{"id":2147,"date":"2026-05-13T06:33:09","date_gmt":"2026-05-13T06:33:09","guid":{"rendered":"https:\/\/www.xkh-ceramics.com\/?p=2147"},"modified":"2026-05-13T06:33:09","modified_gmt":"2026-05-13T06:33:09","slug":"alumina-ceramic-components-in-semiconductor-equipment-functions-structures-and-advanced-applications","status":"publish","type":"post","link":"https:\/\/www.xkh-ceramics.com\/vi\/alumina-ceramic-components-in-semiconductor-equipment-functions-structures-and-advanced-applications\/","title":{"rendered":"C\u00e1c b\u1ed9 ph\u1eadn g\u1ed1m alumina trong thi\u1ebft b\u1ecb b\u00e1n d\u1eabn: Ch\u1ee9c n\u0103ng, c\u1ea5u tr\u00fac v\u00e0 c\u00e1c \u1ee9ng d\u1ee5ng ti\u00ean ti\u1ebfn"},"content":{"rendered":"

Khi c\u00e1c thi\u1ebft b\u1ecb b\u00e1n d\u1eabn ti\u1ebfp t\u1ee5c ph\u00e1t tri\u1ec3n theo h\u01b0\u1edbng k\u00edch th\u01b0\u1edbc n\u00fat nh\u1ecf h\u01a1n, m\u1eadt \u0111\u1ed9 t\u00edch h\u1ee3p cao h\u01a1n v\u00e0 \u0111\u1ed9 ch\u00ednh x\u00e1c x\u1eed l\u00fd cao h\u01a1n, nhu c\u1ea7u v\u1ec1 c\u00e1c v\u1eadt li\u1ec7u si\u00eau s\u1ea1ch, ch\u1ecbu nhi\u1ec7t v\u00e0 \u1ed5n \u0111\u1ecbnh trong m\u00f4i tr\u01b0\u1eddng plasma b\u00ean trong thi\u1ebft b\u1ecb b\u00e1n d\u1eabn \u0111\u00e3 t\u0103ng l\u00ean \u0111\u00e1ng k\u1ec3. Trong s\u1ed1 c\u00e1c lo\u1ea1i g\u1ed1m k\u1ef9 thu\u1eadt ti\u00ean ti\u1ebfn, g\u1ed1m alumina (Al\u2082O\u2083) c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao v\u1eabn l\u00e0 m\u1ed9t trong nh\u1eefng v\u1eadt li\u1ec7u \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i nh\u1ea5t trong c\u00e1c h\u1ec7 th\u1ed1ng s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn.<\/p>\n\n\n\n

T\u1eeb bu\u1ed3ng kh\u1eafc plasma \u0111\u1ebfn h\u1ec7 th\u1ed1ng x\u1eed l\u00fd t\u1ea5m wafer v\u00e0 thi\u1ebft b\u1ecb x\u1eed l\u00fd nhi\u1ec7t, c\u00e1c b\u1ed9 ph\u1eadn g\u1ed1m alumina mang l\u1ea1i kh\u1ea3 n\u0103ng c\u00e1ch \u0111i\u1ec7n tuy\u1ec7t v\u1eddi, \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh c\u01a1 h\u1ecdc, kh\u1ea3 n\u0103ng ch\u1ed1ng m\u00e0i m\u00f2n v\u00e0 ch\u1ed1ng \u0103n m\u00f2n trong c\u00e1c \u0111i\u1ec1u ki\u1ec7n v\u1eadn h\u00e0nh kh\u1eafc nghi\u1ec7t.<\/p>\n\n\n\n

H\u00f4m nay, g\u1ed1m nh\u00f4m oxit c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao<\/a> \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i trong c\u00e1c thi\u1ebft b\u1ecb s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn, bao g\u1ed3m h\u1ec7 th\u1ed1ng kh\u1eafc, thi\u1ebft b\u1ecb l\u1eafng \u0111\u1ecdng, n\u1ec1n t\u1ea3ng CMP, h\u1ec7 th\u1ed1ng c\u1ea5y ion, l\u00f2 khu\u1ebfch t\u00e1n v\u00e0 m\u00f4-\u0111un chuy\u1ec3n wafer.<\/p>\n\n\n\n

\"\"<\/figure>\n\n\n\n

T\u1ea1i sao g\u1ed1m alumina l\u1ea1i quan tr\u1ecdng trong s\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn<\/h1>\n\n\n\n

Qu\u00e1 tr\u00ecnh s\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn bao g\u1ed3m nhi\u1ec1u quy tr\u00ecnh \u0111\u01b0\u1ee3c ki\u1ec3m so\u00e1t ch\u1eb7t ch\u1ebd nh\u01b0:<\/p>\n\n\n\n

