{"id":2110,"date":"2026-05-12T06:26:35","date_gmt":"2026-05-12T06:26:35","guid":{"rendered":"https:\/\/www.xkh-ceramics.com\/?post_type=product&#038;p=2110"},"modified":"2026-05-12T06:28:57","modified_gmt":"2026-05-12T06:28:57","slug":"full-cvd-sic-wafer-carrier-tray-plate-for-semiconductor-mocvd-etching-equipment","status":"publish","type":"product","link":"https:\/\/www.xkh-ceramics.com\/vi\/product\/full-cvd-sic-wafer-carrier-tray-plate-for-semiconductor-mocvd-etching-equipment\/","title":{"rendered":"T\u1ea5m \u0111\u1ebf \u0111\u1ef1ng t\u1ea5m wafer SiC CVD nguy\u00ean t\u1ea5m d\u00e0nh cho thi\u1ebft b\u1ecb MOCVD v\u00e0 \u0103n m\u00f2n b\u00e1n d\u1eabn"},"content":{"rendered":"<p data-start=\"199\" data-end=\"387\"><img fetchpriority=\"high\" decoding=\"async\" class=\"size-medium wp-image-2111 alignright\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-3-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-3-300x300.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-3-150x150.png 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-3-768x768.png 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-3-12x12.png 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-3-600x600.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-3-100x100.png 100w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-3.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>T\u1ea5m khay g\u1ed1m SiC l\u00e0 m\u1ed9t gi\u00e1 \u0111\u1ee1 wafer hi\u1ec7u su\u1ea5t cao \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf d\u00e0nh cho c\u00e1c quy tr\u00ecnh b\u00e1n d\u1eabn ti\u00ean ti\u1ebfn nh\u01b0 MOCVD, epitaxy v\u00e0 kh\u1eafc ICP. S\u1ea3n ph\u1ea9m c\u00f3 hai c\u1ea5u tr\u00fac:<\/p>\n<ul data-start=\"389\" data-end=\"486\">\n<li data-section-id=\"1a2m83y\" data-start=\"389\" data-end=\"434\">Ch\u1ea5t n\u1ec1n than ch\u00ec c\u00f3 l\u1edbp ph\u1ee7 SiC b\u1eb1ng ph\u01b0\u01a1ng ph\u00e1p CVD<\/li>\n<li data-section-id=\"h6gq41\" data-start=\"435\" data-end=\"486\">Khay SiC CVD nguy\u00ean kh\u1ed1i c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao (\u226599,991%)<\/li>\n<\/ul>\n<p data-start=\"488\" data-end=\"728\">So v\u1edbi c\u00e1c ch\u1ea5t mang than ch\u00ec truy\u1ec1n th\u1ed1ng, s\u1ea3n ph\u1ea9m n\u00e0y mang l\u1ea1i \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh nhi\u1ec7t, kh\u1ea3 n\u0103ng ch\u1ed1ng \u0103n m\u00f2n v\u00e0 tu\u1ed5i th\u1ecd cao h\u01a1n \u0111\u00e1ng k\u1ec3, khi\u1ebfn n\u00f3 tr\u1edf th\u00e0nh l\u1ef1a ch\u1ecdn l\u00fd t\u01b0\u1edfng cho c\u00e1c m\u00f4i tr\u01b0\u1eddng s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn \u0111\u00f2i h\u1ecfi nhi\u1ec7t \u0111\u1ed9 cao.