{"id":2041,"date":"2026-05-08T05:45:52","date_gmt":"2026-05-08T05:45:52","guid":{"rendered":"https:\/\/www.xkh-ceramics.com\/?post_type=product&p=2041"},"modified":"2026-05-08T05:45:52","modified_gmt":"2026-05-08T05:45:52","slug":"sic-ceramic-end-effector-for-precision-wafer-handling-in-semiconductor-equipment","status":"publish","type":"product","link":"https:\/\/www.xkh-ceramics.com\/vi\/product\/sic-ceramic-end-effector-for-precision-wafer-handling-in-semiconductor-equipment\/","title":{"rendered":"B\u1ed9 ph\u1eadn \u0111\u1ea7u cu\u1ed1i b\u1eb1ng g\u1ed1m SiC d\u00f9ng \u0111\u1ec3 x\u1eed l\u00fd t\u1ea5m wafer ch\u00ednh x\u00e1c trong thi\u1ebft b\u1ecb b\u00e1n d\u1eabn"},"content":{"rendered":"

\"\"C\u00e1i B\u1ed9 ph\u1eadn \u0111\u1ea7u cu\u1ed1i b\u1eb1ng g\u1ed1m SiC<\/strong> l\u00e0 m\u1ed9t b\u1ed9 ph\u1eadn x\u1eed l\u00fd t\u1ea5m wafer hi\u1ec7u su\u1ea5t cao, \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf d\u00e0nh cho c\u00e1c h\u1ec7 th\u1ed1ng t\u1ef1 \u0111\u1ed9ng h\u00f3a b\u00e1n d\u1eabn v\u00e0 h\u1ec7 th\u1ed1ng robot ch\u00ednh x\u00e1c. S\u1ea3n ph\u1ea9m \u0111\u01b0\u1ee3c ch\u1ebf t\u1ea1o t\u1eeb g\u1ed1m cacbua silic (SiC) c\u00f3 \u0111\u1ed9 tinh khi\u1ebft c\u1ef1c cao, mang l\u1ea1i \u0111\u1ed9 b\u1ec1n c\u01a1 h\u1ecdc v\u01b0\u1ee3t tr\u1ed9i, t\u00ednh \u1ed5n \u0111\u1ecbnh nhi\u1ec7t v\u00e0 kh\u1ea3 n\u0103ng ch\u1ed1ng \u0103n m\u00f2n h\u00f3a h\u1ecdc trong c\u00e1c m\u00f4i tr\u01b0\u1eddng x\u1eed l\u00fd kh\u1eafc nghi\u1ec7t.<\/p>\n

So v\u1edbi c\u00e1c \u0111\u1ea7u c\u00f4ng c\u1ee5 truy\u1ec1n th\u1ed1ng l\u00e0m t\u1eeb nh\u00f4m, th\u00e9p kh\u00f4ng g\u1ec9 ho\u1eb7c th\u1ea1ch anh, B\u1ed9 ph\u1eadn \u0111\u1ea7u cu\u1ed1i b\u1eb1ng g\u1ed1m SiC<\/strong> gi\u00fap gi\u1ea3m \u0111\u00e1ng k\u1ec3 l\u01b0\u1ee3ng h\u1ea1t b\u1ee5i sinh ra, mang l\u1ea1i \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh k\u00edch th\u01b0\u1edbc v\u01b0\u1ee3t tr\u1ed9i v\u00e0 kh\u1ea3 n\u0103ng ch\u1ed1ng bi\u1ebfn d\u1ea1ng do nhi\u1ec7t tuy\u1ec7t v\u1eddi. S\u1ea3n ph\u1ea9m n\u00e0y \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i trong c\u00e1c h\u1ec7 th\u1ed1ng chuy\u1ec3n wafer, n\u01a1i \u0111\u1ed9 ch\u00ednh x\u00e1c, \u0111\u1ed9 s\u1ea1ch v\u00e0 \u0111\u1ed9 tin c\u1eady l\u00e0 nh\u1eefng y\u1ebfu t\u1ed1 then ch\u1ed1t.<\/p>\n

S\u1ea3n ph\u1ea9m n\u00e0y ph\u00f9 h\u1ee3p v\u1edbi c\u00e1c m\u00f4i tr\u01b0\u1eddng s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn ti\u00ean ti\u1ebfn, bao g\u1ed3m bu\u1ed3ng ch\u00e2n kh\u00f4ng, quy tr\u00ecnh plasma v\u00e0 thi\u1ebft b\u1ecb nhi\u1ec7t \u0111\u1ed9 cao.<\/p>\n

