{"id":2322,"date":"2026-05-29T02:28:31","date_gmt":"2026-05-29T02:28:31","guid":{"rendered":"https:\/\/www.xkh-ceramics.com\/?post_type=product&p=2322"},"modified":"2026-05-29T02:44:45","modified_gmt":"2026-05-29T02:44:45","slug":"silicon-carbide-cantilever-paddle-for-semiconductor-photovoltaic-high-temperature-furnace-systems","status":"publish","type":"product","link":"https:\/\/www.xkh-ceramics.com\/vi\/product\/silicon-carbide-cantilever-paddle-for-semiconductor-photovoltaic-high-temperature-furnace-systems\/","title":{"rendered":"C\u00e1nh qu\u1ea1t \u0111\u00f2n b\u1ea9y b\u1eb1ng cacbua silic cho c\u00e1c h\u1ec7 th\u1ed1ng l\u00f2 nung nhi\u1ec7t \u0111\u1ed9 cao trong ng\u00e0nh b\u00e1n d\u1eabn v\u00e0 quang \u0111i\u1ec7n"},"content":{"rendered":"

\"\"C\u00e1nh qu\u1ea1t \u0111\u00f2n b\u1ea9y b\u1eb1ng cacbua silic (SiC Cantilever Paddle) l\u00e0 m\u1ed9t b\u1ed9 ph\u1eadn k\u1ebft c\u1ea5u hi\u1ec7u su\u1ea5t cao \u0111\u01b0\u1ee3c ch\u1ebf t\u1ea1o t\u1eeb cacbua silic li\u00ean k\u1ebft ph\u1ea3n \u1ee9ng (RB-SiC). \u0110\u01b0\u1ee3c thi\u1ebft k\u1ebf chuy\u00ean bi\u1ec7t cho c\u00e1c thi\u1ebft b\u1ecb x\u1eed l\u00fd b\u00e1n d\u1eabn v\u00e0 quang \u0111i\u1ec7n \u1edf nhi\u1ec7t \u0111\u1ed9 cao, s\u1ea3n ph\u1ea9m n\u00e0y mang l\u1ea1i \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh nhi\u1ec7t, \u0111\u1ed9 b\u1ec1n c\u01a1 h\u1ecdc, kh\u1ea3 n\u0103ng ch\u1ed1ng \u0103n m\u00f2n v\u00e0 \u0111\u1ed9 ch\u00ednh x\u00e1c k\u00edch th\u01b0\u1edbc tuy\u1ec7t v\u1eddi trong c\u00e1c \u0111i\u1ec1u ki\u1ec7n v\u1eadn h\u00e0nh kh\u1eafc nghi\u1ec7t.<\/p>\n

V\u1edbi c\u1ea5u tr\u00fac \u0111\u00f2n b\u1ea9y, t\u1ea5m g\u1ea1t n\u00e0y c\u00f3 th\u1ec3 n\u00e2ng \u0111\u1ee1 v\u00e0 v\u1eadn chuy\u1ec3n nhi\u1ec1u t\u1ea5m wafer m\u1ed9t c\u00e1ch an to\u00e0n b\u00ean trong l\u00f2 khu\u1ebfch t\u00e1n, l\u00f2 oxy h\u00f3a, h\u1ec7 th\u1ed1ng LPCVD v\u00e0 thi\u1ebft b\u1ecb ph\u1ee7. So v\u1edbi c\u00e1c h\u1ec7 th\u1ed1ng gi\u00e1 \u0111\u1ee1 b\u1eb1ng th\u1ea1ch anh ho\u1eb7c kim lo\u1ea1i truy\u1ec1n th\u1ed1ng, t\u1ea5m g\u1ea1t SiC ki\u1ec3u \u0111\u00f2n b\u1ea9y mang l\u1ea1i tu\u1ed5i th\u1ecd cao h\u01a1n \u0111\u00e1ng k\u1ec3, gi\u1ea3m thi\u1ec3u nguy c\u01a1 \u00f4 nhi\u1ec5m v\u00e0 c\u00f3 kh\u1ea3 n\u0103ng ch\u1ed1ng bi\u1ebfn d\u1ea1ng nhi\u1ec7t v\u01b0\u1ee3t tr\u1ed9i.<\/p>\n

