{"id":2291,"date":"2026-05-21T01:51:48","date_gmt":"2026-05-21T01:51:48","guid":{"rendered":"https:\/\/www.xkh-ceramics.com\/?p=2291"},"modified":"2026-05-21T01:52:28","modified_gmt":"2026-05-21T01:52:28","slug":"how-advanced-ceramics-improve-semiconductor-equipment-performance","status":"publish","type":"post","link":"https:\/\/www.xkh-ceramics.com\/vi\/how-advanced-ceramics-improve-semiconductor-equipment-performance\/","title":{"rendered":"G\u1ed1m s\u1ee9 cao c\u1ea5p c\u1ea3i thi\u1ec7n hi\u1ec7u su\u1ea5t thi\u1ebft b\u1ecb b\u00e1n d\u1eabn nh\u01b0 th\u1ebf n\u00e0o"},"content":{"rendered":"<p class=\"wp-block-paragraph\">Ng\u00e0nh c\u00f4ng nghi\u1ec7p b\u00e1n d\u1eabn ho\u1ea1t \u0111\u1ed9ng \u1edf ranh gi\u1edbi c\u1ee7a k\u1ef9 thu\u1eadt ch\u00ednh x\u00e1c. C\u00e1c quy tr\u00ecnh s\u1ea3n xu\u1ea5t hi\u1ec7n \u0111\u1ea1i \u0111\u00f2i h\u1ecfi nhi\u1ec7t \u0111\u1ed9 c\u1ef1c cao, h\u00f3a ch\u1ea5t c\u00f3 t\u00ednh ph\u1ea3n \u1ee9ng m\u1ea1nh, ti\u1ebfp x\u00fac v\u1edbi plasma, m\u00f4i tr\u01b0\u1eddng ch\u00e2n kh\u00f4ng v\u00e0 ki\u1ec3m so\u00e1t \u00f4 nhi\u1ec5m \u1edf quy m\u00f4 vi m\u00f4. Khi c\u00e1c m\u1ea1ch t\u00edch h\u1ee3p ti\u1ebfp t\u1ee5c ph\u00e1t tri\u1ec3n theo h\u01b0\u1edbng c\u00e1c n\u00fat c\u00f4ng ngh\u1ec7 nh\u1ecf h\u01a1n v\u00e0 k\u00edch th\u01b0\u1edbc t\u1ea5m wafer l\u1edbn h\u01a1n, c\u00e1c y\u00eau c\u1ea7u v\u1ec1 hi\u1ec7u su\u1ea5t thi\u1ebft b\u1ecb ng\u00e0y c\u00e0ng kh\u1eaft khe h\u01a1n.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">Trong b\u1ed1i c\u1ea3nh n\u00e0y, vi\u1ec7c l\u1ef1a ch\u1ecdn v\u1eadt li\u1ec7u tr\u1edf th\u00e0nh y\u1ebfu t\u1ed1 then ch\u1ed1t \u1ea3nh h\u01b0\u1edfng \u0111\u1ebfn hi\u1ec7u su\u1ea5t s\u1ea3n xu\u1ea5t, t\u00ednh \u1ed5n \u0111\u1ecbnh c\u1ee7a quy tr\u00ecnh v\u00e0 tu\u1ed5i th\u1ecd thi\u1ebft b\u1ecb. C\u00e1c v\u1eadt li\u1ec7u kim lo\u1ea1i truy\u1ec1n th\u1ed1ng th\u01b0\u1eddng kh\u00f3 \u0111\u00e1p \u1ee9ng \u0111\u01b0\u1ee3c c\u00e1c y\u00eau c\u1ea7u kh\u1eafc nghi\u1ec7t v\u1ec1 m\u00f4i tr\u01b0\u1eddng b\u00ean trong c\u00e1c h\u1ec7 th\u1ed1ng b\u00e1n d\u1eabn. Do \u0111\u00f3, g\u1ed1m s\u1ee9 cao c\u1ea5p \u0111\u00e3 tr\u1edf th\u00e0nh v\u1eadt li\u1ec7u kh\u00f4ng th\u1ec3 thi\u1ebfu trong thi\u1ebft b\u1ecb b\u00e1n d\u1eabn.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">Nh\u1edd t\u00ednh \u1ed5n \u0111\u1ecbnh nhi\u1ec7t, kh\u1ea3 n\u0103ng ch\u1ed1ng \u0103n m\u00f2n h\u00f3a h\u1ecdc, \u0111\u1ed9 b\u1ec1n c\u01a1 h\u1ecdc v\u01b0\u1ee3t tr\u1ed9i c\u00f9ng \u0111\u1eb7c t\u00ednh \u00edt g\u00e2y \u00f4 nhi\u1ec5m, g\u1ed1m s\u1ee9 ti\u00ean ti\u1ebfn gi\u00fap n\u00e2ng cao \u0111\u00e1ng k\u1ec3 hi\u1ec7u su\u1ea5t v\u00e0 \u0111\u1ed9 tin c\u1eady c\u1ee7a c\u00e1c thi\u1ebft b\u1ecb s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn.<\/p>\n\n\n\n<figure class=\"wp-block-image aligncenter size-full\"><img fetchpriority=\"high\" decoding=\"async\" width=\"1000\" height=\"1000\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2.png\" alt=\"\" class=\"wp-image-2102\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2.png 1000w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2-300x300.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2-150x150.png 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2-768x768.png 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2-12x12.png 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2-600x600.