{"id":2100,"date":"2026-05-12T03:59:56","date_gmt":"2026-05-12T03:59:56","guid":{"rendered":"https:\/\/www.xkh-ceramics.com\/?post_type=product&#038;p=2100"},"modified":"2026-05-12T03:59:56","modified_gmt":"2026-05-12T03:59:56","slug":"customized-sic-ceramic-end-effector-for-wafer-handling","status":"publish","type":"product","link":"https:\/\/www.xkh-ceramics.com\/ko\/product\/customized-sic-ceramic-end-effector-for-wafer-handling\/","title":{"rendered":"\uc6e8\uc774\ud37c \ucc98\ub9ac\ub97c \uc704\ud55c \ub9de\ucda4\ud615 SiC \uc138\ub77c\ubbf9 \uc5d4\ub4dc \uc774\ud399\ud130"},"content":{"rendered":"<p data-start=\"737\" data-end=\"989\"><img fetchpriority=\"high\" decoding=\"async\" class=\"size-medium wp-image-2101 alignright\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-3-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-3-300x300.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-3-150x150.png 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-3-768x768.png 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-3-12x12.png 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-3-600x600.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-3-100x100.png 100w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-3.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>\uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc(SiC) \uc138\ub77c\ubbf9 \uc5d4\ub4dc \uc774\ud399\ud130\ub294 \uc6e8\uc774\ud37c \uc774\uc1a1 \ub85c\ubd07, AMHS \uc2dc\uc2a4\ud15c, EUV \ub9ac\uc18c\uadf8\ub798\ud53c \uc7a5\ube44, \uace0\uc628 \uacf5\uc815 \ud234 \ub4f1 \ubc18\ub3c4\uccb4 \uc790\ub3d9\ud654 \uc2dc\uc2a4\ud15c\uc744 \uc704\ud574 \uc124\uacc4\ub41c \uace0\uc815\ubc00 \uc6e8\uc774\ud37c \ucc98\ub9ac \ubd80\ud488\uc785\ub2c8\ub2e4.<\/p>\n<p data-start=\"991\" data-end=\"1308\">\uace0\uc21c\ub3c4 CVD SiC \ub610\ub294 \uc5d4\uc9c0\ub2c8\uc5b4\ub9c1\ub41c SSiC\ub85c \uc81c\uc791\ub41c \uc774 \uc5d4\ub4dc \uc774\ud399\ud130\ub294 \ub6f0\uc5b4\ub09c \uac15\uc131, \ucd08\uc800\uc785\uc790 \uc0dd\uc131, \ub6f0\uc5b4\ub09c \uc5f4 \ubc0f \ud654\ud559\uc801 \uc548\uc815\uc131\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4. \uc624\uc5fc \uc81c\uc5b4\uc640 \uc704\uce58 \uc815\ud655\ub3c4\uac00 \uc911\uc694\ud55c 300mm \ubc0f \ucca8\ub2e8 \ub178\ub4dc \ubc18\ub3c4\uccb4 \ud339\uc5d0\uc11c \ub110\ub9ac \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/p>\n<p data-start=\"1310\" data-end=\"1470\">\uae30\uc874\uc758 \uc54c\ub8e8\ubbf8\ub284 \ub610\ub294 \uc11d\uc601 \uc5d4\ub4dc \uc774\ud399\ud130\uc640 \ube44\uad50\ud558\uc5ec SiC \uc138\ub77c\ubbf9 \uc194\ub8e8\uc158\uc740 \uacf5\uc815 \uc548\uc815\uc131, \uc6e8\uc774\ud37c \uc548\uc804\uc131 \ubc0f \uc7a5\ube44 \uc218\uba85\uc744 \ud06c\uac8c \ud5a5\uc0c1\uc2dc\ud0b5\ub2c8\ub2e4.