Nh\u1edd h\u1ec7 s\u1ed1 gi\u00e3n n\u1edf nhi\u1ec7t th\u1ea5p v\u00e0 \u0111\u1ed9 d\u1eabn nhi\u1ec7t cao, c\u00e1nh qu\u1ea1t v\u1eabn duy tr\u00ec \u0111\u01b0\u1ee3c \u0111\u1ed9 b\u1ec1n c\u1ea5u tr\u00fac tuy\u1ec7t v\u1eddi trong c\u00e1c chu k\u1ef3 gia nhi\u1ec7t v\u00e0 l\u00e0m m\u00e1t l\u1eb7p \u0111i l\u1eb7p l\u1ea1i, khi\u1ebfn n\u00f3 tr\u1edf th\u00e0nh l\u1ef1a ch\u1ecdn l\u00fd t\u01b0\u1edfng cho c\u00e1c m\u00f4i tr\u01b0\u1eddng s\u1ea3n xu\u1ea5t c\u00f4ng nghi\u1ec7p li\u00ean t\u1ee5c \u1edf nhi\u1ec7t \u0111\u1ed9 cao.<\/p>\n

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\n<\/div>\n

C\u00e1c t\u00ednh n\u0103ng ch\u00ednh c\u1ee7a c\u00e1nh qu\u1ea1t \u0111\u00f2n b\u1ea9y SiC<\/h2>\n

Kh\u1ea3 n\u0103ng ch\u1ecbu nhi\u1ec7t \u0111\u1ed9 cao tuy\u1ec7t v\u1eddi<\/h3>\n

C\u00e1nh qu\u1ea1t d\u1ea1ng \u0111\u00f2n b\u1ea9y b\u1eb1ng SiC c\u00f3 th\u1ec3 ho\u1ea1t \u0111\u1ed9ng li\u00ean t\u1ee5c \u1edf nhi\u1ec7t \u0111\u1ed9 l\u00ean \u0111\u1ebfn 1380 \u00b0C m\u00e0 kh\u00f4ng b\u1ecb bi\u1ebfn d\u1ea1ng hay h\u01b0 h\u1ecfng c\u1ea5u tr\u00fac. \u0110i\u1ec1u n\u00e0y khi\u1ebfn n\u00f3 tr\u1edf n\u00ean r\u1ea5t ph\u00f9 h\u1ee3p cho c\u00e1c quy tr\u00ecnh khu\u1ebfch t\u00e1n, oxy h\u00f3a, nitru h\u00f3a, \u1ee7 v\u00e0 LPCVD trong ng\u00e0nh b\u00e1n d\u1eabn, di\u1ec5n ra \u1edf nhi\u1ec7t \u0111\u1ed9 t\u1eeb 1000\u20131300 \u00b0C.<\/p>\n

\u0110\u1ed9 b\u1ec1n c\u01a1 h\u1ecdc v\u01b0\u1ee3t tr\u1ed9i<\/h3>\n

V\u1eadt li\u1ec7u RB-SiC mang l\u1ea1i \u0111\u1ed9 b\u1ec1n u\u1ed1n v\u00e0 \u0111\u1ed9 c\u1ee9ng v\u01b0\u1ee3t tr\u1ed9i ngay c\u1ea3 \u1edf nhi\u1ec7t \u0111\u1ed9 cao. Thi\u1ebft k\u1ebf m\u1eb7t c\u1eaft ngang \u1ed5n \u0111\u1ecbnh \u0111\u1ea3m b\u1ea3o kh\u1ea3 n\u0103ng h\u1ed7 tr\u1ee3 \u0111\u00e1ng tin c\u1eady cho c\u00e1c t\u1ea5m wafer c\u00f3 \u0111\u01b0\u1eddng k\u00ednh l\u1edbn, \u0111\u1ed3ng th\u1eddi gi\u1ea3m thi\u1ec3u rung \u0111\u1ed9ng v\u00e0 hi\u1ec7n t\u01b0\u1ee3ng v\u00f5ng trong qu\u00e1 tr\u00ecnh l\u00f2 ho\u1ea1t \u0111\u1ed9ng.<\/p>\n

