{"id":2331,"date":"2026-05-29T03:20:28","date_gmt":"2026-05-29T03:20:28","guid":{"rendered":"https:\/\/www.xkh-ceramics.com\/?post_type=product&#038;p=2331"},"modified":"2026-05-29T03:21:23","modified_gmt":"2026-05-29T03:21:23","slug":"silicon-carbide-horizontal-process-tube-for-lpcvd-cvd-semiconductor-processes","status":"publish","type":"product","link":"https:\/\/www.xkh-ceramics.com\/tr\/product\/silicon-carbide-horizontal-process-tube-for-lpcvd-cvd-semiconductor-processes\/","title":{"rendered":"LPCVD\/CVD Yar\u0131 \u0130letken Prosesleri i\u00e7in Silisyum Karb\u00fcr Yatay Proses T\u00fcp\u00fc"},"content":{"rendered":"<p class=\"isSelectedEnd\"><img fetchpriority=\"high\" decoding=\"async\" class=\"size-medium wp-image-2332 alignright\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Silicon-Carbide-Horizontal-Process-Tube-for-LPCVDCVD-Semiconductor-Processes-2-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Silicon-Carbide-Horizontal-Process-Tube-for-LPCVDCVD-Semiconductor-Processes-2-300x300.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Silicon-Carbide-Horizontal-Process-Tube-for-LPCVDCVD-Semiconductor-Processes-2-150x150.png 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Silicon-Carbide-Horizontal-Process-Tube-for-LPCVDCVD-Semiconductor-Processes-2-768x768.png 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Silicon-Carbide-Horizontal-Process-Tube-for-LPCVDCVD-Semiconductor-Processes-2-12x12.png 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Silicon-Carbide-Horizontal-Process-Tube-for-LPCVDCVD-Semiconductor-Processes-2-600x600.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Silicon-Carbide-Horizontal-Process-Tube-for-LPCVDCVD-Semiconductor-Processes-2-100x100.png 100w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Silicon-Carbide-Horizontal-Process-Tube-for-LPCVDCVD-Semiconductor-Processes-2.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>Silisyum karb\u00fcr (SiC) yatay proses t\u00fcp\u00fc, yar\u0131 iletken, fotovoltaik ve geli\u015fmi\u015f malzeme \u00fcretiminde y\u00fcksek s\u0131cakl\u0131k LPCVD, CVD, dif\u00fczyon, oksidasyon ve tavlama uygulamalar\u0131 i\u00e7in tasarlanm\u0131\u015ft\u0131r.<\/p>\n<p class=\"isSelectedEnd\">Yatay termal i\u015fleme sistemlerinde temel reaksiyon odas\u0131 bile\u015feni olan proses borusu, s\u0131cakl\u0131k homojenli\u011fini, kontaminasyon kontrol\u00fcn\u00fc, proses stabilitesini ve genel ekipman \u00f6mr\u00fcn\u00fc do\u011frudan etkiler.<\/p>\n<p class=\"isSelectedEnd\">SiC yatay proses t\u00fcplerimiz, ultra y\u00fcksek safl\u0131kta CVD silisyum karb\u00fcr kaplama ile birlikte geli\u015fmi\u015f monolitik 3D bask\u0131 teknolojisi kullan\u0131larak \u00fcretilmektedir. Eksiz tek par\u00e7a yap\u0131, kaynak ba\u011flant\u0131lar\u0131n\u0131 ve montajla ilgili zay\u0131f noktalar\u0131 ortadan kald\u0131rarak s\u00fcrekli y\u00fcksek s\u0131cakl\u0131kta \u00e7al\u0131\u015fma alt\u0131nda mekanik g\u00fcvenilirli\u011fi ve s\u0131z\u0131nt\u0131 direncini b\u00fcy\u00fck \u00f6l\u00e7\u00fcde art\u0131r\u0131r.