SiC: beste combinatie van stijfheid, zuiverheid en duurzaamheid<\/li>\n<\/ul>\n
\nV2: Kan het 450 mm wafers ondersteunen?<\/h3>\n
Ja, er zijn aangepaste ontwerpen beschikbaar voor 450mm waferbehandelingssystemen.<\/p>\n
\nV3: Is het geschikt voor EUV-lithografie?<\/h3>\n
Ja. SiC eindeffectoren voldoen aan de vereisten voor compatibiliteit met ultralage deeltjes en vacu\u00fcm.<\/p>\n
\nV4: Kan het worden gebruikt in vacu\u00fcmsystemen en systemen met hoge temperaturen?<\/h3>\n
Ja. SiC presteert stabiel in vacu\u00fcm, plasma en omgevingen met hoge temperaturen.<\/p>","protected":false},"excerpt":{"rendered":"
The Silicon Carbide (SiC) Ceramic End Effector is a high-precision wafer handling component designed for semiconductor automation systems, including wafer transfer robots, AMHS systems, EUV lithography equipment, and high-temperature process tools. Made from high-purity CVD SiC or engineered SSiC, this end effector delivers exceptional rigidity, ultra-low particle generation, and outstanding thermal and chemical stability. 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![\"\"](\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-3-300x300.png\")
De keramische eindeffector van siliciumcarbide (SiC) is een uiterst nauwkeurig waferhandelingsonderdeel dat is ontworpen voor automatiseringssystemen voor halfgeleiders, waaronder robots voor wafertransfer, AMHS-systemen, EUV-lithografieapparatuur en procesgereedschappen voor hoge temperaturen.<\/p>\n![\"\"](\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2-300x300.png\")
<\/h2>\n