{"id":2116,"date":"2026-05-12T06:50:19","date_gmt":"2026-05-12T06:50:19","guid":{"rendered":"https:\/\/www.xkh-ceramics.com\/?post_type=product&p=2116"},"modified":"2026-05-12T06:51:11","modified_gmt":"2026-05-12T06:51:11","slug":"custom-sic-ceramic-fork-arm-for-wafer-handling-optical-precision-equipment","status":"publish","type":"product","link":"https:\/\/www.xkh-ceramics.com\/vi\/product\/custom-sic-ceramic-fork-arm-for-wafer-handling-optical-precision-equipment\/","title":{"rendered":"C\u00e1nh tay g\u1eafp b\u1eb1ng g\u1ed1m SiC t\u00f9y ch\u1ec9nh d\u00e0nh cho thi\u1ebft b\u1ecb x\u1eed l\u00fd t\u1ea5m wafer v\u00e0 thi\u1ebft b\u1ecb quang h\u1ecdc ch\u00ednh x\u00e1c"},"content":{"rendered":"

\"\"C\u00e1nh tay \u0111\u00f2n g\u1ed1m SiC l\u00e0 m\u1ed9t b\u1ed9 ph\u1eadn k\u1ebft c\u1ea5u c\u00f3 \u0111\u1ed9 ch\u00ednh x\u00e1c cao, \u0111\u01b0\u1ee3c ch\u1ebf t\u1ea1o t\u1eeb v\u1eadt li\u1ec7u g\u1ed1m cacbua silic nung k\u1ebft (SSiC) ti\u00ean ti\u1ebfn. \u0110\u01b0\u1ee3c thi\u1ebft k\u1ebf d\u00e0nh cho c\u00e1c ng\u00e0nh c\u00f4ng nghi\u1ec7p b\u00e1n d\u1eabn, quang h\u1ecdc, h\u00e0ng kh\u00f4ng v\u0169 tr\u1ee5 v\u00e0 t\u1ef1 \u0111\u1ed9ng h\u00f3a, s\u1ea3n ph\u1ea9m n\u00e0y k\u1ebft h\u1ee3p gi\u1eefa \u0111\u1ed9 c\u1ee9ng c\u1ef1c cao, t\u00ednh \u1ed5n \u0111\u1ecbnh nhi\u1ec7t tuy\u1ec7t v\u1eddi, c\u1ea5u tr\u00fac nh\u1eb9 v\u00e0 kh\u1ea3 n\u0103ng ch\u1ed1ng m\u00e0i m\u00f2n v\u01b0\u1ee3t tr\u1ed9i.<\/p>\n

C\u00e1c c\u00e1nh tay k\u1eb9p \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf ri\u00eang n\u00e0y \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i trong c\u00e1c \u1ee9ng d\u1ee5ng x\u1eed l\u00fd t\u1ea5m wafer, \u0111\u1ecbnh v\u1ecb quang h\u1ecdc, t\u1ef1 \u0111\u1ed9ng h\u00f3a robot v\u00e0 c\u00e1c h\u1ec7 th\u1ed1ng h\u1ed7 tr\u1ee3 ch\u00ednh x\u00e1c, n\u01a1i vi\u1ec7c ki\u1ec3m so\u00e1t \u00f4 nhi\u1ec5m, \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh k\u00edch th\u01b0\u1edbc v\u00e0 \u0111\u1ed9 tin c\u1eady l\u00e2u d\u00e0i l\u00e0 nh\u1eefng y\u1ebfu t\u1ed1 then ch\u1ed1t.<\/p>\n

