{"id":2335,"date":"2026-05-29T03:42:15","date_gmt":"2026-05-29T03:42:15","guid":{"rendered":"https:\/\/www.xkh-ceramics.com\/?post_type=product&#038;p=2335"},"modified":"2026-05-29T03:42:16","modified_gmt":"2026-05-29T03:42:16","slug":"sic-ceramic-tray-for-wafer-processing-custom-semiconductor-applications","status":"publish","type":"product","link":"https:\/\/www.xkh-ceramics.com\/vi\/product\/sic-ceramic-tray-for-wafer-processing-custom-semiconductor-applications\/","title":{"rendered":"Khay g\u1ed1m SiC d\u00f9ng trong x\u1eed l\u00fd wafer v\u00e0 c\u00e1c \u1ee9ng d\u1ee5ng b\u00e1n d\u1eabn t\u00f9y ch\u1ec9nh"},"content":{"rendered":"<p class=\"isSelectedEnd\"><img fetchpriority=\"high\" decoding=\"async\" class=\"size-medium wp-image-2336 alignright\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/SiC-Ceramic-Tray-for-Wafer-Processing-Custom-Semiconductor-Applications-4-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/SiC-Ceramic-Tray-for-Wafer-Processing-Custom-Semiconductor-Applications-4-300x300.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/SiC-Ceramic-Tray-for-Wafer-Processing-Custom-Semiconductor-Applications-4-150x150.png 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/SiC-Ceramic-Tray-for-Wafer-Processing-Custom-Semiconductor-Applications-4-768x768.png 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/SiC-Ceramic-Tray-for-Wafer-Processing-Custom-Semiconductor-Applications-4-12x12.png 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/SiC-Ceramic-Tray-for-Wafer-Processing-Custom-Semiconductor-Applications-4-600x600.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/SiC-Ceramic-Tray-for-Wafer-Processing-Custom-Semiconductor-Applications-4-100x100.png 100w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/SiC-Ceramic-Tray-for-Wafer-Processing-Custom-Semiconductor-Applications-4.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>Khay g\u1ed1m SiC l\u00e0 m\u1ed9t khay ch\u1ee9a b\u1eb1ng cacbua silic (SiC) hi\u1ec7u su\u1ea5t cao, \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf d\u00e0nh cho c\u00e1c quy tr\u00ecnh x\u1eed l\u00fd t\u1ea5m wafer ti\u00ean ti\u1ebfn v\u00e0 m\u00f4i tr\u01b0\u1eddng s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn. \u0110\u01b0\u1ee3c ch\u1ebf t\u1ea1o t\u1eeb v\u1eadt li\u1ec7u g\u1ed1m cacbua silic (SiC) c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao, c\u00e1c khay n\u00e0y mang l\u1ea1i \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh nhi\u1ec7t v\u01b0\u1ee3t tr\u1ed9i, \u0111\u1ed9 b\u1ec1n c\u01a1 h\u1ecdc cao v\u00e0 kh\u1ea3 n\u0103ng ch\u1ed1ng \u0103n m\u00f2n h\u00f3a h\u1ecdc xu\u1ea5t s\u1eafc, ph\u00f9 h\u1ee3p cho c\u00e1c \u1ee9ng d\u1ee5ng \u0111\u00f2i h\u1ecfi nhi\u1ec7t \u0111\u1ed9 cao.