<\/p>\n<p data-start=\"730\" data-end=\"847\">N\u00f3 \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i trong s\u1ea3n xu\u1ea5t \u0111\u00e8n LED GaN, ch\u1ebf t\u1ea1o ch\u1ea5t b\u00e1n d\u1eabn c\u00f4ng su\u1ea5t v\u00e0 c\u00e1c h\u1ec7 th\u1ed1ng gia c\u00f4ng t\u1ea5m wafer ch\u00ednh x\u00e1c.<\/p>\n<hr data-start=\"849\" data-end=\"852\" \/>\n<h1 data-section-id=\"1j1pcx4\" data-start=\"854\" data-end=\"885\"><span role=\"text\">C\u00e1c t\u00ednh n\u0103ng v\u00e0 \u01b0u \u0111i\u1ec3m ch\u00ednh<\/span><\/h1>\n<h3 data-section-id=\"1alapmz\" data-start=\"887\" data-end=\"931\"><span role=\"text\">1. Kh\u1ea3 n\u0103ng ch\u1ecbu nhi\u1ec7t \u0111\u1ed9 c\u1ef1c cao<\/span><\/h3>\n<ul data-start=\"932\" data-end=\"1084\">\n<li data-section-id=\"n8q3t9\" data-start=\"932\" data-end=\"970\">Ho\u1ea1t \u0111\u1ed9ng \u1ed5n \u0111\u1ecbnh \u1edf nhi\u1ec7t \u0111\u1ed9 1100\u20131200\u00b0C+<\/li>\n<li data-section-id=\"zbjl5k\" data-start=\"971\" data-end=\"1033\">Ph\u00f9 h\u1ee3p v\u1edbi c\u00e1c m\u00f4i tr\u01b0\u1eddng MOCVD v\u00e0 ph\u00e1t tri\u1ec3n l\u1edbp ph\u1ee7 epitaxial kh\u1eafc nghi\u1ec7t<\/li>\n<li data-section-id=\"1p7r2f0\" data-start=\"1034\" data-end=\"1084\">Kh\u00f4ng b\u1ecb bi\u1ebfn d\u1ea1ng khi ch\u1ecbu t\u00e1c \u0111\u1ed9ng c\u1ee7a chu k\u1ef3 nhi\u1ec7t k\u00e9o d\u00e0i<\/li>\n<\/ul>\n<h3 data-section-id=\"1xbme7x\" data-start=\"1086\" data-end=\"1132\"><span role=\"text\">2. L\u1edbp ph\u1ee7 SiC CVD c\u00f3 kh\u1ea3 n\u0103ng b\u1ea3o v\u1ec7 v\u01b0\u1ee3t tr\u1ed9i<\/span><\/h3>\n<ul data-start=\"1133\" data-end=\"1295\">\n<li data-section-id=\"1yg8xxq\" data-start=\"1133\" data-end=\"1163\">\u0110\u1ed9 tinh khi\u1ebft l\u00ean \u0111\u1ebfn 99,9991% SiC<\/li>\n<li data-section-id=\"fof224\" data-start=\"1164\" data-end=\"1228\">L\u1edbp ph\u1ee7 d\u00e0y \u0111\u1eb7c ng\u0103n ch\u1eb7n s\u1ef1 x\u00e2m nh\u1eadp c\u1ee7a kh\u00ed v\u00e0 s\u1ef1 \u0103n m\u00f2n c\u1ee7a v\u1eadt li\u1ec7u n\u1ec1n<\/li>\n<li data-section-id=\"i9f016\" data-start=\"1229\" data-end=\"1295\">Lo\u1ea1i b\u1ecf s\u1ef1 nhi\u1ec5m b\u1ea9n do c\u00e1c h\u1ea1t than ch\u00ec trong qu\u00e1 tr\u00ecnh gia c\u00f4ng t\u1ea5m wafer<\/li>\n<\/ul>\n<h3 data-section-id=\"r23teu\" data-start=\"1297\" data-end=\"1349\"><span role=\"text\">3. Kh\u1ea3 n\u0103ng ch\u1ed1ng \u0103n m\u00f2n v\u00e0 h\u00f3a ch\u1ea5t tuy\u1ec7t v\u1eddi<\/span><\/h3>\n<ul data-start=\"1350\" data-end=\"1472\">\n<li data-section-id=\"jgfj1d\" data-start=\"1350\" data-end=\"1412\">Ch\u1ecbu \u0111\u01b0\u1ee3c HF, H\u2082SO\u2084, HCl v\u00e0 c\u00e1c lo\u1ea1i kh\u00ed qu\u00e1 tr\u00ecnh ph\u1ea3n \u1ee9ng<\/li>\n<li data-section-id=\"1yalk8d\" data-start=\"1413\" data-end=\"1472\">R\u1ea5t ph\u00f9 h\u1ee3p cho c\u00e1c m\u00f4i tr\u01b0\u1eddng \u0103n m\u00f2n b\u00e1n d\u1eabn kh\u1eafc nghi\u1ec7t<\/li>\n<\/ul>\n<h3 data-section-id=\"ughzy4\" data-start=\"1474\" data-end=\"1528\"><span role=\"text\">4. \u0110\u1ed9 d\u1eabn nhi\u1ec7t cao &amp; l\u00e0m n\u00f3ng \u0111\u1ed3ng \u0111\u1ec1u<\/span><\/h3>\n<ul data-start=\"1529\" data-end=\"1642\">\n<li data-section-id=\"10oy89q\" data-start=\"1529\" data-end=\"1594\">\u0110\u1ea3m b\u1ea3o nhi\u1ec7t \u0111\u1ed9 \u0111\u01b0\u1ee3c ph\u00e2n b\u1ed1 \u0111\u1ed3ng \u0111\u1ec1u tr\u00ean b\u1ec1 m\u1eb7t t\u1ea5m wafer<\/li>\n<li data-section-id=\"1rsv4ef\" data-start=\"1595\" data-end=\"1642\">N\u00e2ng cao ch\u1ea5t l\u01b0\u1ee3ng m\u00e0ng v\u00e0 \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh c\u1ee7a quy tr\u00ecnh<\/li>\n<\/ul>\n<h3 data-section-id=\"rhgagc\" data-start=\"1644\" data-end=\"1672\"><span role=\"text\">5. Tu\u1ed5i th\u1ecd cao<\/span><\/h3>\n<ul data-start=\"1673\" data-end=\"1796\">\n<li data-section-id=\"1wgev4f\" data-start=\"1673\" data-end=\"1743\">Tu\u1ed5i th\u1ecd cao g\u1ea5p 4 l\u1ea7n so v\u1edbi c\u00e1c khay l\u00e0m t\u1eeb than ch\u00ec truy\u1ec1n th\u1ed1ng<\/li>\n<li data-section-id=\"tsrdbt\" data-start=\"1744\" data-end=\"1796\">Gi\u1ea3m th\u1eddi gian ng\u1eebng ho\u1ea1t \u0111\u1ed9ng v\u00e0 t\u1ea7n su\u1ea5t thay th\u1ebf<\/li>\n<\/ul>\n<p><img decoding=\"async\" class=\"alignnone size-medium wp-image-2114\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-300x300.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-150x150.png 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-768x768.png 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-12x12.png 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-600x600.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-100x100.png 100w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/> <img decoding=\"async\" class=\"alignnone size-medium wp-image-2113\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-1-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-1-300x300.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-1-150x150.png 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-1-768x768.png 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-1-12x12.png 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-1-600x600.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-1-100x100.png 100w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-1.