{"id":2331,"date":"2026-05-29T03:20:28","date_gmt":"2026-05-29T03:20:28","guid":{"rendered":"https:\/\/www.xkh-ceramics.com\/?post_type=product&#038;p=2331"},"modified":"2026-05-29T03:21:23","modified_gmt":"2026-05-29T03:21:23","slug":"silicon-carbide-horizontal-process-tube-for-lpcvd-cvd-semiconductor-processes","status":"publish","type":"product","link":"https:\/\/www.xkh-ceramics.com\/vi\/product\/silicon-carbide-horizontal-process-tube-for-lpcvd-cvd-semiconductor-processes\/","title":{"rendered":"\u1ed0ng x\u1eed l\u00fd ngang b\u1eb1ng cacbua silic d\u00f9ng cho c\u00e1c quy tr\u00ecnh b\u00e1n d\u1eabn LPCVD\/CVD"},"content":{"rendered":"<p class=\"isSelectedEnd\"><img fetchpriority=\"high\" decoding=\"async\" class=\"size-medium wp-image-2332 alignright\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Silicon-Carbide-Horizontal-Process-Tube-for-LPCVDCVD-Semiconductor-Processes-2-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Silicon-Carbide-Horizontal-Process-Tube-for-LPCVDCVD-Semiconductor-Processes-2-300x300.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Silicon-Carbide-Horizontal-Process-Tube-for-LPCVDCVD-Semiconductor-Processes-2-150x150.png 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Silicon-Carbide-Horizontal-Process-Tube-for-LPCVDCVD-Semiconductor-Processes-2-768x768.png 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Silicon-Carbide-Horizontal-Process-Tube-for-LPCVDCVD-Semiconductor-Processes-2-12x12.png 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Silicon-Carbide-Horizontal-Process-Tube-for-LPCVDCVD-Semiconductor-Processes-2-600x600.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Silicon-Carbide-Horizontal-Process-Tube-for-LPCVDCVD-Semiconductor-Processes-2-100x100.png 100w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Silicon-Carbide-Horizontal-Process-Tube-for-LPCVDCVD-Semiconductor-Processes-2.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>\u1ed0ng x\u1eed l\u00fd ngang b\u1eb1ng cacbua silic (SiC) \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf \u0111\u1ec3 s\u1eed d\u1ee5ng trong c\u00e1c \u1ee9ng d\u1ee5ng LPCVD, CVD, khu\u1ebfch t\u00e1n, oxy h\u00f3a v\u00e0 \u1ee7 nhi\u1ec7t \u1edf nhi\u1ec7t \u0111\u1ed9 cao trong l\u0129nh v\u1ef1c s\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn, quang \u0111i\u1ec7n v\u00e0 v\u1eadt li\u1ec7u ti\u00ean ti\u1ebfn.<\/p>\n<p class=\"isSelectedEnd\">V\u1edbi t\u01b0 c\u00e1ch l\u00e0 b\u1ed9 ph\u1eadn ch\u00ednh c\u1ee7a bu\u1ed3ng ph\u1ea3n \u1ee9ng trong c\u00e1c h\u1ec7 th\u1ed1ng x\u1eed l\u00fd nhi\u1ec7t ngang, \u1ed1ng ph\u1ea3n \u1ee9ng c\u00f3 \u1ea3nh h\u01b0\u1edfng tr\u1ef1c ti\u1ebfp \u0111\u1ebfn \u0111\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u c\u1ee7a nhi\u1ec7t \u0111\u1ed9, vi\u1ec7c ki\u1ec3m so\u00e1t \u00f4 nhi\u1ec5m, s\u1ef1 \u1ed5n \u0111\u1ecbnh c\u1ee7a qu\u00e1 tr\u00ecnh v\u00e0 tu\u1ed5i th\u1ecd t\u1ed5ng th\u1ec3 c\u1ee7a thi\u1ebft b\u1ecb.