{"id":2100,"date":"2026-05-12T03:59:56","date_gmt":"2026-05-12T03:59:56","guid":{"rendered":"https:\/\/www.xkh-ceramics.com\/?post_type=product&#038;p=2100"},"modified":"2026-05-12T03:59:56","modified_gmt":"2026-05-12T03:59:56","slug":"customized-sic-ceramic-end-effector-for-wafer-handling","status":"publish","type":"product","link":"https:\/\/www.xkh-ceramics.com\/vi\/product\/customized-sic-ceramic-end-effector-for-wafer-handling\/","title":{"rendered":"B\u1ed9 ph\u1eadn \u0111\u1ea7u cu\u1ed1i b\u1eb1ng g\u1ed1m SiC \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf ri\u00eang cho vi\u1ec7c x\u1eed l\u00fd t\u1ea5m wafer"},"content":{"rendered":"<p data-start=\"737\" data-end=\"989\"><img fetchpriority=\"high\" decoding=\"async\" class=\"size-medium wp-image-2101 alignright\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-3-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-3-300x300.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-3-150x150.png 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-3-768x768.png 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-3-12x12.png 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-3-600x600.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-3-100x100.png 100w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-3.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>B\u1ed9 ph\u1eadn \u0111\u1ea7u cu\u1ed1i b\u1eb1ng g\u1ed1m cacbua silic (SiC) l\u00e0 m\u1ed9t b\u1ed9 ph\u1eadn x\u1eed l\u00fd t\u1ea5m wafer c\u00f3 \u0111\u1ed9 ch\u00ednh x\u00e1c cao, \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf d\u00e0nh cho c\u00e1c h\u1ec7 th\u1ed1ng t\u1ef1 \u0111\u1ed9ng h\u00f3a trong ng\u00e0nh b\u00e1n d\u1eabn, bao g\u1ed3m robot chuy\u1ec3n t\u1ea5m wafer, h\u1ec7 th\u1ed1ng AMHS, thi\u1ebft b\u1ecb quang kh\u1eafc EUV v\u00e0 c\u00e1c thi\u1ebft b\u1ecb x\u1eed l\u00fd nhi\u1ec7t \u0111\u1ed9 cao.<\/p>\n<p data-start=\"991\" data-end=\"1308\">\u0110\u01b0\u1ee3c ch\u1ebf t\u1ea1o t\u1eeb SiC CVD c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao ho\u1eb7c SSiC c\u00f4ng ngh\u1ec7 cao, b\u1ed9 ph\u1eadn \u0111\u1ea7u cu\u1ed1i n\u00e0y mang l\u1ea1i \u0111\u1ed9 c\u1ee9ng v\u01b0\u1ee3t tr\u1ed9i, m\u1ee9c ph\u00e1t sinh h\u1ea1t c\u1ef1c th\u1ea5p c\u00f9ng \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh nhi\u1ec7t v\u00e0 h\u00f3a h\u1ecdc xu\u1ea5t s\u1eafc. S\u1ea3n ph\u1ea9m \u0111\u01b0\u1ee3c \u1ee9ng d\u1ee5ng r\u1ed9ng r\u00e3i trong c\u00e1c nh\u00e0 m\u00e1y s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn 300mm v\u00e0 c\u00e1c th\u1ebf h\u1ec7 c\u00f4ng ngh\u1ec7 ti\u00ean ti\u1ebfn, n\u01a1i vi\u1ec7c ki\u1ec3m so\u00e1t \u00f4 nhi\u1ec5m v\u00e0 \u0111\u1ed9 ch\u00ednh x\u00e1c \u0111\u1ecbnh v\u1ecb \u0111\u00f3ng vai tr\u00f2 then ch\u1ed1t.<\/p>\n<p data-start=\"1310\" data-end=\"1470\">So v\u1edbi c\u00e1c \u0111\u1ea7u c\u00f4ng c\u1ee5 truy\u1ec1n th\u1ed1ng l\u00e0m t\u1eeb nh\u00f4m ho\u1eb7c th\u1ea1ch anh, c\u00e1c gi\u1ea3i ph\u00e1p g\u1ed1m SiC gi\u00fap c\u1ea3i thi\u1ec7n \u0111\u00e1ng k\u1ec3 \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh c\u1ee7a quy tr\u00ecnh, \u0111\u1ed9 an to\u00e0n c\u1ee7a t\u1ea5m wafer v\u00e0 tu\u1ed5i th\u1ecd c\u1ee7a thi\u1ebft b\u1ecb.