{"id":2110,"date":"2026-05-12T06:26:35","date_gmt":"2026-05-12T06:26:35","guid":{"rendered":"https:\/\/www.xkh-ceramics.com\/?post_type=product&#038;p=2110"},"modified":"2026-05-12T06:28:57","modified_gmt":"2026-05-12T06:28:57","slug":"full-cvd-sic-wafer-carrier-tray-plate-for-semiconductor-mocvd-etching-equipment","status":"publish","type":"product","link":"https:\/\/www.xkh-ceramics.com\/ru\/product\/full-cvd-sic-wafer-carrier-tray-plate-for-semiconductor-mocvd-etching-equipment\/","title":{"rendered":"\u041f\u043e\u043b\u043d\u044b\u0439 CVD SiC \u043f\u043b\u0430\u0441\u0442\u0438\u043d\u0430 \u043b\u043e\u0442\u043a\u0430 \u043d\u043e\u0441\u0438\u0442\u0435\u043b\u044f \u0432\u0430\u0444\u043b\u0438 \u0434\u043b\u044f \u043f\u043e\u043b\u0443\u043f\u0440\u043e\u0432\u043e\u0434\u043d\u0438\u043a\u043e\u0432\u043e\u0433\u043e \u043e\u0431\u043e\u0440\u0443\u0434\u043e\u0432\u0430\u043d\u0438\u044f MOCVD \u0438 \u0442\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u044f"},"content":{"rendered":"<p data-start=\"199\" data-end=\"387\"><img fetchpriority=\"high\" decoding=\"async\" class=\"size-medium wp-image-2111 alignright\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-3-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-3-300x300.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-3-150x150.png 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-3-768x768.png 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-3-12x12.png 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-3-600x600.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-3-100x100.png 100w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-3.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>\u041a\u0435\u0440\u0430\u043c\u0438\u0447\u0435\u0441\u043a\u0430\u044f \u043f\u043b\u0430\u0441\u0442\u0438\u043d\u0430-\u043b\u043e\u0442\u043e\u043a SiC - \u044d\u0442\u043e \u0432\u044b\u0441\u043e\u043a\u043e\u043f\u0440\u043e\u0438\u0437\u0432\u043e\u0434\u0438\u0442\u0435\u043b\u044c\u043d\u044b\u0439 \u0434\u0435\u0440\u0436\u0430\u0442\u0435\u043b\u044c \u0434\u043b\u044f \u043f\u043e\u043b\u0443\u043f\u0440\u043e\u0432\u043e\u0434\u043d\u0438\u043a\u043e\u0432\u044b\u0445 \u043f\u043b\u0430\u0441\u0442\u0438\u043d, \u0440\u0430\u0437\u0440\u0430\u0431\u043e\u0442\u0430\u043d\u043d\u044b\u0439 \u0434\u043b\u044f \u043f\u0435\u0440\u0435\u0434\u043e\u0432\u044b\u0445 \u043f\u043e\u043b\u0443\u043f\u0440\u043e\u0432\u043e\u0434\u043d\u0438\u043a\u043e\u0432\u044b\u0445 \u043f\u0440\u043e\u0446\u0435\u0441\u0441\u043e\u0432, \u0442\u0430\u043a\u0438\u0445 \u043a\u0430\u043a MOCVD, \u044d\u043f\u0438\u0442\u0430\u043a\u0441\u0438\u044f \u0438 ICP-\u0442\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u0435. \u041e\u043d\u0430 \u0432\u044b\u043f\u0443\u0441\u043a\u0430\u0435\u0442\u0441\u044f \u0432 \u0434\u0432\u0443\u0445 \u043a\u043e\u043d\u0441\u0442\u0440\u0443\u043a\u0446\u0438\u044f\u0445:<\/p>\n<ul data-start=\"389\" data-end=\"486\">\n<li data-section-id=\"1a2m83y\" data-start=\"389\" data-end=\"434\">\u0413\u0440\u0430\u0444\u0438\u0442\u043e\u0432\u0430\u044f \u043f\u043e\u0434\u043b\u043e\u0436\u043a\u0430 \u0441 CVD \u043f\u043e\u043a\u0440\u044b\u0442\u0438\u0435\u043c SiC<\/li>\n<li data-section-id=\"h6gq41\" data-start=\"435\" data-end=\"486\">\u041c\u043e\u043d\u043e\u043b\u0438\u0442\u043d\u044b\u0439 \u043b\u043e\u0442\u043e\u043a \u0438\u0437 \u0432\u044b\u0441\u043e\u043a\u043e\u0447\u0438\u0441\u0442\u043e\u0433\u043e CVD SiC (\u226599.99%)<\/li>\n<\/ul>\n<p data-start=\"488\" data-end=\"728\">\u041f\u043e \u0441\u0440\u0430\u0432\u043d\u0435\u043d\u0438\u044e \u0441 \u043e\u0431\u044b\u0447\u043d\u044b\u043c\u0438 \u0433\u0440\u0430\u0444\u0438\u0442\u043e\u0432\u044b\u043c\u0438 \u043d\u043e\u0441\u0438\u0442\u0435\u043b\u044f\u043c\u0438, \u044d\u0442\u043e\u0442 \u043f\u0440\u043e\u0434\u0443\u043a\u0442 \u043e\u0431\u043b\u0430\u0434\u0430\u0435\u0442 \u0437\u043d\u0430\u0447\u0438\u0442\u0435\u043b\u044c\u043d\u043e \u0431\u043e\u043b\u0435\u0435 \u0432\u044b\u0441\u043e\u043a\u043e\u0439 \u0442\u0435\u0440\u043c\u0438\u0447\u0435\u0441\u043a\u043e\u0439 \u0441\u0442\u0430\u0431\u0438\u043b\u044c\u043d\u043e\u0441\u0442\u044c\u044e, \u043a\u043e\u0440\u0440\u043e\u0437\u0438\u043e\u043d\u043d\u043e\u0439 \u0441\u0442\u043e\u0439\u043a\u043e\u0441\u0442\u044c\u044e \u0438 \u0441\u0440\u043e\u043a\u043e\u043c \u0441\u043b\u0443\u0436\u0431\u044b, \u0447\u0442\u043e \u0434\u0435\u043b\u0430\u0435\u0442 \u0435\u0433\u043e \u0438\u0434\u0435\u0430\u043b\u044c\u043d\u044b\u043c \u0434\u043b\u044f \u0438\u0441\u043f\u043e\u043b\u044c\u0437\u043e\u0432\u0430\u043d\u0438\u044f \u0432 \u0441\u043b\u043e\u0436\u043d\u044b\u0445 \u0432\u044b\u0441\u043e\u043a\u043e\u0442\u0435\u043c\u043f\u0435\u0440\u0430\u0442\u0443\u0440\u043d\u044b\u0445 \u0443\u0441\u043b\u043e\u0432\u0438\u044f\u0445 \u043f\u0440\u043e\u0438\u0437\u0432\u043e\u0434\u0441\u0442\u0432\u0430 \u043f\u043e\u043b\u0443\u043f\u0440\u043e\u0432\u043e\u0434\u043d\u0438\u043a\u043e\u0432.<\/p>\n<p data-start=\"730\" data-end=\"847\">\u041e\u043d \u0448\u0438\u0440\u043e\u043a\u043e \u0438\u0441\u043f\u043e\u043b\u044c\u0437\u0443\u0435\u0442\u0441\u044f \u0432 \u043f\u0440\u043e\u0438\u0437\u0432\u043e\u0434\u0441\u0442\u0432\u0435 GaN-\u0441\u0432\u0435\u0442\u043e\u0434\u0438\u043e\u0434\u043e\u0432, \u0441\u0438\u043b\u043e\u0432\u044b\u0445 \u043f\u043e\u043b\u0443\u043f\u0440\u043e\u0432\u043e\u0434\u043d\u0438\u043a\u043e\u0432 \u0438 \u043f\u0440\u0435\u0446\u0438\u0437\u0438\u043e\u043d\u043d\u044b\u0445 \u0441\u0438\u0441\u0442\u0435\u043c \u043e\u0431\u0440\u0430\u0431\u043e\u0442\u043a\u0438 \u043f\u043b\u0430\u0441\u0442\u0438\u043d.<\/p>\n<hr data-start=\"849\" data-end=\"852\" \/>\n<h1 data-section-id=\"1j1pcx4\" data-start=\"854\" data-end=\"885\"><span role=\"text\">\u041a\u043b\u044e\u0447\u0435\u0432\u044b\u0435 \u043e\u0441\u043e\u0431\u0435\u043d\u043d\u043e\u0441\u0442\u0438 \u0438 \u043f\u0440\u0435\u0438\u043c\u0443\u0449\u0435\u0441\u0442\u0432\u0430<\/span><\/h1>\n<h3 data-section-id=\"1alapmz\" data-start=\"887\" data-end=\"931\"><span role=\"text\">1. \u0423\u0441\u0442\u043e\u0439\u0447\u0438\u0432\u043e\u0441\u0442\u044c \u043a \u0441\u0432\u0435\u0440\u0445\u0432\u044b\u0441\u043e\u043a\u0438\u043c \u0442\u0435\u043c\u043f\u0435\u0440\u0430\u0442\u0443\u0440\u0430\u043c<\/span><\/h3>\n<ul data-start=\"932\" data-end=\"1084\">\n<li data-section-id=\"n8q3t9\" data-start=\"932\" data-end=\"970\">\u0421\u0442\u0430\u0431\u0438\u043b\u044c\u043d\u0430\u044f \u0440\u0430\u0431\u043e\u0442\u0430 \u043f\u0440\u0438 1100-1200\u00b0C+<\/li>\n<li data-section-id=\"zbjl5k\" data-start=\"971\" data-end=\"1033\">\u041f\u043e\u0434\u0445\u043e\u0434\u0438\u0442 \u0434\u043b\u044f \u0436\u0435\u0441\u0442\u043a\u0438\u0445 \u0443\u0441\u043b\u043e\u0432\u0438\u0439 MOCVD \u0438 \u044d\u043f\u0438\u0442\u0430\u043a\u0441\u0438\u0430\u043b\u044c\u043d\u043e\u0433\u043e \u0440\u043e\u0441\u0442\u0430<\/li>\n<li data-section-id=\"1p7r2f0\" data-start=\"1034\" data-end=\"1084\">\u041e\u0442\u0441\u0443\u0442\u0441\u0442\u0432\u0438\u0435 \u0434\u0435\u0444\u043e\u0440\u043c\u0430\u0446\u0438\u0438 \u043f\u0440\u0438 \u0434\u043b\u0438\u0442\u0435\u043b\u044c\u043d\u043e\u043c \u0442\u0435\u0440\u043c\u043e\u0446\u0438\u043a\u043b\u0438\u0440\u043e\u0432\u0430\u043d\u0438\u0438<\/li>\n<\/ul>\n<h3 data-section-id=\"1xbme7x\" data-start=\"1086\" data-end=\"1132\"><span role=\"text\">2. \u041f\u0440\u0435\u0432\u043e\u0441\u0445\u043e\u0434\u043d\u0430\u044f \u0437\u0430\u0449\u0438\u0442\u0430 \u043f\u043e\u043a\u0440\u044b\u0442\u0438\u044f CVD SiC<\/span><\/h3>\n<ul data-start=\"1133\" data-end=\"1295\">\n<li data-section-id=\"1yg8xxq\" data-start=\"1133\" data-end=\"1163\">\u0427\u0438\u0441\u0442\u043e\u0442\u0430 \u0434\u043e 99,999% SiC<\/li>\n<li data-section-id=\"fof224\" data-start=\"1164\" data-end=\"1228\">\u041f\u043b\u043e\u0442\u043d\u043e\u0435 \u043f\u043e\u043a\u0440\u044b\u0442\u0438\u0435 \u043f\u0440\u0435\u0434\u043e\u0442\u0432\u0440\u0430\u0449\u0430\u0435\u0442 \u043f\u0440\u043e\u043d\u0438\u043a\u043d\u043e\u0432\u0435\u043d\u0438\u0435 \u0433\u0430\u0437\u0430 \u0438 \u044d\u0440\u043e\u0437\u0438\u044e \u043f\u043e\u0434\u043b\u043e\u0436\u043a\u0438<\/li>\n<li data-section-id=\"i9f016\" data-start=\"1229\" data-end=\"1295\">\u0423\u0441\u0442\u0440\u0430\u043d\u044f\u0435\u0442 \u0437\u0430\u0433\u0440\u044f\u0437\u043d\u0435\u043d\u0438\u0435 \u0433\u0440\u0430\u0444\u0438\u0442\u043e\u0432\u044b\u043c\u0438 \u0447\u0430\u0441\u0442\u0438\u0446\u0430\u043c\u0438 \u043f\u0440\u0438 \u043e\u0431\u0440\u0430\u0431\u043e\u0442\u043a\u0435 \u043f\u043b\u0430\u0441\u0442\u0438\u043d<\/li>\n<\/ul>\n<h3 