{"id":2201,"date":"2026-05-15T06:27:55","date_gmt":"2026-05-15T06:27:55","guid":{"rendered":"https:\/\/www.xkh-ceramics.com\/?post_type=product&#038;p=2201"},"modified":"2026-05-15T06:32:41","modified_gmt":"2026-05-15T06:32:41","slug":"high-flatness-sic-ceramic-vacuum-chuck-for-hybrid-bonding-applications","status":"publish","type":"product","link":"https:\/\/www.xkh-ceramics.com\/vi\/product\/high-flatness-sic-ceramic-vacuum-chuck-for-hybrid-bonding-applications\/","title":{"rendered":"\u0110\u1ebf h\u00fat ch\u00e2n kh\u00f4ng b\u1eb1ng g\u1ed1m SiC c\u00f3 \u0111\u1ed9 ph\u1eb3ng cao d\u00e0nh cho c\u00e1c \u1ee9ng d\u1ee5ng li\u00ean k\u1ebft lai"},"content":{"rendered":"<p data-start=\"769\" data-end=\"950\"><img fetchpriority=\"high\" decoding=\"async\" class=\"size-medium wp-image-2204 alignright\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Flatness-SiC-Ceramic-Vacuum-Chuck-for-Hybrid-Bonding-Applications-2-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Flatness-SiC-Ceramic-Vacuum-Chuck-for-Hybrid-Bonding-Applications-2-300x300.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Flatness-SiC-Ceramic-Vacuum-Chuck-for-Hybrid-Bonding-Applications-2-150x150.png 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Flatness-SiC-Ceramic-Vacuum-Chuck-for-Hybrid-Bonding-Applications-2-768x768.png 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Flatness-SiC-Ceramic-Vacuum-Chuck-for-Hybrid-Bonding-Applications-2-12x12.png 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Flatness-SiC-Ceramic-Vacuum-Chuck-for-Hybrid-Bonding-Applications-2-600x600.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Flatness-SiC-Ceramic-Vacuum-Chuck-for-Hybrid-Bonding-Applications-2-100x100.png 100w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Flatness-SiC-Ceramic-Vacuum-Chuck-for-Hybrid-Bonding-Applications-2.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>B\u1ed9 k\u1eb9p ch\u00e2n kh\u00f4ng SiC d\u00f9ng cho qu\u00e1 tr\u00ecnh h\u00e0n wafer l\u00e0 m\u1ed9t b\u1ed9 ph\u1eadn h\u1ea5p ph\u1ee5 b\u1eb1ng g\u1ed1m ch\u00ednh x\u00e1c, hi\u1ec7u su\u1ea5t cao, \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf d\u00e0nh cho c\u00e1c \u1ee9ng d\u1ee5ng \u0111\u00f3ng g\u00f3i b\u00e1n d\u1eabn ti\u00ean ti\u1ebfn v\u00e0 h\u00e0n wafer.<\/p>\n<p data-start=\"952\" data-end=\"1201\">\u0110\u01b0\u1ee3c s\u1ea3n xu\u1ea5t t\u1eeb silicon carbide (SiC) CVD c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao ho\u1eb7c b\u1eb1ng c\u00f4ng ngh\u1ec7 SiC nung k\u1ebft ti\u00ean ti\u1ebfn, \u0111\u1ebf k\u1eb9p ch\u00e2n kh\u00f4ng n\u00e0y mang l\u1ea1i \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh nhi\u1ec7t v\u01b0\u1ee3t tr\u1ed9i, \u0111\u1ed9 c\u1ee9ng c\u1ef1c cao v\u00e0 \u0111\u1ed9 ch\u00ednh x\u00e1c b\u1ec1 m\u1eb7t \u1edf m\u1ee9c d\u01b0\u1edbi micromet, \u0111\u00e1p \u1ee9ng y\u00eau c\u1ea7u c\u1ee7a c\u00e1c quy tr\u00ecnh h\u00e0n k\u1ebft quan tr\u1ecdng.<\/p>\n<p data-start=\"1203\" data-end=\"1454\">Nh\u1edd c\u1ea5u tr\u00fac h\u00fat ch\u00e2n kh\u00f4ng ch\u00ednh x\u00e1c v\u00e0 quy tr\u00ecnh x\u1eed l\u00fd b\u1ec1 m\u1eb7t si\u00eau ph\u1eb3ng, \u0111\u1ebf k\u1eb9p gi\u1eef ch\u1eafc ch\u1eafn c\u00e1c t\u1ea5m wafer trong c\u00e1c quy tr\u00ecnh gh\u00e9p wafer v\u1edbi wafer (W2W), gh\u00e9p chip v\u1edbi wafer (C2W), h\u00e0n k\u1ebft h\u1ee3p, \u0111\u00f3ng g\u00f3i MEMS v\u00e0 c\u00e1c c\u00f4ng \u0111o\u1ea1n l\u1eafp r\u00e1p b\u00e1n d\u1eabn ti\u00ean ti\u1ebfn.