<\/p>\n<hr data-start=\"1472\" data-end=\"1475\" \/>\n<h2 data-section-id=\"ruuu6i\" data-start=\"1477\" data-end=\"1494\">Nh\u1eefng \u01b0u \u0111i\u1ec3m n\u1ed5i b\u1eadt<\/h2>\n<h3 data-section-id=\"1igp1it\" data-start=\"1496\" data-end=\"1532\">M\u1ee9c \u0111\u1ed9 \u00f4 nhi\u1ec5m h\u1ea1t c\u1ef1c th\u1ea5p<\/h3>\n<ul data-start=\"1533\" data-end=\"1664\">\n<li data-section-id=\"1lx1qmw\" data-start=\"1533\" data-end=\"1587\">S\u1ed1 l\u01b0\u1ee3ng h\u1ea1t sinh ra: &lt;0,1\/cm\u00b2 (tu\u00e2n th\u1ee7 ti\u00eau chu\u1ea9n SEMI F57)<\/li>\n<li data-section-id=\"8gkyog\" data-start=\"1588\" data-end=\"1618\">Kh\u00f4ng c\u00f3 s\u1ef1 nhi\u1ec5m b\u1ea9n do ion kim lo\u1ea1i<\/li>\n<li data-section-id=\"m28nyw\" data-start=\"1619\" data-end=\"1664\">L\u00fd t\u01b0\u1edfng cho c\u00f4ng ngh\u1ec7 EUV v\u00e0 c\u00e1c quy tr\u00ecnh s\u1ea3n xu\u1ea5t \u1edf th\u1ebf h\u1ec7 ti\u00ean ti\u1ebfn<\/li>\n<\/ul>\n<hr data-start=\"1666\" data-end=\"1669\" \/>\n<h3 data-section-id=\"nha58o\" data-start=\"1671\" data-end=\"1710\">\u0110\u1ed9 c\u1ee9ng cao v\u00e0 \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh ch\u00ednh x\u00e1c<\/h3>\n<ul data-start=\"1711\" data-end=\"1837\">\n<li data-section-id=\"n58wtx\" data-start=\"1711\" data-end=\"1740\">H\u1ec7 s\u1ed1 \u0111\u00e0n h\u1ed3i Young: ~420 GPa<\/li>\n<li data-section-id=\"wiw01d\" data-start=\"1741\" data-end=\"1790\">Ng\u0103n ng\u1eeba hi\u1ec7n t\u01b0\u1ee3ng l\u1ec7ch v\u1ecb tr\u00ed c\u1ee7a t\u1ea5m wafer do rung \u0111\u1ed9ng g\u00e2y ra<\/li>\n<li data-section-id=\"kx1hzh\" data-start=\"1791\" data-end=\"1837\">\u0110\u1ea3m b\u1ea3o qu\u00e1 tr\u00ecnh chuy\u1ec3n giao b\u1eb1ng robot \u1ed5n \u0111\u1ecbnh v\u00e0 t\u1ed1c \u0111\u1ed9 cao<\/li>\n<\/ul>\n<hr data-start=\"1839\" data-end=\"1842\" \/>\n<h3 data-section-id=\"2ge170\" data-start=\"1844\" data-end=\"1875\">\u0110\u1ed9 \u1ed5n \u0111\u1ecbnh nhi\u1ec7t tuy\u1ec7t v\u1eddi<\/h3>\n<ul data-start=\"1876\" data-end=\"2015\">\n<li data-section-id=\"ibg0yp\" data-start=\"1876\" data-end=\"1927\">Nhi\u1ec7t \u0111\u1ed9 ho\u1ea1t \u0111\u1ed9ng: l\u00ean \u0111\u1ebfn 1600\u00b0C (m\u00f4i tr\u01b0\u1eddng oxy h\u00f3a)<\/li>\n<li data-section-id=\"1e7mmjn\" data-start=\"1928\" data-end=\"1963\">L\u00ean \u0111\u1ebfn 1950\u00b0C (trong m\u00f4i tr\u01b0\u1eddng kh\u00ed tr\u01a1)<\/li>\n<li data-section-id=\"j5ees9\" data-start=\"1964\" data-end=\"2015\">Ph\u00f9 h\u1ee3p v\u1edbi c\u00e1c m\u00f4i tr\u01b0\u1eddng s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn kh\u1eafc nghi\u1ec7t<\/li>\n<\/ul>\n<hr data-start=\"2017\" data-end=\"2020\" \/>\n<h3 data-section-id=\"1twxua8\" data-start=\"2022\" data-end=\"2063\">Kh\u1ea3 n\u0103ng ch\u1ed1ng h\u00f3a ch\u1ea5t v\u00e0 plasma v\u01b0\u1ee3t tr\u1ed9i<\/h3>\n<ul data-start=\"2064\" data-end=\"2212\">\n<li data-section-id=\"x6lsw\" data-start=\"2064\" data-end=\"2120\">Ch\u1ecbu \u0111\u01b0\u1ee3c axit, ki\u1ec1m v\u00e0 m\u00f4i tr\u01b0\u1eddng plasma<\/li>\n<li data-section-id=\"1c1d6qm\" data-start=\"2121\" data-end=\"2169\">Kh\u00f4ng c\u00f3 hi\u1ec7n t\u01b0\u1ee3ng \u0103n m\u00f2n trong bu\u1ed3ng CVD \/ PVD \/ \u0103n