\n

Th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/h2>\n
\n
\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
T\u00e0i s\u1ea3n<\/th>\n\u0110\u01a1n v\u1ecb<\/th>\nGi\u00e1 tr\u1ecb<\/th>\n<\/tr>\n<\/thead>\n
C\u1ea5u tr\u00fac tinh th\u1ec3<\/td>\n\u2013<\/td>\nGiai \u0111o\u1ea1n \u03b2 c\u1ee7a FCC<\/td>\n<\/tr>\n
M\u1eadt \u0111\u1ed9<\/td>\ng\/cm\u00b3<\/td>\n3.21<\/td>\n<\/tr>\n
\u0110\u1ed9 tinh khi\u1ebft h\u00f3a h\u1ecdc<\/td>\n%<\/td>\n99.99995<\/td>\n<\/tr>\n
\u0110\u1ed9 c\u1ee9ng<\/td>\nHV<\/td>\n2500<\/td>\n<\/tr>\n
\u0110\u1ed9 b\u1ec1n u\u1ed1n<\/td>\nMPa<\/td>\n415<\/td>\n<\/tr>\n
H\u1ec7 s\u1ed1 \u0111\u00e0n h\u1ed3i c\u1ee7a Young<\/td>\nGPa<\/td>\n430<\/td>\n<\/tr>\n
\u0110\u1ed9 d\u1eabn nhi\u1ec7t<\/td>\nW\/m\u00b7K<\/td>\n300<\/td>\n<\/tr>\n
H\u1ec7 s\u1ed1 gi\u00e3n n\u1edf nhi\u1ec7t<\/td>\n10\u207b\u2076\/K<\/td>\n4.5<\/td>\n<\/tr>\n
Nhi\u1ec7t \u0111\u1ed9 ho\u1ea1t \u0111\u1ed9ng t\u1ed1i \u0111a<\/td>\n\u00b0C<\/td>\n2700<\/td>\n<\/tr>\n
N\u0103ng l\u01b0\u1ee3ng nhi\u1ec7t<\/td>\nJ\u00b7kg\u207b\u00b9\u00b7K\u207b\u00b9<\/td>\n640<\/td>\n<\/tr>\n
K\u00edch th\u01b0\u1edbc h\u1ea1t<\/td>\n\u03bcm<\/td>\n2\u201310<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n
\n

\"\"C\u00e1c t\u00ednh n\u0103ng ch\u00ednh<\/h2>\n

V\u1eadt li\u1ec7u c\u00f3 \u0111\u1ed9 tinh khi\u1ebft c\u1ef1c cao<\/strong>
\u0110\u1ea3m b\u1ea3o m\u1ee9c \u0111\u1ed9 \u00f4 nhi\u1ec5m h\u1ea1t \u1edf m\u1ee9c t\u1ed1i thi\u1ec3u trong m\u00f4i tr\u01b0\u1eddng ph\u00f2ng s\u1ea1ch.<\/p>\n

\u0110\u1ed9 \u1ed5n \u0111\u1ecbnh nhi\u1ec7t tuy\u1ec7t v\u1eddi<\/strong>
Duy tr\u00ec t\u00ednh to\u00e0n v\u1eb9n c\u1ea5u tr\u00fac trong \u0111i\u1ec1u ki\u1ec7n thay \u0111\u1ed5i nhi\u1ec7t \u0111\u1ed9 l\u1eb7p \u0111i l\u1eb7p l\u1ea1i v\u00e0 qu\u00e1 tr\u00ecnh x\u1eed l\u00fd \u1edf nhi\u1ec7t \u0111\u1ed9 cao.<\/p>\n

H\u1ec7 s\u1ed1 gi\u00e3n n\u1edf nhi\u1ec7t th\u1ea5p<\/strong>
\u0110\u1ea3m b\u1ea3o \u0111\u1ed9 ch\u00ednh x\u00e1c cao v\u1ec1 k\u00edch th\u01b0\u1edbc trong qu\u00e1 tr\u00ecnh chuy\u1ec3n wafer.<\/p>\n

\u0110\u1ed9 b\u1ec1n c\u01a1 h\u1ecdc cao<\/strong>
Ch\u1ed1ng n\u1ee9t g\u00e3y, m\u00e0i m\u00f2n v\u00e0 m\u1ecfi do s\u1eed d\u1ee5ng l\u00e2u d\u00e0i trong c\u00e1c h\u1ec7 th\u1ed1ng s\u1ea3n xu\u1ea5t li\u00ean t\u1ee5c.<\/p>\n

