{"id":2327,"date":"2026-05-29T02:58:39","date_gmt":"2026-05-29T02:58:39","guid":{"rendered":"https:\/\/www.xkh-ceramics.com\/?post_type=product&#038;p=2327"},"modified":"2026-05-29T02:59:40","modified_gmt":"2026-05-29T02:59:40","slug":"high-purity-silicon-carbide-vertical-furnace-tube-for-semiconductor-thermal-processing","status":"publish","type":"product","link":"https:\/\/www.xkh-ceramics.com\/vi\/product\/high-purity-silicon-carbide-vertical-furnace-tube-for-semiconductor-thermal-processing\/","title":{"rendered":"\u1ed0ng l\u00f2 \u0111\u1ee9ng b\u1eb1ng cacbua silic c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao d\u00f9ng trong x\u1eed l\u00fd nhi\u1ec7t b\u00e1n d\u1eabn"},"content":{"rendered":"<p class=\"isSelectedEnd\"><img fetchpriority=\"high\" decoding=\"async\" class=\"alignright wp-image-2329 size-medium\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Purity-Silicon-Carbide-Vertical-Furnace-Tube-for-Semiconductor-Thermal-Processing-1-300x300.png\" alt=\"\u1ed0ng l\u00f2 \u0111\u1ee9ng b\u1eb1ng cacbua silic c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao d\u00f9ng trong x\u1eed l\u00fd nhi\u1ec7t b\u00e1n d\u1eabn\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Purity-Silicon-Carbide-Vertical-Furnace-Tube-for-Semiconductor-Thermal-Processing-1-300x300.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Purity-Silicon-Carbide-Vertical-Furnace-Tube-for-Semiconductor-Thermal-Processing-1-150x150.png 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Purity-Silicon-Carbide-Vertical-Furnace-Tube-for-Semiconductor-Thermal-Processing-1-768x768.png 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Purity-Silicon-Carbide-Vertical-Furnace-Tube-for-Semiconductor-Thermal-Processing-1-12x12.png 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Purity-Silicon-Carbide-Vertical-Furnace-Tube-for-Semiconductor-Thermal-Processing-1-600x600.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Purity-Silicon-Carbide-Vertical-Furnace-Tube-for-Semiconductor-Thermal-Processing-1-100x100.png 100w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Purity-Silicon-Carbide-Vertical-Furnace-Tube-for-Semiconductor-Thermal-Processing-1.