{"id":2293,"date":"2026-05-22T03:54:59","date_gmt":"2026-05-22T03:54:59","guid":{"rendered":"https:\/\/www.xkh-ceramics.com\/?p=2293"},"modified":"2026-05-22T09:16:18","modified_gmt":"2026-05-22T09:16:18","slug":"manufacturing-challenges-of-complex-structured-ceramic-components-for-semiconductor-equipment","status":"publish","type":"post","link":"https:\/\/www.xkh-ceramics.com\/vi\/manufacturing-challenges-of-complex-structured-ceramic-components-for-semiconductor-equipment\/","title":{"rendered":"Nh\u1eefng th\u00e1ch th\u1ee9c trong s\u1ea3n xu\u1ea5t c\u00e1c b\u1ed9 ph\u1eadn g\u1ed1m c\u00f3 c\u1ea5u tr\u00fac ph\u1ee9c t\u1ea1p cho thi\u1ebft b\u1ecb b\u00e1n d\u1eabn"},"content":{"rendered":"

Trong l\u0129nh v\u1ef1c s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn ti\u00ean ti\u1ebfn, c\u00e1c m\u00f4-\u0111un quy tr\u00ecnh quan tr\u1ecdng nh\u01b0 kh\u1eafc plasma, l\u1eafng \u0111\u1ecdng h\u01a1i h\u00f3a h\u1ecdc (CVD) v\u00e0 c\u1ea5y ion ho\u1ea1t \u0111\u1ed9ng trong m\u00f4i tr\u01b0\u1eddng kh\u1eafc nghi\u1ec7t, bao g\u1ed3m plasma n\u0103ng l\u01b0\u1ee3ng cao, kh\u00ed \u0103n m\u00f2n, \u0111i\u1ec7n \u00e1p cao v\u00e0 chu k\u1ef3 nhi\u1ec7t thay \u0111\u1ed5i nhanh ch\u00f3ng. Nh\u1eefng \u0111i\u1ec1u ki\u1ec7n n\u00e0y \u0111\u1eb7t ra nh\u1eefng y\u00eau c\u1ea7u kh\u1eaft khe \u0111\u1ed1i v\u1edbi v\u1eadt li\u1ec7u k\u1ebft c\u1ea5u v\u1ec1 \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh \u0111i\u1ec7n m\u00f4i, kh\u1ea3 n\u0103ng ch\u1ed1ng \u0103n m\u00f2n, kh\u1ea3 n\u0103ng t\u01b0\u01a1ng th\u00edch nhi\u1ec7t v\u00e0 \u0111\u1ed9 tin c\u1eady v\u1ec1 k\u00edch th\u01b0\u1edbc trong d\u00e0i h\u1ea1n.<\/p>\n\n\n\n

G\u1ed1m k\u1ef9 thu\u1eadt cao c\u1ea5p<\/a>\u2014ch\u1eb3ng h\u1ea1n nh\u01b0 nh\u00f4m oxit (Al\u2082O\u2083), nitrua nh\u00f4m (AlN), cacbua silic (SiC) v\u00e0 nitrua silic (Si\u2083N\u2084)\u2014\u0111\u00e3 tr\u1edf n\u00ean kh\u00f4ng th\u1ec3 thi\u1ebfu nh\u1edd s\u1ef1 k\u1ebft h\u1ee3p tuy\u1ec7t v\u1eddi gi\u1eefa t\u00ednh \u1ed5n \u0111\u1ecbnh nhi\u1ec7t, \u0111i\u1ec7n v\u00e0 h\u00f3a h\u1ecdc. Tuy nhi\u00ean, s\u1ef1 ph\u00e1t tri\u1ec3n li\u00ean t\u1ee5c c\u1ee7a thi\u1ebft b\u1ecb b\u00e1n d\u1eabn theo h\u01b0\u1edbng thu nh\u1ecf v\u00e0 t\u00edch h\u1ee3p ch\u1ee9c n\u0103ng \u0111\u00e3 th\u00fac \u0111\u1ea9y c\u00e1c th\u00e0nh ph\u1ea7n g\u1ed1m chuy\u1ec3n t\u1eeb h\u00ecnh d\u1ea1ng \u0111\u01a1n gi\u1ea3n sang ki\u1ebfn tr\u00fac c\u1ef1c k\u1ef3 ph\u1ee9c t\u1ea1p, bao g\u1ed3m m\u1ea1ng l\u01b0\u1edbi k\u00eanh vi m\u00f4, m\u1ea3ng x\u1ed1p, c\u1ea5u tr\u00fac th\u00e0nh m\u1ecfng v\u00e0 b\u1ec1 m\u1eb7t \u0111a cong.<\/p>\n\n\n\n

Nh\u1eefng ph\u1ee9c t\u1ea1p v\u1ec1 m\u1eb7t h\u00ecnh h\u1ecdc n\u00e0y, k\u1ebft h\u1ee3p v\u1edbi t\u00ednh gi\u00f2n v\u1ed1n c\u00f3 v\u00e0 \u0111\u1ed9 b\u1ec1n g\u00e3y th\u1ea5p c\u1ee7a v\u1eadt li\u1ec7u g\u1ed1m, \u0111\u00e3 bi\u1ebfn qu\u00e1 tr\u00ecnh s\u1ea3n xu\u1ea5t th\u00e0nh m\u1ed9t th\u00e1ch th\u1ee9c k\u1ef9 thu\u1eadt \u0111a c\u1ea5p \u0111\u1ed9. B\u00e0i b\u00e1o n\u00e0y \u0111i\u1ec3m qua nh\u1eefng n\u00fat th\u1eaft k\u1ef9 thu\u1eadt ch\u00ednh v\u00e0 c\u00e1c c\u00f4ng ngh\u1ec7 h\u1ed7 tr\u1ee3 trong ba giai \u0111o\u1ea1n c\u1ed1t l\u00f5i: t\u1ea1o h\u00ecnh, nung k\u1ebft v\u00e0 gia c\u00f4ng ch\u00ednh x\u00e1c.<\/p>\n\n\n\n

\"\"<\/figure>\n\n\n\n

1. Gi\u1edbi thi\u1ec7u: T\u1eeb v\u1eadt li\u1ec7u ch\u1ee9c n\u0103ng \u0111\u1ebfn nh\u1eefng h\u1ea1n ch\u1ebf v\u1ec1 c\u1ea5u tr\u00fac<\/h2>\n\n\n\n