Kh\u1ea3 n\u0103ng ch\u1ed1ng h\u00f3a ch\u1ea5t<\/strong>
\u1ed4n \u0111\u1ecbnh trong huy\u1ebft t\u01b0\u01a1ng, kh\u00ed \u0103n m\u00f2n v\u00e0 m\u00f4i tr\u01b0\u1eddng ch\u00e2n kh\u00f4ng.<\/p>\n

B\u1ec1 m\u1eb7t c\u1ef1c k\u1ef3 m\u1ecbn m\u00e0ng<\/strong>
Gi\u1ea3m thi\u1ec3u tr\u1ea7y x\u01b0\u1edbc tr\u00ean t\u1ea5m wafer v\u00e0 n\u00e2ng cao an to\u00e0n khi thao t\u00e1c.<\/p>\n

Tu\u1ed5i th\u1ecd cao<\/strong>
\u0110\u01b0\u1ee3c thi\u1ebft k\u1ebf d\u00e0nh cho c\u00e1c h\u1ec7 th\u1ed1ng s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn c\u00f3 n\u0103ng su\u1ea5t cao.<\/p>\n

\n

Quy tr\u00ecnh s\u1ea3n xu\u1ea5t<\/h2>\n

C\u00e1i B\u1ed9 ph\u1eadn \u0111\u1ea7u cu\u1ed1i b\u1eb1ng g\u1ed1m SiC<\/strong> \u0111\u01b0\u1ee3c s\u1ea3n xu\u1ea5t b\u1eb1ng c\u00e1c k\u1ef9 thu\u1eadt c\u00f4ng ngh\u1ec7 g\u1ed1m s\u1ee9 ti\u00ean ti\u1ebfn.<\/p>\n

B\u1ed9t cacbua silic c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao \u0111\u01b0\u1ee3c l\u1ef1a ch\u1ecdn v\u00e0 ki\u1ec3m so\u00e1t ch\u1eb7t ch\u1ebd \u0111\u1ec3 \u0111\u1ea3m b\u1ea3o t\u00ednh \u0111\u1ed3ng nh\u1ea5t c\u1ee7a v\u1eadt li\u1ec7u.<\/p>\n

Qu\u00e1 tr\u00ecnh t\u1ea1o h\u00ecnh ch\u00ednh x\u00e1c \u0111\u01b0\u1ee3c th\u1ef1c hi\u1ec7n b\u1eb1ng ph\u01b0\u01a1ng ph\u00e1p \u00e9p \u0111\u1eb3ng \u00e1p l\u1ea1nh ho\u1eb7c \u00e9p phun \u0111\u1ec3 t\u1ea1o ra c\u00e1c h\u00ecnh d\u1ea1ng ph\u1ee9c t\u1ea1p.<\/p>\n

Qu\u00e1 tr\u00ecnh nung k\u1ebft \u1edf nhi\u1ec7t \u0111\u1ed9 cao tr\u00ean 2000\u00b0C \u0111\u1ea3m b\u1ea3o \u0111\u1ed9 \u0111\u1eb7c ho\u00e0n to\u00e0n v\u00e0 t\u00ednh \u1ed5n \u0111\u1ecbnh c\u1ea5u tr\u00fac.<\/p>\n

C\u00f4ng ngh\u1ec7 gia c\u00f4ng kim c\u01b0\u01a1ng CNC \u0111\u01b0\u1ee3c \u00e1p d\u1ee5ng \u0111\u1ec3 \u0111\u1ea1t \u0111\u01b0\u1ee3c \u0111\u1ed9 ch\u00ednh x\u00e1c \u1edf m\u1ee9c micromet v\u00e0 \u0111\u1ed9 ph\u1eb3ng \u0111\u1ea1t ti\u00eau chu\u1ea9n wafer.<\/p>\n

Qu\u00e1 tr\u00ecnh \u0111\u00e1nh b\u00f3ng v\u00e0 ki\u1ec3m tra cu\u1ed1i c\u00f9ng \u0111\u1ea3m b\u1ea3o tu\u00e2n th\u1ee7 c\u00e1c ti\u00eau chu\u1ea9n d\u00e0nh cho ng\u00e0nh b\u00e1n d\u1eabn.<\/p>\n

M\u1ed7i s\u1ea3n ph\u1ea9m \u0111\u1ec1u ph\u1ea3i tr\u1ea3i qua quy tr\u00ecnh ki\u1ec3m tra k\u00edch th\u01b0\u1edbc nghi\u00eam ng\u1eb7t, ki\u1ec3m tra ch\u1ea5t l\u01b0\u1ee3ng b\u1ec1 m\u1eb7t v\u00e0 \u0111\u00e1nh gi\u00e1 kh\u00f4ng ph\u00e1 h\u1ee7y tr\u01b0\u1edbc khi giao h\u00e0ng.<\/p>\n