<\/p>\n<p data-start=\"1456\" data-end=\"1626\">\u0110\u1ed9 gi\u00e3n n\u1edf nhi\u1ec7t th\u1ea5p v\u00e0 \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh k\u00edch th\u01b0\u1edbc v\u01b0\u1ee3t tr\u1ed9i c\u1ee7a v\u1eadt li\u1ec7u n\u00e0y \u0111\u1ea3m b\u1ea3o vi\u1ec7c \u0111\u1ecbnh v\u1ecb t\u1ea5m wafer ch\u00ednh x\u00e1c \u0111\u1ed3ng th\u1eddi gi\u1ea3m thi\u1ec3u bi\u1ebfn d\u1ea1ng do nhi\u1ec7t trong c\u00e1c quy tr\u00ecnh x\u1eed l\u00fd \u1edf nhi\u1ec7t \u0111\u1ed9 cao.<\/p>\n<hr data-start=\"1628\" data-end=\"1631\" \/>\n<h2 data-section-id=\"1ma7m6t\" data-start=\"1633\" data-end=\"1648\">C\u00e1c t\u00ednh n\u0103ng ch\u00ednh<\/h2>\n<h3 data-section-id=\"1ag5n0f\" data-start=\"1650\" data-end=\"1689\">B\u1ec1 m\u1eb7t h\u1ea5p ph\u1ee5 tr\u00ean t\u1ea5m wafer si\u00eau ph\u1eb3ng<\/h3>\n<ul data-start=\"1691\" data-end=\"1822\">\n<li data-section-id=\"1squslp\" data-start=\"1691\" data-end=\"1718\">\u0110\u1ed9 ph\u1eb3ng b\u1ec1 m\u1eb7t \u2264 1 \u03bcm<\/li>\n<li data-section-id=\"82w5jk\" data-start=\"1719\" data-end=\"1741\">\u0110\u1ed9 song song \u2264 1 \u03bcm<\/li>\n<li data-section-id=\"i3icbd\" data-start=\"1742\" data-end=\"1782\">\u0110\u1ea3m b\u1ea3o \u0111\u1ed9 ti\u1ebfp x\u00fac \u0111\u1ed3ng \u0111\u1ec1u cao tr\u00ean t\u1ea5m wafer<\/li>\n<li data-section-id=\"10gawis\" data-start=\"1783\" data-end=\"1822\">N\u00e2ng cao \u0111\u1ed9 ch\u00ednh x\u00e1c c\u1ee7a vi\u1ec7c c\u0103n ch\u1ec9nh m\u1ed1i h\u00e0n<\/li>\n<\/ul>\n<p data-start=\"1824\" data-end=\"1914\">\u0110\u1ed9 ph\u1eb3ng \u0111\u1ea1t ti\u00eau chu\u1ea9n g\u01b0\u01a1ng gi\u00fap gi\u1ea3m thi\u1ec3u \u1ee9ng su\u1ea5t c\u1ee5c b\u1ed9 v\u00e0 h\u1ea1n ch\u1ebf bi\u1ebfn d\u1ea1ng c\u1ee7a t\u1ea5m wafer trong qu\u00e1 tr\u00ecnh d\u00e1n.<\/p>\n<h3 data-section-id=\"1bjp15b\" data-start=\"1921\" data-end=\"1954\"><img decoding=\"async\" class=\"size-medium wp-image-2205 alignright\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Flatness-SiC-Ceramic-Vacuum-Chuck-for-Hybrid-Bonding-Applications-1-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Flatness-SiC-Ceramic-Vacuum-Chuck-for-Hybrid-Bonding-Applications-1-300x300.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Flatness-SiC-Ceramic-Vacuum-Chuck-for-Hybrid-Bonding-Applications-1-150x150.png 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Flatness-SiC-Ceramic-Vacuum-Chuck-for-Hybrid-Bonding-Applications-1-768x768.png 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Flatness-SiC-Ceramic-Vacuum-Chuck-for-Hybrid-Bonding-Applications-1-12x12.png 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Flatness-SiC-Ceramic-Vacuum-Chuck-for-Hybrid-Bonding-Applications-1-600x600.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Flatness-SiC-Ceramic-Vacuum-Chuck-for-Hybrid-Bonding-Applications-1-100x100.png 100w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Flatness-SiC-Ceramic-Vacuum-Chuck-for-Hybrid-Bonding-Applications-1.