{"id":2095,"date":"2026-05-12T03:44:27","date_gmt":"2026-05-12T03:44:27","guid":{"rendered":"https:\/\/www.xkh-ceramics.com\/?post_type=product&#038;p=2095"},"modified":"2026-05-12T03:44:27","modified_gmt":"2026-05-12T03:44:27","slug":"high-purity-silicon-carbide-wafer-tray-for-semiconductor-cvd-processing","status":"publish","type":"product","link":"https:\/\/www.xkh-ceramics.com\/vi\/product\/high-purity-silicon-carbide-wafer-tray-for-semiconductor-cvd-processing\/","title":{"rendered":"Khay \u0111\u1ef1ng t\u1ea5m wafer cacbua silic c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao d\u00f9ng trong s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn v\u00e0 x\u1eed l\u00fd CVD"},"content":{"rendered":"<p data-start=\"199\" data-end=\"404\"><img fetchpriority=\"high\" decoding=\"async\" class=\"wp-image-2097 alignright\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/CVDSSiC-Silicon-Carbide-Tray-For-Semiconductor-Wafer-Processing-2-300x300.png\" alt=\"\" width=\"288\" height=\"288\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/CVDSSiC-Silicon-Carbide-Tray-For-Semiconductor-Wafer-Processing-2-300x300.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/CVDSSiC-Silicon-Carbide-Tray-For-Semiconductor-Wafer-Processing-2-150x150.png 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/CVDSSiC-Silicon-Carbide-Tray-For-Semiconductor-Wafer-Processing-2-768x768.png 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/CVDSSiC-Silicon-Carbide-Tray-For-Semiconductor-Wafer-Processing-2-12x12.png 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/CVDSSiC-Silicon-Carbide-Tray-For-Semiconductor-Wafer-Processing-2-600x600.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/CVDSSiC-Silicon-Carbide-Tray-For-Semiconductor-Wafer-Processing-2-100x100.png 100w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/CVDSSiC-Silicon-Carbide-Tray-For-Semiconductor-Wafer-Processing-2.png 1000w\" sizes=\"(max-width: 288px) 100vw, 288px\" \/>Khay \u0111\u1ef1ng t\u1ea5m wafer cacbua silic l\u00e0 m\u1ed9t gi\u00e1 \u0111\u1ee1 g\u1ed1m s\u1ee9 ch\u00ednh x\u00e1c, hi\u1ec7u su\u1ea5t cao, \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf d\u00e0nh cho qu\u00e1 tr\u00ecnh x\u1eed l\u00fd t\u1ea5m wafer b\u00e1n d\u1eabn, c\u00e1c h\u1ec7 th\u1ed1ng CVD\/PECVD, l\u00f2 ch\u00e2n kh\u00f4ng v\u00e0 c\u00e1c m\u00f4i tr\u01b0\u1eddng c\u00f4ng nghi\u1ec7p nhi\u1ec7t \u0111\u1ed9 cao.<\/p>\n<p data-start=\"406\" data-end=\"666\">\u0110\u01b0\u1ee3c ch\u1ebf t\u1ea1o t\u1eeb SiC CVD ho\u1eb7c SSiC (cacbua silic nung k\u1ebft) c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao, khay n\u00e0y mang l\u1ea1i \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh nhi\u1ec7t, \u0111\u1ed9 b\u1ec1n c\u01a1 h\u1ecdc v\u00e0 kh\u1ea3 n\u0103ng ch\u1ed1ng \u0103n m\u00f2n h\u00f3a h\u1ecdc v\u01b0\u1ee3t tr\u1ed9i, \u0111\u1ea3m b\u1ea3o vi\u1ec7c x\u1eed l\u00fd t\u1ea5m wafer \u1ed5n \u0111\u1ecbnh v\u00e0 hi\u1ec7u su\u1ea5t quy tr\u00ecnh nh\u1ea5t qu\u00e1n trong c\u00e1c \u0111i\u1ec1u ki\u1ec7n kh\u1eafc nghi\u1ec7t.<\/p>\n<p data-start=\"668\" data-end=\"818\">N\u00f3 \u0111\u01b0\u1ee3c \u1ee9ng d\u1ee5ng r\u1ed9ng r\u00e3i trong s\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn, qu\u00e1 tr\u00ecnh ph\u00e1t tri\u1ec3n l\u1edbp ph\u1ee7 LED, gia c\u00f4ng t\u1ea5m wafer sapphire, qu\u00e1 tr\u00ecnh nung g\u1ed1m cao c\u1ea5p v\u00e0 c\u00e1c h\u1ec7 th\u1ed1ng nhi\u1ec7t ch\u00e2n kh\u00f4ng.