data-section-id=\"r23teu\" data-start=\"1297\" data-end=\"1349\"><span role=\"text\">3. \u041e\u0442\u043b\u0438\u0447\u043d\u0430\u044f \u043a\u043e\u0440\u0440\u043e\u0437\u0438\u043e\u043d\u043d\u0430\u044f \u0438 \u0445\u0438\u043c\u0438\u0447\u0435\u0441\u043a\u0430\u044f \u0441\u0442\u043e\u0439\u043a\u043e\u0441\u0442\u044c<\/span><\/h3>\n<ul data-start=\"1350\" data-end=\"1472\">\n<li data-section-id=\"jgfj1d\" data-start=\"1350\" data-end=\"1412\">\u0423\u0441\u0442\u043e\u0439\u0447\u0438\u0432\u043e\u0441\u0442\u044c \u043a HF, H\u2082SO\u2084, HCl \u0438 \u0440\u0435\u0430\u043a\u0442\u0438\u0432\u043d\u044b\u043c \u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0447\u0435\u0441\u043a\u0438\u043c \u0433\u0430\u0437\u0430\u043c<\/li>\n<li data-section-id=\"1yalk8d\" data-start=\"1413\" data-end=\"1472\">\u0418\u0434\u0435\u0430\u043b\u044c\u043d\u043e \u043f\u043e\u0434\u0445\u043e\u0434\u0438\u0442 \u0434\u043b\u044f \u0430\u0433\u0440\u0435\u0441\u0441\u0438\u0432\u043d\u044b\u0445 \u0441\u0440\u0435\u0434 \u0442\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u044f \u043f\u043e\u043b\u0443\u043f\u0440\u043e\u0432\u043e\u0434\u043d\u0438\u043a\u043e\u0432<\/li>\n<\/ul>\n<h3 data-section-id=\"ughzy4\" data-start=\"1474\" data-end=\"1528\"><span role=\"text\">4. \u0412\u044b\u0441\u043e\u043a\u0430\u044f \u0442\u0435\u043f\u043b\u043e\u043f\u0440\u043e\u0432\u043e\u0434\u043d\u043e\u0441\u0442\u044c \u0438 \u0440\u0430\u0432\u043d\u043e\u043c\u0435\u0440\u043d\u044b\u0439 \u043d\u0430\u0433\u0440\u0435\u0432<\/span><\/h3>\n<ul data-start=\"1529\" data-end=\"1642\">\n<li data-section-id=\"10oy89q\" data-start=\"1529\" data-end=\"1594\">\u041e\u0431\u0435\u0441\u043f\u0435\u0447\u0438\u0432\u0430\u0435\u0442 \u0440\u0430\u0432\u043d\u043e\u043c\u0435\u0440\u043d\u043e\u0435 \u0440\u0430\u0441\u043f\u0440\u0435\u0434\u0435\u043b\u0435\u043d\u0438\u0435 \u0442\u0435\u043c\u043f\u0435\u0440\u0430\u0442\u0443\u0440\u044b \u043f\u043e \u043f\u043e\u0432\u0435\u0440\u0445\u043d\u043e\u0441\u0442\u0438 \u043f\u043b\u0430\u0441\u0442\u0438\u043d<\/li>\n<li data-section-id=\"1rsv4ef\" data-start=\"1595\" data-end=\"1642\">\u0423\u043b\u0443\u0447\u0448\u0430\u0435\u0442 \u043a\u0430\u0447\u0435\u0441\u0442\u0432\u043e \u043f\u043b\u0435\u043d\u043a\u0438 \u0438 \u0441\u0442\u0430\u0431\u0438\u043b\u044c\u043d\u043e\u0441\u0442\u044c \u043f\u0440\u043e\u0446\u0435\u0441\u0441\u0430<\/li>\n<\/ul>\n<h3 data-section-id=\"rhgagc\" data-start=\"1644\" data-end=\"1672\"><span role=\"text\">5. \u0414\u043b\u0438\u0442\u0435\u043b\u044c\u043d\u044b\u0439 \u0441\u0440\u043e\u043a \u0441\u043b\u0443\u0436\u0431\u044b<\/span><\/h3>\n<ul data-start=\"1673\" data-end=\"1796\">\n<li data-section-id=\"1wgev4f\" data-start=\"1673\" data-end=\"1743\">\u0421\u0440\u043e\u043a \u0441\u043b\u0443\u0436\u0431\u044b \u0434\u043e 4\u00d7 \u0431\u043e\u043b\u044c\u0448\u0435, \u0447\u0435\u043c \u0443 \u0442\u0440\u0430\u0434\u0438\u0446\u0438\u043e\u043d\u043d\u044b\u0445 \u043b\u043e\u0442\u043a\u043e\u0432 \u043d\u0430 \u043e\u0441\u043d\u043e\u0432\u0435 \u0433\u0440\u0430\u0444\u0438\u0442\u0430<\/li>\n<li data-section-id=\"tsrdbt\" data-start=\"1744\" data-end=\"1796\">\u0421\u043e\u043a\u0440\u0430\u0449\u0435\u043d\u0438\u0435 \u0432\u0440\u0435\u043c\u0435\u043d\u0438 \u043f\u0440\u043e\u0441\u0442\u043e\u044f \u0438 \u0441\u043d\u0438\u0436\u0435\u043d\u0438\u0435 \u0447\u0430\u0441\u0442\u043e\u0442\u044b \u0437\u0430\u043c\u0435\u043d\u044b<\/li>\n<\/ul>\n<p><img decoding=\"async\" class=\"alignnone size-medium wp-image-2114\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-300x300.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-150x150.png 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-768x768.png 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-12x12.png 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-600x600.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-100x100.png 100w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/> <img decoding=\"async\" class=\"alignnone size-medium wp-image-2113\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-1-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-1-300x300.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-1-150x150.png 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-1-768x768.png 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-1-12x12.png 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-1-600x600.