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>\u0110\u00e1nh b\u00f3ng g\u01b0\u01a1ng si\u00eau m\u1ecbn<\/h3>\n<p data-start=\"1956\" data-end=\"1974\">\u0110\u1ed9 nh\u00e1m b\u1ec1 m\u1eb7t:<\/p>\n<p data-start=\"1976\" data-end=\"1992\">Ra \u2264 0,01 \u03bcm<\/p>\n<p data-start=\"1994\" data-end=\"2003\">L\u1ee3i \u00edch:<\/p>\n<ul data-start=\"2005\" data-end=\"2141\">\n<li data-section-id=\"14nn914\" data-start=\"2005\" data-end=\"2037\">Gi\u1ea3m \u00f4 nhi\u1ec5m do h\u1ea1t b\u1ee5i<\/li>\n<li data-section-id=\"yvq0gc\" data-start=\"2038\" data-end=\"2075\">Hi\u1ec7u su\u1ea5t \u0111\u00f3ng g\u00f3i ch\u00e2n kh\u00f4ng \u0111\u01b0\u1ee3c c\u1ea3i thi\u1ec7n<\/li>\n<li data-section-id=\"wg8ubp\" data-start=\"2076\" data-end=\"2101\">Qu\u00e1 tr\u00ecnh h\u1ea5p ph\u1ee5 \u1ed5n \u0111\u1ecbnh tr\u00ean t\u1ea5m wafer<\/li>\n<li data-section-id=\"1f2d1o7\" data-start=\"2102\" data-end=\"2141\">Kh\u1ea3 n\u0103ng t\u01b0\u01a1ng th\u00edch v\u1edbi ph\u00f2ng s\u1ea1ch b\u00e1n d\u1eabn<\/li>\n<\/ul>\n<h3 data-section-id=\"1il5hua\" data-start=\"2148\" data-end=\"2181\">\u0110\u1ed9 \u1ed5n \u0111\u1ecbnh nhi\u1ec7t v\u01b0\u1ee3t tr\u1ed9i<\/h3>\n<p data-start=\"2183\" data-end=\"2208\">Cacbua silic c\u00f3 c\u00e1c \u0111\u1eb7c t\u00ednh sau:<\/p>\n<ul data-start=\"2210\" data-end=\"2322\">\n<li data-section-id=\"10kjbpo\" data-start=\"2210\" data-end=\"2260\">H\u1ec7 s\u1ed1 gi\u00e3n n\u1edf nhi\u1ec7t th\u1ea5p (~4,5\u00d710\u207b\u2076\/\u00b0C)<\/li>\n<li data-section-id=\"1yezcgi\" data-start=\"2261\" data-end=\"2288\">\u0110\u1ed9 d\u1eabn nhi\u1ec7t cao<\/li>\n<li data-section-id=\"1yzox84\" data-start=\"2289\" data-end=\"2322\">\u0110\u1ed9 \u1ed5n \u0111\u1ecbnh k\u00edch th\u01b0\u1edbc tuy\u1ec7t v\u1eddi<\/li>\n<\/ul>\n<p data-start=\"2324\" data-end=\"2424\">\u0110i\u1ec1u n\u00e0y gi\u00fap m\u00e2m c\u1eb7p duy tr\u00ec v\u1ecb tr\u00ed ch\u00ednh x\u00e1c trong \u0111i\u1ec1u ki\u1ec7n h\u00e0n \u1edf nhi\u1ec7t \u0111\u1ed9 cao.<\/p>\n<h3 data-section-id=\"1pd5p6e\" data-start=\"2431\" data-end=\"2459\">\u0110\u1ed9 c\u1ee9ng c\u01a1 h\u1ecdc cao<\/h3>\n<p data-start=\"2461\" data-end=\"2477\">M\u00f4 \u0111un \u0111\u00e0n h\u1ed3i:<\/p>\n<p data-start=\"2479\" data-end=\"2491\">&gt;400 GPa<\/p>\n<p data-start=\"2493\" data-end=\"2504\">\u01afu \u0111i\u1ec3m:<\/p>\n<ul data-start=\"2506\" data-end=\"2613\">\n<li data-section-id=\"1hg45f6\" data-start=\"2506\" data-end=\"2543\">Ng\u0103n ng\u1eeba bi\u1ebfn d\u1ea1ng khi ch\u1ecbu \u00e1p l\u1ef1c<\/li>\n<li data-section-id=\"1ms13ye\" data-start=\"2544\" data-end=\"2582\">\u0110\u1ea3m b\u1ea3o \u0111\u1ed9 ch\u00ednh x\u00e1c cao trong qu\u00e1 tr\u00ecnh n\u1ea1p t\u1ea5m wafer<\/li>\n<li data-section-id=\"1ao73lw\" data-start=\"2583\" data-end=\"2613\">N\u00e2ng cao t\u00ednh nh\u1ea5t qu\u00e1n c\u1ee7a quy tr\u00ecnh<\/li>\n<\/ul>\n<p data-start=\"2615\" data-end=\"2677\">\u0110\u1ed9 c\u1ee9ng cao l\u00e0 y\u1ebfu t\u1ed1 quan tr\u1ecdng \u0111\u1ed1i v\u1edbi c\u00e1c quy tr\u00ecnh c\u0103n ch\u1ec9nh \u1edf c\u1ea5p \u0111\u1ed9 d\u01b0\u1edbi micromet.