V\u1eadt li\u1ec7u g\u1ed1m \u0111\u01b0\u1ee3c c\u00f4ng nh\u1eadn r\u1ed9ng r\u00e3i nh\u1edd \u0111\u1ed9 c\u1ee9ng v\u01b0\u1ee3t tr\u1ed9i, m\u00f4-\u0111un \u0111\u00e0n h\u1ed3i cao, kh\u1ea3 n\u0103ng ch\u1ed1ng m\u00e0i m\u00f2n tuy\u1ec7t v\u1eddi v\u00e0 t\u00ednh tr\u01a1 h\u00f3a h\u1ecdc. Trong thi\u1ebft b\u1ecb b\u00e1n d\u1eabn, ch\u00fang th\u01b0\u1eddng \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng trong c\u00e1c b\u1ed9 k\u1eb9p t\u0129nh \u0111i\u1ec7n (ESC), \u0111\u1ea7u phun, v\u00f2ng \u0111i\u1ec1u ch\u1ec9nh ti\u00eau c\u1ef1, v\u00f2ng c\u00e1ch \u0111i\u1ec7n v\u00e0 v\u1ecf c\u1ea3m bi\u1ebfn.<\/p>\n\n\n\n

Tuy nhi\u00ean, khi ki\u1ebfn tr\u00fac thi\u1ebft b\u1ecb ng\u00e0y c\u00e0ng tr\u1edf n\u00ean ph\u1ee9c t\u1ea1p, c\u00e1c linh ki\u1ec7n g\u1ed1m kh\u00f4ng c\u00f2n ch\u1ec9 gi\u1edbi h\u1ea1n \u1edf d\u1ea1ng \u0111\u0129a, v\u00f2ng ho\u1eb7c kh\u1ed1i \u0111\u01a1n gi\u1ea3n n\u1eefa. Thay v\u00e0o \u0111\u00f3, ch\u00fang hi\u1ec7n nay \u0111\u00f2i h\u1ecfi:<\/p>\n\n\n\n

    \n
  • M\u1ea3ng l\u1ed7 si\u00eau nh\u1ecf m\u1eadt \u0111\u1ed9 cao<\/li>\n\n\n\n
  • C\u00e1c c\u1ea5u tr\u00fac r\u1ed7ng c\u00f3 th\u00e0nh m\u1ecfng<\/li>\n\n\n\n
  • C\u00e1c b\u1ec1 m\u1eb7t ph\u1ee9c t\u1ea1p kh\u00f4ng \u0111\u1ed1i x\u1ee9ng tr\u1ee5c<\/li>\n\n\n\n
  • C\u00e1c k\u00eanh d\u1eabn kh\u00ed ho\u1eb7c ch\u1ea5t l\u00e0m m\u00e1t t\u00edch h\u1ee3p<\/li>\n\n\n\n
  • Giao di\u1ec7n ch\u1ee9c n\u0103ng \u0111a c\u1ea5p<\/li>\n<\/ul>\n\n\n\n

    S\u1ef1 bi\u1ebfn \u0111\u1ed5i n\u00e0y l\u00e0m t\u0103ng \u0111\u00e1ng k\u1ec3 \u0111\u1ed9 kh\u00f3 trong qu\u00e1 tr\u00ecnh ch\u1ebf t\u1ea1o, b\u1edfi v\u00ec ngay c\u1ea3 nh\u1eefng s\u1ef1 ch\u00eanh l\u1ec7ch nh\u1ecf v\u1ec1 m\u1eadt \u0111\u1ed9 ho\u1eb7c s\u1ef1 kh\u00f4ng t\u01b0\u01a1ng th\u00edch v\u1ec1 nhi\u1ec7t trong qu\u00e1 tr\u00ecnh gia c\u00f4ng c\u0169ng c\u00f3 th\u1ec3 d\u1eabn \u0111\u1ebfn n\u1ee9t v\u1ee1, cong v\u00eanh ho\u1eb7c h\u1ecfng h\u00f3c nghi\u00eam tr\u1ecdng.<\/p>\n\n\n\n

    2. C\u00f4ng ngh\u1ec7 t\u1ea1o h\u00ecnh: H\u01b0\u1edbng t\u1edbi s\u1ea3n xu\u1ea5t g\u1ea7n h\u00ecnh d\u1ea1ng ho\u00e0n ch\u1ec9nh cho c\u00e1c c\u1ea5u tr\u00fac h\u00ecnh h\u1ecdc ph\u1ee9c t\u1ea1p<\/h2>\n\n\n\n

    Giai \u0111o\u1ea1n t\u1ea1o h\u00ecnh \u0111\u00f3ng vai tr\u00f2 quy\u1ebft \u0111\u1ecbnh trong vi\u1ec7c x\u00e1c \u0111\u1ecbnh h\u00ecnh d\u1ea1ng cu\u1ed1i c\u00f9ng v\u00e0 t\u00ednh \u0111\u1ed3ng nh\u1ea5t b\u00ean trong c\u1ee7a c\u00e1c chi ti\u1ebft g\u1ed1m. C\u00e1c quy tr\u00ecnh truy\u1ec1n th\u1ed1ng nh\u01b0 \u00e9p kh\u00f4 v\u00e0 \u0111\u00fac b\u00f9n ng\u00e0y c\u00e0ng b\u1ed9c l\u1ed9 nh\u1eefng h\u1ea1n ch\u1ebf do gi\u1edbi h\u1ea1n c\u1ee7a khu\u00f4n v\u00e0 s\u1ef1 ph\u00e2n b\u1ed1 m\u1eadt \u0111\u1ed9 kh\u00f4ng \u0111\u1ed3ng \u0111\u1ec1u c\u1ee7a ph\u00f4i g\u1ed1m.<\/p>\n\n\n\n