So v\u1edbi c\u00e1c b\u1ed9 ph\u1eadn kim lo\u1ea1i truy\u1ec1n th\u1ed1ng, c\u00e1c thanh n\u0129a b\u1eb1ng g\u1ed1m SiC c\u00f3 h\u1ec7 s\u1ed1 gi\u00e3n n\u1edf nhi\u1ec7t th\u1ea5p h\u01a1n \u0111\u00e1ng k\u1ec3, kh\u1ea3 n\u0103ng ch\u1ed1ng \u0103n m\u00f2n v\u01b0\u1ee3t tr\u1ed9i v\u00e0 t\u1ef7 l\u1ec7 \u0111\u1ed9 c\u1ee9ng tr\u00ean tr\u1ecdng l\u01b0\u1ee3ng \u0111\u1eb7c bi\u1ec7t cao, khi\u1ebfn ch\u00fang tr\u1edf th\u00e0nh l\u1ef1a ch\u1ecdn l\u00fd t\u01b0\u1edfng cho c\u00e1c thi\u1ebft b\u1ecb ch\u00ednh x\u00e1c cao th\u1ebf h\u1ec7 m\u1edbi.<\/p>\n

\n

C\u00e1c t\u00ednh n\u0103ng v\u00e0 \u01b0u \u0111i\u1ec3m ch\u00ednh<\/span><\/h1>\n

1. \u0110\u1ed9 c\u1ee9ng c\u1ef1c cao v\u00e0 kh\u1ea3 n\u0103ng ch\u1ed1ng m\u00e0i m\u00f2n<\/span><\/h3>\n
    \n
  • \u0110\u1ed9 c\u1ee9ng Mohs l\u00ean \u0111\u1ebfn 9,3<\/li>\n
  • Kh\u1ea3 n\u0103ng ch\u1ed1ng m\u00e0i m\u00f2n v\u00e0 sinh ra h\u1ea1t b\u1ee5i v\u01b0\u1ee3t tr\u1ed9i<\/li>\n
  • R\u1ea5t ph\u00f9 h\u1ee3p cho c\u00e1c m\u00f4i tr\u01b0\u1eddng ph\u00f2ng s\u1ea1ch v\u00e0 t\u1ef1 \u0111\u1ed9ng h\u00f3a chu k\u1ef3 cao<\/li>\n<\/ul>\n

    2. \u0110\u1ed9 \u1ed5n \u0111\u1ecbnh nhi\u1ec7t v\u01b0\u1ee3t tr\u1ed9i<\/span><\/h3>\n
      \n
    • H\u1ec7 s\u1ed1 gi\u00e3n n\u1edf nhi\u1ec7t th\u1ea5p: ~4,0 \u00d7 10\u207b\u2076 \/K<\/li>\n
    • Gi\u1eef \u0111\u01b0\u1ee3c \u0111\u1ed9 ch\u00ednh x\u00e1c v\u1ec1 k\u00edch th\u01b0\u1edbc ngay c\u1ea3 khi nhi\u1ec7t \u0111\u1ed9 thay \u0111\u1ed5i<\/li>\n
    • Ph\u00f9 h\u1ee3p v\u1edbi c\u00e1c h\u1ec7 th\u1ed1ng b\u00e1n d\u1eabn v\u00e0 quang h\u1ecdc y\u00eau c\u1ea7u \u0111\u1ed9 ch\u00ednh x\u00e1c cao<\/li>\n<\/ul>\n

      3. \u0110\u1ed9 d\u1eabn nhi\u1ec7t tuy\u1ec7t v\u1eddi<\/span><\/h3>\n
        \n
      • \u0110\u1ed9 d\u1eabn nhi\u1ec7t: 120\u2013180 W\/(m\u00b7K)<\/li>\n
      • Vi\u1ec7c t\u1ea3n nhi\u1ec7t hi\u1ec7u qu\u1ea3 gi\u00fap gi\u1ea3m s\u1ef1 t\u00edch t\u1ee5 \u1ee9ng su\u1ea5t nhi\u1ec7t<\/li>\n
      • N\u00e2ng cao \u0111\u1ed9 tin c\u1eady c\u1ee7a h\u1ec7 th\u1ed1ng trong qu\u00e1 tr\u00ecnh v\u1eadn h\u00e0nh li\u00ean t\u1ee5c<\/li>\n<\/ul>\n