<\/p>\n<p class=\"isSelectedEnd\">C\u00e1c \u1ed1ng x\u1eed l\u00fd ngang SiC c\u1ee7a ch\u00fang t\u00f4i \u0111\u01b0\u1ee3c s\u1ea3n xu\u1ea5t b\u1eb1ng c\u00f4ng ngh\u1ec7 in 3D nguy\u00ean kh\u1ed1i ti\u00ean ti\u1ebfn, k\u1ebft h\u1ee3p v\u1edbi l\u1edbp ph\u1ee7 cacbua silic CVD c\u00f3 \u0111\u1ed9 tinh khi\u1ebft c\u1ef1c cao. C\u1ea5u tr\u00fac li\u1ec1n m\u1ea1ch m\u1ed9t m\u1ea3nh gi\u00fap lo\u1ea1i b\u1ecf c\u00e1c m\u1ed1i h\u00e0n v\u00e0 c\u00e1c \u0111i\u1ec3m y\u1ebfu li\u00ean quan \u0111\u1ebfn qu\u00e1 tr\u00ecnh l\u1eafp r\u00e1p, t\u1eeb \u0111\u00f3 n\u00e2ng cao \u0111\u00e1ng k\u1ec3 \u0111\u1ed9 tin c\u1eady c\u01a1 h\u1ecdc v\u00e0 kh\u1ea3 n\u0103ng ch\u1ed1ng r\u00f2 r\u1ec9 trong \u0111i\u1ec1u ki\u1ec7n v\u1eadn h\u00e0nh li\u00ean t\u1ee5c \u1edf nhi\u1ec7t \u0111\u1ed9 cao.<\/p>\n<p class=\"isSelectedEnd\">So v\u1edbi c\u00e1c \u1ed1ng x\u1eed l\u00fd th\u1ea1ch anh th\u00f4ng th\u01b0\u1eddng, cacbua silic c\u00f3 \u0111\u1ed9 d\u1eabn nhi\u1ec7t cao h\u01a1n \u0111\u00e1ng k\u1ec3, kh\u1ea3 n\u0103ng ch\u1ecbu s\u1ed1c nhi\u1ec7t t\u1ed1t h\u01a1n, kh\u1ea3 n\u0103ng ch\u1ed1ng \u0103n m\u00f2n v\u01b0\u1ee3t tr\u1ed9i v\u00e0 tu\u1ed5i th\u1ecd ho\u1ea1t \u0111\u1ed9ng d\u00e0i h\u01a1n, \u0111\u1eb7c bi\u1ec7t l\u00e0 trong c\u00e1c m\u00f4i tr\u01b0\u1eddng x\u1eed l\u00fd c\u00f3 t\u00ednh oxy h\u00f3a m\u1ea1nh v\u00e0 ch\u1ee9a clo.<\/p>\n<p class=\"isSelectedEnd\">S\u1ea3n ph\u1ea9m n\u00e0y \u0111\u01b0\u1ee3c t\u1ed1i \u01b0u h\u00f3a cho c\u00e1c m\u00f4i tr\u01b0\u1eddng x\u1eed l\u00fd s\u1ea1ch \u0111\u1ea1t ti\u00eau chu\u1ea9n b\u00e1n d\u1eabn, \u0111\u00f2i h\u1ecfi m\u1ee9c ph\u00e1t sinh h\u1ea1t th\u1ea5p, m\u1ee9c \u00f4 nhi\u1ec5m kim lo\u1ea1i th\u1ea5p v\u00e0 hi\u1ec7u su\u1ea5t nhi\u1ec7t \u1ed5n \u0111\u1ecbnh \u1edf nhi\u1ec7t \u0111\u1ed9 l\u00ean \u0111\u1ebfn 1250\u00b0C.<\/p>\n<div contenteditable=\"false\">\n<hr \/>\n<\/div>\n<h1>C\u00e1c t\u00ednh n\u0103ng ch\u00ednh<\/h1>\n<h2><img decoding=\"async\" class=\"size-medium wp-image-2333 alignright\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Silicon-Carbide-Horizontal-Process-Tube-for-LPCVDCVD-Semiconductor-Processes-1-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Silicon-Carbide-Horizontal-Process-Tube-for-LPCVDCVD-Semiconductor-Processes-1-300x300.