<\/p>\n<p class=\"isSelectedEnd\">Geleneksel kuvars proses t\u00fcpleriyle kar\u015f\u0131la\u015ft\u0131r\u0131ld\u0131\u011f\u0131nda silisyum karb\u00fcr, \u00f6zellikle agresif oksitleyici ve klor i\u00e7eren proses ortamlar\u0131nda \u00f6nemli \u00f6l\u00e7\u00fcde daha y\u00fcksek termal iletkenlik, daha iyi termal \u015fok direnci, \u00fcst\u00fcn korozyon direnci ve daha uzun \u00e7al\u0131\u015fma \u00f6mr\u00fc sunar.<\/p>\n<p class=\"isSelectedEnd\">\u00dcr\u00fcn, d\u00fc\u015f\u00fck partik\u00fcl \u00fcretimi, d\u00fc\u015f\u00fck metal kirlili\u011fi ve 1250\u00b0C'ye kadar istikrarl\u0131 termal performans gerektiren yar\u0131 iletken s\u0131n\u0131f\u0131 temiz i\u015fleme ortamlar\u0131 i\u00e7in optimize edilmi\u015ftir.<\/p>\n<div contenteditable=\"false\">\n<hr \/>\n<\/div>\n<h1>Temel \u00d6zellikler<\/h1>\n<h2><img decoding=\"async\" class=\"size-medium wp-image-2333 alignright\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Silicon-Carbide-Horizontal-Process-Tube-for-LPCVDCVD-Semiconductor-Processes-1-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Silicon-Carbide-Horizontal-Process-Tube-for-LPCVDCVD-Semiconductor-Processes-1-300x300.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Silicon-Carbide-Horizontal-Process-Tube-for-LPCVDCVD-Semiconductor-Processes-1-150x150.png 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Silicon-Carbide-Horizontal-Process-Tube-for-LPCVDCVD-Semiconductor-Processes-1-768x768.png 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Silicon-Carbide-Horizontal-Process-Tube-for-LPCVDCVD-Semiconductor-Processes-1-12x12.png 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Silicon-Carbide-Horizontal-Process-Tube-for-LPCVDCVD-Semiconductor-Processes-1-600x600.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Silicon-Carbide-Horizontal-Process-Tube-for-LPCVDCVD-Semiconductor-Processes-1-100x100.png 100w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Silicon-Carbide-Horizontal-Process-Tube-for-LPCVDCVD-Semiconductor-Processes-1.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>Monolitik Tek Par\u00e7a SiC Yap\u0131<\/h2>\n<p class=\"isSelectedEnd\">Entegre 3D bask\u0131l\u0131 silikon karb\u00fcr g\u00f6vde, geleneksel montajl\u0131 yap\u0131larda bulunan diki\u015fleri, lehim noktalar\u0131n\u0131 ve potansiyel s\u0131z\u0131nt\u0131 yollar\u0131n\u0131 ortadan kald\u0131r\u0131r.<\/p>\n<p class=\"isSelectedEnd\">Avantajlar \u015funlar\u0131 i\u00e7erir:<\/p>\n<ul data-spread=\"false\">\n<li>Daha y\u00fcksek yap\u0131sal stabilite<\/li>\n<li>Geli\u015ftirilmi\u015f vakum b\u00fct\u00fcnl\u00fc\u011f\u00fc<\/li>\n<li>Daha iyi boyutsal tutarl\u0131l\u0131k<\/li>\n<li>Azalt\u0131lm\u0131\u015f termal stres konsantrasyonu<\/li>\n<\/ul>\n<h2>Ultra Y\u00fcksek Safl\u0131kta CVD SiC Kaplama<\/h2>\n<p class=\"isSelectedEnd\">Yo\u011fun CVD silisyum