\n

\u1ee8ng d\u1ee5ng<\/h2>\n

C\u00e1i B\u1ed9 ph\u1eadn \u0111\u1ea7u cu\u1ed1i b\u1eb1ng g\u1ed1m SiC<\/strong> \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i trong c\u00e1c h\u1ec7 th\u1ed1ng b\u00e1n d\u1eabn v\u00e0 t\u1ef1 \u0111\u1ed9ng h\u00f3a c\u00f3 \u0111\u1ed9 ch\u00ednh x\u00e1c cao.<\/p>\n

H\u1ec7 th\u1ed1ng chuy\u1ec3n wafer d\u00e0nh cho wafer 6 inch, 8 inch v\u00e0 12 inch<\/p>\n

H\u1ec7 th\u1ed1ng x\u1eed l\u00fd t\u1ea5m wafer b\u1eb1ng robot trong bu\u1ed3ng ch\u00e2n kh\u00f4ng<\/p>\n

Thi\u1ebft b\u1ecb CVD, ALD, kh\u1eafc v\u00e0 l\u1eafng \u0111\u1ecdng<\/p>\n

H\u1ec7 th\u1ed1ng x\u1ebfp d\u1ee1 t\u1ef1 \u0111\u1ed9ng FOUP v\u00e0 FOSB<\/p>\n

D\u00e2y chuy\u1ec1n s\u1ea3n xu\u1ea5t t\u1ef1 \u0111\u1ed9ng cho t\u1ea5m wafer trong ph\u00f2ng s\u1ea1ch<\/p>\n

H\u1ec7 th\u1ed1ng gia c\u00f4ng b\u1eb1ng laser v\u00e0 \u1ee7 nhi\u1ec7t<\/p>\n

\"\"<\/p>\n

\n

\u01afu \u0111i\u1ec3m so v\u1edbi c\u00e1c v\u1eadt li\u1ec7u truy\u1ec1n th\u1ed1ng<\/h2>\n

So v\u1edbi c\u00e1c b\u1ed9 ph\u1eadn \u0111\u1ea7u cu\u1ed1i b\u1eb1ng nh\u00f4m, g\u1ed1m SiC mang l\u1ea1i \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh nhi\u1ec7t cao h\u01a1n v\u00e0 lo\u1ea1i b\u1ecf nguy c\u01a1 nhi\u1ec5m b\u1ea9n kim lo\u1ea1i.<\/p>\n

So v\u1edbi th\u1ea1ch anh, v\u1eadt li\u1ec7u n\u00e0y c\u00f3 \u0111\u1ed9 b\u1ec1n c\u01a1 h\u1ecdc cao h\u01a1n v\u00e0 t\u1ea1o ra \u00edt h\u1ea1t b\u1ee5i h\u01a1n.<\/p>\n

So v\u1edbi th\u00e9p kh\u00f4ng g\u1ec9, v\u1eadt li\u1ec7u n\u00e0y ho\u1ea1t \u0111\u1ed9ng \u1ed5n \u0111\u1ecbnh h\u01a1n trong m\u00f4i tr\u01b0\u1eddng plasma v\u00e0 nhi\u1ec7t \u0111\u1ed9 cao.<\/p>\n

\n

C\u00e2u h\u1ecfi th\u01b0\u1eddng g\u1eb7p<\/h2>\n

T\u1ea1i sao n\u00ean ch\u1ecdn \u0111\u1ea7u hi\u1ec7u \u1ee9ng b\u1eb1ng g\u1ed1m SiC thay v\u00ec kim lo\u1ea1i ho\u1eb7c th\u1ea1ch anh?<\/strong>
G\u1ed1m SiC mang l\u1ea1i \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh nhi\u1ec7t v\u01b0\u1ee3t tr\u1ed9i, kh\u1ea3 n\u0103ng ch\u1ed1ng \u0103n m\u00f2n h\u00f3a h\u1ecdc cao v\u00e0 m\u1ee9c ph\u00e1t sinh h\u1ea1t c\u1ef1c th\u1ea5p, khi\u1ebfn n\u00f3 tr\u1edf th\u00e0nh v\u1eadt li\u1ec7u l\u00fd t\u01b0\u1edfng cho c\u00e1c quy tr\u00ecnh s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn ti\u00ean ti\u1ebfn.<\/p>\n