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>\u1ed0ng l\u00f2 \u0111\u1ee9ng b\u1eb1ng cacbua silic \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf chuy\u00ean d\u1ee5ng cho c\u00e1c \u1ee9ng d\u1ee5ng x\u1eed l\u00fd nhi\u1ec7t trong l\u0129nh v\u1ef1c b\u00e1n d\u1eabn v\u00e0 quang \u0111i\u1ec7n. S\u1ea3n ph\u1ea9m n\u00e0y \u0111\u00f3ng vai tr\u00f2 l\u00e0 \u1ed1ng x\u1eed l\u00fd b\u00ean ngo\u00e0i quan tr\u1ecdng trong c\u00e1c l\u00f2 khu\u1ebfch t\u00e1n \u0111\u1ee9ng, gi\u00fap duy tr\u00ec s\u1ef1 \u0111\u1ed3ng \u0111\u1ec1u nhi\u1ec7t \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh v\u00e0 ki\u1ec3m so\u00e1t m\u00f4i tr\u01b0\u1eddng x\u1eed l\u00fd trong qu\u00e1 tr\u00ecnh v\u1eadn h\u00e0nh \u1edf nhi\u1ec7t \u0111\u1ed9 cao.<\/p>\n<p class=\"isSelectedEnd\">\u0110\u01b0\u1ee3c s\u1ea3n xu\u1ea5t b\u1eb1ng c\u00f4ng ngh\u1ec7 \u0111\u00fac nguy\u00ean kh\u1ed1i ti\u00ean ti\u1ebfn th\u00f4ng qua in 3D, \u1ed1ng l\u00f2 c\u00f3 c\u1ea5u tr\u00fac li\u1ec1n m\u1ea1ch, kh\u00f4ng c\u00f3 m\u1ed1i h\u00e0n hay \u0111i\u1ec3m y\u1ebfu trong qu\u00e1 tr\u00ecnh l\u1eafp r\u00e1p. \u0110i\u1ec1u n\u00e0y gi\u00fap c\u1ea3i thi\u1ec7n \u0111\u00e1ng k\u1ec3 \u0111\u1ed9 b\u1ec1n c\u01a1 h\u1ecdc, \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh k\u00edch th\u01b0\u1edbc v\u00e0 \u0111\u1ed9 tin c\u1eady v\u1eadn h\u00e0nh trong \u0111i\u1ec1u ki\u1ec7n thay \u0111\u1ed5i nhi\u1ec7t \u0111\u1ed9 li\u00ean t\u1ee5c.<\/p>\n<p class=\"isSelectedEnd\">\u0110\u1ec3 \u0111\u00e1p \u1ee9ng c\u00e1c y\u00eau c\u1ea7u v\u1ec1 \u0111\u1ed9 s\u1ea1ch c\u1ef1c cao trong s\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn, b\u1ec1 m\u1eb7t \u1ed1ng \u0111\u01b0\u1ee3c ph\u1ee7 m\u1ed9t l\u1edbp cacbua silic (SiC) c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao, \u0111\u01b0\u1ee3c t\u1ea1o th\u00e0nh b\u1eb1ng ph\u01b0\u01a1ng ph\u00e1p l\u1eafng \u0111\u1ecdng h\u01a1i h\u00f3a h\u1ecdc (CVD). L\u1edbp ph\u1ee7 n\u00e0y gi\u00fap gi\u1ea3m h\u00e0m l\u01b0\u1ee3ng t\u1ea1p ch\u1ea5t tr\u00ean b\u1ec1 m\u1eb7t xu\u1ed1ng d\u01b0\u1edbi 5 PPM, \u0111\u1ed3ng th\u1eddi t\u0103ng c\u01b0\u1eddng kh\u1ea3 n\u0103ng ch\u1ed1ng \u0103n m\u00f2n v\u00e0 k\u00e9o d\u00e0i tu\u1ed5i th\u1ecd s\u1eed d\u1ee5ng.<\/p>\n<p class=\"isSelectedEnd\">V\u1edbi \u0111\u1ed9 d\u1eabn nhi\u1ec7t tuy\u1ec7t v\u1eddi, h\u1ec7 s\u1ed1 gi\u00e3n n\u1edf nhi\u1ec7t th\u1ea5p v\u00e0 kh\u1ea3 n\u0103ng ch\u1ecbu s\u1ed1c nhi\u1ec7t v\u01b0\u1ee3t tr\u1ed9i, \u1ed1ng l\u00f2 b\u1eb1ng cacbua silic mang l\u1ea1i hi\u1ec7u su\u1ea5t \u1ed5n \u0111\u1ecbnh l\u00e2u d\u00e0i trong c\u00e1c m\u00f4i tr\u01b0\u1eddng x\u1eed l\u00fd nhi\u1ec7t \u0111\u1ed9 cao kh\u1eafc nghi\u1ec7t, l\u00ean \u0111\u1ebfn 1300\u00b0C.