{"id":2110,"date":"2026-05-12T06:26:35","date_gmt":"2026-05-12T06:26:35","guid":{"rendered":"https:\/\/www.xkh-ceramics.com\/?post_type=product&#038;p=2110"},"modified":"2026-05-12T06:28:57","modified_gmt":"2026-05-12T06:28:57","slug":"full-cvd-sic-wafer-carrier-tray-plate-for-semiconductor-mocvd-etching-equipment","status":"publish","type":"product","link":"https:\/\/www.xkh-ceramics.com\/ko\/product\/full-cvd-sic-wafer-carrier-tray-plate-for-semiconductor-mocvd-etching-equipment\/","title":{"rendered":"\ubc18\ub3c4\uccb4 MOCVD \ubc0f \uc5d0\uce6d \uc7a5\ube44\uc6a9 \ud480 CVD SiC \uc6e8\uc774\ud37c \uce90\ub9ac\uc5b4 \ud2b8\ub808\uc774 \ud50c\ub808\uc774\ud2b8"},"content":{"rendered":"<p data-start=\"199\" data-end=\"387\"><img fetchpriority=\"high\" decoding=\"async\" class=\"size-medium wp-image-2111 alignright\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-3-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-3-300x300.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-3-150x150.png 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-3-768x768.png 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-3-12x12.png 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-3-600x600.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-3-100x100.png 100w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-3.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>SiC \uc138\ub77c\ubbf9 \ud2b8\ub808\uc774 \ud50c\ub808\uc774\ud2b8\ub294 MOCVD, \uc5d0\ud53c\ud0dd\uc2dc, ICP \uc5d0\uce6d\uacfc \uac19\uc740 \ucca8\ub2e8 \ubc18\ub3c4\uccb4 \uacf5\uc815\uc744 \uc704\ud574 \uc124\uacc4\ub41c \uace0\uc131\ub2a5 \uc6e8\uc774\ud37c \uce90\ub9ac\uc5b4\uc785\ub2c8\ub2e4. \ub450 \uac00\uc9c0 \uad6c\uc870\ub85c \uc81c\uacf5\ub429\ub2c8\ub2e4:<\/p>\n<ul data-start=\"389\" data-end=\"486\">\n<li data-section-id=\"1a2m83y\" data-start=\"389\" data-end=\"434\">CVD SiC \ucf54\ud305\uc774 \uc801\uc6a9\ub41c \ud751\uc5f0 \uae30\ud310<\/li>\n<li data-section-id=\"h6gq41\" data-start=\"435\" data-end=\"486\">\ubaa8\ub180\ub9ac\uc2dd \uace0\uc21c\ub3c4 CVD SiC \ud2b8\ub808\uc774(\u226599.99%)<\/li>\n<\/ul>\n<p data-start=\"488\" data-end=\"728\">\uc774 \uc81c\ud488\uc740 \uae30\uc874 \ud751\uc5f0 \uce90\ub9ac\uc5b4\uc5d0 \ube44\ud574 \uc5f4 \uc548\uc815\uc131, \ub0b4\uc2dd\uc131, \uc11c\ube44\uc2a4 \uc218\uba85\uc774 \ud06c\uac8c \ud5a5\uc0c1\ub418\uc5b4 \uae4c\ub2e4\ub85c\uc6b4 \uace0\uc628 \ubc18\ub3c4\uccb4 \uc81c\uc870 \ud658\uacbd\uc5d0 \uc774\uc0c1\uc801\uc785\ub2c8\ub2e4.<\/p>\n<p data-start=\"730\" data-end=\"847\">GaN LED \uc0dd\uc0b0, \uc804\ub825 \ubc18\ub3c4\uccb4 \uc81c\uc870 \ubc0f \uc815\ubc00 \uc6e8\uc774\ud37c \ucc98\ub9ac \uc2dc\uc2a4\ud15c\uc5d0\uc11c \ub110\ub9ac \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/p>\n<hr data-start=\"849\" data-end=\"852\" \/>\n<h1 data-section-id=\"1j1pcx4\" data-start=\"854\" data-end=\"885\"><span role=\"text\">\uc8fc\uc694 \uae30\ub2a5 \ubc0f \uc7a5\uc810<\/span><\/h1>\n<h3 data-section-id=\"1alapmz\" data-start=\"887\" data-end=\"931\"><span role=\"text\">1. \ucd08\uace0\uc628 \uc800\ud56d<\/span><\/h3>\n<ul data-start=\"932\" data-end=\"1084\">\n<li data-section-id=\"n8q3t9\" data-start=\"932\" data-end=\"970\">1100-1200\u00b0C+\uc5d0\uc11c \uc548\uc815\uc801\uc778 \uc791\ub3d9<\/li>\n<li data-section-id=\"zbjl5k\" data-start=\"971\" data-end=\"1033\">\uc5f4\uc545\ud55c MOCVD \ubc0f \uc5d0\ud53c\ud0dd\uc15c \uc131\uc7a5 \ud658\uacbd\uc5d0 \uc801\ud569<\/li>\n<li data-section-id=\"1p7r2f0\" data-start=\"1034\" data-end=\"1084\">\uc7a5\uae30\uac04\uc758 \uc5f4 \uc21c\ud658\uc5d0\ub3c4 \ubcc0\ud615 \uc5c6\uc74c<\/li>\n<\/ul>\n<h3 data-section-id=\"1xbme7x\" data-start=\"1086\" data-end=\"1132\"><span role=\"text\">2. \uc6b0\uc218\ud55c CVD SiC \ucf54\ud305 \ubcf4\ud638<\/span><\/h3>\n<ul data-start=\"1133\" data-end=\"1295\">\n<li data-section-id=\"1yg8xxq\" data-start=\"1133\" data-end=\"1163\">\ucd5c\ub300 99.999% SiC \uc21c\ub3c4<\/li>\n<li data-section-id=\"fof224\" data-start=\"1164\" data-end=\"1228\">\uace0\ubc00\ub3c4 \ucf54\ud305\uc73c\ub85c \uac00\uc2a4 \uce68\ud22c \ubc0f \uae30\ud310 \uce68\uc2dd \ubc29\uc9c0<\/li>\n<li data-section-id=\"i9f016\" data-start=\"1229\" data-end=\"1295\">\uc6e8\uc774\ud37c \uacf5\uc815\uc5d0\uc11c \ud751\uc5f0 \uc785\uc790 \uc624\uc5fc \uc81c\uac70<\/li>\n<\/ul>\n<h3 data-section-id=\"r23teu\" data-start=\"1297\" data-end=\"1349\"><span role=\"text\">3. \ub6f0\uc5b4\ub09c \ub0b4\uc2dd\uc131 \ubc0f \ub0b4\ud654\ud559\uc131<\/span><\/h3>\n<ul data-start=\"1350\" data-end=\"1472\">\n<li data-section-id=\"jgfj1d\" data-start=\"1350\" data-end=\"1412\">HF, H\u2082SO\u2084, HCl \ubc0f \ubc18\uc751\uc131 \uacf5\uc815 \uac00\uc2a4\uc5d0 \ub300\ud55c \ub0b4\uc131<\/li>\n<li data-section-id=\"1yalk8d\" data-start=\"1413\" data-end=\"1472\">\uae4c\ub2e4\ub85c\uc6b4 \ubc18\ub3c4\uccb4 \uc5d0\uce6d \ud658\uacbd\uc5d0 \uc774\uc0c1\uc801<\/li>\n<\/ul>\n<h3 data-section-id=\"ughzy4\" data-start=\"1474\" data-end=\"1528\"><span role=\"text\">4. \ub192\uc740 \uc5f4\uc804\ub3c4\uc728 \ubc0f \uade0\uc77c\ud55c \uac00\uc5f4<\/span><\/h3>\n<ul data-start=\"1529\" data-end=\"1642\">\n<li data-section-id=\"10oy89q\" data-start=\"1529\" data-end=\"1594\">\uc6e8\uc774\ud37c \ud45c\uba74 \uc804\uccb4\uc5d0 \uade0\uc77c\ud55c \uc628\ub3c4 \ubd84\ud3ec \ubcf4\uc7a5<\/li>\n<li data-section-id=\"1rsv4ef\" data-start=\"1595\" data-end=\"1642\">\ud544\ub984 \ud488\uc9c8 \ubc0f \ud504\ub85c\uc138\uc2a4 \uc548\uc815\uc131 \ud5a5\uc0c1<\/li>\n<\/ul>\n<h3 data-section-id=\"rhgagc\" data-start=\"1644\" data-end=\"1672\"><span role=\"text\">5. \uae34 \uc11c\ube44\uc2a4 \uc218\uba85<\/span><\/h3>\n<ul data-start=\"1673\" data-end=\"1796\">\n<li data-section-id=\"1wgev4f\" data-start=\"1673\" data-end=\"1743\">\uae30\uc874 \ud751\uc5f0 \uae30\ubc18 \ud2b8\ub808\uc774\ubcf4\ub2e4 \ucd5c\ub300 4\ubc30 \ub354 \uae34 \uc218\uba85<\/li>\n<li data-section-id=\"tsrdbt\" data-start=\"1744\" data-end=\"1796\">\ub2e4\uc6b4\ud0c0\uc784 \uac10\uc18c \ubc0f \uad50\uccb4 \ube48\ub3c4 \uac10\uc18c<\/li>\n<\/ul>\n<p><img decoding=\"async\" class=\"alignnone size-medium wp-image-2114\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-300x300.