M\u1ee9c \u0111\u1ed9 \u00f4 nhi\u1ec5m c\u1ef1c th\u1ea5p<\/h3>\n

Kh\u00f4ng gi\u1ed1ng nh\u01b0 c\u00e1c ch\u1ea5t mang kim lo\u1ea1i, cacbua silic kh\u00f4ng gi\u1ea3i ph\u00f3ng c\u00e1c ion ho\u1eb7c h\u1ea1t kim lo\u1ea1i trong qu\u00e1 tr\u00ecnh x\u1eed l\u00fd \u1edf nhi\u1ec7t \u0111\u1ed9 cao. \u0110i\u1ec1u n\u00e0y gi\u00fap duy tr\u00ec \u0111\u1ed9 s\u1ea1ch c\u1ee7a t\u1ea5m wafer v\u00e0 n\u00e2ng cao hi\u1ec7u su\u1ea5t s\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn.<\/p>\n

Kh\u1ea3 n\u0103ng ch\u1ecbu s\u1ed1c nhi\u1ec7t tuy\u1ec7t v\u1eddi<\/h3>\n

C\u00e1nh qu\u1ea1t c\u00f3 th\u1ec3 ch\u1ecbu \u0111\u01b0\u1ee3c c\u00e1c chu k\u1ef3 gia nhi\u1ec7t v\u00e0 l\u00e0m l\u1ea1nh nhanh m\u00e0 kh\u00f4ng b\u1ecb n\u1ee9t hay cong v\u00eanh. Kh\u1ea3 n\u0103ng ch\u1ecbu s\u1ed1c nhi\u1ec7t cao c\u1ee7a n\u00f3 gi\u00fap k\u00e9o d\u00e0i \u0111\u00e1ng k\u1ec3 tu\u1ed5i th\u1ecd ho\u1ea1t \u0111\u1ed9ng v\u00e0 gi\u1ea3m t\u1ea7n su\u1ea5t b\u1ea3o tr\u00ec.<\/p>\n

Kh\u1ea3 n\u0103ng ch\u1ed1ng \u0103n m\u00f2n v\u01b0\u1ee3t tr\u1ed9i<\/h3>\n

V\u1eadt li\u1ec7u SiC th\u1ec3 hi\u1ec7n kh\u1ea3 n\u0103ng ch\u1ed1ng ch\u1ecbu tuy\u1ec7t v\u1eddi \u0111\u1ed1i v\u1edbi axit, ki\u1ec1m, qu\u00e1 tr\u00ecnh oxy h\u00f3a v\u00e0 c\u00e1c lo\u1ea1i kh\u00ed qu\u00e1 tr\u00ecnh \u0103n m\u00f2n, khi\u1ebfn n\u00f3 tr\u1edf n\u00ean ph\u00f9 h\u1ee3p cho c\u00e1c m\u00f4i tr\u01b0\u1eddng ch\u1ebf bi\u1ebfn h\u00f3a ch\u1ea5t kh\u1eafc nghi\u1ec7t.<\/p>\n

Kh\u1ea3 n\u0103ng t\u01b0\u01a1ng th\u00edch c\u1ee7a quy tr\u00ecnh LPCVD<\/h3>\n

H\u1ec7 s\u1ed1 gi\u00e3n n\u1edf nhi\u1ec7t c\u1ee7a cacbua silic r\u1ea5t t\u01b0\u01a1ng \u0111\u1ed3ng v\u1edbi c\u00e1c v\u1eadt li\u1ec7u ph\u1ee7 LPCVD th\u00f4ng d\u1ee5ng, gi\u00fap gi\u1ea3m thi\u1ec3u hi\u1ec7u qu\u1ea3 \u1ee9ng su\u1ea5t nhi\u1ec7t, hi\u1ec7n t\u01b0\u1ee3ng bong tr\u00f3c l\u1edbp ph\u1ee7 v\u00e0 \u00f4 nhi\u1ec5m do h\u1ea1t b\u1ee5i.<\/p>\n