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Silicon-Carbide-Horizontal-Process-Tube-for-LPCVDCVD-Semiconductor-Processes-1-150x150.png 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Silicon-Carbide-Horizontal-Process-Tube-for-LPCVDCVD-Semiconductor-Processes-1-768x768.png 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Silicon-Carbide-Horizontal-Process-Tube-for-LPCVDCVD-Semiconductor-Processes-1-12x12.png 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Silicon-Carbide-Horizontal-Process-Tube-for-LPCVDCVD-Semiconductor-Processes-1-600x600.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Silicon-Carbide-Horizontal-Process-Tube-for-LPCVDCVD-Semiconductor-Processes-1-100x100.png 100w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Silicon-Carbide-Horizontal-Process-Tube-for-LPCVDCVD-Semiconductor-Processes-1.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>C\u1ea5u tr\u00fac SiC nguy\u00ean kh\u1ed1i m\u1ed9t m\u1ea3nh<\/h2>\n<p class=\"isSelectedEnd\">Th\u00e2n m\u00e1y \u0111\u01b0\u1ee3c in 3D b\u1eb1ng silicon carbide theo c\u00f4ng ngh\u1ec7 \u0111\u00fac li\u1ec1n kh\u1ed1i gi\u00fap lo\u1ea1i b\u1ecf c\u00e1c \u0111\u01b0\u1eddng n\u1ed1i, \u0111i\u1ec3m h\u00e0n v\u00e0 c\u00e1c \u0111i\u1ec3m r\u00f2 r\u1ec9 ti\u1ec1m \u1ea9n th\u01b0\u1eddng th\u1ea5y trong c\u00e1c c\u1ea5u tr\u00fac l\u1eafp r\u00e1p truy\u1ec1n th\u1ed1ng.<\/p>\n<p class=\"isSelectedEnd\">C\u00e1c l\u1ee3i \u00edch bao g\u1ed3m:<\/p>\n<ul data-spread=\"false\">\n<li>\u0110\u1ed9 \u1ed5n \u0111\u1ecbnh k\u1ebft c\u1ea5u cao h\u01a1n<\/li>\n<li>T\u0103ng c\u01b0\u1eddng \u0111\u1ed9 k\u00edn kh\u00ed<\/li>\n<li>\u0110\u1ed9 \u0111\u1ed3ng nh\u1ea5t v\u1ec1 k\u00edch th\u01b0\u1edbc cao h\u01a1n<\/li>\n<li>Gi\u1ea3m s\u1ef1 t\u1eadp trung \u1ee9ng su\u1ea5t nhi\u1ec7t<\/li>\n<\/ul>\n<h2>L\u1edbp ph\u1ee7 SiC CVD c\u00f3 \u0111\u1ed9 tinh khi\u1ebft c\u1ef1c cao<\/h2>\n<p class=\"isSelectedEnd\">L\u1edbp ph\u1ee7 cacbua silic CVD d\u00e0y \u0111\u1eb7c mang l\u1ea1i:<\/p>\n<ul data-spread=\"false\">\n<li>T\u1ea1p ch\u1ea5t b\u1ec1 m\u1eb7t d\u01b0\u1edbi 5 ppm<\/li>\n<li>\u0110\u1ed9 tr\u01a1 h\u00f3a h\u1ecdc tuy\u1ec7t v\u1eddi<\/li>\n<li>Gi\u1ea3m \u00f4 nhi\u1ec5m do h\u1ea1t b\u1ee5i<\/li>\n<li>Kh\u1ea3 n\u0103ng ch\u1ed1ng oxy h\u00f3a v\u00e0 c\u00e1c kh\u00ed ch\u1ee9a clo v\u01b0\u1ee3t tr\u1ed9i<\/li>\n<\/ul>\n<p class=\"isSelectedEnd\">\u0110i\u1ec1u n\u00e0y khi\u1ebfn \u1ed1ng x\u1eed l\u00fd n\u00e0y tr\u1edf n\u00ean ph\u00f9 h\u1ee3p cho c\u00e1c \u1ee9ng d\u1ee5ng x\u1eed l\u00fd nhi\u1ec7t b\u00e1n d\u1eabn ti\u00ean ti\u1ebfn.