m\u00f2n<\/li>\n<li data-section-id=\"1o7zcce\" data-start=\"2170\" data-end=\"2212\">\u1ed4n \u0111\u1ecbnh trong c\u00e1c kh\u00ed qu\u00e1 tr\u00ecnh SiH\u2084, NH\u2083, HCl<\/li>\n<\/ul>\n<hr data-start=\"2214\" data-end=\"2217\" \/>\n<h3 data-section-id=\"14bamzt\" data-start=\"2219\" data-end=\"2252\">Kh\u00f4ng b\u1ecb m\u00e0i m\u00f2n &amp; Tu\u1ed5i th\u1ecd cao<\/h3>\n<ul data-start=\"2253\" data-end=\"2380\">\n<li data-section-id=\"10g9b8f\" data-start=\"2253\" data-end=\"2283\">\u0110\u1ed9 c\u1ee9ng Vickers: ~2800 HV<\/li>\n<li data-section-id=\"14dvdy4\" data-start=\"2284\" data-end=\"2335\">Kh\u00f4ng c\u00f3 hi\u1ec7n t\u01b0\u1ee3ng bong tr\u00f3c h\u1ea1t trong qu\u00e1 tr\u00ecnh v\u1eadn h\u00e0nh l\u00e2u d\u00e0i<\/li>\n<li data-section-id=\"12rqc97\" data-start=\"2336\" data-end=\"2380\">\u0110\u1ed9 b\u1ec1n b\u1ec1 m\u1eb7t tuy\u1ec7t v\u1eddi (Ra &lt; 0,2 \u03bcm)<\/li>\n<\/ul>\n<hr data-start=\"2382\" data-end=\"2385\" \/>\n<h2 data-section-id=\"1xqplm3\" data-start=\"2387\" data-end=\"2418\">C\u00e1c \u0111\u1eb7c \u0111i\u1ec3m v\u1ec1 k\u1ebft c\u1ea5u v\u00e0 thi\u1ebft k\u1ebf<\/h2>\n<h3 data-section-id=\"1nh5g76\" data-start=\"2420\" data-end=\"2457\">H\u00ecnh h\u1ecdc x\u1eed l\u00fd t\u1ea5m wafer ch\u00ednh x\u00e1c<\/h3>\n<p data-start=\"2458\" data-end=\"2467\">H\u1ed7 tr\u1ee3:<\/p>\n<ul data-start=\"2468\" data-end=\"2596\">\n<li data-section-id=\"15tpg53\" data-start=\"2468\" data-end=\"2508\">T\u1ea5m wafer 150mm \/ 200mm \/ 300mm \/ 450mm<\/li>\n<li data-section-id=\"1rnwp5m\" data-start=\"2509\" data-end=\"2563\">Thi\u1ebft k\u1ebf k\u1eb9p c\u1ea1nh \/ c\u0103n ch\u1ec9nh r\u00e3nh \/ gi\u00e1 \u0111\u1ee1 ph\u1eb3ng<\/li>\n<li data-section-id=\"qm27un\" data-start=\"2564\" data-end=\"2596\">T\u00edch h\u1ee3p c\u00e1nh tay robot t\u00f9y ch\u1ec9nh<\/li>\n<\/ul>\n<hr data-start=\"2598\" data-end=\"2601\" \/>\n<h3 data-section-id=\"1yw23gm\" data-start=\"2603\" data-end=\"2643\">C\u1ea5u tr\u00fac nh\u1eb9 c\u00f3 \u0111\u1ed9 c\u1ee9ng cao<\/h3>\n<ul data-start=\"2644\" data-end=\"2768\">\n<li data-section-id=\"tt3pyh\" data-start=\"2644\" data-end=\"2677\">T\u1ef7 l\u1ec7 \u0111\u1ed9 c\u1ee9ng tr\u00ean tr\u1ecdng l\u01b0\u1ee3ng cao<\/li>\n<li data-section-id=\"1sb17em\" data-start=\"2678\" data-end=\"2721\">Ph\u00f9 h\u1ee3p v\u1edbi c\u00e1c h\u1ec7 th\u1ed1ng robot t\u1ed1c \u0111\u1ed9 cao<\/li>\n<li data-section-id=\"1j6yie2\" data-start=\"2722\" data-end=\"2768\">Gi\u1ea3m thi\u1ec3u \u0111\u1ed9 v\u00f5ng \u0111\u1ed9ng trong qu\u00e1 tr\u00ecnh chuy\u1ec3n \u0111\u1ed9ng<\/li>\n<\/ul>\n<hr data-start=\"2770\" data-end=\"2773\" \/>\n<h3 data-section-id=\"97w9la\" data-start=\"2775\" data-end=\"2809\">X\u1eed l\u00fd b\u1ec1 m\u1eb7t si\u00eau s\u1ea1ch<\/h3>\n<ul data-start=\"2810\" data-end=\"2905\">\n<li data-section-id=\"1lu1i7j\" data-start=\"2810\" data-end=\"2844\">M\u00e0i v\u00e0 \u0111\u00e1nh b\u00f3ng ch\u00ednh x\u00e1c<\/li>\n<li data-section-id=\"1amctgl\" data-start=\"2845\" data-end=\"2870\">\u0110\u1ed9 nh\u00e1m b\u1ec1 m\u1eb7t th\u1ea5p<\/li>\n<li data-section-id=\"1js4nxo\" data-start=\"2871\" data-end=\"2905\">C\u1ea5u tr\u00fac t\u01b0\u01a1ng th\u00edch v\u1edbi ph\u00f2ng s\u1ea1ch<\/li>\n<\/ul>\n<hr