    2.1 \u0110\u00fac b\u1eb1ng gel (\u0110\u00fac phun gel)<\/h3>\n\n\n\n

    \u0110\u00fac gel l\u00e0 m\u1ed9t k\u1ef9 thu\u1eadt t\u1ea1o h\u00ecnh g\u1ea7n v\u1edbi h\u00ecnh d\u1ea1ng cu\u1ed1i c\u00f9ng, trong \u0111\u00f3 h\u1ed7n h\u1ee3p g\u1ed1m c\u00f3 \u0111\u1ed9 nh\u1edbt th\u1ea5p v\u00e0 h\u00e0m l\u01b0\u1ee3ng ch\u1ea5t r\u1eafn cao \u0111\u01b0\u1ee3c b\u01a1m v\u00e0o khu\u00f4n ch\u1ee9a c\u00e1c monome h\u1eefu c\u01a1, ch\u1ea5t li\u00ean k\u1ebft ch\u00e9o v\u00e0 ch\u1ea5t kh\u1edfi \u0111\u1ed9ng. Qu\u00e1 tr\u00ecnh tr\u00f9ng h\u1ee3p t\u1ea1i ch\u1ed7 t\u1ea1o th\u00e0nh m\u1ed9t m\u1ea1ng l\u01b0\u1edbi gel ba chi\u1ec1u gi\u00fap c\u1ed1 \u0111\u1ecbnh c\u00e1c h\u1ea1t g\u1ed1m m\u1ed9t c\u00e1ch \u0111\u1ed3ng \u0111\u1ec1u.<\/p>\n\n\n\n

    C\u00e1c \u01b0u \u0111i\u1ec3m ch\u00ednh bao g\u1ed3m:<\/p>\n\n\n\n

      \n
    • Gi\u1eef d\u00e1ng tuy\u1ec7t v\u1eddi v\u1edbi \u0111\u1ed9 bi\u1ebfn d\u1ea1ng khi s\u1ea5y \u1edf m\u1ee9c t\u1ed1i thi\u1ec3u<\/li>\n\n\n\n
    • Ph\u00e2n b\u1ed1 m\u1eadt \u0111\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u m\u00e0u xanh l\u00e1 c\u00e2y<\/li>\n\n\n\n
    • Ph\u00f9 h\u1ee3p v\u1edbi c\u00e1c c\u1ea5u tr\u00fac c\u00f3 k\u00edch th\u01b0\u1edbc l\u1edbn, th\u00e0nh m\u1ecfng v\u00e0 h\u00ecnh d\u1ea1ng ph\u1ee9c t\u1ea1p<\/li>\n\n\n\n
    • Gi\u1ea3m \u0111\u1ed9 d\u00f4i gia c\u00f4ng sau khi nung k\u1ebft<\/li>\n<\/ul>\n\n\n\n

      Ph\u01b0\u01a1ng ph\u00e1p n\u00e0y \u0111\u1eb7c bi\u1ec7t ph\u00f9 h\u1ee3p v\u1edbi c\u00e1c ch\u1ea5t n\u1ec1n ESC v\u00e0 c\u00e1c b\u1ed9 ph\u1eadn ti\u1ebfp x\u00fac v\u1edbi plasma \u0111\u00f2i h\u1ecfi \u0111\u1ed9 ch\u00ednh x\u00e1c k\u00edch th\u01b0\u1edbc cao.<\/p>\n\n\n\n

      2.2 \u0110\u00fac \u00e9p g\u1ed1m (CIM)<\/h3>\n\n\n\n

      Quy tr\u00ecnh \u0111\u00fac phun g\u1ed1m k\u1ebft h\u1ee3p b\u1ed9t g\u1ed1m v\u1edbi ch\u1ea5t k\u1ebft d\u00ednh polymer \u0111\u1ec3 t\u1ea1o th\u00e0nh nguy\u00ean li\u1ec7u nhi\u1ec7t d\u1ebbo, sau \u0111\u00f3 \u0111\u01b0\u1ee3c phun v\u00e0o khu\u00f4n kim lo\u1ea1i d\u01b0\u1edbi \u00e1p su\u1ea5t.<\/p>\n\n\n\n

      So v\u1edbi c\u00e1c ph\u01b0\u01a1ng ph\u00e1p \u00e9p truy\u1ec1n th\u1ed1ng, CIM mang l\u1ea1i:<\/p>\n\n\n\n

        \n
      • Kh\u1ea3 n\u0103ng x\u1eed l\u00fd c\u00e1c c\u1ea5u tr\u00fac h\u00ecnh h\u1ecdc ph\u1ee9c t\u1ea1p<\/li>\n\n\n\n
      • T\u0103ng c\u01b0\u1eddng t\u00ednh \u0111\u1ed3ng \u0111\u1ec1u v\u1ec1 m\u1eadt \u0111\u1ed9 th\u1ea3m c\u1ecf<\/li>\n\n\n\n
      • N\u0103ng su\u1ea5t cao cho s\u1ea3n xu\u1ea5t h\u00e0ng lo\u1ea1t<\/li>\n\n\n\n
      • Ph\u00f9 h\u1ee3p v\u1edbi c\u00e1c chi ti\u1ebft nh\u1ecf v\u00e0 ph\u1ee9c t\u1ea1p nh\u01b0 v\u1ecf c\u1ea3m bi\u1ebfn v\u00e0 v\u00f2ng c\u00e1ch \u0111i\u1ec7n<\/li>\n<\/ul>\n\n\n\n

        Tuy nhi\u00ean, quy tr\u00ecnh n\u00e0y bao g\u1ed3m c\u00e1c c\u00f4ng \u0111o\u1ea1n quan tr\u1ecdng l\u00e0 t\u00e1ch ch\u1ea5t k\u1ebft d\u00ednh v\u00e0 nung k\u1ebft, trong \u0111\u00f3 c\u00e1c khuy\u1ebft t\u1eadt nh\u01b0 n\u1ee9t ho\u1eb7c bi\u1ebfn d\u1ea1ng c\u00f3 th\u1ec3 x\u1ea3y ra n\u1ebfu vi\u1ec7c lo\u1ea1i b\u1ecf ch\u1ea5t k\u1ebft d\u00ednh kh\u00f4ng \u0111\u01b0\u1ee3c ki\u1ec3m so\u00e1t c\u1ea9n th\u1eadn.<\/p>\n\n\n\n

