{"id":2201,"date":"2026-05-15T06:27:55","date_gmt":"2026-05-15T06:27:55","guid":{"rendered":"https:\/\/www.xkh-ceramics.com\/?post_type=product&#038;p=2201"},"modified":"2026-05-15T06:32:41","modified_gmt":"2026-05-15T06:32:41","slug":"high-flatness-sic-ceramic-vacuum-chuck-for-hybrid-bonding-applications","status":"publish","type":"product","link":"https:\/\/www.xkh-ceramics.com\/sv\/product\/high-flatness-sic-ceramic-vacuum-chuck-for-hybrid-bonding-applications\/","title":{"rendered":"SiC-keramisk vakuumchuck med h\u00f6g planhet f\u00f6r hybridbindningstill\u00e4mpningar"},"content":{"rendered":"<p data-start=\"769\" data-end=\"950\"><img fetchpriority=\"high\" decoding=\"async\" class=\"size-medium wp-image-2204 alignright\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Flatness-SiC-Ceramic-Vacuum-Chuck-for-Hybrid-Bonding-Applications-2-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Flatness-SiC-Ceramic-Vacuum-Chuck-for-Hybrid-Bonding-Applications-2-300x300.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Flatness-SiC-Ceramic-Vacuum-Chuck-for-Hybrid-Bonding-Applications-2-150x150.png 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Flatness-SiC-Ceramic-Vacuum-Chuck-for-Hybrid-Bonding-Applications-2-768x768.png 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Flatness-SiC-Ceramic-Vacuum-Chuck-for-Hybrid-Bonding-Applications-2-12x12.png 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Flatness-SiC-Ceramic-Vacuum-Chuck-for-Hybrid-Bonding-Applications-2-600x600.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Flatness-SiC-Ceramic-Vacuum-Chuck-for-Hybrid-Bonding-Applications-2-100x100.png 100w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Flatness-SiC-Ceramic-Vacuum-Chuck-for-Hybrid-Bonding-Applications-2.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>SiC vakuumchuck f\u00f6r wafer bonding \u00e4r en h\u00f6gpresterande keramisk adsorptionskomponent med h\u00f6g precision som \u00e4r utformad f\u00f6r avancerade f\u00f6rpackningar f\u00f6r halvledare och wafer bonding-applikationer.<\/p>\n<p data-start=\"952\" data-end=\"1201\">Denna vakuumchuck \u00e4r tillverkad med h\u00f6gren CVD-kiselkarbid (SiC) eller avancerad sintrad SiC-teknik och ger exceptionell termisk stabilitet, ultrah\u00f6g styvhet och ytprecision p\u00e5 submikronniv\u00e5 f\u00f6r kritiska limningsprocesser.<\/p>\n<p data-start=\"1203\" data-end=\"1454\">Genom precisionsstrukturer f\u00f6r vakuumadsorption och bearbetning av ultraplatta ytor h\u00e5ller chucken s\u00e4kert fast wafers vid wafer-to-wafer (W2W), chip-to-wafer (C2W), hybridbondning, MEMS-f\u00f6rpackning och avancerad montering av halvledare.<\/p>\n<p data-start=\"1456\" data-end=\"1626\">Den l\u00e5ga v\u00e4rmeutvidgningen och den \u00f6verl\u00e4gsna dimensionsstabiliteten s\u00e4kerst\u00e4ller exakt waferpositionering samtidigt som den minimerar termisk deformation under processer med f\u00f6rh\u00f6jd temperatur.