{"id":2036,"date":"2026-05-08T05:18:41","date_gmt":"2026-05-08T05:18:41","guid":{"rendered":"https:\/\/www.xkh-ceramics.com\/?p=2036"},"modified":"2026-05-08T05:19:21","modified_gmt":"2026-05-08T05:19:21","slug":"%e5%85%88%e9%80%b2%e9%99%b6%e7%93%b7%e5%85%83%e4%bb%b6%e5%9c%a8%e5%8d%8a%e5%b0%8e%e9%ab%94%e8%a3%bd%e9%80%a0%e4%b8%ad%e7%9a%84%e9%9d%9c%e9%9b%bb%e5%a4%be%e9%a0%ad%e5%8e%9f%e7%90%86%e8%88%87%e8%b6%a8","status":"publish","type":"post","link":"https:\/\/www.xkh-ceramics.com\/zh\/advanced-ceramic-components-in-semiconductor-manufacturing-electrostatic-chuck-principles-and-trends\/","title":{"rendered":"\u534a\u5c0e\u9ad4\u88fd\u9020\u4e2d\u7684\u5148\u9032\u9676\u74f7\u5143\u4ef6\uff1a\u975c\u96fb\u593e\u982d\u539f\u7406\u8207\u8da8\u52e2"},"content":{"rendered":"<h2 class=\"wp-block-heading\">1.\u7c21\u4ecb\uff1a\u5148\u9032\u9676\u74f7\u5728\u534a\u5c0e\u9ad4\u8a2d\u5099\u4e2d\u7684\u4f5c\u7528<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u5728\u73fe\u4ee3\u534a\u5c0e\u9ad4\u88fd\u9020\u904e\u7a0b\u4e2d\uff0c\u8a2d\u5099\u6703\u5728\u771f\u7a7a\u74b0\u5883\u3001\u9ad8\u6eab\u3001\u96fb\u6f3f\u66dd\u9732\u548c\u8d85\u7cbe\u5bc6\u904b\u52d5\u63a7\u5236\u7b49\u6975\u7aef\u689d\u4ef6\u4e0b\u904b\u4f5c\u3002\u50b3\u7d71\u91d1\u5c6c\u6750\u6599\u5f80\u5f80\u7121\u6cd5\u6eff\u8db3\u7a69\u5b9a\u6027\u3001\u6f54\u6de8\u5ea6\u3001\u96fb\u7d55\u7de3\u548c\u71b1\u7ba1\u7406\u7684\u7d9c\u5408\u8981\u6c42\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u5148\u9032\u7684\u5de5\u7a0b\u9676\u74f7\uff0c\u5982\u6c27\u5316\u92c1 (Al\u2082O\u2083)\u3001\u6c2e\u5316\u92c1 (AlN) \u548c\u78b3\u5316\u77fd (SiC) \u7b49\uff0c\u5df2\u6210\u70ba\u95dc\u9375\u534a\u5c0e\u9ad4\u5143\u4ef6\u7684\u91cd\u8981\u6750\u6599\u3002\u7d93\u904e\u7cbe\u5bc6\u6210\u578b\u548c\u8d85\u7cbe\u5bc6\u52a0\u5de5\u5f8c\uff0c\u9019\u4e9b\u9676\u74f7\u88ab\u5ee3\u6cdb\u61c9\u7528\u65bc\u95dc\u9375\u88fd\u7a0b\u8a2d\u5099\uff0c\u5305\u62ec\u5149\u523b\u3001\u8755\u523b\u3001\u8584\u819c\u6c89\u7a4d\u3001\u96e2\u5b50\u690d\u5165\u548c\u5316\u5b78\u6a5f\u68b0\u5e73\u5766\u5316 (CMP)\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u5728\u9019\u4e9b\u5143\u4ef6\u4e2d\uff0c\u975c\u96fb\u593e\u982d (ESC) \u662f\u6700\u91cd\u8981\u7684\u9676\u74f7\u57fa\u529f\u80fd\u88dd\u7f6e\u4e4b\u4e00\u3002.<\/p>\n\n\n\n<figure class=\"wp-block-image aligncenter size-full\"><img fetchpriority=\"high\" decoding=\"async\" width=\"426\" height=\"238\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Electrostatic-Chuck-Principles-and-Trends-1.png\" alt=\"\" class=\"wp-image-2038\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Electrostatic-Chuck-Principles-and-Trends-1.png 426w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Electrostatic-Chuck-Principles-and-Trends-1-300x168.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Electrostatic-Chuck-Principles-and-Trends-1-18x10.png 18w\" sizes=\"(max-width: 426px) 100vw, 426px\" \/><\/figure>\n\n\n\n<h2 class=\"wp-block-heading\">2.