        2.3 \u00c9p \u0111\u1eb3ng \u00e1p l\u1ea1nh (CIP)<\/h3>\n\n\n\n

        \u0110\u1ed1i v\u1edbi c\u00e1c chi ti\u1ebft \u0111\u1ed1i x\u1ee9ng tr\u1ee5c nh\u01b0 v\u00f2ng ti\u00eau \u0111i\u1ec3m, c\u00f4ng ngh\u1ec7 CIP s\u1eed d\u1ee5ng \u00e1p su\u1ea5t th\u1ee7y t\u0129nh \u0111\u1ed3ng \u0111\u1ec1u th\u00f4ng qua m\u00f4i tr\u01b0\u1eddng ch\u1ea5t l\u1ecfng \u0111\u1ec3 n\u00e9n b\u1ed9t b\u00ean trong khu\u00f4n d\u1ebbo.<\/p>\n\n\n\n

        C\u00e1c \u01b0u \u0111i\u1ec3m bao g\u1ed3m:<\/p>\n\n\n\n

          \n
        • Ph\u00e2n b\u1ed1 m\u1eadt \u0111\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u theo m\u1ecdi h\u01b0\u1edbng<\/li>\n\n\n\n
        • Gi\u1ea3m hi\u1ec7n t\u01b0\u1ee3ng co ng\u00f3t d\u1ecb h\u01b0\u1edbng trong qu\u00e1 tr\u00ecnh thi\u00eau k\u1ebft<\/li>\n\n\n\n
        • T\u0103ng c\u01b0\u1eddng \u0111\u1ed9 b\u1ec1n k\u1ebft c\u1ea5u cho c\u00e1c chi ti\u1ebft \u0111\u1ed1i x\u1ee9ng quay<\/li>\n<\/ul>\n\n\n\n

          2.4 S\u1ea3n xu\u1ea5t gia c\u00f4ng (In 3D g\u1ed1m s\u1ee9)<\/h3>\n\n\n\n

          C\u00e1c c\u00f4ng ngh\u1ec7 s\u1ea3n xu\u1ea5t gia c\u00f4ng nh\u01b0 X\u1eed l\u00fd \u00c1nh s\u00e1ng K\u1ef9 thu\u1eadt s\u1ed1 (DLP) v\u00e0 In M\u1ef1c Tr\u1ef1c ti\u1ebfp (DIW) cho ph\u00e9p ch\u1ebf t\u1ea1o c\u00e1c c\u1ea5u tr\u00fac b\u00ean trong m\u00e0 kh\u00f4ng th\u1ec3 th\u1ef1c hi\u1ec7n \u0111\u01b0\u1ee3c b\u1eb1ng khu\u00f4n truy\u1ec1n th\u1ed1ng.<\/p>\n\n\n\n

          C\u00e1c \u1ee9ng d\u1ee5ng \u0111i\u1ec3n h\u00ecnh bao g\u1ed3m:<\/p>\n\n\n\n

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          • C\u00e1c m\u1eabu th\u1eed nghi\u1ec7m ESC c\u00f3 k\u00eanh l\u00e0m m\u00e1t t\u00edch h\u1ee3p<\/li>\n\n\n\n
          • C\u00e1c c\u1ea5u tr\u00fac d\u00f2ng ch\u1ea3y b\u00ean trong ph\u1ee9c t\u1ea1p<\/li>\n<\/ul>\n\n\n\n

            Tuy nhi\u00ean, nh\u1eefng h\u1ea1n ch\u1ebf hi\u1ec7n t\u1ea1i bao g\u1ed3m m\u1eadt \u0111\u1ed9 ch\u1ea5t r\u1eafn t\u01b0\u01a1ng \u0111\u1ed1i th\u1ea5p, d\u1eabn \u0111\u1ebfn \u0111\u1ed9 co ng\u00f3t cao h\u01a1n v\u00e0 m\u1eadt \u0111\u1ed9 cu\u1ed1i c\u00f9ng gi\u1ea3m sau khi nung k\u1ebft.<\/p>\n\n\n\n

            3. Nh\u1eefng th\u00e1ch th\u1ee9c trong qu\u00e1 tr\u00ecnh thi\u00eau k\u1ebft: Ki\u1ec3m so\u00e1t s\u1ef1 co ng\u00f3t v\u00e0 s\u1ef1 bi\u1ebfn \u0111\u1ed5i c\u1ea5u tr\u00fac vi m\u00f4<\/h2>\n\n\n\n

            Qu\u00e1 tr\u00ecnh nung k\u1ebft bi\u1ebfn c\u00e1c s\u1ea3n ph\u1ea9m th\u00f4 th\u00e0nh c\u00e1c chi ti\u1ebft g\u1ed1m c\u00f3 \u0111\u1ed9 \u0111\u1eb7c cao, nh\u01b0ng \u0111i k\u00e8m v\u1edbi hi\u1ec7n t\u01b0\u1ee3ng co ng\u00f3t tuy\u1ebfn t\u00ednh \u0111\u00e1ng k\u1ec3, th\u01b0\u1eddng n\u1eb1m trong kho\u1ea3ng 15\u201325%.<\/p>\n\n\n\n

            Trong c\u00e1c c\u1ea5u tr\u00fac h\u00ecnh h\u1ecdc ph\u1ee9c t\u1ea1p, \u0111\u1ed9 d\u00e0y kh\u00f4ng \u0111\u1ed3ng \u0111\u1ec1u d\u1eabn \u0111\u1ebfn s\u1ef1 bi\u1ebfn \u0111\u1ed5i v\u1ec1 t\u1ed1c \u0111\u1ed9 n\u00e9n ch\u1eb7t theo kh\u00f4ng gian, d\u1eabn \u0111\u1ebfn:<\/p>\n\n\n\n

              \n
            • S\u1ef1 co ng\u00f3t kh\u00e1c bi\u1ec7t<\/li>\n\n\n\n
            • Bi\u1ebfn d\u1ea1ng v\u00e0 m\u00e9o m\u00f3<\/li>\n\n\n\n
            • S\u1ef1 h\u00ecnh th\u00e0nh v\u00e0 lan truy\u1ec1n v\u1ebft n\u1ee9t<\/li>\n<\/ul>\n\n\n\n

