{"id":2147,"date":"2026-05-13T06:33:09","date_gmt":"2026-05-13T06:33:09","guid":{"rendered":"https:\/\/www.xkh-ceramics.com\/?p=2147"},"modified":"2026-05-13T06:33:09","modified_gmt":"2026-05-13T06:33:09","slug":"%e5%8d%8a%e5%b0%8e%e9%ab%94%e8%a8%ad%e5%82%99%e5%8a%9f%e8%83%bd%e7%b5%90%e6%a7%8b%e5%92%8c%e5%85%88%e9%80%b2%e6%87%89%e7%94%a8%e4%b8%ad%e7%9a%84%e6%b0%a7%e5%8c%96%e9%8b%81%e9%99%b6%e7%93%b7%e5%85%83","status":"publish","type":"post","link":"https:\/\/www.xkh-ceramics.com\/zh\/alumina-ceramic-components-in-semiconductor-equipment-functions-structures-and-advanced-applications\/","title":{"rendered":"\u534a\u5c0e\u9ad4\u8a2d\u5099\u4e2d\u7684\u6c27\u5316\u92c1\u9676\u74f7\u5143\u4ef6\uff1a\u529f\u80fd\u3001\u7d50\u69cb\u548c\u5148\u9032\u61c9\u7528"},"content":{"rendered":"<p class=\"wp-block-paragraph\">\u96a8\u8457\u534a\u5c0e\u9ad4\u88dd\u7f6e\u6301\u7e8c\u671d\u5411\u66f4\u5c0f\u7684\u7bc0\u9ede\u3001\u66f4\u9ad8\u7684\u6574\u5408\u5bc6\u5ea6\u548c\u66f4\u9ad8\u7684\u52a0\u5de5\u7cbe\u5ea6\u767c\u5c55\uff0c\u534a\u5c0e\u9ad4\u8a2d\u5099\u5167\u90e8\u5c0d\u8d85\u6f54\u6de8\u3001\u8010\u71b1\u548c\u96fb\u6f3f\u7a69\u5b9a\u6750\u6599\u7684\u9700\u6c42\u4e5f\u5927\u5e45\u589e\u52a0\u3002\u5728\u5148\u9032\u5de5\u7a0b\u9676\u74f7\u4e2d\uff0c\u9ad8\u7d14\u5ea6\u6c27\u5316\u92c1\u9676\u74f7 (Al\u2082O\u2083) \u4ecd\u662f\u534a\u5c0e\u9ad4\u88fd\u9020\u7cfb\u7d71\u4e2d\u4f7f\u7528\u6700\u5ee3\u6cdb\u7684\u6750\u6599\u4e4b\u4e00\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u5f9e\u7b49\u96e2\u5b50\u8755\u523b\u5ba4\u5230\u6676\u5713\u8655\u7406\u7cfb\u7d71\u548c\u71b1\u8655\u7406\u8a2d\u5099\uff0c\u6c27\u5316\u92c1\u9676\u74f7\u5143\u4ef6\u5728\u56b4\u82db\u7684\u4f5c\u696d\u689d\u4ef6\u4e0b\u63d0\u4f9b\u7d55\u4f73\u7684\u96fb\u7d55\u7de3\u6027\u3001\u6a5f\u68b0\u7a69\u5b9a\u6027\u3001\u8010\u78e8\u6027\u548c\u9632\u8150\u8755\u6027\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u4eca\u5929\u3001, <a href=\"https:\/\/www.xkh-ceramics.com\/zh\/%e7%94%a2%e5%93%81\/\" data-type=\"page\" data-id=\"1921\">\u9ad8\u7d14\u5ea6\u6c27\u5316\u92c1\u9676\u74f7<\/a> \u5ee3\u6cdb\u61c9\u7528\u65bc\u534a\u5c0e\u9ad4\u88fd\u9020\u8a2d\u5099\uff0c\u5305\u62ec\u8755\u523b\u7cfb\u7d71\u3001\u6c89\u7a4d\u5de5\u5177\u3001CMP \u5e73\u53f0\u3001\u96e2\u5b50\u690d\u5165\u7cfb\u7d71\u3001\u64f4\u6563\u7210\u53ca\u6676\u5713\u50b3\u8f38\u6a21\u7d44\u3002.