data-start=\"2907\" data-end=\"2910\" \/>\n<h3 data-section-id=\"50i47d\" data-start=\"2912\" data-end=\"2944\">Giao di\u1ec7n k\u1ef9 thu\u1eadt t\u00f9y ch\u1ec9nh<\/h3>\n<ul data-start=\"2945\" data-end=\"3063\">\n<li data-section-id=\"1dle0c1\" data-start=\"2945\" data-end=\"2981\">Kh\u1ea3 n\u0103ng t\u01b0\u01a1ng th\u00edch khi l\u1eafp \u0111\u1eb7t c\u00e1nh tay robot<\/li>\n<li data-section-id=\"19fhsyz\" data-start=\"2982\" data-end=\"3018\">T\u00edch h\u1ee3p OEM cho c\u00e1c h\u1ec7 th\u1ed1ng AMHS<\/li>\n<li data-section-id=\"3wahd3\" data-start=\"3019\" data-end=\"3063\">V\u1ecb tr\u00ed l\u1ed7 t\u00f9y ch\u1ec9nh v\u00e0 thi\u1ebft k\u1ebf khu\u00f4n<\/li>\n<\/ul>\n<hr data-start=\"3065\" data-end=\"3068\" \/>\n<h2 data-section-id=\"rb24ym\" data-start=\"3070\" data-end=\"3089\">C\u00e1c l\u1ef1a ch\u1ecdn v\u1eadt li\u1ec7u<\/h2>\n<h3 data-section-id=\"87v3o9\" data-start=\"3091\" data-end=\"3124\">Carbide silic \u0111\u01b0\u1ee3c t\u1ed5ng h\u1ee3p b\u1eb1ng ph\u01b0\u01a1ng ph\u00e1p h\u00f3a h\u1ecdc t\u1eeb pha kh\u00ed (CVD SiC)<\/h3>\n<ul data-start=\"3125\" data-end=\"3232\">\n<li data-section-id=\"1qjlbs6\" data-start=\"3125\" data-end=\"3146\">\u0110\u1ed9 tinh khi\u1ebft c\u1ef1c cao<\/li>\n<li data-section-id=\"1856ohe\" data-start=\"3147\" data-end=\"3198\">Ph\u00f9 h\u1ee3p nh\u1ea5t cho c\u00f4ng ngh\u1ec7 EUV v\u00e0 c\u00e1c quy tr\u00ecnh s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn ti\u00ean ti\u1ebfn<\/li>\n<li data-section-id=\"1lwpzbt\" data-start=\"3199\" data-end=\"3232\">M\u1ee9c \u0111\u1ed9 \u00f4 nhi\u1ec5m c\u1ef1c th\u1ea5p<\/li>\n<\/ul>\n<hr data-start=\"3234\" data-end=\"3237\" \/>\n<h3 data-section-id=\"gwj4n0\" data-start=\"3239\" data-end=\"3274\">Cacbua silic nung k\u1ebft (SSiC)<\/h3>\n<ul data-start=\"3275\" data-end=\"3402\">\n<li data-section-id=\"1hi8oju\" data-start=\"3275\" data-end=\"3312\">\u0110\u1ed9 b\u1ec1n cao v\u00e0 kh\u1ea3 n\u0103ng ch\u1ed1ng m\u00e0i m\u00f2n<\/li>\n<li data-section-id=\"1rnk9x7\" data-start=\"3313\" data-end=\"3363\">Ph\u00f9 h\u1ee3p v\u1edbi c\u00e1c h\u1ec7 th\u1ed1ng x\u1eed l\u00fd t\u1ea5m wafer c\u00f4ng nghi\u1ec7p<\/li>\n<li data-section-id=\"67fp04\" data-start=\"3364\" data-end=\"3402\">T\u1ef7 l\u1ec7 gi\u00e1 c\u1ea3 v\u00e0 hi\u1ec7u n\u0103ng tuy\u1ec7t v\u1eddi<\/li>\n<\/ul>\n<hr data-start=\"3404\" data-end=\"3407\" \/>\n<h2 data-section-id=\"1cgu054\" data-start=\"3409\" data-end=\"3436\">Th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/h2>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"3438\" data-end=\"3888\">\n<thead data-start=\"3438\" data-end=\"3462\">\n<tr data-start=\"3438\" data-end=\"3462\">\n<th class=\"last:pe-10\" data-start=\"3438\" data-end=\"3445\" data-col-size=\"sm\">M\u1eb7t h\u00e0ng<\/th>\n<th class=\"last:pe-10\" data-start=\"3445\" data-end=\"3462\" data-col-size=\"sm\">Th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"3487\" data-end=\"3888\">\n<tr data-start=\"3487\" data-end=\"3516\">\n<td data-start=\"3487\" data-end=\"3498\" data-col-size=\"sm\">Ch\u1ea5t li\u1ec7u<\/td>\n<td data-col-size=\"sm\" data-start=\"3498\" data-end=\"3516\">CVD SiC \/ SSiC<\/td>\n<\/tr>\n<tr data-start=\"3517\" data-end=\"3536\">\n<td