{"id":2018,"date":"2026-05-08T03:14:11","date_gmt":"2026-05-08T03:14:11","guid":{"rendered":"https:\/\/www.xkh-ceramics.com\/?p=2018"},"modified":"2026-05-08T03:14:11","modified_gmt":"2026-05-08T03:14:11","slug":"%e7%b2%be%e5%af%86%e9%99%b6%e7%93%b7%e5%9c%a8%e5%8d%8a%e5%b0%8e%e9%ab%94%e8%a8%ad%e5%82%99%e4%b8%ad%e7%9a%84%e6%a0%b8%e5%bf%83%e4%bd%9c%e7%94%a8%e5%8f%8a%e7%94%a2%e6%a5%ad%e7%99%bc%e5%b1%95%e8%b6%a8","status":"publish","type":"post","link":"https:\/\/www.xkh-ceramics.com\/zh\/precision-ceramics-in-semiconductor-equipment-core-roles-and-industry-development-trends\/","title":{"rendered":"\u7cbe\u5bc6\u9676\u74f7\u5728\u534a\u5c0e\u9ad4\u8a2d\u5099\u4e2d\u7684\u61c9\u7528\uff1a\u6838\u5fc3\u89d2\u8272\u8207\u7522\u696d\u767c\u5c55\u8da8\u52e2"},"content":{"rendered":"

1.\u7c21\u4ecb<\/h2>\n\n\n\n

\u7cbe\u5bc6\u9676\u74f7\u662f\u6307\u9ad8\u6027\u80fd\u7684 \u5148\u9032\u9676\u74f7\u5143\u4ef6<\/a> \u7528\u65bc\u534a\u5c0e\u9ad4\u88fd\u9020\u8a2d\u5099\u3002\u9019\u4e9b\u5143\u4ef6\u7684\u8a2d\u8a08\u901a\u5e38\u7d50\u69cb\u8907\u96dc\u3001\u7d14\u5ea6\u6975\u9ad8\u3001\u5c3a\u5bf8\u516c\u5dee\u6975\u5c0f\u3002\u5b83\u5011\u5728\u78ba\u4fdd\u534a\u5c0e\u9ad4\u88fd\u7a0b\u7684\u7a69\u5b9a\u6027\u3001\u6e96\u78ba\u6027\u548c\u53ef\u9760\u6027\u65b9\u9762\u626e\u6f14\u8457\u91cd\u8981\u7684\u89d2\u8272\u3002.<\/p>\n\n\n\n

\u96a8\u8457\u5168\u7403\u534a\u5c0e\u9ad4\u7522\u696d\u7684\u5feb\u901f\u64f4\u5f35\uff0c\u4e26\u6301\u7e8c\u671d\u5411\u66f4\u5c0f\u88fd\u7a0b\u7bc0\u9ede\u3001\u66f4\u9ad8\u6574\u5408\u5ea6\u53ca\u66f4\u8907\u96dc\u7684\u88fd\u9020\u74b0\u5883\u63a8\u9032\uff0c\u534a\u5c0e\u9ad4\u8a2d\u5099\u4e5f\u671d\u5411\u66f4\u9ad8\u7cbe\u5ea6\u53ca\u66f4\u56b4\u82db\u7684\u64cd\u4f5c\u689d\u4ef6\u6f14\u9032\u3002\u56e0\u6b64\uff0c\u7cbe\u5bc6\u9676\u74f7\u5143\u4ef6\u5df2\u6210\u70ba\u73fe\u4ee3\u534a\u5c0e\u9ad4\u8a2d\u5099\u4e2d\u4e0d\u53ef\u6216\u7f3a\u7684\u300c\u96b1\u85cf\u6838\u5fc3\u96f6\u4ef6\u300d\u3002.<\/p>\n\n\n\n

\u4eca\u5929\uff0c\u7cbe\u5bc6\u9676\u74f7\u5728\u534a\u5c0e\u9ad4\u8a2d\u5099\u7cfb\u7d71\u4e2d\u7d04\u4f54 16% \u7684\u50f9\u503c\uff0c\u7a81\u986f\u5176\u5728\u4f9b\u61c9\u93c8\u4e2d\u7684\u7b56\u7565\u91cd\u8981\u6027\u3002.<\/p>\n\n\n\n