Tu\u1ed5i th\u1ecd cao<\/h3>\n

So v\u1edbi c\u00e1c c\u00e1nh qu\u1ea1t l\u00e0m t\u1eeb th\u1ea1ch anh v\u00e0 kim lo\u1ea1i, c\u00e1c c\u00e1nh qu\u1ea1t d\u1ea1ng \u0111\u00f2n b\u1ea9y l\u00e0m t\u1eeb SiC c\u00f3 \u0111\u1ed9 b\u1ec1n cao h\u01a1n \u0111\u00e1ng k\u1ec3 v\u00e0 t\u1ea7n su\u1ea5t thay th\u1ebf th\u1ea5p h\u01a1n, t\u1eeb \u0111\u00f3 gi\u00fap gi\u1ea3m chi ph\u00ed v\u1eadn h\u00e0nh l\u00e2u d\u00e0i.<\/p>\n

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\n<\/div>\n

Th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/h2>\n\n\n\n\n\n\n\n\n\n\n\n\n
M\u1eb7t h\u00e0ng<\/th>\n\u0110\u01a1n v\u1ecb<\/th>\nD\u1eef li\u1ec7u<\/th>\n<\/tr>\n
Nhi\u1ec7t \u0111\u1ed9 ho\u1ea1t \u0111\u1ed9ng t\u1ed1i \u0111a<\/td>\n\u2103<\/td>\n1380<\/td>\n<\/tr>\n
M\u1eadt \u0111\u1ed9<\/td>\ng\/cm\u00b3<\/td>\n3.04\u20133.08<\/td>\n<\/tr>\n
\u0110\u1ed9 x\u1ed1p m\u1edf<\/td>\n%<\/td>\n<0,1<\/td>\n<\/tr>\n
\u0110\u1ed9 b\u1ec1n u\u1ed1n<\/td>\nMPa<\/td>\n250 (20\u00b0C) \/ 280 (1200\u00b0C)<\/td>\n<\/tr>\n
H\u1ec7 s\u1ed1 \u0111\u00e0n h\u1ed3i<\/td>\nGPa<\/td>\n330 (20\u00b0C) \/ 300 (1200\u00b0C)<\/td>\n<\/tr>\n
\u0110\u1ed9 d\u1eabn nhi\u1ec7t<\/td>\nW\/m\u00b7K<\/td>\n45 (1200\u00b0C)<\/td>\n<\/tr>\n
H\u1ec7 s\u1ed1 gi\u00e3n n\u1edf nhi\u1ec7t<\/td>\nK\u207b\u00b9 \u00d7 10\u207b\u2076<\/td>\n4.5<\/td>\n<\/tr>\n
\u0110\u1ed9 c\u1ee9ng (Vickers)<\/td>\nHV2<\/td>\n\u22652100<\/td>\n<\/tr>\n
Kh\u1ea3 n\u0103ng ch\u1ed1ng axit\/ki\u1ec1m<\/td>\n\u2014<\/td>\nTuy\u1ec7t v\u1eddi<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n
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\n<\/div>\n

K\u00edch th\u01b0\u1edbc ti\u00eau chu\u1ea9n<\/h2>\n

C\u00e1c chi\u1ec1u d\u00e0i ti\u00eau chu\u1ea9n hi\u1ec7n c\u00f3 bao g\u1ed3m:<\/p>\n

    \n
  • 2.378 mm<\/li>\n
  • 2.550 mm<\/li>\n
  • 2.660 mm<\/li>\n<\/ul>\n

    C\u00f3 th\u1ec3 cung c\u1ea5p c\u00e1c k\u00edch th\u01b0\u1edbc, c\u1ea5u tr\u00fac khe, c\u00f4ng su\u1ea5t t\u1ea5m wafer v\u00e0 c\u1ea5u h\u00ecnh l\u1eafp \u0111\u1eb7t t\u00f9y ch\u1ec9nh theo thi\u1ebft k\u1ebf l\u00f2 nung v\u00e0 y\u00eau c\u1ea7u quy tr\u00ecnh c\u1ee7a kh\u00e1ch h\u00e0ng.<\/p>\n