<\/p>\n<hr data-start=\"820\" data-end=\"823\" \/>\n<h2 data-section-id=\"1ma7m6t\" data-start=\"825\" data-end=\"840\">C\u00e1c t\u00ednh n\u0103ng ch\u00ednh<\/h2>\n<h3 data-section-id=\"1mskj6p\" data-start=\"842\" data-end=\"888\">\u0110\u1ed9 \u1ed5n \u0111\u1ecbnh \u1edf nhi\u1ec7t \u0111\u1ed9 cao (l\u00ean \u0111\u1ebfn 1600\u00b0C+)<\/h3>\n<p data-start=\"889\" data-end=\"1000\">Duy tr\u00ec t\u00ednh to\u00e0n v\u1eb9n c\u1ea5u tr\u00fac v\u00e0 hi\u1ec7u su\u1ea5t khi ho\u1ea1t \u0111\u1ed9ng li\u00ean t\u1ee5c \u1edf nhi\u1ec7t \u0111\u1ed9 cao m\u00e0 kh\u00f4ng b\u1ecb bi\u1ebfn d\u1ea1ng.<\/p>\n<h3 data-section-id=\"obi2s6\" data-start=\"1002\" data-end=\"1036\">\u0110\u1ed9 d\u1eabn nhi\u1ec7t tuy\u1ec7t v\u1eddi<\/h3>\n<p data-start=\"1037\" data-end=\"1136\">\u0110\u1ea3m b\u1ea3o qu\u00e1 tr\u00ecnh truy\u1ec1n nhi\u1ec7t nhanh ch\u00f3ng v\u00e0 \u0111\u1ed3ng \u0111\u1ec1u, gi\u00fap gi\u1ea3m ch\u00eanh l\u1ec7ch nhi\u1ec7t \u0111\u1ed9 v\u00e0 n\u00e2ng cao hi\u1ec7u su\u1ea5t s\u1ea3n xu\u1ea5t.<\/p>\n<h3 data-section-id=\"hstd5z\" data-start=\"1138\" data-end=\"1175\">Kh\u1ea3 n\u0103ng ch\u1ecbu s\u1ed1c nhi\u1ec7t v\u01b0\u1ee3t tr\u1ed9i<\/h3>\n<p data-start=\"1176\" data-end=\"1248\">Ch\u1ecbu \u0111\u01b0\u1ee3c c\u00e1c chu k\u1ef3 gia nhi\u1ec7t v\u00e0 l\u00e0m l\u1ea1nh nhanh m\u00e0 kh\u00f4ng b\u1ecb n\u1ee9t ho\u1eb7c cong v\u00eanh.<\/p>\n<h3 data-section-id=\"1wy3za\" data-start=\"1250\" data-end=\"1278\">\u0110\u1ed9 b\u1ec1n c\u01a1 h\u1ecdc cao<\/h3>\n<p data-start=\"1279\" data-end=\"1377\">C\u1ea5u tr\u00fac gia c\u1ed1 mang l\u1ea1i kh\u1ea3 n\u0103ng ch\u1ecbu t\u1ea3i tuy\u1ec7t v\u1eddi v\u00e0 \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh k\u00edch th\u01b0\u1edbc l\u00e2u d\u00e0i.<\/p>\n<h3 data-section-id=\"1cdcof9\" data-start=\"1379\" data-end=\"1411\">Kh\u1ea3 n\u0103ng ch\u1ed1ng h\u00f3a ch\u1ea5t v\u00e0 plasma<\/h3>\n<p data-start=\"1412\" data-end=\"1521\">C\u00f3 kh\u1ea3 n\u0103ng ch\u1ed1ng ch\u1ecbu cao \u0111\u1ed1i v\u1edbi axit, ki\u1ec1m, kh\u00ed \u0103n m\u00f2n v\u00e0 m\u00f4i tr\u01b0\u1eddng plasma \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng trong c\u00e1c quy tr\u00ecnh s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn.<\/p>\n<h3 data-section-id=\"1vb1ood\" data-start=\"1523\" data-end=\"1557\">Gia c\u00f4ng si\u00eau ch\u00ednh x\u00e1c<\/h3>\n<p data-start=\"1558\" data-end=\"1663\">Qu\u00e1 tr\u00ecnh m\u00e0i CNC \u0111\u1ea3m b\u1ea3o \u0111\u1ed9 ch\u00ednh x\u00e1c cao, \u0111\u1ed9 ph\u1eb3ng v\u00e0 b\u1ec1 m\u1eb7t ti\u1ebfp x\u00fac v\u1edbi t\u1ea5m wafer nh\u1eb5n m\u1ecbn cho c\u00e1c h\u1ec7 th\u1ed1ng t\u1ef1 \u0111\u1ed9ng.<\/p>\n<hr data-start=\"1665\" data-end=\"1668\" \/>\n<h2 data-section-id=\"1lh3gui\" data-start=\"1670\" data-end=\"1690\">Thi\u1ebft k\u1ebf k\u1ebft c\u1ea5u<\/h2>\n<h3 data-section-id=\"1s8wich\" data-start=\"1692\" data-end=\"1726\">Thi\u1ebft k\u1ebf khe h\u00ecnh khuy\u00ean \u0111a v\u00f9ng<\/h3>\n<ul data-start=\"1727\" data-end=\"1850\">\n<li data-section-id=\"gkdwm3\" data-start=\"1727\" data-end=\"1745\">Gi\u1ea3m c\u00e2n<\/li>\n<li data-section-id=\"18issq2\" data-start=\"1746\" data-end=\"1777\">C\u1ea3i thi\u1ec7n \u0111\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u nhi\u1ec7t<\/li>\n<li data-section-id=\"l3j2gw\" data-start=\"1778\" data-end=\"1807\">T\u0103ng c\u01b0\u1eddng kh\u1ea3 n\u0103ng t\u1ea3n nhi\u1ec7t<\/li>\n<li data-section-id=\"1tnc39l\" data-start=\"1808\" data-end=\"1850\">Gi\u1ea3m thi\u1ec3u s\u1ef1 t\u1eadp trung \u1ee9ng su\u1ea5t nhi\u1ec7t<\/li>\n<\/ul>\n<p data-start=\"1852\" data-end=\"1942\">C\u1ea5u tr\u00fac n\u00e0y \u0111\u01b0\u1ee3c t\u1ed1i \u01b0u h\u00f3a cho c\u00e1c quy tr\u00ecnh x\u1eed l\u00fd t\u1ea5m wafer \u1edf nhi\u1ec7t \u0111\u1ed9 cao v\u00e0 c\u00e1c \u1ee9ng d\u1ee5ng ch\u00e2n kh\u00f4ng.