\"\"<\/figure>\n\n\n\n

2.\u70ba\u4f55\u7cbe\u5bc6\u9676\u74f7\u5728\u534a\u5c0e\u9ad4\u8a2d\u5099\u4e2d\u4e0d\u53ef\u6216\u7f3a<\/h2>\n\n\n\n

\u534a\u5c0e\u9ad4\u88fd\u9020\u6d89\u53ca\u6975\u56b4\u82db\u7684\u74b0\u5883\uff0c\u5305\u62ec\u9ad8\u6eab\u3001\u96fb\u6f3f\u8150\u8755\u3001\u8d85\u6f54\u6de8\u771f\u7a7a\u689d\u4ef6\u548c\u9ad8\u7cbe\u5ea6\u6a5f\u68b0\u904b\u52d5\u3002.<\/p>\n\n\n\n

\u50b3\u7d71\u6750\u6599\uff08\u5982\u91d1\u5c6c\u548c\u805a\u5408\u7269\uff09\u5728\u9019\u4e9b\u689d\u4ef6\u4e0b\u901a\u5e38\u6703\u56e0\u70ba\u4ee5\u4e0b\u539f\u56e0\u800c\u5931\u6548\uff1a<\/p>\n\n\n\n

    \n
  • \u71b1\u8b8a\u5f62<\/li>\n\n\n\n
  • \u5316\u5b78\u8150\u8755<\/li>\n\n\n\n
  • \u5fae\u7c92\u6c61\u67d3<\/li>\n\n\n\n
  • \u96fb\u5c0e\u6027\u554f\u984c<\/li>\n\n\n\n
  • \u78e8\u640d\u8207\u75b2\u52de<\/li>\n<\/ul>\n\n\n\n

    \u7136\u800c\uff0c\u7cbe\u5bc6\u9676\u74f7\u5177\u6709\u7368\u7279\u7684\u7279\u6027\u7d44\u5408\uff1a<\/p>\n\n\n\n

      \n
    • \u9ad8\u786c\u5ea6\u8207\u8010\u78e8\u6027<\/li>\n\n\n\n
    • \u7d55\u4f73\u7684\u96fb\u6c23\u7d55\u7de3\u6027<\/li>\n\n\n\n
    • \u512a\u7570\u7684\u71b1\u7a69\u5b9a\u6027<\/li>\n\n\n\n
    • \u71b1\u81a8\u8139\u4fc2\u6578\u4f4e<\/li>\n\n\n\n
    • \u5f37\u5927\u7684\u8010\u5316\u5b78\u6027\u548c\u8010\u96fb\u6f3f\u8150\u8755\u6027<\/li>\n\n\n\n
    • \u9ad8\u7d50\u69cb\u525b\u6027\u548c\u5c3a\u5bf8\u7a69\u5b9a\u6027<\/li>\n<\/ul>\n\n\n\n

      \u9019\u4e9b\u7279\u6027\u4f7f\u9676\u74f7\u6210\u70ba\u95dc\u9375\u534a\u5c0e\u9ad4\u88fd\u7a0b\u7684\u7406\u60f3\u6750\u6599\uff0c\u4f8b\u5982\u5149\u523b\u3001\u8755\u523b\u3001\u6c89\u7a4d\u3001\u96e2\u5b50\u690d\u5165\u548c\u71b1\u8655\u7406\u3002.<\/p>\n\n\n\n

      3.\u534a\u5c0e\u9ad4\u7522\u696d\u4f7f\u7528\u7684\u4e3b\u8981\u7cbe\u5bc6\u9676\u74f7\u6750\u6599<\/h2>\n\n\n\n

      3.1 \u6c27\u5316\u92c1 (Al\u2082O\u2083) \u9676\u74f7<\/h3>\n\n\n\n

      \u7531\u65bc\u6c27\u5316\u92c1\u9676\u74f7\u7684\u7a69\u5b9a\u6027\u3001\u6210\u672c\u6548\u76ca\u53ca\u6210\u719f\u7684\u52a0\u5de5\u6280\u8853\uff0c\u4f7f\u5176\u6210\u70ba\u534a\u5c0e\u9ad4\u8a2d\u5099\u4e2d\u4f7f\u7528\u6700\u5ee3\u6cdb\u7684\u6750\u6599\u3002.<\/p>\n\n\n\n