<\/p>\n<h3 data-section-id=\"17thkoo\" data-start=\"2684\" data-end=\"2719\">Thi\u1ebft k\u1ebf k\u00eanh ch\u00e2n kh\u00f4ng ch\u00ednh x\u00e1c<\/h3>\n<p data-start=\"2721\" data-end=\"2760\">Gia c\u00f4ng r\u00e3nh ch\u00e2n kh\u00f4ng v\u1edbi \u0111\u1ed9 ch\u00ednh x\u00e1c cao:<\/p>\n<p data-start=\"2762\" data-end=\"2771\">\u0110\u1ed9 ch\u00ednh x\u00e1c:<\/p>\n<p data-start=\"2773\" data-end=\"2782\">\u00b15 \u03bcm<\/p>\n<p data-start=\"2784\" data-end=\"2792\">\u0110\u1ea3m b\u1ea3o:<\/p>\n<ul data-start=\"2794\" data-end=\"2894\">\n<li data-section-id=\"1slsamk\" data-start=\"2794\" data-end=\"2833\">Ph\u00e2n b\u1ed1 l\u1ef1c h\u1ea5p ph\u1ee5 \u0111\u1ed3ng \u0111\u1ec1u<\/li>\n<li data-section-id=\"4ffymg\" data-start=\"2834\" data-end=\"2857\">C\u1ed1 \u0111\u1ecbnh t\u1ea5m wafer \u1ed5n \u0111\u1ecbnh<\/li>\n<li data-section-id=\"1ev6db4\" data-start=\"2858\" data-end=\"2894\">Gi\u1ea3m s\u1ef1 t\u1eadp trung \u1ee9ng su\u1ea5t c\u1ee5c b\u1ed9<\/li>\n<\/ul>\n<hr data-start=\"2896\" data-end=\"2899\" \/>\n<h2 data-section-id=\"1cgu054\" data-start=\"2901\" data-end=\"2928\">Th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/h2>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"2930\" data-end=\"3354\">\n<thead data-start=\"2930\" data-end=\"2954\">\n<tr data-start=\"2930\" data-end=\"2954\">\n<th class=\"last:pe-10\" data-start=\"2930\" data-end=\"2937\" data-col-size=\"sm\">M\u1eb7t h\u00e0ng<\/th>\n<th class=\"last:pe-10\" data-start=\"2937\" data-end=\"2954\" data-col-size=\"sm\">Th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"2965\" data-end=\"3354\">\n<tr data-start=\"2965\" data-end=\"3007\">\n<td data-start=\"2965\" data-end=\"2976\" data-col-size=\"sm\">Ch\u1ea5t li\u1ec7u<\/td>\n<td data-start=\"2976\" data-end=\"3007\" data-col-size=\"sm\">Cacbua silic c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao<\/td>\n<\/tr>\n<tr data-start=\"3008\" data-end=\"3033\">\n<td data-start=\"3008\" data-end=\"3021\" data-col-size=\"sm\">\u0110\u1ed9 tinh khi\u1ebft c\u1ee7a SiC<\/td>\n<td data-col-size=\"sm\" data-start=\"3021\" data-end=\"3033\">\u226599,9991 TP3T<\/td>\n<\/tr>\n<tr data-start=\"3034\" data-end=\"3062\">\n<td data-start=\"3034\" data-end=\"3053\" data-col-size=\"sm\">\u0110\u1ed9 ph\u1eb3ng b\u1ec1 m\u1eb7t<\/td>\n<td data-col-size=\"sm\" data-start=\"3053\" data-end=\"3062\">\u22641 \u03bcm<\/td>\n<\/tr>\n<tr data-start=\"3063\" data-end=\"3098\">\n<td data-start=\"3063\" data-end=\"3083\" data-col-size=\"sm\">\u0110\u1ed9 nh\u00e1m b\u1ec1 m\u1eb7t<\/td>\n<td data-col-size=\"sm\" data-start=\"3083\" data-end=\"3098\">Ra \u2264 0,01 \u03bcm<\/td>\n<\/tr>\n<tr data-start=\"3099\" data-end=\"3129\">\n<td data-start=\"3099\" data-end=\"3117\" data-col-size=\"sm\">M\u00f4 \u0111un \u0111\u00e0n h\u1ed3i<\/td>\n<td data-col-size=\"sm\" data-start=\"3117\" data-end=\"3129\">&gt;400 GPa<\/td>\n<\/tr>\n<tr data-start=\"3130\" data-end=\"3167\">\n<td data-start=\"3130\" data-end=\"3153\" data-col-size=\"sm\">\u0110\u1ed9 d\u1eabn nhi\u1ec7t<\/td>\n<td data-col-size=\"sm\" data-start=\"3153\" data-end=\"3167\">~120 W\/m\u00b7K<\/td>\n<\/tr>\n<tr data-start=\"3168\" data-end=\"3192\">\n<td data-start=\"3168\" data-end=\"3178\" data-col-size=\"sm\">M\u1eadt \u0111\u1ed9<\/td>\n<td data-col-size=\"sm\" data-start=\"3178\" data-end=\"3192\">\u22653,1 g\/cm\u00b3<\/td>\n<\/tr>\n<tr data-start=\"3193\" data-end=\"3215\">\n<td data-start=\"3193\" data-end=\"3199\" data-col-size=\"sm\">CTE<\/td>\n<td data-col-size=\"sm\" data-start=\"3199\" data-end=\"3215\">~4,5 \u00d7 