karb\u00fcr kaplama sa\u011flar:<\/p>\n<ul data-spread=\"false\">\n<li>Y\u00fczey safs\u0131zl\u0131klar\u0131 5 ppm'in alt\u0131nda<\/li>\n<li>M\u00fckemmel kimyasal inertlik<\/li>\n<li>Azalt\u0131lm\u0131\u015f partik\u00fcl kontaminasyonu<\/li>\n<li>Oksidasyona ve klor i\u00e7eren gazlara kar\u015f\u0131 \u00fcst\u00fcn diren\u00e7<\/li>\n<\/ul>\n<p class=\"isSelectedEnd\">Bu, proses t\u00fcp\u00fcn\u00fc geli\u015fmi\u015f yar\u0131 iletken termal i\u015fleme uygulamalar\u0131 i\u00e7in uygun hale getirir.<\/p>\n<h2>M\u00fckemmel Termal \u0130letkenlik<\/h2>\n<p class=\"isSelectedEnd\">Silisyum karb\u00fcr, kuvars veya al\u00fcminaya k\u0131yasla \u00e7ok daha y\u00fcksek \u0131s\u0131 iletkenli\u011fi sa\u011flayarak bu \u00f6zelli\u011fin elde edilmesine yard\u0131mc\u0131 olur:<\/p>\n<ul data-spread=\"false\">\n<li>Daha h\u0131zl\u0131 termal tepki<\/li>\n<li>Geli\u015ftirilmi\u015f eksenel ve radyal s\u0131cakl\u0131k homojenli\u011fi<\/li>\n<li>Kararl\u0131 yonga plakas\u0131 i\u015fleme ko\u015fullar\u0131<\/li>\n<\/ul>\n<h2>\u00dcst\u00fcn Termal \u015eok Direnci<\/h2>\n<p class=\"isSelectedEnd\">T\u00fcp, \u00e7atlama, deformasyon veya kaplama d\u00f6k\u00fclmesi olmaks\u0131z\u0131n tekrarlanan h\u0131zl\u0131 \u0131s\u0131tma ve so\u011futma d\u00f6ng\u00fclerine dayanabilir.<\/p>\n<h2>Uzun Hizmet \u00d6mr\u00fc<\/h2>\n<p class=\"isSelectedEnd\">Kuvars proses t\u00fcpleri ile kar\u015f\u0131la\u015ft\u0131r\u0131ld\u0131\u011f\u0131nda, SiC t\u00fcpler \u015funlar\u0131 sunar:<\/p>\n<ul data-spread=\"false\">\n<li>Daha uzun de\u011fi\u015ftirme aral\u0131klar\u0131<\/li>\n<li>Daha d\u00fc\u015f\u00fck bak\u0131m s\u0131kl\u0131\u011f\u0131<\/li>\n<li>Azalt\u0131lm\u0131\u015f oda duru\u015f s\u00fcresi<\/li>\n<li>\u0130yile\u015ftirilmi\u015f toplam sahip olma maliyeti (TCO)<\/li>\n<\/ul>\n<div contenteditable=\"false\">\n<hr \/>\n<\/div>\n<h1>Tipik Uygulamalar<\/h1>\n<h2><img decoding=\"async\" class=\"size-medium wp-image-2334 alignright\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Silicon-Carbide-Horizontal-Process-Tube-for-LPCVDCVD-Semiconductor-Processes-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Silicon-Carbide-Horizontal-Process-Tube-for-LPCVDCVD-Semiconductor-Processes-300x300.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Silicon-Carbide-Horizontal-Process-Tube-for-LPCVDCVD-Semiconductor-Processes-150x150.png 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Silicon-Carbide-Horizontal-Process-Tube-for-LPCVDCVD-Semiconductor-Processes-768x768.png 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Silicon-Carbide-Horizontal-Process-Tube-for-LPCVDCVD-Semiconductor-Processes-12x12.png 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Silicon-Carbide-Horizontal-Process-Tube-for-LPCVDCVD-Semiconductor-Processes-600x600.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Silicon-Carbide-Horizontal-Process-Tube-for-LPCVDCVD-Semiconductor-Processes-100x100.png 100w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Silicon-Carbide-Horizontal-Process-Tube-for-LPCVDCVD-Semiconductor-Processes.