      \u5178\u578b\u7684\u61c9\u7528\u5305\u62ec<\/p>\n\n\n\n

        \n
      • \u8755\u523b\u5ba4\u5167\u896f\u548c\u4fdd\u8b77\u96f6\u4ef6<\/li>\n\n\n\n
      • \u914d\u6c23\u76e4<\/li>\n\n\n\n
      • \u6676\u5713\u593e\u982d\u548c\u771f\u7a7a\u5143\u4ef6<\/li>\n\n\n\n
      • \u7814\u78e8\u677f\u548c CMP \u7cfb\u7d71<\/li>\n\n\n\n
      • \u9694\u71b1\u74b0\u548c\u7d50\u69cb\u652f\u6490<\/li>\n<\/ul>\n\n\n\n

        \u5148\u9032\u7684\u534a\u5c0e\u9ad4\u74b0\u5883\u9700\u8981\u9ad8\u7d14\u5ea6\u6c27\u5316\u92c1 (\u9ad8\u9054 99.9%)\uff0c\u5728\u9019\u4e9b\u74b0\u5883\u4e2d\uff0c\u6c61\u67d3\u63a7\u5236\u662f\u975e\u5e38\u91cd\u8981\u7684\u3002.<\/p>\n\n\n\n

        3.2 \u78b3\u5316\u77fd (SiC) \u9676\u74f7<\/h3>\n\n\n\n

        \u78b3\u5316\u77fd\u88ab\u8a8d\u70ba\u662f\u534a\u5c0e\u9ad4\u8a2d\u5099\u6700\u5148\u9032\u7684\u7d50\u69cb\u9676\u74f7\u6750\u6599\u4e4b\u4e00\u3002.<\/p>\n\n\n\n

        \u4e3b\u8981\u7279\u6027\u5305\u62ec<\/p>\n\n\n\n

          \n
        • \u6975\u9ad8\u7684\u525b\u6027\uff08\u5f48\u6027\u6a21\u6578\uff09<\/li>\n\n\n\n
        • \u512a\u7570\u7684\u71b1\u50b3\u5c0e\u6027<\/li>\n\n\n\n
        • \u6975\u4f4e\u7684\u71b1\u81a8\u8139\u7387<\/li>\n\n\n\n
        • \u5149\u5b78\u7d1a\u8868\u9762\u7684\u5091\u51fa\u52a0\u5de5\u6027<\/li>\n<\/ul>\n\n\n\n

          SiC \u5ee3\u6cdb\u61c9\u7528\u65bc\uff1a<\/p>\n\n\n\n

            \n
          • \u5149\u523b\u6a5f\u5e73\u53f0<\/li>\n\n\n\n
          • \u7cbe\u5bc6\u904b\u52d5\u5e73\u53f0<\/li>\n\n\n\n
          • \u6676\u5713\u8655\u7406\u5143\u4ef6<\/li>\n\n\n\n
          • \u7b49\u96e2\u5b50\u7cfb\u7d71\u4e2d\u7684\u805a\u7126\u74b0\u548c\u7d50\u69cb\u4ef6<\/li>\n<\/ul>\n\n\n\n

            \u5728\u9ad8\u968e\u5149\u523b\u7cfb\u7d71\u4e2d\uff0c\u4ee5 SiC \u70ba\u57fa\u790e\u7684\u5143\u4ef6\u662f\u7dad\u6301\u5948\u7c73\u7d1a\u5b9a\u4f4d\u7cbe\u5ea6\u7684\u95dc\u9375\u3002.<\/p>\n\n\n\n

            3.3 \u6c2e\u5316\u77fd (Si\u2083N\u2084) \u9676\u74f7<\/h3>\n\n\n\n

            \u6c2e\u5316\u77fd\u4ee5\u5176\u512a\u7570\u7684\u5f37\u5ea6\u3001\u97cc\u6027\u548c\u6297\u71b1\u9707\u6027\u7684\u7d44\u5408\u800c\u8457\u7a31\u3002.<\/p>\n\n\n\n

            \u5373\u4f7f\u5728 1200\u00b0C \u4ee5\u4e0a\u7684\u6eab\u5ea6\u4e0b\uff0c\u5176\u6027\u80fd\u4ecd\u80fd\u4fdd\u6301\u7a69\u5b9a\uff0c\u56e0\u6b64\u9069\u7528\u65bc\u56b4\u82db\u7684\u71b1\u74b0\u5883\u3002.<\/p>\n\n\n\n