10\u207b\u2076\/\u00b0C<\/td>\n<\/tr>\n<tr data-start=\"3216\" data-end=\"3243\">\n<td data-start=\"3216\" data-end=\"3234\" data-col-size=\"sm\">\u0110\u1ed9 ch\u00ednh x\u00e1c c\u1ee7a r\u00e3nh<\/td>\n<td data-col-size=\"sm\" data-start=\"3234\" data-end=\"3243\">\u00b15 \u03bcm<\/td>\n<\/tr>\n<tr data-start=\"3244\" data-end=\"3280\">\n<td data-start=\"3244\" data-end=\"3268\" data-col-size=\"sm\">Nhi\u1ec7t \u0111\u1ed9 ho\u1ea1t \u0111\u1ed9ng<\/td>\n<td data-col-size=\"sm\" data-start=\"3268\" data-end=\"3280\">RT\u2013400\u00b0C<\/td>\n<\/tr>\n<tr data-start=\"3281\" data-end=\"3320\">\n<td data-start=\"3281\" data-end=\"3301\" data-col-size=\"sm\">X\u1eed l\u00fd b\u1ec1 m\u1eb7t<\/td>\n<td data-start=\"3301\" data-end=\"3320\" data-col-size=\"sm\">\u0110\u00e1nh b\u00f3ng g\u01b0\u01a1ng<\/td>\n<\/tr>\n<tr data-start=\"3321\" data-end=\"3354\">\n<td data-start=\"3321\" data-end=\"3334\" data-col-size=\"sm\">K\u00edch th\u01b0\u1edbc t\u1ea5m wafer<\/td>\n<td data-start=\"3334\" data-end=\"3354\" data-col-size=\"sm\">C\u00f3 th\u1ec3 \u0111\u1eb7t h\u00e0ng theo y\u00eau c\u1ea7u<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"3356\" data-end=\"3359\" \/>\n<h2 data-section-id=\"mu966k\" data-start=\"3361\" data-end=\"3376\">\u1ee8ng d\u1ee5ng<\/h2>\n<h3 data-section-id=\"wjbzos\" data-start=\"3378\" data-end=\"3414\">C\u00f4ng ngh\u1ec7 \u0111\u00f3ng g\u00f3i b\u00e1n d\u1eabn ti\u00ean ti\u1ebfn<\/h3>\n<p data-start=\"3416\" data-end=\"3431\"><img decoding=\"async\" class=\"size-medium wp-image-2207 alignright\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/20250922113244_25590-300x174.png\" alt=\"\" width=\"300\" height=\"174\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/20250922113244_25590-300x174.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/20250922113244_25590-18x10.png 18w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/20250922113244_25590-600x349.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/20250922113244_25590.png 680w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>\u0110\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i trong:<\/p>\n<ul data-start=\"3433\" data-end=\"3600\">\n<li data-section-id=\"123uv47\" data-start=\"3433\" data-end=\"3465\">K\u1ebft d\u00ednh wafer v\u1edbi wafer (W2W)<\/li>\n<li data-section-id=\"c7s92\" data-start=\"3466\" data-end=\"3497\">K\u1ebft d\u00ednh chip v\u1edbi t\u1ea5m wafer (C2W)<\/li>\n<li data-section-id=\"1bqwewz\" data-start=\"3498\" data-end=\"3516\">Li\u00ean k\u1ebft lai<\/li>\n<li data-section-id=\"1nykrz3\" data-start=\"3517\" data-end=\"3554\">Quy tr\u00ecnh n\u00e9n nhi\u1ec7t Cu-Cu<\/li>\n<li data-section-id=\"35sgx6\" data-start=\"3555\" data-end=\"3574\">\u0110\u00f3ng g\u00f3i m\u1ea1ch t\u00edch h\u1ee3p 3D<\/li>\n<li data-section-id=\"at340r\" data-start=\"3575\" data-end=\"3600\">H\u1ec7 th\u1ed1ng trong g\u00f3i (SiP)<\/li>\n<\/ul>\n<h3 data-section-id=\"1a9kliv\" data-start=\"3607\" data-end=\"3632\">\u0110\u00f3ng g\u00f3i thi\u1ebft b\u1ecb MEMS<\/h3>\n<p data-start=\"3634\" data-end=\"3668\">Cung c\u1ea5p gi\u00e1 \u0111\u1ee1 wafer \u1ed5n \u0111\u1ecbnh cho:<\/p>\n<ul data-start=\"3670\" data-end=\"3730\">\n<li data-section-id=\"1sdgegm\" data-start=\"3670\" data-end=\"3688\">D\u00e1n ch\u00e2n kh\u00f4ng<\/li>\n<li data-section-id=\"1qjfpoh\" data-start=\"3689\" data-end=\"3707\">Li\u00ean k\u1ebft an\u1ed1t<\/li>\n<li data-section-id=\"dbgga8\" data-start=\"3708\" data-end=\"3730\">B\u1ecdc k\u00edn c\u1ea3m bi\u1ebfn<\/li>\n<\/ul>\n<p data-start=\"3732\" data-end=\"3822\">C\u1ea5u tr\u00fac c\u1ee9ng c\u00e1p gi\u00fap b\u1ea3o v\u1ec7 c\u00e1c thi\u1ebft b\u1ecb MEMS nh\u1ea1y c\u1ea3m kh\u1ecfi s\u1ef1 bi\u1ebfn d\u1ea1ng do nhi\u1ec7t ho\u1eb7c c\u01a1 h\u1ecdc.