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>Yar\u0131 \u0130letken \u00dcretimi<\/h2>\n<p class=\"isSelectedEnd\">\u015eunlar i\u00e7in uygundur:<\/p>\n<ul data-spread=\"false\">\n<li>LPCVD sistemleri<\/li>\n<li>CVD biriktirme ekipman\u0131<\/li>\n<li>Oksidasyon f\u0131r\u0131nlar\u0131<\/li>\n<li>Dif\u00fczyon f\u0131r\u0131nlar\u0131<\/li>\n<li>Tavlama sistemleri<\/li>\n<li>Wafer \u0131s\u0131l i\u015flem s\u00fcre\u00e7leri<\/li>\n<\/ul>\n<h2>Fotovoltaik End\u00fcstrisi<\/h2>\n<p class=\"isSelectedEnd\">\u0130\u00e7inde kullan\u0131l\u0131r:<\/p>\n<ul data-spread=\"false\">\n<li>G\u00fcne\u015f pili dif\u00fczyon i\u015flemi<\/li>\n<li>Y\u00fczey pasivasyonu<\/li>\n<li>\u0130nce film biriktirme<\/li>\n<li>Y\u00fcksek s\u0131cakl\u0131kta gofret i\u015fleme<\/li>\n<\/ul>\n<h2>\u0130leri Malzeme \u0130\u015fleme<\/h2>\n<p class=\"isSelectedEnd\">Uygulanabilir:<\/p>\n<ul data-spread=\"false\">\n<li>Karbonizasyon s\u00fcre\u00e7leri<\/li>\n<li>Nitridasyon i\u015flemi<\/li>\n<li>Fonksiyonel ince film olu\u015fumu<\/li>\n<li>Y\u00fczey aktivasyonu ve modifikasyonu<\/li>\n<\/ul>\n<div contenteditable=\"false\">\n<hr \/>\n<\/div>\n<h1>S\u00fcre\u00e7 Uyumlulu\u011fu<\/h1>\n<h2>Uyumlu Proses Atmosferleri<\/h2>\n<ul data-spread=\"false\">\n<li>Oksijen (O\u2082)<\/li>\n<li>Azot (N\u2082)<\/li>\n<li>Y\u00fcksek safl\u0131kta inert gazlar<\/li>\n<li>Kontroll\u00fc klor i\u00e7eren gazlar<\/li>\n<li>Oksitleyici atmosferler<\/li>\n<\/ul>\n<h2>Tipik S\u00fcre\u00e7 Penceresi<\/h2>\n<table>\n<tbody>\n<tr>\n<th>Parametre<\/th>\n<th>\u015eartname<\/th>\n<\/tr>\n<tr>\n<td>Maksimum S\u00fcrekli \u00c7al\u0131\u015fma S\u0131cakl\u0131\u011f\u0131<\/td>\n<td>1250\u00b0C<\/td>\n<\/tr>\n<tr>\n<td>Bas\u0131n\u00e7 Aral\u0131\u011f\u0131<\/td>\n<td>Atmosfere Yak\u0131n LPCVD Vakum<\/td>\n<\/tr>\n<tr>\n<td>Termal \u015eok Direnci<\/td>\n<td>M\u00fckemmel<\/td>\n<\/tr>\n<tr>\n<td>S\u0131zd\u0131rmazl\u0131k<\/td>\n<td>\u2264 1\u00d710-\u2079 Pa-m\u00b3\/s<\/td>\n<\/tr>\n<tr>\n<td>Y\u00fczey P\u00fcr\u00fczl\u00fcl\u00fc\u011f\u00fc<\/td>\n<td>Ra \u2264 0,8-1,6 \u00b5m<\/td>\n<\/tr>\n<tr>\n<td>Kaplama Safl\u0131\u011f\u0131<\/td>\n<td>\uff1c 5 ppm<\/td>\n<\/tr>\n<tr>\n<td>Substrat Safs\u0131zl\u0131\u011f\u0131<\/td>\n<td>\uff1c 300 ppm<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<div contenteditable=\"false\">\n<hr \/>\n<\/div>\n<h1>Teknik \u00d6zellikler<\/h1>\n<table>\n<tbody>\n<tr>\n<td>\u00d6\u011fe<\/td>\n<td>\u015eartname<\/td>\n<\/tr>\n<tr>\n<td>\u00dcr\u00fcn Ad\u0131<\/td>\n<td>Silisyum Karb\u00fcr Yatay Proses Borusu<\/td>\n<\/tr>\n<tr>\n<td>Malzeme<\/td>\n<td>Y\u00fcksek Safl\u0131kta Silisyum Karb\u00fcr<\/td>\n<\/tr>\n<tr>\n<td>Kaplama<\/td>\n<td>CVD SiC Kaplama<\/td>\n<\/tr>\n<tr>\n<td>\u00dcretim S\u00fcreci<\/td>\n<td>Monolitik 3D Bask\u0131<\/td>\n<\/tr>\n<tr>\n<td>Maksimum \u00c7al\u0131\u015fma