<\/p>\n<hr data-start=\"1944\" data-end=\"1947\" \/>\n<h3 data-section-id=\"10p8bw6\" data-start=\"1949\" data-end=\"1984\">H\u1ec7 th\u1ed1ng g\u00e2n gia c\u1ed1 h\u01b0\u1edbng t\u00e2m<\/h3>\n<ul data-start=\"1985\" data-end=\"2144\">\n<li data-section-id=\"93l2pt\" data-start=\"1985\" data-end=\"2018\">T\u0103ng \u0111\u1ed9 c\u1ee9ng c\u01a1 h\u1ecdc<\/li>\n<li data-section-id=\"xmgkcx\" data-start=\"2019\" data-end=\"2054\">Ng\u0103n ng\u1eeba bi\u1ebfn d\u1ea1ng khi ch\u1ecbu t\u1ea3i<\/li>\n<li data-section-id=\"16xz56l\" data-start=\"2055\" data-end=\"2088\">C\u1ea3i thi\u1ec7n \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh khi xoay<\/li>\n<li data-section-id=\"1i3nv5f\" data-start=\"2089\" data-end=\"2144\">Gi\u00fap k\u00e9o d\u00e0i tu\u1ed5i th\u1ecd trong m\u00f4i tr\u01b0\u1eddng nhi\u1ec7t \u0111\u1ed9 thay \u0111\u1ed5i theo chu k\u1ef3<\/li>\n<\/ul>\n<hr data-start=\"2146\" data-end=\"2149\" \/>\n<h3 data-section-id=\"erqgsk\" data-start=\"2151\" data-end=\"2181\">B\u1ec1 m\u1eb7t gia c\u00f4ng ch\u00ednh x\u00e1c<\/h3>\n<ul data-start=\"2182\" data-end=\"2334\">\n<li data-section-id=\"tdalbr\" data-start=\"2182\" data-end=\"2215\">\u0110\u1ed9 ph\u1eb3ng cao v\u00e0 t\u00ednh \u0111\u1ed3ng nh\u1ea5t<\/li>\n<li data-section-id=\"1jpgedk\" data-start=\"2216\" data-end=\"2250\">Giao di\u1ec7n ti\u1ebfp x\u00fac m\u1ecbn gi\u1eefa c\u00e1c t\u1ea5m wafer<\/li>\n<li data-section-id=\"muk23v\" data-start=\"2251\" data-end=\"2297\">T\u01b0\u01a1ng th\u00edch v\u1edbi c\u00e1c h\u1ec7 th\u1ed1ng t\u1ef1 \u0111\u1ed9ng h\u00f3a robot<\/li>\n<li data-section-id=\"t302yy\" data-start=\"2298\" data-end=\"2334\">Gi\u1ea3m nguy c\u01a1 ph\u00e1t sinh h\u1ea1t b\u1ee5i<\/li>\n<\/ul>\n<hr data-start=\"2336\" data-end=\"2339\" \/>\n<h3 data-section-id=\"1jxpmtp\" data-start=\"2341\" data-end=\"2371\">Giao di\u1ec7n l\u1eafp \u0111\u1eb7t trung t\u00e2m<\/h3>\n<p data-start=\"2372\" data-end=\"2415\">C\u1ea5u tr\u00fac trung t\u00e2m \u0111\u01b0\u1ee3c khoan ch\u00ednh x\u00e1c \u0111\u1ea3m b\u1ea3o:<\/p>\n<ul data-start=\"2416\" data-end=\"2541\">\n<li data-section-id=\"1prbs8w\" data-start=\"2416\" data-end=\"2441\">C\u00e1ch l\u1eafp tr\u1ee5c \u1ed5n \u0111\u1ecbnh<\/li>\n<li data-section-id=\"cemghk\" data-start=\"2442\" data-end=\"2483\">S\u1ef1 c\u0103n ch\u1ec9nh ch\u00ednh x\u00e1c trong c\u00e1c h\u1ec7 th\u1ed1ng l\u00f2 nung<\/li>\n<li data-section-id=\"pxfn4\" data-start=\"2484\" data-end=\"2541\">Kh\u1ea3 n\u0103ng t\u01b0\u01a1ng th\u00edch v\u1edbi thi\u1ebft b\u1ecb x\u1eed l\u00fd t\u1ea5m wafer t\u1ef1 \u0111\u1ed9ng<\/li>\n<\/ul>\n<hr data-start=\"2543\" data-end=\"2546\" \/>\n<h3 data-section-id=\"gqycxw\" data-start=\"2548\" data-end=\"2573\">V\u00f2ng ngo\u00e0i gia c\u1ed1<\/h3>\n<ul data-start=\"2574\" data-end=\"2688\">\n<li data-section-id=\"17dniqy\" data-start=\"2574\" data-end=\"2605\">T\u0103ng c\u01b0\u1eddng s\u1ef1 c\u00e2n b\u1eb1ng c\u1ea5u tr\u00fac<\/li>\n<li data-section-id=\"yaoils\" data-start=\"2606\" data-end=\"2639\">T\u0103ng c\u01b0\u1eddng kh\u1ea3 n\u0103ng ch\u1ed1ng rung<\/li>\n<li data-section-id=\"16bzx41\" data-start=\"2640\" data-end=\"2688\">T\u0103ng c\u01b0\u1eddng \u0111\u1ed9 b\u1ec1n c\u1ee7a m\u00e9p trong qu\u00e1 tr\u00ecnh v\u1eadn h\u00e0nh<\/li>\n<\/ul>\n<hr data-start=\"2690\" data-end=\"2693\" \/>\n<h2 