<\/p>\n\n\n\n<figure class=\"wp-block-image aligncenter size-full\"><img fetchpriority=\"high\" decoding=\"async\" width=\"1000\" height=\"300\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/AL2O3.jpg\" alt=\"\" class=\"wp-image-2148\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/AL2O3.jpg 1000w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/AL2O3-300x90.jpg 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/AL2O3-768x230.jpg 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/AL2O3-18x5.jpg 18w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/AL2O3-600x180.jpg 600w\" sizes=\"(max-width: 1000px) 100vw, 1000px\" \/><\/figure>\n\n\n\n<h1 class=\"wp-block-heading\">\u6c27\u5316\u92c1\u9676\u74f7\u5728\u534a\u5c0e\u9ad4\u88fd\u9020\u4e2d\u7684\u91cd\u8981\u6027<\/h1>\n\n\n\n<p class=\"wp-block-paragraph\">\u534a\u5c0e\u9ad4\u88fd\u9020\u6d89\u53ca\u591a\u9805\u9ad8\u5ea6\u53d7\u63a7\u7684\u88fd\u7a0b\uff0c\u4f8b\u5982\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u7b49\u96e2\u5b50\u8755\u523b<\/li>\n\n\n\n<li>\u8584\u819c\u6c89\u7a4d<\/li>\n\n\n\n<li>\u5149\u523b\u6280\u8853<\/li>\n\n\n\n<li>\u5316\u5b78\u6a5f\u68b0\u62cb\u5149 (CMP)<\/li>\n\n\n\n<li>\u96e2\u5b50\u690d\u5165<\/li>\n\n\n\n<li>\u71b1\u9000\u706b<\/li>\n\n\n\n<li>\u6c27\u5316\u548c\u64f4\u6563<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u9019\u4e9b\u88fd\u7a0b\u6703\u4f7f\u5167\u90e8\u8a2d\u5099\u5143\u4ef6\u66b4\u9732\u65bc<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u9ad8\u80fd\u7b49\u96e2\u5b50\u9ad4<\/li>\n\n\n\n<li>\u771f\u7a7a\u74b0\u5883<\/li>\n\n\n\n<li>\u8150\u8755\u6027\u6c23\u9ad4\u548c\u5316\u5b78\u54c1<\/li>\n\n\n\n<li>\u9ad8\u6eab<\/li>\n\n\n\n<li>\u6a5f\u68b0\u78e8\u640d\u8207\u9707\u52d5<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u7531\u65bc\u6c61\u67d3\u98a8\u96aa\u3001\u71b1\u81a8\u8139\u6216\u5316\u5b78\u4e0d\u7a69\u5b9a\u6027\u7b49\u539f\u56e0\uff0c\u50b3\u7d71\u91d1\u5c6c\u6750\u6599\u5728\u9019\u7a2e\u74b0\u5883\u4e2d\u5f80\u5f80\u8209\u6b65\u7dad\u8271\u3002\u9ad8\u7d14\u5ea6\u6c27\u5316\u92c1\u9676\u74f7\u900f\u904e\u5176\u7368\u7279\u7684\u7279\u6027\u7d44\u5408\uff0c\u89e3\u6c7a\u4e86\u4e0a\u8ff0\u8a31\u591a\u6311\u6230\u3002.<\/p>\n\n\n\n<h1 class=\"wp-block-heading\">\u9ad8\u7d14\u6c27\u5316\u92c1\u9676\u74f7\u7684\u4e3b\u8981\u7279\u6027<\/h1>\n\n\n\n<p class=\"wp-block-paragraph\">\u534a\u5c0e\u9ad4\u8a2d\u5099\u4e2d\u4f7f\u7528\u7684\u9ad8\u7d14\u5ea6\u6c27\u5316\u92c1\u4e00\u822c\u7d14\u5ea6\u8d85\u904e 99.5%\uff0c\u4e26\u63d0\u4f9b\uff1a<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">\u7d55\u4f73\u7684\u96fb\u6c23\u7d55\u7de3\u6027<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u6c27\u5316\u92c1\u5373\u4f7f\u5728\u9ad8\u6eab\u4e0b\u4ecd\u80fd\u4fdd\u6301\u9ad8\u96fb\u963b\u7387\uff0c\u4f7f\u5176\u6210\u70ba\u7b49\u96e2\u5b50\u5ba4\u548c\u975c\u96fb\u7cfb\u7d71\u7684\u7406\u60f3\u6750\u6599\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">\u51fa\u8272\u7684\u6297\u96