\u975c\u96fb\u593e\u982d\u7684\u529f\u80fd\u8207\u61c9\u7528<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u984f\u8272 <a href=\"https:\/\/www.xkh-ceramics.com\/zh\/%e7%94%a2%e5%93%81\/\" data-type=\"page\" data-id=\"1921\">\u975c\u96fb\u593e\u982d<\/a> \u662f\u5c08\u70ba\u771f\u7a7a\u6216\u96fb\u6f3f\u74b0\u5883\u8a2d\u8a08\u7684\u6676\u5713\u8655\u7406\u548c\u593e\u6301\u88dd\u7f6e\u3002\u5b83\u80fd\u5728\u7121\u6a5f\u68b0\u63a5\u89f8\u7684\u60c5\u6cc1\u4e0b\uff0c\u7a69\u5b9a\u4e14\u5747\u52fb\u5730\u593e\u6301\u8d85\u8584\u534a\u5c0e\u9ad4\u6676\u5713\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u5b83\u88ab\u5ee3\u6cdb\u61c9\u7528\u65bc\u5148\u9032\u534a\u5c0e\u9ad4\u88fd\u7a0b\u4e2d\uff0c\u4f8b\u5982\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u7b49\u96e2\u5b50\u8755\u523b (ETCH)<\/li>\n\n\n\n<li>\u7269\u7406\u6c23\u76f8\u6c89\u7a4d (PVD)<\/li>\n\n\n\n<li>\u7b49\u96e2\u5b50\u9ad4\u589e\u5f37\u5316\u5b78\u6c23\u76f8\u6c89\u7a4d (PECVD)<\/li>\n\n\n\n<li>\u6975\u7d2b\u5916\u7dda\u5149\u523b\u6280\u8853 (EUVL)<\/li>\n\n\n\n<li>\u96e2\u5b50\u690d\u5165<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u5728\u9019\u4e9b\u88fd\u7a0b\u4e2d\uff0c\u6676\u5713\u6703\u66b4\u9732\u5728\u9ad8\u80fd\u7c92\u5b50\u548c\u71b1\u8ca0\u8377\u4e0b\u3002\u56e0\u6b64\uff0c\u975c\u96fb\u593e\u982d\u5fc5\u9808\u540c\u6642\u78ba\u4fdd\u6a5f\u68b0\u7a69\u5b9a\u6027\u548c\u7cbe\u78ba\u7684\u71b1\u91cf\u63a7\u5236\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">3.\u5de5\u4f5c\u539f\u7406\uff1a\u975c\u96fb\u529b\u548c\u71b1\u7ba1\u7406<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u975c\u96fb\u593e\u982d\u7684\u904b\u4f5c\u662f\u57fa\u65bc\u96fb\u5834\u7522\u751f\u7684\u975c\u96fb\u5438\u5f15\u529b\u3002\u5e36\u76f8\u53cd\u96fb\u8377\u7684\u8868\u9762\u6703\u7522\u751f\u5438\u5f15\u529b\uff0c\u7262\u7262\u5730\u5c07\u6676\u5713\u56fa\u5b9a\u5230\u4f4d\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u57fa\u672c\u975c\u96fb\u4e92\u52d5\u53ef\u63cf\u8ff0\u70ba\uff1a<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><math xmlns=\"http:\/\/www.w3.org\/1998\/Math\/MathML\"><semantics><mrow><mi>F<\/mi><mo>=<\/mo><mi>k<\/mi><mfrac><mrow><msub><mi>q<\/mi><mn>1<\/mn><\/msub><msub><mi>q<\/mi><mn>2<\/mn><\/msub><\/mrow><msup><mi>r<\/mi><mn>2<\/mn><\/msup><\/mfrac><\/mrow><annotation encoding=\"application\/x-tex\">F = k \\frac{q_1 q_2}{r^2}<\/annotation><\/semantics><\/math>F=kr2q1q2<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><math xmlns=\"http:\/\/www.w3.org\/1998\/Math\/MathML\"><semantics><mrow><msub><mi>q<\/mi><mn>1<\/mn><\/msub><\/mrow><annotation encoding=\"application\/x-tex\">q_1<\/annotation><\/semantics><\/math>q1<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><math xmlns=\"http:\/\/www.w3.org\/1998\/Math\/MathML\"><semantics><mrow><msub><mi>q<\/mi><mn>2<\/mn><\/msub><\/mrow><annotation encoding=\"application\/x-tex\">q_2<\/annotation><\/semantics><\/math>q2<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><math xmlns=\"http:\/\/www.w3.org\/1998\/Math\/MathML\"><semantics><mrow><mi>r<\/mi><\/mrow><annotation encoding=\"application\/x-tex\">r<\/annotation><\/semantics><\/math>r<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><math xmlns=\"http:\/\/www.w3.org\/1998\/Math\/MathML\"><semantics><mrow><mi>F<\/mi><mo>=<\/mo><mi>k<\/mi><mfrac><mrow><msub><mi>q<\/mi><mn>1<\/mn><\/msub><msub><mi>q<\/mi><mn>2<\/mn><\/msub><\/mrow><msup><mi>r<\/mi><mn>2<\/mn><\/msup><\/mfrac><mo>\u2248<\/mo><mo>\u2212<\/mo><mn>5.06<\/mn><\/mrow><annotation encoding=\"application\/x-tex\">F = k\\frac{q_1 q_2}{r^2}\\\u5927\u7d04 -5.06<\/annotation><\/semantics><\/math>F=kr2q1q2\u2248-5.06+-<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u5728\u54ea\u88e1\uff1f<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><math xmlns=\"http:\/\/www.w3.org\/1998\/Math\/MathML\"><semantics><mrow><mi>F<\/mi><\/mrow><annotation encoding=\"application\/x-tex\">F<\/annotation><\/semantics><\/math>F\uff1a\u975c\u96fb\u529b<\/li>\n\n\n\n<li><math xmlns=\"http:\/\/www.w3.org\/1998\/Math\/MathML\"><semantics><mrow><msub><mi>q<\/mi><mn>1<\/mn><\/msub><mo separator=\"true\">,<\/mo><msub><mi>q<\/mi><mn>2<\/mn><\/msub><\/mrow><annotation encoding=\"application\/x-tex\">q_1, q_2<\/annotation><\/semantics><\/math>q1,q2: \u96fb\u8377<\/li>\n\n\n\n<li><math xmlns=\"http:\/\/www.w3.org\/1998\/Math\/MathML\"><semantics><mrow><mi>r<\/mi><\/mrow><annotation encoding=\"application\/x-tex\">r<\/annotation><\/semantics><\/math>r\uff1a\u96fb\u8377\u9593\u8ddd\u96e2<\/li>\n\n\n\n<li><math xmlns=\"http:\/\/www.w3.org\/1998\/Math\/MathML\"><semantics><mrow><mi>k<\/mi><\/mrow><annotation encoding=\"application\/x-tex\">k<\/annotation><\/semantics><\/math>k:\u5eab\u502b\u5e38\u6578<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u5728\u7d50\u69cb\u4e0a\uff0c\u975c\u96fb\u593e\u982d\u901a\u5e38\u7531\u4e09\u5c64\u7d44\u6210\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u4ecb\u8cea\u5c64<\/strong>\uff1a\u5b9a\u7fa9\u7d55\u7de3\u548c\u96fb\u5834\u5206\u5e03<\/li>\n\n\n\n<li><strong>\u96fb\u6975\u5c64<\/strong>\uff1a\u7522\u751f\u975c\u96fb\u5834<\/li>\n\n\n\n<li><strong>\u5e95\u5c64<\/strong>\uff1a\u63d0\u4f9b\u6a5f\u68b0\u652f\u6490\u548c\u71b1\u50b3\u5c0e<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u70ba\u4e86\u7ba1\u7406\u88fd\u7a0b\u4e2d\u7684\u71b1\u8ca0\u8377\uff0c\u901a\u5e38\u6703\u4f7f\u7528\u6c26\u6c23\u80cc\u9762\u51b7\u537b\uff0c\u4ee5\u6539\u5584\u6676\u5713\u8207\u593e\u982d\u8868\u9762\u4e4b\u9593\u7684\u71b1\u50b3\u5c0e\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">4.\u5206\u985e\uff1a\u5eab\u502b\u578b\u548c Johnsen-Rahbek \u578b ESC<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u975c\u96fb\u593e\u982d\u901a\u5e38\u6839\u64da\u5176\u4ecb\u96fb\u884c\u70ba\u5206\u70ba\u5169\u7a2e\u985e\u578b\uff1a<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">(1) \u5eab\u502b\u578b ESC<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u6b64\u985e\u578b\u7d14\u7cb9\u4f9d\u8cf4\u975c\u96fb\u529b\u4f86\u593e\u6301\u6676\u5713\u3002\u7d50\u69cb\u8f03\u7c21\u55ae\uff0c\u4f46\u593e\u6301\u529b\u76f8\u5c0d\u8f03\u4f4e\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">(2) Johnsen-Rahbek (J-R) \u578b ESC<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u6b64\u985e\u578b\u6703\u5728\u4ecb\u8cea\u5c64\u4e2d\u5f15\u5165\u8f15\u5fae\u7684\u96fb\u5c0e\u6027\uff0c\u589e\u5f37\u6975\u5316\u6548\u679c\u4e26\u589e\u52a0\u9396\u6a21\u529b\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u4e3b\u8981\u512a\u52e2\u5305\u62ec<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u8f03\u4f4e\u96fb\u58d3\u4e0b\u7684\u8f03\u9ad8\u7b9d\u4f4d\u529b<\/li>\n\n\n\n<li>\u6539\u5584\u6676\u5713\u63a5\u89f8\u7a69\u5b9a\u6027<\/li>\n\n\n\n<li>\u5148\u9032\u534a\u5c0e\u9ad4\u7bc0\u9ede\u7684\u66f4\u4f73\u6548\u80fd<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u7136\u800c\uff0c\u5b83\u9700\u8981\u66f4\u9ad8\u7684\u6750\u6599\u5747\u52fb\u6027\u548c\u66f4\u8907\u96dc\u7684\u88fd\u9020\u6d41\u7a0b\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">5.