              3.1 Nung k\u1ebft b\u1eb1ng \u00e9p n\u00f3ng<\/h3>\n\n\n\n

              \u00c1p su\u1ea5t \u0111\u01a1n tr\u1ee5c ho\u1eb7c \u00e1p su\u1ea5t \u0111\u1eb3ng t\u0129nh t\u1eeb b\u00ean ngo\u00e0i \u0111\u01b0\u1ee3c \u00e1p d\u1ee5ng trong qu\u00e1 tr\u00ecnh nung k\u1ebft nh\u1eb1m t\u0103ng c\u01b0\u1eddng qu\u00e1 tr\u00ecnh v\u1eadn chuy\u1ec3n ch\u1ea5t, gi\u1ea3m nhi\u1ec7t \u0111\u1ed9 n\u00e9n ch\u1eb7t v\u00e0 \u1ee9c ch\u1ebf s\u1ef1 ph\u00e1t tri\u1ec3n c\u1ee7a h\u1ea1t. Ph\u01b0\u01a1ng ph\u00e1p n\u00e0y c\u00f3 hi\u1ec7u qu\u1ea3 trong vi\u1ec7c duy tr\u00ec \u0111\u1ed9 ch\u00ednh x\u00e1c k\u00edch th\u01b0\u1edbc c\u1ee7a c\u00e1c t\u1ebf b\u00e0o ESC v\u00e0 \u0111\u1ea7u phun plasma.<\/p>\n\n\n\n

              3.2 Nung k\u1ebft b\u1eb1ng \u00e1p su\u1ea5t kh\u00ed<\/h3>\n\n\n\n

              \u00c1p su\u1ea5t kh\u00ed tr\u01a1 (v\u00ed d\u1ee5: nit\u01a1 ho\u1eb7c argon) \u0111\u01b0\u1ee3c \u00e1p d\u1ee5ng \u1edf nhi\u1ec7t \u0111\u1ed9 cao \u0111\u1ec3 \u1ee9c ch\u1ebf qu\u00e1 tr\u00ecnh bay h\u01a1i v\u00e0 th\u00fac \u0111\u1ea9y qu\u00e1 tr\u00ecnh n\u00e9n ch\u1eb7t \u0111\u1ed3ng \u0111\u1ec1u, \u0111\u1eb7c bi\u1ec7t l\u00e0 \u0111\u1ed1i v\u1edbi c\u00e1c v\u1eadt li\u1ec7u d\u1ec5 b\u1ecb ph\u00e2n h\u1ee7y \u1edf nhi\u1ec7t \u0111\u1ed9 cao.<\/p>\n\n\n\n

              3.3 Ph\u01b0\u01a1ng ph\u00e1p nung k\u1ebft b\u1eb1ng plasma tia l\u1eeda (SPS)<\/h3>\n\n\n\n

              C\u00f4ng ngh\u1ec7 SPS s\u1eed d\u1ee5ng d\u00f2ng \u0111i\u1ec7n m\u1ed9t chi\u1ec1u xung k\u1ebft h\u1ee3p v\u1edbi gia nhi\u1ec7t c\u1ee5c b\u1ed9 b\u1eb1ng plasma \u0111\u1ec3 \u0111\u1ea1t \u0111\u01b0\u1ee3c qu\u00e1 tr\u00ecnh n\u00e9n ch\u1eb7t nhanh ch\u00f3ng. Qu\u00e1 tr\u00ecnh n\u00e9n ch\u1eb7t di\u1ec5n ra g\u1ea7n nh\u01b0 \u0111\u1ed3ng th\u1eddi tr\u00ean c\u00e1c v\u00f9ng kh\u00e1c nhau gi\u00fap gi\u1ea3m thi\u1ec3u s\u1ef1 ch\u00eanh l\u1ec7ch \u0111\u1ed9 co ng\u00f3t.<\/p>\n\n\n\n

              Nh\u1eefng h\u1ea1n ch\u1ebf bao g\u1ed3m gi\u1edbi h\u1ea1n v\u1ec1 k\u00edch th\u01b0\u1edbc do k\u00edch th\u01b0\u1edbc bu\u1ed3ng thi\u1ebft b\u1ecb, khi\u1ebfn ph\u01b0\u01a1ng ph\u00e1p n\u00e0y ch\u1ee7 y\u1ebfu ph\u00f9 h\u1ee3p v\u1edbi c\u00e1c chi ti\u1ebft nh\u1ecf c\u00f3 \u0111\u1ed9 ch\u00ednh x\u00e1c cao.<\/p>\n\n\n\n

              3.4 Nung k\u1ebft b\u1eb1ng l\u00f2 vi s\u00f3ng<\/h3>\n\n\n\n

              N\u0103ng l\u01b0\u1ee3ng vi s\u00f3ng g\u00e2y ra hi\u1ec7n t\u01b0\u1ee3ng gia nhi\u1ec7t th\u1ec3 t\u00edch th\u00f4ng qua t\u1ed5n hao \u0111i\u1ec7n m\u00f4i v\u00e0 t\u1ed5n hao d\u1eabn \u0111i\u1ec7n, d\u1eabn \u0111\u1ebfn s\u1ef1 ph\u00e2n b\u1ed1 nhi\u1ec7t \u0111\u1ed9 nhanh ch\u00f3ng v\u00e0 \u0111\u1ed3ng \u0111\u1ec1u. \u0110i\u1ec1u n\u00e0y gi\u00fap gi\u1ea3m \u0111\u1ed9 d\u1ed1c nhi\u1ec7t v\u00e0 l\u00e0m gi\u1ea3m \u0111\u00e1ng k\u1ec3 nguy c\u01a1 bi\u1ebfn d\u1ea1ng v\u00e0 n\u1ee9t v\u1ee1.<\/p>\n\n\n\n

              4. Gia c\u00f4ng ch\u00ednh x\u00e1c: T\u1eeb hi\u1ec7n t\u01b0\u1ee3ng g\u00e3y gi\u00f2n \u0111\u1ebfn k\u1ef9 thu\u1eadt x\u1eed l\u00fd b\u1ec1 m\u1eb7t si\u00eau ch\u00ednh x\u00e1c<\/h2>\n\n\n\n