fb\u6f3f\u80fd\u529b<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u9019\u7a2e\u6750\u6599\u5728\u542b\u6c1f\u548c\u542b\u6c2f\u7684\u74b0\u5883\u4e2d\u8868\u73fe\u51fa\u5f37\u5927\u7684\u8010\u7b49\u96e2\u5b50\u4fb5\u8755\u6027\u548c\u8010\u5316\u5b78\u4fb5\u8755\u6027\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">\u9ad8\u6a5f\u68b0\u5f37\u5ea6<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u6c27\u5316\u92c1\u9676\u74f7\u53ef\u5728\u56b4\u82db\u7684\u64cd\u4f5c\u689d\u4ef6\u4e0b\u63d0\u4f9b\u7d55\u4f73\u7684\u525b\u6027\u3001\u786c\u5ea6\u548c\u7d50\u69cb\u7a69\u5b9a\u6027\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">\u512a\u7570\u7684\u8010\u78e8\u6027<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u4f4e\u78e8\u640d\u7279\u6027\u4f7f\u6c27\u5316\u92c1\u9069\u7528\u65bc\u79fb\u52d5\u6a5f\u68b0\u7d44\u4ef6\u548c\u6676\u5713\u63a5\u89f8\u5143\u4ef6\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">\u9ad8\u6eab\u7a69\u5b9a\u6027<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u6c27\u5316\u92c1\u5728\u534a\u5c0e\u9ad4\u8a2d\u5099\u5e38\u898b\u7684\u771f\u7a7a\u548c\u9ad8\u6eab\u52a0\u5de5\u74b0\u5883\u4e2d\u8868\u73fe\u53ef\u9760\u3002.<\/p>\n\n\n\n<h1 class=\"wp-block-heading\">\u6c27\u5316\u92c1\u9676\u74f7\u5728\u534a\u5c0e\u9ad4\u88fd\u7a0b\u4e2d\u7684\u4e3b\u8981\u61c9\u7528<\/h1>\n\n\n\n<h2 class=\"wp-block-heading\">1.\u96fb\u6f3f\u8755\u523b\u7cfb\u7d71<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u5728\u96fb\u6f3f\u8755\u523b\u8a2d\u5099\u4e2d\uff0c\u6c27\u5316\u92c1\u9676\u74f7\u901a\u5e38\u7528\u65bc\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u8154\u9ad4\u5167\u896f<\/li>\n\n\n\n<li>\u96fb\u6f3f\u8b77\u76fe<\/li>\n\n\n\n<li>\u5c0d\u7126\u74b0<\/li>\n\n\n\n<li>\u908a\u7de3\u4fdd\u8b77\u5143\u4ef6<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u9019\u4e9b\u90e8\u4ef6\u6709\u52a9\u65bc\u6e1b\u5c11\u6c61\u67d3\uff0c\u4e26\u4fdd\u8b77\u8154\u9ad4\u7d50\u69cb\u514d\u53d7\u7b49\u96e2\u5b50\u4fb5\u8755\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">2.\u8584\u819c\u6c89\u7a4d\u8a2d\u5099<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u5728 CVD\u3001PECVD \u548c PVD \u7cfb\u7d71\u4e2d\uff0c\u6c27\u5316\u92c1\u9676\u74f7\u88ab\u5ee3\u6cdb\u61c9\u7528\u65bc\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u975c\u96fb\u593e\u982d (ESC)<\/li>\n\n\n\n<li>\u9676\u74f7\u52a0\u71b1\u5668<\/li>\n\n\n\n<li>\u8259\u5ba4\u9694\u71b1\u7d50\u69cb<\/li>\n\n\n\n<li>\u914d\u6c23\u88dd\u7f6e<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u5b83\u5011\u7684\u71b1\u7a69\u5b9a\u6027\u548c\u7d55\u7de3\u6027\u80fd\u6709\u52a9\u65bc\u7dad\u6301\u5747\u52fb\u7684\u6c89\u7a4d\u689d\u4ef6\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">3.