    \n
  • Kh\u1eafc b\u1eb1ng plasma<\/li>\n\n\n\n
  • Ph\u01b0\u01a1ng ph\u00e1p l\u1eafng \u0111\u1ecdng m\u00e0ng m\u1ecfng<\/li>\n\n\n\n
  • Quang kh\u1eafc<\/li>\n\n\n\n
  • \u0110\u00e1nh b\u00f3ng h\u00f3a h\u1ecdc c\u01a1 h\u1ecdc (CMP)<\/li>\n\n\n\n
  • C\u1ea5y ion<\/li>\n\n\n\n
  • \u1ee6 nhi\u1ec7t<\/li>\n\n\n\n
  • Qu\u00e1 tr\u00ecnh oxy h\u00f3a v\u00e0 khu\u1ebfch t\u00e1n<\/li>\n<\/ul>\n\n\n\n

    C\u00e1c quy tr\u00ecnh n\u00e0y khi\u1ebfn c\u00e1c b\u1ed9 ph\u1eadn thi\u1ebft b\u1ecb b\u00ean trong ph\u1ea3i ti\u1ebfp x\u00fac v\u1edbi:<\/p>\n\n\n\n

      \n
    • Plasma n\u0103ng l\u01b0\u1ee3ng cao<\/li>\n\n\n\n
    • M\u00f4i tr\u01b0\u1eddng ch\u00e2n kh\u00f4ng<\/li>\n\n\n\n
    • Kh\u00ed v\u00e0 h\u00f3a ch\u1ea5t \u0103n m\u00f2n<\/li>\n\n\n\n
    • Nhi\u1ec7t \u0111\u1ed9 cao<\/li>\n\n\n\n
    • M\u00e0i m\u00f2n c\u01a1 h\u1ecdc v\u00e0 rung \u0111\u1ed9ng<\/li>\n<\/ul>\n\n\n\n

      C\u00e1c v\u1eadt li\u1ec7u kim lo\u1ea1i truy\u1ec1n th\u1ed1ng th\u01b0\u1eddng g\u1eb7p kh\u00f3 kh\u0103n trong nh\u1eefng m\u00f4i tr\u01b0\u1eddng nh\u01b0 v\u1eady do nguy c\u01a1 nhi\u1ec5m b\u1ea9n, hi\u1ec7n t\u01b0\u1ee3ng gi\u00e3n n\u1edf nhi\u1ec7t ho\u1eb7c t\u00ednh kh\u00f4ng \u1ed5n \u0111\u1ecbnh v\u1ec1 m\u1eb7t h\u00f3a h\u1ecdc. G\u1ed1m alumina c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao gi\u1ea3i quy\u1ebft \u0111\u01b0\u1ee3c nhi\u1ec1u th\u00e1ch th\u1ee9c n\u00e0y nh\u1edd s\u1ef1 k\u1ebft h\u1ee3p \u0111\u1ed9c \u0111\u00e1o c\u1ee7a c\u00e1c t\u00ednh ch\u1ea5t.<\/p>\n\n\n\n

      C\u00e1c t\u00ednh ch\u1ea5t ch\u00ednh c\u1ee7a g\u1ed1m alumina c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao<\/h1>\n\n\n\n

      Alumina c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng trong thi\u1ebft b\u1ecb b\u00e1n d\u1eabn th\u01b0\u1eddng c\u00f3 \u0111\u1ed9 tinh khi\u1ebft v\u01b0\u1ee3t qu\u00e1 99,51% v\u00e0 mang l\u1ea1i nh\u1eefng l\u1ee3i \u00edch sau:<\/p>\n\n\n\n

      Kh\u1ea3 n\u0103ng c\u00e1ch \u0111i\u1ec7n tuy\u1ec7t v\u1eddi<\/h2>\n\n\n\n

      Alumina v\u1eabn duy tr\u00ec \u0111\u1ed9 d\u1eabn \u0111i\u1ec7n th\u1ea5p ngay c\u1ea3 \u1edf nhi\u1ec7t \u0111\u1ed9 cao, khi\u1ebfn n\u00f3 tr\u1edf th\u00e0nh v\u1eadt li\u1ec7u l\u00fd t\u01b0\u1edfng cho c\u00e1c bu\u1ed3ng plasma v\u00e0 h\u1ec7 th\u1ed1ng t\u0129nh \u0111i\u1ec7n.<\/p>\n\n\n\n

      Kh\u1ea3 n\u0103ng ch\u1ed1ng plasma v\u01b0\u1ee3t tr\u1ed9i<\/h2>\n\n\n\n

      V\u1eadt li\u1ec7u n\u00e0y th\u1ec3 hi\u1ec7n kh\u1ea3 n\u0103ng ch\u1ed1ng m\u00e0i m\u00f2n do plasma v\u00e0 s\u1ef1 \u0103n m\u00f2n h\u00f3a h\u1ecdc r\u1ea5t t\u1ed1t trong c\u00e1c m\u00f4i tr\u01b0\u1eddng c\u00f3 ch\u1ee9a flo v\u00e0 clo.<\/p>\n\n\n\n