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2-100x100.png 100w\" sizes=\"(max-width: 1000px) 100vw, 1000px\" \/><\/figure>\n\n\n\n<h2 class=\"wp-block-heading\">G\u1ed1m s\u1ee9 cao c\u1ea5p l\u00e0 g\u00ec?<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\"><a href=\"https:\/\/www.xkh-ceramics.com\/vi\/san-pham-2\/\" data-type=\"page\" data-id=\"1921\">G\u1ed1m s\u1ee9 cao c\u1ea5p<\/a>, \u0111\u00f4i khi c\u00f2n \u0111\u01b0\u1ee3c g\u1ecdi l\u00e0 g\u1ed1m k\u1ef9 thu\u1eadt ho\u1eb7c g\u1ed1m c\u00f4ng nghi\u1ec7p, l\u00e0 nh\u1eefng v\u1eadt li\u1ec7u hi\u1ec7u su\u1ea5t cao \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf \u0111\u1eb7c bi\u1ec7t cho c\u00e1c \u1ee9ng d\u1ee5ng c\u00f4ng nghi\u1ec7p \u0111\u00f2i h\u1ecfi kh\u1eaft khe. Kh\u00e1c v\u1edbi g\u1ed1m truy\u1ec1n th\u1ed1ng d\u00f9ng cho m\u1ee5c \u0111\u00edch k\u1ebft c\u1ea5u ho\u1eb7c gia d\u1ee5ng, g\u1ed1m ti\u00ean ti\u1ebfn c\u00f3 th\u00e0nh ph\u1ea7n v\u00e0 c\u1ea5u tr\u00fac vi m\u00f4 \u0111\u01b0\u1ee3c ki\u1ec3m so\u00e1t ch\u1eb7t ch\u1ebd.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">C\u00e1c v\u1eadt li\u1ec7u g\u1ed1m th\u01b0\u1eddng \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng trong thi\u1ebft b\u1ecb b\u00e1n d\u1eabn bao g\u1ed3m:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Alumina (Al\u2082O\u2083)<\/li>\n\n\n\n<li>Cacbua silic (SiC)<\/li>\n\n\n\n<li>Nitrua nh\u00f4m (AlN)<\/li>\n\n\n\n<li>Zirconia (ZrO\u2082)<\/li>\n\n\n\n<li>Nitrua silic (Si\u2083N\u2084)<\/li>\n\n\n\n<li>Nitrua bo (BN)<\/li>\n\n\n\n<li>G\u1ed1m th\u1ea1ch anh<\/li>\n\n\n\n<li>G\u1ed1m s\u1ee9 g\u1ed1c yttria<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">C\u00e1c v\u1eadt li\u1ec7u n\u00e0y \u0111\u01b0\u1ee3c l\u1ef1a ch\u1ecdn d\u1ef1a tr\u00ean c\u00e1c y\u00eau c\u1ea7u c\u1ee7a quy tr\u00ecnh, ch\u1eb3ng h\u1ea1n nh\u01b0 kh\u1ea3 n\u0103ng ch\u1ecbu nhi\u1ec7t, t\u00ednh t\u01b0\u01a1ng th\u00edch v\u1edbi plasma, \u0111\u1ed9 d\u1eabn nhi\u1ec7t v\u00e0 \u0111\u1ed9 nh\u1ea1y c\u1ea3m v\u1edbi \u00f4 nhi\u1ec5m.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">Nh\u1eefng th\u00e1ch th\u1ee9c m\u00e0 ng\u00e0nh thi\u1ebft b\u1ecb b\u00e1n d\u1eabn ph\u1ea3i \u0111\u1ed1i m\u1eb7t<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">M\u00f4i tr\u01b0\u1eddng s\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn khi\u1ebfn c\u00e1c linh ki\u1ec7n ph\u1ea3i ch\u1ecbu t\u00e1c \u0111\u1ed9ng c\u1ee7a nhi\u1ec1u \u0111i\u1ec1u ki\u1ec7n kh\u1eafc nghi\u1ec7t c\u00f9ng m\u1ed9t l\u00fac.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">C\u00e1c th\u00e1ch th\u1ee9c v\u1eadn h\u00e0nh \u0111i\u1ec3n h\u00ecnh bao g\u1ed3m:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Nhi\u1ec7t \u0111\u1ed9 tr\u00ean 1000\u00b0C<\/li>\n\n\n\n<li>Kh\u00ed qu\u00e1 tr\u00ecnh c\u00f3 t\u00ednh \u0103n m\u00f2n<\/li>\n\n\n\n<li>Ph\u00f3ng x\u1ea1 plasma<\/li>\n\n\n\n<li>M\u00f4i tr\u01b0\u1eddng ch\u00e2n kh\u00f4ng cao<\/li>\n\n\n\n<li>M\u00e0i m\u00f2n c\u01a1 h\u1ecdc<\/li>\n\n\n\n<li>\u00d4 nhi\u1ec5m do h\u1ea1t<\/li>\n\n\n\n<li>Chu k\u1ef3 nhi\u1ec7t<\/li>\n\n\n\n<li>Y\u00eau c\u1ea7u v\u1ec1 s\u1ea3n xu\u1ea5t si\u00eau s\u1ea1ch<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">C\u00e1c v\u1eadt li\u1ec7u \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng b\u00ean trong thi\u1ebft b\u1ecb ch\u1ebf bi\u1ebfn ph\u1ea3i \u0111\u1ea3m b\u1ea3o \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh k\u00edch th\u01b0\u1edbc v\u00e0 tr\u00e1nh g\u00e2y ra c\u00e1c t\u1ea1p ch\u1ea5t c\u00f3 th\u1ec3 l\u00e0m h\u1ecfng c\u00e1c t\u1ea5m wafer.