-start=\"3487\" data-end=\"3498\" data-col-size=\"sm\">\u6750\u8cea<\/td>\n<td data-col-size=\"sm\" data-start=\"3498\" data-end=\"3516\">CVD SiC \/ SSiC<\/td>\n<\/tr>\n<tr data-start=\"3517\" data-end=\"3536\">\n<td data-start=\"3517\" data-end=\"3526\" data-col-size=\"sm\">\u7d14\u6de8<\/td>\n<td data-start=\"3526\" data-end=\"3536\" data-col-size=\"sm\">&gt;99.5%<\/td>\n<\/tr>\n<tr data-start=\"3537\" data-end=\"3561\">\n<td data-start=\"3537\" data-end=\"3550\" data-col-size=\"sm\">\u6676\u7c92\u5c3a\u5bf8<\/td>\n<td data-col-size=\"sm\" data-start=\"3550\" data-end=\"3561\">4-10 \u03bcm<\/td>\n<\/tr>\n<tr data-start=\"3562\" data-end=\"3587\">\n<td data-start=\"3562\" data-end=\"3572\" data-col-size=\"sm\">\u5bc6\u5ea6<\/td>\n<td data-col-size=\"sm\" data-start=\"3572\" data-end=\"3587\">&gt;3.14 g\/cm\u00b3<\/td>\n<\/tr>\n<tr data-start=\"3588\" data-end=\"3611\">\n<td data-start=\"3588\" data-end=\"3599\" data-col-size=\"sm\">\u786c\u5ea6<\/td>\n<td data-col-size=\"sm\" data-start=\"3599\" data-end=\"3611\">~2800 HV<\/td>\n<\/tr>\n<tr data-start=\"3612\" data-end=\"3643\">\n<td data-start=\"3612\" data-end=\"3632\" data-col-size=\"sm\">\u5f4e\u66f2\u5f37\u5ea6<\/td>\n<td data-col-size=\"sm\" data-start=\"3632\" data-end=\"3643\">450 MPa<\/td>\n<\/tr>\n<tr data-start=\"3644\" data-end=\"3673\">\n<td data-start=\"3644\" data-end=\"3662\" data-col-size=\"sm\">\u5f48\u6027\u6a21\u6578<\/td>\n<td data-col-size=\"sm\" data-start=\"3662\" data-end=\"3673\">420 GPa<\/td>\n<\/tr>\n<tr data-start=\"3674\" data-end=\"3710\">\n<td data-start=\"3674\" data-end=\"3697\" data-col-size=\"sm\">\u71b1\u50b3\u5c0e<\/td>\n<td data-col-size=\"sm\" data-start=\"3697\" data-end=\"3710\">160 W\/m-K<\/td>\n<\/tr>\n<tr data-start=\"3711\" data-end=\"3768\">\n<td data-start=\"3711\" data-end=\"3729\" data-col-size=\"sm\">\u6700\u9ad8\u6eab\u5ea6<\/td>\n<td data-col-size=\"sm\" data-start=\"3729\" data-end=\"3768\">1600\u00b0C (\u6c27\u5316) \/ 1950\u00b0C (\u60f0\u6027)<\/td>\n<\/tr>\n<tr data-start=\"3769\" data-end=\"3810\">\n<td data-start=\"3769\" data-end=\"3794\" data-col-size=\"sm\">\u96fb\u963b\u7387<\/td>\n<td data-col-size=\"sm\" data-start=\"3794\" data-end=\"3810\">10\u2076-10\u2078 \u03a9-cm<\/td>\n<\/tr>\n<tr data-start=\"3811\" data-end=\"3851\">\n<td data-start=\"3811\" data-end=\"3828\" data-col-size=\"sm\">\u8868\u9762\u8655\u7406<\/td>\n<td data-col-size=\"sm\" data-start=\"3828\" data-end=\"3851\">\u8d85\u7d30\u7814\u78e8<\/td>\n<\/tr>\n<tr data-start=\"3852\" data-end=\"3888\">\n<td data-start=\"3852\" data-end=\"3859\" data-col-size=\"sm\">\u5c3a\u5bf8<\/td>\n<td data-start=\"3859\" data-end=\"3888\" data-col-size=\"sm\">\u81ea\u8a02 (150-450 \u516c\u91d0\u6676\u5713)<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"3890\" data-end=\"3893\" \/>\n<h2 data-section-id=\"mu966k\" data-start=\"3895\" data-end=\"3910\">\u61c9\u7528<\/h2>\n<h3 data-section-id=\"6yu2ul\" data-start=\"3912\" data-end=\"3943\">\u534a\u5c0e\u9ad4\u88fd\u9020<\/h3>\n<ul data-start=\"3944\" data-end=\"4097\">\n<li data-section-id=\"49bdmt\" data-start=\"3944\" data-end=\"3978\">EUV \u5149\u523b\u6676\u5713\u8655\u7406<\/li>\n<li data-section-id=\"11xdzhh\" data-start=\"3979\" data-end=\"4017\">300mm \u6676\u5713\u6a5f\u68b0\u624b\u81c2\u50b3\u9001\u7cfb\u7d71<\/li>\n<li data-section-id=\"ox84z0\" data-start=\"4018\" data-end=\"4060\">CVD \/ PVD \/ \u8755\u523b\u5ba4\u81ea\u52d5\u5316<\/li>\n<li data-section-id=\"teg2xm\" data-start=\"4061\" data-end=\"4097\">\u96e2\u5b50\u690d\u5165\u6676\u5713\u50b3\u8f38<\/li>\n<\/ul>\n<hr data-start=\"4099\" data-end=\"4102\" \/>\n<h3 data-section-id=\"sf9357\" data-start=\"4104\" data-end=\"4140\">\u5148\u9032\u534a\u5c0e\u9ad4\u6750\u6599<\/h3>\n<ul data-start=\"4141\" data-end=\"4248\">\n<li data-section-id=\"iiuum6\" data-start=\"4141\" data-end=\"4176\">SiC \u529f\u7387\u5143\u4ef6\u6676\u5713\u8655\u7406<\/li>\n<li data-section-id=\"se94ot\" data-start=\"4177\" data-end=\"4211\">GaN \u78ca\u6676\u751f\u7522\u7cfb\u7d71<\/li>\n<li data-section-id=\"3yciq1\" data-start=\"4212\" data-end=\"4248\">\u9ad8\u6eab MOCVD \u88fd\u7a0b<\/li>\n<\/ul>\n<hr data-start=\"4250\" data-end=\"4253\" \/>\n<h3 data-section-id=\"11khwnl\" data-start=\"4255\" data-end=\"4286\">\u592a\u967d\u80fd\u8207 LED \u7522\u696d<\/h3>\n<ul data-start=\"4287\" data-end=\"4389\">\n<li data-section-id=\"q29bxq\" data-start=\"4287\" data-end=\"4319\">\u592a\u967d\u80fd\u6676\u5713\u81ea\u52d5\u5316\u7dda<\/li>\n<li data-section-id=\"10mww1v\" data-start=\"4320\" data-end=\"4361\">Micro-LED \/ Mini-LED \u50b3\u8f38\u7cfb\u7d71<\/li>\n<li data-section-id=\"dp5vhg\" data-start=\"4362\" data-end=\"4389\">\u85cd\u5bf6\u77f3\u6676\u5713\u8655\u7406<\/li>\n<\/ul>\n<hr data-start=\"4391\" data-end=\"4394\" \/>\n<h3 data-section-id=\"j366yc\" data-start=\"4396\" data-end=\"4428\">\u81ea\u52d5\u5316\u8207\u6a5f\u5668\u4eba (AMHS)<\/h3>\n<ul data-start=\"4429\" data-end=\"4533\">\n<li data-section-id=\"fpj2it\" data-start=\"4429\" data-end=\"4459\">\u6676\u5713\u8f38\u9001\u6a5f\u68b0\u624b\u81c2<\/li>\n<li data-section-id=\"e4e8u3\" data-start=\"4460\" data-end=\"4492\">\u7121\u5875\u5ba4\u81ea\u52d5\u5316\u7cfb\u7d71<\/li>\n<li data-section-id=\"k0rhy6\" data-start=\"4493\" data-end=\"4533\">\u9ad8\u901f\u7269\u6599\u8655\u7406\u7cfb\u7d71<\/li>\n<\/ul>\n<hr data-start=\"4535\" data-end=\"4538\" \/>\n<h3 data-section-id=\"1c5bbdr\" data-start=\"4540\" data-end=\"4573\">\u7814\u7a76\u8207\u9ad8\u7aef\u8a2d\u5099<\/h3>\n<ul data-start=\"4574\" data-end=\"4679\">\n<li data-section-id=\"1sbej07\" data-start=\"4574\" data-end=\"4604\">\u91cf\u5b50\u88dd\u7f6e\u88fd\u9020<\/li>\n<li data-section-id=\"5u37w7\" data-start=\"4605\" data-end=\"4641\">\u4f4e\u6eab\u6676\u5713\u8655\u7406\u7cfb\u7d71<\/li>\n<li data-section-id=\"i12e24\" data-start=\"4642\" data-end=\"4679\">\u5148\u9032\u5c01\u88dd (3D IC \/ MEMS)<\/li>\n<\/ul>\n<hr data-start=\"4681\" data-end=\"4684\" \/>\n<h2 data-section-id=\"vm5qii\" data-start=\"4686\" data-end=\"4715\">\u7522\u54c1\u512a\u52e2\u6458\u8981<\/h2>\n<ul data-start=\"4717\" data-end=\"4996\">\n<li data-section-id=\"r4wmoo\" data-start=\"4717\" data-end=\"4750\">\u96f6\u91d1\u5c6c\u6c61\u67d3\u98a8\u96aa<\/li>\n<li data-section-id=\"w80eyq\" data-start=\"4751\" data-end=\"4797\">\u8d85\u9ad8\u525b\u6027\uff0c\u7cbe\u6e96\u64cd\u63a7<\/li>\n<li data-section-id=\"ovhb2l\" data-start=\"4798\" data-end=\"4842\">\u512a\u7570\u7684\u71b1\u7a69\u5b9a\u6027\u548c\u5316\u5b78\u7a69\u5b9a\u6027<\/li>\n<li