      \u0110\u1ed9 b\u1ec1n c\u01a1 h\u1ecdc cao<\/h2>\n\n\n\n

      G\u1ed1m alumina mang l\u1ea1i \u0111\u1ed9 c\u1ee9ng, \u0111\u1ed9 b\u1ec1n v\u00e0 t\u00ednh \u1ed5n \u0111\u1ecbnh c\u1ea5u tr\u00fac v\u01b0\u1ee3t tr\u1ed9i trong c\u00e1c \u0111i\u1ec1u ki\u1ec7n v\u1eadn h\u00e0nh kh\u1eafc nghi\u1ec7t.<\/p>\n\n\n\n

      Kh\u1ea3 n\u0103ng ch\u1ed1ng m\u00e0i m\u00f2n v\u01b0\u1ee3t tr\u1ed9i<\/h2>\n\n\n\n

      Nh\u1edd \u0111\u1eb7c t\u00ednh m\u00e0i m\u00f2n th\u1ea5p, nh\u00f4m oxit r\u1ea5t ph\u00f9 h\u1ee3p \u0111\u1ec3 s\u1eed d\u1ee5ng trong c\u00e1c c\u1ee5m c\u01a1 kh\u00ed chuy\u1ec3n \u0111\u1ed9ng v\u00e0 c\u00e1c b\u1ed9 ph\u1eadn ti\u1ebfp x\u00fac v\u1edbi t\u1ea5m wafer.<\/p>\n\n\n\n

      \u0110\u1ed9 \u1ed5n \u0111\u1ecbnh \u1edf nhi\u1ec7t \u0111\u1ed9 cao<\/h2>\n\n\n\n

      Alumina ho\u1ea1t \u0111\u1ed9ng \u1ed5n \u0111\u1ecbnh trong c\u00e1c m\u00f4i tr\u01b0\u1eddng x\u1eed l\u00fd ch\u00e2n kh\u00f4ng v\u00e0 nhi\u1ec7t \u0111\u1ed9 cao th\u01b0\u1eddng g\u1eb7p trong thi\u1ebft b\u1ecb b\u00e1n d\u1eabn.<\/p>\n\n\n\n

      C\u00e1c \u1ee9ng d\u1ee5ng ch\u00ednh c\u1ee7a g\u1ed1m alumina trong c\u00e1c quy tr\u00ecnh s\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn<\/h1>\n\n\n\n

      1. H\u1ec7 th\u1ed1ng kh\u1eafc plasma<\/h2>\n\n\n\n

      Trong thi\u1ebft b\u1ecb kh\u1eafc plasma, g\u1ed1m alumina th\u01b0\u1eddng \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng \u0111\u1ec3:<\/p>\n\n\n\n

        \n
      • L\u1edbp l\u00f3t bu\u1ed3ng<\/li>\n\n\n\n
      • L\u00e1 ch\u1eafn plasma<\/li>\n\n\n\n
      • V\u00f2ng l\u1ea5y n\u00e9t<\/li>\n\n\n\n
      • C\u00e1c b\u1ed9 ph\u1eadn b\u1ea3o v\u1ec7 m\u00e9p<\/li>\n<\/ul>\n\n\n\n

        C\u00e1c b\u1ed9 ph\u1eadn n\u00e0y gi\u00fap gi\u1ea3m thi\u1ec3u \u00f4 nhi\u1ec5m v\u00e0 b\u1ea3o v\u1ec7 c\u1ea5u tr\u00fac bu\u1ed3ng kh\u1ecfi s\u1ef1 \u0103n m\u00f2n do plasma.<\/p>\n\n\n\n

        2. Thi\u1ebft b\u1ecb l\u1eafng \u0111\u1ecdng m\u00e0ng m\u1ecfng<\/h2>\n\n\n\n

        Trong c\u00e1c h\u1ec7 th\u1ed1ng CVD, PECVD v\u00e0 PVD, g\u1ed1m alumina \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i trong:<\/p>\n\n\n\n

          \n
        • M\u00e2m k\u1eb9p t\u0129nh \u0111i\u1ec7n (ESC)<\/li>\n\n\n\n
        • L\u00f2 s\u01b0\u1edfi g\u1ed1m<\/li>\n\n\n\n
        • C\u1ea5u tr\u00fac c\u00e1ch nhi\u1ec7t cho bu\u1ed3ng<\/li>\n\n\n\n
        • C\u00e1c c\u1ee5m ph\u00e2n ph\u1ed1i kh\u00ed<\/li>\n<\/ul>\n\n\n\n

          \u0110\u1ed9 \u1ed5n \u0111\u1ecbnh nhi\u1ec7t v\u00e0 kh\u1ea3 n\u0103ng c\u00e1ch nhi\u1ec7t c\u1ee7a ch\u00fang gi\u00fap duy tr\u00ec c\u00e1c \u0111i\u1ec1u ki\u1ec7n l\u1eafng \u0111\u1ecdng \u0111\u1ed3ng \u0111\u1ec1u.<\/p>\n\n\n\n

          3. \u0110\u00e1nh b\u00f3ng h\u00f3a h\u1ecdc c\u01a1 h\u1ecdc (CMP)<\/h2>\n\n\n\n

          C\u00e1c quy tr\u00ecnh CMP y\u00eau c\u1ea7u c\u00e1c linh ki\u1ec7n c\u00f3:<\/p>\n\n\n\n