C\u00f3 th\u1ec3 t\u00f9y ch\u1ec9nh \u0111\u01b0\u1ee3c kh\u00f4ng?<\/strong>
\u0110\u00fang v\u1eady, ch\u00fang t\u00f4i h\u1ed7 tr\u1ee3 t\u00f9y ch\u1ec9nh to\u00e0n di\u1ec7n, bao g\u1ed3m h\u00ecnh h\u1ecdc, chi\u1ec1u d\u00e0i c\u00e1nh tay, giao di\u1ec7n l\u1eafp \u0111\u1eb7t v\u00e0 kh\u1ea3 n\u0103ng t\u01b0\u01a1ng th\u00edch v\u1edbi k\u00edch th\u01b0\u1edbc wafer.<\/p>\n

S\u1ea3n ph\u1ea9m n\u00e0y c\u00f3 ph\u00f9 h\u1ee3p v\u1edbi c\u00e1c h\u1ec7 th\u1ed1ng ch\u00e2n kh\u00f4ng v\u00e0 plasma kh\u00f4ng?<\/strong>
\u0110\u00fang v\u1eady, g\u1ed1m SiC c\u00f3 t\u00ednh tr\u01a1 v\u1ec1 m\u1eb7t h\u00f3a h\u1ecdc v\u00e0 ho\u1ea1t \u0111\u1ed9ng \u1ed5n \u0111\u1ecbnh trong m\u00f4i tr\u01b0\u1eddng ch\u00e2n kh\u00f4ng c\u1ef1c cao v\u00e0 m\u00f4i tr\u01b0\u1eddng plasma.<\/p>\n

Tu\u1ed5i th\u1ecd c\u1ee7a s\u1ea3n ph\u1ea9m l\u00e0 bao l\u00e2u?<\/strong>
S\u1ea3n ph\u1ea9m n\u00e0y c\u00f3 tu\u1ed5i th\u1ecd cao h\u01a1n \u0111\u00e1ng k\u1ec3 so v\u1edbi c\u00e1c \u0111\u1ea7u hi\u1ec7u \u1ee9ng b\u1eb1ng kim lo\u1ea1i ho\u1eb7c th\u1ea1ch anh th\u00f4ng th\u01b0\u1eddng trong \u0111i\u1ec1u ki\u1ec7n v\u1eadn h\u00e0nh ti\u00eau chu\u1ea9n.<\/p>\n

Qu\u00fd c\u00f4ng ty c\u00f3 cung c\u1ea5p b\u00e1o c\u00e1o ki\u1ec3m tra kh\u00f4ng?<\/strong>
V\u00e2ng, ch\u00fang t\u00f4i s\u1ebd cung c\u1ea5p b\u00e1o c\u00e1o k\u00edch th\u01b0\u1edbc, ch\u1ee9ng ch\u1ec9 v\u1eadt li\u1ec7u v\u00e0 t\u00e0i li\u1ec7u ki\u1ec3m tra ch\u1ea5t l\u01b0\u1ee3ng theo y\u00eau c\u1ea7u.<\/p>","protected":false},"excerpt":{"rendered":"

C\u00e1i B\u1ed9 ph\u1eadn \u0111\u1ea7u cu\u1ed1i b\u1eb1ng g\u1ed1m SiC<\/strong> l\u00e0 m\u1ed9t b\u1ed9 ph\u1eadn x\u1eed l\u00fd t\u1ea5m wafer hi\u1ec7u su\u1ea5t cao, \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf d\u00e0nh cho c\u00e1c h\u1ec7 th\u1ed1ng t\u1ef1 \u0111\u1ed9ng h\u00f3a b\u00e1n d\u1eabn v\u00e0 h\u1ec7 th\u1ed1ng robot ch\u00ednh x\u00e1c. S\u1ea3n ph\u1ea9m \u0111\u01b0\u1ee3c ch\u1ebf t\u1ea1o t\u1eeb g\u1ed1m cacbua silic (SiC) c\u00f3 \u0111\u1ed9 tinh khi\u1ebft c\u1ef1c cao, mang l\u1ea1i \u0111\u1ed9 b\u1ec1n c\u01a1 h\u1ecdc v\u01b0\u1ee3t tr\u1ed9i, t\u00ednh \u1ed5n \u0111\u1ecbnh nhi\u1ec7t v\u00e0 kh\u1ea3 n\u0103ng ch\u1ed1ng \u0103n m\u00f2n h\u00f3a h\u1ecdc trong c\u00e1c m\u00f4i tr\u01b0\u1eddng x\u1eed l\u00fd kh\u1eafc 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