data-start=\"3517\" data-end=\"3526\" data-col-size=\"sm\">S\u1ef1 tinh khi\u1ebft<\/td>\n<td data-start=\"3526\" data-end=\"3536\" data-col-size=\"sm\">&gt;99,5%<\/td>\n<\/tr>\n<tr data-start=\"3537\" data-end=\"3561\">\n<td data-start=\"3537\" data-end=\"3550\" data-col-size=\"sm\">K\u00edch th\u01b0\u1edbc h\u1ea1t<\/td>\n<td data-col-size=\"sm\" data-start=\"3550\" data-end=\"3561\">4\u201310 \u03bcm<\/td>\n<\/tr>\n<tr data-start=\"3562\" data-end=\"3587\">\n<td data-start=\"3562\" data-end=\"3572\" data-col-size=\"sm\">M\u1eadt \u0111\u1ed9<\/td>\n<td data-col-size=\"sm\" data-start=\"3572\" data-end=\"3587\">&gt;3,14 g\/cm\u00b3<\/td>\n<\/tr>\n<tr data-start=\"3588\" data-end=\"3611\">\n<td data-start=\"3588\" data-end=\"3599\" data-col-size=\"sm\">\u0110\u1ed9 c\u1ee9ng<\/td>\n<td data-col-size=\"sm\" data-start=\"3599\" data-end=\"3611\">~2800 HV<\/td>\n<\/tr>\n<tr data-start=\"3612\" data-end=\"3643\">\n<td data-start=\"3612\" data-end=\"3632\" data-col-size=\"sm\">\u0110\u1ed9 b\u1ec1n u\u1ed1n<\/td>\n<td data-col-size=\"sm\" data-start=\"3632\" data-end=\"3643\">450 MPa<\/td>\n<\/tr>\n<tr data-start=\"3644\" data-end=\"3673\">\n<td data-start=\"3644\" data-end=\"3662\" data-col-size=\"sm\">M\u00f4 \u0111un \u0111\u00e0n h\u1ed3i<\/td>\n<td data-col-size=\"sm\" data-start=\"3662\" data-end=\"3673\">420 GPa<\/td>\n<\/tr>\n<tr data-start=\"3674\" data-end=\"3710\">\n<td data-start=\"3674\" data-end=\"3697\" data-col-size=\"sm\">\u0110\u1ed9 d\u1eabn nhi\u1ec7t<\/td>\n<td data-col-size=\"sm\" data-start=\"3697\" data-end=\"3710\">160 W\/m\u00b7K<\/td>\n<\/tr>\n<tr data-start=\"3711\" data-end=\"3768\">\n<td data-start=\"3711\" data-end=\"3729\" data-col-size=\"sm\">Nhi\u1ec7t \u0111\u1ed9 t\u1ed1i \u0111a<\/td>\n<td data-col-size=\"sm\" data-start=\"3729\" data-end=\"3768\">1600\u00b0C (qu\u00e1 tr\u00ecnh oxy h\u00f3a) \/ 1950\u00b0C (m\u00f4i tr\u01b0\u1eddng tr\u01a1)<\/td>\n<\/tr>\n<tr data-start=\"3769\" data-end=\"3810\">\n<td data-start=\"3769\" data-end=\"3794\" data-col-size=\"sm\">\u0110i\u1ec7n tr\u1edf su\u1ea5t<\/td>\n<td data-col-size=\"sm\" data-start=\"3794\" data-end=\"3810\">10\u2076\u201310\u2078 \u03a9\u00b7cm<\/td>\n<\/tr>\n<tr data-start=\"3811\" data-end=\"3851\">\n<td data-start=\"3811\" data-end=\"3828\" data-col-size=\"sm\">B\u1ec1 m\u1eb7t ho\u00e0n thi\u1ec7n<\/td>\n<td data-col-size=\"sm\" data-start=\"3828\" data-end=\"3851\">\u0110\u01b0\u1ee3c \u0111\u00e1nh b\u00f3ng si\u00eau m\u1ecbn<\/td>\n<\/tr>\n<tr data-start=\"3852\" data-end=\"3888\">\n<td data-start=\"3852\" data-end=\"3859\" data-col-size=\"sm\">K\u00edch th\u01b0\u1edbc<\/td>\n<td data-start=\"3859\" data-end=\"3888\" data-col-size=\"sm\">T\u00f9y ch\u1ec9nh (t\u1ea5m wafer 150\u2013450 mm)<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"3890\" data-end=\"3893\" \/>\n<h2 data-section-id=\"mu966k\" data-start=\"3895\" data-end=\"3910\">\u1ee8ng d\u1ee5ng<\/h2>\n<h3 data-section-id=\"6yu2ul\" data-start=\"3912\" data-end=\"3943\">S\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn<\/h3>\n<ul data-start=\"3944\" data-end=\"4097\">\n<li data-section-id=\"49bdmt\" data-start=\"3944\" data-end=\"3978\">X\u1eed l\u00fd t\u1ea5m wafer trong c\u00f4ng ngh\u1ec7 