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">Ngay c\u1ea3 s\u1ef1 suy gi\u1ea3m ch\u1ea5t l\u01b0\u1ee3ng v\u1eadt li\u1ec7u \u1edf m\u1ee9c vi m\u00f4 c\u0169ng c\u00f3 th\u1ec3 l\u00e0m gi\u1ea3m n\u0103ng su\u1ea5t.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">T\u00ednh \u1ed5n \u0111\u1ecbnh nhi\u1ec7t \u0111\u01b0\u1ee3c c\u1ea3i thi\u1ec7n<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">M\u1ed9t trong nh\u1eefng \u01b0u \u0111i\u1ec3m n\u1ed5i b\u1eadt nh\u1ea5t c\u1ee7a g\u1ed1m s\u1ee9 cao c\u1ea5p l\u00e0 kh\u1ea3 n\u0103ng duy tr\u00ec hi\u1ec7u su\u1ea5t \u1edf nhi\u1ec7t \u0111\u1ed9 cao.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">Nhi\u1ec1u quy tr\u00ecnh s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn \u2014 bao g\u1ed3m oxy h\u00f3a, khu\u1ebfch t\u00e1n, epitaxy v\u00e0 \u1ee7 nhi\u1ec7t \u2014 \u0111\u00f2i h\u1ecfi ph\u1ea3i duy tr\u00ec ho\u1ea1t \u0111\u1ed9ng trong \u0111i\u1ec1u ki\u1ec7n nhi\u1ec7t \u0111\u1ed9 cao.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">V\u00ed d\u1ee5:<\/p>\n\n\n\n<figure class=\"wp-block-table\"><table class=\"has-fixed-layout\"><thead><tr><th>Ch\u1ea5t li\u1ec7u<\/th><th>Nhi\u1ec7t \u0111\u1ed9 ho\u1ea1t \u0111\u1ed9ng t\u1ed1i \u0111a<\/th><\/tr><\/thead><tbody><tr><td>Th\u00e9p kh\u00f4ng g\u1ec9<\/td><td>~800\u00b0C<\/td><\/tr><tr><td>G\u1ed1m alumina<\/td><td>~1.600\u00b0C<\/td><\/tr><tr><td>Cacbua silic<\/td><td>&gt;1600\u00b0C<\/td><\/tr><tr><td>Nitrua nh\u00f4m<\/td><td>~1.400\u00b0C<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<p class=\"wp-block-paragraph\">G\u1ed1m s\u1ee9 v\u1eabn gi\u1eef \u0111\u01b0\u1ee3c \u0111\u1ed9 b\u1ec1n c\u01a1 h\u1ecdc v\u00e0 \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh k\u00edch th\u01b0\u1edbc \u1edf nh\u1eefng nhi\u1ec7t \u0111\u1ed9 m\u00e0 kim lo\u1ea1i th\u00f4ng th\u01b0\u1eddng c\u00f3 th\u1ec3 b\u1ecb m\u1ec1m ho\u1eb7c bi\u1ebfn d\u1ea1ng.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">C\u00e1c h\u00ecnh h\u1ecdc \u1ed5n \u0111\u1ecbnh gi\u00fap n\u00e2ng cao \u0111\u1ed9 l\u1eb7p l\u1ea1i c\u1ee7a quy tr\u00ecnh v\u00e0 \u0111\u1ed9 ch\u00ednh x\u00e1c c\u1ee7a thi\u1ebft b\u1ecb.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">Kh\u1ea3 n\u0103ng ch\u1ed1ng h\u00f3a ch\u1ea5t v\u01b0\u1ee3t tr\u1ed9i<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">Qu\u00e1 tr\u00ecnh s\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn s\u1eed d\u1ee5ng c\u00e1c ch\u1ea5t c\u00f3 t\u00ednh ph\u1ea3n \u1ee9ng cao nh\u01b0:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>C\u00e1c lo\u1ea1i kh\u00ed ch\u1ee9a flo<\/li>\n\n\n\n<li>H\u00f3a h\u1ecdc clo<\/li>\n\n\n\n<li>Axit m\u1ea1nh<\/li>\n\n\n\n<li>C\u00e1c g\u1ed1c t\u1ef1 do do plasma t\u1ea1o ra<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">Nhi\u1ec1u kim lo\u1ea1i b\u1ecb \u0103n m\u00f2n ho\u1eb7c ph\u1ea3n \u1ee9ng d\u1ea7n d\u1ea7n trong nh\u1eefng m\u00f4i tr\u01b0\u1eddng n\u00e0y.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">G\u1ed1m s\u1ee9 cao c\u1ea5p c\u00f3 kh\u1ea3 n\u0103ng ch\u1ed1ng l\u1ea1i s\u1ef1 \u0103n m\u00f2n h\u00f3a h\u1ecdc m\u1ed9t c\u00e1ch v\u01b0\u1ee3t tr\u1ed9i.