        4. Nh\u1eb9 v\u00e0 c\u00f3 \u0111\u1ed9 c\u1ee9ng cao<\/span><\/h3>\n
          \n
        • M\u1eadt \u0111\u1ed9 kho\u1ea3ng 3,1 g\/cm\u00b3<\/li>\n
        • H\u1ec7 s\u1ed1 \u0111\u00e0n h\u1ed3i Young l\u00ean \u0111\u1ebfn 450 GPa<\/li>\n
        • \u0110\u1ea3m b\u1ea3o \u0111\u1ed9 c\u1ee9ng v\u01b0\u1ee3t tr\u1ed9i \u0111\u1ed3ng th\u1eddi gi\u1ea3m thi\u1ec3u kh\u1ed1i l\u01b0\u1ee3ng chuy\u1ec3n \u0111\u1ed9ng<\/li>\n<\/ul>\n

          5. Kh\u1ea3 n\u0103ng ch\u1ed1ng h\u00f3a ch\u1ea5t v\u00e0 ch\u1ed1ng \u0103n m\u00f2n<\/span><\/h3>\n
            \n
          • Ch\u1ecbu \u0111\u01b0\u1ee3c axit, ki\u1ec1m, dung m\u00f4i v\u00e0 h\u00f3a ch\u1ea5t c\u00f4ng nghi\u1ec7p<\/li>\n
          • T\u01b0\u01a1ng th\u00edch v\u1edbi c\u00e1c m\u00f4i tr\u01b0\u1eddng s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn kh\u1eafc nghi\u1ec7t<\/li>\n<\/ul>\n

            6. B\u1ec1 m\u1eb7t t\u01b0\u01a1ng th\u00edch v\u1edbi ph\u00f2ng s\u1ea1ch<\/span><\/h3>\n
              \n
            • S\u1ea3n sinh \u00edt h\u1ea1t b\u1ee5i<\/li>\n
            • B\u1ec1 m\u1eb7t \u0111\u01b0\u1ee3c \u0111\u00e1nh b\u00f3ng si\u00eau m\u1ecbn (Ra <0,02 \u03bcm) (t\u00f9y ch\u1ecdn)<\/li>\n
            • Ph\u00f9 h\u1ee3p cho c\u00e1c \u1ee9ng d\u1ee5ng ph\u00f2ng s\u1ea1ch c\u1ea5p 10\u20131000<\/li>\n<\/ul>\n
              \n

              Th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/span><\/h1>\n
              \n
              \n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
              T\u00e0i s\u1ea3n<\/th>\nGi\u00e1 tr\u1ecb \u0111i\u1ec3n h\u00ecnh<\/th>\n<\/tr>\n<\/thead>\n
              Ch\u1ea5t li\u1ec7u<\/td>\nCacbua silic nung k\u1ebft (SSiC)<\/td>\n<\/tr>\n
              M\u1eadt \u0111\u1ed9<\/td>\n3,10 \u2013 3,15 g\/cm\u00b3<\/td>\n<\/tr>\n
              \u0110\u1ed9 c\u1ee9ng<\/td>\n\u22652200 HV0,5<\/td>\n<\/tr>\n
              \u0110\u1ed9 b\u1ec1n u\u1ed1n<\/td>\n\u2265400 MPa<\/td>\n<\/tr>\n
              C\u01b0\u1eddng \u0111\u1ed9 n\u00e9n<\/td>\n\u22652000 MPa<\/td>\n<\/tr>\n
              H\u1ec7 s\u1ed1 \u0111\u00e0n h\u1ed3i c\u1ee7a Young<\/td>\n400 \u2013 450 GPa<\/td>\n<\/tr>\n
              \u0110\u1ed9 d\u1eabn nhi\u1ec7t<\/td>\n120 \u2013 180 W\/(m\u00b7K)<\/td>\n<\/tr>\n
              H\u1ec7 s\u1ed1 gi\u00e3n n\u1edf nhi\u1ec7t<\/td>\n~4,0 \u00d7 10\u207b\u2076 \/K<\/td>\n<\/tr>\n
              Nhi\u1ec7t \u0111\u1ed9 ho\u1ea1t \u0111\u1ed9ng t\u1ed1i \u0111a<\/td>\n1.400 \u2013 1.600\u00b0C<\/td>\n<\/tr>\n
              \u0110i\u1ec7n tr\u1edf su\u1ea5t<\/td>\n>10\u00b9\u2074 \u03a9\u00b7cm<\/td>\n<\/tr>\n
              \u0110\u1ed9 nh\u00e1m b\u1ec1 m\u1eb7t<\/td>\n<0,02 \u03bcm Ra (t\u00f9y ch\u1ecdn)<\/td>\n<\/tr>\n
              Kh\u1ea3 n\u0103ng t\u01b0\u01a1ng th\u00edch v\u1edbi ph\u00f2ng s\u1ea1ch<\/td>\nL\u1edbp 10 \u2013 1000<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n
              \n