<\/p>\n<hr data-start=\"1628\" data-end=\"1631\" \/>\n<h2 data-section-id=\"1ma7m6t\" data-start=\"1633\" data-end=\"1648\">Viktiga funktioner<\/h2>\n<h3 data-section-id=\"1ag5n0f\" data-start=\"1650\" data-end=\"1689\">Ultraplatta skivors adsorptionsyta<\/h3>\n<ul data-start=\"1691\" data-end=\"1822\">\n<li data-section-id=\"1squslp\" data-start=\"1691\" data-end=\"1718\">Ytans planhet \u2264 1 \u03bcm<\/li>\n<li data-section-id=\"82w5jk\" data-start=\"1719\" data-end=\"1741\">Parallellism \u2264 1 \u03bcm<\/li>\n<li data-section-id=\"i3icbd\" data-start=\"1742\" data-end=\"1782\">S\u00e4kerst\u00e4ller mycket enhetlig waferkontakt<\/li>\n<li data-section-id=\"10gawis\" data-start=\"1783\" data-end=\"1822\">F\u00f6rb\u00e4ttrar noggrannheten i limningsinriktningen<\/li>\n<\/ul>\n<p data-start=\"1824\" data-end=\"1914\">Spegelblank planhet minimerar lokala sp\u00e4nningar och minskar deformationen av wafern under limningen.<\/p>\n<h3 data-section-id=\"1bjp15b\" data-start=\"1921\" data-end=\"1954\"><img decoding=\"async\" class=\"size-medium wp-image-2205 alignright\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Flatness-SiC-Ceramic-Vacuum-Chuck-for-Hybrid-Bonding-Applications-1-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Flatness-SiC-Ceramic-Vacuum-Chuck-for-Hybrid-Bonding-Applications-1-300x300.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Flatness-SiC-Ceramic-Vacuum-Chuck-for-Hybrid-Bonding-Applications-1-150x150.png 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Flatness-SiC-Ceramic-Vacuum-Chuck-for-Hybrid-Bonding-Applications-1-768x768.png 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Flatness-SiC-Ceramic-Vacuum-Chuck-for-Hybrid-Bonding-Applications-1-12x12.png 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Flatness-SiC-Ceramic-Vacuum-Chuck-for-Hybrid-Bonding-Applications-1-600x600.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Flatness-SiC-Ceramic-Vacuum-Chuck-for-Hybrid-Bonding-Applications-1-100x100.png 100w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Flatness-SiC-Ceramic-Vacuum-Chuck-for-Hybrid-Bonding-Applications-1.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>Ultra-sl\u00e4t spegelpolering<\/h3>\n<p data-start=\"1956\" data-end=\"1974\">Ytj\u00e4mnhet:<\/p>\n<p data-start=\"1976\" data-end=\"1992\">Ra \u2264 0,01 \u03bcm<\/p>\n<p data-start=\"1994\" data-end=\"2003\">F\u00f6rdelar:<\/p>\n<ul data-start=\"2005\" data-end=\"2141\">\n<li data-section-id=\"14nn914\" data-start=\"2005\" data-end=\"2037\">Minskad partikelf\u00f6rorening<\/li>\n<li data-section-id=\"yvq0gc\" data-start=\"2038\" data-end=\"2075\">F\u00f6rb\u00e4ttrad vakuumf\u00f6rseglingsprestanda<\/li>\n<li data-section-id=\"wg8ubp\" data-start=\"2076\" data-end=\"2101\">Stabil adsorption av skivor<\/li>\n<li data-section-id=\"1f2d1o7\" data-start=\"2102\" data-end=\"2141\">Kompatibilitet med renrum f\u00f6r halvledare<\/li>\n<\/ul>\n<h3 data-section-id=\"1il5hua\" data-start=\"2148\" data-end=\"2181\">Exceptionell termisk stabilitet<\/h3>\n<p data-start=\"2183\" data-end=\"2208\">Kiselkarbid uppvisar:<\/p>\n<ul data-start=\"2210\" data-end=\"2322\">\n<li data-section-id=\"10kjbpo\" data-start=\"2210\" data-end=\"2260\">L\u00e5g v\u00e4rmeutvidgningskoefficient (~4,5\u00d710-\u2076\/\u00b0C)<\/li>\n<li data-section-id=\"1yezcgi\" data-start=\"2261\" data-end=\"2288\">H\u00f6g v\u00e4rmeledningsf\u00f6rm\u00e5ga<\/li>\n<li data-section-id=\"1yzox84\" data-start=\"2289\" data-end=\"2322\">Utm\u00e4rkt dimensionsstabilitet<\/li>\n<\/ul>\n<p data-start=\"2324\" data-end=\"2424\">Detta g\u00f6r att chucken kan bibeh\u00e5lla exakt positionering under bondningsf\u00f6rh\u00e5llanden med f\u00f6rh\u00f6jd temperatur.