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-1-100x100.png 100w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-1.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/> <img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-medium wp-image-2112\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-2-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-2-300x300.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-2-150x150.png 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-2-768x768.png 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-2-12x12.png 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-2-600x600.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-2-100x100.png 100w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-2.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/p>\n<hr data-start=\"1798\" data-end=\"1801\" \/>\n<h1 data-section-id=\"10k15yz\" data-start=\"1803\" data-end=\"1833\"><span role=\"text\">\u0422\u0435\u0445\u043d\u0438\u0447\u0435\u0441\u043a\u0438\u0435 \u0445\u0430\u0440\u0430\u043a\u0442\u0435\u0440\u0438\u0441\u0442\u0438\u043a\u0438<\/span><\/h1>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"1835\" data-end=\"2207\">\n<thead data-start=\"1835\" data-end=\"1856\">\n<tr data-start=\"1835\" data-end=\"1856\">\n<th class=\"last:pe-10\" data-start=\"1835\" data-end=\"1847\" data-col-size=\"sm\">\u041f\u0430\u0440\u0430\u043c\u0435\u0442\u0440<\/th>\n<th class=\"last:pe-10\" data-start=\"1847\" data-end=\"1856\" data-col-size=\"md\">\u0417\u043d\u0430\u0447\u0435\u043d\u0438\u0435<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"1877\" data-end=\"2207\">\n<tr data-start=\"1877\" data-end=\"1938\">\n<td data-start=\"1877\" data-end=\"1893\" data-col-size=\"sm\">\u0422\u0438\u043f \u043c\u0430\u0442\u0435\u0440\u0438\u0430\u043b\u0430<\/td>\n<td data-start=\"1893\" data-end=\"1938\" data-col-size=\"md\">\u0413\u0440\u0430\u0444\u0438\u0442 + CVD \u043f\u043e\u043a\u0440\u044b\u0442\u0438\u0435 SiC \/ \u041f\u043e\u043b\u043d\u043e\u0435 CVD \u043f\u043e\u043a\u0440\u044b\u0442\u0438\u0435 SiC<\/td>\n<\/tr>\n<tr data-start=\"1939\" data-end=\"1993\">\n<td data-start=\"1939\" data-end=\"1952\" data-col-size=\"sm\">\u0427\u0438\u0441\u0442\u043e\u0442\u0430 SiC<\/td>\n<td data-start=\"1952\" data-end=\"1993\" data-col-size=\"md\">\u226599,9% (\u0441 \u043f\u043e\u043a\u0440\u044b\u0442\u0438\u0435\u043c), \u226599,99% (\u043c\u043e\u043d\u043e\u043b\u0438\u0442\u043d\u044b\u0439)<\/td>\n<\/tr>\n<tr data-start=\"1994\" data-end=\"2032\">\n<td data-start=\"1994\" data-end=\"2011\" data-col-size=\"sm\">\u0414\u0438\u0430\u043f\u0430\u0437\u043e\u043d \u0434\u0438\u0430\u043c\u0435\u0442\u0440\u043e\u0432<\/td>\n<td data-start=\"2011\" data-end=\"2032\" data-col-size=\"md\">\u03a6380 \u043c\u043c - \u03a6600 \u043c\u043c<\/td>\n<\/tr>\n<tr data-start=\"2033\" data-end=\"2072\">\n<td data-start=\"2033\" data-end=\"2057\" data-col-size=\"sm\">\u0420\u0430\u0431\u043e\u0447\u0430\u044f \u0442\u0435\u043c\u043f\u0435\u0440\u0430\u0442\u0443\u0440\u0430<\/td>\n<td data-col-size=\"md\" data-start=\"2057\" data-end=\"2072\">1100-1200\u00b0C<\/td>\n<\/tr>\n<tr data-start=\"2073\" data-end=\"2104\">\n<td data-start=\"2073\" data-end=\"2096\" data-col-size=\"sm\">\u0422\u0435\u043f\u043b\u043e\u043f\u0440\u043e\u0432\u043e\u0434\u043d\u043e\u0441\u0442\u044c<\/td>\n<td data-col-size=\"md\" data-start=\"2096\" data-end=\"2104\">\u0412\u044b\u0441\u043e\u043a\u0438\u0439<\/td>\n<\/tr>\n<tr data-start=\"2105\" data-end=\"2163\">\n<td data-start=\"2105\" data-end=\"2128\" data-col-size=\"sm\">\u0423\u0441\u0442\u043e\u0439\u0447\u0438\u0432\u043e\u0441\u0442\u044c \u043a \u043a\u043e\u0440\u0440\u043e\u0437\u0438\u0438<\/td>\n<td data-col-size=\"md\" data-start=\"2128\" data-end=\"2163\">\u041f\u0440\u0435\u0432\u043e\u0441\u0445\u043e\u0434\u043d\u043e (HF, H\u2082SO\u2084 \u0443\u0441\u0442\u043e\u0439\u0447\u0438\u0432\u044b)<\/td>\n<\/tr>\n<tr data-start=\"2164\" data-end=\"2207\">\n<td data-start=\"2164\" data-end=\"2179\" data-col-size=\"sm\">\u0421\u0440\u043e\u043a \u0441\u043b\u0443\u0436\u0431\u044b<\/td>\n<td data-start=\"2179\" data-end=\"2207\" data-col-size=\"md\">~4\u00d7 \u043f\u043e\u0434\u043d\u043e\u0441\u044b \u043d\u0430 \u043e\u0441\u043d\u043e\u0432\u0435 \u0433\u0440\u0430\u0444\u0438\u0442\u0430<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"2209\" data-end=\"2212\" \/>\n<h1 data-section-id=\"18cvqw\" data-start=\"2214\" data-end=\"2237\"><span role=\"text\">\u041e\u0431\u043b\u0430\u0441\u0442\u0438 \u043f\u0440\u0438\u043c\u0435\u043d\u0435\u043d\u0438\u044f<\/span><\/h1>\n<h3 data-section-id=\"bm5nu5\" data-start=\"2239\" data-end=\"2274\"><span role=\"text\">\u041f\u0440\u043e\u0438\u0437\u0432\u043e\u0434\u0441\u0442\u0432\u043e \u043f\u043e\u043b\u0443\u043f\u0440\u043e\u0432\u043e\u0434\u043d\u0438\u043a\u043e\u0432<\/span><\/h3>\n<ul data-start=\"2275\" data-end=\"2438\">\n<li data-section-id=\"pooj76\" data-start=\"2275\" data-end=\"2326\">MOCVD (\u043c\u0435\u0442\u0430\u043b\u043b\u043e\u043e\u0440\u0433\u0430\u043d\u0438\u0447\u0435\u0441\u043a\u043e\u0435 \u0445\u0438\u043c\u0438\u0447\u0435\u0441\u043a\u043e\u0435 \u043e\u0441\u0430\u0436\u0434\u0435\u043d\u0438\u0435 \u0438\u0437 \u043f\u0430\u0440\u043e\u0432\u043e\u0439 \u0444\u0430\u0437\u044b)<\/li>\n<li data-section-id=\"c8v0nb\" data-start=\"2327\" data-end=\"2370\">\u042d\u043f\u0438\u0442\u0430\u043a\u0441\u0438\u0430\u043b\u044c\u043d\u044b\u0439 \u0440\u043e\u0441\u0442 \u043f\u043b\u0430\u0441\u0442\u0438\u043d (GaN, SiC \u0438 \u0434\u0440.)<\/li>\n<li data-section-id=\"15uw81h\" data-start=\"2371\" data-end=\"2396\">\u041f\u0440\u043e\u0446\u0435\u0441\u0441\u044b \u0442\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u044f ICP<\/li>\n<li data-section-id=\"1xtyszn\" data-start=\"2397\" data-end=\"2438\">\u0412\u044b\u0441\u043e\u043a\u043e\u0442\u043e\u0447\u043d\u044b\u0435 \u0441\u0438\u0441\u0442\u0435\u043c\u044b \u043e\u0431\u0440\u0430\u0431\u043e\u0442\u043a\u0438 \u043f\u043b\u0430\u0441\u0442\u0438\u043d<\/li>\n<\/ul>\n<h3 data-section-id=\"yf7wep\" data-start=\"2440\" data-end=\"2460\"><span role=\"text\">\u0421\u0432\u0435\u0442\u043e\u0434\u0438\u043e\u0434\u043d\u0430\u044f \u043f\u0440\u043e\u043c\u044b\u0448\u043b\u0435\u043d\u043d\u043e\u0441\u0442\u044c<\/span><\/h3>\n<ul data-start=\"2461\" data-end=\"2545\">\n<li data-section-id=\"b1ebdf\" data-start=\"2461\" data-end=\"2508\">\u041f\u0440\u043e\u0438\u0437\u0432\u043e\u0434\u0441\u0442\u0432\u043e \u0441\u0438\u043d\u0438\u0445 \u0438 \u0431\u0435\u043b\u044b\u0445 \u0441\u0432\u0435\u0442\u043e\u0434\u0438\u043e\u0434\u043e\u0432 \u0432\u044b\u0441\u043e\u043a\u043e\u0439 \u044f\u0440\u043a\u043e\u0441\u0442\u0438<\/li>\n<li data-section-id=\"9w14a9\" data-start=\"2509\" data-end=\"2545\">\u041e\u043f\u0442\u043e\u044d\u043b\u0435\u043a\u0442\u0440\u043e\u043d\u043d\u044b\u0435 \u043f\u0440\u0438\u0431\u043e\u0440\u044b \u043d\u0430 \u043e\u0441\u043d\u043e\u0432\u0435 GaN<\/li>\n<\/ul>\n<h3 data-section-id=\"d5g3k9\" data-start=\"2547\" data-end=\"2575\"><span role=\"text\">\u041f\u0435\u0440\u0435\u0434\u043e\u0432\u0430\u044f \u044d\u043b\u0435\u043a\u0442\u0440\u043e\u043d\u0438\u043a\u0430<\/span><\/h3>\n<ul data-start=\"2576\" data-end=\"2670\">\n<li data-section-id=\"14t88vj\" data-start=\"2576\" data-end=\"2600\">\u0421\u0438\u043b\u043e\u0432\u044b\u0435 \u043f\u043e\u043b\u0443\u043f\u0440\u043e\u0432\u043e\u0434\u043d\u0438\u043a\u0438<\/li>\n<li data-section-id=\"8rvytg\" data-start=\"2601\" data-end=\"2627\">\u0412\u044b\u0441\u043e\u043a\u043e\u0447\u0430\u0441\u0442\u043e\u0442\u043d\u044b\u0435 \u0443\u0441\u0442\u0440\u043e\u0439\u0441\u0442\u0432\u0430<\/li>\n<li data-section-id=\"4tdco8\" data-start=\"2628\" data-end=\"2670\">\u041f\u0440\u0435\u0446\u0438\u0437\u0438\u043e\u043d\u043d\u044b\u0435 \u0441\u0438\u0441\u0442\u0435\u043c\u044b \u043e\u0441\u0430\u0436\u0434\u0435\u043d\u0438\u044f \u0442\u043e\u043d\u043a\u0438\u0445 \u043f\u043b\u0435\u043d\u043e\u043a<\/li>\n<\/ul>\n<hr data-start=\"2672\" data-end=\"2675\" \/>\n<h1 data-section-id=\"1umg5ep\" data-start=\"2677\" data-end=\"2735\"><span role=\"text\">\u041f\u0440\u0435\u0438\u043c\u0443\u0449\u0435\u0441\u0442\u0432\u0430 \u043f\u043e \u0441\u0440\u0430\u0432\u043d\u0435\u043d\u0438\u044e \u0441 \u0442\u0440\u0430\u0434\u0438\u0446\u0438\u043e\u043d\u043d\u044b\u043c\u0438 \u0433\u0440\u0430\u0444\u0438\u0442\u043e\u0432\u044b\u043c\u0438 \u043b\u043e\u0442\u043a\u0430\u043c\u0438<\/span><\/h1>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"2737\" data-end=\"3069\">\n<thead