data-section-id=\"rb24ym\" data-start=\"2695\" data-end=\"2714\">C\u00e1c l\u1ef1a ch\u1ecdn v\u1eadt li\u1ec7u<\/h2>\n<h3 data-section-id=\"87v3o9\" data-start=\"2716\" data-end=\"2749\">Carbide silic \u0111\u01b0\u1ee3c t\u1ed5ng h\u1ee3p b\u1eb1ng ph\u01b0\u01a1ng ph\u00e1p h\u00f3a h\u1ecdc t\u1eeb pha kh\u00ed (CVD SiC)<\/h3>\n<ul data-start=\"2750\" data-end=\"2880\">\n<li data-section-id=\"1qjlbs6\" data-start=\"2750\" data-end=\"2771\">\u0110\u1ed9 tinh khi\u1ebft c\u1ef1c cao<\/li>\n<li data-section-id=\"ujmjxb\" data-start=\"2772\" data-end=\"2803\">M\u1ee9c \u0111\u1ed9 \u00f4 nhi\u1ec5m c\u1ef1c k\u1ef3 th\u1ea5p<\/li>\n<li data-section-id=\"1529x9w\" data-start=\"2804\" data-end=\"2833\">Ch\u1ea5t l\u01b0\u1ee3ng b\u1ec1 m\u1eb7t tuy\u1ec7t v\u1eddi<\/li>\n<li data-section-id=\"3atv6m\" data-start=\"2834\" data-end=\"2880\">R\u1ea5t ph\u00f9 h\u1ee3p cho c\u00e1c quy tr\u00ecnh s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn ti\u00ean ti\u1ebfn<\/li>\n<\/ul>\n<hr data-start=\"2882\" data-end=\"2885\" \/>\n<h3 data-section-id=\"gwj4n0\" data-start=\"2887\" data-end=\"2922\">Cacbua silic nung k\u1ebft (SSiC)<\/h3>\n<ul data-start=\"2923\" data-end=\"3068\">\n<li data-section-id=\"16na2wg\" data-start=\"2923\" data-end=\"2952\">\u0110\u1ed9 b\u1ec1n cao v\u00e0 m\u1eadt \u0111\u1ed9 cao<\/li>\n<li data-section-id=\"v14n1q\" data-start=\"2953\" data-end=\"2982\">Kh\u1ea3 n\u0103ng ch\u1ed1ng m\u00e0i m\u00f2n tuy\u1ec7t v\u1eddi<\/li>\n<li data-section-id=\"1s1u32c\" data-start=\"2983\" data-end=\"3015\">Ho\u1ea1t \u0111\u1ed9ng \u1ed5n \u0111\u1ecbnh trong \u0111i\u1ec1u ki\u1ec7n kh\u1eafc nghi\u1ec7t<\/li>\n<li data-section-id=\"1586k58\" data-start=\"3016\" data-end=\"3068\">Ph\u00f9 h\u1ee3p v\u1edbi c\u00e1c h\u1ec7 th\u1ed1ng c\u00f4ng nghi\u1ec7p ho\u1ea1t \u0111\u1ed9ng \u1edf nhi\u1ec7t \u0111\u1ed9 cao<\/li>\n<\/ul>\n<hr data-start=\"3070\" data-end=\"3073\" \/>\n<h3 data-section-id=\"129y1qt\" data-start=\"3075\" data-end=\"3106\">SiC li\u00ean k\u1ebft ph\u1ea3n \u1ee9ng (RBSiC)<\/h3>\n<ul data-start=\"3107\" data-end=\"3214\">\n<li data-section-id=\"rz6j8a\" data-start=\"3107\" data-end=\"3134\">Gi\u1ea3i ph\u00e1p ti\u1ebft ki\u1ec7m chi ph\u00ed<\/li>\n<li data-section-id=\"dvvzgf\" data-start=\"3135\" data-end=\"3168\">Kh\u1ea3 n\u0103ng ch\u1ecbu s\u1ed1c nhi\u1ec7t t\u1ed1t<\/li>\n<li data-section-id=\"ag3lnk\" data-start=\"3169\" data-end=\"3214\">Ph\u00f9 h\u1ee3p cho c\u00e1c \u1ee9ng d\u1ee5ng c\u00f4ng nghi\u1ec7p quy m\u00f4 l\u1edbn<\/li>\n<\/ul>\n<hr data-start=\"3216\" data-end=\"3219\" \/>\n<h2 data-section-id=\"1cgu054\" data-start=\"3221\" data-end=\"3248\">Th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/h2>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"3250\" data-end=\"3636\">\n<thead data-start=\"3250\" data-end=\"3274\">\n<tr data-start=\"3250\" data-end=\"3274\">\n<th class=\"last:pe-10\" data-start=\"3250\" data-end=\"3257\" data-col-size=\"sm\">M\u1eb7t h\u00e0ng<\/th>\n<th class=\"last:pe-10\" data-start=\"3257\" data-end=\"3274\" data-col-size=\"sm\">Th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"3299\" data-end=\"3636\">\n<tr data-start=\"3299\" data-end=\"3336\">\n<td data-start=\"3299\" data-end=\"3310\" data-col-size=\"sm\">Ch\u1ea5t li\u1ec7u<\/td>\n<td data-start=\"3310\" data-end=\"3336\" data-col-size=\"sm\">CVD SiC \/ SSiC \/ RBSiC<\/td>\n<\/tr>\n<tr data-start=\"3337\" data-end=\"3361\">\n<td data-start=\"3337\" data-end=\"3346\" data-col-size=\"sm\">S\u1ef1 tinh khi\u1ebft<\/td>\n<td data-start=\"3346\" data-end=\"3361\" data-col-size=\"sm\">L\u00ean \u0111\u1ebfn 99,91%<\/td>\n<\/tr>\n<tr data-start=\"3362\" data-end=\"3398\">\n<td data-start=\"3362\" data-end=\"3386\" data-col-size=\"sm\">Nhi\u1ec7t \u0111\u1ed9 ho\u1ea1t \u0111\u1ed9ng<\/td>\n<td data-start=\"3386\" data-end=\"3398\" data-col-size=\"sm\">\u2264 1600\u00b0C<\/td>\n<\/tr>\n<tr data-start=\"3399\" data-end=\"3428\">\n<td data-start=\"3399\" data-end=\"3409\" data-col-size=\"sm\">M\u1eadt \u0111\u1ed9<\/td>\n<td data-start=\"3409\" data-end=\"3428\" data-col-size=\"sm\">2,3 \u2013 3,9 g\/cm\u00b3<\/td>\n<\/tr>\n<tr data-start=\"3429\" data-end=\"3469\">\n<td data-start=\"3429\" data-end=\"3456\" data-col-size=\"sm\">Kh\u1ea3 n\u0103ng ch\u1ecbu s\u1ed1c nhi\u1ec7t<\/td>\n<td data-start=\"3456\" data-end=\"3469\" data-col-size=\"sm\">Tuy\u1ec7t v\u1eddi<\/td>\n<\/tr>\n<tr data-start=\"3470\" data-end=\"3518\">\n<td data-start=\"3470\" data-end=\"3487\" data-col-size=\"sm\">B\u1ec1 m\u1eb7t ho\u00e0n thi\u1ec7n<\/td>\n<td data-start=\"3487\" data-end=\"3518\" data-col-size=\"sm\">M\u00e0i ch\u00ednh x\u00e1c \/ \u0110\u00e1nh b\u00f3ng<\/td>\n<\/tr>\n<tr data-start=\"3519\" data-end=\"3560\">\n<td data-start=\"3519\" data-end=\"3527\" data-col-size=\"sm\">H\u00ecnh d\u1ea1ng<\/td>\n<td data-start=\"3527\" data-end=\"3560\" data-col-size=\"sm\">T\u00f9y ch\u1ec9nh (H\u00ecnh tr\u00f2n \/ V\u00f2ng \/ T\u1ea5m)<\/td>\n<\/tr>\n<tr data-start=\"3561\" data-end=\"3588\">\n<td data-start=\"3561\" data-end=\"3568\" data-col-size=\"sm\">K\u00edch th\u01b0\u1edbc<\/td>\n<td data-start=\"3568\" data-end=\"3588\" data-col-size=\"sm\">C\u00f3 th\u1ec3 \u0111\u1eb7t h\u00e0ng theo y\u00eau c\u1ea7u<\/td>\n<\/tr>\n<tr data-start=\"3589\" data-end=\"3636\">\n<td data-start=\"3589\" data-end=\"3603\" data-col-size=\"sm\">\u1ee8ng d\u1ee5ng<\/td>\n<td data-start=\"3603\" data-end=\"3636\" data-col-size=\"sm\">B\u00e1n d\u1eabn \/ CVD \/ L\u00f2 nung<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"3638\" data-end=\"3641\" \/>\n<h2 data-section-id=\"mu966k\" data-start=\"3643\" data-end=\"3658\">\u1ee8ng d\u1ee5ng<\/h2>\n<h3 data-section-id=\"1eipr13\" data-start=\"3660\" data-end=\"3686\">Ng\u00e0nh c\u00f4ng nghi\u1ec7p b\u00e1n d\u1eabn<\/h3>\n<ul data-start=\"3687\" data-end=\"3849\">\n<li data-section-id=\"13x15us\" data-start=\"3687\" data-end=\"3728\">Khay \u0111\u1ef1ng t\u1ea5m wafer cho h\u1ec7 th\u1ed1ng CVD \/ PECVD<\/li>\n<li data-section-id=\"1ox36e0\" data-start=\"3729\" data-end=\"3774\">C\u00e1c qu\u00e1 tr\u00ecnh khu\u1ebfch t\u00e1n, oxy h\u00f3a v\u00e0 \u1ee7<\/li>\n<li data-section-id=\"1t8nanb\" data-start=\"3775\" data-end=\"3811\">H\u1ec7 th\u1ed1ng RTP v\u00e0 h\u1ec7 th\u1ed1ng ph\u00e1t tri\u1ec3n l\u1edbp ph\u1ee7<\/li>\n<li data-section-id=\"1jzl031\" data-start=\"3812\" data-end=\"3849\">Khay chuy\u1ec3n v\u00e0 x\u1eed l\u00fd t\u1ea5m wafer<\/li>\n<\/ul>\n<hr data-start=\"3851\" data-end=\"3854\" \/>\n<h3 data-section-id=\"l1oj08\" data-start=\"3856\" data-end=\"3881\">\u0110\u00e8n LED &amp; Quang \u0111i\u1ec7n t\u1eed<\/h3>\n<ul data-start=\"3882\" data-end=\"3982\">\n<li data-section-id=\"dgfruo\" data-start=\"3882\" data-end=\"3911\">Ch\u1ebf bi\u1ebfn t\u1ea5m wafer sapphire<\/li>\n<li data-section-id=\"fwvbk7\" data-start=\"3912\" data-end=\"3943\">H\u1ec7 th\u1ed1ng v\u1eadn chuy\u1ec3n cho qu\u00e1 tr\u00ecnh epitaxy LED<\/li>\n<li data-section-id=\"1gl4kjt\" data-start=\"3944\" data-end=\"3982\">Gi\u00e1 \u0111\u1ee1 ch\u1ea5t n\u1ec1n ch\u1ecbu nhi\u1ec7t \u0111\u1ed9 cao<\/li>\n<\/ul>\n<hr data-start=\"3984\" data-end=\"3987\" \/>\n<h3 