<\/p>\n<p class=\"isSelectedEnd\">C\u00e1c khay g\u1ed1m SiC \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i trong c\u00e1c quy tr\u00ecnh s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn nh\u01b0:<\/p>\n<ul data-spread=\"false\">\n<li>Quy tr\u00ecnh LPCVD \/ CVD<\/li>\n<li>Qu\u00e1 tr\u00ecnh \u1ee7 t\u1ea5m wafer<\/li>\n<li>S\u1ef1 khu\u1ebfch t\u00e1n<\/li>\n<li>Qu\u00e1 tr\u00ecnh oxy h\u00f3a<\/li>\n<li>Ph\u01b0\u01a1ng ph\u00e1p epitaxy (EPI)<\/li>\n<li>Nung k\u1ebft \u1edf nhi\u1ec7t \u0111\u1ed9 cao<\/li>\n<li>X\u1eed l\u00fd nhi\u1ec7t trong ng\u00e0nh b\u00e1n d\u1eabn<\/li>\n<\/ul>\n<p class=\"isSelectedEnd\">D\u00e0nh cho:<\/p>\n<ul data-spread=\"false\">\n<li>Ch\u1ebf t\u1ea1o t\u1ea5m wafer 2 inch<\/li>\n<li>Ch\u1ebf t\u1ea1o t\u1ea5m wafer 4 inch<\/li>\n<li>Quy tr\u00ecnh ch\u1ebf t\u1ea1o t\u1ea5m wafer 6 inch<\/li>\n<li>Ch\u1ebf bi\u1ebfn t\u1ea5m wafer 8 inch<\/li>\n<li>K\u00edch th\u01b0\u1edbc v\u00e0 c\u1ea5u tr\u00fac wafer t\u00f9y ch\u1ec9nh<\/li>\n<\/ul>\n<p class=\"isSelectedEnd\">C\u00e1c khay n\u00e0y \u0111\u1ea3m b\u1ea3o kh\u1ea3 n\u0103ng \u0111\u1ee1 wafer tuy\u1ec7t v\u1eddi, s\u1ef1 \u0111\u1ed3ng \u0111\u1ec1u v\u1ec1 nhi\u1ec7t \u0111\u1ed9 v\u00e0 ki\u1ec3m so\u00e1t \u00f4 nhi\u1ec5m trong su\u1ed1t qu\u00e1 tr\u00ecnh s\u1ea3n xu\u1ea5t.<\/p>\n<div contenteditable=\"false\">\n<hr \/>\n<\/div>\n<h1>\u0110\u1eb7c \u0111i\u1ec3m s\u1ea3n ph\u1ea9m<\/h1>\n<h2>Kh\u1ea3 n\u0103ng ch\u1ecbu nhi\u1ec7t \u0111\u1ed9 cao tuy\u1ec7t v\u1eddi<\/h2>\n<p class=\"isSelectedEnd\">C\u00e1c khay g\u1ed1m cacbua silic duy tr\u00ec \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh v\u01b0\u1ee3t tr\u1ed9i trong \u0111i\u1ec1u ki\u1ec7n nhi\u1ec7t \u0111\u1ed9 c\u1ef1c cao, khi\u1ebfn ch\u00fang tr\u1edf th\u00e0nh l\u1ef1a ch\u1ecdn l\u00fd t\u01b0\u1edfng cho c\u00e1c \u1ee9ng d\u1ee5ng l\u00f2 nung b\u00e1n d\u1eabn v\u00e0 h\u1ec7 th\u1ed1ng x\u1eed l\u00fd nhi\u1ec7t.<\/p>\n<h3>\u01afu \u0111i\u1ec3m:<\/h3>\n<ul data-spread=\"false\">\n<li>Kh\u1ea3 n\u0103ng ch\u1ecbu s\u1ed1c nhi\u1ec7t tuy\u1ec7t v\u1eddi<\/li>\n<li>Hi\u1ec7u su\u1ea5t \u1ed5n \u0111\u1ecbnh trong qu\u00e1 tr\u00ecnh gia nhi\u1ec7t v\u00e0 l\u00e0m m\u00e1t nhanh<\/li>\n<li>Tu\u1ed5i th\u1ecd cao khi ho\u1ea1t \u0111\u1ed9ng li\u00ean t\u1ee5c \u1edf nhi\u1ec7t \u0111\u1ed9 cao<\/li>\n<\/ul>\n<div contenteditable=\"false\">\n<hr \/>\n<\/div>\n<h2>\u0110\u1ed9 b\u1ec1n c\u01a1 h\u1ecdc cao<\/h2>\n<p class=\"isSelectedEnd\">So v\u1edbi c\u00e1c v\u1eadt li\u1ec7u g\u1ed1m truy\u1ec1n th\u1ed1ng, khay SiC c\u00f3 \u0111\u1ed9 c\u1ee9ng v\u00e0 \u0111\u1ed9 b\u1ec1n u\u1ed1n cao h\u01a1n, gi\u00fap gi\u1ea3m thi\u1ec3u nguy c\u01a1 bi\u1ebfn d\u1ea1ng ho\u1eb7c n\u1ee9t v\u1ee1 trong qu\u00e1 tr\u00ecnh gia c\u00f4ng.