data-section-id=\"1pry50x\" data-start=\"4843\" data-end=\"4878\">\u4f7f\u7528\u58fd\u547d\u9577\uff0c\u78e8\u640d\u6975\u5c0f<\/li>\n<li data-section-id=\"16clm2x\" data-start=\"4879\" data-end=\"4919\">\u8207\u7121\u5875\u5ba4\u81ea\u52d5\u5316\u76f8\u5bb9<\/li>\n<li data-section-id=\"1usfebt\" data-start=\"4920\" data-end=\"4956\">\u53ef\u91dd\u5c0d\u6240\u6709\u6676\u5713\u5c3a\u5bf8\u5ba2\u88fd\u5316<\/li>\n<li data-section-id=\"whnxc2\" data-start=\"4957\" data-end=\"4996\">\u9069\u7528\u65bc EUV \u548c\u5148\u9032\u7bc0\u9ede<\/li>\n<\/ul>\n<hr data-start=\"4998\" data-end=\"5001\" \/>\n<h2 data-section-id=\"rnyyeg\" data-start=\"5003\" data-end=\"5027\">\u5ba2\u88fd\u5316\u9078\u9805<img decoding=\"async\" class=\"size-medium wp-image-2102 alignright\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2-300x300.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2-150x150.png 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2-768x768.png 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2-12x12.png 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2-600x600.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2-100x100.png 100w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/h2>\n<p data-start=\"5029\" data-end=\"5067\">\u6211\u5011\u652f\u63f4\u5b8c\u6574\u7684 OEM\/ODM \u5ba2\u88fd\u5316\u670d\u52d9\uff1a<\/p>\n<ul data-start=\"5069\" data-end=\"5319\">\n<li data-section-id=\"pzy3qt\" data-start=\"5069\" data-end=\"5127\">\u672b\u7aef\u6548\u61c9\u5668\u7684\u5e7e\u4f55\u5f62\u72c0 (\u5e73\u9762\/\u908a\u7de3\u6293\u53d6\/\u51f9\u69fd\u5c0d\u9f4a)<\/li>\n<li data-section-id=\"173oufn\" data-start=\"5128\" data-end=\"5168\">\u6676\u5713\u5c3a\u5bf8\u76f8\u5bb9\u6027 (150-450 \u516c\u91d0)<\/li>\n<li data-section-id=\"1sh3bgb\" data-start=\"5169\" data-end=\"5195\">\u6a5f\u5668\u4eba\u4ecb\u9762\u8a2d\u8a08<\/li>\n<li data-section-id=\"1ma3ck\" data-start=\"5196\" data-end=\"5252\">\u8868\u9762\u5857\u5c64\uff08\u6297\u975c\u96fb\/\u758f\u6c34\u53ef\u9078\uff09<\/li>\n<li data-section-id=\"7mw706\" data-start=\"5253\" data-end=\"5289\">\u7cbe\u5bc6\u516c\u5dee\u6700\u4f73\u5316<\/li>\n<li data-section-id=\"w4j63d\" data-start=\"5290\" data-end=\"5319\">\u7121\u5875\u5ba4\u7b49\u7d1a\u8868\u9762\u8655\u7406<\/li>\n<\/ul>\n<hr data-start=\"5321\" data-end=\"5324\" \/>\n<h2 data-section-id=\"1hryhf7\" data-start=\"5326\" data-end=\"5332\">\u5e38\u898b\u554f\u984c<\/h2>\n<h3 data-section-id=\"1mpzh4o\" data-start=\"5334\" data-end=\"5384\">Q1: \u70ba\u4ec0\u9ebc\u4f7f\u7528 SiC \u800c\u4e0d\u662f\u92c1\u6216\u77f3\u82f1\uff1f<\/h3>\n<ul data-start=\"5385\" data-end=\"5556\">\n<li data-section-id=\"1xvhlf0\" data-start=\"5385\" data-end=\"5437\">\u92c1\uff1a\u5fae\u7c92\u751f\u6210 + \u6c27\u5316\u554f\u984c<\/li>\n<li data-section-id=\"1q7gghy\" data-start=\"5438\" data-end=\"5489\">\u77f3\u82f1\uff1a\u6613\u788e + \u6297\u71b1\u9707\u6027\u5dee<\/li>\n<li data-section-id=\"vgt2b3\" data-start=\"5490\" data-end=\"5556\">SiC\uff1a\u525b\u6027\u3001\u6f54\u6de8\u5ea6\u548c\u8010\u7528\u6027\u7684\u6700\u4f73\u7d44\u5408<\/li>\n<\/ul>\n<hr data-start=\"5558\" data-end=\"5561\" \/>\n<h3 data-section-id=\"1cxfupn\" data-start=\"5563\" data-end=\"5599\">Q2: \u80fd\u5426\u652f\u63f4 450mm \u6676\u5713\uff1f<\/h3>\n<p data-start=\"5600\" data-end=\"5667\">\u662f\u7684\uff0c\u53ef\u70ba 450mm \u6676\u5713\u8655\u7406\u7cfb\u7d71\u63d0\u4f9b\u5ba2\u88fd\u5316\u8a2d\u8a08\u3002.