              C\u00e1c \u1ee9ng d\u1ee5ng \u0111i\u1ec3n h\u00ecnh<\/span><\/h1>\n

              X\u1eed l\u00fd t\u1ea5m b\u00e1n d\u1eabn<\/span><\/h2>\n

              C\u00e1c c\u00e1nh tay h\u00ecnh ch\u1eef Y b\u1eb1ng g\u1ed1m SiC \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i trong c\u00e1c h\u1ec7 th\u1ed1ng t\u1ef1 \u0111\u1ed9ng h\u00f3a b\u00e1n d\u1eabn \u0111\u1ec3:<\/p>\n

                \n
              • Robot chuy\u1ec3n wafer<\/li>\n
              • C\u1ed5ng n\u1ea1p EFEM & FOUP<\/li>\n
              • H\u1ec7 th\u1ed1ng \u0111\u1eb7t linh ki\u1ec7n b\u1eb1ng ch\u00e2n kh\u00f4ng<\/li>\n
              • X\u1eed l\u00fd t\u1ea5m wafer k\u00edch th\u01b0\u1edbc 6\u2033, 8\u2033 v\u00e0 12\u2033<\/li>\n<\/ul>\n

                Kh\u1ea3 n\u0103ng t\u1ea1o ra \u00edt h\u1ea1t b\u1ee5i v\u00e0 t\u00ednh kh\u00e1ng h\u00f3a ch\u1ea5t c\u1ee7a ch\u00fang gi\u00fap duy tr\u00ec \u0111\u1ed9 s\u1ea1ch cao trong quy tr\u00ecnh s\u1ea3n xu\u1ea5t v\u00e0 t\u1ef7 l\u1ec7 thu h\u1ed3i t\u1ea5m wafer.<\/p>\n

                \n

                \"\"Thi\u1ebft b\u1ecb quang h\u1ecdc v\u00e0 quang t\u1eed<\/span><\/h2>\n

                Trong c\u00e1c h\u1ec7 th\u1ed1ng quang h\u1ecdc ch\u00ednh x\u00e1c, c\u00e1c c\u00e1nh tay h\u00ecnh ch\u1eef Y l\u00e0m t\u1eeb SiC mang l\u1ea1i:<\/p>\n

                  \n
                • H\u1ed7 tr\u1ee3 \u1ed5n \u0111\u1ecbnh cho g\u01b0\u01a1ng v\u00e0 th\u1ea5u k\u00ednh<\/li>\n
                • Ki\u1ec3m so\u00e1t bi\u1ebfn d\u1ea1ng do nhi\u1ec7t<\/li>\n
                • C\u1ea5u tr\u00fac nh\u1eb9 v\u00e0 c\u00f3 \u0111\u1ed9 c\u1ee9ng cao<\/li>\n<\/ul>\n