<\/p>\n<h3>L\u1ee3i \u00edch:<\/h3>\n<ul data-spread=\"false\">\n<li>Kh\u1ea3 n\u0103ng ch\u1ecbu t\u1ea3i cao<\/li>\n<li>\u0110\u1ed9 \u1ed5n \u0111\u1ecbnh k\u00edch th\u01b0\u1edbc tuy\u1ec7t v\u1eddi<\/li>\n<li>Ph\u00f9 h\u1ee3p v\u1edbi c\u00e1c h\u1ec7 th\u1ed1ng x\u1eed l\u00fd t\u1ea5m wafer t\u1ef1 \u0111\u1ed9ng<\/li>\n<li>Gi\u1ea3m t\u1ea7n su\u1ea5t b\u1ea3o tr\u00ec<\/li>\n<\/ul>\n<div contenteditable=\"false\">\n<hr \/>\n<\/div>\n<h2>Kh\u1ea3 n\u0103ng ch\u1ed1ng h\u00f3a ch\u1ea5t v\u01b0\u1ee3t tr\u1ed9i<\/h2>\n<p class=\"isSelectedEnd\">C\u00e1c khay g\u1ed1m SiC c\u00f3 kh\u1ea3 n\u0103ng ch\u1ed1ng l\u1ea1i c\u00e1c h\u00f3a ch\u1ea5t \u0103n m\u00f2n v\u00e0 kh\u00ed qu\u00e1 tr\u00ecnh ph\u1ea3n \u1ee9ng th\u01b0\u1eddng \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng trong s\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn.<\/p>\n<h3>Ch\u1ed1ng l\u1ea1i:<\/h3>\n<ul data-spread=\"false\">\n<li>Axit<\/li>\n<li>Ch\u1ea5t ki\u1ec1m<\/li>\n<li>Kh\u00ed \u0103n m\u00f2n<\/li>\n<li>H\u01a1i h\u00f3a ch\u1ea5t<\/li>\n<\/ul>\n<p class=\"isSelectedEnd\">\u0110i\u1ec1u n\u00e0y \u0111\u1ea3m b\u1ea3o \u0111\u1ed9 tin c\u1eady l\u00e2u d\u00e0i trong c\u00e1c m\u00f4i tr\u01b0\u1eddng s\u1ea3n xu\u1ea5t kh\u1eafc nghi\u1ec7t.<\/p>\n<div contenteditable=\"false\">\n<hr \/>\n<\/div>\n<h2>\u0110\u1ed9 d\u1eabn nhi\u1ec7t tuy\u1ec7t v\u1eddi<\/h2>\n<p class=\"isSelectedEnd\">\u0110\u1ed9 d\u1eabn nhi\u1ec7t cao c\u1ee7a cacbua silic gi\u00fap truy\u1ec1n nhi\u1ec7t nhanh ch\u00f3ng v\u00e0 \u0111\u1ed3ng \u0111\u1ec1u tr\u00ean b\u1ec1 m\u1eb7t khay.<\/p>\n<h3>L\u1ee3i \u00edch c\u1ee7a quy tr\u00ecnh:<\/h3>\n<ul data-spread=\"false\">\n<li>C\u1ea3i thi\u1ec7n \u0111\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u v\u1ec1 nhi\u1ec7t \u0111\u1ed9 c\u1ee7a t\u1ea5m wafer<\/li>\n<li>Gi\u1ea3m \u0111\u1ed9 ch\u00eanh l\u1ec7ch nhi\u1ec7t \u0111\u1ed9<\/li>\n<li>T\u0103ng c\u01b0\u1eddng t\u00ednh nh\u1ea5t qu\u00e1n c\u1ee7a quy tr\u00ecnh<\/li>\n<li>Gi\u1ea3m t\u1ef7 l\u1ec7 l\u1ed7i tr\u00ean t\u1ea5m wafer<\/li>\n<\/ul>\n<div contenteditable=\"false\">\n<hr \/>\n<\/div>\n<h2>H\u1ec7 s\u1ed1 gi\u00e3n n\u1edf nhi\u1ec7t th\u1ea5p<\/h2>\n<p class=\"isSelectedEnd\">H\u1ec7 s\u1ed1 gi\u00e3n n\u1edf nhi\u1ec7t th\u1ea5p gi\u00fap duy tr\u00ec \u0111\u1ed9 ch\u00ednh x\u00e1c k\u1ebft c\u1ea5u trong c\u00e1c chu k\u1ef3 nhi\u1ec7t l\u1eb7p \u0111i l\u1eb7p l\u1ea1i.