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-150x150.png 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-768x768.png 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-12x12.png 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-600x600.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-100x100.png 100w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/> <img decoding=\"async\" class=\"alignnone size-medium wp-image-2113\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-1-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-1-300x300.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-1-150x150.png 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-1-768x768.png 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-1-12x12.png 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-1-600x600.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-1-100x100.png 100w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-1.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/> <img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-medium wp-image-2112\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-2-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-2-300x300.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-2-150x150.png 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-2-768x768.png 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-2-12x12.png 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-2-600x600.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-2-100x100.png 100w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-2.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/p>\n<hr data-start=\"1798\" data-end=\"1801\" \/>\n<h1 data-section-id=\"10k15yz\" data-start=\"1803\" data-end=\"1833\"><span role=\"text\">\uae30\uc220 \uc0ac\uc591<\/span><\/h1>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"1835\" data-end=\"2207\">\n<thead data-start=\"1835\" data-end=\"1856\">\n<tr data-start=\"1835\" data-end=\"1856\">\n<th class=\"last:pe-10\" data-start=\"1835\" data-end=\"1847\" data-col-size=\"sm\">\ub9e4\uac1c\ubcc0\uc218<\/th>\n<th class=\"last:pe-10\" data-start=\"1847\" data-end=\"1856\" data-col-size=\"md\">\uac00\uce58<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"1877\" data-end=\"2207\">\n<tr data-start=\"1877\" data-end=\"1938\">\n<td data-start=\"1877\" data-end=\"1893\" data-col-size=\"sm\">\uc7ac\ub8cc \uc720\ud615<\/td>\n<td data-start=\"1893\" data-end=\"1938\" data-col-size=\"md\">\ud751\uc5f0 + CVD SiC \ucf54\ud305 \/ \ud480 CVD SiC<\/td>\n<\/tr>\n<tr data-start=\"1939\" data-end=\"1993\">\n<td data-start=\"1939\" data-end=\"1952\" data-col-size=\"sm\">SiC \uc21c\ub3c4<\/td>\n<td data-start=\"1952\" data-end=\"1993\" data-col-size=\"md\">\u226599.9%(\ucf54\ud305), \u226599.99%(\ubaa8\ub180\ub9ac\uc2dd)<\/td>\n<\/tr>\n<tr data-start=\"1994\" data-end=\"2032\">\n<td data-start=\"1994\" data-end=\"2011\" data-col-size=\"sm\">\uc9c1\uacbd \ubc94\uc704<\/td>\n<td data-start=\"2011\" data-end=\"2032\" data-col-size=\"md\">\u03a6380mm - \u03a6600mm<\/td>\n<\/tr>\n<tr data-start=\"2033\" data-end=\"2072\">\n<td data-start=\"2033\" data-end=\"2057\" data-col-size=\"sm\">\uc791\ub3d9 \uc628\ub3c4<\/td>\n<td data-col-size=\"md\" data-start=\"2057\" data-end=\"2072\">1100-1200\u00b0C<\/td>\n<\/tr>\n<tr data-start=\"2073\" data-end=\"2104\">\n<td data-start=\"2073\" data-end=\"2096\" data-col-size=\"sm\">\uc5f4 \uc804\ub3c4\uc131<\/td>\n<td data-col-size=\"md\" data-start=\"2096\" data-end=\"2104\">\ub192\uc74c<\/td>\n<\/tr>\n<tr data-start=\"2105\" data-end=\"2163\">\n<td data-start=\"2105\" data-end=\"2128\" data-col-size=\"sm\">\ub0b4\uc2dd\uc131<\/td>\n<td data-col-size=\"md\" data-start=\"2128\" data-end=\"2163\">\uc6b0\uc218(HF, H\u2082SO\u2084 \ub0b4\uc131)<\/td>\n<\/tr>\n<tr data-start=\"2164\" data-end=\"2207\">\n<td data-start=\"2164\" data-end=\"2179\" data-col-size=\"sm\">\uc11c\ube44\uc2a4 \uc218\uba85<\/td>\n<td data-start=\"2179\" data-end=\"2207\" data-col-size=\"md\">~\ucd5c\ub300 4\u00d7 \ud751\uc5f0 \uae30\ubc18 \ud2b8\ub808\uc774<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"2209\" data-end=\"2212\" \/>\n<h1 data-section-id=\"18cvqw\" data-start=\"2214\" data-end=\"2237\"><span role=\"text\">\uc801\uc6a9 \ubd84\uc57c<\/span><\/h1>\n<h3 data-section-id=\"bm5nu5\" data-start=\"2239\" data-end=\"2274\"><span role=\"text\">\ubc18\ub3c4\uccb4 \uc81c\uc870<\/span><\/h3>\n<ul data-start=\"2275\" data-end=\"2438\">\n<li data-section-id=\"pooj76\" data-start=\"2275\" data-end=\"2326\">MOCVD(\uae08\uc18d \uc720\uae30 \ud654\ud559 \uae30\uc0c1 \uc99d\ucc29)<\/li>\n<li data-section-id=\"c8v0nb\" data-start=\"2327\" data-end=\"2370\">\uc5d0\ud53c\ud0dd\uc15c \uc6e8\uc774\ud37c \uc131\uc7a5(GaN, SiC \ub4f1)<\/li>\n<li data-section-id=\"15uw81h\" data-start=\"2371\" data-end=\"2396\">ICP \uc5d0\uce6d \uacf5\uc815<\/li>\n<li data-section-id=\"1xtyszn\" data-start=\"2397\" data-end=\"2438\">\uace0\uc815\ubc00 \uc6e8\uc774\ud37c \ucc98\ub9ac \uc2dc\uc2a4\ud15c<\/li>\n<\/ul>\n<h3 data-section-id=\"yf7wep\" data-start=\"2440\" data-end=\"2460\"><span role=\"text\">LED \uc0b0\uc5c5<\/span><\/h3>\n<ul data-start=\"2461\" data-end=\"2545\">\n<li data-section-id=\"b1ebdf\" data-start=\"2461\" data-end=\"2508\">\uace0\ud718\ub3c4 \ube14\ub8e8 &amp; \ud654\uc774\ud2b8 LED \uc5f0\ucd9c<\/li>\n<li data-section-id=\"9w14a9\" data-start=\"2509\" data-end=\"2545\">GaN \uae30\ubc18 \uad11\uc804\uc790 \uc18c\uc790<\/li>\n<\/ul>\n<h3 data-section-id=\"d5g3k9\" data-start=\"2547\" data-end=\"2575\"><span role=\"text\">\uace0\uae09 \uc804\uc790 \uc81c\ud488<\/span><\/h3>\n<ul data-start=\"2576\" data-end=\"2670\">\n<li data-section-id=\"14t88vj\" data-start=\"2576\" data-end=\"2600\">\uc804\ub825 \ubc18\ub3c4\uccb4<\/li>\n<li data-section-id=\"8rvytg\" data-start=\"2601\" data-end=\"2627\">\uace0\uc8fc\ud30c \uc7a5\uce58<\/li>\n<li data-section-id=\"4tdco8\" data-start=\"2628\" data-end=\"2670\">\uc815\ubc00 \ubc15\ub9c9 \uc99d\ucc29 \uc2dc\uc2a4\ud15c<\/li>\n<\/ul>\n<hr data-start=\"2672\" data-end=\"2675\" \/>\n<h1 data-section-id=\"1umg5ep\" data-start=\"2677\" data-end=\"2735\"><span