\u5316\u5b78\u6a5f\u68b0\u7814\u78e8 (CMP)<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">CMP \u88fd\u7a0b\u9700\u8981\u5177\u6709\u4e0b\u5217\u7279\u6027\u7684\u5143\u4ef6\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u4f4e\u78e8\u640d\u7387<\/li>\n\n\n\n<li>\u8010\u5316\u5b78\u6027<\/li>\n\n\n\n<li>\u5c3a\u5bf8\u7a69\u5b9a\u6027<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">CMP \u8a2d\u5099\u4e2d\u4f7f\u7528\u7684\u6c27\u5316\u92c1\u9676\u74f7\u5143\u4ef6\u5305\u62ec<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u62cb\u5149\u677f<\/li>\n\n\n\n<li>\u771f\u7a7a\u5438\u76e4<\/li>\n\n\n\n<li>\u50b3\u9001\u81c2<\/li>\n\n\n\n<li>\u6307\u5357\u7d50\u69cb<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">4.\u96e2\u5b50\u690d\u5165\u8207\u71b1\u8655\u7406<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u5728\u96e2\u5b50\u690d\u5165\u3001\u9000\u706b\u3001\u6c27\u5316\u548c\u64f4\u6563\u7cfb\u7d71\u4e2d\uff0c\u7531\u65bc\u6c27\u5316\u92c1\u9676\u74f7\u5177\u6709\u4ee5\u4e0b\u7279\u9ede\uff0c\u56e0\u6b64\u88ab\u5ee3\u6cdb\u4f7f\u7528\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u71b1\u963b<\/li>\n\n\n\n<li>\u96fb\u6c23\u7d55\u7de3<\/li>\n\n\n\n<li>\u7d50\u69cb\u53ef\u9760\u6027<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u9019\u4e9b\u7279\u6027\u53ef\u652f\u63f4\u5728\u9ad8\u6eab\u689d\u4ef6\u4e0b\u9032\u884c\u7a69\u5b9a\u7684\u6676\u5713\u52a0\u5de5\u3002.<\/p>\n\n\n\n<h1 class=\"wp-block-heading\">\u534a\u5c0e\u9ad4\u8a2d\u5099\u4e2d\u5e38\u898b\u7684\u6c27\u5316\u92c1\u9676\u74f7\u5143\u4ef6<\/h1>\n\n\n\n<h2 class=\"wp-block-heading\">\u74b0\u72c0\u8207\u5713\u67f1\u72c0\u5143\u4ef6<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u6b64\u985e\u5225\u5305\u62ec<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u5c0d\u7126\u74b0<\/li>\n\n\n\n<li>\u908a\u7de3\u74b0<\/li>\n\n\n\n<li>\u4fdd\u8b77\u74b0<\/li>\n\n\n\n<li>\u8154\u9ad4\u5167\u896f<\/li>\n\n\n\n<li>\u7d55\u7de3\u92fc\u74f6<\/li>\n\n\n\n<li>\u71b1\u4fdd\u8b77\u7ba1<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u9019\u4e9b\u5143\u4ef6\u4e3b\u8981\u7528\u65bc<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u63a7\u5236\u8840\u6f3f\u5206\u4f48<\/li>\n\n\n\n<li>\u4fdd\u8b77\u5ba4\u7d50\u69cb<\/li>\n\n\n\n<li>\u63d0\u9ad8\u88fd\u7a0b\u7a69\u5b9a\u6027<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">\u6c23\u9ad4\u6d41\u91cf\u7ba1\u7406\u5143\u4ef6<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">\u9676\u74f7\u5674\u5634<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u7528\u65bc\u6c89\u7a4d\u548c\u8755\u523b\u5ba4\u7684\u88fd\u7a0b\u6c