<\/p>\n<h3>K\u1ebft qu\u1ea3:<\/h3>\n<ul data-spread=\"false\">\n<li>Gi\u1ea3m hi\u1ec7n t\u01b0\u1ee3ng cong v\u00eanh<\/li>\n<li>C\u1ea3i thi\u1ec7n \u0111\u1ed9 ch\u00ednh x\u00e1c khi c\u0103n ch\u1ec9nh t\u1ea5m wafer<\/li>\n<li>N\u00e2ng cao t\u00ednh \u1ed5n \u0111\u1ecbnh trong s\u1ea3n xu\u1ea5t<\/li>\n<\/ul>\n<div contenteditable=\"false\">\n<hr \/>\n<\/div>\n<h2>\u0110\u1ed9 tinh khi\u1ebft c\u1ea5p b\u00e1n d\u1eabn<\/h2>\n<p class=\"isSelectedEnd\">\u0110\u01b0\u1ee3c s\u1ea3n xu\u1ea5t t\u1eeb v\u1eadt li\u1ec7u cacbua silic c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao 99,9%, c\u00e1c khay n\u00e0y gi\u00fap gi\u1ea3m thi\u1ec3u \u00f4 nhi\u1ec5m h\u1ea1t v\u00e0 \u0111\u00e1p \u1ee9ng c\u00e1c ti\u00eau chu\u1ea9n s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn trong ph\u00f2ng s\u1ea1ch.<\/p>\n<div contenteditable=\"false\">\n<hr \/>\n<\/div>\n<h1>Th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/h1>\n<table>\n<tbody>\n<tr>\n<th>T\u00e0i s\u1ea3n<\/th>\n<th>Gi\u00e1 tr\u1ecb<\/th>\n<\/tr>\n<tr>\n<td>Ch\u1ea5t li\u1ec7u<\/td>\n<td>Cacbua silic (SiC)<\/td>\n<\/tr>\n<tr>\n<td>S\u1ef1 tinh khi\u1ebft<\/td>\n<td>99.9%<\/td>\n<\/tr>\n<tr>\n<td>M\u00e0u s\u1eafc<\/td>\n<td>M\u00e0u \u0111en<\/td>\n<\/tr>\n<tr>\n<td>M\u1eadt \u0111\u1ed9<\/td>\n<td>3,14 g\/cm\u00b3<\/td>\n<\/tr>\n<tr>\n<td>\u0110\u1ed9 b\u1ec1n u\u1ed1n<\/td>\n<td>410 MPa<\/td>\n<\/tr>\n<tr>\n<td>H\u1ec7 s\u1ed1 \u0111\u00e0n h\u1ed3i c\u1ee7a Young<\/td>\n<td>430 GPa<\/td>\n<\/tr>\n<tr>\n<td>H\u1ec7 s\u1ed1 Poisson<\/td>\n<td>0.17<\/td>\n<\/tr>\n<tr>\n<td>\u0110\u1ed9 b\u1ec1n g\u00e3y<\/td>\n<td>2\u20133 MPa\u00b7m\u00b9\/\u00b2<\/td>\n<\/tr>\n<tr>\n<td>H\u1ec7 s\u1ed1 gi\u00e3n n\u1edf nhi\u1ec7t<\/td>\n<td>4,1 \u00d7 10\u207b\u2076\/K<\/td>\n<\/tr>\n<tr>\n<td>\u0110\u1ed9 d\u1eabn nhi\u1ec7t<\/td>\n<td>170 W\/m\u00b7K<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<div contenteditable=\"false\">\n<hr \/>\n<\/div>\n<h1>So s\u00e1nh c\u00e1c c\u00f4ng ngh\u1ec7 s\u1ea3n xu\u1ea5t SiC<\/h1>\n<table>\n<tbody>\n<tr>\n<td>Ph\u01b0\u01a1ng ph\u00e1p s\u1ea3n xu\u1ea5t<\/td>\n<td>T\u00ednh n\u0103ng<\/td>\n<td>C\u00e1c \u1ee9ng d\u1ee5ng \u0111i\u1ec3n h\u00ecnh<\/td>\n<\/tr>\n<tr>\n<td>SiC nung k\u1ebft kh\u00f4ng \u00e1p su\u1ea5t<\/td>\n<td>\u0110\u1ed9 tinh khi\u1ebft cao v\u00e0 t\u00ednh \u1ed5n \u0111\u1ecbnh nhi\u1ec7t<\/td>\n<td>Khay \u0111\u1ef1ng t\u1ea5m b\u00e1n d\u1eabn<\/td>\n<\/tr>\n<tr>\n<td>SiC \u00e9p n\u00f3ng<\/td>\n<td>\u0110\u1ed9 b\u1ec1n c\u01a1 h\u1ecdc cao h\u01a1n<\/td>\n<td>C\u00e1c b\u1ed9 ph\u1eadn g\u1ed1m k\u1ebft