<\/p>\n<h3 data-section-id=\"1pd5p6e\" data-start=\"2431\" data-end=\"2459\">H\u00f6g mekanisk styvhet<\/h3>\n<p data-start=\"2461\" data-end=\"2477\">Elastisk modul:<\/p>\n<p data-start=\"2479\" data-end=\"2491\">&gt;400 GPa<\/p>\n<p data-start=\"2493\" data-end=\"2504\">F\u00f6rdelar:<\/p>\n<ul data-start=\"2506\" data-end=\"2613\">\n<li data-section-id=\"1hg45f6\" data-start=\"2506\" data-end=\"2543\">F\u00f6rhindrar deformation under tryck<\/li>\n<li data-section-id=\"1ms13ye\" data-start=\"2544\" data-end=\"2582\">St\u00f6djer h\u00f6g noggrannhet vid waferladdning<\/li>\n<li data-section-id=\"1ao73lw\" data-start=\"2583\" data-end=\"2613\">F\u00f6rb\u00e4ttrar processens enhetlighet<\/li>\n<\/ul>\n<p data-start=\"2615\" data-end=\"2677\">H\u00f6g styvhet \u00e4r avg\u00f6rande f\u00f6r uppriktningsprocesser i submikronstorlek.<\/p>\n<h3 data-section-id=\"17thkoo\" data-start=\"2684\" data-end=\"2719\">Design av vakuumkanaler med precision<\/h3>\n<p data-start=\"2721\" data-end=\"2760\">Sp\u00e5rbearbetning med h\u00f6g precision i vakuum:<\/p>\n<p data-start=\"2762\" data-end=\"2771\">Noggrannhet:<\/p>\n<p data-start=\"2773\" data-end=\"2782\">\u00b15 \u03bcm<\/p>\n<p data-start=\"2784\" data-end=\"2792\">S\u00e4kerst\u00e4ller:<\/p>\n<ul data-start=\"2794\" data-end=\"2894\">\n<li data-section-id=\"1slsamk\" data-start=\"2794\" data-end=\"2833\">Enhetlig f\u00f6rdelning av adsorptionskraften<\/li>\n<li data-section-id=\"4ffymg\" data-start=\"2834\" data-end=\"2857\">Stabil fixering av wafers<\/li>\n<li data-section-id=\"1ev6db4\" data-start=\"2858\" data-end=\"2894\">Minskad lokal sp\u00e4nningskoncentration<\/li>\n<\/ul>\n<hr data-start=\"2896\" data-end=\"2899\" \/>\n<h2 data-section-id=\"1cgu054\" data-start=\"2901\" data-end=\"2928\">Tekniska specifikationer<\/h2>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"2930\" data-end=\"3354\">\n<thead data-start=\"2930\" data-end=\"2954\">\n<tr data-start=\"2930\" data-end=\"2954\">\n<th class=\"last:pe-10\" data-start=\"2930\" data-end=\"2937\" data-col-size=\"sm\">F\u00f6rem\u00e5l<\/th>\n<th class=\"last:pe-10\" data-start=\"2937\" data-end=\"2954\" data-col-size=\"sm\">Specifikation<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"2965\" data-end=\"3354\">\n<tr data-start=\"2965\" data-end=\"3007\">\n<td data-start=\"2965\" data-end=\"2976\" data-col-size=\"sm\">Material<\/td>\n<td data-start=\"2976\" data-end=\"3007\" data-col-size=\"sm\">Kiselkarbid med h\u00f6g renhet<\/td>\n<\/tr>\n<tr data-start=\"3008\" data-end=\"3033\">\n<td data-start=\"3008\" data-end=\"3021\" data-col-size=\"sm\">SiC Renhetsgrad<\/td>\n<td data-col-size=\"sm\" data-start=\"3021\" data-end=\"3033\">\u226599.999%<\/td>\n<\/tr>\n<tr data-start=\"3034\" data-end=\"3062\">\n<td data-start=\"3034\" data-end=\"3053\" data-col-size=\"sm\">Ytans planhet<\/td>\n<td data-col-size=\"sm\" data-start=\"3053\" data-end=\"3062\">\u22641 \u03bcm<\/td>\n<\/tr>\n<tr data-start=\"3063\" data-end=\"3098\">\n<td data-start=\"3063\" data-end=\"3083\" data-col-size=\"sm\">Ytj\u00e4mnhet<\/td>\n<td