            \u61c9\u7528\u5305\u62ec<\/p>\n\n\n\n

              \n
            • \u9ad8\u901f\u9676\u74f7\u8ef8\u627f<\/li>\n\n\n\n
            • \u5c0e\u8ecc\u548c\u904b\u52d5\u7cfb\u7d71<\/li>\n\n\n\n
            • \u534a\u5c0e\u9ad4\u6676\u5713\u8655\u7406\u5143\u4ef6<\/li>\n\n\n\n
            • \u9ad8\u5f37\u5ea6\u7d50\u69cb\u96f6\u4ef6<\/li>\n\n\n\n
            • \u529f\u7387\u6a21\u7d44\u57fa\u677f<\/li>\n<\/ul>\n\n\n\n

              \u5b83\u88ab\u5ee3\u6cdb\u8a8d\u70ba\u662f\u6700\u4f73\u7684\u5168\u65b9\u4f4d\u5de5\u7a0b\u9676\u74f7\u4e4b\u4e00\u3002.<\/p>\n\n\n\n

              3.4 \u6c2e\u5316\u92c1 (AlN) \u9676\u74f7<\/h3>\n\n\n\n

              \u6c2e\u5316\u92c1\u7684\u4e3b\u8981\u50f9\u503c\u5728\u65bc\u5176\uff1a<\/p>\n\n\n\n

                \n
              • \u6975\u9ad8\u7684\u71b1\u50b3\u5c0e\u7387<\/li>\n\n\n\n
              • \u7d55\u4f73\u7684\u96fb\u6c23\u7d55\u7de3\u6027<\/li>\n\n\n\n
              • \u8207\u77fd\u6709\u826f\u597d\u7684\u71b1\u81a8\u8139\u5339\u914d\u6027<\/li>\n<\/ul>\n\n\n\n

                \u5728\u534a\u5c0e\u9ad4\u8a2d\u5099\u4e2d\uff0cAlN \u7684\u61c9\u7528\u8d8a\u4f86\u8d8a\u591a\uff1a<\/p>\n\n\n\n

                  \n
                • \u975c\u96fb\u593e\u982d (ESC)<\/li>\n\n\n\n
                • \u529f\u7387\u96fb\u5b50\u57fa\u677f<\/li>\n\n\n\n
                • \u9ad8\u6548\u80fd\u6563\u71b1\u7ba1\u7406\u5143\u4ef6<\/li>\n<\/ul>\n\n\n\n

                  \u4e00\u500b\u4e3b\u8981\u7684\u7522\u696d\u8da8\u52e2\u662f\uff0c\u7531\u65bc\u66f4\u9ad8\u7684\u6563\u71b1\u9700\u6c42\uff0c\u4ee5\u6c2e\u5316\u92c1\u9010\u6b65\u53d6\u4ee3\u6c27\u5316\u92c1\u57fa ESC\u3002.<\/p>\n\n\n\n

                  4.\u7cbe\u5bc6\u9676\u74f7\u88fd\u6210\u7684\u534a\u5c0e\u9ad4\u8a2d\u5099\u95dc\u9375\u5143\u4ef6<\/h2>\n\n\n\n

                  \u7cbe\u5bc6\u9676\u74f7\u5ee3\u6cdb\u61c9\u7528\u65bc\u5e7e\u4e4e\u6240\u6709\u4e3b\u8981\u7684\u534a\u5c0e\u9ad4\u5de5\u5177\u3002.<\/p>\n\n\n\n

                  4.1 \u5149\u523b\u8a2d\u5099<\/h3>\n\n\n\n
                    \n
                  • \u975c\u96fb\u593e\u982d (E-chucks)<\/li>\n\n\n\n
                  • \u771f\u7a7a\u5438\u76e4<\/li>\n\n\n\n
                  • \u7cbe\u5bc6\u5e73\u53f0<\/li>\n\n\n\n
                  • \u93e1\u5b50\u548c\u5149\u5b78\u652f\u6490\u7d50\u69cb<\/li>\n\n\n\n
                  • \u6c34\u51b7\u9676\u74f7\u5e73\u53f0<\/li>\n<\/ul>\n\n\n\n

                    \u9019\u4e9b\u5143\u4ef6\u9700\u8981\u8d85\u4f4e\u7684\u71b1\u8b8a\u5f62\u53ca\u6975\u9ad8\u7684\u4f4d\u7f6e\u7a69\u5b9a\u6027\u3002.<\/p>\n\n\n\n