            \n
          • T\u1ef7 l\u1ec7 m\u00e0i m\u00f2n th\u1ea5p<\/li>\n\n\n\n
          • Kh\u1ea3 n\u0103ng ch\u1ed1ng h\u00f3a ch\u1ea5t<\/li>\n\n\n\n
          • \u0110\u1ed9 \u1ed5n \u0111\u1ecbnh k\u00edch th\u01b0\u1edbc<\/li>\n<\/ul>\n\n\n\n

            C\u00e1c b\u1ed9 ph\u1eadn g\u1ed1m alumina \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng trong thi\u1ebft b\u1ecb CMP bao g\u1ed3m:<\/p>\n\n\n\n

              \n
            • T\u1ea5m \u0111\u00e1nh b\u00f3ng<\/li>\n\n\n\n
            • B\u1ed9 k\u1eb9p ch\u00e2n kh\u00f4ng<\/li>\n\n\n\n
            • C\u00e1nh tay chuy\u1ec3n \u0111\u1ed9ng<\/li>\n\n\n\n
            • C\u1ea5u tr\u00fac h\u01b0\u1edbng d\u1eabn<\/li>\n<\/ul>\n\n\n\n

              4. C\u1ea5y ion v\u00e0 x\u1eed l\u00fd nhi\u1ec7t<\/h2>\n\n\n\n

              Trong c\u00e1c h\u1ec7 th\u1ed1ng c\u1ea5y ion, \u1ee7 nhi\u1ec7t, oxy h\u00f3a v\u00e0 khu\u1ebfch t\u00e1n, g\u1ed1m alumina \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng nh\u1edd c\u00e1c \u0111\u1eb7c t\u00ednh sau:<\/p>\n\n\n\n

                \n
              • \u0110i\u1ec7n tr\u1edf nhi\u1ec7t<\/li>\n\n\n\n
              • C\u00e1ch \u0111i\u1ec7n<\/li>\n\n\n\n
              • \u0110\u1ed9 tin c\u1eady k\u1ebft c\u1ea5u<\/li>\n<\/ul>\n\n\n\n

                C\u00e1c \u0111\u1eb7c t\u00ednh n\u00e0y gi\u00fap \u0111\u1ea3m b\u1ea3o qu\u00e1 tr\u00ecnh gia c\u00f4ng t\u1ea5m wafer di\u1ec5n ra \u1ed5n \u0111\u1ecbnh trong \u0111i\u1ec1u ki\u1ec7n nhi\u1ec7t \u0111\u1ed9 cao.<\/p>\n\n\n\n

                C\u00e1c th\u00e0nh ph\u1ea7n g\u1ed1m alumina ph\u1ed5 bi\u1ebfn trong thi\u1ebft b\u1ecb b\u00e1n d\u1eabn<\/h1>\n\n\n\n

                V\u00f2ng v\u00e0 c\u00e1c b\u1ed9 ph\u1eadn h\u00ecnh tr\u1ee5<\/h2>\n\n\n\n

                Danh m\u1ee5c n\u00e0y bao g\u1ed3m:<\/p>\n\n\n\n

                  \n
                • V\u00f2ng l\u1ea5y n\u00e9t<\/li>\n\n\n\n
                • V\u00f2ng vi\u1ec1n<\/li>\n\n\n\n
                • V\u00f2ng b\u1ea3o v\u1ec7<\/li>\n\n\n\n
                • L\u1edbp l\u00f3t bu\u1ed3ng<\/li>\n\n\n\n
                • \u1ed0ng c\u00e1ch nhi\u1ec7t<\/li>\n\n\n\n
                • \u1ed0ng b\u1ea3o v\u1ec7 nhi\u1ec7t<\/li>\n<\/ul>\n\n\n\n

                  C\u00e1c th\u00e0nh ph\u1ea7n n\u00e0y ch\u1ee7 y\u1ebfu \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng \u0111\u1ec3:<\/p>\n\n\n\n

                    \n
                  • Ki\u1ec3m so\u00e1t s\u1ef1 ph\u00e2n b\u1ed1 huy\u1ebft t\u01b0\u01a1ng<\/li>\n\n\n\n
                  • B\u1ea3o v\u1ec7 c\u00e1c c\u1ea5u tr\u00fac bu\u1ed3ng<\/li>\n\n\n\n
                  • N\u00e2ng cao \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh c\u1ee7a quy tr\u00ecnh<\/li>\n<\/ul>\n\n\n\n

                    C\u00e1c b\u1ed9 ph\u1eadn qu\u1ea3n l\u00fd l\u01b0u l\u01b0\u1ee3ng kh\u00ed<\/h2>\n\n\n\n

                    V\u00f2i phun g\u1ed1m<\/h3>\n\n\n\n

                    \u0110\u01b0\u1ee3c s\u1eed d\u1ee5ng \u0111\u1ec3 c\u1ea5p kh\u00ed qu\u00e1 tr\u00ecnh v\u00e0 \u0111i\u1ec1u khi\u1ec3n h\u01b0\u1edbng d\u00f2ng kh\u00ed trong c\u00e1c bu\u1ed3ng l\u1eafng \u0111\u1ecdng v\u00e0 \u0103n m\u00f2n.<\/p>\n\n\n\n