<\/p>\n<hr data-start=\"5669\" data-end=\"5672\" \/>\n<h3 data-section-id=\"a4nxop\" data-start=\"5674\" data-end=\"5717\">Q3: \u662f\u5426\u9069\u5408 EUV \u5149\u523b\uff1f<\/h3>\n<p data-start=\"5718\" data-end=\"5803\">SiC \u672b\u7aef\u57f7\u884c\u5668\u7b26\u5408\u8d85\u4f4e\u5fae\u7c92\u548c\u771f\u7a7a\u76f8\u5bb9\u6027\u8981\u6c42\u3002.<\/p>\n<hr data-start=\"5805\" data-end=\"5808\" \/>\n<h3 data-section-id=\"1ajqsm3\" data-start=\"5810\" data-end=\"5872\">Q4: \u662f\u5426\u53ef\u5728\u771f\u7a7a\u548c\u9ad8\u6eab\u7cfb\u7d71\u4e2d\u4f7f\u7528\uff1f<\/h3>\n<p data-start=\"5873\" data-end=\"5951\">SiC \u53ef\u5728\u771f\u7a7a\u3001\u96fb\u6f3f\u548c\u9ad8\u6eab\u74b0\u5883\u4e2d\u7a69\u5b9a\u767c\u63ee\u6027\u80fd\u3002.<\/p>","protected":false},"excerpt":{"rendered":"<p>The Silicon Carbide (SiC) Ceramic End Effector is a high-precision wafer handling component designed for semiconductor automation systems, including wafer transfer robots, AMHS systems, EUV lithography equipment, and high-temperature process tools. Made from high-purity CVD SiC or engineered SSiC, this end effector delivers exceptional rigidity, ultra-low particle generation, and outstanding thermal and chemical stability. It [&hellip;]<\/p>\n","protected":false},"featured_media":2104,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}}},"product_brand":[],"product_cat":[23],"product_tag":[192,191,190,193,194,195,188,104,189,187],"class_list":["post-2100","product","type-product","status-publish","has-post-thumbnail","product_cat-silicon-carbide-sic","product_tag-300mm-wafer-robot-arm","product_tag-amhs-wafer-transfer-tool","product_tag-cvd-sic-end-effector","product_tag-euv-wafer-handling-component","product_tag-high-precision-ceramic-end-effector","product_tag-semiconductor-automation-parts","product_tag-semiconductor-robot-arm","product_tag-sic-ceramic-end-effector","product_tag-silicon-carbide-wafer-handler","product_tag-wafer-handling-end-effector","desktop-align-left","tablet-align-left","mobile-align-left","first","instock","shipping-taxable","product-type-simple"],"_links":{"self":[{"href":"https:\/\/www.xkh-ceramics.com\/zh\/wp-json\/wp\/v2\/product\/2100","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.xkh-ceramics.com\/zh\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/www.xkh-ceramics.com\/zh\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/zh\/wp-json\/wp\/v2\/comments?post=2100"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/zh\/wp-json\/wp\/v2\/media\/2104"}],"wp:attachment":[{"href":"https:\/\/www.xkh-ceramics.com\/zh\/wp-json\/wp\/v2\/media?parent=2100"}],"wp:term":[{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/zh\/wp-json\/wp\/v2\/product_brand?post=2100"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/zh\/wp-json\/wp\/v2\/product_cat?post=2100"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/zh\/wp-json\/wp\/v2\/product_tag?post=2100"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}