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">V\u00ed d\u1ee5:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Alumina c\u00f3 kh\u1ea3 n\u0103ng ch\u1ecbu \u0111\u01b0\u1ee3c m\u00f4i tr\u01b0\u1eddng axit v\u00e0 ki\u1ec1m<\/li>\n\n\n\n<li>Cacbua silic ch\u1ecbu \u0111\u01b0\u1ee3c c\u00e1c lo\u1ea1i kh\u00ed c\u00f4ng ngh\u1ec7 c\u00f3 t\u00ednh \u0103n m\u00f2n cao<\/li>\n\n\n\n<li>V\u1eadt li\u1ec7u th\u1ea1ch anh c\u00f3 kh\u1ea3 n\u0103ng ch\u1ed1ng l\u1ea1i nhi\u1ec1u ph\u1ea3n \u1ee9ng h\u00f3a h\u1ecdc<\/li>\n\n\n\n<li>L\u1edbp ph\u1ee7 yttria gi\u00fap t\u0103ng \u0111\u1ed9 b\u1ec1n c\u1ee7a plasma<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u0110\u1eb7c t\u00ednh ch\u1ed1ng ch\u1ecbu n\u00e0y gi\u00fap k\u00e9o d\u00e0i tu\u1ed5i th\u1ecd c\u1ee7a linh ki\u1ec7n v\u00e0 gi\u1ea3m thi\u1ec3u r\u1ee7i ro \u00f4 nhi\u1ec5m.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">Gi\u1ea3m l\u01b0\u1ee3ng h\u1ea1t sinh ra<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u00d4 nhi\u1ec5m h\u1ea1t l\u00e0 m\u1ed9t trong nh\u1eefng v\u1ea5n \u0111\u1ec1 \u0111\u00e1ng lo ng\u1ea1i nh\u1ea5t trong qu\u00e1 tr\u00ecnh s\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">C\u00e1c h\u1ea1t b\u1ee5i sinh ra do s\u1ef1 m\u00e0i m\u00f2n c\u1ee7a c\u00e1c b\u1ed9 ph\u1eadn ho\u1eb7c s\u1ef1 xu\u1ed1ng c\u1ea5p c\u1ee7a b\u1ec1 m\u1eb7t c\u00f3 th\u1ec3:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>g\u00e2y ra c\u00e1c khuy\u1ebft t\u1eadt tr\u00ean t\u1ea5m wafer<\/li>\n\n\n\n<li>gi\u1ea3m n\u0103ng su\u1ea5t s\u1ea3n xu\u1ea5t<\/li>\n\n\n\n<li>ng\u1eaft c\u00e1c ti\u1ebfn tr\u00ecnh<\/li>\n\n\n\n<li>l\u00e0m t\u0103ng chi ph\u00ed b\u1ea3o tr\u00ec<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">G\u1ed1m s\u1ee9 cao c\u1ea5p c\u00f3 \u0111\u1ed9 c\u1ee9ng cao v\u00e0 kh\u1ea3 n\u0103ng ch\u1ed1ng m\u00e0i m\u00f2n t\u1ed1t.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">Do \u0111\u00f3:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>ma s\u00e1t gi\u1ea3m<\/li>\n\n\n\n<li>s\u1ef1 m\u00e0i m\u00f2n \u0111\u01b0\u1ee3c gi\u1ea3m thi\u1ec3u<\/li>\n\n\n\n<li>s\u1ed1 l\u01b0\u1ee3ng h\u1ea1t \u0111\u01b0\u1ee3c th\u1ea3i ra \u00edt h\u01a1n<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">M\u1ee9c \u0111\u1ed9 \u00f4 nhi\u1ec5m th\u1ea5p h\u01a1n gi\u00fap c\u1ea3i thi\u1ec7n tr\u1ef1c ti\u1ebfp t\u00ednh \u1ed5n \u0111\u1ecbnh c\u1ee7a quy tr\u00ecnh.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">Kh\u1ea3 n\u0103ng ch\u1ed1ng plasma \u0111\u01b0\u1ee3c c\u1ea3i thi\u1ec7n<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">Qu\u00e1 tr\u00ecnh x\u1eed l\u00fd b\u1eb1ng plasma \u0111\u00f3ng vai tr\u00f2 then ch\u1ed1t trong s\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">C\u00e1c quy tr\u00ecnh nh\u01b0:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>kh\u1eafc kh\u00f4<\/li>\n\n\n\n<li>ph\u01b0\u01a1ng ph\u00e1p l\u1eafng \u0111\u1ecdng \u0111\u01b0\u1ee3c h\u1ed7 tr\u1ee3 b\u1edfi plasma<\/li>\n\n\n\n<li>V\u1ec7 sinh bu\u1ed3ng<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u0111\u01b0a c\u00e1c th\u00e0nh ph\u1ea7n v\u00e0o m\u00f4i tr\u01b0\u1eddng b\u1ecb b\u1eafn ph\u00e1 b\u1edfi c\u00e1c ion n\u0103ng l\u01b0\u1ee3ng cao.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">M\u00f4i tr\u01b0\u1eddng plasma d\u1ea7n d\u1ea7n l\u00e0m m\u00f2n v\u1eadt li\u1ec7u.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">G\u1ed1m s\u1ee9 cao c\u1ea5p gi\u00fap gi\u1ea3i quy\u1ebft v\u1ea5n \u0111\u1ec1 n\u00e0y.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">G\u1ed1m s\u1ee9 l\u00e0m t\u1eeb cacbua silic v\u00e0 yttria c\u00f3 kh\u1ea3 n\u0103ng ch\u1ed1ng plasma \u0111\u1eb7c bi\u1ec7t cao.