                    4.2 \u8755\u523b\u8a2d\u5099<\/h3>\n\n\n\n
                      \n
                    • \u5c0d\u7126\u74b0<\/li>\n\n\n\n
                    • \u914d\u6c23\u76e4<\/li>\n\n\n\n
                    • \u5674\u5634\u548c\u5674\u5c04\u5668<\/li>\n\n\n\n
                    • \u8154\u9ad4\u5167\u896f<\/li>\n\n\n\n
                    • \u6297\u96fb\u6f3f\u7a97<\/li>\n\n\n\n
                    • \u7d55\u7de3\u74b0<\/li>\n<\/ul>\n\n\n\n

                      \u6b64\u8655\u4f7f\u7528\u7684\u9676\u74f7\u5fc5\u9808\u80fd\u627f\u53d7\u4fb5\u8755\u6027\u7684\u96fb\u6f3f\u74b0\u5883\u548c\u5316\u5b78\u8150\u8755\u3002.<\/p>\n\n\n\n

                      4.3 \u6676\u5713\u8655\u7406\u7cfb\u7d71<\/h3>\n\n\n\n
                        \n
                      • CMP \u7814\u78e8\u677f<\/li>\n\n\n\n
                      • \u9676\u74f7\u6676\u7247\u8f09\u5177<\/li>\n\n\n\n
                      • \u6a5f\u68b0\u624b\u81c2<\/li>\n\n\n\n
                      • \u6821\u6e96\u6cbb\u5177<\/li>\n\n\n\n
                      • \u771f\u7a7a\u5438\u9644\u5143\u4ef6<\/li>\n<\/ul>\n\n\n\n

                        \u9019\u4e9b\u96f6\u4ef6\u540c\u6642\u9700\u8981\u6a5f\u68b0\u7cbe\u5ea6\u548c\u8d85\u6f54\u6de8\u7684\u8868\u9762\u3002.<\/p>\n\n\n\n

                        5.\u5168\u7403\u7522\u696d\u8da8\u52e2<\/h2>\n\n\n\n

                        \u7cbe\u5bc6\u9676\u74f7\u7522\u696d\u662f\u9ad8\u5ea6\u96c6\u4e2d\u4e14\u6280\u8853\u5bc6\u96c6\u7684\u7522\u696d\u3002.<\/p>\n\n\n\n

                        \u76ee\u524d\uff0c\u5168\u7403\u5e02\u5834\u4e3b\u8981\u7531\u4ee5\u4e0b\u516c\u53f8\u4e3b\u5c0e\uff1a<\/p>\n\n\n\n

                          \n
                        • \u65e5\u672c<\/li>\n\n\n\n
                        • \u7f8e\u570b<\/li>\n\n\n\n
                        • \u6b50\u6d32<\/li>\n<\/ul>\n\n\n\n

                          \u9818\u5148\u7684\u516c\u53f8\u5305\u62ec\u5728\u7c89\u672b\u5408\u6210\u3001\u71d2\u7d50\u3001\u7cbe\u5bc6\u52a0\u5de5\u548c\u534a\u5c0e\u9ad4\u7d1a\u6f54\u6de8\u5ea6\u63a7\u5236\u65b9\u9762\u64c1\u6709\u5f37\u5927\u80fd\u529b\u7684\u6210\u719f\u9676\u74f7\u88fd\u9020\u5546\u3002.<\/p>\n\n\n\n

                          \u65e5\u672c\u4ecd\u7136\u662f\u7cbe\u5bc6\u9676\u74f7\u7684\u5168\u7403\u9818\u5c0e\u8005\uff0c\u5c24\u5176\u662f\u5728\u96fb\u5b50\u548c\u7d50\u69cb\u9676\u74f7\u65b9\u9762\uff0c\u800c\u7f8e\u570b\u5247\u5c08\u6ce8\u65bc\u9ad8\u6eab\u548c\u7d50\u69cb\u61c9\u7528\u3002\u6b50\u6d32\uff08\u5c24\u5176\u662f\u5fb7\u570b\u548c\u6cd5\u570b\uff09\u5247\u8457\u91cd\u65bc\u80fd\u6e90\u548c\u822a\u7a7a\u822a\u5929\u7cfb\u7d71\u7684\u5148\u9032\u7d50\u69cb\u9676\u74f7\u3002.<\/p>\n\n\n\n