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/> <img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-medium wp-image-2112\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-2-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-2-300x300.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-2-150x150.png 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-2-768x768.png 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-2-12x12.png 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-2-600x600.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-2-100x100.png 100w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-2.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/p>\n<hr data-start=\"1798\" data-end=\"1801\" \/>\n<h1 data-section-id=\"10k15yz\" data-start=\"1803\" data-end=\"1833\"><span role=\"text\">Th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/span><\/h1>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"1835\" data-end=\"2207\">\n<thead data-start=\"1835\" data-end=\"1856\">\n<tr data-start=\"1835\" data-end=\"1856\">\n<th class=\"last:pe-10\" data-start=\"1835\" data-end=\"1847\" data-col-size=\"sm\">Tham s\u1ed1<\/th>\n<th class=\"last:pe-10\" data-start=\"1847\" data-end=\"1856\" data-col-size=\"md\">Gi\u00e1 tr\u1ecb<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"1877\" data-end=\"2207\">\n<tr data-start=\"1877\" data-end=\"1938\">\n<td data-start=\"1877\" data-end=\"1893\" data-col-size=\"sm\">Lo\u1ea1i v\u1eadt li\u1ec7u<\/td>\n<td data-start=\"1893\" data-end=\"1938\" data-col-size=\"md\">L\u1edbp ph\u1ee7 graphite + CVD SiC \/ L\u1edbp ph\u1ee7 CVD SiC to\u00e0n ph\u1ea7n<\/td>\n<\/tr>\n<tr data-start=\"1939\" data-end=\"1993\">\n<td data-start=\"1939\" data-end=\"1952\" data-col-size=\"sm\">\u0110\u1ed9 tinh khi\u1ebft c\u1ee7a SiC<\/td>\n<td data-start=\"1952\" data-end=\"1993\" data-col-size=\"md\">\u226599,91% TP3T (c\u00f3 l\u1edbp ph\u1ee7), \u226599,991% TP3T (kh\u1ed1i li\u1ec1n kh\u1ed1i)<\/td>\n<\/tr>\n<tr data-start=\"1994\" data-end=\"2032\">\n<td data-start=\"1994\" data-end=\"2011\" data-col-size=\"sm\">Ph\u1ea1m vi \u0111\u01b0\u1eddng k\u00ednh<\/td>\n<td data-start=\"2011\" data-end=\"2032\" data-col-size=\"md\">\u03a6380 mm \u2013 \u03a6600 mm<\/td>\n<\/tr>\n<tr data-start=\"2033\" data-end=\"2072\">\n<td data-start=\"2033\" data-end=\"2057\" data-col-size=\"sm\">Nhi\u1ec7t \u0111\u1ed9 ho\u1ea1t \u0111\u1ed9ng<\/td>\n<td data-col-size=\"md\" data-start=\"2057\" data-end=\"2072\">1.100\u20131.200\u00b0C<\/td>\n<\/tr>\n<tr data-start=\"2073\" data-end=\"2104\">\n<td data-start=\"2073\" data-end=\"2096\" data-col-size=\"sm\">\u0110\u1ed9 d\u1eabn nhi\u1ec7t<\/td>\n<td data-col-size=\"md\" data-start=\"2096\" data-end=\"2104\">Cao<\/td>\n<\/tr>\n<tr