<\/p>\n<div contenteditable=\"false\">\n<hr \/>\n<\/div>\n<h1>C\u00e1c t\u00ednh n\u0103ng ch\u00ednh<\/h1>\n<h2>C\u1ea5u tr\u00fac in 3D nguy\u00ean kh\u1ed1i<\/h2>\n<p class=\"isSelectedEnd\">Quy tr\u00ecnh \u0111\u00fac t\u00edch h\u1ee3p gi\u00fap lo\u1ea1i b\u1ecf c\u00e1c \u0111\u01b0\u1eddng h\u00e0n v\u00e0 c\u00e1c \u0111i\u1ec3m ch\u1ecbu l\u1ef1c do l\u1eafp r\u00e1p, t\u1eeb \u0111\u00f3 n\u00e2ng cao \u0111\u00e1ng k\u1ec3 \u0111\u1ed9 b\u1ec1n k\u1ebft c\u1ea5u v\u00e0 \u0111\u1ed9 b\u1ec1n l\u00e2u d\u00e0i.<\/p>\n<h2>V\u1eadt li\u1ec7u c\u00f3 \u0111\u1ed9 tinh khi\u1ebft c\u1ef1c cao<\/h2>\n<ul data-spread=\"false\">\n<li>H\u00e0m l\u01b0\u1ee3ng t\u1ea1p ch\u1ea5t c\u01a1 b\u1ea3n: \uff1c 300 PPM<\/li>\n<li>H\u00e0m l\u01b0\u1ee3ng t\u1ea1p ch\u1ea5t tr\u00ean b\u1ec1 m\u1eb7t sau khi ph\u1ee7 SiC b\u1eb1ng ph\u01b0\u01a1ng ph\u00e1p CVD: \uff1c 5 PPM<\/li>\n<\/ul>\n<p class=\"isSelectedEnd\">B\u1ec1 m\u1eb7t si\u00eau s\u1ea1ch gi\u00fap gi\u1ea3m thi\u1ec3u r\u1ee7i ro nhi\u1ec5m b\u1ea9n trong qu\u00e1 tr\u00ecnh gia c\u00f4ng t\u1ea5m wafer b\u00e1n d\u1eabn.<\/p>\n<h2>\u0110\u1ed9 d\u1eabn nhi\u1ec7t tuy\u1ec7t v\u1eddi<\/h2>\n<p class=\"isSelectedEnd\">Cacbua silic gi\u00fap truy\u1ec1n nhi\u1ec7t nhanh ch\u00f3ng v\u00e0 \u0111\u1ed3ng \u0111\u1ec1u, \u0111\u1ea3m b\u1ea3o s\u1ef1 ph\u00e2n b\u1ed1 nhi\u1ec7t \u0111\u1ed9 l\u00f2 nung \u1ed5n \u0111\u1ecbnh cao v\u00e0 t\u00ednh \u1ed5n \u0111\u1ecbnh c\u1ee7a qu\u00e1 tr\u00ecnh.<\/p>\n<h2>Kh\u1ea3 n\u0103ng ch\u1ecbu s\u1ed1c nhi\u1ec7t v\u01b0\u1ee3t tr\u1ed9i<\/h2>\n<p class=\"isSelectedEnd\">\u1ed0ng l\u00f2 c\u00f3 th\u1ec3 ch\u1ecbu \u0111\u01b0\u1ee3c c\u00e1c chu k\u1ef3 gia nhi\u1ec7t v\u00e0 l\u00e0m ngu\u1ed9i nhanh l\u1eb7p \u0111i l\u1eb7p l\u1ea1i m\u00e0 kh\u00f4ng b\u1ecb n\u1ee9t ho\u1eb7c bi\u1ebfn d\u1ea1ng, gi\u00fap gi\u1ea3m t\u1ea7n su\u1ea5t b\u1ea3o tr\u00ec v\u00e0 k\u00e9o d\u00e0i tu\u1ed5i th\u1ecd.<\/p>\n<h2>Kh\u1ea3 n\u0103ng ch\u1ed1ng \u0103n m\u00f2n v\u01b0\u1ee3t tr\u1ed9i<\/h2>\n<p class=\"isSelectedEnd\">L\u1edbp ph\u1ee7 cacbua silic CVD mang l\u1ea1i kh\u1ea3 n\u0103ng ch\u1ed1ng ch\u1ecbu v\u01b0\u1ee3t tr\u1ed9i tr\u01b0\u1edbc c\u00e1c lo\u1ea1i kh\u00ed \u0103n m\u00f2n v\u00e0 m\u00f4i tr\u01b0\u1eddng qu\u00e1 tr\u00ecnh kh\u1eafc nghi\u1ec7t th\u01b0\u1eddng \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng trong c\u00e1c quy tr\u00ecnh khu\u1ebfch t\u00e1n v\u00e0 oxy h\u00f3a b\u00e1n d\u1eabn.