<\/p>\n<h3 data-section-id=\"1qt18ux\" data-start=\"3829\" data-end=\"3860\">Thi\u1ebft b\u1ecb b\u00e1n d\u1eabn c\u00f4ng su\u1ea5t<\/h3>\n<p data-start=\"3862\" data-end=\"3875\">Ph\u00f9 h\u1ee3p v\u1edbi:<\/p>\n<ul data-start=\"3877\" data-end=\"3966\">\n<li data-section-id=\"mfu7zo\" data-start=\"3877\" data-end=\"3901\">\u0110\u00f3ng g\u00f3i m\u00f4-\u0111un SiC<\/li>\n<li data-section-id=\"1yt7ywp\" data-start=\"3902\" data-end=\"3931\">B\u1ed9 ph\u1eadn thi\u1ebft b\u1ecb c\u00f4ng su\u1ea5t GaN<\/li>\n<li data-section-id=\"p9njc8\" data-start=\"3932\" data-end=\"3952\">Nung k\u1ebft b\u1ea1c<\/li>\n<li data-section-id=\"18yr1fr\" data-start=\"3953\" data-end=\"3966\">Li\u00ean k\u1ebft TLP<\/li>\n<\/ul>\n<p data-start=\"3968\" data-end=\"4024\">\u0110\u1ed9 \u1ed5n \u0111\u1ecbnh nhi\u1ec7t tuy\u1ec7t v\u1eddi \u0111\u1ea3m b\u1ea3o t\u00ednh nh\u1ea5t qu\u00e1n trong qu\u00e1 tr\u00ecnh s\u1ea3n xu\u1ea5t.<\/p>\n<h3 data-section-id=\"14di4ch\" data-start=\"4031\" data-end=\"4070\">C\u00f4ng ngh\u1ec7 quang t\u1eed v\u00e0 s\u1ea3n xu\u1ea5t Micro-LED<\/h3>\n<p data-start=\"4072\" data-end=\"4081\">H\u1ed7 tr\u1ee3:<\/p>\n<ul data-start=\"4083\" data-end=\"4204\">\n<li data-section-id=\"1gtpe27\" data-start=\"4083\" data-end=\"4113\">H\u1ec7 th\u1ed1ng chuy\u1ec3n giao Micro-LED<\/li>\n<li data-section-id=\"12uwywl\" data-start=\"4114\" data-end=\"4139\">K\u1ebft d\u00ednh th\u1ee7y tinh-silic<\/li>\n<li data-section-id=\"6a950i\" data-start=\"4140\" data-end=\"4170\">T\u00edch h\u1ee3p thi\u1ebft b\u1ecb quang h\u1ecdc<\/li>\n<li data-section-id=\"1gp423q\" data-start=\"4171\" data-end=\"4204\">\u0110\u1ecbnh v\u1ecb ch\u00ednh x\u00e1c ch\u1ea5t n\u1ec1n<\/li>\n<\/ul>\n<hr data-start=\"4206\" data-end=\"4209\" \/>\n<h2 data-section-id=\"dysc5y\" data-start=\"4211\" data-end=\"4232\">\u01afu \u0111i\u1ec3m c\u1ee7a s\u1ea3n ph\u1ea9m<\/h2>\n<ul data-start=\"4234\" data-end=\"4547\">\n<li data-section-id=\"um7u8k\" data-start=\"4234\" data-end=\"4268\">V\u1eadt li\u1ec7u SiC c\u00f3 \u0111\u1ed9 tinh khi\u1ebft c\u1ef1c cao<\/li>\n<li data-section-id=\"t9txjh\" data-start=\"4269\" data-end=\"4295\">\u0110\u1ed9 ph\u1eb3ng b\u1ec1 m\u1eb7t \u22641 \u03bcm<\/li>\n<li data-section-id=\"1qzleq6\" data-start=\"4296\" data-end=\"4334\">B\u1ec1 m\u1eb7t h\u1ea5p ph\u1ee5 \u0111\u01b0\u1ee3c \u0111\u00e1nh b\u00f3ng g\u01b0\u01a1ng<\/li>\n<li data-section-id=\"1bdmggy\" data-start=\"4335\" data-end=\"4366\">\u0110\u1ed9 \u1ed5n \u0111\u1ecbnh nhi\u1ec7t tuy\u1ec7t v\u1eddi<\/li>\n<li data-section-id=\"ivfffh\" data-start=\"4367\" data-end=\"4398\">\u0110\u1ed9 c\u1ee9ng v\u00e0 \u0111\u1ed9 v\u1eefng cao<\/li>\n<li data-section-id=\"ua0354\" data-start=\"4399\" data-end=\"4429\">M\u1ee9c \u0111\u1ed9 \u00f4 nhi\u1ec5m h\u1ea1t th\u1ea5p<\/li>\n<li