data-start=\"2105\" data-end=\"2163\">\n<td data-start=\"2105\" data-end=\"2128\" data-col-size=\"sm\">Kh\u1ea3 n\u0103ng ch\u1ed1ng \u0103n m\u00f2n<\/td>\n<td data-col-size=\"md\" data-start=\"2128\" data-end=\"2163\">Tuy\u1ec7t v\u1eddi (ch\u1ecbu \u0111\u01b0\u1ee3c HF, H\u2082SO\u2084)<\/td>\n<\/tr>\n<tr data-start=\"2164\" data-end=\"2207\">\n<td data-start=\"2164\" data-end=\"2179\" data-col-size=\"sm\">Tu\u1ed5i th\u1ecd<\/td>\n<td data-start=\"2179\" data-end=\"2207\" data-col-size=\"md\">~4 khay l\u00e0m t\u1eeb than ch\u00ec<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"2209\" data-end=\"2212\" \/>\n<h1 data-section-id=\"18cvqw\" data-start=\"2214\" data-end=\"2237\"><span role=\"text\">L\u0129nh v\u1ef1c \u1ee9ng d\u1ee5ng<\/span><\/h1>\n<h3 data-section-id=\"bm5nu5\" data-start=\"2239\" data-end=\"2274\"><span role=\"text\">S\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn<\/span><\/h3>\n<ul data-start=\"2275\" data-end=\"2438\">\n<li data-section-id=\"pooj76\" data-start=\"2275\" data-end=\"2326\">MOCVD (Ph\u01b0\u01a1ng ph\u00e1p l\u1eafng \u0111\u1ecdng h\u00f3a h\u1ecdc t\u1eeb pha h\u01a1i kim lo\u1ea1i h\u1eefu c\u01a1)<\/li>\n<li data-section-id=\"c8v0nb\" data-start=\"2327\" data-end=\"2370\">Ph\u01b0\u01a1ng ph\u00e1p ph\u00e1t tri\u1ec3n t\u1ea5m wafer theo ph\u01b0\u01a1ng ph\u00e1p epitaxy (GaN, SiC, v.v.)<\/li>\n<li data-section-id=\"15uw81h\" data-start=\"2371\" data-end=\"2396\">C\u00e1c quy tr\u00ecnh kh\u1eafc ICP<\/li>\n<li data-section-id=\"1xtyszn\" data-start=\"2397\" data-end=\"2438\">H\u1ec7 th\u1ed1ng x\u1eed l\u00fd t\u1ea5m wafer c\u00f3 \u0111\u1ed9 ch\u00ednh x\u00e1c cao<\/li>\n<\/ul>\n<h3 data-section-id=\"yf7wep\" data-start=\"2440\" data-end=\"2460\"><span role=\"text\">Ng\u00e0nh c\u00f4ng nghi\u1ec7p LED<\/span><\/h3>\n<ul data-start=\"2461\" data-end=\"2545\">\n<li data-section-id=\"b1ebdf\" data-start=\"2461\" data-end=\"2508\">S\u1ea3n xu\u1ea5t \u0111\u00e8n LED m\u00e0u xanh d\u01b0\u01a1ng v\u00e0 tr\u1eafng c\u00f3 \u0111\u1ed9 s\u00e1ng cao<\/li>\n<li data-section-id=\"9w14a9\" data-start=\"2509\" data-end=\"2545\">C\u00e1c thi\u1ebft b\u1ecb quang \u0111i\u1ec7n t\u1eed d\u1ef1a tr\u00ean GaN<\/li>\n<\/ul>\n<h3 data-section-id=\"d5g3k9\" data-start=\"2547\" data-end=\"2575\"><span role=\"text\">\u0110i\u1ec7n t\u1eed n\u00e2ng cao<\/span><\/h3>\n<ul data-start=\"2576\" data-end=\"2670\">\n<li data-section-id=\"14t88vj\" data-start=\"2576\" data-end=\"2600\">B\u00e1n d\u1eabn c\u00f4ng su\u1ea5t<\/li>\n<li data-section-id=\"8rvytg\" data-start=\"2601\" data-end=\"2627\">Thi\u1ebft b\u1ecb t\u1ea7n s\u1ed1 cao<\/li>\n<li data-section-id=\"4tdco8\" data-start=\"2628\" data-end=\"2670\">H\u1ec7 