c\u1ea5u<\/td>\n<\/tr>\n<tr>\n<td>CVD SiC<\/td>\n<td>B\u1ec1 m\u1eb7t c\u00f3 \u0111\u1ed9 tinh khi\u1ebft c\u1ef1c cao<\/td>\n<td>Thi\u1ebft b\u1ecb b\u00e1n d\u1eabn ti\u00ean ti\u1ebfn<\/td>\n<\/tr>\n<tr>\n<td>Si-SiC<\/td>\n<td>Gi\u1ea3i ph\u00e1p ti\u1ebft ki\u1ec7m chi ph\u00ed<\/td>\n<td>C\u00e1c b\u1ed9 ph\u1eadn c\u1ee7a l\u00f2 c\u00f4ng nghi\u1ec7p<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<div contenteditable=\"false\">\n<hr \/>\n<\/div>\n<h1>\u1ee8ng d\u1ee5ng c\u1ee7a khay g\u1ed1m SiC<\/h1>\n<h2><img decoding=\"async\" class=\"size-medium wp-image-2338 alignright\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/SiC-Ceramic-Tray-for-Wafer-Processing-Custom-Semiconductor-Applications-2-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/SiC-Ceramic-Tray-for-Wafer-Processing-Custom-Semiconductor-Applications-2-300x300.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/SiC-Ceramic-Tray-for-Wafer-Processing-Custom-Semiconductor-Applications-2-150x150.png 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/SiC-Ceramic-Tray-for-Wafer-Processing-Custom-Semiconductor-Applications-2-768x768.png 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/SiC-Ceramic-Tray-for-Wafer-Processing-Custom-Semiconductor-Applications-2-12x12.png 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/SiC-Ceramic-Tray-for-Wafer-Processing-Custom-Semiconductor-Applications-2-600x600.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/SiC-Ceramic-Tray-for-Wafer-Processing-Custom-Semiconductor-Applications-2-100x100.png 100w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/SiC-Ceramic-Tray-for-Wafer-Processing-Custom-Semiconductor-Applications-2.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>Ch\u1ebf bi\u1ebfn t\u1ea5m b\u00e1n d\u1eabn<\/h2>\n<p class=\"isSelectedEnd\">\u0110\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i l\u00e0m khay \u0111\u1ef1ng wafer v\u00e0 khay \u0111\u1ee1 trong:<\/p>\n<ul data-spread=\"false\">\n<li>H\u1ec7 th\u1ed1ng LPCVD<\/li>\n<li>H\u1ec7 th\u1ed1ng CVD<\/li>\n<li>L\u00f2 khu\u1ebfch t\u00e1n<\/li>\n<li>L\u00f2 oxy h\u00f3a<\/li>\n<li>Thi\u1ebft b\u1ecb \u1ee7<\/li>\n<li>L\u00f2 ph\u1ea3n \u1ee9ng nhi\u1ec7t b\u00e1n d\u1eabn<\/li>\n<\/ul>\n<p class=\"isSelectedEnd\">T\u01b0\u01a1ng th\u00edch v\u1edbi:<\/p>\n<ul data-spread=\"false\">\n<li>T\u1ea5m silicon<\/li>\n<li>T\u1ea5m wafer sapphire<\/li>\n<li>T\u1ea5m wafer SiC<\/li>\n<li>T\u1ea5m wafer GaN<\/li>\n<li>Ch\u1ea5t n\u1ec1n b\u00e1n d\u1eabn h\u1ee3p ch\u1ea5t<\/li>\n<\/ul>\n<div contenteditable=\"false\">\n<hr \/>\n<\/div>\n<h2>Nung k\u1ebft \u1edf nhi\u1ec7t \u0111\u1ed9 cao<\/h2>\n<p