                    T\u1ea5m ph\u00e2n ph\u1ed1i kh\u00ed<\/h3>\n\n\n\n

                    Gi\u00fap duy tr\u00ec l\u01b0u l\u01b0\u1ee3ng kh\u00ed \u0111\u1ed3ng \u0111\u1ec1u v\u00e0 m\u1eadt \u0111\u1ed9 plasma \u1ed5n \u0111\u1ecbnh tr\u00ean to\u00e0n b\u1ed9 b\u1ec1 m\u1eb7t t\u1ea5m wafer.<\/p>\n\n\n\n

                    N\u1eafp che v\u00f2i phun<\/h3>\n\n\n\n

                    H\u1ed7 tr\u1ee3 c\u00e1c c\u1ee5m phun kh\u00ed \u0111\u1ed3ng th\u1eddi gi\u1ea3m s\u1ef1 t\u00edch t\u1ee5 c\u1eb7n b\u00e3 b\u00ean trong bu\u1ed3ng.<\/p>\n\n\n\n

                    C\u00e1c b\u1ed9 ph\u1eadn k\u1ebft c\u1ea5u v\u00e0 h\u1ed7 tr\u1ee3<\/h2>\n\n\n\n

                    N\u1ec1n t\u1ea3ng h\u1ed7 tr\u1ee3 t\u1ea5m wafer<\/h3>\n\n\n\n

                    \u0110\u01b0\u1ee3c s\u1eed d\u1ee5ng l\u00e0m khung \u0111\u1ee1 cho c\u00e1c t\u1ea5m wafer trong qu\u00e1 tr\u00ecnh gia c\u00f4ng.<\/p>\n\n\n\n

                    Ch\u1ed1t n\u00e2ng<\/h3>\n\n\n\n

                    Cho ph\u00e9p n\u1ea1p v\u00e0 d\u1ee1 t\u1ea5m wafer b\u00ean trong bu\u1ed3ng b\u00e1n d\u1eabn.<\/p>\n\n\n\n

                    Ray d\u1eabn h\u01b0\u1edbng v\u00e0 \u1ed5 tr\u1ee5c b\u1eb1ng g\u1ed1m<\/h3>\n\n\n\n

                    H\u1ed7 tr\u1ee3 chuy\u1ec3n \u0111\u1ed9ng c\u01a1 h\u1ecdc ch\u00ednh x\u00e1c \u0111\u1ed3ng th\u1eddi \u0111\u1ea3m b\u1ea3o kh\u1ea3 n\u0103ng ch\u1ed1ng m\u00e0i m\u00f2n v\u00e0 c\u00e1ch \u0111i\u1ec7n.<\/p>\n\n\n\n

                    Ch\u1ed1t g\u1ed1m<\/h3>\n\n\n\n

                    V\u00edt g\u1ed1m v\u00e0 c\u00e1c b\u1ed9 ph\u1eadn c\u1ed1 \u0111\u1ecbnh \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng thay th\u1ebf cho kim lo\u1ea1i trong c\u00e1c khu v\u1ef1c c\u00f3 nhi\u1ec7t \u0111\u1ed9 cao ho\u1eb7c c\u1ea7n c\u00e1ch \u0111i\u1ec7n.<\/p>\n\n\n\n

                    C\u00e1c th\u00e0nh ph\u1ea7n x\u1eed l\u00fd v\u00e0 c\u00e1ch \u0111i\u1ec7n cho t\u1ea5m wafer<\/h2>\n\n\n\n

                    C\u00e1nh tay x\u1eed l\u00fd t\u1ea5m wafer<\/h3>\n\n\n\n

                    C\u00e1c c\u00e1nh tay robot b\u1eb1ng g\u1ed1m c\u00f3 \u0111\u1ed9 b\u1ec1n cao \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng \u0111\u1ec3 chuy\u1ec3n wafer trong m\u00f4i tr\u01b0\u1eddng ch\u00e2n kh\u00f4ng.<\/p>\n\n\n\n

                    T\u1ea5m c\u00e1ch nhi\u1ec7t g\u1ed1m<\/h3>\n\n\n\n

                    Ng\u0103n ch\u1eb7n s\u1ef1 d\u1eabn \u0111i\u1ec7n kh\u00f4ng mong mu\u1ed1n gi\u1eefa c\u00e1c c\u1ea5u tr\u00fac bu\u1ed3ng.<\/p>\n\n\n\n

                    C\u00e1c b\u1ed9 ph\u1eadn t\u1ea3n nhi\u1ec7t b\u1eb1ng g\u1ed1m<\/h3>\n\n\n\n

                    H\u1ed7 tr\u1ee3 qu\u1ea3n l\u00fd nhi\u1ec7t v\u00e0 l\u00e0m m\u00e1t c\u1ee5c b\u1ed9.<\/p>\n\n\n\n

                    C\u00e1c m\u00f4-\u0111un g\u1ed1m nh\u00f4m oxit ti\u00ean ti\u1ebfn<\/h1>\n\n\n\n