in kh\u1eafc EUV<\/li>\n<li data-section-id=\"11xdzhh\" data-start=\"3979\" data-end=\"4017\">H\u1ec7 th\u1ed1ng chuy\u1ec3n t\u1ea3i robot cho t\u1ea5m wafer 300mm<\/li>\n<li data-section-id=\"ox84z0\" data-start=\"4018\" data-end=\"4060\">T\u1ef1 \u0111\u1ed9ng h\u00f3a bu\u1ed3ng CVD \/ PVD \/ \u0103n m\u00f2n<\/li>\n<li data-section-id=\"teg2xm\" data-start=\"4061\" data-end=\"4097\">V\u1eadn chuy\u1ec3n t\u1ea5m wafer trong qu\u00e1 tr\u00ecnh c\u1ea5y ion<\/li>\n<\/ul>\n<hr data-start=\"4099\" data-end=\"4102\" \/>\n<h3 data-section-id=\"sf9357\" data-start=\"4104\" data-end=\"4140\">V\u1eadt li\u1ec7u b\u00e1n d\u1eabn ti\u00ean ti\u1ebfn<\/h3>\n<ul data-start=\"4141\" data-end=\"4248\">\n<li data-section-id=\"iiuum6\" data-start=\"4141\" data-end=\"4176\">X\u1eed l\u00fd t\u1ea5m wafer cho thi\u1ebft b\u1ecb \u0111i\u1ec7n SiC<\/li>\n<li data-section-id=\"se94ot\" data-start=\"4177\" data-end=\"4211\">H\u1ec7 th\u1ed1ng s\u1ea3n xu\u1ea5t l\u1edbp ph\u1ee7 epitaxy GaN<\/li>\n<li data-section-id=\"3yciq1\" data-start=\"4212\" data-end=\"4248\">C\u00e1c quy tr\u00ecnh MOCVD nhi\u1ec7t \u0111\u1ed9 cao<\/li>\n<\/ul>\n<hr data-start=\"4250\" data-end=\"4253\" \/>\n<h3 data-section-id=\"11khwnl\" data-start=\"4255\" data-end=\"4286\">Ng\u00e0nh c\u00f4ng nghi\u1ec7p quang \u0111i\u1ec7n v\u00e0 \u0111\u00e8n LED<\/h3>\n<ul data-start=\"4287\" data-end=\"4389\">\n<li data-section-id=\"q29bxq\" data-start=\"4287\" data-end=\"4319\">D\u00e2y chuy\u1ec1n t\u1ef1 \u0111\u1ed9ng s\u1ea3n xu\u1ea5t t\u1ea5m wafer n\u0103ng l\u01b0\u1ee3ng m\u1eb7t tr\u1eddi<\/li>\n<li data-section-id=\"10mww1v\" data-start=\"4320\" data-end=\"4361\">H\u1ec7 th\u1ed1ng chuy\u1ec3n giao Micro-LED \/ Mini-LED<\/li>\n<li data-section-id=\"dp5vhg\" data-start=\"4362\" data-end=\"4389\">X\u1eed l\u00fd t\u1ea5m wafer sapphire<\/li>\n<\/ul>\n<hr data-start=\"4391\" data-end=\"4394\" \/>\n<h3 data-section-id=\"j366yc\" data-start=\"4396\" data-end=\"4428\">T\u1ef1 \u0111\u1ed9ng h\u00f3a &amp; Robot (AMHS)<\/h3>\n<ul data-start=\"4429\" data-end=\"4533\">\n<li data-section-id=\"fpj2it\" data-start=\"4429\" data-end=\"4459\">C\u00e1nh tay robot v\u1eadn chuy\u1ec3n t\u1ea5m wafer<\/li>\n<li data-section-id=\"e4e8u3\" data-start=\"4460\" data-end=\"4492\">H\u1ec7 th\u1ed1ng t\u1ef1 \u0111\u1ed9ng h\u00f3a ph\u00f2ng s\u1ea1ch<\/li>\n<li data-section-id=\"k0rhy6\" data-start=\"4493\" data-end=\"4533\">H\u1ec7 th\u1ed1ng x\u1eed l\u00fd v\u1eadt li\u1ec7u t\u1ed1c \u0111\u1ed9 cao<\/li>\n<\/ul>\n<hr data-start=\"4535\" data-end=\"4538\" \/>\n<h3 data-section-id=\"1c5bbdr\" data-start=\"4540\" data-end=\"4573\">Nghi\u00ean c\u1ee9u &amp; Thi\u1ebft b\u1ecb cao c\u1ea5p<\/h3>\n<ul data-start=\"4574\" data-end=\"4679\">\n<li data-section-id=\"1sbej07\" data-start=\"4574\" data-end=\"4604\">S\u1ea3n xu\u1ea5t thi\u1ebft b\u1ecb l\u01b0\u1ee3ng t\u1eed<\/li>\n<li data-section-id=\"5u37w7\" data-start=\"4605\" data-end=\"4641\">H\u1ec7 th\u1ed1ng x\u1eed l\u00fd t\u1ea5m b\u00e1n d\u1eabn \u1edf nhi\u1ec7t \u0111\u1ed9 c\u1ef1c th\u1ea5p<\/li>\n<li data-section-id=\"i12e24\" data-start=\"4642\" data-end=\"4679\">C\u00f4ng ngh\u1ec7 \u0111\u00f3ng g\u00f3i ti\u00ean ti\u1ebfn (IC 3D \/ MEMS)<\/li>\n<\/ul>\n<hr