\u7522\u696d\u767c\u5c55\u8207\u5e02\u5834\u7279\u6027<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u5728\u534a\u5c0e\u9ad4\u88fd\u9020\u7522\u80fd\u5feb\u901f\u64f4\u5f35\u4ee5\u53ca\u5148\u9032\u7bc0\u9ede\u9700\u6c42\u589e\u52a0\u7684\u5e36\u52d5\u4e0b\uff0c\u975c\u96fb\u593e\u982d\u5e02\u5834\u6301\u7e8c\u7a69\u5b9a\u6210\u9577\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u4e3b\u8981\u7522\u696d\u7279\u6027\u5305\u62ec<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">(1) \u9ad8\u6280\u8853\u9580\u6abb<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u9019\u9805\u6280\u8853\u6574\u5408\u4e86\u6750\u6599\u79d1\u5b78\u3001\u96fb\u5b50\u5de5\u7a0b\u3001\u71b1\u7ba1\u7406\u548c\u8d85\u7cbe\u5bc6\u52a0\u5de5\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">(2) \u5e02\u5834\u9ad8\u5ea6\u96c6\u4e2d<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u5168\u7403\u5e02\u5834\u7531\u6709\u9650\u6578\u76ee\u7684\u5148\u9032\u88fd\u9020\u5546\u6240\u4e3b\u5c0e\uff0c\u9019\u4e9b\u88fd\u9020\u5546\u64c1\u6709\u5f37\u5927\u7684\u6574\u5408\u80fd\u529b\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">(3) \u5340\u57df\u5c08\u696d\u5316<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u9ad8\u7aef\u8a2d\u8a08\u548c\u7cfb\u7d71\u6574\u5408\u96c6\u4e2d\u5728\u6280\u8853\u5148\u9032\u7684\u5730\u5340\uff0c\u800c\u7cbe\u5bc6\u9676\u74f7\u88fd\u9020\u5247\u8d8a\u4f86\u8d8a\u591a\u5730\u8f49\u79fb\u5230\u4e9e\u6d32\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">(4) \u672c\u5730\u5316\u8da8\u52e2\u65e5\u589e<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u96a8\u8457\u570b\u5167\u534a\u5c0e\u9ad4\u751f\u614b\u7cfb\u7d71\u7684\u64f4\u5c55\uff0c\u975c\u96fb\u593e\u982d\u7684\u672c\u5730\u5316\u751f\u7522\u5df2\u958b\u59cb\u51fa\u73fe\uff0c\u4f46\u5728\u9577\u671f\u53ef\u9760\u6027\u548c\u9ad8\u7aef\u88fd\u7a0b\u76f8\u5bb9\u6027\u65b9\u9762\u4ecd\u5b58\u5728\u6311\u6230\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">6.\u95dc\u9375\u6750\u6599\u8207\u672a\u4f86\u767c\u5c55\u8da8\u52e2<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u975c\u96fb\u593e\u982d\u548c\u9676\u74f7\u5143\u4ef6\u7684\u672a\u4f86\u767c\u5c55\u91cd\u9ede\u5c07\u653e\u5728\uff1a<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">(1) \u9ad8\u5c0e\u71b1\u9676\u74f7<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u900f\u904e\u6700\u4f73\u5316\u7684 AlN \u548c SiC \u6750\u6599\u6539\u5584\u6eab\u5ea6\u5747\u52fb\u6027\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">(2) \u8d85\u9ad8\u7d14\u5ea6\u548c\u4f4e\u7f3a\u9677\u5bc6\u5ea6<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u6e1b\u5c11\u96dc\u8cea\u548c\u5fae\u7f3a\u9677\uff0c\u4ee5\u63d0\u9ad8\u8010\u96fb\u6f3f\u6027\u53ca\u7a69\u5b9a\u6027\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">(3) \u591a\u5c64\u8907\u5408\u7d50\u69cb<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u5e73\u8861\u96fb\u7d55\u7de3\u3001\u6a5f\u68b0\u5f37\u5ea6\u548c\u71b1\u6027\u80fd\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">(4) \u5ef6\u9577\u4f7f\u7528\u58fd\u547d<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u589e\u5f37\u6297\u71b1\u5faa\u74b0\u53ca\u96fb\u6f3f\u8150\u8755\u80fd\u529b\uff0c\u6e1b\u5c11\u66f4\u63db\u983b\u7387\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">7.