                    B\u1ed9 k\u1eb9p ch\u00e2n kh\u00f4ng<\/h2>\n\n\n\n

                    C\u00e1c m\u00e2m k\u1eb9p ch\u00e2n kh\u00f4ng gi\u1eef cho c\u00e1c t\u1ea5m wafer n\u1eb1m ph\u1eb3ng nh\u1edd l\u1ef1c h\u00fat ch\u00e2n kh\u00f4ng trong qu\u00e1 tr\u00ecnh:<\/p>\n\n\n\n

                      \n
                    • K\u1ef9 thu\u1eadt kh\u1eafc axit<\/li>\n\n\n\n
                    • CMP<\/li>\n\n\n\n
                    • C\u00e1c quy tr\u00ecnh ki\u1ec3m tra<\/li>\n<\/ul>\n\n\n\n

                      C\u00e1c k\u00eanh l\u00e0m m\u00e1t t\u00edch h\u1ee3p gi\u00fap c\u1ea3i thi\u1ec7n kh\u1ea3 n\u0103ng ki\u1ec3m so\u00e1t nhi\u1ec7t \u0111\u1ed9 v\u00e0 \u0111\u1ea3m b\u1ea3o t\u00ednh \u1ed5n \u0111\u1ecbnh c\u1ee7a quy tr\u00ecnh.<\/p>\n\n\n\n

                      M\u00e2m k\u1eb9p t\u0129nh \u0111i\u1ec7n (ESC)<\/h2>\n\n\n\n

                      C\u00e1c \u0111\u1ebf k\u1eb9p t\u0129nh \u0111i\u1ec7n s\u1eed d\u1ee5ng l\u1ef1c t\u0129nh \u0111i\u1ec7n \u0111\u1ec3 gi\u1eef c\u00e1c t\u1ea5m wafer trong qu\u00e1 tr\u00ecnh x\u1eed l\u00fd plasma.<\/p>\n\n\n\n

                      G\u1ed1m alumina \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i v\u00ec ch\u00fang mang l\u1ea1i:<\/p>\n\n\n\n

                        \n
                      • C\u00e1ch \u0111i\u1ec7n<\/li>\n\n\n\n
                      • \u0110i\u1ec7n tr\u1edf plasma<\/li>\n\n\n\n
                      • \u0110\u1ed9 \u1ed5n \u0111\u1ecbnh nhi\u1ec7t<\/li>\n<\/ul>\n\n\n\n

                        H\u1ec7 th\u1ed1ng ESC \u0111\u00f3ng vai tr\u00f2 thi\u1ebft y\u1ebfu trong c\u00e1c thi\u1ebft b\u1ecb kh\u1eafc v\u00e0 l\u1eafng \u0111\u1ecdng ti\u00ean ti\u1ebfn.<\/p>\n\n\n\n

                        B\u1ed9 gia nhi\u1ec7t g\u1ed1m<\/h2>\n\n\n\n

                        L\u00f2 s\u01b0\u1edfi g\u1ed1m gi\u00fap l\u00e0m n\u00f3ng t\u1ea5m wafer m\u1ed9t c\u00e1ch \u1ed5n \u0111\u1ecbnh v\u00e0 \u0111\u1ed3ng \u0111\u1ec1u trong:<\/p>\n\n\n\n

                          \n
                        • H\u1ec7 th\u1ed1ng l\u1eafng \u0111\u1ecdng<\/li>\n\n\n\n
                        • Thi\u1ebft b\u1ecb \u1ee7<\/li>\n\n\n\n
                        • C\u00e1c c\u00f4ng c\u1ee5 x\u1eed l\u00fd nhi\u1ec7t<\/li>\n<\/ul>\n\n\n\n

                          M\u1eb7c d\u00f9 nh\u00f4m oxit \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i, nh\u01b0ng c\u00e1c b\u1ed9 gia nhi\u1ec7t b\u1eb1ng nitrua nh\u00f4m (AlN) th\u01b0\u1eddng \u0111\u01b0\u1ee3c l\u1ef1a ch\u1ecdn khi c\u1ea7n \u0111\u1ed9 d\u1eabn nhi\u1ec7t cao h\u01a1n.<\/p>\n\n\n\n

                          T\u1ea5m \u0111\u00e1nh b\u00f3ng CMP<\/h2>\n\n\n\n

                          C\u00e1c b\u1ed9 ph\u1eadn \u0111\u00e1nh b\u00f3ng b\u1eb1ng nh\u00f4m oxit duy tr\u00ec \u0111\u1ed9 ph\u1eb3ng v\u00e0 kh\u1ea3 n\u0103ng ch\u1ed1ng m\u00e0i m\u00f2n tuy\u1ec7t v\u1eddi trong c\u00e1c quy tr\u00ecnh \u0111\u00e1nh b\u00f3ng k\u00e9o d\u00e0i.<\/p>\n\n\n\n