data-start=\"4681\" data-end=\"4684\" \/>\n<h2 data-section-id=\"vm5qii\" data-start=\"4686\" data-end=\"4715\">T\u00f3m t\u1eaft c\u00e1c \u01b0u \u0111i\u1ec3m c\u1ee7a s\u1ea3n ph\u1ea9m<\/h2>\n<ul data-start=\"4717\" data-end=\"4996\">\n<li data-section-id=\"r4wmoo\" data-start=\"4717\" data-end=\"4750\">Kh\u00f4ng c\u00f3 nguy c\u01a1 nhi\u1ec5m kim lo\u1ea1i<\/li>\n<li data-section-id=\"w80eyq\" data-start=\"4751\" data-end=\"4797\">\u0110\u1ed9 c\u1ee9ng c\u1ef1c cao cho kh\u1ea3 n\u0103ng x\u1eed l\u00fd ch\u00ednh x\u00e1c<\/li>\n<li data-section-id=\"ovhb2l\" data-start=\"4798\" data-end=\"4842\">\u0110\u1ed9 \u1ed5n \u0111\u1ecbnh nhi\u1ec7t v\u00e0 h\u00f3a h\u1ecdc tuy\u1ec7t v\u1eddi<\/li>\n<li data-section-id=\"1pry50x\" data-start=\"4843\" data-end=\"4878\">Tu\u1ed5i th\u1ecd cao v\u1edbi m\u1ee9c hao m\u00f2n t\u1ed1i thi\u1ec3u<\/li>\n<li data-section-id=\"16clm2x\" data-start=\"4879\" data-end=\"4919\">T\u01b0\u01a1ng th\u00edch v\u1edbi h\u1ec7 th\u1ed1ng t\u1ef1 \u0111\u1ed9ng h\u00f3a trong ph\u00f2ng s\u1ea1ch<\/li>\n<li data-section-id=\"1usfebt\" data-start=\"4920\" data-end=\"4956\">C\u00f3 th\u1ec3 t\u00f9y ch\u1ec9nh cho m\u1ecdi k\u00edch th\u01b0\u1edbc t\u1ea5m wafer<\/li>\n<li data-section-id=\"whnxc2\" data-start=\"4957\" data-end=\"4996\">Ph\u00f9 h\u1ee3p v\u1edbi c\u00f4ng ngh\u1ec7 EUV v\u00e0 c\u00e1c th\u1ebf h\u1ec7 c\u00f4ng ngh\u1ec7 ti\u00ean ti\u1ebfn<\/li>\n<\/ul>\n<hr data-start=\"4998\" data-end=\"5001\" \/>\n<h2 data-section-id=\"rnyyeg\" data-start=\"5003\" data-end=\"5027\">C\u00e1c t\u00f9y ch\u1ecdn t\u00f9y ch\u1ec9nh<img decoding=\"async\" class=\"size-medium wp-image-2102 alignright\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2-300x300.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2-150x150.png 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2-768x768.png 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2-12x12.png 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2-600x600.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2-100x100.png 100w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/h2>\n<p data-start=\"5029\" data-end=\"5067\">Ch\u00fang t\u00f4i h\u1ed7 tr\u1ee3 t\u00f9y ch\u1ec9nh OEM\/ODM to\u00e0n di\u1ec7n:<\/p>\n<ul data-start=\"5069\" data-end=\"5319\">\n<li data-section-id=\"pzy3qt\" data-start=\"5069\" data-end=\"5127\">H\u00ecnh d\u1ea1ng \u0111\u1ea7u k\u1eb9p (b\u1ec1 m\u1eb7t ph\u1eb3ng \/ k\u1eb9p c\u1ea1nh \/ c\u0103n ch\u1ec9nh r\u00e3nh)<\/li>\n<li data-section-id=\"173oufn\" data-start=\"5128\" data-end=\"5168\">Kh\u1ea3 n\u0103ng t\u01b0\u01a1ng th\u00edch v\u1ec1 k\u00edch th\u01b0\u1edbc t\u1ea5m wafer (150\u2013450 mm)<\/li>\n<li data-section-id=\"1sh3bgb\" data-start=\"5169\" data-end=\"5195\">Thi\u1ebft k\u1ebf giao di\u1ec7n robot<\/li>\n<li data-section-id=\"1ma3ck\" data-start=\"5196\" data-end=\"5252\">L\u1edbp ph\u1ee7 b\u1ec1 m\u1eb7t (t\u00f9y ch\u1ecdn ch\u1ed1ng t\u0129nh \u0111i\u1ec7n \/ ch\u1ed1ng th\u1ea5m n\u01b0\u1edbc)<\/li>\n<li data-section-id=\"7mw706\" data-start=\"5253\" data-end=\"5289\">T\u1ed1i \u01b0u h\u00f3a dung sai ch\u00ednh x\u00e1c<\/li>\n<li data-section-id=\"w4j63d\" data-start=\"5290\" data-end=\"5319\">Ho\u00e0n thi\u1ec7n \u0111\u1ea1t ti\u00eau chu\u1ea9n ph\u00f2ng s\u1ea1ch<\/li>\n<\/ul>\n<hr data-start=\"5321\" data-end=\"5324\" \/>\n<h2 data-section-id=\"1hryhf7\" data-start=\"5326\" data-end=\"5332\">C\u00e2u h\u1ecfi th\u01b0\u1eddng g\u1eb7p<\/h2>\n<h3 data-section-id=\"1mpzh4o\" data-start=\"5334\" data-end=\"5384\">C\u00e2u h\u1ecfi 1: T\u1ea1i sao l\u1ea1i s\u1eed d\u1ee5ng SiC thay v\u00ec nh\u00f4m ho\u1eb7c th\u1ea1ch anh?