<\/p>\n<h2>\u0110\u1ed9 d\u1eabn nhi\u1ec7t tuy\u1ec7t v\u1eddi<\/h2>\n<p class=\"isSelectedEnd\">Cacbua silic c\u00f3 \u0111\u1ed9 d\u1eabn nhi\u1ec7t cao h\u01a1n nhi\u1ec1u so v\u1edbi th\u1ea1ch anh ho\u1eb7c nh\u00f4m oxit, gi\u00fap \u0111\u1ea1t \u0111\u01b0\u1ee3c:<\/p>\n<ul data-spread=\"false\">\n<li>Ph\u1ea3n \u1ee9ng nhi\u1ec7t nhanh h\u01a1n<\/li>\n<li>\u0110\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u nhi\u1ec7t \u0111\u1ed9 theo tr\u1ee5c d\u1ecdc v\u00e0 tr\u1ee5c ngang \u0111\u01b0\u1ee3c c\u1ea3i thi\u1ec7n<\/li>\n<li>\u0110i\u1ec1u ki\u1ec7n x\u1eed l\u00fd t\u1ea5m wafer \u1ed5n \u0111\u1ecbnh<\/li>\n<\/ul>\n<h2>Kh\u1ea3 n\u0103ng ch\u1ecbu s\u1ed1c nhi\u1ec7t v\u01b0\u1ee3t tr\u1ed9i<\/h2>\n<p class=\"isSelectedEnd\">\u1ed0ng c\u00f3 th\u1ec3 ch\u1ecbu \u0111\u01b0\u1ee3c c\u00e1c chu k\u1ef3 gia nhi\u1ec7t v\u00e0 l\u00e0m l\u1ea1nh nhanh l\u1eb7p \u0111i l\u1eb7p l\u1ea1i m\u00e0 kh\u00f4ng b\u1ecb n\u1ee9t, bi\u1ebfn d\u1ea1ng ho\u1eb7c bong tr\u00f3c l\u1edbp ph\u1ee7.<\/p>\n<h2>Tu\u1ed5i th\u1ecd cao<\/h2>\n<p class=\"isSelectedEnd\">So v\u1edbi \u1ed1ng x\u1eed l\u00fd th\u1ea1ch anh, \u1ed1ng SiC c\u00f3 nh\u1eefng \u01b0u \u0111i\u1ec3m sau:<\/p>\n<ul data-spread=\"false\">\n<li>Kho\u1ea3ng th\u1eddi gian thay th\u1ebf d\u00e0i h\u01a1n<\/li>\n<li>T\u1ea7n su\u1ea5t b\u1ea3o tr\u00ec th\u1ea5p h\u01a1n<\/li>\n<li>Gi\u1ea3m th\u1eddi gian ng\u1eebng ho\u1ea1t \u0111\u1ed9ng c\u1ee7a bu\u1ed3ng<\/li>\n<li>Gi\u1ea3m t\u1ed5ng chi ph\u00ed s\u1edf h\u1eefu (TCO)<\/li>\n<\/ul>\n<div contenteditable=\"false\">\n<hr \/>\n<\/div>\n<h1>C\u00e1c \u1ee9ng d\u1ee5ng \u0111i\u1ec3n h\u00ecnh<\/h1>\n<h2><img decoding=\"async\" class=\"size-medium wp-image-2334 alignright\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Silicon-Carbide-Horizontal-Process-Tube-for-LPCVDCVD-Semiconductor-Processes-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Silicon-Carbide-Horizontal-Process-Tube-for-LPCVDCVD-Semiconductor-Processes-300x300.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Silicon-Carbide-Horizontal-Process-Tube-for-LPCVDCVD-Semiconductor-Processes-150x150.png 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Silicon-Carbide-Horizontal-Process-Tube-for-LPCVDCVD-Semiconductor-Processes-768x768.png 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Silicon-Carbide-Horizontal-Process-Tube-for-LPCVDCVD-Semiconductor-Processes-12x12.png 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Silicon-Carbide-Horizontal-Process-Tube-for-LPCVDCVD-Semiconductor-Processes-600x600.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Silicon-Carbide-Horizontal-Process-Tube-for-LPCVDCVD-Semiconductor-Processes-100x100.png 100w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Silicon-Carbide-Horizontal-Process-Tube-for-LPCVDCVD-Semiconductor-Processes.