    \n
    \n<\/div>\n

    C\u00e1c \u1ee9ng d\u1ee5ng \u0111i\u1ec3n h\u00ecnh<\/h2>\n

    \"\"Ng\u00e0nh c\u00f4ng nghi\u1ec7p b\u00e1n d\u1eabn<\/h3>\n

    C\u00e1c c\u00e1nh qu\u1ea1t \u0111\u00f2n b\u1ea9y SiC \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i trong c\u00e1c quy tr\u00ecnh s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn, bao g\u1ed3m:<\/p>\n

      \n
    • Qu\u00e1 tr\u00ecnh khu\u1ebfch t\u00e1n tr\u00ean t\u1ea5m wafer<\/li>\n
    • Qu\u00e1 tr\u00ecnh oxy h\u00f3a<\/li>\n
    • Ph\u01b0\u01a1ng ph\u00e1p l\u1eafng \u0111\u1ecdng LPCVD<\/li>\n
    • Qu\u00e1 tr\u00ecnh nitru h\u00f3a<\/li>\n
    • \u1ee6<\/li>\n
    • V\u1eadn chuy\u1ec3n v\u00e0 x\u1ebfp d\u1ee1 t\u1ea5m wafer<\/li>\n<\/ul>\n

      \u0110\u1ed9 tinh khi\u1ebft cao v\u00e0 t\u00ednh \u1ed5n \u0111\u1ecbnh v\u1ec1 k\u00edch th\u01b0\u1edbc c\u1ee7a ch\u00fang gi\u00fap gi\u1ea3m thi\u1ec3u r\u1ee7i ro nhi\u1ec5m b\u1ea9n v\u00e0 n\u00e2ng cao t\u00ednh nh\u1ea5t qu\u00e1n c\u1ee7a quy tr\u00ecnh.<\/p>\n

      \"\"Ng\u00e0nh c\u00f4ng nghi\u1ec7p quang \u0111i\u1ec7n<\/h3>\n

      Trong s\u1ea3n xu\u1ea5t pin m\u1eb7t tr\u1eddi, t\u1ea5m l\u00f3t \u0111\u00f3ng vai tr\u00f2 l\u00e0 gi\u00e1 \u0111\u1ee1 t\u1ea5m wafer ch\u1ecbu nhi\u1ec7t \u0111\u1ed9 cao \u0111\u1ec3:<\/p>\n

        \n
      • T\u1ea5m silicon \u0111a tinh th\u1ec3<\/li>\n
      • T\u1ea5m silicon \u0111\u01a1n tinh th\u1ec3<\/li>\n
      • L\u00f2 khu\u1ebfch t\u00e1n<\/li>\n
      • H\u1ec7 th\u1ed1ng PECVD v\u00e0 h\u1ec7 th\u1ed1ng ph\u1ee7<\/li>\n<\/ul>\n

        V\u1eadt li\u1ec7u n\u00e0y duy tr\u00ec \u0111\u01b0\u1ee3c t\u00ednh \u1ed5n \u0111\u1ecbnh trong \u0111i\u1ec1u ki\u1ec7n thay \u0111\u1ed5i nhi\u1ec7t \u0111\u1ed9 l\u1eb7p \u0111i l\u1eb7p l\u1ea1i, v\u1ed1n th\u01b0\u1eddng g\u1eb7p trong c\u00e1c d\u00e2y chuy\u1ec1n s\u1ea3n xu\u1ea5t pin quang \u0111i\u1ec7n.<\/p>\n

        \u1ee8ng d\u1ee5ng trong l\u0129nh v\u1ef1c h\u00f3a ch\u1ea5t v\u00e0 c\u00f4ng nghi\u1ec7p<\/h3>\n

        Nh\u1edd kh\u1ea3 n\u0103ng ch\u1ed1ng \u0103n m\u00f2n v\u01b0\u1ee3t tr\u1ed9i, c\u00e1nh khu\u1ea5y d\u1ea1ng \u0111\u00f2n b\u1ea9y b\u1eb1ng SiC c\u0169ng c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng trong:<\/p>\n