<\/h3>\n<ul data-start=\"5385\" data-end=\"5556\">\n<li data-section-id=\"1xvhlf0\" data-start=\"5385\" data-end=\"5437\">Nh\u00f4m: V\u1ea5n \u0111\u1ec1 v\u1ec1 s\u1ef1 h\u00ecnh th\u00e0nh h\u1ea1t b\u1ee5i v\u00e0 qu\u00e1 tr\u00ecnh oxy h\u00f3a<\/li>\n<li data-section-id=\"1q7gghy\" data-start=\"5438\" data-end=\"5489\">Th\u1ea1ch anh: d\u1ec5 v\u1ee1 + kh\u1ea3 n\u0103ng ch\u1ecbu s\u1ed1c nhi\u1ec7t k\u00e9m<\/li>\n<li data-section-id=\"vgt2b3\" data-start=\"5490\" data-end=\"5556\">SiC: s\u1ef1 k\u1ebft h\u1ee3p ho\u00e0n h\u1ea3o gi\u1eefa \u0111\u1ed9 c\u1ee9ng, \u0111\u1ed9 tinh khi\u1ebft v\u00e0 \u0111\u1ed9 b\u1ec1n<\/li>\n<\/ul>\n<hr data-start=\"5558\" data-end=\"5561\" \/>\n<h3 data-section-id=\"1cxfupn\" data-start=\"5563\" data-end=\"5599\">C\u00e2u h\u1ecfi 2: Thi\u1ebft b\u1ecb n\u00e0y c\u00f3 h\u1ed7 tr\u1ee3 t\u1ea5m wafer 450mm kh\u00f4ng?<\/h3>\n<p data-start=\"5600\" data-end=\"5667\">\u0110\u00fang v\u1eady, ch\u00fang t\u00f4i cung c\u1ea5p c\u00e1c thi\u1ebft k\u1ebf theo y\u00eau c\u1ea7u cho h\u1ec7 th\u1ed1ng x\u1eed l\u00fd t\u1ea5m wafer 450mm.<\/p>\n<hr data-start=\"5669\" data-end=\"5672\" \/>\n<h3 data-section-id=\"a4nxop\" data-start=\"5674\" data-end=\"5717\">C\u00e2u h\u1ecfi 3: C\u00f4ng ngh\u1ec7 n\u00e0y c\u00f3 ph\u00f9 h\u1ee3p v\u1edbi k\u1ef9 thu\u1eadt in EUV kh\u00f4ng?<\/h3>\n<p data-start=\"5718\" data-end=\"5803\">\u0110\u00fang v\u1eady. C\u00e1c b\u1ed9 ph\u1eadn \u0111\u1ea7u cu\u1ed1i l\u00e0m t\u1eeb SiC \u0111\u00e1p \u1ee9ng c\u00e1c y\u00eau c\u1ea7u v\u1ec1 h\u00e0m l\u01b0\u1ee3ng h\u1ea1t c\u1ef1c th\u1ea5p v\u00e0 kh\u1ea3 n\u0103ng t\u01b0\u01a1ng th\u00edch v\u1edbi m\u00f4i tr\u01b0\u1eddng ch\u00e2n kh\u00f4ng.<\/p>\n<hr data-start=\"5805\" data-end=\"5808\" \/>\n<h3 data-section-id=\"1ajqsm3\" data-start=\"5810\" data-end=\"5872\">C\u00e2u h\u1ecfi 4: S\u1ea3n ph\u1ea9m n\u00e0y c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng trong c\u00e1c h\u1ec7 th\u1ed1ng ch\u00e2n kh\u00f4ng v\u00e0 nhi\u1ec7t \u0111\u1ed9 cao kh\u00f4ng?<\/h3>\n<p data-start=\"5873\" data-end=\"5951\">\u0110\u00fang v\u1eady. SiC ho\u1ea1t \u0111\u1ed9ng \u1ed5n \u0111\u1ecbnh trong m\u00f4i tr\u01b0\u1eddng ch\u00e2n kh\u00f4ng, plasma v\u00e0 nhi\u1ec7t \u0111\u1ed9 cao.<\/p>","protected":false},"excerpt":{"rendered":"<p>The Silicon Carbide (SiC) Ceramic End Effector is a high-precision wafer handling component designed for semiconductor automation systems, including wafer transfer robots, AMHS systems, EUV lithography equipment, and high-temperature process tools. Made from high-purity CVD SiC or engineered SSiC, this end effector delivers exceptional rigidity, ultra-low particle generation, and outstanding thermal and chemical stability. 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