![\"\"](\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Flatness-SiC-Ceramic-Vacuum-Chuck-for-Hybrid-Bonding-Applications-2-300x300.png\")
Wafer Bonding i\u00e7in SiC Vakum Aynas\u0131, geli\u015fmi\u015f yar\u0131 iletken paketleme ve wafer bonding uygulamalar\u0131 i\u00e7in tasarlanm\u0131\u015f y\u00fcksek performansl\u0131 hassas bir seramik adsorpsiyon bile\u015fenidir.<\/p>\nWafer Bonding i\u00e7in SiC Vakum Aynas\u0131, geli\u015fmi\u015f yar\u0131 iletken paketleme ve wafer bonding uygulamalar\u0131 i\u00e7in tasarlanm\u0131\u015f y\u00fcksek performansl\u0131 hassas bir seramik adsorpsiyon bile\u015fenidir.<\/p>\n
Y\u00fcksek safl\u0131kta CVD Silisyum Karb\u00fcr (SiC) veya geli\u015fmi\u015f sinterlenmi\u015f SiC teknolojileri kullan\u0131larak \u00fcretilen bu vakumlu ayna, kritik yap\u0131\u015ft\u0131rma i\u015flemleri i\u00e7in ola\u011fan\u00fcst\u00fc termal stabilite, ultra y\u00fcksek sertlik ve mikron alt\u0131 d\u00fczeyde y\u00fczey hassasiyeti sa\u011flar.<\/p>\n
Hassas vakum adsorpsiyon yap\u0131lar\u0131 ve ultra d\u00fcz y\u00fczey i\u015fleme sayesinde ayna, wafer-to-wafer (W2W), chip-to-wafer (C2W), hibrit yap\u0131\u015ft\u0131rma, MEMS paketleme ve geli\u015fmi\u015f yar\u0131 iletken montaj i\u015flemleri s\u0131ras\u0131nda gofretleri g\u00fcvenli bir \u015fekilde tutar.<\/p>\n
D\u00fc\u015f\u00fck termal genle\u015fmesi ve \u00fcst\u00fcn boyutsal kararl\u0131l\u0131\u011f\u0131, y\u00fcksek s\u0131cakl\u0131k prosesleri s\u0131ras\u0131nda termal deformasyonu en aza indirirken do\u011fru yonga plakas\u0131 konumland\u0131rmas\u0131 sa\u011flar.<\/p>\n
Ayna s\u0131n\u0131f\u0131 d\u00fczl\u00fck, yerel gerilimi en aza indirir ve yap\u0131\u015ft\u0131rma s\u0131ras\u0131nda gofret deformasyonunu azalt\u0131r.<\/p>\n
![\"\"](\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Flatness-SiC-Ceramic-Vacuum-Chuck-for-Hybrid-Bonding-Applications-1-300x300.png\")
Ultra P\u00fcr\u00fczs\u00fcz Ayna Parlatma<\/h3>\nY\u00fczey p\u00fcr\u00fczl\u00fcl\u00fc\u011f\u00fc:<\/p>\n
Ra \u2264 0,01 \u03bcm<\/p>\n
Avantajlar:<\/p>\n
Silisyum karb\u00fcr sergiler:<\/p>\n
Bu, aynan\u0131n y\u00fcksek s\u0131cakl\u0131kta yap\u0131\u015ft\u0131rma ko\u015fullar\u0131 alt\u0131nda hassas konumland\u0131rmay\u0131 s\u00fcrd\u00fcrmesini sa\u011flar.<\/p>\n
Elastik mod\u00fcl:<\/p>\n
>400 GPa<\/p>\n
Avantajlar:<\/p>\n
Y\u00fcksek sertlik, mikron alt\u0131 hizalama i\u015flemleri i\u00e7in kritik \u00f6neme sahiptir.<\/p>\n
Y\u00fcksek hassasiyetli vakumlu oluk i\u015fleme:<\/p>\n
Do\u011fruluk:<\/p>\n
\u00b15 \u03bcm<\/p>\n
Sa\u011flar:<\/p>\n
| \u00d6\u011fe<\/th>\n | \u015eartname<\/th>\n<\/tr>\n<\/thead>\n |
|---|---|
| Malzeme<\/td>\n | Y\u00fcksek Safl\u0131kta Silisyum Karb\u00fcr<\/td>\n<\/tr>\n |
| SiC Safl\u0131\u011f\u0131<\/td>\n | \u226599,999%<\/td>\n<\/tr>\n |
| Y\u00fczey D\u00fczl\u00fc\u011f\u00fc<\/td>\n | \u22641 \u03bcm<\/td>\n<\/tr>\n |
| Y\u00fczey P\u00fcr\u00fczl\u00fcl\u00fc\u011f\u00fc<\/td>\n | Ra \u22640,01 \u03bcm<\/td>\n<\/tr>\n |
| Elastik Mod\u00fcl<\/td>\n | >400 GPa<\/td>\n<\/tr>\n |
| Termal \u0130letkenlik<\/td>\n | ~120 W\/m-K<\/td>\n<\/tr>\n |
| Yo\u011funluk<\/td>\n | \u22653,1 g\/cm\u00b3<\/td>\n<\/tr>\n |
| CTE<\/td>\n | ~4.5\u00d710-\u2076\/\u00b0C<\/td>\n<\/tr>\n |
| Yiv Do\u011frulu\u011fu<\/td>\n | \u00b15 \u03bcm<\/td>\n<\/tr>\n |
| \u00c7al\u0131\u015fma S\u0131cakl\u0131\u011f\u0131<\/td>\n | RT-400\u00b0C<\/td>\n<\/tr>\n |
| Y\u00fczey \u0130\u015flemleri<\/td>\n | Ayna Cilal\u0131<\/td>\n<\/tr>\n |
| Gofret Boyutu<\/td>\n | \u00d6zel Mevcut<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n \n Uygulamalar<\/h2>\n |
![\"\"](\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/20250922113244_25590-300x174.png\")
Yayg\u0131n olarak kullan\u0131l\u0131r:<\/p>\n