data-section-id=\"bp2qqs\" data-start=\"4430\" data-end=\"4468\">Gia c\u00f4ng ch\u00ednh x\u00e1c c\u00e1c k\u00eanh ch\u00e2n kh\u00f4ng<\/li>\n<li data-section-id=\"xszix1\" data-start=\"4469\" data-end=\"4517\">Ph\u00f9 h\u1ee3p v\u1edbi c\u00e1c m\u00f4i tr\u01b0\u1eddng \u0111\u00f3ng g\u00f3i ti\u00ean ti\u1ebfn<\/li>\n<li data-section-id=\"y0lwwo\" data-start=\"4518\" data-end=\"4547\">C\u00f3 s\u1eb5n h\u00ecnh h\u1ecdc t\u00f9y ch\u1ec9nh<\/li>\n<\/ul>\n<hr data-start=\"4549\" data-end=\"4552\" \/>\n<h2 data-section-id=\"rnyyeg\" data-start=\"4554\" data-end=\"4578\">C\u00e1c t\u00f9y ch\u1ecdn t\u00f9y ch\u1ec9nh<\/h2>\n<p data-start=\"4580\" data-end=\"4664\">Ch\u00fang t\u00f4i cung c\u1ea5p d\u1ecbch v\u1ee5 t\u00f9y ch\u1ec9nh OEM\/ODM tr\u1ecdn g\u00f3i d\u1ef1a tr\u00ean b\u1ea3n v\u1ebd ho\u1eb7c y\u00eau c\u1ea7u \u1ee9ng d\u1ee5ng:<\/p>\n<ul data-start=\"4666\" data-end=\"4878\">\n<li data-section-id=\"6tm948\" data-start=\"4666\" data-end=\"4690\">\u0110\u01b0\u1eddng k\u00ednh t\u1ea5m wafer t\u00f9y ch\u1ec9nh<\/li>\n<li data-section-id=\"1vfjaam\" data-start=\"4691\" data-end=\"4714\">B\u1ed1 tr\u00ed r\u00e3nh ch\u00e2n kh\u00f4ng<\/li>\n<li data-section-id=\"13s8suu\" data-start=\"4715\" data-end=\"4740\">C\u1ea5u tr\u00fac l\u1ed7 xuy\u00ean<\/li>\n<li data-section-id=\"1wmws68\" data-start=\"4741\" data-end=\"4767\">C\u00e1c ph\u01b0\u01a1ng ph\u00e1p \u0111\u00e1nh b\u00f3ng g\u01b0\u01a1ng<\/li>\n<li data-section-id=\"cox5s3\" data-start=\"4768\" data-end=\"4794\">C\u00e1c v\u00f9ng h\u1ea5p ph\u1ee5 \u0111\u1eb7c bi\u1ec7t<\/li>\n<li data-section-id=\"1bbm77i\" data-start=\"4795\" data-end=\"4825\">V\u1ec7 sinh theo ti\u00eau chu\u1ea9n b\u00e1n d\u1eabn<\/li>\n<li data-section-id=\"14z4bjj\" data-start=\"4826\" data-end=\"4849\">C\u00f4ng ngh\u1ec7 gia c\u00f4ng si\u00eau ph\u1eb3ng<\/li>\n<li data-section-id=\"1udm0ti\" data-start=\"4850\" data-end=\"4878\">C\u00e1c h\u00ecnh d\u1ea1ng g\u1ed1m ph\u1ee9c t\u1ea1p<\/li>\n<\/ul>\n<p data-start=\"4880\" data-end=\"4980\">T\u1ea5t c\u1ea3 c\u00e1c s\u1ea3n ph\u1ea9m \u0111\u1ec1u c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c \u0111\u00f3ng g\u00f3i trong m\u00f4i tr\u01b0\u1eddng ph\u00f2ng s\u1ea1ch lo\u1ea1i 100 d\u00e0nh cho c\u00e1c \u1ee9ng d\u1ee5ng trong l\u0129nh v\u1ef1c b\u00e1n d\u1eabn.<\/p>\n<hr data-start=\"4982\" data-end=\"4985\" \/>\n<h2 data-section-id=\"1hryhf7\" data-start=\"4987\" data-end=\"4993\">C\u00e2u h\u1ecfi th\u01b0\u1eddng g\u1eb7p<\/h2>\n<h3 data-section-id=\"u7k6ec\" data-start=\"4995\" data-end=\"5059\">C\u00e2u h\u1ecfi 1: T\u1ea1i sao l\u1ea1i s\u1eed d\u1ee5ng m\u00e2m k\u1eb9p ch\u00e2n kh\u00f4ng b\u1eb1ng SiC thay v\u00ec nh\u00f4m ho\u1eb7c th\u1ea1ch anh?<\/h3>\n<p data-start=\"5061\" data-end=\"5072\">SiC cung c\u1ea5p:<\/p>\n<ul data-start=\"5074\" data-end=\"5212\">\n<li data-section-id=\"1y67fsp\" data-start=\"5074\" data-end=\"5101\">H\u1ec7 s\u1ed1 gi\u00e3n n\u1edf nhi\u1ec7t th\u1ea5p h\u01a1n<\/li>\n<li data-section-id=\"1slmg84\" data-start=\"5102\" data-end=\"5121\">\u0110\u1ed9 c\u1ee9ng cao h\u01a1n<\/li>\n<li data-section-id=\"trt37b\" data-start=\"5122\" data-end=\"5155\">Kh\u1ea3 n\u0103ng ch\u1ecbu nhi\u1ec7t t\u1ed1t h\u01a1n<\/li>\n<li data-section-id=\"1i25w4v\" data-start=\"5156\" data-end=\"5186\">Gi\u1ea3m nguy c\u01a1 \u00f4 nhi\u1ec5m<\/li>\n<li data-section-id=\"13ilisr\" data-start=\"5187\" data-end=\"5212\">Tu\u1ed5i th\u1ecd ho\u1ea1t \u0111\u1ed9ng d\u00e0i h\u01a1n<\/li>\n<\/ul>\n<h3 data-section-id=\"cwo9dr\" data-start=\"5219\" data-end=\"5265\">C\u00e2u h\u1ecfi 2: C\u00e1c quy tr\u00ecnh h\u00e0n n\u00e0o \u0111\u01b0\u1ee3c h\u1ed7 tr\u1ee3?