              Sau qu\u00e1 tr\u00ecnh nung k\u1ebft, c\u00e1c b\u1ed9 ph\u1eadn g\u1ed1m th\u01b0\u1eddng c\u1ea7n ph\u1ea3i qua gia c\u00f4ng ch\u00ednh x\u00e1c \u0111\u1ec3 \u0111\u1ea1t \u0111\u01b0\u1ee3c \u0111\u1ed9 dung sai k\u00edch th\u01b0\u1edbc d\u01b0\u1edbi micromet v\u00e0 \u0111\u1ed9 nh\u00e1m b\u1ec1 m\u1eb7t \u1edf c\u1ea5p \u0111\u1ed9 nanomet.<\/p>\n\n\n\n

              Tuy nhi\u00ean, t\u00ednh gi\u00f2n v\u1ed1n c\u00f3 c\u1ee7a g\u1ed1m s\u1ee9 l\u1ea1i \u0111\u1eb7t ra nh\u1eefng th\u00e1ch th\u1ee9c l\u1edbn:<\/p>\n\n\n\n

                \n
              • M\u00f2n d\u1ee5ng c\u1ee5 nhanh ch\u00f3ng<\/li>\n\n\n\n
              • S\u1ee9t m\u1ebb c\u1ea1nh v\u00e0 h\u01b0 h\u1ecfng b\u00ean trong<\/li>\n\n\n\n
              • S\u1ef1 h\u00ecnh th\u00e0nh c\u00e1c v\u1ebft n\u1ee9t vi m\u00f4 d\u01b0\u1edbi t\u00e1c \u0111\u1ed9ng c\u1ee7a \u1ee9ng su\u1ea5t c\u01a1 h\u1ecdc<\/li>\n<\/ul>\n\n\n\n

                \u0110\u1ed1i v\u1edbi c\u00e1c c\u1ea5u tr\u00fac ph\u1ee9c t\u1ea1p nh\u01b0 m\u1ea3ng l\u1ed7 si\u00eau nh\u1ecf v\u00e0 c\u00e1c chi ti\u1ebft c\u00f3 th\u00e0nh m\u1ecfng, c\u00e1c ph\u01b0\u01a1ng ph\u00e1p m\u00e0i truy\u1ec1n th\u1ed1ng th\u01b0\u1eddng kh\u00f4ng \u0111\u1ee7 hi\u1ec7u qu\u1ea3.<\/p>\n\n\n\n

                4.1 Gia c\u00f4ng d\u00f2ng m\u00e0i m\u00f2n (AFM)<\/h3>\n\n\n\n

                M\u1ed9t ch\u1ea5t m\u00e0i m\u00f2n c\u00f3 t\u00ednh nh\u1edbt \u0111\u00e0n h\u1ed3i \u0111\u01b0\u1ee3c \u0111\u1ea9y qua c\u00e1c k\u00eanh b\u00ean trong v\u00e0 c\u00e1c l\u1ed7 si\u00eau nh\u1ecf d\u01b0\u1edbi \u00e1p su\u1ea5t, gi\u00fap lo\u1ea1i b\u1ecf v\u1eadt li\u1ec7u m\u1ed9t c\u00e1ch \u0111\u1ed3ng \u0111\u1ec1u v\u00e0 lo\u1ea1i b\u1ecf c\u00e1c g\u1edd th\u1eeba \u1edf nh\u1eefng khu v\u1ef1c kh\u00f3 ti\u1ebfp c\u1eadn.<\/p>\n\n\n\n

                4.2 Gia c\u00f4ng b\u1eb1ng laser<\/h3>\n\n\n\n

                Laser femtosecond v\u00e0 picosecond cho ph\u00e9p th\u1ef1c hi\u1ec7n c\u00e1c thao t\u00e1c khoan v\u00e0 x\u1eed l\u00fd b\u1ec1 m\u1eb7t v\u1edbi \u0111\u1ed9 ch\u00ednh x\u00e1c c\u1ef1c cao, \u0111\u1ed3ng th\u1eddi gi\u1ea3m thi\u1ec3u v\u00f9ng t\u1ed5n th\u01b0\u01a1ng nhi\u1ec7t (<0,01 \u03bcm). K\u1ef9 thu\u1eadt n\u00e0y \u0111\u1eb7c bi\u1ec7t ph\u00f9 h\u1ee3p \u0111\u1ec3 kh\u1eafc ph\u1ee5c c\u00e1c khuy\u1ebft t\u1eadt vi m\u00f4 v\u00e0 gia c\u00f4ng c\u00e1c khoang b\u00ean trong.<\/p>\n\n\n\n

                4.3 Ho\u00e0n thi\u1ec7n c\u00f3 s\u1ef1 h\u1ed7 tr\u1ee3 c\u1ee7a t\u1eeb tr\u01b0\u1eddng<\/h3>\n\n\n\n

                Ch\u1ea5t l\u1ecfng \u0111\u00e1nh b\u00f3ng t\u1eeb t\u00ednh t\u1ea1o th\u00e0nh m\u1ed9t \u201cd\u1ee5ng c\u1ee5 linh ho\u1ea1t\u201d c\u00f3 th\u1ec3 \u0111i\u1ec1u khi\u1ec3n \u0111\u01b0\u1ee3c trong t\u1eeb tr\u01b0\u1eddng, cho ph\u00e9p ho\u00e0n thi\u1ec7n v\u1edbi \u0111\u1ed9 ch\u00ednh x\u00e1c cao c\u00e1c b\u1ec1 m\u1eb7t cong, th\u00e0nh m\u1ecfng v\u00e0 b\u1ec1 m\u1eb7t b\u00ean trong.<\/p>\n\n\n\n

                4.4 \u0110\u00e1nh b\u00f3ng h\u1ed7 tr\u1ee3 b\u1eb1ng plasma (PAP)<\/h3>\n\n\n\n