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">So v\u1edbi c\u00e1c v\u1eadt li\u1ec7u truy\u1ec1n th\u1ed1ng:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>c\u00e1c b\u1ed9 ph\u1eadn c\u1ee7a bu\u1ed3ng c\u00f3 tu\u1ed5i th\u1ecd cao h\u01a1n<\/li>\n\n\n\n<li>kho\u1ea3ng th\u1eddi gian b\u1ea3o d\u01b0\u1ee1ng \u0111\u01b0\u1ee3c k\u00e9o d\u00e0i<\/li>\n\n\n\n<li>s\u1ef1 sai l\u1ec7ch c\u1ee7a quy tr\u00ecnh gi\u1ea3m<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u0110i\u1ec1u n\u00e0y gi\u00fap t\u0103ng th\u1eddi gian ho\u1ea1t \u0111\u1ed9ng c\u1ee7a thi\u1ebft b\u1ecb.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">\u0110\u1ed9 \u1ed5n \u0111\u1ecbnh k\u00edch th\u01b0\u1edbc cao h\u01a1n<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">Ng\u00e0nh s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn hi\u1ec7n \u0111\u1ea1i ph\u1ee5 thu\u1ed9c r\u1ea5t nhi\u1ec1u v\u00e0o vi\u1ec7c c\u0103n ch\u1ec9nh ch\u00ednh x\u00e1c v\u00e0 ki\u1ec3m so\u00e1t h\u00ecnh h\u1ecdc.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">Nhi\u1ec1u b\u1ed9 ph\u1eadn ph\u1ea3i \u0111\u1ea3m b\u1ea3o \u0111\u1ed9 ch\u00ednh x\u00e1c trong ph\u1ea1m vi micromet.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">G\u1ed1m s\u1ee9 n\u00f3i chung c\u00f3 nh\u1eefng \u0111\u1eb7c \u0111i\u1ec3m sau:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>h\u1ec7 s\u1ed1 gi\u00e3n n\u1edf nhi\u1ec7t th\u1ea5p<\/li>\n\n\n\n<li>\u0111\u1ed9 c\u1ee9ng cao<\/li>\n\n\n\n<li>kh\u1ea3 n\u0103ng ch\u1ed1ng tr\u01b0\u1ee3t tuy\u1ec7t v\u1eddi<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">Khi nhi\u1ec7t \u0111\u1ed9 thay \u0111\u1ed5i, c\u00e1c b\u1ed9 ph\u1eadn g\u1ed1m s\u1ee9 ch\u1ec9 b\u1ecb bi\u1ebfn d\u1ea1ng k\u00edch th\u01b0\u1edbc \u1edf m\u1ee9c t\u1ed1i thi\u1ec3u.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">K\u00edch th\u01b0\u1edbc \u1ed5n \u0111\u1ecbnh \u0111\u01b0\u1ee3c c\u1ea3i thi\u1ec7n:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0110\u1ed9 ch\u00ednh x\u00e1c \u0111\u1ecbnh v\u1ecb t\u1ea5m wafer<\/li>\n\n\n\n<li>\u0111\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u trong bu\u1ed3ng<\/li>\n\n\n\n<li>\u0111\u1ed9 l\u1eb7p l\u1ea1i c\u1ee7a quy tr\u00ecnh<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">C\u00e1c t\u00ednh ch\u1ea5t \u0111i\u1ec7n \u0111\u01b0\u1ee3c c\u1ea3i thi\u1ec7n<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">Hi\u1ec7u su\u1ea5t \u0111i\u1ec7n c\u0169ng \u1ea3nh h\u01b0\u1edfng \u0111\u1ebfn thi\u1ebft k\u1ebf thi\u1ebft b\u1ecb b\u00e1n d\u1eabn.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">C\u00e1c lo\u1ea1i v\u1eadt li\u1ec7u g\u1ed1m kh\u00e1c nhau mang l\u1ea1i nh\u1eefng \u0111\u1eb7c t\u00ednh \u0111i\u1ec7n ri\u00eang bi\u1ec7t:<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">C\u00e1ch \u0111i\u1ec7n<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">Alumina v\u00e0 zirconia c\u00f3 t\u00ednh ch\u1ea5t \u0111i\u1ec7n m\u00f4i r\u1ea5t t\u1ed1t.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">C\u00e1c \u1ee9ng d\u1ee5ng bao g\u1ed3m:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>c\u00e1c b\u1ed9 c\u00e1ch \u0111i\u1ec7n<\/li>\n\n\n\n<li>c\u00e1c b\u1ed9 truy\u1ec1n qua<\/li>\n\n\n\n<li>c\u00e1c c\u00f4ng tr\u00ecnh c\u00e1ch ly<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">\u0110\u1ed9 d\u1eabn nhi\u1ec7t k\u1ebft h\u1ee3p v\u1edbi t\u00ednh c\u00e1ch \u0111i\u1ec7n<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">H\u1ee3p ch\u1ea5t nitrua nh\u00f4m:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0111\u1ed9 d\u1eabn nhi\u1ec7t cao<\/li>\n\n\n\n<li>c\u00e1ch \u0111i\u1ec7n<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">S\u1ef1 k\u1ebft h\u1ee3p n\u00e0y \u0111\u1eb7c bi\u1ec7t c\u00f3 gi\u00e1 tr\u1ecb trong l\u0129nh v\u1ef1c \u0111i\u1ec7n t\u1eed c\u00f4ng su\u1ea5t v\u00e0 c\u00e1c h\u1ec7 th\u1ed1ng t\u0129nh \u0111i\u1ec7n.