data-start=\"2737\" data-end=\"2783\">\n<tr data-start=\"2737\" data-end=\"2783\">\n<th class=\"last:pe-10\" data-start=\"2737\" data-end=\"2744\" data-col-size=\"sm\">\u0410\u0440\u0442\u0438\u043a\u0443\u043b<\/th>\n<th class=\"last:pe-10\" data-start=\"2744\" data-end=\"2760\" data-col-size=\"sm\">\u0413\u0440\u0430\u0444\u0438\u0442\u043e\u0432\u044b\u0439 \u043f\u043e\u0434\u043d\u043e\u0441<\/th>\n<th class=\"last:pe-10\" data-start=\"2760\" data-end=\"2783\" data-col-size=\"sm\">\u041b\u043e\u0442\u043e\u043a \u0441 \u043f\u043e\u043a\u0440\u044b\u0442\u0438\u0435\u043c CVD SiC<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"2831\" data-end=\"3069\">\n<tr data-start=\"2831\" data-end=\"2878\">\n<td data-start=\"2831\" data-end=\"2856\" data-col-size=\"sm\">\u0422\u0435\u043c\u043f\u0435\u0440\u0430\u0442\u0443\u0440\u043d\u0430\u044f \u0441\u0442\u043e\u0439\u043a\u043e\u0441\u0442\u044c<\/td>\n<td data-col-size=\"sm\" data-start=\"2856\" data-end=\"2865\">\u0421\u0440\u0435\u0434\u043d\u0438\u0439<\/td>\n<td data-col-size=\"sm\" data-start=\"2865\" data-end=\"2878\">\u041e\u0447\u0435\u043d\u044c \u0432\u044b\u0441\u043e\u043a\u0438\u0439<\/td>\n<\/tr>\n<tr data-start=\"2879\" data-end=\"2922\">\n<td data-start=\"2879\" data-end=\"2902\" data-col-size=\"sm\">\u0423\u0441\u0442\u043e\u0439\u0447\u0438\u0432\u043e\u0441\u0442\u044c \u043a \u043a\u043e\u0440\u0440\u043e\u0437\u0438\u0438<\/td>\n<td data-col-size=\"sm\" data-start=\"2902\" data-end=\"2909\">\u0411\u0435\u0434\u043d\u044b\u0439<\/td>\n<td data-col-size=\"sm\" data-start=\"2909\" data-end=\"2922\">\u041f\u0440\u0435\u0432\u043e\u0441\u0445\u043e\u0434\u043d\u043e<\/td>\n<\/tr>\n<tr data-start=\"2923\" data-end=\"2971\">\n<td data-start=\"2923\" data-end=\"2948\" data-col-size=\"sm\">\u0417\u0430\u0433\u0440\u044f\u0437\u043d\u0435\u043d\u0438\u0435 \u0447\u0430\u0441\u0442\u0438\u0446\u0430\u043c\u0438<\/td>\n<td data-col-size=\"sm\" data-start=\"2948\" data-end=\"2960\">\u0412\u044b\u0441\u043e\u043a\u0438\u0439 \u0440\u0438\u0441\u043a<\/td>\n<td data-col-size=\"sm\" data-start=\"2960\" data-end=\"2971\">\u041c\u0438\u043d\u0438\u043c\u0443\u043c<\/td>\n<\/tr>\n<tr data-start=\"2972\" data-end=\"3010\">\n<td data-start=\"2972\" data-end=\"2987\" data-col-size=\"sm\">\u0421\u0440\u043e\u043a \u0441\u043b\u0443\u0436\u0431\u044b<\/td>\n<td data-col-size=\"sm\" data-start=\"2987\" data-end=\"2995\">\u041a\u043e\u0440\u043e\u0442\u043a\u0438\u0435<\/td>\n<td data-col-size=\"sm\" data-start=\"2995\" data-end=\"3010\">3-4\u00d7 \u0434\u043e\u043b\u044c\u0448\u0435<\/td>\n<\/tr>\n<tr data-start=\"3011\" data-end=\"3069\">\n<td data-start=\"3011\" data-end=\"3031\" data-col-size=\"sm\">\u0423\u0441\u0442\u043e\u0439\u0447\u0438\u0432\u043e\u0441\u0442\u044c \u043f\u043e\u0432\u0435\u0440\u0445\u043d\u043e\u0441\u0442\u0438<\/td>\n<td data-col-size=\"sm\" data-start=\"3031\" data-end=\"3052\">\u0420\u0430\u0437\u0440\u0443\u0448\u0430\u0435\u0442\u0441\u044f \u0441\u043e \u0432\u0440\u0435\u043c\u0435\u043d\u0435\u043c<\/td>\n<td data-col-size=\"sm\" data-start=\"3052\" data-end=\"3069\">\u0412\u044b\u0441\u043e\u043a\u0430\u044f \u0441\u0442\u0430\u0431\u0438\u043b\u044c\u043d\u043e\u0441\u0442\u044c<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"3071\" data-end=\"3074\" \/>\n<h1 data-section-id=\"7pt5v4\" data-start=\"3076\" data-end=\"3102\"><span role=\"text\">\u0423\u043f\u0430\u043a\u043e\u0432\u043a\u0430 \u0438 \u043e\u0431\u0440\u0430\u0431\u043e\u0442\u043a\u0430<\/span><\/h1>\n<ul data-start=\"3103\" data-end=\"3313\">\n<li data-section-id=\"a3kyzw\" data-start=\"3103\" data-end=\"3142\">\u0414\u043e\u0441\u0442\u0443\u043f\u043d\u0430 \u0443\u043f\u0430\u043a\u043e\u0432\u043a\u0430 \u0434\u043b\u044f \u0447\u0438\u0441\u0442\u044b\u0445 \u043f\u043e\u043c\u0435\u0449\u0435\u043d\u0438\u0439<\/li>\n<li data-section-id=\"3ss3f2\" data-start=\"3143\" data-end=\"3193\">\u0423\u0434\u0430\u0440\u043e\u043f\u0440\u043e\u0447\u043d\u044b\u0439 \u0434\u0435\u0440\u0435\u0432\u044f\u043d\u043d\u044b\u0439 \u044f\u0449\u0438\u043a \u0438\u043b\u0438 \u0432\u0430\u043a\u0443\u0443\u043c\u043d\u0430\u044f \u0443\u043f\u0430\u043a\u043e\u0432\u043a\u0430<\/li>\n<li data-section-id=\"iuz9t\" data-start=\"3194\" data-end=\"3253\">\u0420\u0430\u0437\u0440\u0430\u0431\u043e\u0442\u0430\u043d \u0434\u043b\u044f \u0442\u0440\u0430\u043d\u0441\u043f\u043e\u0440\u0442\u0438\u0440\u043e\u0432\u043a\u0438 \u043f\u043e\u043b\u0443\u043f\u0440\u043e\u0432\u043e\u0434\u043d\u0438\u043a\u043e\u0432 \u0431\u0435\u0437 \u0437\u0430\u0433\u0440\u044f\u0437\u043d\u0435\u043d\u0438\u0439<\/li>\n<li data-section-id=\"11l6t4c\" data-start=\"3254\" data-end=\"3313\">\u041f\u043e\u0434\u0434\u0435\u0440\u0436\u0438\u0432\u0430\u044e\u0442\u0441\u044f \u043d\u0435\u0441\u0442\u0430\u043d\u0434\u0430\u0440\u0442\u043d\u044b\u0435 \u0440\u0430\u0437\u043c\u0435\u0440\u044b (\u03a6380-\u03a6600 \u043c\u043c \u0438\u043b\u0438 \u0438\u043d\u0434\u0438\u0432\u0438\u0434\u0443\u0430\u043b\u044c\u043d\u044b\u0439 \u0434\u0438\u0437\u0430\u0439\u043d)<\/li>\n<\/ul>\n<hr data-start=\"3315\" data-end=\"3318\" \/>\n<h1 data-section-id=\"62o8y8\" data-start=\"3320\" data-end=\"3349\"><span role=\"text\">\u041f\u043e\u0447\u0435\u043c\u0443 \u0441\u0442\u043e\u0438\u0442 \u0432\u044b\u0431\u0440\u0430\u0442\u044c \u044d\u0442\u043e\u0442 \u043f\u0440\u043e\u0434\u0443\u043a\u0442<\/span><\/h1>\n<p data-start=\"3350\" data-end=\"3688\">\u042d\u0442\u043e\u0442 \u043b\u043e\u0442\u043e\u043a \u0434\u043b\u044f \u043f\u0435\u0440\u0435\u043d\u043e\u0441\u0430 SiC-\u043f\u043b\u0430\u0441\u0442\u0438\u043d \u0440\u0430\u0437\u0440\u0430\u0431\u043e\u0442\u0430\u043d \u0434\u043b\u044f \u043f\u0440\u043e\u0438\u0437\u0432\u043e\u0434\u0441\u0442\u0432\u0430 \u043f\u043e\u043b\u0443\u043f\u0440\u043e\u0432\u043e\u0434\u043d\u0438\u043a\u043e\u0432 \u043d\u043e\u0432\u043e\u0433\u043e \u043f\u043e\u043a\u043e\u043b\u0435\u043d\u0438\u044f, \u0433\u0434\u0435 \u0447\u0438\u0441\u0442\u043e\u0442\u0430, \u0442\u0435\u0440\u043c\u043e\u0441\u0442\u0430\u0431\u0438\u043b\u044c\u043d\u043e\u0441\u0442\u044c \u0438 \u043a\u043e\u043d\u0442\u0440\u043e\u043b\u044c \u0437\u0430\u0433\u0440\u044f\u0437\u043d\u0435\u043d\u0438\u044f \u0438\u043c\u0435\u044e\u0442 \u0440\u0435\u0448\u0430\u044e\u0449\u0435\u0435 \u0437\u043d\u0430\u0447\u0435\u043d\u0438\u0435. \u0417\u0430\u043c\u0435\u043d\u044f\u044f \u0442\u0440\u0430\u0434\u0438\u0446\u0438\u043e\u043d\u043d\u044b\u0435 \u043d\u043e\u0441\u0438\u0442\u0435\u043b\u0438 \u043d\u0430 \u043e\u0441\u043d\u043e\u0432\u0435 \u0433\u0440\u0430\u0444\u0438\u0442\u0430, \u043e\u043d \u0437\u043d\u0430\u0447\u0438\u0442\u0435\u043b\u044c\u043d\u043e \u043f\u043e\u0432\u044b\u0448\u0430\u0435\u0442 \u0432\u044b\u0445\u043e\u0434 \u043f\u0440\u043e\u0434\u0443\u043a\u0446\u0438\u0438, \u0441\u043d\u0438\u0436\u0430\u0435\u0442 \u044d\u043a\u0441\u043f\u043b\u0443\u0430\u0442\u0430\u0446\u0438\u043e\u043d\u043d\u044b\u0435 \u0440\u0430\u0441\u0445\u043e\u0434\u044b \u0438 \u043e\u0431\u0435\u0441\u043f\u0435\u0447\u0438\u0432\u0430\u0435\u0442 \u0441\u0442\u0430\u0431\u0438\u043b\u044c\u043d\u0443\u044e \u0434\u043e\u043b\u0433\u043e\u0441\u0440\u043e\u0447\u043d\u0443\u044e \u0440\u0430\u0431\u043e\u0442\u0443 \u043f\u0440\u043e\u0446\u0435\u0441\u0441\u0430.<\/p>\n<hr data-start=\"3690\" data-end=\"3693\" \/>\n<h1 data-section-id=\"1iusff4\" data-start=\"3695\" data-end=\"3704\"><span role=\"text\">\u0427\u0410\u0421\u0422\u041e \u0417\u0410\u0414\u0410\u0412\u0410\u0415\u041c\u042b\u0415 \u0412\u041e\u041f\u0420\u041e\u0421\u042b<\/span><\/h1>\n<h3 data-section-id=\"1m9x0lv\" data-start=\"3706\" data-end=\"3791\"><span role=\"text\">Q1: \u0412 \u0447\u0435\u043c \u043e\u0441\u043d\u043e\u0432\u043d\u043e\u0435 \u043f\u0440\u0435\u0438\u043c\u0443\u0449\u0435\u0441\u0442\u0432\u043e CVD SiC-\u043f\u043e\u043a\u0440\u044b\u0442\u0438\u044f \u043f\u043e \u0441\u0440\u0430\u0432\u043d\u0435\u043d\u0438\u044e \u0441 \u0433\u0440\u0430\u0444\u0438\u0442\u043e\u0432\u044b\u043c\u0438 \u043b\u043e\u0442\u043a\u0430\u043c\u0438?<\/span><\/h3>\n<p data-start=\"3792\" data-end=\"3978\">CVD-\u043f\u043e\u043a\u0440\u044b\u0442\u0438\u0435 SiC \u043e\u0431\u0435\u0441\u043f\u0435\u0447\u0438\u0432\u0430\u0435\u0442 \u043f\u043b\u043e\u0442\u043d\u044b\u0439, \u0441\u0432\u0435\u0440\u0445\u0447\u0438\u0441\u0442\u044b\u0439 \u0437\u0430\u0449\u0438\u0442\u043d\u044b\u0439 \u0441\u043b\u043e\u0439, \u043a\u043e\u0442\u043e\u0440\u044b\u0439 \u043f\u0440\u0435\u0434\u043e\u0442\u0432\u0440\u0430\u0449\u0430\u0435\u0442 \u043f\u0440\u043e\u043d\u0438\u043a\u043d\u043e\u0432\u0435\u043d\u0438\u0435 \u0433\u0430\u0437\u043e\u0432 \u0438 \u043e\u0441\u044b\u043f\u0430\u043d\u0438\u0435 \u0447\u0430\u0441\u0442\u0438\u0446 \u0433\u0440\u0430\u0444\u0438\u0442\u0430, \u0437\u043d\u0430\u0447\u0438\u0442\u0435\u043b\u044c\u043d\u043e \u043f\u043e\u0432\u044b\u0448\u0430\u044f \u0434\u043e\u043b\u0433\u043e\u0432\u0435\u0447\u043d\u043e\u0441\u0442\u044c \u0438 \u0441\u043d\u0438\u0436\u0430\u044f \u0437\u0430\u0433\u0440\u044f\u0437\u043d\u0435\u043d\u0438\u0435 \u043f\u043b\u0430\u0441\u0442\u0438\u043d.