{"id":2266,"date":"2026-05-19T06:27:35","date_gmt":"2026-05-19T06:27:35","guid":{"rendered":"https:\/\/www.xkh-ceramics.com\/?p=2266"},"modified":"2026-05-19T06:28:27","modified_gmt":"2026-05-19T06:28:27","slug":"advanced-ceramic-materials-in-semiconductor-equipment-applications-material-comparison","status":"publish","type":"post","link":"https:\/\/www.xkh-ceramics.com\/zh\/advanced-ceramic-materials-in-semiconductor-equipment-applications-material-comparison\/","title":{"rendered":"\u534a\u5c0e\u9ad4\u8a2d\u5099\u4e2d\u7684\u5148\u9032\u9676\u74f7\u6750\u6599\uff1a\u61c9\u7528\u8207\u6750\u6599\u6bd4\u8f03"},"content":{"rendered":"<p class=\"wp-block-paragraph\">\u5728\u73fe\u4ee3\u534a\u5c0e\u9ad4\u88fd\u9020\u8a2d\u5099\u4e2d\uff0c\u5148\u9032\u9676\u74f7\u4e0d\u518d\u662f\u53ef\u6709\u53ef\u65e0\u7684\u5143\u4ef6\uff0c\u800c\u662f\u6c7a\u5b9a\u7cbe\u78ba\u5ea6\u3001\u7a69\u5b9a\u6027\u548c\u88fd\u7a0b\u53ef\u9760\u6027\u7684\u95dc\u9375\u6027\u4f7f\u80fd\u6750\u6599\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u5f9e\u7b49\u96e2\u5b50\u8755\u523b\u5ba4\u5230\u6676\u5713\u8655\u7406\u7cfb\u7d71\uff0c\u4e0d\u540c\u7684\u9676\u74f7\u6750\u6599\u90fd\u662f\u6839\u64da\u71b1\u3001\u96fb\u548c\u6a5f\u68b0\u6027\u80fd\u8981\u6c42\u4f86\u9078\u64c7\u7684\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u672c\u6587\u5c07\u4ecb\u7d39\u6700\u5ee3\u6cdb\u4f7f\u7528\u7684\u534a\u5c0e\u9ad4\u7d1a\u9676\u74f7\uff0c\u4e26\u63d0\u4f9b\u660e\u78ba\u7684\u6280\u8853\u6bd4\u8f03\uff0c\u4ee5\u4f9b\u5de5\u7a0b\u8207\u63a1\u8cfc\u6c7a\u7b56\u53c3\u8003\u3002.<\/p>\n\n\n\n<figure class=\"wp-block-image aligncenter size-full\"><img fetchpriority=\"high\" decoding=\"async\" width=\"800\" height=\"800\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/pl209530651-silicon_carbide_ceramic_tray_for_semiconductor_wafer_processing_\u526f\u672c.jpg\" alt=\"\" class=\"wp-image-2267\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/pl209530651-silicon_carbide_ceramic_tray_for_semiconductor_wafer_processing_\u526f\u672c.jpg 800w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/pl209530651-silicon_carbide_ceramic_tray_for_semiconductor_wafer_processing_\u526f\u672c-300x300.jpg 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/pl209530651-silicon_carbide_ceramic_tray_for_semiconductor_wafer_processing_\u526f\u672c-150x150.jpg 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/pl209530651-silicon_carbide_ceramic_tray_for_semiconductor_wafer_processing_\u526f\u672c-768x768.jpg 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/pl209530651-silicon_carbide_ceramic_tray_for_semiconductor_wafer_processing_\u526f\u672c-12x12.jpg 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/pl209530651-silicon_carbide_ceramic_tray_for_semiconductor_wafer_processing_\u526f\u672c-600x600.jpg 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/pl209530651-silicon_carbide_ceramic_tray_for_semiconductor_wafer_processing_\u526f\u672c-100x100.jpg 100w\" sizes=\"(max-width: 800px) 100vw, 800px\" \/><\/figure>\n\n\n\n<h2 class=\"wp-block-heading\">1.