role=\"text\">\uae30\uc874 \uadf8\ub798\ud30c\uc774\ud2b8 \ud2b8\ub808\uc774 \ub300\ube44 \uc131\ub2a5 \uc774\uc810<\/span><\/h1>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"2737\" data-end=\"3069\">\n<thead data-start=\"2737\" data-end=\"2783\">\n<tr data-start=\"2737\" data-end=\"2783\">\n<th class=\"last:pe-10\" data-start=\"2737\" data-end=\"2744\" data-col-size=\"sm\">\ud56d\ubaa9<\/th>\n<th class=\"last:pe-10\" data-start=\"2744\" data-end=\"2760\" data-col-size=\"sm\">\ud751\uc5f0 \ud2b8\ub808\uc774<\/th>\n<th class=\"last:pe-10\" data-start=\"2760\" data-end=\"2783\" data-col-size=\"sm\">CVD SiC \ucf54\ud305 \ud2b8\ub808\uc774<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"2831\" data-end=\"3069\">\n<tr data-start=\"2831\" data-end=\"2878\">\n<td data-start=\"2831\" data-end=\"2856\" data-col-size=\"sm\">\uc628\ub3c4 \uc800\ud56d<\/td>\n<td data-col-size=\"sm\" data-start=\"2856\" data-end=\"2865\">Medium<\/td>\n<td data-col-size=\"sm\" data-start=\"2865\" data-end=\"2878\">\ub9e4\uc6b0 \ub192\uc74c<\/td>\n<\/tr>\n<tr data-start=\"2879\" data-end=\"2922\">\n<td data-start=\"2879\" data-end=\"2902\" data-col-size=\"sm\">\ub0b4\uc2dd\uc131<\/td>\n<td data-col-size=\"sm\" data-start=\"2902\" data-end=\"2909\">Poor<\/td>\n<td data-col-size=\"sm\" data-start=\"2909\" data-end=\"2922\">\uc6b0\uc218<\/td>\n<\/tr>\n<tr data-start=\"2923\" data-end=\"2971\">\n<td data-start=\"2923\" data-end=\"2948\" data-col-size=\"sm\">\uc785\uc790 \uc624\uc5fc<\/td>\n<td data-col-size=\"sm\" data-start=\"2948\" data-end=\"2960\">\uace0\uc704\ud5d8<\/td>\n<td data-col-size=\"sm\" data-start=\"2960\" data-end=\"2971\">\ucd5c\uc18c<\/td>\n<\/tr>\n<tr data-start=\"2972\" data-end=\"3010\">\n<td data-start=\"2972\" data-end=\"2987\" data-col-size=\"sm\">\uc11c\ube44\uc2a4 \uc218\uba85<\/td>\n<td data-col-size=\"sm\" data-start=\"2987\" data-end=\"2995\">\uc9e7\uc740<\/td>\n<td data-col-size=\"sm\" data-start=\"2995\" data-end=\"3010\">3-4\ubc30 \ub354 \uae38\uc5b4\uc9d0<\/td>\n<\/tr>\n<tr data-start=\"3011\" data-end=\"3069\">\n<td data-start=\"3011\" data-end=\"3031\" data-col-size=\"sm\">\ud45c\uba74 \uc548\uc815\uc131<\/td>\n<td data-col-size=\"sm\" data-start=\"3031\" data-end=\"3052\">\uc2dc\uac04\uc774 \uc9c0\ub0a8\uc5d0 \ub530\ub77c \uc131\ub2a5 \uc800\ud558<\/td>\n<td data-col-size=\"sm\" data-start=\"3052\" data-end=\"3069\">\ub192\uc740 \uc548\uc815\uc131<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"3071\" data-end=\"3074\" \/>\n<h1 data-section-id=\"7pt5v4\" data-start=\"3076\" data-end=\"3102\"><span role=\"text\">\ud3ec\uc7a5 \ubc0f \ucde8\uae09<\/span><\/h1>\n<ul data-start=\"3103\" data-end=\"3313\">\n<li data-section-id=\"a3kyzw\" data-start=\"3103\" data-end=\"3142\">\ud074\ub9b0\ub8f8 \ub4f1\uae09 \ud3ec\uc7a5 \uc0ac\uc6a9 \uac00\ub2a5<\/li>\n<li data-section-id=\"3ss3f2\" data-start=\"3143\" data-end=\"3193\">\ucda9\uaca9\uc5d0 \uac15\ud55c \ub098\ubb34 \uc0c1\uc790 \ub610\ub294 \uc9c4\uacf5 \ubc00\ubd09<\/li>\n<li data-section-id=\"iuz9t\" data-start=\"3194\" data-end=\"3253\">\uc624\uc5fc \uc5c6\ub294 \ubc18\ub3c4\uccb4 \uc6b4\uc1a1\uc744 \uc704\ud55c \uc124\uacc4<\/li>\n<li data-section-id=\"11l6t4c\" data-start=\"3254\" data-end=\"3313\">\ub9de\ucda4\ud615 \ud06c\uae30 \uc9c0\uc6d0(\u03a6380-\u03a6600mm \ub610\ub294 \ub9de\ucda4\ud615 \ub514\uc790\uc778)<\/li>\n<\/ul>\n<hr data-start=\"3315\" data-end=\"3318\" \/>\n<h1 data-section-id=\"62o8y8\" data-start=\"3320\" data-end=\"3349\"><span role=\"text\">\uc774 \uc81c\ud488\uc744 \uc120\ud0dd\ud574\uc57c \ud558\ub294 \uc774\uc720<\/span><\/h1>\n<p data-start=\"3350\" data-end=\"3688\">\uc774 SiC \uc6e8\uc774\ud37c \uce90\ub9ac\uc5b4 \ud2b8\ub808\uc774\ub294 \uc21c\ub3c4, \uc5f4 \uc548\uc815\uc131 \ubc0f \uc624\uc5fc \uc81c\uc5b4\uac00 \uc911\uc694\ud55c \ucc28\uc138\ub300 \ubc18\ub3c4\uccb4 \uc81c\uc870\ub97c \uc704\ud574 \uc124\uacc4\ub418\uc5c8\uc2b5\ub2c8\ub2e4. \uae30\uc874\uc758 \ud751\uc5f0 \uae30\ubc18 \uce90\ub9ac\uc5b4\ub97c \ub300\uccb4\ud568\uc73c\ub85c\uc368 \uc0dd\uc0b0 \uc218\uc728\uc744 \ud06c\uac8c \uac1c\uc120\ud558\uace0 \uc720\uc9c0\ubcf4\uc218 \ube44\uc6a9\uc744 \uc808\uac10\ud558\uba70 \uc7a5\uae30\uc801\uc73c\ub85c \uc548\uc815\uc801\uc778 \uacf5\uc815 \uc131\ub2a5\uc744 \ubcf4\uc7a5\ud569\ub2c8\ub2e4.<\/p>\n<hr data-start=\"3690\" data-end=\"3693\" \/>\n<h1 data-section-id=\"1iusff4\" data-start=\"3695\" data-end=\"3704\"><span role=\"text\">\uc790\uc8fc \ubb3b\ub294 \uc9c8\ubb38<\/span><\/h1>\n<h3 data-section-id=\"1m9x0lv\" data-start=\"3706\" data-end=\"3791\"><span role=\"text\">Q1: \ud751\uc5f0 \ud2b8\ub808\uc774\uc640 \ube44\uad50\ud588\uc744 \ub54c CVD SiC \ucf54\ud305\uc758 \uc8fc\uc694 \uc7a5\uc810\uc740 \ubb34\uc5c7\uc778\uac00\uc694?<\/span><\/h3>\n<p data-start=\"3792\" data-end=\"3978\">CVD SiC \ucf54\ud305\uc740 \uac00\uc2a4 \uce68\ud22c\uc640 \ud751\uc5f0 \uc785\uc790 \ud758\ub9bc\uc744 \ubc29\uc9c0\ud558\ub294 \uace0\ubc00\ub3c4 \ucd08\uc21c\ub3c4 \ubcf4\ud638\uce35\uc744 \uc81c\uacf5\ud558\uc5ec \ub0b4\uad6c\uc131\uc744 \ud06c\uac8c \ud5a5\uc0c1\uc2dc\ud0a4\uace0 \uc6e8\uc774\ud37c \uc624\uc5fc\uc744 \uc904\uc785\ub2c8\ub2e4.<\/p>\n<hr data-start=\"3980\" data-end=\"3983\" \/>\n<h3 data-section-id=\"7rg8ob\" data-start=\"3985\" data-end=\"4059\"><span role=\"text\">Q2: \uc774 SiC \ud2b8\ub808\uc774\ub97c MOCVD \uace0\uc628 \uacf5\uc815\uc5d0 \uc0ac\uc6a9\ud560 \uc218 \uc788\ub098\uc694?<\/span><\/h3>\n<p data-start=\"4060\" data-end=\"4219\">\uc608. MOCVD \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc744 \uc704\ud574 \ud2b9\ubcc4\ud788 \uc124\uacc4\ub418\uc5c8\uc73c\uba70 \ub6f0\uc5b4\ub09c \uc5f4 \uc548\uc815\uc131\uacfc \uade0\uc77c\ud55c \uc5f4 \ubd84\ud3ec\ub85c 1100~1200\u00b0C\uc5d0\uc11c \uc548\uc815\uc801\uc73c\ub85c \uc791\ub3d9\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<hr data-start=\"4221\" data-end=\"4224\" \/>\n<h3 data-section-id=\"ox8w5l\" data-start=\"4226\" data-end=\"4314\"><span role=\"text\">Q3: \ucf54\ud305\ub41c \ud751\uc5f0 \ud2b8\ub808\uc774\uc640 \ud480 CVD SiC \ud2b8\ub808\uc774\uc758 \ucc28\uc774\uc810\uc740 \ubb34\uc5c7\uc778\uac00\uc694?