<\/p>\n<h2>Tu\u1ed5i th\u1ecd cao<\/h2>\n<p class=\"isSelectedEnd\">So v\u1edbi c\u00e1c \u1ed1ng l\u00f2 b\u1eb1ng th\u1ea1ch anh v\u00e0 nh\u00f4m oxit th\u00f4ng th\u01b0\u1eddng, cacbua silic mang l\u1ea1i \u0111\u1ed9 b\u1ec1n, t\u00ednh \u1ed5n \u0111\u1ecbnh nhi\u1ec7t v\u00e0 tu\u1ed5i th\u1ecd ho\u1ea1t \u0111\u1ed9ng cao h\u01a1n \u0111\u00e1ng k\u1ec3.<\/p>\n<div contenteditable=\"false\">\n<hr \/>\n<\/div>\n<h1>\u1ee8ng d\u1ee5ng<\/h1>\n<h2><img decoding=\"async\" class=\"alignright wp-image-2328 size-medium\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Purity-Silicon-Carbide-Vertical-Furnace-Tube-for-Semiconductor-Thermal-Processing-2-300x300.png\" alt=\"\u1ed0ng l\u00f2 \u0111\u1ee9ng b\u1eb1ng cacbua silic c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao d\u00f9ng trong x\u1eed l\u00fd nhi\u1ec7t b\u00e1n d\u1eabn\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Purity-Silicon-Carbide-Vertical-Furnace-Tube-for-Semiconductor-Thermal-Processing-2-300x300.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Purity-Silicon-Carbide-Vertical-Furnace-Tube-for-Semiconductor-Thermal-Processing-2-150x150.png 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Purity-Silicon-Carbide-Vertical-Furnace-Tube-for-Semiconductor-Thermal-Processing-2-768x768.png 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Purity-Silicon-Carbide-Vertical-Furnace-Tube-for-Semiconductor-Thermal-Processing-2-12x12.png 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Purity-Silicon-Carbide-Vertical-Furnace-Tube-for-Semiconductor-Thermal-Processing-2-600x600.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Purity-Silicon-Carbide-Vertical-Furnace-Tube-for-Semiconductor-Thermal-Processing-2-100x100.png 100w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Purity-Silicon-Carbide-Vertical-Furnace-Tube-for-Semiconductor-Thermal-Processing-2.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>S\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn<\/h2>\n<p class=\"isSelectedEnd\">\u0110\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i trong:<\/p>\n<ul data-spread=\"false\">\n<li>L\u00f2 khu\u1ebfch t\u00e1n<\/li>\n<li>H\u1ec7 th\u1ed1ng oxy h\u00f3a<\/li>\n<li>C\u00e1c quy tr\u00ecnh \u1ee7<\/li>\n<li>Thi\u1ebft b\u1ecb x\u1eed l\u00fd nhi\u1ec7t LPCVD<\/li>\n<li>H\u1ec7 th\u1ed1ng x\u1eed l\u00fd nhi\u1ec7t t\u1ea5m