S\u0131cakl\u0131\u011f\u0131<\/td>\n<td>\u2264 1250\u00b0C<\/td>\n<\/tr>\n<tr>\n<td>Termal \u0130letkenlik<\/td>\n<td>Y\u00fcksek<\/td>\n<\/tr>\n<tr>\n<td>Termal \u015eok Direnci<\/td>\n<td>M\u00fckemmel<\/td>\n<\/tr>\n<tr>\n<td>Korozyon Direnci<\/td>\n<td>M\u00fckemmel<\/td>\n<\/tr>\n<tr>\n<td>Y\u00fczey P\u00fcr\u00fczl\u00fcl\u00fc\u011f\u00fc<\/td>\n<td>Ra \u2264 0,8-1,6 \u00b5m<\/td>\n<\/tr>\n<tr>\n<td>Kaplama Safs\u0131zl\u0131klar\u0131<\/td>\n<td>\uff1c 5 ppm<\/td>\n<\/tr>\n<tr>\n<td>S\u0131zd\u0131rmazl\u0131k<\/td>\n<td>\u2264 1\u00d710-\u2079 Pa-m\u00b3\/s<\/td>\n<\/tr>\n<tr>\n<td>Tipik Uygulamalar<\/td>\n<td>LPCVD \/ CVD \/ Dif\u00fczyon \/ Oksidasyon<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<div contenteditable=\"false\">\n<hr \/>\n<\/div>\n<h1>Geleneksel Proses T\u00fcplerine G\u00f6re Avantajlar\u0131<\/h1>\n<table>\n<tbody>\n<tr>\n<td>M\u00fclkiyet<\/td>\n<td>SiC Proses T\u00fcp\u00fc<\/td>\n<td>Kuvars T\u00fcp<\/td>\n<td>Al\u00fcmina T\u00fcp<\/td>\n<\/tr>\n<tr>\n<td>Termal \u0130letkenlik<\/td>\n<td>Y\u00fcksek<\/td>\n<td>D\u00fc\u015f\u00fck<\/td>\n<td>D\u00fc\u015f\u00fck<\/td>\n<\/tr>\n<tr>\n<td>Termal \u015eok Direnci<\/td>\n<td>M\u00fckemmel<\/td>\n<td>Zay\u0131f<\/td>\n<td>Orta d\u00fczeyde<\/td>\n<\/tr>\n<tr>\n<td>Korozyon Direnci<\/td>\n<td>M\u00fckemmel<\/td>\n<td>Orta d\u00fczeyde<\/td>\n<td>\u0130yi<\/td>\n<\/tr>\n<tr>\n<td>Par\u00e7ac\u0131k Kontrol\u00fc<\/td>\n<td>M\u00fckemmel<\/td>\n<td>Orta d\u00fczeyde<\/td>\n<td>Orta d\u00fczeyde<\/td>\n<\/tr>\n<tr>\n<td>Hizmet \u00d6mr\u00fc<\/td>\n<td>Uzun<\/td>\n<td>K\u0131sa<\/td>\n<td>Orta<\/td>\n<\/tr>\n<tr>\n<td>Y\u00fcksek S\u0131cakl\u0131k Kararl\u0131l\u0131\u011f\u0131<\/td>\n<td>M\u00fckemmel<\/td>\n<td>Orta d\u00fczeyde<\/td>\n<td>\u0130yi<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<div contenteditable=\"false\">\n<hr \/>\n<\/div>\n<h1>\u00d6zelle\u015ftirme Se\u00e7enekleri<\/h1>\n<p class=\"isSelectedEnd\">M\u00fc\u015fteri ekipman gereksinimlerine g\u00f6re, a\u015fa\u011f\u0131dakiler dahil olmak \u00fczere \u00f6zel \u00f6zellikler mevcuttur:<\/p>\n<ul data-spread=\"false\">\n<li>T\u00fcp \u00e7ap\u0131 ve uzunlu\u011fu<\/li>\n<li>Duvar kal\u0131nl\u0131\u011f\u0131 optimizasyonu<\/li>\n<li>Flan\u015f ve aray\u00fcz yap\u0131lar\u0131<\/li>\n<li>Fonksiyonel gaz portlar\u0131<\/li>\n<li>\u0130\u00e7\/d\u0131\u015f kaplama konfig\u00fcrasyonlar\u0131<\/li>\n<li>Y\u00fczey parlatma kaliteleri<\/li>\n<li>Temizlik standartlar\u0131<\/li>\n<\/ul>\n<div contenteditable=\"false\">\n<hr \/>\n<\/div>\n<h1>SSS<\/h1>\n<h2>S1: Neden kuvars proses t\u00fcpleri yerine silisyum karb\u00fcr\u00fc se\u00e7melisiniz?<\/h2>\n<p class=\"isSelectedEnd\">Silisyum karb\u00fcr, \u00f6zellikle y\u00fcksek s\u0131cakl\u0131ktaki yar\u0131 iletken proseslerinde kuvarsdan daha y\u00fcksek termal iletkenlik, daha d\u00fc\u015f\u00fck kirlenme, daha iyi termal \u015fok direnci ve \u00f6nemli \u00f6l\u00e7\u00fcde daha uzun hizmet \u00f6mr\u00fc sa\u011flar.