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">C\u00e1c \u1ee9ng d\u1ee5ng ch\u00ednh c\u1ee7a g\u1ed1m s\u1ee9 trong thi\u1ebft b\u1ecb b\u00e1n d\u1eabn<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">G\u1ed1m s\u1ee9 cao c\u1ea5p \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i trong c\u00e1c h\u1ec7 th\u1ed1ng s\u1ea3n xu\u1ea5t.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">C\u00e1c \u1ee9ng d\u1ee5ng ph\u1ed5 bi\u1ebfn bao g\u1ed3m:<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">C\u00e1c b\u1ed9 ph\u1eadn x\u1eed l\u00fd t\u1ea5m wafer<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>b\u1ed9 k\u1eb9p wafer<\/li>\n\n\n\n<li>c\u00e1c b\u1ed9 ph\u1eadn \u0111\u1ea7u cu\u1ed1i<\/li>\n\n\n\n<li>c\u00e1nh tay \u0111\u1ee1<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">H\u1ec7 th\u1ed1ng x\u1eed l\u00fd nhi\u1ec7t<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u1ed1ng l\u00f2<\/li>\n\n\n\n<li>thuy\u1ec1n b\u00e1nh wafer<\/li>\n\n\n\n<li>nh\u00e0 m\u1ea1ng<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">Thi\u1ebft b\u1ecb plasma<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>v\u00f2ng l\u1ea5y n\u00e9t<\/li>\n\n\n\n<li>l\u1edbp l\u00f3t bu\u1ed3ng<\/li>\n\n\n\n<li>b\u1ea3ng ph\u00e2n ph\u1ed1i kh\u00ed<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">H\u1ec7 th\u1ed1ng ch\u00e2n kh\u00f4ng<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>con d\u1ea5u<\/li>\n\n\n\n<li>c\u00e1c b\u1ed9 c\u00e1ch \u0111i\u1ec7n<\/li>\n\n\n\n<li>c\u1ea5u tr\u00fac h\u1ed7 tr\u1ee3<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">V\u1eadt t\u01b0 ti\u00eau hao trong ng\u00e0nh b\u00e1n d\u1eabn<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">Nhi\u1ec1u linh ki\u1ec7n ti\u00eau hao ng\u00e0y c\u00e0ng ph\u1ee5 thu\u1ed9c v\u00e0o c\u00e1c v\u1eadt li\u1ec7u g\u1ed1m ti\u00ean ti\u1ebfn.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">So s\u00e1nh c\u00e1c l\u1ef1a ch\u1ecdn v\u1eadt li\u1ec7u b\u00e1n d\u1eabn<\/h2>\n\n\n\n<figure class=\"wp-block-table\"><table class=\"has-fixed-layout\"><thead><tr><th>T\u00e0i s\u1ea3n<\/th><th>G\u1ed1m s\u1ee9 cao c\u1ea5p<\/th><th>Th\u00e9p kh\u00f4ng g\u1ec9<\/th><th>Nh\u1ef1a k\u1ef9 thu\u1eadt<\/th><\/tr><\/thead><tbody><tr><td>Kh\u1ea3 n\u0103ng ch\u1ecbu nhi\u1ec7t<\/td><td>Tuy\u1ec7t v\u1eddi<\/td><td>Trung b\u00ecnh<\/td><td>Th\u1ea5p<\/td><\/tr><tr><td>Kh\u1ea3 n\u0103ng ch\u1ed1ng \u0103n m\u00f2n<\/td><td>Tuy\u1ec7t v\u1eddi<\/td><td>Trung b\u00ecnh<\/td><td>Trung b\u00ecnh<\/td><\/tr><tr><td>\u0110\u1ed9 c\u1ee9ng<\/td><td>Cao<\/td><td>Trung b\u00ecnh<\/td><td>Th\u1ea5p<\/td><\/tr><tr><td>\u0110i\u1ec7n tr\u1edf plasma<\/td><td>Tuy\u1ec7t v\u1eddi<\/td><td>Ngh\u00e8o<\/td><td>R\u1ea5t k\u00e9m<\/td><\/tr><tr><td>T\u1ea1o h\u1ea1t<\/td><td>R\u1ea5t th\u1ea5p<\/td><td>Trung b\u00ecnh<\/td><td>Cao<\/td><\/tr><tr><td>\u0110\u1ed9 \u1ed5n \u0111\u1ecbnh k\u00edch th\u01b0\u1edbc<\/td><td>Tuy\u1ec7t v\u1eddi<\/td><td>Trung b\u00ecnh<\/td><td>Trung b\u00ecnh<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<p class=\"wp-block-paragraph\">So s\u00e1nh n\u00e0y cho th\u1ea5y l\u00fd do t\u1ea1i sao vi\u1ec7c \u1ee9ng d\u1ee5ng g\u1ed1m s\u1ee9 ti\u1ebfp t\u1ee5c m\u1edf r\u1ed9ng trong c\u00e1c h\u1ec7 th\u1ed1ng b\u00e1n d\u1eabn.