data-col-size=\"sm\" data-start=\"3083\" data-end=\"3098\">Ra \u22640,01 \u03bcm<\/td>\n<\/tr>\n<tr data-start=\"3099\" data-end=\"3129\">\n<td data-start=\"3099\" data-end=\"3117\" data-col-size=\"sm\">Elastisk modul<\/td>\n<td data-col-size=\"sm\" data-start=\"3117\" data-end=\"3129\">&gt;400 GPa<\/td>\n<\/tr>\n<tr data-start=\"3130\" data-end=\"3167\">\n<td data-start=\"3130\" data-end=\"3153\" data-col-size=\"sm\">Termisk konduktivitet<\/td>\n<td data-col-size=\"sm\" data-start=\"3153\" data-end=\"3167\">~120 W\/m-K<\/td>\n<\/tr>\n<tr data-start=\"3168\" data-end=\"3192\">\n<td data-start=\"3168\" data-end=\"3178\" data-col-size=\"sm\">T\u00e4thet<\/td>\n<td data-col-size=\"sm\" data-start=\"3178\" data-end=\"3192\">\u22653,1 g\/cm\u00b3<\/td>\n<\/tr>\n<tr data-start=\"3193\" data-end=\"3215\">\n<td data-start=\"3193\" data-end=\"3199\" data-col-size=\"sm\">CTE<\/td>\n<td data-col-size=\"sm\" data-start=\"3199\" data-end=\"3215\">~4.5\u00d710-\u2076\/\u00b0C<\/td>\n<\/tr>\n<tr data-start=\"3216\" data-end=\"3243\">\n<td data-start=\"3216\" data-end=\"3234\" data-col-size=\"sm\">Noggrannhet f\u00f6r sp\u00e5r<\/td>\n<td data-col-size=\"sm\" data-start=\"3234\" data-end=\"3243\">\u00b15 \u03bcm<\/td>\n<\/tr>\n<tr data-start=\"3244\" data-end=\"3280\">\n<td data-start=\"3244\" data-end=\"3268\" data-col-size=\"sm\">Driftstemperatur<\/td>\n<td data-col-size=\"sm\" data-start=\"3268\" data-end=\"3280\">RT-400\u00b0C<\/td>\n<\/tr>\n<tr data-start=\"3281\" data-end=\"3320\">\n<td data-start=\"3281\" data-end=\"3301\" data-col-size=\"sm\">Ytbehandling<\/td>\n<td data-start=\"3301\" data-end=\"3320\" data-col-size=\"sm\">Spegel Polerad<\/td>\n<\/tr>\n<tr data-start=\"3321\" data-end=\"3354\">\n<td data-start=\"3321\" data-end=\"3334\" data-col-size=\"sm\">Wafer-storlek<\/td>\n<td data-start=\"3334\" data-end=\"3354\" data-col-size=\"sm\">Anpassad tillg\u00e4nglig<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"3356\" data-end=\"3359\" \/>\n<h2 data-section-id=\"mu966k\" data-start=\"3361\" data-end=\"3376\">Till\u00e4mpningar<\/h2>\n<h3 data-section-id=\"wjbzos\" data-start=\"3378\" data-end=\"3414\">Avancerade halvledarf\u00f6rpackningar<\/h3>\n<p data-start=\"3416\" data-end=\"3431\"><img decoding=\"async\" class=\"size-medium wp-image-2207 alignright\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/20250922113244_25590-300x174.png\" alt=\"\" width=\"300\" height=\"174\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/20250922113244_25590-300x174.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/20250922113244_25590-18x10.png 18w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/20250922113244_25590-600x349.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/20250922113244_25590.png 680w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>Anv\u00e4nds ofta i:<\/p>\n<ul data-start=\"3433\" data-end=\"3600\">\n<li data-section-id=\"123uv47\" data-start=\"3433\" data-end=\"3465\">Wafer-till-Wafer (W2W)-bindning<\/li>\n<li data-section-id=\"c7s92\" data-start=\"3466\" data-end=\"3497\">Bondning chip-till-wafer (C2W)<\/li>\n<li data-section-id=\"1bqwewz\" data-start=\"3498\" data-end=\"3516\">Hybridbindning<\/li>\n<li