\u70ba\u4f55\u9676\u74f7\u5728\u534a\u5c0e\u9ad4\u8a2d\u5099\u4e2d\u4e0d\u53ef\u6216\u7f3a<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u534a\u5c0e\u9ad4\u751f\u7522\u74b0\u5883\u6d89\u53ca\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u6975\u7aef\u6eab\u5ea6 (\u9ad8\u9054 1000\u00b0C+)<\/li>\n\n\n\n<li>\u96fb\u6f3f\u8150\u8755\u74b0\u5883<\/li>\n\n\n\n<li>\u8d85\u9ad8\u771f\u7a7a\u7cfb\u7d71<\/li>\n\n\n\n<li>\u9ad8\u58d3\u96fb\u72c0\u614b<\/li>\n\n\n\n<li>\u5948\u7c73\u7d1a\u7cbe\u5ea6\u9700\u6c42<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u50b3\u7d71\u91d1\u5c6c\u5728\u7d55\u7de3\u6027\u3001\u8010\u8150\u8755\u6027\u6216\u71b1\u7a69\u5b9a\u6027\u65b9\u9762\u90fd\u6709\u7f3a\u9677\u3002\u5148\u9032\u9676\u74f7\u89e3\u6c7a\u4e86\u9019\u4e9b\u9650\u5236\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">2.\u6700\u5ee3\u6cdb\u4f7f\u7528\u7684\u9676\u74f7\u6750\u6599<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">2.1 \u6c27\u5316\u92c1 (Al\u2082O\u2083) - \u696d\u754c\u6a19\u6e96\u6750\u6599<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u6c27\u5316\u92c1\u9676\u74f7\u662f\u4f7f\u7528\u6700\u5ee3\u6cdb\u7684\u6750\u6599\uff0c\u7d04\u4f54\u9676\u74f7\u751f\u7522\u7e3d\u91cf\u7684 <strong>\u534a\u5c0e\u9ad4\u9676\u74f7\u61c9\u7528\u7684 45%<\/strong>.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>\u4e3b\u8981\u61c9\u7528\uff1a<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u8755\u523b\u5ba4\u5167\u896f<\/li>\n\n\n\n<li>\u6676\u5713\u652f\u6490\u74b0<\/li>\n\n\n\n<li>\u914d\u6c23\u76e4<\/li>\n\n\n\n<li>\u771f\u7a7a\u5438\u76e4<\/li>\n\n\n\n<li>CMP \u7814\u78e8\u5143\u4ef6<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>\u4e3b\u8981\u512a\u52e2\uff1a<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u7a69\u5b9a\u7684\u96fb\u6c23\u7d55\u7de3<\/li>\n\n\n\n<li>\u826f\u597d\u7684\u8010\u71b1\u6027<\/li>\n\n\n\n<li>\u5177\u6210\u672c\u6548\u76ca\u7684\u5927\u91cf\u751f\u7522<\/li>\n\n\n\n<li>\u6210\u719f\u7684\u52a0\u5de5\u6280\u8853<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">2.2 Yttria (Y\u2082O\u2083) - \u6297\u96fb\u6f3f\u9676\u74f7<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u7531\u65bc\u91d3\u6c27\u819c\u5177\u6709\u512a\u7570\u7684\u8010\u8150\u8755\u6027\uff0c\u56e0\u6b64\u88ab\u5ee3\u6cdb\u61c9\u7528\u65bc\u96fb\u6f3f\u5bc6\u96c6\u7684\u74b0\u5883\u4e2d\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>\u4e3b\u8981\u61c9\u7528\uff1a<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u8755\u523b\u5ba4\u5857\u5c64<\/li>\n\n\n\n<li>\u5149\u5b78\u8996\u7a97<\/li>\n\n\n\n<li>\u9762\u5411\u7b49\u96e2\u5b50\u9ad4\u7684\u5143\u4ef6<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>\u4e3b\u8981\u512a\u52e2\uff1a<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u8207 