                C\u00f4ng ngh\u1ec7 PAP s\u1eed d\u1ee5ng k\u00edch ho\u1ea1t plasma \u0111\u1ec3 bi\u1ebfn \u0111\u1ed5i b\u1ec1 m\u1eb7t g\u1ed1m th\u00e0nh m\u1ed9t l\u1edbp ph\u1ea3n \u1ee9ng m\u1ec1m h\u01a1n, sau \u0111\u00f3 ti\u1ebfn h\u00e0nh \u0111\u00e1nh b\u00f3ng v\u1edbi l\u1ef1c nh\u1eb9. C\u01a1 ch\u1ebf k\u1ebft h\u1ee3p n\u00e0y gi\u00fap \u0111\u1ea1t \u0111\u01b0\u1ee3c \u0111\u1ed9 nh\u1eb5n b\u1ec1 m\u1eb7t \u1edf c\u1ea5p \u0111\u1ed9 nguy\u00ean t\u1eed v\u1edbi m\u1ee9c \u0111\u1ed9 h\u01b0 h\u1ea1i b\u00ean d\u01b0\u1edbi b\u1ec1 m\u1eb7t \u1edf m\u1ee9c t\u1ed1i thi\u1ec3u.<\/p>\n\n\n\n

                5. K\u1ebft lu\u1eadn<\/h2>\n\n\n\n

                S\u1ef1 chuy\u1ec3n \u0111\u1ed5i c\u1ee7a c\u00e1c linh ki\u1ec7n g\u1ed1m b\u00e1n d\u1eabn t\u1eeb c\u00e1c h\u00ecnh d\u1ea1ng \u0111\u01a1n gi\u1ea3n sang c\u00e1c ki\u1ebfn tr\u00fac \u0111a c\u1ea5p \u0111\u1ed9 ph\u1ee9c t\u1ea1p \u0111\u00e3 thay \u0111\u1ed5i c\u0103n b\u1ea3n c\u00e1c y\u00eau c\u1ea7u v\u1ec1 s\u1ea3n xu\u1ea5t.<\/p>\n\n\n\n

                Trong c\u00e1c giai \u0111o\u1ea1n t\u1ea1o h\u00ecnh, nung k\u1ebft v\u00e0 gia c\u00f4ng ch\u00ednh x\u00e1c, th\u00e1ch th\u1ee9c c\u1ed1t l\u00f5i n\u1eb1m \u1edf vi\u1ec7c gi\u1ea3i quy\u1ebft m\u00e2u thu\u1eabn gi\u1eefa:<\/p>\n\n\n\n

                  \n
                • \u0110\u1ed9 ph\u1ee9c t\u1ea1p h\u00ecnh h\u1ecdc cao<\/li>\n\n\n\n
                • T\u00ednh gi\u00f2n n\u1ed9i t\u1ea1i c\u1ee7a g\u1ed1m s\u1ee9<\/li>\n\n\n\n
                • C\u00e1c t\u00e1c \u0111\u1ed9ng c\u1ee7a qu\u00e1 tr\u00ecnh t\u01b0\u01a1ng t\u00e1c \u0111a l\u0129nh v\u1ef1c (nhi\u1ec7t, c\u01a1 h\u1ecdc, h\u00f3a h\u1ecdc)<\/li>\n<\/ul>\n\n\n\n

                  S\u1ef1 ph\u00e1t tri\u1ec3n trong t\u01b0\u01a1ng lai s\u1ebd ph\u1ee5 thu\u1ed9c v\u00e0o vi\u1ec7c t\u00edch h\u1ee3p c\u00e1c c\u00f4ng ngh\u1ec7 thi\u1ebft k\u1ebf s\u1ed1, gia c\u00f4ng \u0111\u1ecbnh h\u00ecnh g\u1ea7n h\u00ecnh d\u1ea1ng cu\u1ed1i c\u00f9ng, ki\u1ec3m so\u00e1t qu\u00e1 tr\u00ecnh nung k\u1ebft \u0111a l\u0129nh v\u1ef1c v\u00e0 gia c\u00f4ng lai si\u00eau ch\u00ednh x\u00e1c.<\/p>\n\n\n\n

                  Ch\u1ec9 th\u00f4ng qua s\u1ef1 ph\u1ed1i h\u1ee3p c\u00f3 h\u1ec7 th\u1ed1ng gi\u1eefa c\u00e1c giai \u0111o\u1ea1n c\u1ee7a quy tr\u00ecnh n\u00e0y, g\u1ed1m s\u1ee9 cao c\u1ea5p m\u1edbi c\u00f3 th\u1ec3 ph\u00e1t huy h\u1ebft ti\u1ec1m n\u0103ng c\u1ee7a m\u00ecnh trong c\u00e1c thi\u1ebft b\u1ecb b\u00e1n d\u1eabn th\u1ebf h\u1ec7 m\u1edbi.<\/p>\n\n\n\n

                  C\u00e2u h\u1ecfi th\u01b0\u1eddng g\u1eb7p<\/h2>\n\n\n
                  \n
                  \n
                  \n

                  T\u1ea1i sao g\u1ed1m s\u1ee9 l\u1ea1i \u0111\u01b0\u1ee3c \u01b0a chu\u1ed9ng h\u01a1n kim lo\u1ea1i trong c\u00e1c b\u1ed9 ph\u1eadn c\u1ee7a thi\u1ebft b\u1ecb b\u00e1n d\u1eabn?<\/h3>\n
                  \n\n

                  C\u00e1c v\u1eadt li\u1ec7u g\u1ed1m nh\u01b0 Al\u2082O\u2083, AlN, SiC v\u00e0 Si\u2083N\u2084 c\u00f3 kh\u1ea3 n\u0103ng c\u00e1ch \u0111i\u1ec7n, ch\u1ed1ng \u0103n m\u00f2n trong m\u00f4i tr\u01b0\u1eddng plasma v\u00e0 \u1ed5n \u0111\u1ecbnh nhi\u1ec7t v\u01b0\u1ee3t tr\u1ed9i so v\u1edbi h\u1ea7u h\u1ebft c\u00e1c kim lo\u1ea1i. Trong m\u00f4i tr\u01b0\u1eddng b\u00e1n d\u1eabn gi\u00e0u plasma, kim lo\u1ea1i th\u01b0\u1eddng d\u1ec5 b\u1ecb x\u00f3i m\u00f2n, nhi\u1ec5m b\u1ea9n v\u00e0 m\u1ea5t \u1ed5n \u0111\u1ecbnh \u0111i\u1ec7n, trong khi g\u1ed1m v\u1eabn duy tr\u00ec \u0111\u01b0\u1ee3c t\u00ednh to\u00e0n v\u1eb9n v\u1ec1 c\u1ea5u tr\u00fac v\u00e0 h\u00f3a h\u1ecdc trong su\u1ed1t c\u00e1c chu k\u1ef3 ho\u1ea1t \u0111\u1ed9ng k\u00e9o d\u00e0i.<\/p>\n\n<\/div>\n<\/div>\n