data-section-id=\"1nykrz3\" data-start=\"3517\" data-end=\"3554\">Cu-Cu termokompressionsprocesser<\/li>\n<li data-section-id=\"35sgx6\" data-start=\"3555\" data-end=\"3574\">3D IC-f\u00f6rpackning<\/li>\n<li data-section-id=\"at340r\" data-start=\"3575\" data-end=\"3600\">System i paket (SiP)<\/li>\n<\/ul>\n<h3 data-section-id=\"1a9kliv\" data-start=\"3607\" data-end=\"3632\">F\u00f6rpackning av MEMS-enheter<\/h3>\n<p data-start=\"3634\" data-end=\"3668\">Ger stabilt waferst\u00f6d f\u00f6r:<\/p>\n<ul data-start=\"3670\" data-end=\"3730\">\n<li data-section-id=\"1sdgegm\" data-start=\"3670\" data-end=\"3688\">Vakuumbindning<\/li>\n<li data-section-id=\"1qjfpoh\" data-start=\"3689\" data-end=\"3707\">Anodisk bindning<\/li>\n<li data-section-id=\"dbgga8\" data-start=\"3708\" data-end=\"3730\">Inkapsling av sensor<\/li>\n<\/ul>\n<p data-start=\"3732\" data-end=\"3822\">Den styva strukturen skyddar k\u00e4nsliga MEMS-enheter fr\u00e5n termisk eller mekanisk distorsion.<\/p>\n<h3 data-section-id=\"1qt18ux\" data-start=\"3829\" data-end=\"3860\">Krafthalvledarkomponenter<\/h3>\n<p data-start=\"3862\" data-end=\"3875\">L\u00e4mplig f\u00f6r:<\/p>\n<ul data-start=\"3877\" data-end=\"3966\">\n<li data-section-id=\"mfu7zo\" data-start=\"3877\" data-end=\"3901\">F\u00f6rpackning av SiC-modul<\/li>\n<li data-section-id=\"1yt7ywp\" data-start=\"3902\" data-end=\"3931\">GaN-enhet f\u00f6r kraftf\u00f6rs\u00f6rjning<\/li>\n<li data-section-id=\"p9njc8\" data-start=\"3932\" data-end=\"3952\">Sintring av silver<\/li>\n<li data-section-id=\"18yr1fr\" data-start=\"3953\" data-end=\"3966\">TLP-bindning<\/li>\n<\/ul>\n<p data-start=\"3968\" data-end=\"4024\">Utm\u00e4rkt termisk stabilitet s\u00e4kerst\u00e4ller en konsekvent process.<\/p>\n<h3 data-section-id=\"14di4ch\" data-start=\"4031\" data-end=\"4070\">Tillverkning av fotonik och mikro-LED<\/h3>\n<p data-start=\"4072\" data-end=\"4081\">St\u00f6djer:<\/p>\n<ul data-start=\"4083\" data-end=\"4204\">\n<li data-section-id=\"1gtpe27\" data-start=\"4083\" data-end=\"4113\">Mikro-LED-\u00f6verf\u00f6ringssystem<\/li>\n<li data-section-id=\"12uwywl\" data-start=\"4114\" data-end=\"4139\">Limning av glas och kisel<\/li>\n<li data-section-id=\"6a950i\" data-start=\"4140\" data-end=\"4170\">Integration av optiska enheter<\/li>\n<li data-section-id=\"1gp423q\" data-start=\"4171\" data-end=\"4204\">Precisionspositionering av substrat<\/li>\n<\/ul>\n<hr data-start=\"4206\" data-end=\"4209\" \/>\n<h2 data-section-id=\"dysc5y\" data-start=\"4211\" data-end=\"4232\">Produktens f\u00f6rdelar<\/h2>\n<ul data-start=\"4234\" data-end=\"4547\">\n<li data-section-id=\"um7u8k\" data-start=\"4234\" data-end=\"4268\">SiC-material med ultrah\u00f6g renhet<\/li>\n<li data-section-id=\"t9txjh\" data-start=\"4269\" data-end=\"4295\">Ytans planhet \u22641 \u03bcm<\/li>\n<li data-section-id=\"1qzleq6\" data-start=\"4296\" data-end=\"4334\">Spegelpolerad adsorptionsyta<\/li>\n<li data-section-id=\"1bdmggy\" data-start=\"4335\" data-end=\"4366\">Utm\u00e4rkt termisk stabilitet<\/li>\n<li data-section-id=\"ivfffh\" data-start=\"4367\" data-end=\"4398\">H\u00f6g styvhet och styvhet<\/li>\n<li data-section-id=\"ua0354\" data-start=\"4399\" data-end=\"4429\">L\u00e5g partikelf\u00f6rorening<\/li>\n<li