                  C\u00e1c \u1ee9ng d\u1ee5ng \u0111i\u1ec3n h\u00ecnh bao g\u1ed3m:<\/p>\n

                    \n
                  • M\u00e1y \u0111o giao thoa<\/li>\n
                  • H\u1ec7 th\u1ed1ng qu\u00e9t laser<\/li>\n
                  • Thi\u1ebft b\u1ecb c\u0103n ch\u1ec9nh quang h\u1ecdc ch\u00ednh x\u00e1c<\/li>\n
                  • C\u1ea5u tr\u00fac k\u00ednh vi\u1ec5n v\u1ecdng kh\u00f4ng gian<\/li>\n<\/ul>\n
                    \n

                    Robot v\u00e0 T\u1ef1 \u0111\u1ed9ng h\u00f3a<\/span><\/h2>\n

                    \u0110\u01b0\u1ee3c s\u1eed d\u1ee5ng l\u00e0m b\u1ed9 ph\u1eadn \u0111\u1ea7u cu\u1ed1i c\u1ee7a robot v\u00e0 c\u00e1nh tay \u0111\u1ecbnh v\u1ecb ch\u00ednh x\u00e1c trong:<\/p>\n

                      \n
                    • T\u1ef1 \u0111\u1ed9ng h\u00f3a ph\u00f2ng s\u1ea1ch<\/li>\n
                    • H\u1ec7 th\u1ed1ng x\u1eed l\u00fd ch\u00e2n kh\u00f4ng<\/li>\n
                    • Thi\u1ebft b\u1ecb l\u1eafp r\u00e1p ch\u00ednh x\u00e1c t\u1ed1c \u0111\u1ed9 cao<\/li>\n<\/ul>\n

                      C\u00e1c \u01b0u \u0111i\u1ec3m bao g\u1ed3m tu\u1ed5i th\u1ecd cao, m\u1ee9c tho\u00e1t kh\u00ed th\u1ea5p v\u00e0 kh\u1ea3 n\u0103ng c\u00e1ch \u0111i\u1ec7n.<\/p>\n

                      \n

                      H\u00e0ng kh\u00f4ng v\u0169 tr\u1ee5 & Qu\u1ed1c ph\u00f2ng<\/span><\/h2>\n

                      C\u00e1c c\u1ea5u tr\u00fac n\u0129a g\u1ed1m SiC l\u00e0 l\u1ef1a ch\u1ecdn l\u00fd t\u01b0\u1edfng cho c\u00e1c \u1ee9ng d\u1ee5ng h\u00e0ng kh\u00f4ng v\u0169 tr\u1ee5 nh\u1edd v\u00e0o:<\/p>\n

                        \n
                      • T\u1ef7 l\u1ec7 \u0111\u1ed9 c\u1ee9ng tr\u00ean tr\u1ecdng l\u01b0\u1ee3ng cao<\/li>\n
                      • Kh\u1ea3 n\u0103ng ch\u1ecbu s\u1ed1c nhi\u1ec7t<\/li>\n
                      • \u0110\u1ed9 \u1ed5n \u0111\u1ecbnh k\u00edch th\u01b0\u1edbc khi ch\u1ecbu t\u00e1c \u0111\u1ed9ng c\u1ee7a rung \u0111\u1ed9ng v\u00e0 b\u1ee9c x\u1ea1<\/li>\n<\/ul>\n

                        C\u00e1c \u1ee9ng d\u1ee5ng bao g\u1ed3m gi\u00e1 \u0111\u1ee1 quang h\u1ecdc, k\u1ebft c\u1ea5u \u0111\u1ee1 t\u1ea3i tr\u1ecdng v\u00e0 h\u1ec7 th\u1ed1ng chuy\u1ec3n \u0111\u1ed9ng ch\u00ednh x\u00e1c.<\/p>\n

                        \n

                        \"\"Quy tr\u00ecnh s\u1ea3n xu\u1ea5t<\/span><\/h1>\n

                        Qu\u00e1 tr\u00ecnh s\u1ea3n xu\u1ea5t c\u00e1c c\u00e1nh tay h\u00ecnh ch\u1eef Y b\u1eb1ng g\u1ed1m SiC \u0111\u00f2i h\u1ecfi ph\u1ea3i \u00e1p d\u1ee5ng c\u00e1c c\u00f4ng ngh\u1ec7 ch\u1ebf bi\u1ebfn g\u1ed1m ti\u00ean ti\u1ebfn:<\/p>\n