data-section-id=\"480g89\" data-start=\"3989\" data-end=\"4018\">L\u00f2 ch\u00e2n kh\u00f4ng v\u00e0 l\u00f2 nhi\u1ec7t<\/h3>\n<ul data-start=\"4019\" data-end=\"4115\">\n<li data-section-id=\"kqy2l\" data-start=\"4019\" data-end=\"4055\">Khay nung k\u1ebft nhi\u1ec7t \u0111\u1ed9 cao<\/li>\n<li data-section-id=\"jgks7q\" data-start=\"4056\" data-end=\"4083\">Gi\u00e1 \u0111\u1ee1 l\u00f2 ch\u00e2n kh\u00f4ng<\/li>\n<li data-section-id=\"1c2tpui\" data-start=\"4084\" data-end=\"4115\">D\u1ee5ng c\u1ee5 gia c\u00f4ng nhi\u1ec7t<\/li>\n<\/ul>\n<hr data-start=\"4117\" data-end=\"4120\" \/>\n<h3 data-section-id=\"1owf0zc\" data-start=\"4122\" data-end=\"4148\">S\u1ea3n xu\u1ea5t ti\u00ean ti\u1ebfn<\/h3>\n<ul data-start=\"4149\" data-end=\"4255\">\n<li data-section-id=\"odfyg7\" data-start=\"4149\" data-end=\"4181\">Ch\u1ebf t\u1ea1o g\u1ed1m s\u1ee9 ch\u00ednh x\u00e1c<\/li>\n<li data-section-id=\"1kui91r\" data-start=\"4182\" data-end=\"4215\">Thi\u1ebft b\u1ecb v\u00e0 gi\u00e1 \u0111\u1ee1 cho h\u1ec7 th\u1ed1ng t\u1ef1 \u0111\u1ed9ng h\u00f3a<\/li>\n<li data-section-id=\"135k87d\" data-start=\"4216\" data-end=\"4255\">N\u1ec1n t\u1ea3ng c\u01a1 kh\u00ed c\u00f3 \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh cao<\/li>\n<\/ul>\n<hr data-start=\"4257\" data-end=\"4260\" \/>\n<h2 data-section-id=\"dysc5y\" data-start=\"4262\" data-end=\"4283\"><img decoding=\"async\" class=\"wp-image-2098 alignright\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/CVDSSiC-Silicon-Carbide-Tray-For-Semiconductor-Wafer-Processing-1-300x300.png\" alt=\"\" width=\"276\" height=\"276\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/CVDSSiC-Silicon-Carbide-Tray-For-Semiconductor-Wafer-Processing-1-300x300.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/CVDSSiC-Silicon-Carbide-Tray-For-Semiconductor-Wafer-Processing-1-150x150.png 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/CVDSSiC-Silicon-Carbide-Tray-For-Semiconductor-Wafer-Processing-1-768x768.png 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/CVDSSiC-Silicon-Carbide-Tray-For-Semiconductor-Wafer-Processing-1-12x12.png 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/CVDSSiC-Silicon-Carbide-Tray-For-Semiconductor-Wafer-Processing-1-600x600.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/CVDSSiC-Silicon-Carbide-Tray-For-Semiconductor-Wafer-Processing-1-100x100.png 100w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/CVDSSiC-Silicon-Carbide-Tray-For-Semiconductor-Wafer-Processing-1.png 1000w\" sizes=\"(max-width: 276px) 100vw, 276px\" \/>\u01afu \u0111i\u1ec3m c\u1ee7a s\u1ea3n ph\u1ea9m<\/h2>\n<ul data-start=\"4285\" data-end=\"4537\">\n<li data-section-id=\"an6nuo\" data-start=\"4285\" data-end=\"4326\">Kh\u1ea3 n\u0103ng ch\u1ecbu nhi\u1ec7t \u0111\u1ed9 cao tuy\u1ec7t v\u1eddi<\/li>\n<li data-section-id=\"1rm14qx\" data-start=\"4327\" data-end=\"4360\">\u0110\u1ed9 d\u1eabn nhi\u1ec7t v\u01b0\u1ee3t tr\u1ed9i<\/li>\n<li data-section-id=\"wx5di6\" data-start=\"4361\" data-end=\"4391\">\u0110\u1ed9 \u1ed5n \u0111\u1ecbnh cao v\u1ec1 k\u00edch th\u01b0\u1edbc<\/li>\n<li data-section-id=\"ymf61l\" data-start=\"4392\" data-end=\"4413\">Tu\u1ed5i th\u1ecd cao<\/li>\n<li data-section-id=\"1v5rrzz\" data-start=\"4414\" data-end=\"4440\">Nguy c\u01a1 \u00f4 nhi\u1ec5m th\u1ea5p<\/li>\n<li data-section-id=\"ddezgg\" data-start=\"4441\" data-end=\"4472\">Kh\u1ea3 n\u0103ng ch\u1ed1ng \u0103n m\u00f2n cao<\/li>\n<li data-section-id=\"xmyntv\" data-start=\"4473\" data-end=\"4507\">T\u01b0\u01a1ng th\u00edch v\u1edbi c\u00e1c h\u1ec7 th\u1ed1ng