data-section-id=\"bp2qqs\" data-start=\"4430\" data-end=\"4468\">Precisionsbearbetning av vakuumkanaler<\/li>\n<li data-section-id=\"xszix1\" data-start=\"4469\" data-end=\"4517\">L\u00e4mplig f\u00f6r avancerade f\u00f6rpackningsmilj\u00f6er<\/li>\n<li data-section-id=\"y0lwwo\" data-start=\"4518\" data-end=\"4547\">Anpassad geometri tillg\u00e4nglig<\/li>\n<\/ul>\n<hr data-start=\"4549\" data-end=\"4552\" \/>\n<h2 data-section-id=\"rnyyeg\" data-start=\"4554\" data-end=\"4578\">Anpassningsalternativ<\/h2>\n<p data-start=\"4580\" data-end=\"4664\">Vi erbjuder fullst\u00e4ndig OEM\/ODM-anpassning baserat p\u00e5 ritningar eller applikationskrav:<\/p>\n<ul data-start=\"4666\" data-end=\"4878\">\n<li data-section-id=\"6tm948\" data-start=\"4666\" data-end=\"4690\">Anpassade skivdiametrar<\/li>\n<li data-section-id=\"1vfjaam\" data-start=\"4691\" data-end=\"4714\">Layout f\u00f6r vakuumsp\u00e5r<\/li>\n<li data-section-id=\"13s8suu\" data-start=\"4715\" data-end=\"4740\">Strukturer f\u00f6r genomg\u00e5ende h\u00e5l<\/li>\n<li data-section-id=\"1wmws68\" data-start=\"4741\" data-end=\"4767\">Alternativ f\u00f6r spegelpolering<\/li>\n<li data-section-id=\"cox5s3\" data-start=\"4768\" data-end=\"4794\">S\u00e4rskilda adsorptionszoner<\/li>\n<li data-section-id=\"1bbm77i\" data-start=\"4795\" data-end=\"4825\">Reng\u00f6ring av halvledarkvalitet<\/li>\n<li data-section-id=\"14z4bjj\" data-start=\"4826\" data-end=\"4849\">Ultraplatt bearbetning<\/li>\n<li data-section-id=\"1udm0ti\" data-start=\"4850\" data-end=\"4878\">Komplexa keramiska geometrier<\/li>\n<\/ul>\n<p data-start=\"4880\" data-end=\"4980\">Alla produkter kan f\u00f6rpackas i renrumsmilj\u00f6er av klass 100 f\u00f6r halvledarapplikationer.<\/p>\n<hr data-start=\"4982\" data-end=\"4985\" \/>\n<h2 data-section-id=\"1hryhf7\" data-start=\"4987\" data-end=\"4993\">VANLIGA FR\u00c5GOR<\/h2>\n<h3 data-section-id=\"u7k6ec\" data-start=\"4995\" data-end=\"5059\">F1: Varf\u00f6r anv\u00e4nda SiC ist\u00e4llet f\u00f6r vakuumchuckar av aluminium eller kvarts?<\/h3>\n<p data-start=\"5061\" data-end=\"5072\">SiC erbjuder:<\/p>\n<ul data-start=\"5074\" data-end=\"5212\">\n<li data-section-id=\"1y67fsp\" data-start=\"5074\" data-end=\"5101\">L\u00e4gre termisk expansion<\/li>\n<li data-section-id=\"1slmg84\" data-start=\"5102\" data-end=\"5121\">H\u00f6gre styvhet<\/li>\n<li data-section-id=\"trt37b\" data-start=\"5122\" data-end=\"5155\">B\u00e4ttre temperaturbest\u00e4ndighet<\/li>\n<li data-section-id=\"1i25w4v\" data-start=\"5156\" data-end=\"5186\">Minskad risk f\u00f6r kontaminering<\/li>\n<li data-section-id=\"13ilisr\" data-start=\"5187\" data-end=\"5212\">L\u00e4ngre livsl\u00e4ngd<\/li>\n<\/ul>\n<h3 data-section-id=\"cwo9dr\" data-start=\"5219\" data-end=\"5265\">Q2: Vilka bondingprocesser st\u00f6ds?<\/h3>\n<p data-start=\"5267\" data-end=\"5283\">Kompatibel med:<\/p>\n<ul data-start=\"5285\" data-end=\"5380\">\n<li data-section-id=\"14kpzzx\" data-start=\"5285\" data-end=\"5300\">W2W-bindning<\/li>\n<li data-section-id=\"1uhw6eh\" data-start=\"5301\" data-end=\"5316\">C2W-bindning<\/li>\n<li data-section-id=\"1bqwewz\" data-start=\"5317\" data-end=\"5335\">Hybridbindning<\/li>\n<li data-section-id=\"8fmkq0\" data-start=\"5336\" data-end=\"5365\">Bindning genom termokompression<\/li>\n<li data-section-id=\"cd7995\" data-start=\"5366\" data-end=\"5380\">MEMS-limning<\/li>\n<\/ul>\n<h3 data-section-id=\"sqhas4\" data-start=\"5387\" data-end=\"5437\">F3: Kan anpassade vakuumsp\u00e5r tillverkas?