23\u9ad4\u8f38\u9001\u548c\u6c23\u9ad4\u65b9\u5411\u63a7\u5236\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">\u914d\u6c23\u76e4<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u6709\u52a9\u65bc\u5728\u6574\u500b\u6676\u5713\u8868\u9762\u7dad\u6301\u5747\u52fb\u7684\u6c23\u6d41\u548c\u7a69\u5b9a\u7684\u96fb\u6f3f\u5bc6\u5ea6\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">\u5674\u5634\u84cb<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u652f\u63f4\u6c23\u9ad4\u6ce8\u5165\u7d44\u4ef6\uff0c\u540c\u6642\u4e5f\u6e1b\u5c11\u5ba4\u5167\u6b98\u7559\u7269\u7684\u5806\u7a4d\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">\u7d50\u69cb\u8207\u652f\u6490\u7d44\u4ef6<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">\u6676\u5713\u652f\u63f4\u5e73\u53f0<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u5728\u52a0\u5de5\u904e\u7a0b\u4e2d\u7528\u4f5c\u6676\u5713\u7684\u8f09\u9ad4\u7d50\u69cb\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">\u63d0\u5347\u92b7<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u53ef\u5728\u534a\u5c0e\u9ad4\u5ba4\u5167\u9032\u884c\u6676\u5713\u88dd\u5378\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">\u9676\u74f7\u5c0e\u8ecc\u548c\u8ef8\u627f<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u652f\u63f4\u7cbe\u78ba\u7684\u6a5f\u68b0\u904b\u52d5\uff0c\u540c\u6642\u4fdd\u6301\u8010\u78e8\u6027\u548c\u7d55\u7de3\u6027\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">\u9676\u74f7\u6263\u4ef6<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u5728\u9ad8\u6eab\u6216\u96fb\u6c23\u9694\u96e2\u7684\u5340\u57df\uff0c\u9676\u74f7\u87ba\u7d72\u548c\u7dca\u56fa\u96f6\u4ef6\u53ef\u53d6\u4ee3\u91d1\u5c6c\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">\u6676\u5713\u8655\u7406\u8207\u7d55\u7de3\u5143\u4ef6<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">\u6676\u5713\u8655\u7406\u81c2<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u9ad8\u5f37\u5ea6\u9676\u74f7\u6a5f\u68b0\u624b\u81c2\u7528\u65bc\u771f\u7a7a\u74b0\u5883\u5167\u7684\u6676\u5713\u50b3\u8f38\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">\u9676\u74f7\u7d55\u7de3\u677f<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u9632\u6b62\u8154\u9ad4\u7d50\u69cb\u4e4b\u9593\u4e0d\u5fc5\u8981\u7684\u96fb\u5c0e\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">\u9676\u74f7\u6563\u71b1\u96f6\u4ef6<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u5354\u52a9\u71b1\u80fd\u7ba1\u7406\u548c\u5c40\u90e8\u51b7\u537b\u3002.