wafer<\/li>\n<\/ul>\n<h2>Ng\u00e0nh c\u00f4ng nghi\u1ec7p quang \u0111i\u1ec7n<\/h2>\n<p class=\"isSelectedEnd\">Ph\u00f9 h\u1ee3p v\u1edbi:<\/p>\n<ul data-spread=\"false\">\n<li>Quy tr\u00ecnh khu\u1ebfch t\u00e1n trong t\u1ebf b\u00e0o quang \u0111i\u1ec7n<\/li>\n<li>Qu\u00e1 tr\u00ecnh c\u00e1ch ly t\u1ea5m wafer silicon<\/li>\n<li>S\u1ea3n xu\u1ea5t pin quang \u0111i\u1ec7n \u1edf nhi\u1ec7t \u0111\u1ed9 cao<\/li>\n<\/ul>\n<h2>C\u00f4ng ngh\u1ec7 x\u1eed l\u00fd nhi\u1ec7t ti\u00ean ti\u1ebfn<\/h2>\n<p class=\"isSelectedEnd\">\u00c1p d\u1ee5ng cho c\u00e1c m\u00f4i tr\u01b0\u1eddng c\u00f4ng nghi\u1ec7p v\u00e0 ph\u00f2ng th\u00ed nghi\u1ec7m c\u00f3 y\u00eau c\u1ea7u:<\/p>\n<ul data-spread=\"false\">\n<li>\u0110\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u nhi\u1ec7t cao<\/li>\n<li>\u0110i\u1ec1u ki\u1ec7n ch\u1ebf bi\u1ebfn si\u00eau s\u1ea1ch<\/li>\n<li>Ho\u1ea1t \u0111\u1ed9ng \u1ed5n \u0111\u1ecbnh \u1edf nhi\u1ec7t \u0111\u1ed9 cao<\/li>\n<\/ul>\n<div contenteditable=\"false\">\n<hr \/>\n<\/div>\n<h1><img decoding=\"async\" class=\"alignright wp-image-2330 size-medium\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Purity-Silicon-Carbide-Vertical-Furnace-Tube-for-Semiconductor-Thermal-Processing-300x300.png\" alt=\"\u1ed0ng l\u00f2 \u0111\u1ee9ng b\u1eb1ng cacbua silic c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao d\u00f9ng trong x\u1eed l\u00fd nhi\u1ec7t b\u00e1n d\u1eabn\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Purity-Silicon-Carbide-Vertical-Furnace-Tube-for-Semiconductor-Thermal-Processing-300x300.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Purity-Silicon-Carbide-Vertical-Furnace-Tube-for-Semiconductor-Thermal-Processing-150x150.png 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Purity-Silicon-Carbide-Vertical-Furnace-Tube-for-Semiconductor-Thermal-Processing-768x768.png 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Purity-Silicon-Carbide-Vertical-Furnace-Tube-for-Semiconductor-Thermal-Processing-12x12.png 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Purity-Silicon-Carbide-Vertical-Furnace-Tube-for-Semiconductor-Thermal-Processing-600x600.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Purity-Silicon-Carbide-Vertical-Furnace-Tube-for-Semiconductor-Thermal-Processing-100x100.png 100w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Purity-Silicon-Carbide-Vertical-Furnace-Tube-for-Semiconductor-Thermal-Processing.