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>S\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn<\/h2>\n<p class=\"isSelectedEnd\">Ph\u00f9 h\u1ee3p v\u1edbi:<\/p>\n<ul data-spread=\"false\">\n<li>H\u1ec7 th\u1ed1ng LPCVD<\/li>\n<li>Thi\u1ebft b\u1ecb l\u1eafng \u0111\u1ecdng CVD<\/li>\n<li>L\u00f2 oxy h\u00f3a<\/li>\n<li>L\u00f2 khu\u1ebfch t\u00e1n<\/li>\n<li>H\u1ec7 th\u1ed1ng \u1ee7<\/li>\n<li>C\u00e1c quy tr\u00ecnh x\u1eed l\u00fd nhi\u1ec7t t\u1ea5m wafer<\/li>\n<\/ul>\n<h2>Ng\u00e0nh c\u00f4ng nghi\u1ec7p quang \u0111i\u1ec7n<\/h2>\n<p class=\"isSelectedEnd\">\u0110\u01b0\u1ee3c s\u1eed d\u1ee5ng trong:<\/p>\n<ul data-spread=\"false\">\n<li>Quy tr\u00ecnh khu\u1ebfch t\u00e1n trong t\u1ebf b\u00e0o quang \u0111i\u1ec7n<\/li>\n<li>Qu\u00e1 tr\u00ecnh th\u1ee5 \u0111\u1ed9ng h\u00f3a b\u1ec1 m\u1eb7t<\/li>\n<li>Qu\u00e1 tr\u00ecnh l\u1eafng \u0111\u1ecdng m\u00e0ng m\u1ecfng<\/li>\n<li>X\u1eed l\u00fd t\u1ea5m wafer \u1edf nhi\u1ec7t \u0111\u1ed9 cao<\/li>\n<\/ul>\n<h2>C\u00f4ng ngh\u1ec7 ch\u1ebf bi\u1ebfn v\u1eadt li\u1ec7u ti\u00ean ti\u1ebfn<\/h2>\n<p class=\"isSelectedEnd\">\u00c1p d\u1ee5ng cho:<\/p>\n<ul data-spread=\"false\">\n<li>C\u00e1c quy tr\u00ecnh cacbon h\u00f3a<\/li>\n<li>X\u1eed l\u00fd nitru h\u00f3a<\/li>\n<li>H\u00ecnh th\u00e0nh m\u00e0ng m\u1ecfng ch\u1ee9c n\u0103ng<\/li>\n<li>K\u00edch ho\u1ea1t v\u00e0 bi\u1ebfn t\u00ednh b\u1ec1 m\u1eb7t<\/li>\n<\/ul>\n<div contenteditable=\"false\">\n<hr \/>\n<\/div>\n<h1>Kh\u1ea3 n\u0103ng t\u01b0\u01a1ng th\u00edch quy tr\u00ecnh<\/h1>\n<h2>C\u00e1c m\u00f4i tr\u01b0\u1eddng qu\u00e1 tr\u00ecnh t\u01b0\u01a1ng th\u00edch<\/h2>\n<ul data-spread=\"false\">\n<li>Oxy (O\u2082)<\/li>\n<li>Nit\u01a1 (N\u2082)<\/li>\n<li>Kh\u00ed tr\u01a1 c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao<\/li>\n<li>C\u00e1c lo\u1ea1i kh\u00ed c\u00f3 ch\u1ee9a clo \u0111\u01b0\u1ee3c ki\u1ec3m so\u00e1t<\/li>\n<li>M\u00f4i tr\u01b0\u1eddng oxy h\u00f3a<\/li>\n<\/ul>\n<h2>C\u1eeda s\u1ed5 quy tr\u00ecnh ti\u00eau bi\u1ec3u<\/h2>\n<table>\n<tbody>\n<tr>\n<th>Tham s\u1ed1<\/th>\n<th>Th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/th>\n<\/tr>\n<tr>\n<td>Nhi\u1ec7t \u0111\u1ed9 ho\u1ea1t \u0111\u1ed9ng li\u00ean t\u1ee5c t\u1ed1i \u0111a<\/td>\n<td>1.250\u00b0C<\/td>\n<\/tr>\n<tr>\n<td>Ph\u1ea1m vi \u00e1p su\u1ea5t<\/td>\n<td>LPCVD t\u1eeb ch\u00e2n kh\u00f4ng \u0111\u1ebfn \u00e1p su\u1ea5t g\u1ea7n \u00e1p su\u1ea5t kh\u00ed quy\u1ec3n<\/td>\n<\/tr>\n<tr>\n<td>Kh\u1ea3 n\u0103ng ch\u1ecbu s\u1ed1c nhi\u1ec7t<\/td>\n<td>Tuy\u1ec7t v\u1eddi<\/td>\n<\/tr>\n<tr>\n<td>Kh\u1ea3 n\u0103ng ch\u1ed1ng r\u00f2 r\u1ec9<\/td>\n<td>\u2264 1\u00d710\u207b\u2079 Pa\u00b7m\u00b3\/s<\/td>\n<\/tr>\n<tr>\n<td>\u0110\u1ed9 nh\u00e1m b\u1ec1 m\u1eb7t<\/td>\n<td>Ra \u2264 0,8\u20131,6 \u00b5m<\/td>\n<\/tr>\n<tr>\n<td>\u0110\u1ed9 tinh khi\u1ebft c\u1ee7a l\u1edbp ph\u1ee7<\/td>\n<td>&lt; 5 ppm<\/td>\n<\/tr>\n<tr>\n<td>T\u1ea1p ch\u1ea5t trong ch\u1ea5t n\u1ec1n<\/td>\n<td>\uff1c 