<\/p>\n\n\n\n<h1 class=\"wp-block-heading\">\u5148\u9032\u6c27\u5316\u92c1\u9676\u74f7\u6a21\u7d44<\/h1>\n\n\n\n<h2 class=\"wp-block-heading\">\u771f\u7a7a\u5438\u76e4<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u771f\u7a7a\u5438\u76e4\u900f\u904e\u771f\u7a7a\u5438\u529b\u5c07\u6676\u5713\u5438\u5e73\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u8755\u523b<\/li>\n\n\n\n<li>CMP<\/li>\n\n\n\n<li>\u6aa2\u9a57\u6d41\u7a0b<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u6574\u5408\u5f0f\u51b7\u537b\u901a\u9053\u6709\u52a9\u65bc\u6539\u5584\u71b1\u63a7\u5236\u548c\u88fd\u7a0b\u4e00\u81f4\u6027\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">\u975c\u96fb\u593e\u982d (ESC)<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u975c\u96fb\u593e\u982d\u4f7f\u7528\u975c\u96fb\u529b\u5728\u96fb\u6f3f\u8655\u7406\u904e\u7a0b\u4e2d\u56fa\u5b9a\u6676\u5713\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u6c27\u5316\u92c1\u9676\u74f7\u4e4b\u6240\u4ee5\u88ab\u5ee3\u6cdb\u4f7f\u7528\uff0c\u662f\u56e0\u70ba\u5b83\u5011\u80fd\u63d0\u4f9b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u96fb\u6c23\u7d55\u7de3<\/li>\n\n\n\n<li>\u7b49\u96e2\u5b50\u96fb\u963b<\/li>\n\n\n\n<li>\u71b1\u7a69\u5b9a\u6027<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">ESC \u7cfb\u7d71\u5728\u5148\u9032\u7684\u8755\u523b\u548c\u6c89\u7a4d\u8a2d\u5099\u4e2d\u662f\u4e0d\u53ef\u6216\u7f3a\u7684\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">\u9676\u74f7\u52a0\u71b1\u5668<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u9676\u74f7\u52a0\u71b1\u5668\u63d0\u4f9b\u7a69\u5b9a\u4e14\u5747\u52fb\u7684\u6676\u5713\u52a0\u71b1\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u6c89\u7a4d\u7cfb\u7d71<\/li>\n\n\n\n<li>\u9000\u706b\u8a2d\u5099<\/li>\n\n\n\n<li>\u71b1\u8655\u7406\u5de5\u5177<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u96d6\u7136\u6c27\u5316\u92c1\u88ab\u5ee3\u6cdb\u4f7f\u7528\uff0c\u4f46\u7576\u9700\u8981\u66f4\u9ad8\u7684\u71b1\u50b3\u5c0e\u7387\u6642\uff0c\u901a\u5e38\u6703\u9078\u64c7\u6c2e\u5316\u92c1 (AlN) \u52a0\u71b1\u5668\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">CMP \u7814\u78e8\u677f<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u5728\u9577\u6642\u9593\u7684\u62cb\u5149\u4f5c\u696d\u4e2d\uff0c\u6c27\u5316\u92c1\u62cb\u5149\u5143\u4ef6\u53ef\u4fdd\u6301\u6975\u4f73\u7684\u5e73\u9762\u5ea6\u8207\u8010\u78e8\u6027\u3002.<\/p>\n\n\n\n<h1 class=\"wp-block-heading\">\u534a\u5c0e\u9ad4\u8a2d\u5099\u70ba\u4f55\u4f7f\u7528\u9ad8\u7d14\u5ea6\u9676\u74f7<\/h1>\n\n\n\n<p class=\"wp-block-paragraph\">\u8207\u50b3\u7d71\u5de5\u7a0b\u6750\u6599\u76f8\u6bd4\uff0c\u5148\u9032\u9676\u74f7\u5177\u6709\u591a\u9805\u512a\u52e2\uff1a<\/p>\n\n\n\n<figure class=\"wp-block-table\"><table