class=\"isSelectedEnd\">R\u1ea5t ph\u00f9 h\u1ee3p cho c\u00e1c \u1ee9ng d\u1ee5ng nung k\u1ebft g\u1ed1m s\u1ee9 v\u00e0 b\u1ed9t cao c\u1ea5p \u0111\u00f2i h\u1ecfi:<\/p>\n<ul data-spread=\"false\">\n<li>\u0110\u1ed9 \u1ed5n \u0111\u1ecbnh nhi\u1ec7t<\/li>\n<li>Kh\u1ea3 n\u0103ng ch\u1ed1ng oxy h\u00f3a<\/li>\n<li>Tu\u1ed5i th\u1ecd ho\u1ea1t \u0111\u1ed9ng cao<\/li>\n<\/ul>\n<div contenteditable=\"false\">\n<hr \/>\n<\/div>\n<h2>Thi\u1ebft b\u1ecb ch\u1ebf bi\u1ebfn h\u00f3a ch\u1ea5t<\/h2>\n<p class=\"isSelectedEnd\">Ph\u00f9 h\u1ee3p v\u1edbi c\u00e1c m\u00f4i tr\u01b0\u1eddng h\u00f3a ch\u1ea5t kh\u1eafc nghi\u1ec7t nh\u1edd kh\u1ea3 n\u0103ng ch\u1ed1ng \u0103n m\u00f2n v\u01b0\u1ee3t tr\u1ed9i.<\/p>\n<p class=\"isSelectedEnd\">C\u00e1c \u1ee9ng d\u1ee5ng bao g\u1ed3m:<\/p>\n<ul data-spread=\"false\">\n<li>B\u1ec3 ph\u1ea3n \u1ee9ng h\u00f3a h\u1ecdc<\/li>\n<li>Quy tr\u00ecnh x\u1eed l\u00fd \u01b0\u1edbt trong ng\u00e0nh b\u00e1n d\u1eabn<\/li>\n<li>M\u00f4i tr\u01b0\u1eddng kh\u00ed \u0103n m\u00f2n<\/li>\n<\/ul>\n<div contenteditable=\"false\">\n<hr \/>\n<\/div>\n<h2>S\u1ea3n xu\u1ea5t quang h\u1ecdc v\u00e0 ch\u00ednh x\u00e1c<\/h2>\n<p class=\"isSelectedEnd\">Cung c\u1ea5p s\u1ef1 h\u1ed7 tr\u1ee3 \u1ed5n \u0111\u1ecbnh cho:<\/p>\n<ul data-spread=\"false\">\n<li>Ch\u1ea5t n\u1ec1n quang h\u1ecdc<\/li>\n<li>C\u00e1c linh ki\u1ec7n quang h\u1ecdc b\u1eb1ng sapphire<\/li>\n<li>C\u00e1c b\u1ed9 ph\u1eadn g\u1ed1m s\u1ee9 ch\u00ednh x\u00e1c<\/li>\n<\/ul>\n<div contenteditable=\"false\">\n<hr \/>\n<\/div>\n<h2>H\u1ec7 th\u1ed1ng nhi\u1ec7t trong ng\u00e0nh h\u00e0ng kh\u00f4ng v\u0169 tr\u1ee5 v\u00e0 c\u00f4ng nghi\u1ec7p<\/h2>\n<p class=\"isSelectedEnd\">\u0110\u01b0\u1ee3c s\u1eed d\u1ee5ng trong c\u00e1c ng\u00e0nh c\u00f4ng nghi\u1ec7p c\u00f3 y\u00eau c\u1ea7u:<\/p>\n<ul data-spread=\"false\">\n<li>V\u1eadt li\u1ec7u nh\u1eb9, c\u00f3 \u0111\u1ed9 b\u1ec1n cao<\/li>\n<li>Qu\u1ea3n l\u00fd nhi\u1ec7t<\/li>\n<li>C\u00e1c b\u1ed9 ph\u1eadn ch\u1ed1ng \u0103n m\u00f2n<\/li>\n<\/ul>\n<div contenteditable=\"false\">\n<hr \/>\n<\/div>\n<h1>D\u1ecbch v\u1ee5 t\u00f9y ch\u1ec9nh<\/h1>\n<p class=\"isSelectedEnd\">Ch\u00fang t\u00f4i cung c\u1ea5p c\u00e1c gi\u1ea3i ph\u00e1p khay g\u1ed1m SiC \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf theo y\u00eau c\u1ea7u c\u1ee7a kh\u00e1ch h\u00e0ng.<\/p>\n<h2><img decoding=\"async\" class=\"size-medium wp-image-2337 alignright\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/SiC-Ceramic-Tray-for-Wafer-Processing-Custom-Semiconductor-Applications-3-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/SiC-Ceramic-Tray-for-Wafer-Processing-Custom-Semiconductor-Applications-3-300x300.