300 ppm<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<div contenteditable=\"false\">\n<hr \/>\n<\/div>\n<h1>Th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/h1>\n<table>\n<tbody>\n<tr>\n<td>M\u1eb7t h\u00e0ng<\/td>\n<td>Th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/td>\n<\/tr>\n<tr>\n<td>T\u00ean s\u1ea3n ph\u1ea9m<\/td>\n<td>\u1ed0ng x\u1eed l\u00fd ngang b\u1eb1ng cacbua silic<\/td>\n<\/tr>\n<tr>\n<td>Ch\u1ea5t li\u1ec7u<\/td>\n<td>Cacbua silic c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao<\/td>\n<\/tr>\n<tr>\n<td>L\u1edbp ph\u1ee7<\/td>\n<td>L\u1edbp ph\u1ee7 SiC b\u1eb1ng ph\u01b0\u01a1ng ph\u00e1p CVD<\/td>\n<\/tr>\n<tr>\n<td>Quy tr\u00ecnh s\u1ea3n xu\u1ea5t<\/td>\n<td>In 3D nguy\u00ean kh\u1ed1i<\/td>\n<\/tr>\n<tr>\n<td>Nhi\u1ec7t \u0111\u1ed9 ho\u1ea1t \u0111\u1ed9ng t\u1ed1i \u0111a<\/td>\n<td>\u2264 1250\u00b0C<\/td>\n<\/tr>\n<tr>\n<td>\u0110\u1ed9 d\u1eabn nhi\u1ec7t<\/td>\n<td>Cao<\/td>\n<\/tr>\n<tr>\n<td>Kh\u1ea3 n\u0103ng ch\u1ecbu s\u1ed1c nhi\u1ec7t<\/td>\n<td>Tuy\u1ec7t v\u1eddi<\/td>\n<\/tr>\n<tr>\n<td>Kh\u1ea3 n\u0103ng ch\u1ed1ng \u0103n m\u00f2n<\/td>\n<td>Tuy\u1ec7t v\u1eddi<\/td>\n<\/tr>\n<tr>\n<td>\u0110\u1ed9 nh\u00e1m b\u1ec1 m\u1eb7t<\/td>\n<td>Ra \u2264 0,8\u20131,6 \u00b5m<\/td>\n<\/tr>\n<tr>\n<td>T\u1ea1p ch\u1ea5t trong l\u1edbp ph\u1ee7<\/td>\n<td>&lt; 5 ppm<\/td>\n<\/tr>\n<tr>\n<td>Kh\u1ea3 n\u0103ng ch\u1ed1ng r\u00f2 r\u1ec9<\/td>\n<td>\u2264 1\u00d710\u207b\u2079 Pa\u00b7m\u00b3\/s<\/td>\n<\/tr>\n<tr>\n<td>C\u00e1c \u1ee9ng d\u1ee5ng \u0111i\u1ec3n h\u00ecnh<\/td>\n<td>LPCVD \/ CVD \/ Ph\u00e2n t\u00e1n \/ Oxy h\u00f3a<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<div contenteditable=\"false\">\n<hr \/>\n<\/div>\n<h1>\u01afu \u0111i\u1ec3m so v\u1edbi \u1ed1ng x\u1eed l\u00fd truy\u1ec1n th\u1ed1ng<\/h1>\n<table>\n<tbody>\n<tr>\n<td>T\u00e0i s\u1ea3n<\/td>\n<td>\u1ed0ng x\u1eed l\u00fd SiC<\/td>\n<td>\u1ed0ng th\u1ea1ch anh<\/td>\n<td>\u1ed0ng nh\u00f4m oxit<\/td>\n<\/tr>\n<tr>\n<td>\u0110\u1ed9 d\u1eabn nhi\u1ec7t<\/td>\n<td>Cao<\/td>\n<td>Th\u1ea5p<\/td>\n<td>Th\u1ea5p<\/td>\n<\/tr>\n<tr>\n<td>Kh\u1ea3 n\u0103ng ch\u1ecbu s\u1ed1c nhi\u1ec7t<\/td>\n<td>Tuy\u1ec7t v\u1eddi<\/td>\n<td>Y\u1ebfu<\/td>\n<td>Trung b\u00ecnh<\/td>\n<\/tr>\n<tr>\n<td>Kh\u1ea3 n\u0103ng ch\u1ed1ng \u0103n m\u00f2n<\/td>\n<td>Tuy\u1ec7t v\u1eddi<\/td>\n<td>Trung b\u00ecnh<\/td>\n<td>T\u1ed1t<\/td>\n<\/tr>\n<tr>\n<td>Ki\u1ec3m so\u00e1t h\u1ea1t<\/td>\n<td>Tuy\u1ec7t v\u1eddi<\/td>\n<td>Trung b\u00ecnh<\/td>\n<td>Trung b\u00ecnh<\/td>\n<\/tr>\n<tr>\n<td>Tu\u1ed5i th\u1ecd<\/td>\n<td>D\u00e0i<\/td>\n<td>Ng\u1eafn<\/td>\n<td>Trung b\u00ecnh<\/td>\n<\/tr>\n<tr>\n<td>\u0110\u1ed9 \u1ed5n \u0111\u1ecbnh \u1edf nhi\u1ec7t \u0111\u1ed9 