ch\u00e2n kh\u00f4ng<\/li>\n<li data-section-id=\"1ijrpkq\" data-start=\"4508\" data-end=\"4537\">Thi\u1ebft k\u1ebf c\u00f3 th\u1ec3 t\u00f9y ch\u1ec9nh ho\u00e0n to\u00e0n<\/li>\n<\/ul>\n<hr data-start=\"4539\" data-end=\"4542\" \/>\n<h2 data-section-id=\"1lwg0so\" data-start=\"4544\" data-end=\"4571\"><img decoding=\"async\" class=\"wp-image-2096 alignright\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/CVDSSiC-Silicon-Carbide-Tray-For-Semiconductor-Wafer-Processing-3-300x300.png\" alt=\"\" width=\"280\" height=\"280\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/CVDSSiC-Silicon-Carbide-Tray-For-Semiconductor-Wafer-Processing-3-300x300.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/CVDSSiC-Silicon-Carbide-Tray-For-Semiconductor-Wafer-Processing-3-150x150.png 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/CVDSSiC-Silicon-Carbide-Tray-For-Semiconductor-Wafer-Processing-3-768x768.png 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/CVDSSiC-Silicon-Carbide-Tray-For-Semiconductor-Wafer-Processing-3-12x12.png 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/CVDSSiC-Silicon-Carbide-Tray-For-Semiconductor-Wafer-Processing-3-600x600.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/CVDSSiC-Silicon-Carbide-Tray-For-Semiconductor-Wafer-Processing-3-100x100.png 100w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/CVDSSiC-Silicon-Carbide-Tray-For-Semiconductor-Wafer-Processing-3.png 1000w\" sizes=\"(max-width: 280px) 100vw, 280px\" \/>Kh\u1ea3 n\u0103ng t\u00f9y ch\u1ec9nh<\/h2>\n<p data-start=\"4573\" data-end=\"4649\">Ch\u00fang t\u00f4i h\u1ed7 tr\u1ee3 t\u00f9y ch\u1ec9nh ho\u00e0n to\u00e0n theo b\u1ea3n v\u1ebd ho\u1eb7c y\u00eau c\u1ea7u \u1ee9ng d\u1ee5ng:<\/p>\n<ul data-start=\"4651\" data-end=\"4883\">\n<li data-section-id=\"1i7bvpn\" data-start=\"4651\" data-end=\"4689\">T\u00f9y ch\u1ec9nh \u0111\u01b0\u1eddng k\u00ednh \/ \u0111\u1ed9 d\u00e0y<\/li>\n<li data-section-id=\"dmyogn\" data-start=\"4690\" data-end=\"4720\">T\u1ed1i \u01b0u h\u00f3a h\u00ecnh h\u1ecdc khe<\/li>\n<li data-section-id=\"19luai6\" data-start=\"4721\" data-end=\"4749\">L\u1ed7 l\u1eafp \u0111\u1eb7t ch\u00ednh x\u00e1c<\/li>\n<li data-section-id=\"r5ngym\" data-start=\"4750\" data-end=\"4781\">\u0110\u00e1nh b\u00f3ng b\u1ec1 m\u1eb7t \/ m\u00e0i nh\u00e1m<\/li>\n<li data-section-id=\"c4ihff\" data-start=\"4782\" data-end=\"4818\">Gia c\u00f4ng t\u1ea5m wafer si\u00eau m\u1ecfng<\/li>\n<li data-section-id=\"1lf2kpf\" data-start=\"4819\" data-end=\"4853\">L\u1ef1a ch\u1ecdn v\u1eadt li\u1ec7u c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao<\/li>\n<li data-section-id=\"881e6f\" data-start=\"4854\" data-end=\"4883\">Thi\u1ebft k\u1ebf k\u1ebft c\u1ea5u ph\u1ee9c t\u1ea1p<\/li>\n<\/ul>\n<p data-start=\"4885\" data-end=\"4956\">Cung c\u1ea5p d\u1ecbch v\u1ee5 OEM v\u00e0 ODM cho c\u00e1c nh\u00e0 s\u1ea3n xu\u1ea5t thi\u1ebft b\u1ecb b\u00e1n d\u1eabn.<\/p>\n<hr data-start=\"4958\" data-end=\"4961\" \/>\n<h2 data-section-id=\"1hryhf7\" data-start=\"4963\" data-end=\"4969\">C\u00e2u h\u1ecfi th\u01b0\u1eddng g\u1eb7p<\/h2>\n<h3 data-section-id=\"1rw8tyo\" data-start=\"4971\" data-end=\"5025\">C\u00e2u h\u1ecfi 1: Khay \u0111\u1ef1ng t\u1ea5m wafer cacbua silic \u0111\u01b0\u1ee3c d\u00f9ng \u0111\u1ec3 l\u00e0m g\u00ec?<\/h3>\n<p data-start=\"5026\" data-end=\"5173\">N\u00f3 \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng \u0111\u1ec3 \u0111\u1ee1 v\u00e0 v\u1eadn chuy\u1ec3n c\u00e1c t\u1ea5m wafer trong c\u00e1c quy tr\u00ecnh s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn nh\u01b0 CVD, PECVD, khu\u1ebfch t\u00e1n, oxy h\u00f3a v\u00e0 \u1ee7 nhi\u1ec7t \u0111\u1ed9 cao.