          \n
        • B\u1ec3 ph\u1ea3n \u1ee9ng h\u00f3a ch\u1ea5t \u0103n m\u00f2n<\/li>\n
        • H\u1ec7 th\u1ed1ng tu\u1ea7n ho\u00e0n nhi\u1ec7t \u0111\u1ed9 cao<\/li>\n
        • Thi\u1ebft b\u1ecb x\u1eed l\u00fd nhi\u1ec7t c\u00f4ng nghi\u1ec7p<\/li>\n
        • M\u00f4i tr\u01b0\u1eddng kh\u00ed c\u00f3 t\u00ednh \u0103n m\u00f2n cao<\/li>\n<\/ul>\n
          \n
          \n<\/div>\n

          \u01afu \u0111i\u1ec3m so v\u1edbi v\u1ee3t kim lo\u1ea1i ho\u1eb7c th\u1ea1ch anh<\/h2>\n\n\n\n\n\n\n\n\n\n\n
          T\u00e0i s\u1ea3n<\/td>\nC\u00e1nh qu\u1ea1t SiC<\/td>\nM\u00e1i ch\u00e8o b\u1eb1ng th\u1ea1ch anh<\/td>\nM\u00e1i ch\u00e8o kim lo\u1ea1i<\/td>\n<\/tr>\n
          Kh\u1ea3 n\u0103ng ch\u1ecbu nhi\u1ec7t \u0111\u1ed9 cao<\/td>\nTuy\u1ec7t v\u1eddi<\/td>\nTrung b\u00ecnh<\/td>\nTrung b\u00ecnh<\/td>\n<\/tr>\n
          Kh\u1ea3 n\u0103ng ch\u1ecbu s\u1ed1c nhi\u1ec7t<\/td>\nTuy\u1ec7t v\u1eddi<\/td>\nNgh\u00e8o<\/td>\nTrung b\u00ecnh<\/td>\n<\/tr>\n
          Kh\u1ea3 n\u0103ng ch\u1ed1ng \u0103n m\u00f2n<\/td>\nTuy\u1ec7t v\u1eddi<\/td>\nT\u1ed1t<\/td>\nNgh\u00e8o<\/td>\n<\/tr>\n
          \u0110\u1ed9 b\u1ec1n c\u01a1 h\u1ecdc<\/td>\nR\u1ea5t cao<\/td>\nTh\u1ea5p<\/td>\nCao<\/td>\n<\/tr>\n
          \u00d4 nhi\u1ec5m do h\u1ea1t<\/td>\nR\u1ea5t th\u1ea5p<\/td>\nTrung b\u00ecnh<\/td>\nCao<\/td>\n<\/tr>\n
          Tu\u1ed5i th\u1ecd<\/td>\nD\u00e0i<\/td>\nNg\u1eafn<\/td>\nTrung b\u00ecnh<\/td>\n<\/tr>\n
          Gi\u00e1 \u0111\u1ee1 t\u1ea5m wafer c\u1ee1 l\u1edbn<\/td>\nTuy\u1ec7t v\u1eddi<\/td>\nS\u1ed1 l\u01b0\u1ee3ng c\u00f3 h\u1ea1n<\/td>\nTrung b\u00ecnh<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n
          \n
          \n<\/div>\n

          C\u00e2u h\u1ecfi th\u01b0\u1eddng g\u1eb7p \u2013 C\u00e1nh qu\u1ea1t \u0111\u00f2n b\u1ea9y b\u1eb1ng cacbua silic<\/h2>\n

          1. Nhi\u1ec7t \u0111\u1ed9 ho\u1ea1t \u0111\u1ed9ng t\u1ed1i \u0111a l\u00e0 bao nhi\u00eau?<\/h3>\n

          Nhi\u1ec7t \u0111\u1ed9 ho\u1ea1t \u0111\u1ed9ng t\u1ed1i \u0111a l\u00e0 1380 \u00b0C. S\u1ea3n ph\u1ea9m n\u00e0y ho\u1ea1t \u0111\u1ed9ng \u1ed5n \u0111\u1ecbnh trong c\u00e1c quy tr\u00ecnh s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn v\u00e0 quang \u0111i\u1ec7n \u1edf nhi\u1ec7t \u0111\u1ed9 cao, trong kho\u1ea3ng t\u1eeb 1000\u20131300 \u00b0C.<\/p>\n