\u7e3d\u7d50<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u975c\u96fb\u593e\u982d\u662f\u534a\u5c0e\u9ad4\u8a2d\u5099\u4e2d\u7684\u6838\u5fc3\u9676\u74f7\u529f\u80fd\u5143\u4ef6\uff0c\u6574\u5408\u4e86\u5148\u9032\u7684\u6750\u6599\u79d1\u5b78\u3001\u975c\u96fb\u5b78\u548c\u71b1\u5de5\u5b78\u3002\u5176\u6027\u80fd\u76f4\u63a5\u5f71\u97ff\u6676\u5713\u52a0\u5de5\u7cbe\u5ea6\u548c\u88fd\u9020\u826f\u7387\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u96a8\u8457\u534a\u5c0e\u9ad4\u88fd\u7a0b\u4e0d\u65b7\u671d\u5411\u66f4\u9ad8\u7cbe\u5ea6\u548c\u66f4\u5c0f\u7bc0\u9ede\u7684\u65b9\u5411\u767c\u5c55\uff0c\u5c0d\u9ad8\u6027\u80fd\u9676\u74f7\u5143\u4ef6\u7684\u9700\u6c42\u5c07\u6301\u7e8c\u589e\u9577\uff0c\u5f9e\u800c\u63a8\u52d5\u6750\u6599\u548c\u88fd\u9020\u6280\u8853\u7684\u4e0d\u65b7\u5275\u65b0\u3002.<\/p>","protected":false},"excerpt":{"rendered":"<p>1. Introduction: Role of Advanced Ceramics in Semiconductor Equipment In modern semiconductor manufacturing, equipment operates under extreme conditions such as vacuum environments, high temperatures, plasma exposure, and ultra-precision motion control. Traditional metallic materials often fail to meet the combined requirements of stability, cleanliness, electrical insulation, and thermal management. Advanced engineering ceramics\u2014such as alumina (Al\u2082O\u2083), aluminum [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":2038,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[3],"tags":[46,37,102,96,91,68,103,93,92,101,95,89,98,55,90,78,94,100,97,99],"class_list":["post-2036","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-industry-news","tag-advanced-ceramics","tag-alumina-ceramics","tag-aluminum-nitride","tag-coulomb-force","tag-dielectric-materials","tag-electrostatic-chuck","tag-esc","tag-etching-process","tag-helium-cooling","tag-ion-implantation","tag-johnsen-rahbek","tag-plasma-process","tag-precision-machining","tag-semiconductor","tag-semiconductor-equipment","tag-silicon-carbide","tag-thermal-management","tag-thin-film-deposition","tag-vacuum-environment","tag-wafer-handling"],"_links":{"self":[{"href":"https:\/\/www.xkh-ceramics.com\/zh\/wp-json\/wp\/v2\/posts\/2036","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.xkh-ceramics.com\/zh\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.xkh-ceramics.com\/zh\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/zh\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/zh\/wp-json\/wp\/v2\/comments?post=2036"}],"version-history":[{"count":2,"href":"https:\/\/www.xkh-ceramics.com\/zh\/wp-json\/wp\/v2\/posts\/2036\/revisions"}],"predecessor-version":[{"id":2040,"href":"https:\/\/www.xkh-ceramics.com\/zh\/wp-json\/wp\/v2\/posts\/2036\/revisions\/2040"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/zh\/wp-json\/wp\/v2\/media\/2038"}],"wp:attachment":[{"href":"https:\/\/www.xkh-ceramics.com\/zh\/wp-json\/wp\/v2\/media?parent=2036"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/zh\/wp-json\/wp\/v2\/categories?post=2036"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/zh\/wp-json\/wp\/v2\/tags?post=2036"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}