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>\u01afu \u0111i\u1ec3m c\u1ee7a s\u1ea3n ph\u1ea9m<\/h1>\n<p class=\"isSelectedEnd\">So v\u1edbi c\u00e1c \u1ed1ng l\u00f2 th\u1ea1ch anh truy\u1ec1n th\u1ed1ng, c\u00e1c \u1ed1ng l\u00f2 th\u1eb3ng \u0111\u1ee9ng b\u1eb1ng cacbua silic mang l\u1ea1i:<\/p>\n<ul data-spread=\"false\">\n<li>Kh\u1ea3 n\u0103ng ch\u1ecbu nhi\u1ec7t \u0111\u1ed9 cao h\u01a1n<\/li>\n<li>Ph\u1ea3n \u1ee9ng nhi\u1ec7t nhanh h\u01a1n<\/li>\n<li>\u0110\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u nhi\u1ec7t \u0111\u1ed9 cao h\u01a1n<\/li>\n<li>Gi\u1ea3m nguy c\u01a1 \u00f4 nhi\u1ec5m<\/li>\n<li>Kh\u1ea3 n\u0103ng ch\u1ecbu s\u1ed1c nhi\u1ec7t v\u01b0\u1ee3t tr\u1ed9i<\/li>\n<li>Kh\u1ea3 n\u0103ng ch\u1ed1ng \u0103n m\u00f2n tuy\u1ec7t v\u1eddi<\/li>\n<li>Tu\u1ed5i th\u1ecd ho\u1ea1t \u0111\u1ed9ng d\u00e0i h\u01a1n<\/li>\n<\/ul>\n<p class=\"isSelectedEnd\">Nh\u1eefng \u01b0u \u0111i\u1ec3m n\u00e0y gi\u00fap n\u00e2ng cao hi\u1ec7u qu\u1ea3 s\u1ea3n xu\u1ea5t, gi\u1ea3m th\u1eddi gian ng\u1eebng ho\u1ea1t \u0111\u1ed9ng c\u1ee7a l\u00f2 nung v\u00e0 c\u1eaft gi\u1ea3m chi ph\u00ed v\u1eadn h\u00e0nh t\u1ed5ng th\u1ec3.<\/p>\n<div contenteditable=\"false\">\n<hr \/>\n<\/div>\n<h1>Th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/h1>\n<table>\n<tbody>\n<tr>\n<th>M\u1eb7t h\u00e0ng<\/th>\n<th>Th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/th>\n<\/tr>\n<tr>\n<td>T\u00ean s\u1ea3n ph\u1ea9m<\/td>\n<td>\u1ed0ng l\u00f2 \u0111\u1ee9ng b\u1eb1ng cacbua silic<\/td>\n<\/tr>\n<tr>\n<td>Ch\u1ea5t li\u1ec7u<\/td>\n<td>Cacbua silic c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao<\/td>\n<\/tr>\n<tr>\n<td>L\u1edbp ph\u1ee7<\/td>\n<td>L\u1edbp ph\u1ee7 SiC b\u1eb1ng ph\u01b0\u01a1ng ph\u00e1p CVD<\/td>\n<\/tr>\n<tr>\n<td>Quy tr\u00ecnh s\u1ea3n xu\u1ea5t<\/td>\n<td>In 3D theo ph\u01b0\u01a1ng ph\u00e1p \u0111\u00fac nguy\u00ean kh\u1ed1i<\/td>\n<\/tr>\n<tr>\n<td>T\u1ea1p ch\u1ea5t trong v\u1eadt li\u1ec7u n\u1ec1n<\/td>\n<td>\uff1c 300 PPM<\/td>\n<\/tr>\n<tr>\n<td>T\u1ea1p ch\u1ea5t b\u1ec1 m\u1eb7t sau khi ph\u1ee7<\/td>\n<td>\uff1c 5 PPM<\/td>\n<\/tr>\n<tr>\n<td>Nhi\u1ec7t \u0111\u1ed9 ho\u1ea1t \u0111\u1ed9ng t\u1ed1i \u0111a<\/td>\n<td>\u2264 1300\u00b0C<\/td>\n<\/tr>\n<tr>\n<td>\u0110\u1ed9 d\u1eabn nhi\u1ec7t<\/td>\n<td>Cao<\/td>\n<\/tr>\n<tr>\n<td>H\u1ec7 s\u1ed1 gi\u00e3n n\u1edf nhi\u1ec7t<\/td>\n<td>R\u1ea5t th\u1ea5p<\/td>\n<\/tr>\n<tr>\n<td>Kh\u1ea3 n\u0103ng ch\u1ecbu