                          6.\u4e2d\u570b\u7684\u767c\u5c55\u72c0\u6cc1<\/h2>\n\n\n\n

                          \u901a\u904e\u9577\u671f\u7684\u570b\u5bb6\u7814\u7a76\u8a08\u5283\u548c\u7522\u696d\u767c\u5c55\u8209\u63aa\uff0c\u4e2d\u570b\u5728\u7cbe\u5bc6\u9676\u74f7\u6280\u8853\u65b9\u9762\u53d6\u5f97\u4e86\u91cd\u5927\u9032\u5c55\u3002.<\/p>\n\n\n\n

                          \u4e3b\u8981\u6210\u5c31\u5305\u62ec<\/p>\n\n\n\n

                            \n
                          • \u958b\u767c\u5148\u9032\u7684\u7c89\u672b\u88fd\u5099\u65b9\u6cd5\uff08\u56fa\u614b\u3001\u6db2\u76f8\u3001\u6c23\u76f8\u5408\u6210\uff09<\/li>\n\n\n\n
                          • \u8fd1\u6de8\u6210\u5f62\u6280\u8853\u7684\u61c9\u7528\uff0c\u4f8b\u5982\u5c04\u51fa\u6210\u578b\u548c\u81a0\u5e36\u9444\u9020<\/li>\n\n\n\n
                          • \u71d2\u7d50\u6280\u8853\u7684\u9032\u5c55\uff0c\u5305\u62ec\u71b1\u58d3 (HP) \u548c\u6c23\u58d3\u71d2\u7d50 (GPS)<\/li>\n\n\n\n
                          • \u5927\u5c3a\u5bf8\u6c2e\u5316\u77fd\u71d2\u7d50\u7684\u7a81\u7834\u6027\u767c\u5c55<\/li>\n\n\n\n
                          • \u7cbe\u5bc6\u52a0\u5de5\u6280\u8853\uff08\u5982\u653e\u96fb\u52a0\u5de5\u3001\u96f7\u5c04\u52a0\u5de5\u548c\u8d85\u97f3\u6ce2\u52a0\u5de5\uff09\u7684\u63a1\u7528\u65e5\u76ca\u589e\u52a0<\/li>\n<\/ul>\n\n\n\n

                            \u5118\u7ba1\u6709\u9019\u4e9b\u9032\u6b65\uff0c\u9ad8\u968e\u534a\u5c0e\u9ad4\u7d1a\u9676\u74f7\u4ecd\u9762\u81e8\u91cf\u7522\u7a69\u5b9a\u6027\u8207\u4e00\u81f4\u6027\u7684\u6311\u6230\u3002.<\/p>\n\n\n\n

                            7.\u7522\u696d\u9762\u81e8\u7684\u4e3b\u8981\u6311\u6230<\/h2>\n\n\n\n

                            \u5118\u7ba1\u4e2d\u570b\u5df2\u5728\u4e2d\u4f4e\u7aef\u9676\u74f7\u9818\u57df\u5f62\u6210\u4e86\u8f03\u5f37\u7684\u5be6\u529b\uff0c\u4f46\u4ecd\u5b58\u5728\u4e00\u4e9b\u74f6\u9838\uff1a<\/p>\n\n\n\n

                            7.1 \u4f9d\u8cf4\u9032\u53e3\u9ad8\u7aef\u7c89\u672b<\/h3>\n\n\n\n

                            \u9ad8\u6027\u80fd\u7c89\u672b\uff0c\u4f8b\u5982<\/p>\n\n\n\n

                              \n
                            • \u6c2e\u5316\u77fd (Si\u2083N\u2084)<\/li>\n\n\n\n
                            • \u6c2e\u5316\u92c1 (AlN)<\/li>\n\n\n\n
                            • \u8d85\u9ad8\u7d14\u6c27\u5316\u92c1<\/li>\n<\/ul>\n\n\n\n

                              \u4ecd\u4e3b\u8981\u5f9e\u65e5\u672c\u548c\u6b50\u6d32\u9032\u53e3\u3002.<\/p>\n\n\n\n

                              7.2 \u9ad8\u7aef\u8655\u7406\u7684\u96e3\u5ea6<\/h3>\n\n\n\n

                              \u534a\u5c0e\u9ad4\u9676\u74f7\u9700\u8981\uff1a<\/p>\n\n\n\n

                                \n
                              • \u6b21\u5fae\u7c73\u7cbe\u5bc6\u52a0\u5de5<\/li>\n\n\n\n
                              • \u8d85\u4f4e\u8868\u9762\u7c97\u7cd9\u5ea6<\/li>\n\n\n\n
                              • \u7121\u7455\u75b5\u8868\u9762<\/li>\n<\/ul>\n\n\n\n