cao<\/td>\n<td>Tuy\u1ec7t v\u1eddi<\/td>\n<td>Trung b\u00ecnh<\/td>\n<td>T\u1ed1t<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<div contenteditable=\"false\">\n<hr \/>\n<\/div>\n<h1>C\u00e1c t\u00f9y ch\u1ecdn t\u00f9y ch\u1ec9nh<\/h1>\n<p class=\"isSelectedEnd\">Ch\u00fang t\u00f4i c\u00f3 th\u1ec3 cung c\u1ea5p c\u00e1c th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt t\u00f9y ch\u1ec9nh theo y\u00eau c\u1ea7u v\u1ec1 thi\u1ebft b\u1ecb c\u1ee7a kh\u00e1ch h\u00e0ng, bao g\u1ed3m:<\/p>\n<ul data-spread=\"false\">\n<li>\u0110\u01b0\u1eddng k\u00ednh v\u00e0 chi\u1ec1u d\u00e0i \u1ed1ng<\/li>\n<li>T\u1ed1i \u01b0u h\u00f3a \u0111\u1ed9 d\u00e0y th\u00e0nh<\/li>\n<li>C\u1ea5u tr\u00fac m\u1eb7t b\u00edch v\u00e0 giao di\u1ec7n<\/li>\n<li>C\u00e1c l\u1ed7 tho\u00e1t kh\u00ed ch\u1ee9c n\u0103ng<\/li>\n<li>C\u00e1c c\u1ea5u h\u00ecnh l\u1edbp ph\u1ee7 b\u00ean trong\/b\u00ean ngo\u00e0i<\/li>\n<li>C\u00e1c c\u1ea5p \u0111\u1ed9 \u0111\u00e1nh b\u00f3ng b\u1ec1 m\u1eb7t<\/li>\n<li>Ti\u00eau chu\u1ea9n v\u1ec7 sinh<\/li>\n<\/ul>\n<div contenteditable=\"false\">\n<hr \/>\n<\/div>\n<h1>C\u00e2u h\u1ecfi th\u01b0\u1eddng g\u1eb7p<\/h1>\n<h2>C\u00e2u h\u1ecfi 1: T\u1ea1i sao n\u00ean ch\u1ecdn \u1ed1ng x\u1eed l\u00fd b\u1eb1ng cacbua silic thay v\u00ec \u1ed1ng x\u1eed l\u00fd b\u1eb1ng th\u1ea1ch anh?<\/h2>\n<p class=\"isSelectedEnd\">Cacbua silic c\u00f3 \u0111\u1ed9 d\u1eabn nhi\u1ec7t cao h\u01a1n, m\u1ee9c \u0111\u1ed9 \u00f4 nhi\u1ec5m th\u1ea5p h\u01a1n, kh\u1ea3 n\u0103ng ch\u1ecbu s\u1ed1c nhi\u1ec7t t\u1ed1t h\u01a1n v\u00e0 tu\u1ed5i th\u1ecd cao h\u01a1n \u0111\u00e1ng k\u1ec3 so v\u1edbi th\u1ea1ch anh, \u0111\u1eb7c bi\u1ec7t l\u00e0 trong c\u00e1c quy tr\u00ecnh s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn \u1edf nhi\u1ec7t \u0111\u1ed9 cao.<\/p>\n<h2>C\u00e2u h\u1ecfi 2: Nh\u1eefng quy tr\u00ecnh n\u00e0o t\u01b0\u01a1ng th\u00edch v\u1edbi \u1ed1ng n\u00e0y?<\/h2>\n<p class=\"isSelectedEnd\">\u1ed0ng n\u00e0y ph\u00f9 h\u1ee3p cho c\u00e1c \u1ee9ng d\u1ee5ng x\u1eed l\u00fd nhi\u1ec7t \u1edf nhi\u1ec7t \u0111\u1ed9 cao nh\u01b0 LPCVD, CVD, khu\u1ebfch t\u00e1n, oxy h\u00f3a, \u1ee7, c\u00e1ch ly v\u00e0 c\u00e1c \u1ee9ng d\u1ee5ng kh\u00e1c.<\/p>\n<h2>C\u00e2u h\u1ecfi 3: \u1ed0ng c\u00f3 th\u1ec3 ho\u1ea1t \u0111\u1ed9ng trong m\u00f4i tr\u01b0\u1eddng c\u00f3 ch\u1ee9a clo kh\u00f4ng?<\/h2>\n<p>\u0110\u00fang v\u1eady. L\u1edbp ph\u1ee7 CVD SiC c\u00f3 kh\u1ea3 n\u0103ng ch\u1ed1ng ch\u1ecbu tuy\u1ec7t v\u1eddi trong c\u00e1c m\u00f4i tr\u01b0\u1eddng qu\u00e1 tr\u00ecnh c\u00f3 ch\u1ee9a clo \u0111\u01b0\u1ee3c ki\u1ec3m so\u00e1t.