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">Xu h\u01b0\u1edbng t\u01b0\u01a1ng lai trong l\u0129nh v\u1ef1c g\u1ed1m b\u00e1n d\u1eabn<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">S\u1ef1 ph\u00e1t tri\u1ec3n c\u1ee7a c\u00f4ng ngh\u1ec7 b\u00e1n d\u1eabn ti\u1ebfp t\u1ee5c th\u00fac \u0111\u1ea9y s\u1ef1 \u0111\u1ed5i m\u1edbi v\u1ec1 v\u1eadt li\u1ec7u.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">C\u00e1c k\u1ebf ho\u1ea1ch ph\u00e1t tri\u1ec3n trong t\u01b0\u01a1ng lai bao g\u1ed3m:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>g\u1ed1m s\u1ee9 c\u00f3 \u0111\u1ed9 tinh khi\u1ebft c\u1ef1c cao<\/li>\n\n\n\n<li>c\u00e1c linh ki\u1ec7n b\u00e1n d\u1eabn c\u00f3 k\u00edch th\u01b0\u1edbc l\u1edbn h\u01a1n<\/li>\n\n\n\n<li>l\u1edbp ph\u1ee7 ch\u1ed1ng plasma<\/li>\n\n\n\n<li>v\u1eadt li\u1ec7u composite n\u1ec1n g\u1ed1m<\/li>\n\n\n\n<li>S\u1ea3n xu\u1ea5t gia c\u00f4ng c\u00e1c c\u1ea5u tr\u00fac g\u1ed1m<\/li>\n\n\n\n<li>v\u1eadt li\u1ec7u \u0111\u01b0\u1ee3c t\u1ed1i \u01b0u h\u00f3a cho c\u00e1c c\u00f4ng ngh\u1ec7 d\u01b0\u1edbi 2 nm<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">Khi thi\u1ebft b\u1ecb b\u00e1n d\u1eabn ng\u00e0y c\u00e0ng tr\u1edf n\u00ean tinh vi h\u01a1n, c\u00e1c y\u00eau c\u1ea7u v\u1ec1 hi\u1ec7u su\u1ea5t v\u1eadt li\u1ec7u s\u1ebd ti\u1ebfp t\u1ee5c t\u0103ng l\u00ean.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">K\u1ebft lu\u1eadn<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">G\u1ed1m s\u1ee9 cao c\u1ea5p \u0111\u00e3 tr\u1edf th\u00e0nh v\u1eadt li\u1ec7u n\u1ec1n t\u1ea3ng cho ng\u00e0nh s\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn hi\u1ec7n \u0111\u1ea1i. Kh\u1ea3 n\u0103ng ch\u1ecbu nhi\u1ec7t v\u01b0\u1ee3t tr\u1ed9i, \u0111\u1ed9 b\u1ec1n m\u00e0i m\u00f2n, \u0111\u1ed9 b\u1ec1n trong m\u00f4i tr\u01b0\u1eddng plasma, t\u00ednh \u1ed5n \u0111\u1ecbnh h\u00f3a h\u1ecdc v\u00e0 kh\u1ea3 n\u0103ng ki\u1ec3m so\u00e1t \u00f4 nhi\u1ec5m c\u1ee7a ch\u00fang g\u00f3p ph\u1ea7n tr\u1ef1c ti\u1ebfp n\u00e2ng cao hi\u1ec7u su\u1ea5t thi\u1ebft b\u1ecb v\u00e0 \u0111\u1ed9 tin c\u1eady c\u1ee7a quy tr\u00ecnh s\u1ea3n xu\u1ea5t.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">Thay v\u00ec ch\u1ec9 \u0111\u00f3ng vai tr\u00f2 l\u00e0 v\u1eadt li\u1ec7u k\u1ebft c\u1ea5u, g\u1ed1m s\u1ee9 ti\u00ean ti\u1ebfn ng\u00e0y c\u00e0ng tr\u1edf th\u00e0nh y\u1ebfu t\u1ed1 c\u00f4ng ngh\u1ec7 then ch\u1ed1t cho c\u00e1c h\u1ec7 th\u1ed1ng b\u00e1n d\u1eabn th\u1ebf h\u1ec7 m\u1edbi.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">Khi ki\u1ebfn tr\u00fac thi\u1ebft b\u1ecb ng\u00e0y c\u00e0ng ph\u00e1t tri\u1ec3n, v\u1eadt li\u1ec7u g\u1ed1m s\u1ebd \u0111\u00f3ng vai tr\u00f2 ng\u00e0y c\u00e0ng quan tr\u1ecdng h\u01a1n trong vi\u1ec7c h\u1ed7 tr\u1ee3 t\u01b0\u01a1ng lai c\u1ee7a ng\u00e0nh s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">C\u00e2u h\u1ecfi th\u01b0\u1eddng g\u1eb7p<\/h3>\n\n\n<div id=\"rank-math-faq\" class=\"rank-math-block\">\n<div class=\"rank-math-list\">\n<div id=\"faq-question-1779328185097\" class=\"rank-math-list-item\">\n<h3 class=\"rank-math-question\">T\u1ea1i sao g\u1ed1m s\u1ee9 l\u1ea1i \u0111\u01b0\u1ee3c \u01b0a chu\u1ed9ng h\u01a1n kim lo\u1ea1i trong thi\u1ebft b\u1ecb b\u00e1n d\u1eabn?<\/h3>\n<div class=\"rank-math-answer\">\n\n<p>So v\u1edbi nhi\u1ec1u lo\u1ea1i kim lo\u1ea1i, g\u1ed1m s\u1ee9 c\u00f3 kh\u1ea3 n\u0103ng ch\u1ecbu nhi\u1ec7t, \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh h\u00f3a h\u1ecdc v\u00e0 kh\u1ea3 n\u0103ng ch\u1ed1ng m\u00e0i m\u00f2n t\u1ed1t h\u01a1n, \u0111\u1ed3ng th\u1eddi c\u00f3 nguy c\u01a1 g\u00e2y \u00f4 nhi\u1ec5m th\u1ea5p h\u01a1n.