th\u1ed1ng l\u1eafng \u0111\u1ecdng m\u00e0ng m\u1ecfng ch\u00ednh x\u00e1c<\/li>\n<\/ul>\n<hr data-start=\"2672\" data-end=\"2675\" \/>\n<h1 data-section-id=\"1umg5ep\" data-start=\"2677\" data-end=\"2735\"><span role=\"text\">\u01afu \u0111i\u1ec3m v\u1ec1 hi\u1ec7u su\u1ea5t so v\u1edbi khay than ch\u00ec truy\u1ec1n th\u1ed1ng<\/span><\/h1>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"2737\" data-end=\"3069\">\n<thead data-start=\"2737\" data-end=\"2783\">\n<tr data-start=\"2737\" data-end=\"2783\">\n<th class=\"last:pe-10\" data-start=\"2737\" data-end=\"2744\" data-col-size=\"sm\">M\u1eb7t h\u00e0ng<\/th>\n<th class=\"last:pe-10\" data-start=\"2744\" data-end=\"2760\" data-col-size=\"sm\">Khay than ch\u00ec<\/th>\n<th class=\"last:pe-10\" data-start=\"2760\" data-end=\"2783\" data-col-size=\"sm\">Khay ph\u1ee7 SiC b\u1eb1ng ph\u01b0\u01a1ng ph\u00e1p CVD<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"2831\" data-end=\"3069\">\n<tr data-start=\"2831\" data-end=\"2878\">\n<td data-start=\"2831\" data-end=\"2856\" data-col-size=\"sm\">Kh\u1ea3 n\u0103ng ch\u1ecbu nhi\u1ec7t<\/td>\n<td data-col-size=\"sm\" data-start=\"2856\" data-end=\"2865\">Trung b\u00ecnh<\/td>\n<td data-col-size=\"sm\" data-start=\"2865\" data-end=\"2878\">R\u1ea5t cao<\/td>\n<\/tr>\n<tr data-start=\"2879\" data-end=\"2922\">\n<td data-start=\"2879\" data-end=\"2902\" data-col-size=\"sm\">Kh\u1ea3 n\u0103ng ch\u1ed1ng \u0103n m\u00f2n<\/td>\n<td data-col-size=\"sm\" data-start=\"2902\" data-end=\"2909\">Ngh\u00e8o<\/td>\n<td data-col-size=\"sm\" data-start=\"2909\" data-end=\"2922\">Tuy\u1ec7t v\u1eddi<\/td>\n<\/tr>\n<tr data-start=\"2923\" data-end=\"2971\">\n<td data-start=\"2923\" data-end=\"2948\" data-col-size=\"sm\">\u00d4 nhi\u1ec5m do h\u1ea1t<\/td>\n<td data-col-size=\"sm\" data-start=\"2948\" data-end=\"2960\">R\u1ee7i ro cao<\/td>\n<td data-col-size=\"sm\" data-start=\"2960\" data-end=\"2971\">T\u1ed1i gi\u1ea3n<\/td>\n<\/tr>\n<tr data-start=\"2972\" data-end=\"3010\">\n<td data-start=\"2972\" data-end=\"2987\" data-col-size=\"sm\">Tu\u1ed5i th\u1ecd<\/td>\n<td data-col-size=\"sm\" data-start=\"2987\" data-end=\"2995\">Ng\u1eafn<\/td>\n<td data-col-size=\"sm\" data-start=\"2995\" data-end=\"3010\">d\u00e0i g\u1ea5p 3\u20134 l\u1ea7n<\/td>\n<\/tr>\n<tr data-start=\"3011\" data-end=\"3069\">\n<td data-start=\"3011\" data-end=\"3031\" data-col-size=\"sm\">\u0110\u1ed9 \u1ed5n \u0111\u1ecbnh b\u1ec1 m\u1eb7t<\/td>\n<td data-col-size=\"sm\" data-start=\"3031\" data-end=\"3052\">S\u1ebd b\u1ecb ph\u00e2n h\u1ee7y theo th\u1eddi gian<\/td>\n<td data-col-size=\"sm\" data-start=\"3052\" data-end=\"3069\">R\u1ea5t \u1ed5n \u0111\u1ecbnh<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"3071\" data-end=\"3074\" \/>\n<h1 data-section-id=\"7pt5v4\" data-start=\"3076\" data-end=\"3102\"><span role=\"text\">\u0110\u00f3ng g\u00f3i &amp; X\u1eed l\u00fd<\/span><\/h1>\n<ul data-start=\"3103\" data-end=\"3313\">\n<li data-section-id=\"a3kyzw\" data-start=\"3103\" data-end=\"3142\">C\u00f3 s\u1eb5n bao b\u00ec \u0111\u1ea1t ti\u00eau chu\u1ea9n ph\u00f2ng s\u1ea1ch<\/li>\n<li data-section-id=\"3ss3f2\" data-start=\"3143\" data-end=\"3193\">Th\u00f9ng g\u1ed7 ch\u1ed1ng va \u0111\u1eadp ho\u1eb7c \u0111\u00f3ng g\u00f3i ch\u00e2n kh\u00f4ng<\/li>\n<li data-section-id=\"iuz9t\" data-start=\"3194\" data-end=\"3253\">\u0110\u01b0\u1ee3c thi\u1ebft k\u1ebf \u0111\u1ec3 v\u1eadn chuy\u1ec3n ch\u1ea5t b\u00e1n d\u1eabn m\u00e0 kh\u00f4ng b\u1ecb nhi\u1ec5m b\u1ea9n<\/li>\n<li data-section-id=\"11l6t4c\" data-start=\"3254\" data-end=\"3313\">H\u1ed7 tr\u1ee3 c\u00e1c k\u00edch th\u01b0\u1edbc t\u00f9y ch\u1ec9nh (\u03a6380\u2013\u03a6600 mm ho\u1eb7c thi\u1ebft k\u1ebf theo y\u00eau c\u1ea7u)<\/li>\n<\/ul>\n<hr data-start=\"3315\" data-end=\"3318\" \/>\n<h1 data-section-id=\"62o8y8\" data-start=\"3320\" data-end=\"3349\"><span role=\"text\">T\u1ea1i sao n\u00ean ch\u1ecdn s\u1ea3n ph\u1ea9m n\u00e0y?<\/span><\/h1>\n<p data-start=\"3350\" data-end=\"3688\">Khay \u0111\u1ef1ng t\u1ea5m wafer SiC n\u00e0y \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf d\u00e0nh cho ng\u00e0nh s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn th\u1ebf h\u1ec7 m\u1edbi, n\u01a1i \u0111\u1ed9 tinh khi\u1ebft, t\u00ednh \u1ed5n \u0111\u1ecbnh nhi\u1ec7t v\u00e0 ki\u1ec3m so\u00e1t \u00f4 nhi\u1ec5m l\u00e0 nh\u1eefng y\u1ebfu t\u1ed1 then ch\u1ed1t. B\u1eb1ng c\u00e1ch thay th\u1ebf c\u00e1c khay \u0111\u1ef1ng truy\u1ec1n th\u1ed1ng l\u00e0m t\u1eeb than ch\u00ec, s\u1ea3n ph\u1ea9m n\u00e0y gi\u00fap n\u00e2ng cao \u0111\u00e1ng k\u1ec3 hi\u1ec7u su\u1ea5t s\u1ea3n xu\u1ea5t, gi\u1ea3m chi ph\u00ed b\u1ea3o tr\u00ec v\u00e0 \u0111\u1ea3m b\u1ea3o hi\u1ec7u su\u1ea5t quy tr\u00ecnh \u1ed5n \u0111\u1ecbnh trong d\u00e0i h\u1ea1n.<\/p>\n<hr data-start=\"3690\" data-end=\"3693\" \/>\n<h1 data-section-id=\"1iusff4\" data-start=\"3695\" data-end=\"3704\"><span role=\"text\">C\u00e2u h\u1ecfi th\u01b0\u1eddng g\u1eb7p<\/span><\/h1>\n<h3 data-section-id=\"1m9x0lv\" data-start=\"3706\" data-end=\"3791\"><span role=\"text\">C\u00e2u h\u1ecfi 1: \u01afu \u0111i\u1ec3m ch\u00ednh c\u1ee7a l\u1edbp ph\u1ee7 CVD SiC so v\u1edbi khay than ch\u00ec l\u00e0 g\u00ec?