          2. T\u1ea1i sao n\u00ean ch\u1ecdn c\u00e1nh qu\u1ea1t b\u1eb1ng cacbua silic thay v\u00ec c\u00e1nh qu\u1ea1t b\u1eb1ng kim lo\u1ea1i?<\/h3>\n

          C\u00e1c c\u00e1nh qu\u1ea1t kim lo\u1ea1i c\u00f3 th\u1ec3 b\u1ecb oxy h\u00f3a, bi\u1ebfn d\u1ea1ng ho\u1eb7c gi\u1ea3i ph\u00f3ng c\u00e1c t\u1ea1p ch\u1ea5t kim lo\u1ea1i \u1edf nhi\u1ec7t \u0111\u1ed9 cao. Carbide silic c\u00f3 \u0111\u1ed9 c\u1ee9ng v\u01b0\u1ee3t tr\u1ed9i, t\u00ednh \u1ed5n \u0111\u1ecbnh nhi\u1ec7t, kh\u1ea3 n\u0103ng ch\u1ed1ng \u0103n m\u00f2n v\u00e0 \u0111\u1eb7c t\u00ednh g\u00e2y \u00f4 nhi\u1ec5m c\u1ef1c th\u1ea5p.<\/p>\n

          3. L\u01b0\u1ee1i g\u1ea1t n\u00e0y c\u00f3 ph\u00f9 h\u1ee3p v\u1edbi c\u00e1c t\u1ea5m wafer c\u1ee1 l\u1edbn nh\u01b0 t\u1ea5m wafer 12 inch kh\u00f4ng?<\/h3>\n

          \u0110\u00fang v\u1eady. C\u1ea5u tr\u00fac \u0111\u00f2n b\u1ea9y v\u00e0 \u0111\u1ed9 b\u1ec1n c\u01a1 h\u1ecdc cao gi\u00fap \u0111\u1ea3m b\u1ea3o s\u1ef1 h\u1ed7 tr\u1ee3 \u1ed5n \u0111\u1ecbnh cho c\u00e1c t\u1ea5m wafer c\u00f3 \u0111\u01b0\u1eddng k\u00ednh l\u1edbn \u0111\u1ed3ng th\u1eddi duy tr\u00ec \u0111\u1ed9 ch\u00ednh x\u00e1c v\u1ec1 k\u00edch th\u01b0\u1edbc.<\/p>\n

          4. C\u00f3 th\u1ec3 t\u00f9y ch\u1ec9nh \u0111\u01b0\u1ee3c kh\u00f4ng?<\/h3>\n

          \u0110\u00fang v\u1eady. Ch\u00fang t\u00f4i c\u00f3 th\u1ec3 cung c\u1ea5p c\u00e1c k\u00edch th\u01b0\u1edbc, \u0111\u1ed9 d\u00e0y, c\u00f4ng su\u1ea5t t\u1ea5m wafer, thi\u1ebft k\u1ebf khe c\u1eafm v\u00e0 c\u1ea5u tr\u00fac l\u1eafp \u0111\u1eb7t theo y\u00eau c\u1ea7u c\u1ee7a kh\u00e1ch h\u00e0ng.<\/p>\n

           <\/p>","protected":false},"excerpt":{"rendered":"