                          T\u1ea1i sao thi\u1ebft b\u1ecb b\u00e1n d\u1eabn l\u1ea1i s\u1eed d\u1ee5ng g\u1ed1m s\u1ee9 c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao<\/h1>\n\n\n\n

                          So v\u1edbi c\u00e1c v\u1eadt li\u1ec7u k\u1ef9 thu\u1eadt truy\u1ec1n th\u1ed1ng, g\u1ed1m s\u1ee9 cao c\u1ea5p mang l\u1ea1i m\u1ed9t s\u1ed1 \u01b0u \u0111i\u1ec3m:<\/p>\n\n\n\n

                          T\u00e0i s\u1ea3n<\/th>\u01afu \u0111i\u1ec3m c\u1ee7a g\u1ed1m alumina<\/th><\/tr><\/thead>
                          C\u00e1ch \u0111i\u1ec7n<\/td>Tuy\u1ec7t v\u1eddi<\/td><\/tr>
                          \u0110i\u1ec7n tr\u1edf plasma<\/td>Cao<\/td><\/tr>
                          Kh\u1ea3 n\u0103ng ch\u1ed1ng m\u00e0i m\u00f2n<\/td>Tuy\u1ec7t v\u1eddi<\/td><\/tr>
                          \u0110\u1ed9 \u1ed5n \u0111\u1ecbnh nhi\u1ec7t<\/td>M\u1ea1nh m\u1ebd<\/td><\/tr>
                          Kh\u1ea3 n\u0103ng ch\u1ed1ng h\u00f3a ch\u1ea5t<\/td>Tuy\u1ec7t v\u1eddi<\/td><\/tr>
                          Ki\u1ec3m so\u00e1t h\u1ea1t<\/td>M\u1ee9c \u0111\u1ed9 \u00f4 nhi\u1ec5m th\u1ea5p<\/td><\/tr>
                          Kh\u1ea3 n\u0103ng t\u01b0\u01a1ng th\u00edch v\u1edbi m\u00f4i tr\u01b0\u1eddng ch\u00e2n kh\u00f4ng<\/td>Tuy\u1ec7t v\u1eddi<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

                          Nh\u1eefng \u01b0u \u0111i\u1ec3m n\u00e0y khi\u1ebfn g\u1ed1m alumina tr\u1edf th\u00e0nh v\u1eadt li\u1ec7u kh\u00f4ng th\u1ec3 thi\u1ebfu trong c\u00e1c thi\u1ebft b\u1ecb b\u00e1n d\u1eabn hi\u1ec7n \u0111\u1ea1i.<\/p>\n\n\n\n

                          Xu h\u01b0\u1edbng th\u1ecb tr\u01b0\u1eddng v\u00e0 tri\u1ec3n v\u1ecdng ng\u00e0nh<\/h1>\n\n\n\n

                          Khi ng\u00e0nh s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn ti\u1ebfp t\u1ee5c chuy\u1ec3n h\u01b0\u1edbng sang:<\/p>\n\n\n\n

                            \n
                          • C\u00e1c c\u00f4ng ngh\u1ec7 s\u1ea3n xu\u1ea5t ti\u00ean ti\u1ebfn<\/li>\n\n\n\n
                          • N\u0103ng su\u1ea5t x\u1eed l\u00fd t\u1ea5m wafer cao h\u01a1n<\/li>\n\n\n\n
                          • C\u00e1c ph\u1ea3n \u1ee9ng h\u00f3a h\u1ecdc plasma m\u1ea1nh m\u1ebd h\u01a1n<\/li>\n\n\n\n
                          • M\u00f4i tr\u01b0\u1eddng s\u1ea3n xu\u1ea5t s\u1ea1ch h\u01a1n<\/li>\n<\/ul>\n\n\n\n

                            D\u1ef1 ki\u1ebfn nhu c\u1ea7u v\u1ec1 c\u00e1c linh ki\u1ec7n g\u1ed1m s\u1ee9 ch\u00ednh x\u00e1c s\u1ebd t\u0103ng tr\u01b0\u1edfng \u1ed5n \u0111\u1ecbnh.<\/p>\n\n\n\n

                            Vi\u1ec7c s\u1ea3n xu\u1ea5t c\u00e1c linh ki\u1ec7n nh\u00f4m oxit c\u1ea5p b\u00e1n d\u1eabn \u0111\u00f2i h\u1ecfi:<\/p>\n\n\n\n

                              \n
                            • Nguy\u00ean li\u1ec7u th\u00f4 c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao<\/li>\n\n\n\n
                            • Kh\u1ea3 n\u0103ng gia c\u00f4ng ch\u00ednh x\u00e1c<\/li>\n\n\n\n
                            • Ki\u1ec3m so\u00e1t \u00f4 nhi\u1ec5m nghi\u00eam ng\u1eb7t<\/li>\n\n\n\n
                            • C\u00f4ng ngh\u1ec7 ch\u1ebf bi\u1ebfn g\u1ed1m s\u1ee9 ti\u00ean ti\u1ebfn<\/li>\n<\/ul>\n\n\n\n