                          \n
                        1. Ch\u1ebf t\u1ea1o b\u1ed9t c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao<\/li>\n
                        2. \u0110\u00fac ch\u00ednh x\u00e1c (\u00e9p \u0111\u1eb3ng \u00e1p \/ \u0111\u00fac \/ \u00e9p kh\u00f4)<\/li>\n
                        3. Nung k\u1ebft \u1edf nhi\u1ec7t \u0111\u1ed9 cao<\/li>\n
                        4. M\u00e0i CNC v\u00e0 gia c\u00f4ng b\u1eb1ng laser<\/li>\n
                        5. \u0110\u00e1nh b\u00f3ng b\u1ec1 m\u1eb7t v\u00e0 ho\u00e0n thi\u1ec7n ch\u00ednh x\u00e1c<\/li>\n
                        6. Ki\u1ec3m tra k\u00edch th\u01b0\u1edbc v\u00e0 \u0111\u00f3ng g\u00f3i trong ph\u00f2ng s\u1ea1ch<\/li>\n<\/ol>\n

                          Quy tr\u00ecnh n\u00e0y \u0111\u1ea3m b\u1ea3o \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh k\u00edch th\u01b0\u1edbc tuy\u1ec7t v\u1eddi v\u00e0 \u0111\u1ed9 tin c\u1eady c\u1ea5u tr\u00fac c\u1ef1c cao.<\/p>\n

                          \n

                          C\u00e1c t\u00f9y ch\u1ecdn t\u00f9y ch\u1ec9nh<\/span><\/h1>\n

                          L\u00e0 m\u1ed9t b\u1ed9 ph\u1eadn g\u1ed1m s\u1ee9 ch\u00ednh x\u00e1c kh\u00f4ng theo ti\u00eau chu\u1ea9n, c\u00e1nh tay h\u00ecnh ch\u1eef Y b\u1eb1ng SiC c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c t\u00f9y ch\u1ec9nh ho\u00e0n to\u00e0n theo b\u1ea3n v\u1ebd v\u00e0 y\u00eau c\u1ea7u \u1ee9ng d\u1ee5ng c\u1ee7a kh\u00e1ch h\u00e0ng.<\/p>\n

                          C\u00e1c t\u00f9y ch\u1ecdn c\u00f3 th\u1ec3 t\u00f9y ch\u1ec9nh bao g\u1ed3m:<\/p>\n

                            \n
                          • K\u00edch th\u01b0\u1edbc t\u1ed5ng th\u1ec3 v\u00e0 \u0111\u1ed9 d\u00e0y<\/li>\n
                          • H\u00ecnh h\u1ecdc khe h\u1edf c\u1ee7a n\u0129a<\/li>\n
                          • L\u1ed7 v\u00e0 khe l\u1eafp \u0111\u1eb7t<\/li>\n
                          • \u0110\u1ed9 nh\u00e1m b\u1ec1 m\u1eb7t v\u00e0 c\u1ea5p \u0111\u1ed9 \u0111\u00e1nh b\u00f3ng<\/li>\n
                          • Kh\u1ea3 n\u0103ng t\u01b0\u01a1ng th\u00edch v\u1edbi k\u00edch th\u01b0\u1edbc t\u1ea5m wafer (6\u2033, 8\u2033, 12\u2033)<\/li>\n
                          • L\u1edbp ph\u1ee7 \u0111\u1eb7c bi\u1ec7t ho\u1eb7c kh\u1eafc laser<\/li>\n<\/ul>\n

                            C\u00e1c d\u1ecbch v\u1ee5 h\u1ed7 tr\u1ee3 k\u1ef9 thu\u1eadt bao g\u1ed3m:<\/p>\n