<\/p>\n<hr data-start=\"3980\" data-end=\"3983\" \/>\n<h3 data-section-id=\"7rg8ob\" data-start=\"3985\" data-end=\"4059\"><span role=\"text\">\u0412\u043e\u043f\u0440\u043e\u0441 2: \u041c\u043e\u0436\u043d\u043e \u043b\u0438 \u0438\u0441\u043f\u043e\u043b\u044c\u0437\u043e\u0432\u0430\u0442\u044c \u044d\u0442\u043e\u0442 \u043f\u043e\u0434\u0434\u043e\u043d \u0434\u043b\u044f SiC \u0432 \u0432\u044b\u0441\u043e\u043a\u043e\u0442\u0435\u043c\u043f\u0435\u0440\u0430\u0442\u0443\u0440\u043d\u044b\u0445 \u043f\u0440\u043e\u0446\u0435\u0441\u0441\u0430\u0445 MOCVD?<\/span><\/h3>\n<p data-start=\"4060\" data-end=\"4219\">\u0414\u0430. \u041e\u043d \u0441\u043f\u0435\u0446\u0438\u0430\u043b\u044c\u043d\u043e \u0440\u0430\u0437\u0440\u0430\u0431\u043e\u0442\u0430\u043d \u0434\u043b\u044f MOCVD-\u043f\u0440\u0438\u043b\u043e\u0436\u0435\u043d\u0438\u0439 \u0438 \u043c\u043e\u0436\u0435\u0442 \u043d\u0430\u0434\u0435\u0436\u043d\u043e \u0440\u0430\u0431\u043e\u0442\u0430\u0442\u044c \u043f\u0440\u0438 \u0442\u0435\u043c\u043f\u0435\u0440\u0430\u0442\u0443\u0440\u0435 1100-1200\u00b0C \u0441 \u043e\u0442\u043b\u0438\u0447\u043d\u043e\u0439 \u0442\u0435\u0440\u043c\u043e\u0441\u0442\u0430\u0431\u0438\u043b\u044c\u043d\u043e\u0441\u0442\u044c\u044e \u0438 \u0440\u0430\u0432\u043d\u043e\u043c\u0435\u0440\u043d\u044b\u043c \u0440\u0430\u0441\u043f\u0440\u0435\u0434\u0435\u043b\u0435\u043d\u0438\u0435\u043c \u0442\u0435\u043f\u043b\u0430.<\/p>\n<hr data-start=\"4221\" data-end=\"4224\" \/>\n<h3 data-section-id=\"ox8w5l\" data-start=\"4226\" data-end=\"4314\"><span role=\"text\">\u0412\u043e\u043f\u0440\u043e\u0441 3: \u0412 \u0447\u0435\u043c \u0440\u0430\u0437\u043d\u0438\u0446\u0430 \u043c\u0435\u0436\u0434\u0443 \u0433\u0440\u0430\u0444\u0438\u0442\u043e\u0432\u044b\u043c\u0438 \u043b\u043e\u0442\u043a\u0430\u043c\u0438 \u0441 \u043f\u043e\u043a\u0440\u044b\u0442\u0438\u0435\u043c \u0438 \u043b\u043e\u0442\u043a\u0430\u043c\u0438 \u0441 \u043f\u043e\u043b\u043d\u044b\u043c CVD SiC?<\/span><\/h3>\n<p data-start=\"4315\" data-end=\"4510\" data-is-last-node=\"\" data-is-only-node=\"\">\u0412 \u0433\u0440\u0430\u0444\u0438\u0442\u043e\u0432\u044b\u0445 \u043b\u043e\u0442\u043a\u0430\u0445 \u0441 \u043f\u043e\u043a\u0440\u044b\u0442\u0438\u0435\u043c \u0438\u0441\u043f\u043e\u043b\u044c\u0437\u0443\u0435\u0442\u0441\u044f \u0433\u0440\u0430\u0444\u0438\u0442\u043e\u0432\u0430\u044f \u0441\u0435\u0440\u0434\u0446\u0435\u0432\u0438\u043d\u0430 \u0441 \u0437\u0430\u0449\u0438\u0442\u043d\u044b\u043c \u0441\u043b\u043e\u0435\u043c SiC, \u0430 \u043b\u043e\u0442\u043a\u0438 \u0441 \u043f\u043e\u043b\u043d\u044b\u043c CVD SiC \u043f\u0440\u0435\u0434\u0441\u0442\u0430\u0432\u043b\u044f\u044e\u0442 \u0441\u043e\u0431\u043e\u0439 \u043c\u043e\u043d\u043e\u043b\u0438\u0442\u043d\u044b\u0435 \u0441\u0442\u0440\u0443\u043a\u0442\u0443\u0440\u044b \u0441 \u0431\u043e\u043b\u0435\u0435 \u0432\u044b\u0441\u043e\u043a\u043e\u0439 \u0447\u0438\u0441\u0442\u043e\u0442\u043e\u0439, \u043b\u0443\u0447\u0448\u0435\u0439 \u043a\u043e\u0440\u0440\u043e\u0437\u0438\u043e\u043d\u043d\u043e\u0439 \u0441\u0442\u043e\u0439\u043a\u043e\u0441\u0442\u044c\u044e \u0438 \u0431\u043e\u043b\u0435\u0435 \u0434\u043b\u0438\u0442\u0435\u043b\u044c\u043d\u044b\u043c \u0441\u0440\u043e\u043a\u043e\u043c \u0441\u043b\u0443\u0436\u0431\u044b.<\/p>","protected":false},"excerpt":{"rendered":"<p>The SiC ceramic tray plate is a high-performance wafer carrier designed for advanced semiconductor processes such as MOCVD, epitaxy, and ICP etching. It is available in two structures: Graphite substrate with CVD SiC coating Monolithic high-purity CVD SiC tray (\u226599.99%) Compared with conventional graphite carriers, this product offers significantly improved thermal stability, corrosion resistance, and 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