Al\u2082O\u2083 \u76f8\u6bd4\uff0c\u5177\u6709\u512a\u7570\u7684\u8010\u96fb\u6f3f\u8150\u8755\u6027<\/li>\n\n\n\n<li>\u9ad8\u7194\u9ede (~2430\u00b0C)<\/li>\n\n\n\n<li>\u901a\u5e38\u7528\u4f5c\u5857\u5c64\u4ee5\u964d\u4f4e\u6210\u672c<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">2.3 \u78b3\u5316\u77fd (SiC) - \u9ad8\u7cbe\u5bc6\u7d50\u69cb\u9676\u74f7<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u78b3\u5316\u77fd\u5177\u6709\u5353\u8d8a\u7684\u525b\u6027\u548c\u71b1\u7a69\u5b9a\u6027\uff0c\u662f\u7cbe\u5bc6\u8a2d\u5099\u7684\u7406\u60f3\u9078\u64c7\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>\u4e3b\u8981\u61c9\u7528\uff1a<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u5149\u523b\u6a5f\u5e73\u53f0<\/li>\n\n\n\n<li>\u5c0d\u7126\u74b0<\/li>\n\n\n\n<li>\u7cbe\u5bc6\u5c0e\u8ecc<\/li>\n\n\n\n<li>\u6676\u7247\u593e\u982d\u548c\u93e1\u5b50<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>\u4e3b\u8981\u512a\u52e2\uff1a<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u6975\u9ad8\u7684\u525b\u6027<\/li>\n\n\n\n<li>\u4f4e\u71b1\u81a8\u8139<\/li>\n\n\n\n<li>\u512a\u7570\u7684\u71b1\u50b3\u5c0e\u6027<\/li>\n\n\n\n<li>\u53ef\u62cb\u93e1\u9762<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">2.4 \u6c2e\u5316\u77fd (Si\u2083N\u2084) - \u9ad8\u53ef\u9760\u6027\u5de5\u7a0b\u9676\u74f7<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u6c2e\u5316\u77fd\u4ee5\u5176\u512a\u7570\u7684\u6a5f\u68b0\u5f37\u5ea6\u548c\u6297\u71b1\u9707\u6027\u8457\u7a31\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>\u4e3b\u8981\u61c9\u7528\uff1a<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u8ef8\u627f<\/li>\n\n\n\n<li>\u7dda\u6027\u6ed1\u8ecc\u7cfb\u7d71<\/li>\n\n\n\n<li>\u6a5f\u68b0\u624b\u81c2<\/li>\n\n\n\n<li>\u9ad8\u8ca0\u8377\u7d50\u69cb\u96f6\u4ef6<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>\u4e3b\u8981\u512a\u52e2\uff1a<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u9ad8\u65b7\u88c2\u97cc\u6027<\/li>\n\n\n\n<li>\u512a\u7570\u7684\u6297\u71b1\u9707\u6027<\/li>\n\n\n\n<li>\u9ad8\u6eab\u4e0b\u6027\u80fd\u7a69\u5b9a\uff08\u9ad8\u9054 1200\u00b0C+\uff09<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">2.5 \u6c2e\u5316\u92c1 (AlN) - \u65b0\u4e00\u4ee3\u71b1\u9676\u74f7<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u7531\u65bc AlN \u5177\u6709\u71b1\u50b3\u5c0e\u512a\u52e2\uff0c\u56e0\u6b64\u5728\u9ad8\u529f\u7387\u534a\u5c0e\u9ad4\u7cfb\u7d71\u4e2d\u7684\u61c9\u7528\u8d8a\u4f86\u8d8a\u591a\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>\u4e3b\u8981\u61c9\u7528\uff1a<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u975c\u96fb\u593e\u982d (ESC)<\/li>\n\n\n\n<li>\u9ad8\u529f\u7387\u96fb\u5b50\u57fa\u677f<\/li>\n\n\n\n<li>\u5c04\u983b\u548c\u96fb\u6e90\u6a21\u7d44<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>\u4e3b\u8981\u512a\u52e2\uff1a<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u9ad8\u5c0e\u71b1\u6027 (\u9060\u9ad8\u65bc Al\u2082O\u2083)<\/li>\n\n\n\n<li>\u7d55\u4f73\u7684\u96fb\u6c23\u7d55\u7de3\u6027<\/li>\n\n\n\n<li>\u6e1b\u5c11\u71b1\u61c9\u529b\u932f\u914d<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">3.\u6280\u8853\u6bd4\u8f03\u8868<\/h2>\n\n\n\n<figure class=\"wp-block-table\"><table class=\"has-fixed-layout\"><thead><tr><th>\u6750\u8cea<\/th><th>\u71b1\u50b3\u5c0e\u7387 (W\/m-K)<\/th><th>\u96fb\u6c23\u7d55\u7de3<\/th><th>\u6297\u71b1\u885d\u64ca<\/th><th>\u96fb\u6f3f\u963b\u6297<\/th><th>\u4e3b\u8981\u4f7f\u7528\u500b\u6848<\/th><\/tr><\/thead><tbody><tr><td>Al\u2082O\u2083 (\u6c27\u5316\u92c1)<\/td><td>20-30<\/td><td>\u6975\u4f73<\/td><td>\u4e2d\u578b<\/td><td>\u4e2d\u578b<\/td><td>\u4e00\u822c\u7d50\u69cb\u96f6\u4ef6<\/td><\/tr><tr><td>Y\u2082O\u2083 (\u91d3\u8cf4)<\/td><td>10-15<\/td><td>\u6975\u4f73<\/td><td>\u826f\u597d<\/td><td>\u6975\u4f73<\/td><td>\u7b49\u96e2\u5b50\u5ba4\u5857\u5c64<\/td><\/tr><tr><td>SiC\uff08\u78b3\u5316\u77fd\uff09<\/td><td>120-200<\/td><td>\u826f\u597d<\/td><td>\u6975\u4f73<\/td><td>\u826f\u597d<\/td><td>\u7cbe\u5bc6\u7d50\u69cb\u96f6\u4ef6<\/td><\/tr><tr><td>Si\u2083N\u2084\uff08\u6c2e\u5316\u77fd\uff09<\/td><td>20-90<\/td><td>\u826f\u597d<\/td><td>\u6975\u4f73<\/td><td>\u826f\u597d<\/td><td>\u8ef8\u627f\u8207\u6a5f\u68b0\u7cfb\u7d71<\/td><\/tr><tr><td>AlN\uff08\u6c2e\u5316\u92c1\uff09<\/td><td>140-180<\/td><td>\u6975\u4f73<\/td><td>\u826f\u597d<\/td><td>\u4e2d\u578b<\/td><td>\u71b1\u7ba1\u7406 (ESC)<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<h2 class=\"wp-block-heading\">4.\u534a\u5c0e\u9ad4\u8a2d\u5099\u61c9\u7528\u5716<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">\u524d\u7aef\u88fd\u7a0b\u8a2d\u5099<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u8755\u523b\u5ba4 \u2192 Al\u2082O\u2083 \/ Y\u2082O\u2083<\/li>\n\n\n\n<li>\u6c89\u7a4d\u7cfb\u7d71 \u2192 Al\u2082O\u2083 \/ SiC<\/li>\n\n\n\n<li>\u96fb\u6f3f\u74b0\u5883 \u2192 Y\u2082O\u2083 \u934d\u819c<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">\u6676\u5713\u8655\u7406\u7cfb\u7d71<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u6a5f\u68b0\u624b\u81c2 \u2192 Si\u2083N\u2084 \/ SiC<\/li>\n\n\n\n<li>\u771f\u7a7a\u5438\u76e4 \u2192 Al\u2082O\u2083 \/ AlN<\/li>\n\n\n\n<li>\u5c0e\u8ecc \u2192 SiC \/ Si\u2083N\u2084<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">\u71b1\u7ba1\u7406\u7cfb\u7d71<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>ESC\uff08\u975c\u96fb\u593e\u982d\uff09\u2192 AlN \/ Al\u2082O\u2083<\/li>\n\n\n\n<li>\u6563\u71b1\u5668 \u2192 AlN<\/li>\n\n\n\n<li>\u7cbe\u5bc6\u51b7\u537b\u677f \u2192 Al\u2082O\u2083 \/ SiC<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">5.