                              \n
                            • \u0110\u00e1nh gi\u00e1 b\u1ea3n v\u1ebd<\/li>\n
                            • Ph\u00e2n t\u00edch k\u1ebft c\u1ea5u FEM<\/li>\n
                            • Ph\u00e1t tri\u1ec3n m\u1eabu th\u1eed nghi\u1ec7m<\/li>\n
                            • T\u1ed1i \u01b0u h\u00f3a \u1ee9ng d\u1ee5ng<\/li>\n<\/ul>\n
                              \n

                              T\u1ea1i sao n\u00ean ch\u1ecdn thanh n\u0129a g\u1ed1m SiC<\/span><\/h1>\n

                              So v\u1edbi nh\u00f4m, th\u00e9p kh\u00f4ng g\u1ec9 ho\u1eb7c g\u1ed1m s\u1ee9 th\u00f4ng th\u01b0\u1eddng, c\u00e1c thanh n\u0129a b\u1eb1ng g\u1ed1m SiC mang l\u1ea1i nh\u1eefng \u01b0u \u0111i\u1ec3m sau:<\/p>\n

                                \n
                              • \u0110\u1ed9 c\u1ee9ng cao h\u01a1n<\/li>\n
                              • \u0110\u1ed9 bi\u1ebfn d\u1ea1ng nhi\u1ec7t th\u1ea5p h\u01a1n<\/li>\n
                              • Kh\u1ea3 n\u0103ng ch\u1ed1ng m\u00e0i m\u00f2n t\u1ed1t h\u01a1n<\/li>\n
                              • Hi\u1ec7u su\u1ea5t ph\u00f2ng s\u1ea1ch v\u01b0\u1ee3t tr\u1ed9i<\/li>\n
                              • Tu\u1ed5i th\u1ecd ho\u1ea1t \u0111\u1ed9ng d\u00e0i h\u01a1n<\/li>\n<\/ul>\n

                                \u0110\u00e2y l\u00e0 gi\u1ea3i ph\u00e1p l\u00fd t\u01b0\u1edfng cho c\u00e1c ng\u00e0nh c\u00f4ng nghi\u1ec7p b\u00e1n d\u1eabn, quang h\u1ecdc v\u00e0 t\u1ef1 \u0111\u1ed9ng h\u00f3a ch\u00ednh x\u00e1c ti\u00ean ti\u1ebfn, n\u01a1i \u0111\u00f2i h\u1ecfi \u0111\u1ed9 tin c\u1eady v\u00e0 \u1ed5n \u0111\u1ecbnh c\u1ef1c cao.<\/p>\n

                                \n

                                C\u00e2u h\u1ecfi th\u01b0\u1eddng g\u1eb7p<\/span><\/h1>\n

                                C\u00e2u h\u1ecfi 1: T\u1ea1i sao c\u00e1c c\u00e1nh tay g\u1eafp b\u1eb1ng g\u1ed1m SiC l\u1ea1i \u0111\u01b0\u1ee3c \u01b0a chu\u1ed9ng trong c\u00e1c h\u1ec7 th\u1ed1ng x\u1eed l\u00fd t\u1ea5m wafer?<\/span><\/h3>\n

                                C\u00e1c c\u00e1nh tay k\u1eb9p b\u1eb1ng g\u1ed1m SiC t\u1ea1o ra l\u01b0\u1ee3ng h\u1ea1t b\u1ee5i c\u1ef1c th\u1ea5p, c\u00f3 \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh nhi\u1ec7t tuy\u1ec7t v\u1eddi v\u00e0 kh\u1ea3 n\u0103ng ch\u1ed1ng \u0103n m\u00f2n h\u00f3a h\u1ecdc, khi\u1ebfn ch\u00fang tr\u1edf th\u00e0nh l\u1ef1a ch\u1ecdn l\u00fd t\u01b0\u1edfng cho c\u00e1c \u1ee9ng d\u1ee5ng chuy\u1ec3n giao t\u1ea5m b\u00e1n d\u1eabn trong ph\u00f2ng s\u1ea1ch.<\/p>\n