                                \u9019\u5728\u6280\u8853\u4e0a\u4ecd\u5177\u6709\u6311\u6230\u6027\uff0c\u800c\u4e14\u6210\u672c\u9ad8\u6602\u3002.<\/p>\n\n\n\n

                                7.3 \u9577\u5408\u683c\u9031\u671f<\/h3>\n\n\n\n

                                \u5373\u4f7f\u6750\u6599\u7b26\u5408\u898f\u683c\uff0c\u534a\u5c0e\u9ad4\u5ba2\u6236\u4ecd\u9700\u8981\u9577\u671f\u9a57\u8b49\uff0c\u5305\u62ec<\/p>\n\n\n\n

                                  \n
                                • \u7b49\u96e2\u5b50\u96fb\u963b\u6e2c\u8a66<\/li>\n\n\n\n
                                • \u71b1\u5faa\u74b0\u53ef\u9760\u6027<\/li>\n\n\n\n
                                • \u6e05\u6f54\u5ea6\u8a8d\u8b49<\/li>\n<\/ul>\n\n\n\n

                                  \u9019\u986f\u8457\u6e1b\u6162\u4e86\u5546\u696d\u5316\u7684\u901f\u5ea6\u3002.<\/p>\n\n\n\n

                                  8.\u7522\u696d\u8da8\u52e2\u8207\u672a\u4f86\u5c55\u671b<\/h2>\n\n\n\n

                                  8.1 \u78b3\u5316\u77fd\u8207\u7b2c\u4e09\u4ee3\u534a\u5c0e\u9ad4\u7684\u5feb\u901f\u6210\u9577<\/h3>\n\n\n\n

                                  \u96fb\u52d5\u8eca\u3001\u53ef\u518d\u751f\u80fd\u6e90\u53ca\u9ad8\u529f\u7387\u96fb\u5b50\u7522\u54c1\u7684\u64f4\u5c55\uff0c\u5e36\u52d5\u4e86\u5c0d SiC \u57fa\u6750\u6599\u548c\u5143\u4ef6\u7684\u5f37\u52c1\u9700\u6c42\u3002.<\/p>\n\n\n\n

                                  8.2 \u534a\u5c0e\u9ad4\u8a2d\u5099\u4f9b\u61c9\u93c8\u7684\u672c\u5730\u5316<\/h3>\n\n\n\n

                                  \u96a8\u8457\u570b\u5167\u534a\u5c0e\u9ad4\u8a2d\u5099\u88fd\u9020\u5546\u7684\u6210\u9577\uff0c\u5c0d\u65bc\u672c\u5730\u5316\u7cbe\u5bc6\u9676\u74f7\u5143\u4ef6\u7684\u9700\u6c42\u4e5f\u5728\u52a0\u901f\uff0c\u5c24\u5176\u662f\u5c0d\u65bc\uff1a<\/p>\n\n\n\n

                                    \n
                                  • \u975c\u96fb\u593e\u982d<\/li>\n\n\n\n
                                  • \u5c0d\u7126\u74b0<\/li>\n\n\n\n
                                  • \u9676\u74f7\u6a5f\u68b0\u624b\u81c2<\/li>\n\n\n\n
                                  • \u9ad8\u968e SiC \u7d50\u69cb<\/li>\n<\/ul>\n\n\n\n

                                    8.3 \u5411\u66f4\u5927\u578b\u3001\u66f4\u7cbe\u5bc6\u7684\u5143\u4ef6\u904e\u6e21<\/h3>\n\n\n\n

                                    \u672a\u4f86\u534a\u5c0e\u9ad4\u7bc0\u9ede\u8981\u6c42\uff1a<\/p>\n\n\n\n

                                      \n
                                    • \u8f03\u5927\u7684\u9676\u74f7\u7d50\u69cb<\/li>\n\n\n\n
                                    • \u66f4\u9ad8\u7684\u7dad\u5ea6\u7a69\u5b9a\u6027<\/li>\n\n\n\n
                                    • \u8f03\u4f4e\u7684\u71b1\u81a8\u8139<\/li>\n\n\n\n
                                    • \u66f4\u9ad8\u7684\u6e05\u6f54\u6a19\u6e96<\/li>\n<\/ul>\n\n\n\n