s\u1ed1c nhi\u1ec7t<\/td>\n<td>Tuy\u1ec7t v\u1eddi<\/td>\n<\/tr>\n<tr>\n<td>Kh\u1ea3 n\u0103ng ch\u1ed1ng \u0103n m\u00f2n<\/td>\n<td>Tuy\u1ec7t v\u1eddi<\/td>\n<\/tr>\n<tr>\n<td>Kh\u1ea3 n\u0103ng ch\u1ed1ng m\u00e0i m\u00f2n<\/td>\n<td>Tuy\u1ec7t v\u1eddi<\/td>\n<\/tr>\n<tr>\n<td>\u1ee8ng d\u1ee5ng<\/td>\n<td>X\u1eed l\u00fd nhi\u1ec7t trong l\u0129nh v\u1ef1c b\u00e1n d\u1eabn \/ quang \u0111i\u1ec7n<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<div contenteditable=\"false\">\n<hr \/>\n<\/div>\n<h1>T\u1ea1i sao n\u00ean ch\u1ecdn \u1ed1ng l\u00f2 \u0111\u1ee9ng SiC c\u1ee7a ch\u00fang t\u00f4i<\/h1>\n<p class=\"isSelectedEnd\">C\u00e1c \u1ed1ng l\u00f2 \u0111\u1ee9ng b\u1eb1ng cacbua silic c\u1ee7a ch\u00fang t\u00f4i \u0111\u01b0\u1ee3c s\u1ea3n xu\u1ea5t b\u1eb1ng c\u00f4ng ngh\u1ec7 gia c\u00f4ng ch\u00ednh x\u00e1c ti\u00ean ti\u1ebfn v\u00e0 tu\u00e2n th\u1ee7 c\u00e1c ti\u00eau chu\u1ea9n ki\u1ec3m so\u00e1t ch\u1ea5t l\u01b0\u1ee3ng nghi\u00eam ng\u1eb7t nh\u1eb1m \u0111\u00e1p \u1ee9ng c\u00e1c y\u00eau c\u1ea7u kh\u1eaft khe c\u1ee7a c\u00e1c h\u1ec7 th\u1ed1ng nhi\u1ec7t d\u00e0nh cho ng\u00e0nh b\u00e1n d\u1eabn.<\/p>\n<p class=\"isSelectedEnd\">S\u1ef1 k\u1ebft h\u1ee3p gi\u1eefa v\u1eadt li\u1ec7u SiC c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao, c\u1ea5u tr\u00fac li\u1ec1n kh\u1ed1i kh\u00f4ng m\u1ed1i h\u00e0n v\u00e0 l\u1edbp ph\u1ee7 cacbua silic CVD \u0111\u1ea3m b\u1ea3o:<\/p>\n<ul data-spread=\"false\">\n<li>\u0110\u1ed9 \u1ed5n \u0111\u1ecbnh qu\u00e1 tr\u00ecnh cao h\u01a1n<\/li>\n<li>N\u00e2ng cao hi\u1ec7u su\u1ea5t s\u1ea3n xu\u1ea5t wafer<\/li>\n<li>Gi\u1ea3m thi\u1ec3u \u00f4 nhi\u1ec5m<\/li>\n<li>K\u00e9o d\u00e0i tu\u1ed5i th\u1ecd c\u1ee7a c\u00e1c b\u1ed9 ph\u1eadn l\u00f2 nung<\/li>\n<\/ul>\n<p class=\"isSelectedEnd\">Ch\u00fang t\u00f4i c\u00f3 th\u1ec3 cung c\u1ea5p c\u00e1c k\u00edch th\u01b0\u1edbc, \u0111\u1ed9 d\u00e0y th\u00e0nh \u1ed1ng v\u00e0 th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt l\u1edbp ph\u1ee7 theo y\u00eau c\u1ea7u c\u1ee5 th\u1ec3 c\u1ee7a thi\u1ebft b\u1ecb kh\u00e1ch h\u00e0ng.<\/p>\n<div contenteditable=\"false\">\n<hr \/>\n<\/div>\n<h1>C\u00e2u h\u1ecfi th\u01b0\u1eddng g\u1eb7p<\/h1>\n<h2>C\u00e2u h\u1ecfi 1: Ch\u1ee9c n\u0103ng ch\u00ednh c\u1ee7a \u1ed1ng l\u00f2 \u0111\u1ee9ng b\u1eb1ng cacbua silic l\u00e0 g\u00ec?