<\/p>\n<h2>S2: Hangi i\u015flemler bu t\u00fcp ile uyumludur?<\/h2>\n<p class=\"isSelectedEnd\">T\u00fcp, LPCVD, CVD, dif\u00fczyon, oksidasyon, tavlama, pasivasyon ve di\u011fer y\u00fcksek s\u0131cakl\u0131k termal i\u015fleme uygulamalar\u0131 i\u00e7in uygundur.<\/p>\n<h2>S3: T\u00fcp klor i\u00e7eren atmosferlerde \u00e7al\u0131\u015fabilir mi?<\/h2>\n<p>Evet. CVD SiC kaplama, kontroll\u00fc klor i\u00e7eren proses ortamlar\u0131na kar\u015f\u0131 m\u00fckemmel diren\u00e7 sunar.<\/p>","protected":false},"excerpt":{"rendered":"<p class=\"isSelectedEnd\">Silisyum karb\u00fcr (SiC) yatay proses t\u00fcp\u00fc, yar\u0131 iletken, fotovoltaik ve geli\u015fmi\u015f malzeme \u00fcretiminde y\u00fcksek s\u0131cakl\u0131k LPCVD, CVD, dif\u00fczyon, oksidasyon ve tavlama uygulamalar\u0131 i\u00e7in tasarlanm\u0131\u015ft\u0131r.<\/p>\n<p class=\"isSelectedEnd\">Yatay termal i\u015fleme sistemlerinde temel reaksiyon odas\u0131 bile\u015feni olan proses borusu, s\u0131cakl\u0131k homojenli\u011fini, kontaminasyon kontrol\u00fcn\u00fc, proses stabilitesini ve genel ekipman \u00f6mr\u00fcn\u00fc do\u011frudan etkiler.<\/p>","protected":false},"featured_media":2334,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}}},"product_brand":[],"product_cat":[23],"product_tag":[625,626,602,624,609,603,629,627,623,628,622],"class_list":["post-2331","product","type-product","status-publish","has-post-thumbnail","product_cat-silicon-carbide-sic","product_tag-cvd-process-tube","product_tag-cvd-sic-coated-tube","product_tag-high-purity-silicon-carbide-tube","product_tag-lpcvd-process-tube","product_tag-semiconductor-process-tube","product_tag-semiconductor-thermal-processing-tube","product_tag-sic-cvd-tube","product_tag-sic-furnace-tube","product_tag-sic-horizontal-process-tube","product_tag-sic-lpcvd-tube","product_tag-silicon-carbide-horizontal-process-tube","desktop-align-left","tablet-align-left","mobile-align-left","ast-product-gallery-layout-horizontal-slider","ast-product-tabs-layout-horizontal","first","instock","shipping-taxable","product-type-simple"],"_links":{"self":[{"href":"https:\/\/www.xkh-ceramics.com\/tr\/wp-json\/wp\/v2\/product\/2331","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.xkh-ceramics.com\/tr\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/www.xkh-ceramics.com\/tr\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/tr\/wp-json\/wp\/v2\/comments?post=2331"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/tr\/wp-json\/wp\/v2\/media\/2334"}],"wp:attachment":[{"href":"https:\/\/www.xkh-ceramics.com\/tr\/wp-json\/wp\/v2\/media?parent=2331"}],"wp:term":[{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/tr\/wp-json\/wp\/v2\/product_brand?post=2331"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/tr\/wp-json\/wp\/v2\/product_cat?post=2331"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/tr\/wp-json\/wp\/v2\/product_tag?post=2331"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}