                              Do nh\u1eefng r\u00e0o c\u1ea3n k\u1ef9 thu\u1eadt cao n\u00e0y, th\u1ecb tr\u01b0\u1eddng linh ki\u1ec7n g\u1ed1m b\u00e1n d\u1eabn v\u1eabn l\u00e0 m\u1ed9t th\u1ecb tr\u01b0\u1eddng chuy\u00ean bi\u1ec7t v\u00e0 \u0111\u00f2i h\u1ecfi c\u00f4ng ngh\u1ec7 cao.<\/p>\n\n\n\n

                              K\u1ebft lu\u1eadn<\/h1>\n\n\n\n

                              C\u00e1c linh ki\u1ec7n g\u1ed1m alumina c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao \u0111\u00e3 tr\u1edf th\u00e0nh v\u1eadt li\u1ec7u kh\u00f4ng th\u1ec3 thi\u1ebfu trong c\u00e1c thi\u1ebft b\u1ecb s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn. Nh\u1edd kh\u1ea3 n\u0103ng c\u00e1ch \u0111i\u1ec7n, ch\u1ed1ng plasma, ch\u1ed1ng m\u00e0i m\u00f2n v\u00e0 \u1ed5n \u0111\u1ecbnh nhi\u1ec7t v\u01b0\u1ee3t tr\u1ed9i, c\u00e1c thi\u1ebft b\u1ecb b\u00e1n d\u1eabn c\u00f3 th\u1ec3 ho\u1ea1t \u0111\u1ed9ng \u0111\u00e1ng tin c\u1eady trong c\u00e1c m\u00f4i tr\u01b0\u1eddng x\u1eed l\u00fd kh\u1eafc nghi\u1ec7t.<\/p>\n\n\n\n

                              T\u1eeb bu\u1ed3ng kh\u1eafc plasma v\u00e0 \u0111\u1ebf k\u1eb9p t\u0129nh \u0111i\u1ec7n cho \u0111\u1ebfn c\u00e1nh tay x\u1eed l\u00fd t\u1ea5m wafer v\u00e0 b\u1ed9 gia nhi\u1ec7t g\u1ed1m, g\u1ed1m alumina ti\u1ebfp t\u1ee5c \u0111\u00f3ng vai tr\u00f2 quan tr\u1ecdng trong vi\u1ec7c \u0111\u1ea3m b\u1ea3o qu\u00e1 tr\u00ecnh s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn \u1ed5n \u0111\u1ecbnh, ch\u00ednh x\u00e1c v\u00e0 \u0111\u01b0\u1ee3c ki\u1ec3m so\u00e1t \u00f4 nhi\u1ec5m.<\/p>\n\n\n\n

                              Khi c\u00f4ng ngh\u1ec7 b\u00e1n d\u1eabn kh\u00f4ng ng\u1eebng ph\u00e1t tri\u1ec3n, t\u1ea7m quan tr\u1ecdng c\u1ee7a c\u00e1c v\u1eadt li\u1ec7u g\u1ed1m ti\u00ean ti\u1ebfn trong thi\u1ebft b\u1ecb b\u00e1n d\u1eabn s\u1ebd ng\u00e0y c\u00e0ng gia t\u0103ng.<\/p>","protected":false},"excerpt":{"rendered":"

                              As semiconductor devices continue evolving toward smaller nodes, higher integration density, and greater processing precision, the demand for ultra-clean, heat-resistant, and plasma-stable materials inside semiconductor equipment has increased significantly. Among advanced engineering ceramics, high-purity alumina ceramic (Al\u2082O\u2083) remains one of the most widely used materials across semiconductor manufacturing systems. From plasma etching chambers to wafer […]<\/p>\n","protected":false},"author":1,"featured_media":2148,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[3],"tags":[269,268,266,267,270,271,265],"class_list":["post-2147","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-industry-news","tag-and-wafer-handling-systems-learn-about-their-properties","tag-ceramic-heaters","tag-cmp","tag-deposition","tag-discover-how-high-purity-alumina-ceramic-components-are-used-in-semiconductor-manufacturing-equipment-including-plasma-etching","tag-electrostatic-chucks","tag-functions"],"_links":{"self":[{"href":"https:\/\/www.xkh-ceramics.com\/vi\/wp-json\/wp\/v2\/posts\/2147","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.xkh-ceramics.com\/vi\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.xkh-ceramics.com\/vi\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/vi\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/vi\/wp-json\/wp\/v2\/comments?post=2147"}],"version-history":[{"count":1,"href":"https:\/\/www.xkh-ceramics.com\/vi\/wp-json\/wp\/v2\/posts\/2147\/revisions"}],"predecessor-version":[{"id":2149,"href":"https:\/\/www.xkh-ceramics.com\/vi\/wp-json\/wp\/v2\/posts\/2147\/revisions\/2149"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/vi\/wp-json\/wp\/v2\/media\/2148"}],"wp:attachment":[{"href":"https:\/\/www.xkh-ceramics.com\/vi\/wp-json\/wp\/v2\/media?parent=2147"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/vi\/wp-json\/wp\/v2\/categories?post=2147"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/vi\/wp-json\/wp\/v2\/tags?post=2147"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}