          C\u00e1nh qu\u1ea1t \u0111\u00f2n b\u1ea9y b\u1eb1ng cacbua silic l\u00e0 m\u1ed9t gi\u1ea3i ph\u00e1p gi\u00e1 \u0111\u1ee1 ti\u00ean ti\u1ebfn ch\u1ecbu nhi\u1ec7t \u0111\u1ed9 cao, \u0111\u01b0\u1ee3c \u1ee9ng d\u1ee5ng trong c\u00e1c l\u0129nh v\u1ef1c b\u00e1n d\u1eabn, quang \u0111i\u1ec7n v\u00e0 l\u00f2 c\u00f4ng nghi\u1ec7p. V\u1edbi s\u1ef1 k\u1ebft h\u1ee3p gi\u1eefa \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh nhi\u1ec7t v\u01b0\u1ee3t tr\u1ed9i, \u0111\u1ed9 b\u1ec1n c\u01a1 h\u1ecdc cao, kh\u1ea3 n\u0103ng ch\u1ed1ng \u0103n m\u00f2n v\u00e0 \u0111\u1eb7c t\u00ednh \u00f4 nhi\u1ec5m c\u1ef1c th\u1ea5p, s\u1ea3n ph\u1ea9m n\u00e0y mang l\u1ea1i hi\u1ec7u su\u1ea5t x\u1eed l\u00fd t\u1ea5m wafer \u0111\u00e1ng tin c\u1eady trong c\u00e1c m\u00f4i tr\u01b0\u1eddng gia c\u00f4ng kh\u1eafc nghi\u1ec7t.<\/p>\n

          V\u1edbi k\u00edch th\u01b0\u1edbc c\u00f3 th\u1ec3 t\u00f9y ch\u1ec9nh v\u00e0 kh\u1ea3 n\u0103ng t\u01b0\u01a1ng th\u00edch v\u1edbi c\u00e1c h\u1ec7 th\u1ed1ng khu\u1ebfch t\u00e1n v\u00e0 LPCVD hi\u1ec7n \u0111\u1ea1i, c\u00e1c t\u1ea5m c\u00e1nh tay \u0111\u00f2n SiC \u0111ang tr\u1edf th\u00e0nh m\u1ed9t th\u00e0nh ph\u1ea7n kh\u00f4ng th\u1ec3 thi\u1ebfu trong c\u00e1c quy tr\u00ecnh s\u1ea3n xu\u1ea5t nhi\u1ec7t \u0111\u1ed9 cao th\u1ebf h\u1ec7 m\u1edbi.<\/p>","protected":false},"featured_media":2323,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}}},"product_brand":[],"product_cat":[23],"product_tag":[595,589,584,392,582,587,591,597,583,596,357,594,581,585,592,578,579,352,580,408,593,577,576,586,590,588,353,406],"class_list":["post-2322","product","type-product","status-publish","has-post-thumbnail","product_cat-silicon-carbide-sic","product_tag-annealing","product_tag-corrosion-resistance","product_tag-diffusion-furnace","product_tag-high-purity-sic","product_tag-high-temperature-furnace","product_tag-high-temperature-resistance","product_tag-industrial-furnace","product_tag-industrial-thermal-processing","product_tag-lpcvd","product_tag-nitridation","product_tag-oxidation-furnace","product_tag-pecvd","product_tag-photovoltaic-furnace","product_tag-photovoltaic-processing","product_tag-quartz-paddle-alternative","product_tag-rb-sic","product_tag-reaction-bonded-silicon-carbide","product_tag-semiconductor-equipment","product_tag-semiconductor-furnace","product_tag-semiconductor-processing","product_tag-semiconductor-wafer-carrier","product_tag-sic-cantilever-paddle","product_tag-silicon-carbide-cantilever-paddle","product_tag-silicon-carbide-paddle","product_tag-solar-cell-manufacturing","product_tag-thermal-shock-resistance","product_tag-wafer-carrier","product_tag-wafer-handling","desktop-align-left","tablet-align-left","mobile-align-left","first","instock","shipping-taxable","product-type-simple"],"_links":{"self":[{"href":"https:\/\/www.xkh-ceramics.com\/vi\/wp-json\/wp\/v2\/product\/2322","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.xkh-ceramics.com\/vi\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/www.xkh-ceramics.com\/vi\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/vi\/wp-json\/wp\/v2\/comments?post=2322"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/vi\/wp-json\/wp\/v2\/media\/2323"}],"wp:attachment":[{"href":"https:\/\/www.xkh-ceramics.com\/vi\/wp-json\/wp\/v2\/media?parent=2322"}],"wp:term":[{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/vi\/wp-json\/wp\/v2\/product_brand?post=2322"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/vi\/wp-json\/wp\/v2\/product_cat?post=2322"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/vi\/wp-json\/wp\/v2\/product_tag?post=2322"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}