<\/p>\n<hr data-start=\"1472\" data-end=\"1475\" \/>\n<h2 data-section-id=\"ruuu6i\" data-start=\"1477\" data-end=\"1494\">\uc8fc\uc694 \uc774\uc810<\/h2>\n<h3 data-section-id=\"1igp1it\" data-start=\"1496\" data-end=\"1532\">\ucd08\uc800\uc785\uc790 \uc624\uc5fc<\/h3>\n<ul data-start=\"1533\" data-end=\"1664\">\n<li data-section-id=\"1lx1qmw\" data-start=\"1533\" data-end=\"1587\">\uc785\uc790 \uc0dd\uc131: &lt;0.1\/cm\u00b2(SEMI F57 \uc900\uc218)<\/li>\n<li data-section-id=\"8gkyog\" data-start=\"1588\" data-end=\"1618\">\uae08\uc18d \uc774\uc628 \uc624\uc5fc \uc5c6\uc74c<\/li>\n<li data-section-id=\"m28nyw\" data-start=\"1619\" data-end=\"1664\">EUV \ubc0f \uace0\uae09 \ub178\ub4dc \uacf5\uc815\uc5d0 \uc774\uc0c1\uc801<\/li>\n<\/ul>\n<hr data-start=\"1666\" data-end=\"1669\" \/>\n<h3 data-section-id=\"nha58o\" data-start=\"1671\" data-end=\"1710\">\ub192\uc740 \uac15\uc131 \ubc0f \uc815\ubc00 \uc548\uc815\uc131<\/h3>\n<ul data-start=\"1711\" data-end=\"1837\">\n<li data-section-id=\"n58wtx\" data-start=\"1711\" data-end=\"1740\">\uc601\ud0c4\uc131\uacc4\uc218: ~420 GPa<\/li>\n<li data-section-id=\"wiw01d\" data-start=\"1741\" data-end=\"1790\">\uc9c4\ub3d9\uc73c\ub85c \uc778\ud55c \uc6e8\uc774\ud37c \uc815\ub82c \ubd88\ub7c9 \ubc29\uc9c0<\/li>\n<li data-section-id=\"kx1hzh\" data-start=\"1791\" data-end=\"1837\">\uc548\uc815\uc801\uc778 \uace0\uc18d \ub85c\ubd07 \uc774\uc1a1 \ubcf4\uc7a5<\/li>\n<\/ul>\n<hr data-start=\"1839\" data-end=\"1842\" \/>\n<h3 data-section-id=\"2ge170\" data-start=\"1844\" data-end=\"1875\">\ub6f0\uc5b4\ub09c \uc5f4 \uc548\uc815\uc131<\/h3>\n<ul data-start=\"1876\" data-end=\"2015\">\n<li data-section-id=\"ibg0yp\" data-start=\"1876\" data-end=\"1927\">\uc791\ub3d9 \uc628\ub3c4: \ucd5c\ub300 1600\u00b0C(\uc0b0\ud654)<\/li>\n<li data-section-id=\"1e7mmjn\" data-start=\"1928\" data-end=\"1963\">\ucd5c\ub300 1950\u00b0C(\ubd88\ud65c\uc131 \ub300\uae30)<\/li>\n<li data-section-id=\"j5ees9\" data-start=\"1964\" data-end=\"2015\">\uadf9\ud55c\uc758 \ubc18\ub3c4\uccb4 \ud658\uacbd\uc5d0 \uc801\ud569<\/li>\n<\/ul>\n<hr data-start=\"2017\" data-end=\"2020\" \/>\n<h3 data-section-id=\"1twxua8\" data-start=\"2022\" data-end=\"2063\">\ub6f0\uc5b4\ub09c \ub0b4\ud654\ud559\uc131 \ubc0f \ud50c\ub77c\uc988\ub9c8 \ub0b4\uc131<\/h3>\n<ul data-start=\"2064\" data-end=\"2212\">\n<li data-section-id=\"x6lsw\" data-start=\"2064\" data-end=\"2120\">\uc0b0, \uc54c\uce7c\ub9ac \ubc0f \ud50c\ub77c\uc988\ub9c8 \ud658\uacbd\uc5d0 \ub300\ud55c \ub0b4\uc131 \uac15\ud654<\/li>\n<li data-section-id=\"1c1d6qm\" data-start=\"2121\" data-end=\"2169\">CVD\/PVD\/\uc5d0\uce6d \ucc54\ubc84\uc5d0 \ubd80\uc2dd \uc5c6\uc74c<\/li>\n<li data-section-id=\"1o7zcce\" data-start=\"2170\" data-end=\"2212\">SiH\u2084, NH\u2083, HCl \uacf5\uc815 \uac00\uc2a4\uc5d0\uc11c \uc548\uc815\uc801\uc785\ub2c8\ub2e4.<\/li>\n<\/ul>\n<hr data-start=\"2214\" data-end=\"2217\" \/>\n<h3 data-section-id=\"14bamzt\" data-start=\"2219\" data-end=\"2252\">\ub9c8\ubaa8 \ubc29\uc9c0 \ubc0f \uae34 \uc11c\ube44\uc2a4 \uc218\uba85<\/h3>\n<ul data-start=\"2253\" data-end=\"2380\">\n<li data-section-id=\"10g9b8f\" data-start=\"2253\" data-end=\"2283\">\ube44\ucee4\uc2a4 \uacbd\ub3c4: ~2800 HV<\/li>\n<li data-section-id=\"14dvdy4\" data-start=\"2284\" data-end=\"2335\">\uc7a5\uae30\uac04 \uc791\ub3d9 \uc2dc \uc785\uc790 \ud758\ub9bc \uc5c6\uc74c<\/li>\n<li data-section-id=\"12rqc97\" data-start=\"2336\" data-end=\"2380\">\ub6f0\uc5b4\ub09c \ud45c\uba74 \ub0b4\uad6c\uc131(Ra &lt;0.2\u03bcm)<\/li>\n<\/ul>\n<hr data-start=\"2382\" data-end=\"2385\" \/>\n<h2 data-section-id=\"1xqplm3\" data-start=\"2387\" data-end=\"2418\">\uad6c\uc870 \ubc0f \ub514\uc790\uc778 \ud2b9\uc9d5<\/h2>\n<h3 data-section-id=\"1nh5g76\" data-start=\"2420\" data-end=\"2457\">\uc815\ubc00 \uc6e8\uc774\ud37c \ucde8\uae09 \uae30\ud558\ud559\uc801 \uad6c\uc870<\/h3>\n<p data-start=\"2458\" data-end=\"2467\">\uc9c0\uc6d0:<\/p>\n<ul data-start=\"2468\" data-end=\"2596\">\n<li data-section-id=\"15tpg53\" data-start=\"2468\" data-end=\"2508\">150mm \/ 200mm \/ 300mm \/ 450mm \uc6e8\uc774\ud37c<\/li>\n<li data-section-id=\"1rnwp5m\" data-start=\"2509\" data-end=\"2563\">\uc5e3\uc9c0 \uadf8\ub9bd\/\ub178\uce58 \uc815\ub82c\/\ud3c9\ud3c9\ud55c \uc9c0\uc9c0\ub300 \ub514\uc790\uc778<\/li>\n<li data-section-id=\"qm27un\" data-start=\"2564\" data-end=\"2596\">\ub9de\ucda4\ud615 \ub85c\ubd07 \ud314 \ud1b5\ud569<\/li>\n<\/ul>\n<hr data-start=\"2598\" data-end=\"2601\" \/>\n<h3 data-section-id=\"1yw23gm\" data-start=\"2603\" data-end=\"2643\">\uace0\uac15\uc131 \uacbd\ub7c9 \uad6c\uc870<\/h3>\n<ul data-start=\"2644\" data-end=\"2768\">\n<li data-section-id=\"tt3pyh\" data-start=\"2644\" data-end=\"2677\">\ub192\uc740 \ubb34\uac8c \ub300\ube44 \uac15\uc131 \ube44\uc728<\/li>\n<li data-section-id=\"1sb17em\" data-start=\"2678\" data-end=\"2721\">\uace0\uc18d \ub85c\ubd07 \uc2dc\uc2a4\ud15c\uc5d0 \uc801\ud569<\/li>\n<li data-section-id=\"1j6yie2\" data-start=\"2722\" data-end=\"2768\">\ubaa8\uc158 \uc911 \ub3d9\uc801 \ucc98\uc9d0 \ucd5c\uc18c\ud654<\/li>\n<\/ul>\n<hr data-start=\"2770\" data-end=\"2773\" \/>\n<h3 data-section-id=\"97w9la\" data-start=\"2775\" data-end=\"2809\">\ub9e4\uc6b0 \uae68\ub057\ud55c \ud45c\uba74 \ucc98\ub9ac<\/h3>\n<ul data-start=\"2810\" data-end=\"2905\">\n<li data-section-id=\"1lu1i7j\" data-start=\"2810\" data-end=\"2844\">\uc815\ubc00 \uc5f0\ub9c8 \ubc0f \uc5f0\ub9c8<\/li>\n<li data-section-id=\"1amctgl\" data-start=\"2845\" data-end=\"2870\">\ub0ae\uc740 \ud45c\uba74 \uac70\uce60\uae30<\/li>\n<li data-section-id=\"1js4nxo\" data-start=\"2871\" data-end=\"2905\">\ud074\ub9b0\ub8f8 \ud638\ud658 \uad6c\uc870<\/li>\n<\/ul>\n<hr data-start=\"2907\" data-end=\"2910\" \/>\n<h3 data-section-id=\"50i47d\" data-start=\"2912\" data-end=\"2944\">\ub9de\ucda4\ud615 \uc5d4\uc9c0\ub2c8\uc5b4\ub9c1 \uc778\ud130\ud398\uc774\uc2a4<\/h3>\n<ul data-start=\"2945\" data-end=\"3063\">\n<li data-section-id=\"1dle0c1\" data-start=\"2945\" data-end=\"2981\">\ub85c\ubd07 \uc554 \ub9c8\uc6b4\ud305 \ud638\ud658\uc131<\/li>\n<li data-section-id=\"19fhsyz\" data-start=\"2982\" data-end=\"3018\">AMHS \uc2dc\uc2a4\ud15c\uc744 \uc704\ud55c OEM \ud1b5\ud569<\/li>\n<li data-section-id=\"3wahd3\" data-start=\"3019\" data-end=\"3063\">\ub9de\ucda4\ud615 \ud640 \uc704\uce58 \ubc0f \uace0\uc815 \uc7a5\uce58 \ub514\uc790\uc778<\/li>\n<\/ul>\n<hr data-start=\"3065\" data-end=\"3068\" \/>\n<h2 data-section-id=\"rb24ym\" data-start=\"3070\" data-end=\"3089\">\uba38\ud2f0\ub9ac\uc5bc \uc635\uc158<\/h2>\n<h3 data-section-id=\"87v3o9\" data-start=\"3091\" data-end=\"3124\">CVD \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc(CVD SiC)<\/h3>\n<ul data-start=\"3125\" data-end=\"3232\">\n<li data-section-id=\"1qjlbs6\" data-start=\"3125\" data-end=\"3146\">\ucd08\uace0\uc21c\ub3c4<\/li>\n<li data-section-id=\"1856ohe\" data-start=\"3147\" data-end=\"3198\">EUV\/\ucca8\ub2e8 \ubc18\ub3c4\uccb4 \uacf5\uc815\uc5d0 \uc801\ud569<\/li>\n<li data-section-id=\"1lwpzbt\" data-start=\"3199\" data-end=\"3232\">\ub9e4\uc6b0 \ub0ae\uc740 \uc624\uc5fc \uc218\uc900<\/li>\n<\/ul>\n<hr data-start=\"3234\" data-end=\"3237\" \/>\n<h3 data-section-id=\"gwj4n0\" data-start=\"3239\" data-end=\"3274\">\uc18c\uacb0 \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc(SSiC)<\/h3>\n<ul data-start=\"3275\" data-end=\"3402\">\n<li data-section-id=\"1hi8oju\" data-start=\"3275\" data-end=\"3312\">\ub192\uc740 \uac15\ub3c4\uc640 \ub0b4\ub9c8\ubaa8\uc131<\/li>\n<li data-section-id=\"1rnk9x7\" data-start=\"3313\" data-end=\"3363\">\uc0b0\uc5c5\uc6a9 \uc6e8\uc774\ud37c \ucc98\ub9ac \uc2dc\uc2a4\ud15c\uc5d0 \uc801\ud569<\/li>\n<li data-section-id=\"67fp04\" data-start=\"3364\" data-end=\"3402\">\ub6f0\uc5b4\ub09c \uac00\uc131\ube44 \uade0\ud615<\/li>\n<\/ul>\n<hr data-start=\"3404\" data-end=\"3407\" \/>\n<h2 data-section-id=\"1cgu054\" data-start=\"3409\" data-end=\"3436\">\uae30\uc220 \uc0ac\uc591<\/h2>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"3438\" data-end=\"3888\">\n<thead data-start=\"3438\" data-end=\"3462\">\n<tr data-start=\"3438\" data-end=\"3462\">\n<th class=\"last:pe-10\" data-start=\"3438\" data-end=\"3445\" data-col-size=\"sm\">\ud56d\ubaa9<\/th>\n<th class=\"last:pe-10\" data-start=\"3445\" data-end=\"3462\" data-col-size=\"sm\">\uc0ac\uc591<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"3487\" data-end=\"3888\">\n<tr data-start=\"3487\" data-end=\"3516\">\n<td data-start=\"3487\" data-end=\"3498\" data-col-size=\"sm\">\uc7ac\ub8cc<\/td>\n<td data-col-size=\"sm\" data-start=\"3498\" data-end=\"3516\">CVD SiC\/SiC<\/td>\n<\/tr>\n<tr data-start=\"3517\" data-end=\"3536\">\n<td data-start=\"3517\" data-end=\"3526\" data-col-size=\"sm\">\uc21c\ub3c4<\/td>\n<td data-start=\"3526\" data-end=\"3536\" data-col-size=\"sm\">&gt;99.5%<\/td>\n<\/tr>\n<tr data-start=\"3537\" data-end=\"3561\">\n<td data-start=\"3537\" data-end=\"3550\" data-col-size=\"sm\">\uc785\uc790 \ud06c\uae30<\/td>\n<td data-col-size=\"sm\" data-start=\"3550\" data-end=\"3561\">4-10 \u03bcm<\/td>\n<\/tr>\n<tr data-start=\"3562\" data-end=\"3587\">\n<td data-start=\"3562\" data-end=\"3572\" data-col-size=\"sm\">\ubc00\ub3c4<\/td>\n<td data-col-size=\"sm\" data-start=\"3572\" data-end=\"3587\">&gt;3.14g\/cm\u00b3<\/td>\n<\/tr>\n<tr data-start=\"3588\" data-end=\"3611\">\n<td data-start=\"3588\" data-end=\"3599\" data-col-size=\"sm\">\uacbd\ub3c4<\/td>\n<td data-col-size=\"sm\" data-start=\"3599\" data-end=\"3611\">~2800 HV<\/td>\n<\/tr>\n<tr data-start=\"3612\" data-end=\"3643\">\n<td data-start=\"3612\" data-end=\"3632\" data-col-size=\"sm\">\uad74\uace1 \uac15\ub3c4<\/td>\n<td data-col-size=\"sm\" data-start=\"3632\" data-end=\"3643\">450 MPa<\/td>\n<\/tr>\n<tr