<\/p>","protected":false},"excerpt":{"rendered":"<p class=\"isSelectedEnd\">\u1ed0ng x\u1eed l\u00fd ngang b\u1eb1ng cacbua silic (SiC) \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf \u0111\u1ec3 s\u1eed d\u1ee5ng trong c\u00e1c \u1ee9ng d\u1ee5ng LPCVD, CVD, khu\u1ebfch t\u00e1n, oxy h\u00f3a v\u00e0 \u1ee7 nhi\u1ec7t \u1edf nhi\u1ec7t \u0111\u1ed9 cao trong l\u0129nh v\u1ef1c s\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn, quang \u0111i\u1ec7n v\u00e0 v\u1eadt li\u1ec7u ti\u00ean ti\u1ebfn.<\/p>\n<p class=\"isSelectedEnd\">V\u1edbi t\u01b0 c\u00e1ch l\u00e0 b\u1ed9 ph\u1eadn ch\u00ednh c\u1ee7a bu\u1ed3ng ph\u1ea3n \u1ee9ng trong c\u00e1c h\u1ec7 th\u1ed1ng x\u1eed l\u00fd nhi\u1ec7t ngang, \u1ed1ng ph\u1ea3n \u1ee9ng c\u00f3 \u1ea3nh h\u01b0\u1edfng tr\u1ef1c ti\u1ebfp \u0111\u1ebfn \u0111\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u c\u1ee7a nhi\u1ec7t \u0111\u1ed9, vi\u1ec7c ki\u1ec3m so\u00e1t \u00f4 nhi\u1ec5m, s\u1ef1 \u1ed5n \u0111\u1ecbnh c\u1ee7a qu\u00e1 tr\u00ecnh v\u00e0 tu\u1ed5i th\u1ecd t\u1ed5ng th\u1ec3 c\u1ee7a thi\u1ebft b\u1ecb.<\/p>","protected":false},"featured_media":2334,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}}},"product_brand":[],"product_cat":[23],"product_tag":[625,626,602,624,609,603,629,627,623,628,622],"class_list":["post-2331","product","type-product","status-publish","has-post-thumbnail","product_cat-silicon-carbide-sic","product_tag-cvd-process-tube","product_tag-cvd-sic-coated-tube","product_tag-high-purity-silicon-carbide-tube","product_tag-lpcvd-process-tube","product_tag-semiconductor-process-tube","product_tag-semiconductor-thermal-processing-tube","product_tag-sic-cvd-tube","product_tag-sic-furnace-tube","product_tag-sic-horizontal-process-tube","product_tag-sic-lpcvd-tube","product_tag-silicon-carbide-horizontal-process-tube","desktop-align-left","tablet-align-left","mobile-align-left","first","instock","shipping-taxable","product-type-simple"],"_links":{"self":[{"href":"https:\/\/www.xkh-ceramics.com\/vi\/wp-json\/wp\/v2\/product\/2331","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.xkh-ceramics.com\/vi\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/www.xkh-ceramics.com\/vi\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/vi\/wp-json\/wp\/v2\/comments?post=2331"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/vi\/wp-json\/wp\/v2\/media\/2334"}],"wp:attachment":[{"href":"https:\/\/www.xkh-ceramics.com\/vi\/wp-json\/wp\/v2\/media?parent=2331"}],"wp:term":[{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/vi\/wp-json\/wp\/v2\/product_brand?post=2331"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/vi\/wp-json\/wp\/v2\/product_cat?post=2331"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/vi\/wp-json\/wp\/v2\/product_tag?post=2331"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}