                                \n

                                C\u00e2u h\u1ecfi 2: C\u00f3 th\u1ec3 t\u00f9y ch\u1ec9nh c\u00e1nh tay k\u1eb9p SiC cho c\u00e1c k\u00edch th\u01b0\u1edbc t\u1ea5m wafer kh\u00e1c nhau kh\u00f4ng?<\/span><\/h3>\n

                                \u0110\u00fang v\u1eady. C\u00e1nh tay k\u1eb9p c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c t\u00f9y ch\u1ec9nh \u0111\u1ec3 ph\u00f9 h\u1ee3p v\u1edbi c\u00e1c t\u1ea5m wafer c\u00f3 k\u00edch th\u01b0\u1edbc 6 inch, 8 inch v\u00e0 12 inch, bao g\u1ed3m c\u00e1c th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt v\u1ec1 k\u00edch th\u01b0\u1edbc, thi\u1ebft k\u1ebf khe, c\u1ea5u tr\u00fac l\u1eafp \u0111\u1eb7t v\u00e0 b\u1ec1 m\u1eb7t ho\u00e0n thi\u1ec7n.<\/p>\n

                                \n

                                C\u00e2u h\u1ecfi 3: G\u1ed1m SiC c\u00f3 nh\u1eefng \u01b0u \u0111i\u1ec3m g\u00ec so v\u1edbi c\u00e1c thanh n\u0129a b\u1eb1ng kim lo\u1ea1i?<\/span><\/h3>\n

                                So v\u1edbi c\u00e1c v\u1eadt li\u1ec7u kim lo\u1ea1i, g\u1ed1m SiC c\u00f3 \u0111\u1ed9 c\u1ee9ng cao h\u01a1n, h\u1ec7 s\u1ed1 gi\u00e3n n\u1edf nhi\u1ec7t th\u1ea5p h\u01a1n, kh\u1ea3 n\u0103ng ch\u1ed1ng \u0103n m\u00f2n t\u1ed1t h\u01a1n, tr\u1ecdng l\u01b0\u1ee3ng nh\u1eb9 h\u01a1n v\u00e0 \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh k\u00edch th\u01b0\u1edbc \u0111\u01b0\u1ee3c c\u1ea3i thi\u1ec7n trong c\u00e1c \u0111i\u1ec1u ki\u1ec7n v\u1eadn h\u00e0nh kh\u1eafc nghi\u1ec7t.<\/p>","protected":false},"excerpt":{"rendered":"

                                C\u00e1nh tay \u0111\u00f2n g\u1ed1m SiC l\u00e0 m\u1ed9t b\u1ed9 ph\u1eadn k\u1ebft c\u1ea5u c\u00f3 \u0111\u1ed9 ch\u00ednh x\u00e1c cao, \u0111\u01b0\u1ee3c ch\u1ebf t\u1ea1o t\u1eeb v\u1eadt li\u1ec7u g\u1ed1m cacbua silic nung k\u1ebft (SSiC) ti\u00ean ti\u1ebfn. \u0110\u01b0\u1ee3c thi\u1ebft k\u1ebf d\u00e0nh cho c\u00e1c ng\u00e0nh c\u00f4ng nghi\u1ec7p b\u00e1n d\u1eabn, quang h\u1ecdc, h\u00e0ng kh\u00f4ng v\u0169 tr\u1ee5 v\u00e0 t\u1ef1 \u0111\u1ed9ng h\u00f3a, s\u1ea3n ph\u1ea9m n\u00e0y k\u1ebft h\u1ee3p gi\u1eefa \u0111\u1ed9 c\u1ee9ng c\u1ef1c cao, t\u00ednh \u1ed5n \u0111\u1ecbnh nhi\u1ec7t tuy\u1ec7t v\u1eddi, c\u1ea5u tr\u00fac nh\u1eb9 v\u00e0 kh\u1ea3 n\u0103ng ch\u1ed1ng m\u00e0i m\u00f2n v\u01b0\u1ee3t tr\u1ed9i.<\/p>","protected":false},"featured_media":2117,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center 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