<\/h3>\n<p data-start=\"5439\" data-end=\"5530\">Ja, det kan vi. Sp\u00e5rm\u00f6nster, h\u00e5llayouter, adsorptionsomr\u00e5den och dimensioner kan alla anpassas.<\/p>\n<h3 data-section-id=\"1lhq4ur\" data-start=\"5537\" data-end=\"5587\">Q4: Finns reng\u00f6ring av halvledarkvalitet tillg\u00e4nglig?<\/h3>\n<p data-start=\"5589\" data-end=\"5665\">Ja, det st\u00e4mmer. Produkterna kan reng\u00f6ras och f\u00f6rpackas i renrum av klass 100.<\/p>","protected":false},"excerpt":{"rendered":"<p data-start=\"769\" data-end=\"950\">SiC vakuumchuck f\u00f6r wafer bonding \u00e4r en h\u00f6gpresterande keramisk adsorptionskomponent med h\u00f6g precision som \u00e4r utformad f\u00f6r avancerade f\u00f6rpackningar f\u00f6r halvledare och wafer bonding-applikationer.<\/p>\n<p data-start=\"952\" data-end=\"1201\">Denna vakuumchuck \u00e4r tillverkad med h\u00f6gren CVD-kiselkarbid (SiC) eller avancerad sintrad SiC-teknik och ger exceptionell termisk stabilitet, ultrah\u00f6g styvhet och ytprecision p\u00e5 submikronniv\u00e5 f\u00f6r kritiska limningsprocesser.<\/p>","protected":false},"featured_media":2206,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}}},"product_brand":[],"product_cat":[27],"product_tag":[298,300,299,302,295,301,292,293,297,296,294],"class_list":{"0":"post-2201","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-ceramic-vacuum-chuck","7":"product_tag-c2w-vacuum-chuck","8":"product_tag-high-flatness-sic-chuck","9":"product_tag-hybrid-bonding-chuck","10":"product_tag-mirror-polished-vacuum-chuck","11":"product_tag-semiconductor-ceramic-chuck","12":"product_tag-semiconductor-wafer-holder","13":"product_tag-sic-vacuum-chuck","14":"product_tag-silicon-carbide-vacuum-chuck","15":"product_tag-w2w-bonding-chuck","16":"product_tag-wafer-adsorption-chuck","17":"product_tag-wafer-bonding-chuck","18":"desktop-align-left","19":"tablet-align-left","20":"mobile-align-left","21":"ast-product-gallery-layout-horizontal-slider","22":"ast-product-tabs-layout-horizontal","24":"first","25":"instock","26":"shipping-taxable","27":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/www.xkh-ceramics.com\/sv\/wp-json\/wp\/v2\/product\/2201","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.xkh-ceramics.com\/sv\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/www.xkh-ceramics.com\/sv\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/sv\/wp-json\/wp\/v2\/comments?post=2201"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/sv\/wp-json\/wp\/v2\/media\/2206"}],"wp:attachment":[{"href":"https:\/\/www.xkh-ceramics.com\/sv\/wp-json\/wp\/v2\/media?parent=2201"}],"wp:term":[{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/sv\/wp-json\/wp\/v2\/product_brand?post=2201"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/sv\/wp-json\/wp\/v2\/product_cat?post=2201"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/sv\/wp-json\/wp\/v2\/product_tag?post=2201"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}