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/SiC-Ceramic-Tray-for-Wafer-Processing-Custom-Semiconductor-Applications-3-150x150.png 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/SiC-Ceramic-Tray-for-Wafer-Processing-Custom-Semiconductor-Applications-3-768x768.png 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/SiC-Ceramic-Tray-for-Wafer-Processing-Custom-Semiconductor-Applications-3-12x12.png 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/SiC-Ceramic-Tray-for-Wafer-Processing-Custom-Semiconductor-Applications-3-600x600.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/SiC-Ceramic-Tray-for-Wafer-Processing-Custom-Semiconductor-Applications-3-100x100.png 100w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/SiC-Ceramic-Tray-for-Wafer-Processing-Custom-Semiconductor-Applications-3.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>C\u00e1c t\u00f9y ch\u1ecdn t\u00f9y ch\u1ec9nh c\u00f3 s\u1eb5n<\/h2>\n<ul data-spread=\"false\">\n<li>K\u00edch th\u01b0\u1edbc t\u00f9y ch\u1ec9nh<\/li>\n<li>Thi\u1ebft k\u1ebf khay ch\u1ee9a nhi\u1ec1u t\u1ea5m wafer<\/li>\n<li>Gia c\u00f4ng r\u00e3nh v\u00e0 khe<\/li>\n<li>Khoan l\u1ed7 ch\u00ednh x\u00e1c<\/li>\n<li>\u0110\u00e1nh b\u00f3ng b\u1ec1 m\u1eb7t<\/li>\n<li>L\u1edbp ph\u1ee7 \u0111\u1eb7c bi\u1ec7t<\/li>\n<li>Kh\u1ea3 n\u0103ng t\u01b0\u01a1ng th\u00edch v\u1edbi c\u00e1c quy tr\u00ecnh x\u1eed l\u00fd nhi\u1ec7t t\u00f9y ch\u1ec9nh<\/li>\n<\/ul>\n<div contenteditable=\"false\">\n<hr \/>\n<\/div>\n<h1>\u01afu \u0111i\u1ec3m c\u1ee7a khay g\u1ed1m SiC<\/h1>\n<p class=\"isSelectedEnd\">So v\u1edbi c\u00e1c khay l\u00e0m t\u1eeb th\u1ea1ch anh, nh\u00f4m oxit v\u00e0 than ch\u00ec, c\u00e1c khay g\u1ed1m cacbua silic mang l\u1ea1i:<\/p>\n<table>\n<tbody>\n<tr>\n<td>Hi\u1ec7u su\u1ea5t<\/td>\n<td>Khay g\u1ed1m SiC<\/td>\n<\/tr>\n<tr>\n<td>\u0110\u1ed9 d\u1eabn nhi\u1ec7t<\/td>\n<td>Tuy\u1ec7t v\u1eddi<\/td>\n<\/tr>\n<tr>\n<td>Kh\u1ea3 n\u0103ng ch\u1ecbu s\u1ed1c nhi\u1ec7t<\/td>\n<td>Tuy\u1ec7t v\u1eddi<\/td>\n<\/tr>\n<tr>\n<td>\u0110\u1ed9 b\u1ec1n c\u01a1 h\u1ecdc<\/td>\n<td>Tuy\u1ec7t v\u1eddi<\/td>\n<\/tr>\n<tr>\n<td>Kh\u1ea3 n\u0103ng ch\u1ed1ng \u0103n m\u00f2n<\/td>\n<td>Tuy\u1ec7t v\u1eddi<\/td>\n<\/tr>\n<tr>\n<td>\u0110\u1ed9 \u1ed5n \u0111\u1ecbnh k\u00edch th\u01b0\u1edbc<\/td>\n<td>Tuy\u1ec7t v\u1eddi<\/td>\n<\/tr>\n<tr>\n<td>Tu\u1ed5i th\u1ecd<\/td>\n<td>D\u00e0i<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<div contenteditable=\"false\">\n<hr \/>\n<\/div>\n<h1>C\u00e2u h\u1ecfi th\u01b0\u1eddng g\u1eb7p<\/h1>\n<h2>Khay g\u1ed1m SiC c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c t\u00f9y ch\u1ec9nh kh\u00f4ng?