<\/p>\n<hr data-start=\"5175\" data-end=\"5178\" \/>\n<h3 data-section-id=\"8sm145\" data-start=\"5180\" data-end=\"5230\">C\u00e2u h\u1ecfi 2: T\u1ea1i sao l\u1ea1i s\u1eed d\u1ee5ng SiC thay v\u00ec th\u1ea1ch anh ho\u1eb7c than ch\u00ec?<\/h3>\n<p data-start=\"5231\" data-end=\"5244\">SiC cung c\u1ea5p:<\/p>\n<ul data-start=\"5245\" data-end=\"5391\">\n<li data-section-id=\"66suke\" data-start=\"5245\" data-end=\"5278\">Kh\u1ea3 n\u0103ng ch\u1ecbu nhi\u1ec7t \u0111\u1ed9 cao h\u01a1n<\/li>\n<li data-section-id=\"1k27992\" data-start=\"5279\" data-end=\"5309\">\u0110\u1ed9 b\u1ec1n c\u01a1 h\u1ecdc cao h\u01a1n<\/li>\n<li data-section-id=\"1y67fsp\" data-start=\"5310\" data-end=\"5337\">H\u1ec7 s\u1ed1 gi\u00e3n n\u1edf nhi\u1ec7t th\u1ea5p h\u01a1n<\/li>\n<li data-section-id=\"1kygjim\" data-start=\"5338\" data-end=\"5361\">Tu\u1ed5i th\u1ecd cao h\u01a1n<\/li>\n<li data-section-id=\"d0e53t\" data-start=\"5362\" data-end=\"5391\">\u0110\u1ed9 \u1ed5n \u0111\u1ecbnh h\u00f3a h\u1ecdc cao h\u01a1n<\/li>\n<\/ul>\n<hr data-start=\"5393\" data-end=\"5396\" \/>\n<h3 data-section-id=\"c1126k\" data-start=\"5398\" data-end=\"5433\">C\u00e2u h\u1ecfi 3: C\u00f3 th\u1ec3 t\u00f9y ch\u1ec9nh khay \u0111\u01b0\u1ee3c kh\u00f4ng?<\/h3>\n<p data-start=\"5434\" data-end=\"5527\">\u0110\u00fang v\u1eady. Ch\u00fang t\u00f4i cung c\u1ea5p d\u1ecbch v\u1ee5 t\u00f9y ch\u1ec9nh to\u00e0n di\u1ec7n, bao g\u1ed3m k\u00edch th\u01b0\u1edbc, c\u1ea5u tr\u00fac, \u0111\u1ed9 d\u00e0y v\u00e0 thi\u1ebft k\u1ebf l\u1eafp \u0111\u1eb7t.<\/p>\n<hr data-start=\"5529\" data-end=\"5532\" \/>\n<h3 data-section-id=\"4sy20p\" data-start=\"5534\" data-end=\"5587\">C\u00e2u h\u1ecfi 4: S\u1ea3n ph\u1ea9m n\u00e0y c\u00f3 ph\u00f9 h\u1ee3p \u0111\u1ec3 l\u00e0m n\u00f3ng v\u00e0 l\u00e0m l\u1ea1nh nhanh kh\u00f4ng?<\/h3>\n<p data-start=\"5588\" data-end=\"5686\">\u0110\u00fang v\u1eady. SiC c\u00f3 kh\u1ea3 n\u0103ng ch\u1ecbu s\u1ed1c nhi\u1ec7t r\u1ea5t t\u1ed1t, n\u00ean r\u1ea5t ph\u00f9 h\u1ee3p cho c\u00e1c quy tr\u00ecnh thay \u0111\u1ed5i nhi\u1ec7t \u0111\u1ed9 l\u1eb7p \u0111i l\u1eb7p l\u1ea1i.<\/p>","protected":false},"excerpt":{"rendered":"<p data-start=\"199\" data-end=\"404\">Khay \u0111\u1ef1ng t\u1ea5m wafer cacbua silic l\u00e0 m\u1ed9t gi\u00e1 \u0111\u1ee1 g\u1ed1m s\u1ee9 ch\u00ednh x\u00e1c, hi\u1ec7u su\u1ea5t cao, \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf d\u00e0nh cho qu\u00e1 tr\u00ecnh x\u1eed l\u00fd t\u1ea5m wafer b\u00e1n d\u1eabn, c\u00e1c h\u1ec7 th\u1ed1ng CVD\/PECVD, l\u00f2 ch\u00e2n kh\u00f4ng v\u00e0 c\u00e1c m\u00f4i tr\u01b0\u1eddng c\u00f4ng nghi\u1ec7p nhi\u1ec7t \u0111\u1ed9 cao.<\/p>\n<p data-start=\"406\" data-end=\"666\">\u0110\u01b0\u1ee3c ch\u1ebf t\u1ea1o t\u1eeb SiC CVD ho\u1eb7c SSiC (cacbua silic nung k\u1ebft) c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao, khay n\u00e0y mang l\u1ea1i \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh nhi\u1ec7t, \u0111\u1ed9 b\u1ec1n c\u01a1 h\u1ecdc v\u00e0 kh\u1ea3 n\u0103ng ch\u1ed1ng \u0103n m\u00f2n h\u00f3a h\u1ecdc v\u01b0\u1ee3t tr\u1ed9i, \u0111\u1ea3m b\u1ea3o vi\u1ec7c x\u1eed l\u00fd t\u1ea5m wafer \u1ed5n \u0111\u1ecbnh v\u00e0 hi\u1ec7u su\u1ea5t quy tr\u00ecnh nh\u1ea5t qu\u00e1n trong c\u00e1c \u0111i\u1ec1u ki\u1ec7n kh\u1eafc nghi\u1ec7t.<\/p>","protected":false},"featured_media":2097,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center 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