\u6750\u6599\u9078\u64c7\u6307\u5357\uff08\u5de5\u7a0b\u8996\u5716\uff09<\/h2>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u6210\u672c\u654f\u611f\u578b\u61c9\u7528 \u2192 Al\u2082O\u2083<\/strong><\/li>\n\n\n\n<li><strong>\u96fb\u6f3f\u8150\u8755\u74b0\u5883 \u2192 Y\u2082O\u2083<\/strong><\/li>\n\n\n\n<li><strong>\u9ad8\u7cbe\u5bc6\u7d50\u69cb \u2192 SiC<\/strong><\/li>\n\n\n\n<li><strong>\u6a5f\u68b0\u8ca0\u8377\u8207\u8010\u4e45\u6027 \u2192 Si\u2083N\u2084<\/strong><\/li>\n\n\n\n<li><strong>\u9ad8\u71b1\u8017\u6563 \u2192 AlN<\/strong><\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">6.\u672a\u4f86\u8da8\u52e2\uff1a\u6df7\u5408\u9676\u74f7\u7cfb\u7d71<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u4e0b\u4e00\u4ee3\u534a\u5c0e\u9ad4\u8a2d\u5099\u6b63\u671d\u5411\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u5857\u5c64\u9676\u74f7\u7cfb\u7d71 (Al\u2082O\u2083 + Y\u2082O\u2083)<\/li>\n\n\n\n<li>SiC \u7d50\u69cb\u5e73\u53f0<\/li>\n\n\n\n<li>AlN \u71b1\u7ba1\u7406\u6574\u5408<\/li>\n\n\n\n<li>\u591a\u6750\u8cea\u6df7\u5408\u9676\u74f7\u7d44\u4ef6<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u9019\u4e00\u8da8\u52e2\u986f\u8457\u63d0\u9ad8\u4e86\u8a2d\u5099\u7684\u4f7f\u7528\u58fd\u547d\u548c\u88fd\u7a0b\u7a69\u5b9a\u6027\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">\u7e3d\u7d50<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u5148\u9032\u9676\u74f7\u5df2\u6210\u70ba\u534a\u5c0e\u9ad4\u88fd\u9020\u8a2d\u5099\u7684\u9aa8\u5e79\u3002\u6bcf\u7a2e\u6750\u6599\u90fd\u626e\u6f14\u8457\u7279\u6b8a\u7684\u89d2\u8272 - \u5f9e\u7d50\u69cb\u652f\u63f4\u5230\u6297\u96fb\u6f3f\u548c\u71b1\u80fd\u7ba1\u7406\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u9078\u64c7\u6b63\u78ba\u7684\u9676\u74f7\u6750\u6599\u6703\u76f4\u63a5\u5f71\u97ff\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u8a2d\u5099\u58fd\u547d<\/li>\n\n\n\n<li>\u88fd\u7a0b\u7a69\u5b9a\u6027<\/li>\n\n\n\n<li>\u7522\u91cf\u7387<\/li>\n\n\n\n<li>\u7dad\u8b77\u6210\u672c<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">\u8acb\u6c42 <a href=\"https:\/\/www.xkh-ceramics.com\/zh\/%e7%94%a2%e5%93%81\/\"><mark style=\"background-color:rgba(0, 0, 0, 0);color:#0693e3\" class=\"has-inline-color\">\u5ba2\u88fd\u5316\u9676\u74f7\u5143\u4ef6<\/mark><\/a><\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u6211\u5011\u63d0\u4f9b<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u6c27\u5316\u92c1\u9676\u74f7\u96f6\u4ef6 (Al\u2082O\u2083)<\/li>\n\n\n\n<li>\u78b3\u5316\u77fd\u7cbe\u5bc6\u96f6\u4ef6 (SiC)<\/li>\n\n\n\n<li>\u6c2e\u5316\u77fd\u7d50\u69cb\u96f6\u4ef6 (Si\u2083N\u2084)<\/li>\n\n\n\n<li>\u6c2e\u5316\u92c1\u71b1\u57fa\u677f (AlN)<\/li>\n\n\n\n<li>\u91d3\u6c27\u819c\u6eb6\u6db2 (Y\u2082O\u2083)<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\ud83d\udc49\u53ef\u63d0\u4f9b\u5ba2\u88fd\u5c3a\u5bf8\u3001\u52a0\u5de5\u3001\u62cb\u5149\u3001\u5857\u5c64\u548c\u5de5\u7a0b\u652f\u63f4\u3002.