<\/span><\/h3>\n<p data-start=\"3792\" data-end=\"3978\">L\u1edbp ph\u1ee7 SiC b\u1eb1ng ph\u01b0\u01a1ng ph\u00e1p CVD t\u1ea1o ra m\u1ed9t l\u1edbp b\u1ea3o v\u1ec7 d\u00e0y \u0111\u1eb7c v\u00e0 si\u00eau tinh khi\u1ebft, gi\u00fap ng\u0103n ch\u1eb7n s\u1ef1 x\u00e2m nh\u1eadp c\u1ee7a kh\u00ed v\u00e0 s\u1ef1 bong tr\u00f3c c\u1ee7a c\u00e1c h\u1ea1t than ch\u00ec, t\u1eeb \u0111\u00f3 n\u00e2ng cao \u0111\u00e1ng k\u1ec3 \u0111\u1ed9 b\u1ec1n v\u00e0 gi\u1ea3m thi\u1ec3u \u00f4 nhi\u1ec5m tr\u00ean t\u1ea5m wafer.<\/p>\n<hr data-start=\"3980\" data-end=\"3983\" \/>\n<h3 data-section-id=\"7rg8ob\" data-start=\"3985\" data-end=\"4059\"><span role=\"text\">C\u00e2u h\u1ecfi 2: Khay SiC n\u00e0y c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng trong c\u00e1c quy tr\u00ecnh MOCVD nhi\u1ec7t \u0111\u1ed9 cao kh\u00f4ng?<\/span><\/h3>\n<p data-start=\"4060\" data-end=\"4219\">\u0110\u00fang v\u1eady. S\u1ea3n ph\u1ea9m n\u00e0y \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf chuy\u00ean d\u1ee5ng cho c\u00e1c \u1ee9ng d\u1ee5ng MOCVD v\u00e0 c\u00f3 th\u1ec3 ho\u1ea1t \u0111\u1ed9ng \u1ed5n \u0111\u1ecbnh \u1edf nhi\u1ec7t \u0111\u1ed9 1100\u20131200\u00b0C, v\u1edbi \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh nhi\u1ec7t cao v\u00e0 kh\u1ea3 n\u0103ng ph\u00e2n ph\u1ed1i nhi\u1ec7t \u0111\u1ed3ng \u0111\u1ec1u.<\/p>\n<hr data-start=\"4221\" data-end=\"4224\" \/>\n<h3 data-section-id=\"ox8w5l\" data-start=\"4226\" data-end=\"4314\"><span role=\"text\">C\u00e2u h\u1ecfi 3: S\u1ef1 kh\u00e1c bi\u1ec7t gi\u1eefa khay than ch\u00ec tr\u00e1ng ph\u1ee7 v\u00e0 khay SiC CVD nguy\u00ean kh\u1ed1i l\u00e0 g\u00ec?<\/span><\/h3>\n<p data-start=\"4315\" data-end=\"4510\" data-is-last-node=\"\" data-is-only-node=\"\">C\u00e1c khay graphite tr\u00e1ng ph\u1ee7 s\u1eed d\u1ee5ng l\u00f5i graphite \u0111\u01b0\u1ee3c ph\u1ee7 m\u1ed9t l\u1edbp SiC b\u1ea3o v\u1ec7, trong khi c\u00e1c khay SiC CVD nguy\u00ean kh\u1ed1i l\u00e0 c\u00e1c c\u1ea5u tr\u00fac nguy\u00ean kh\u1ed1i c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao h\u01a1n, kh\u1ea3 n\u0103ng ch\u1ed1ng \u0103n m\u00f2n t\u1ed1t h\u01a1n v\u00e0 tu\u1ed5i th\u1ecd cao h\u01a1n.<\/p>","protected":false},"excerpt":{"rendered":"<p>The SiC ceramic tray plate is a high-performance wafer carrier designed for advanced semiconductor processes such as MOCVD, epitaxy, and ICP etching. It is available in two structures: Graphite substrate with CVD SiC coating Monolithic high-purity CVD SiC tray (\u226599.99%) Compared with conventional graphite carriers, this product offers significantly improved thermal stability, corrosion resistance, and [&hellip;]<\/p>\n","protected":false},"featured_media":2114,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center 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