class=\"has-fixed-layout\"><thead><tr><th>\u8ca1\u7522<\/th><th>\u6c27\u5316\u92c1\u9676\u74f7\u7684\u512a\u52e2<\/th><\/tr><\/thead><tbody><tr><td>\u96fb\u6c23\u7d55\u7de3<\/td><td>\u6975\u4f73<\/td><\/tr><tr><td>\u96fb\u6f3f\u963b\u6297<\/td><td>\u9ad8<\/td><\/tr><tr><td>\u8010\u78e8\u6027<\/td><td>\u6975\u4f73<\/td><\/tr><tr><td>\u71b1\u7a69\u5b9a\u6027<\/td><td>\u5f37\u5927<\/td><\/tr><tr><td>\u8010\u5316\u5b78\u6027<\/td><td>\u6975\u4f73<\/td><\/tr><tr><td>\u5fae\u7c92\u63a7\u5236<\/td><td>\u4f4e\u6c61\u67d3<\/td><\/tr><tr><td>\u771f\u7a7a\u76f8\u5bb9\u6027<\/td><td>\u6975\u4f73<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<p class=\"wp-block-paragraph\">\u9019\u4e9b\u512a\u9ede\u4f7f\u5f97\u6c27\u5316\u92c1\u9676\u74f7\u5728\u73fe\u4ee3\u534a\u5c0e\u9ad4\u8a2d\u5099\u4e2d\u4e0d\u53ef\u6216\u7f3a\u3002.<\/p>\n\n\n\n<h1 class=\"wp-block-heading\">\u5e02\u5834\u8da8\u52e2\u8207\u7522\u696d\u5c55\u671b<\/h1>\n\n\n\n<p class=\"wp-block-paragraph\">\u96a8\u8457\u534a\u5c0e\u9ad4\u88fd\u9020\u7e7c\u7e8c\u671d\u5411\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u5148\u9032\u88fd\u7a0b\u7bc0\u9ede<\/li>\n\n\n\n<li>\u66f4\u9ad8\u7684\u6676\u5713\u7522\u91cf<\/li>\n\n\n\n<li>\u66f4\u5177\u4fb5\u7565\u6027\u7684\u7b49\u96e2\u5b50\u9ad4\u5316\u5b78\u7269\u8cea<\/li>\n\n\n\n<li>\u66f4\u4e7e\u6de8\u7684\u88fd\u7a0b\u74b0\u5883<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u7cbe\u5bc6\u9676\u74f7\u5143\u4ef6\u7684\u9700\u6c42\u9810\u8a08\u5c07\u7a69\u5b9a\u6210\u9577\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u88fd\u9020\u534a\u5c0e\u9ad4\u7d1a\u6c27\u5316\u92c1\u5143\u4ef6\u9700\u8981\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u9ad8\u7d14\u5ea6\u539f\u6599<\/li>\n\n\n\n<li>\u7cbe\u5bc6\u52a0\u5de5\u80fd\u529b<\/li>\n\n\n\n<li>\u56b4\u683c\u7684\u6c61\u67d3\u63a7\u5236<\/li>\n\n\n\n<li>\u5148\u9032\u7684\u9676\u74f7\u52a0\u5de5\u6280\u8853<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u7531\u65bc\u9019\u4e9b\u9ad8\u6280\u8853\u9580\u6abb\uff0c\u534a\u5c0e\u9ad4\u9676\u74f7\u5143\u4ef6\u4ecd\u662f\u4e00\u500b\u5c08\u9580\u4e14\u6280\u8853\u5bc6\u96c6\u7684\u5e02\u5834\u3002.<\/p>\n\n\n\n<h1 class=\"wp-block-heading\">\u7e3d\u7d50<\/h1>\n\n\n\n<p class=\"wp-block-paragraph\">\u9ad8\u7d14\u5ea6\u6c27\u5316\u92c1\u9676\u74f7\u5143\u4ef6\u5df2\u6210\u70ba\u534a\u5c0e\u9ad4\u88fd\u9020\u8a2d\u5099\u4e2d\u4e0d\u53ef\u6216\u7f3a\u7684\u6750\u6599\u3002\u5176\u512a\u7570\u7684\u7d55\u7de3\u6027\u80fd\u3001\u8010\u96fb\u6f3f\u6027\u3001\u8010\u78e8\u6027\u548c\u71b1\u7a69\u5b9a\u6027\uff0c\u8b93\u534a\u5c0e\u9ad4\u5de5\u5177\u80fd\u5728\u6975\u7aef\u52a0\u5de5\u74b0\u5883\u4e2d\u53ef\u9760\u904b\u4f5c\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u5f9e\u7b49\u96e2\u5b50\u8755\u523b\u5ba4\u3001\u