<\/p>","protected":false},"excerpt":{"rendered":"<p>In modern semiconductor manufacturing equipment, advanced ceramics are no longer optional components\u2014they are critical enabling materials that determine precision, stability, and process reliability. From plasma etching chambers to wafer handling systems, different ceramic materials are selected based on thermal, electrical, and mechanical performance requirements. This article introduces the most widely used semiconductor-grade ceramics and provides [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":2267,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[3],"tags":[469,465,466,472,460,470,464,459,84,463,471,310,251,303,468,461,322,462,467],"class_list":["post-2266","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-industry-news","tag-advanced-ceramic-materials","tag-alumina-ceramic-al2o3","tag-aluminum-nitride-aln","tag-ceramic-comparison-table","tag-electrical-insulation-ceramics","tag-esc-ceramic-chuck","tag-etching-chamber-ceramics","tag-high-temperature-ceramics","tag-high-thermal-conductivity-ceramics","tag-industrial-technical-ceramics","tag-plasma-resistant-ceramics","tag-precision-ceramic-components","tag-semiconductor-ceramics","tag-semiconductor-equipment-materials","tag-semiconductor-manufacturing-materials","tag-silicon-carbide-sic","tag-silicon-nitride-si3n4","tag-wafer-processing-materials","tag-yttria-y2o3"],"_links":{"self":[{"href":"https:\/\/www.xkh-ceramics.com\/zh\/wp-json\/wp\/v2\/posts\/2266","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.xkh-ceramics.com\/zh\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.xkh-ceramics.com\/zh\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/zh\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/zh\/wp-json\/wp\/v2\/comments?post=2266"}],"version-history":[{"count":2,"href":"https:\/\/www.xkh-ceramics.com\/zh\/wp-json\/wp\/v2\/posts\/2266\/revisions"}],"predecessor-version":[{"id":2270,"href":"https:\/\/www.xkh-ceramics.com\/zh\/wp-json\/wp\/v2\/posts\/2266\/revisions\/2270"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/zh\/wp-json\/wp\/v2\/media\/2267"}],"wp:attachment":[{"href":"https:\/\/www.xkh-ceramics.com\/zh\/wp-json\/wp\/v2\/media?parent=2266"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/zh\/wp-json\/wp\/v2\/categories?post=2266"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/zh\/wp-json\/wp\/v2\/tags?post=2266"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}