<\/h2>\n<p class=\"isSelectedEnd\">\u0110\u00fang v\u1eady. Ch\u00fang t\u00f4i h\u1ed7 tr\u1ee3 c\u00e1c k\u00edch th\u01b0\u1edbc, c\u1ea5u tr\u00fac, r\u00e3nh v\u00e0 thi\u1ebft k\u1ebf gia c\u00f4ng t\u00f9y ch\u1ec9nh theo th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt c\u1ee7a t\u1ea5m wafer v\u00e0 y\u00eau c\u1ea7u v\u1ec1 thi\u1ebft b\u1ecb c\u1ee7a kh\u00e1ch h\u00e0ng.<\/p>\n<div contenteditable=\"false\">\n<hr \/>\n<\/div>\n<h2>C\u00e1c k\u00edch th\u01b0\u1edbc wafer n\u00e0o \u0111\u01b0\u1ee3c h\u1ed7 tr\u1ee3?<\/h2>\n<p class=\"isSelectedEnd\">C\u00e1c khay c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf \u0111\u1ec3:<\/p>\n<ul data-spread=\"false\">\n<li>T\u1ea5m wafer 2 inch<\/li>\n<li>T\u1ea5m wafer 4 inch<\/li>\n<li>T\u1ea5m wafer 6 inch<\/li>\n<li>T\u1ea5m wafer 8 inch<\/li>\n<li>C\u00e1c \u0111\u1ecbnh d\u1ea1ng t\u1ea5m wafer t\u00f9y ch\u1ec9nh c\u00f3 k\u00edch th\u01b0\u1edbc l\u1edbn h\u01a1n<\/li>\n<\/ul>\n<div contenteditable=\"false\">\n<hr \/>\n<\/div>\n<h2>Khay SiC c\u00f3 ph\u00f9 h\u1ee3p \u0111\u1ec3 s\u1eed d\u1ee5ng trong l\u00f2 nung b\u00e1n d\u1eabn kh\u00f4ng?<\/h2>\n<p>\u0110\u00fang v\u1eady. C\u00e1c khay g\u1ed1m SiC \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf chuy\u00ean d\u1ee5ng cho c\u00e1c m\u00f4i tr\u01b0\u1eddng x\u1eed l\u00fd b\u00e1n d\u1eabn \u1edf nhi\u1ec7t \u0111\u1ed9 cao v\u00e0 mang l\u1ea1i \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh nhi\u1ec7t c\u00f9ng \u0111\u1ed9 b\u1ec1n v\u01b0\u1ee3t tr\u1ed9i.<\/p>","protected":false},"excerpt":{"rendered":"<p>Khay g\u1ed1m SiC l\u00e0 m\u1ed9t khay ch\u1ee9a b\u1eb1ng cacbua silic (SiC) hi\u1ec7u su\u1ea5t cao, \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf d\u00e0nh cho c\u00e1c quy tr\u00ecnh x\u1eed l\u00fd t\u1ea5m wafer ti\u00ean ti\u1ebfn v\u00e0 m\u00f4i tr\u01b0\u1eddng s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn. \u0110\u01b0\u1ee3c ch\u1ebf t\u1ea1o t\u1eeb v\u1eadt li\u1ec7u g\u1ed1m cacbua silic (SiC) c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao, c\u00e1c khay n\u00e0y mang l\u1ea1i \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh nhi\u1ec7t v\u01b0\u1ee3t tr\u1ed9i, \u0111\u1ed9 b\u1ec1n c\u01a1 h\u1ecdc cao v\u00e0 kh\u1ea3 n\u0103ng ch\u1ed1ng \u0103n m\u00f2n h\u00f3a h\u1ecdc xu\u1ea5t s\u1eafc, ph\u00f9 h\u1ee3p cho c\u00e1c \u1ee9ng d\u1ee5ng \u0111\u00f2i h\u1ecfi nhi\u1ec7t \u0111\u1ed9 cao.<\/p>","protected":false},"featured_media":2340,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center 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