                  \n

                  Th\u00e1ch th\u1ee9c l\u1edbn nh\u1ea5t trong s\u1ea3n xu\u1ea5t \u0111\u1ed1i v\u1edbi c\u00e1c c\u1ea5u tr\u00fac g\u1ed1m c\u00f3 h\u00ecnh d\u1ea1ng ph\u1ee9c t\u1ea1p l\u00e0 g\u00ec?<\/h3>\n
                  \n\n

                  Th\u00e1ch th\u1ee9c ch\u00ednh n\u1eb1m \u1edf vi\u1ec7c ki\u1ec3m so\u00e1t s\u1ef1 h\u00ecnh th\u00e0nh khuy\u1ebft t\u1eadt qua nhi\u1ec1u giai \u0111o\u1ea1n \u2014 \u0111\u1eb7c bi\u1ec7t l\u00e0 m\u1eadt \u0111\u1ed9 kh\u00f4ng \u0111\u1ed3ng \u0111\u1ec1u trong qu\u00e1 tr\u00ecnh t\u1ea1o h\u00ecnh, s\u1ef1 co ng\u00f3t kh\u00f4ng \u0111\u1ed3ng \u0111\u1ec1u trong qu\u00e1 tr\u00ecnh nung k\u1ebft v\u00e0 h\u01b0 h\u1ecfng b\u00ean trong trong qu\u00e1 tr\u00ecnh gia c\u00f4ng. Do g\u1ed1m s\u1ee9 c\u00f3 \u0111\u1ed9 b\u1ec1n g\u00e3y th\u1ea5p, n\u00ean ngay c\u1ea3 nh\u1eefng \u0111\u1ed9 d\u1ed1c \u1ee9ng su\u1ea5t nh\u1ecf do qu\u00e1 tr\u00ecnh s\u1ea3n xu\u1ea5t g\u00e2y ra c\u0169ng c\u00f3 th\u1ec3 d\u1eabn \u0111\u1ebfn n\u1ee9t v\u1ee1, cong v\u00eanh ho\u1eb7c h\u1ecfng h\u00f3c nghi\u00eam tr\u1ecdng.<\/p>\n\n<\/div>\n<\/div>\n

                  \n

                  C\u00f4ng ngh\u1ec7 in 3D c\u00f3 th\u1ec3 thay th\u1ebf ho\u00e0n to\u00e0n c\u00e1c ph\u01b0\u01a1ng ph\u00e1p t\u1ea1o h\u00ecnh g\u1ed1m truy\u1ec1n th\u1ed1ng kh\u00f4ng?<\/h3>\n
                  \n\n

                  Hi\u1ec7n t\u1ea1i th\u00ec ch\u01b0a. M\u1eb7c d\u00f9 in 3D b\u1eb1ng g\u1ed1m mang l\u1ea1i s\u1ef1 t\u1ef1 do v\u1ec1 h\u00ecnh h\u1ecdc v\u00f4 song (ch\u1eb3ng h\u1ea1n nh\u01b0 c\u00e1c k\u00eanh b\u00ean trong v\u00e0 c\u1ea5u tr\u00fac l\u01b0\u1edbi), c\u00f4ng ngh\u1ec7 n\u00e0y v\u1eabn b\u1ecb h\u1ea1n ch\u1ebf b\u1edfi t\u1ef7 l\u1ec7 ch\u1ea5t r\u1eafn t\u01b0\u01a1ng \u0111\u1ed1i th\u1ea5p, \u0111\u1ed9 co ng\u00f3t cao v\u00e0 nh\u1eefng h\u1ea1n ch\u1ebf v\u1ec1 m\u1eadt \u0111\u1ed9 sau qu\u00e1 tr\u00ecnh nung k\u1ebft. Hi\u1ec7n nay, c\u00f4ng ngh\u1ec7 n\u00e0y ph\u00f9 h\u1ee3p nh\u1ea5t \u0111\u1ec3 ch\u1ebf t\u1ea1o m\u1eabu th\u1eed ho\u1eb7c c\u00e1c b\u1ed9 ph\u1eadn chuy\u00ean d\u1ee5ng cao h\u01a1n l\u00e0 s\u1ea3n xu\u1ea5t h\u00e0ng lo\u1ea1t quy m\u00f4 l\u1edbn.<\/p>\n\n<\/div>\n<\/div>\n<\/div>\n<\/div>","protected":false},"excerpt":{"rendered":"

                  In advanced semiconductor manufacturing, key process modules such as plasma etching, chemical vapor deposition (CVD), and ion implantation operate under extreme environments involving high-energy plasma, corrosive gases, high voltage bias, and rapid thermal cycling. These conditions impose stringent requirements on structural materials in terms of dielectric stability, corrosion resistance, thermal compatibility, and long-term dimensional reliability. […]<\/p>\n","protected":false},"author":1,"featured_media":2294,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[3],"tags":[48,511,90],"class_list":["post-2293","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-industry-news","tag-ceramic-components","tag-complex-structured-ceramic-components","tag-semiconductor-equipment"],"_links":{"self":[{"href":"https:\/\/www.xkh-ceramics.com\/vi\/wp-json\/wp\/v2\/posts\/2293","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.xkh-ceramics.com\/vi\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.xkh-ceramics.com\/vi\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/vi\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/vi\/wp-json\/wp\/v2\/comments?post=2293"}],"version-history":[{"count":1,"href":"https:\/\/www.xkh-ceramics.com\/vi\/wp-json\/wp\/v2\/posts\/2293\/revisions"}],"predecessor-version":[{"id":2295,"href":"https:\/\/www.xkh-ceramics.com\/vi\/wp-json\/wp\/v2\/posts\/2293\/revisions\/2295"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/vi\/wp-json\/wp\/v2\/media\/2294"}],"wp:attachment":[{"href":"https:\/\/www.xkh-ceramics.com\/vi\/wp-json\/wp\/v2\/media?parent=2293"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/vi\/wp-json\/wp\/v2\/categories?post=2293"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/vi\/wp-json\/wp\/v2\/tags?post=2293"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}