<\/p>\n\n<\/div>\n<\/div>\n<div id=\"faq-question-1779328205110\" class=\"rank-math-list-item\">\n<h3 class=\"rank-math-question\">Lo\u1ea1i v\u1eadt li\u1ec7u g\u1ed1m n\u00e0o \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng ph\u1ed5 bi\u1ebfn nh\u1ea5t trong s\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn?<\/h3>\n<div class=\"rank-math-answer\">\n\n<p>Alumina v\u00e0 cacbua silic l\u00e0 hai trong s\u1ed1 nh\u1eefng v\u1eadt li\u1ec7u g\u1ed1m \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i nh\u1ea5t, m\u1eb7c d\u00f9 vi\u1ec7c l\u1ef1a ch\u1ecdn v\u1eadt li\u1ec7u c\u1ee5 th\u1ec3 ph\u1ee5 thu\u1ed9c v\u00e0o t\u1eebng \u1ee9ng d\u1ee5ng c\u1ee5 th\u1ec3.<\/p>\n\n<\/div>\n<\/div>\n<div id=\"faq-question-1779328229886\" class=\"rank-math-list-item\">\n<h3 class=\"rank-math-question\">G\u1ed1m s\u1ee9 c\u00f3 th\u1ec3 ch\u1ecbu \u0111\u01b0\u1ee3c m\u00f4i tr\u01b0\u1eddng plasma kh\u00f4ng?<\/h3>\n<div class=\"rank-math-answer\">\n\n<p>\u0110\u00fang v\u1eady. M\u1ed9t s\u1ed1 v\u1eadt li\u1ec7u nh\u01b0 cacbua silic v\u00e0 g\u1ed1m s\u1ee9 g\u1ed1c yttria c\u00f3 kh\u1ea3 n\u0103ng ch\u1ed1ng plasma r\u1ea5t t\u1ed1t v\u00e0 \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i trong c\u00e1c h\u1ec7 th\u1ed1ng kh\u1eafc.<\/p>\n\n<\/div>\n<\/div>\n<\/div>\n<\/div>","protected":false},"excerpt":{"rendered":"<p>The semiconductor industry operates at the limits of precision engineering. Modern fabrication processes require extreme temperatures, highly reactive chemicals, plasma exposure, vacuum environments, and contamination control at microscopic scales. As integrated circuits continue advancing toward smaller process nodes and larger wafer sizes, equipment performance requirements become increasingly demanding. Under these conditions, material selection becomes a [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":2102,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[4],"tags":[46,37,311,471,510,90,75,38,289],"class_list":["post-2291","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-technical-insights","tag-advanced-ceramics","tag-alumina-ceramics","tag-industrial-ceramics","tag-plasma-resistant-ceramics","tag-semiconductor-consumables","tag-semiconductor-equipment","tag-semiconductor-materials","tag-silicon-carbide-ceramics","tag-wafer-processing"],"_links":{"self":[{"href":"https:\/\/www.xkh-ceramics.com\/vi\/wp-json\/wp\/v2\/posts\/2291","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.xkh-ceramics.com\/vi\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.xkh-ceramics.com\/vi\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/vi\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/vi\/wp-json\/wp\/v2\/comments?post=2291"}],"version-history":[{"count":1,"href":"https:\/\/www.xkh-ceramics.com\/vi\/wp-json\/wp\/v2\/posts\/2291\/revisions"}],"predecessor-version":[{"id":2292,"href":"https:\/\/www.xkh-ceramics.com\/vi\/wp-json\/wp\/v2\/posts\/2291\/revisions\/2292"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/vi\/wp-json\/wp\/v2\/media\/2102"}],"wp:attachment":[{"href":"https:\/\/www.xkh-ceramics.com\/vi\/wp-json\/wp\/v2\/media?parent=2291"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/vi\/wp-json\/wp\/v2\/categories?post=2291"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/vi\/wp-json\/wp\/v2\/tags?post=2291"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}