<\/h3>\n<p data-start=\"5267\" data-end=\"5283\">T\u01b0\u01a1ng th\u00edch v\u1edbi:<\/p>\n<ul data-start=\"5285\" data-end=\"5380\">\n<li data-section-id=\"14kpzzx\" data-start=\"5285\" data-end=\"5300\">K\u1ebft n\u1ed1i W2W<\/li>\n<li data-section-id=\"1uhw6eh\" data-start=\"5301\" data-end=\"5316\">K\u1ebft d\u00ednh C2W<\/li>\n<li data-section-id=\"1bqwewz\" data-start=\"5317\" data-end=\"5335\">Li\u00ean k\u1ebft lai<\/li>\n<li data-section-id=\"8fmkq0\" data-start=\"5336\" data-end=\"5365\">Li\u00ean k\u1ebft nhi\u1ec7t n\u00e9n<\/li>\n<li data-section-id=\"cd7995\" data-start=\"5366\" data-end=\"5380\">K\u1ebft d\u00ednh MEMS<\/li>\n<\/ul>\n<h3 data-section-id=\"sqhas4\" data-start=\"5387\" data-end=\"5437\">C\u00e2u h\u1ecfi 3: C\u00f3 th\u1ec3 s\u1ea3n xu\u1ea5t c\u00e1c r\u00e3nh h\u00fat ch\u00e2n kh\u00f4ng theo y\u00eau c\u1ea7u kh\u00f4ng?<\/h3>\n<p data-start=\"5439\" data-end=\"5530\">\u0110\u00fang v\u1eady. C\u00e1c m\u1eabu r\u00e3nh, b\u1ed1 tr\u00ed l\u1ed7, di\u1ec7n t\u00edch h\u1ea5p ph\u1ee5 v\u00e0 k\u00edch th\u01b0\u1edbc \u0111\u1ec1u c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c t\u00f9y ch\u1ec9nh.<\/p>\n<h3 data-section-id=\"1lhq4ur\" data-start=\"5537\" data-end=\"5587\">C\u00e2u h\u1ecfi 4: C\u00f3 d\u1ecbch v\u1ee5 l\u00e0m s\u1ea1ch theo ti\u00eau chu\u1ea9n b\u00e1n d\u1eabn kh\u00f4ng?<\/h3>\n<p data-start=\"5589\" data-end=\"5665\">\u0110\u00fang v\u1eady. C\u00e1c s\u1ea3n ph\u1ea9m c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c l\u00e0m s\u1ea1ch v\u00e0 \u0111\u00f3ng g\u00f3i trong \u0111i\u1ec1u ki\u1ec7n ph\u00f2ng s\u1ea1ch lo\u1ea1i 100.<\/p>","protected":false},"excerpt":{"rendered":"<p data-start=\"769\" data-end=\"950\">B\u1ed9 k\u1eb9p ch\u00e2n kh\u00f4ng SiC d\u00f9ng cho qu\u00e1 tr\u00ecnh h\u00e0n wafer l\u00e0 m\u1ed9t b\u1ed9 ph\u1eadn h\u1ea5p ph\u1ee5 b\u1eb1ng g\u1ed1m ch\u00ednh x\u00e1c, hi\u1ec7u su\u1ea5t cao, \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf d\u00e0nh cho c\u00e1c \u1ee9ng d\u1ee5ng \u0111\u00f3ng g\u00f3i b\u00e1n d\u1eabn ti\u00ean ti\u1ebfn v\u00e0 h\u00e0n wafer.<\/p>\n<p data-start=\"952\" data-end=\"1201\">\u0110\u01b0\u1ee3c s\u1ea3n xu\u1ea5t t\u1eeb silicon carbide (SiC) CVD c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao ho\u1eb7c b\u1eb1ng c\u00f4ng ngh\u1ec7 SiC nung k\u1ebft ti\u00ean ti\u1ebfn, \u0111\u1ebf k\u1eb9p ch\u00e2n kh\u00f4ng n\u00e0y mang l\u1ea1i \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh nhi\u1ec7t v\u01b0\u1ee3t tr\u1ed9i, \u0111\u1ed9 c\u1ee9ng c\u1ef1c cao v\u00e0 \u0111\u1ed9 ch\u00ednh x\u00e1c b\u1ec1 m\u1eb7t \u1edf m\u1ee9c d\u01b0\u1edbi micromet, \u0111\u00e1p \u1ee9ng y\u00eau c\u1ea7u c\u1ee7a c\u00e1c quy tr\u00ecnh h\u00e0n k\u1ebft quan tr\u1ecdng.<\/p>","protected":false},"featured_media":2206,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center 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