                                      \u9019\u5c07\u9676\u74f7\u88fd\u9020\u63a8\u5411\u66f4\u5148\u9032\u7684\u6280\u8853\u3002.<\/p>\n\n\n\n

                                      9.\u7e3d\u7d50<\/h2>\n\n\n\n

                                      \u7cbe\u5bc6\u9676\u74f7\u4e0d\u518d\u53ea\u662f\u534a\u5c0e\u9ad4\u8a2d\u5099\u4e2d\u7684\u8f14\u52a9\u6750\u6599\uff0c\u800c\u662f\u76f4\u63a5\u6c7a\u5b9a\u8a2d\u5099\u6027\u80fd\u548c\u6676\u7247\u88fd\u9020\u54c1\u8cea\u7684\u57fa\u790e\u5143\u4ef6\u3002.<\/p>\n\n\n\n

                                      \u5f9e\u5149\u523b\u7cfb\u7d71\u5230\u7b49\u96e2\u5b50\u8755\u523b\u5de5\u5177\uff0c\u7cbe\u5bc6\u9676\u74f7\u5728\u6574\u500b\u534a\u5c0e\u9ad4\u7522\u696d\u4e2d\u626e\u6f14\u8457\u7121\u8072\u4f46\u95dc\u9375\u7684\u89d2\u8272\u3002.<\/p>\n\n\n\n

                                      \u96a8\u8457\u5168\u7403\u534a\u5c0e\u9ad4\u88fd\u9020\u696d\u7684\u4e0d\u65b7\u767c\u5c55\uff0c\u7cbe\u5bc6\u9676\u74f7\u4ecd\u5c07\u662f\u6700\u5177\u7b56\u7565\u91cd\u8981\u6027\u7684\u5148\u9032\u6750\u6599\u4e4b\u4e00\uff0c\u5728\u6280\u8853\u5275\u65b0\u8207\u4f9b\u61c9\u93c8\u672c\u5730\u5316\u5169\u65b9\u9762\u7684\u6a5f\u6703\u90fd\u5c07\u4e0d\u65b7\u589e\u52a0\u3002.<\/p>","protected":false},"excerpt":{"rendered":"

                                      1. Introduction Precision ceramics refer to high-performance advanced ceramic components used in semiconductor manufacturing equipment. These components are typically designed with complex structures, ultra-high purity, and extremely tight dimensional tolerances. They play a critical role in ensuring the stability, accuracy, and reliability of semiconductor fabrication processes. With the rapid expansion of the global semiconductor industry […]<\/p>\n","protected":false},"author":1,"featured_media":2019,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[6],"tags":[53,52,51,68,56,66,67,60,69,65,57,61,63,55,64,58,62,54,59],"class_list":["post-2018","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-applications-cases","tag-advanced-materials","tag-automation","tag-cleanroom","tag-electrostatic-chuck","tag-high-tech-factory","tag-industrial-equipment","tag-laboratory","tag-lithography-equipment","tag-metal-machinery","tag-microfabrication","tag-precision-engineering","tag-precision-manufacturing","tag-robotics","tag-semiconductor","tag-semiconductor-fabrication","tag-silicon-wafer","tag-sterile-environment","tag-vacuum-chuck","tag-wafer"],"_links":{"self":[{"href":"https:\/\/www.xkh-ceramics.com\/zh\/wp-json\/wp\/v2\/posts\/2018","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.xkh-ceramics.com\/zh\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.xkh-ceramics.com\/zh\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/zh\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/zh\/wp-json\/wp\/v2\/comments?post=2018"}],"version-history":[{"count":1,"href":"https:\/\/www.xkh-ceramics.com\/zh\/wp-json\/wp\/v2\/posts\/2018\/revisions"}],"predecessor-version":[{"id":2020,"href":"https:\/\/www.xkh-ceramics.com\/zh\/wp-json\/wp\/v2\/posts\/2018\/revisions\/2020"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/zh\/wp-json\/wp\/v2\/media\/2019"}],"wp:attachment":[{"href":"https:\/\/www.xkh-ceramics.com\/zh\/wp-json\/wp\/v2\/media?parent=2018"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/zh\/wp-json\/wp\/v2\/categories?post=2018"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/zh\/wp-json\/wp\/v2\/tags?post=2018"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}