<\/span><\/h3>\n<p data-start=\"4315\" data-end=\"4510\" data-is-last-node=\"\" data-is-only-node=\"\">\ucf54\ud305\ub41c \ud751\uc5f0 \ud2b8\ub808\uc774\ub294 \ubcf4\ud638 SiC \uce35\uc774 \uc788\ub294 \ud751\uc5f0 \ucf54\uc5b4\ub97c \uc0ac\uc6a9\ud558\ub294 \ubc18\uba74, \ud480 CVD SiC \ud2b8\ub808\uc774\ub294 \uc21c\ub3c4\uac00 \ub192\uace0 \ub0b4\uc2dd\uc131\uc774 \uc6b0\uc218\ud558\uba70 \uc0ac\uc6a9 \uc218\uba85\uc774 \uae34 \ubaa8\ub180\ub9ac\uc2dd \uad6c\uc870\uc785\ub2c8\ub2e4.<\/p>","protected":false},"excerpt":{"rendered":"<p>The SiC ceramic tray plate is a high-performance wafer carrier designed for advanced semiconductor processes such as MOCVD, epitaxy, and ICP etching. It is available in two structures: Graphite substrate with CVD SiC coating Monolithic high-purity CVD SiC tray (\u226599.99%) Compared with conventional graphite carriers, this product offers significantly improved thermal stability, corrosion resistance, and [&hellip;]<\/p>\n","protected":false},"featured_media":2114,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}}},"product_brand":[],"product_cat":[23],"product_tag":[224,220,209,217,216,218,213,214,221,211,222,226,215,210,212,223,177,219,227,225],"class_list":["post-2110","product","type-product","status-publish","has-post-thumbnail","product_cat-silicon-carbide-sic","product_tag-chemical-vapor-deposition-sic","product_tag-corrosion-resistant-wafer-tray","product_tag-cvd-sic-coated-graphite-tray","product_tag-epitaxy-wafer-carrier","product_tag-etching-tray-icp","product_tag-gan-led-production-tray","product_tag-graphite-sic-coating","product_tag-high-purity-sic-wafer-carrier","product_tag-high-temperature-semiconductor-carrier","product_tag-mocvd-susceptor","product_tag-precision-ceramic-substrate","product_tag-semiconductor-mocvd-parts","product_tag-semiconductor-processing-equipment","product_tag-semiconductor-wafer-tray","product_tag-sic-ceramic-tray-plate","product_tag-sic-coated-susceptor-plate","product_tag-sic-wafer-carrier","product_tag-thermal-cvd-sic","product_tag-ultra-high-purity-sic-materials","product_tag-wafer-handling-equipment","desktop-align-left","tablet-align-left","mobile-align-left","first","instock","shipping-taxable","product-type-simple"],"_links":{"self":[{"href":"https:\/\/www.xkh-ceramics.com\/ko\/wp-json\/wp\/v2\/product\/2110","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.xkh-ceramics.com\/ko\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/www.xkh-ceramics.com\/ko\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ko\/wp-json\/wp\/v2\/comments?post=2110"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ko\/wp-json\/wp\/v2\/media\/2114"}],"wp:attachment":[{"href":"https:\/\/www.xkh-ceramics.com\/ko\/wp-json\/wp\/v2\/media?parent=2110"}],"wp:term":[{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ko\/wp-json\/wp\/v2\/product_brand?post=2110"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ko\/wp-json\/wp\/v2\/product_cat?post=2110"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ko\/wp-json\/wp\/v2\/product_tag?post=2110"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}