<\/h2>\n<p class=\"isSelectedEnd\">\u1ed0ng l\u00f2 gi\u00fap duy tr\u00ec m\u00f4i tr\u01b0\u1eddng x\u1eed l\u00fd nhi\u1ec7t \u0111\u1ed9 cao \u1ed5n \u0111\u1ecbnh b\u00ean trong c\u00e1c h\u1ec7 th\u1ed1ng x\u1eed l\u00fd nhi\u1ec7t cho ng\u00e0nh b\u00e1n d\u1eabn v\u00e0 quang \u0111i\u1ec7n, \u0111\u1ed3ng th\u1eddi \u0111\u1ea3m b\u1ea3o s\u1ef1 \u0111\u1ed3ng \u0111\u1ec1u v\u1ec1 nhi\u1ec7t \u0111\u1ed9 v\u00e0 ki\u1ec3m so\u00e1t \u00f4 nhi\u1ec5m.<\/p>\n<h2>C\u00e2u h\u1ecfi 2: Nhi\u1ec7t \u0111\u1ed9 ho\u1ea1t \u0111\u1ed9ng t\u1ed1i \u0111a l\u00e0 bao nhi\u00eau?<\/h2>\n<p class=\"isSelectedEnd\">\u1ed0ng l\u00f2 \u0111\u1ee9ng b\u1eb1ng cacbua silic c\u00f3 th\u1ec3 ho\u1ea1t \u0111\u1ed9ng li\u00ean t\u1ee5c \u1edf nhi\u1ec7t \u0111\u1ed9 l\u00ean \u0111\u1ebfn 1300\u00b0C.<\/p>\n<h2>C\u00e2u h\u1ecfi 3: T\u1ea1i sao l\u1ea1i s\u1eed d\u1ee5ng \u1ed1ng l\u00f2 b\u1eb1ng cacbua silic thay v\u00ec \u1ed1ng l\u00f2 b\u1eb1ng th\u1ea1ch anh?<\/h2>\n<p class=\"isSelectedEnd\">So v\u1edbi th\u1ea1ch anh, cacbua silic mang l\u1ea1i:<\/p>\n<ul data-spread=\"false\">\n<li>\u0110\u1ed9 d\u1eabn nhi\u1ec7t cao h\u01a1n<\/li>\n<li>Kh\u1ea3 n\u0103ng ch\u1ecbu s\u1ed1c nhi\u1ec7t t\u1ed1t h\u01a1n<\/li>\n<li>Tu\u1ed5i th\u1ecd cao h\u01a1n<\/li>\n<li>Gi\u1ea3m nguy c\u01a1 \u00f4 nhi\u1ec5m<\/li>\n<li>Kh\u1ea3 n\u0103ng ch\u1ed1ng \u0103n m\u00f2n v\u01b0\u1ee3t tr\u1ed9i<\/li>\n<\/ul>\n<p>Nh\u1eefng \u01b0u \u0111i\u1ec3m n\u00e0y khi\u1ebfn SiC tr\u1edf n\u00ean ph\u00f9 h\u1ee3p h\u01a1n cho qu\u00e1 tr\u00ecnh s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn ti\u00ean ti\u1ebfn.<\/p>","protected":false},"excerpt":{"rendered":"<p>\u1ed0ng l\u00f2 \u0111\u1ee9ng b\u1eb1ng cacbua silic \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf chuy\u00ean d\u1ee5ng cho c\u00e1c \u1ee9ng d\u1ee5ng x\u1eed l\u00fd nhi\u1ec7t trong l\u0129nh v\u1ef1c b\u00e1n d\u1eabn v\u00e0 quang \u0111i\u1ec7n. S\u1ea3n ph\u1ea9m n\u00e0y \u0111\u00f3ng vai tr\u00f2 l\u00e0 \u1ed1ng x\u1eed l\u00fd b\u00ean ngo\u00e0i quan tr\u1ecdng trong c\u00e1c l\u00f2 khu\u1ebfch t\u00e1n \u0111\u1ee9ng, gi\u00fap duy tr\u00ec s\u1ef1 \u0111\u1ed3ng \u0111\u1ec1u nhi\u1ec7t \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh v\u00e0 ki\u1ec3m so\u00e1t m\u00f4i tr\u01b0\u1eddng x\u1eed l\u00fd trong qu\u00e1 tr\u00ecnh v\u1eadn h\u00e0nh \u1edf nhi\u1ec7t \u0111\u1ed9 cao.<\/p>","protected":false},"featured_media":2330,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center 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