975c\u96fb\u593e\u982d\u5230\u6676\u5713\u8655\u7406\u81c2\u548c\u9676\u74f7\u52a0\u71b1\u5668\uff0c\u6c27\u5316\u92c1\u9676\u74f7\u5728\u7a69\u5b9a\u3001\u7cbe\u78ba\u548c\u6c61\u67d3\u63a7\u5236\u7684\u534a\u5c0e\u9ad4\u751f\u7522\u4e2d\u626e\u6f14\u8457\u91cd\u8981\u7684\u89d2\u8272\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u96a8\u8457\u534a\u5c0e\u9ad4\u6280\u8853\u7684\u4e0d\u65b7\u9032\u6b65\uff0c\u5148\u9032\u9676\u74f7\u6750\u6599\u5728\u534a\u5c0e\u9ad4\u8a2d\u5099\u4e2d\u7684\u91cd\u8981\u6027\u53ea\u6703\u7e7c\u7e8c\u589e\u52a0\u3002.<\/p>","protected":false},"excerpt":{"rendered":"<p>As semiconductor devices continue evolving toward smaller nodes, higher integration density, and greater processing precision, the demand for ultra-clean, heat-resistant, and plasma-stable materials inside semiconductor equipment has increased significantly. Among advanced engineering ceramics, high-purity alumina ceramic (Al\u2082O\u2083) remains one of the most widely used materials across semiconductor manufacturing systems. From plasma etching chambers to wafer [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":2148,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[3],"tags":[269,268,266,267,270,271,265],"class_list":["post-2147","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-industry-news","tag-and-wafer-handling-systems-learn-about-their-properties","tag-ceramic-heaters","tag-cmp","tag-deposition","tag-discover-how-high-purity-alumina-ceramic-components-are-used-in-semiconductor-manufacturing-equipment-including-plasma-etching","tag-electrostatic-chucks","tag-functions"],"_links":{"self":[{"href":"https:\/\/www.xkh-ceramics.com\/zh\/wp-json\/wp\/v2\/posts\/2147","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.xkh-ceramics.com\/zh\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.xkh-ceramics.com\/zh\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/zh\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/zh\/wp-json\/wp\/v2\/comments?post=2147"}],"version-history":[{"count":1,"href":"https:\/\/www.xkh-ceramics.com\/zh\/wp-json\/wp\/v2\/posts\/2147\/revisions"}],"predecessor-version":[{"id":2149,"href":"https:\/\/www.xkh-ceramics.com\/zh\/wp-json\/wp\/v2\/posts\/2147\/revisions\/2149"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/zh\/wp-json\/wp\/v2\/media\/2148"}],"wp:attachment":[{"href":"https:\/\/www.xkh-ceramics.com\/zh\/wp-json\/wp\/v2\/media?parent=2147"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/zh\/wp-json\/wp\/v2\/categories?post=2147"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/zh\/wp-json\/wp\/v2\/tags?post=2147"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}