data-start=\"3644\" data-end=\"3673\">\n<td data-start=\"3644\" data-end=\"3662\" data-col-size=\"sm\">\ud0c4\uc131 \uacc4\uc218<\/td>\n<td data-col-size=\"sm\" data-start=\"3662\" data-end=\"3673\">420 GPa<\/td>\n<\/tr>\n<tr data-start=\"3674\" data-end=\"3710\">\n<td data-start=\"3674\" data-end=\"3697\" data-col-size=\"sm\">\uc5f4 \uc804\ub3c4\uc131<\/td>\n<td data-col-size=\"sm\" data-start=\"3697\" data-end=\"3710\">160 W\/m-K<\/td>\n<\/tr>\n<tr data-start=\"3711\" data-end=\"3768\">\n<td data-start=\"3711\" data-end=\"3729\" data-col-size=\"sm\">\ucd5c\ub300 \uc628\ub3c4<\/td>\n<td data-col-size=\"sm\" data-start=\"3729\" data-end=\"3768\">1600\u00b0C(\uc0b0\ud654)\/1950\u00b0C(\ube44\ud65c\uc131)<\/td>\n<\/tr>\n<tr data-start=\"3769\" data-end=\"3810\">\n<td data-start=\"3769\" data-end=\"3794\" data-col-size=\"sm\">\uc804\uae30 \uc800\ud56d<\/td>\n<td data-col-size=\"sm\" data-start=\"3794\" data-end=\"3810\">10\u2076-10\u2078 \u03a9-cm<\/td>\n<\/tr>\n<tr data-start=\"3811\" data-end=\"3851\">\n<td data-start=\"3811\" data-end=\"3828\" data-col-size=\"sm\">\ud45c\uba74 \ub9c8\uac10<\/td>\n<td data-col-size=\"sm\" data-start=\"3828\" data-end=\"3851\">\ucd08\ubbf8\uc138 \uad11\ud0dd<\/td>\n<\/tr>\n<tr data-start=\"3852\" data-end=\"3888\">\n<td data-start=\"3852\" data-end=\"3859\" data-col-size=\"sm\">\ud06c\uae30<\/td>\n<td data-start=\"3859\" data-end=\"3888\" data-col-size=\"sm\">\ub9de\ucda4\ud615(150-450mm \uc6e8\uc774\ud37c)<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"3890\" data-end=\"3893\" \/>\n<h2 data-section-id=\"mu966k\" data-start=\"3895\" data-end=\"3910\">\uc560\ud50c\ub9ac\ucf00\uc774\uc158<\/h2>\n<h3 data-section-id=\"6yu2ul\" data-start=\"3912\" data-end=\"3943\">\ubc18\ub3c4\uccb4 \uc81c\uc870<\/h3>\n<ul data-start=\"3944\" data-end=\"4097\">\n<li data-section-id=\"49bdmt\" data-start=\"3944\" data-end=\"3978\">EUV \ub9ac\uc18c\uadf8\ub798\ud53c \uc6e8\uc774\ud37c \ucc98\ub9ac<\/li>\n<li data-section-id=\"11xdzhh\" data-start=\"3979\" data-end=\"4017\">300mm \uc6e8\uc774\ud37c \ub85c\ubd07 \uc774\uc1a1 \uc2dc\uc2a4\ud15c<\/li>\n<li data-section-id=\"ox84z0\" data-start=\"4018\" data-end=\"4060\">CVD\/PVD\/\uc2dd\uac01 \ucc54\ubc84 \uc790\ub3d9\ud654<\/li>\n<li data-section-id=\"teg2xm\" data-start=\"4061\" data-end=\"4097\">\uc774\uc628 \uc8fc\uc785 \uc6e8\uc774\ud37c \uc6b4\uc1a1<\/li>\n<\/ul>\n<hr data-start=\"4099\" data-end=\"4102\" \/>\n<h3 data-section-id=\"sf9357\" data-start=\"4104\" data-end=\"4140\">\ucca8\ub2e8 \ubc18\ub3c4\uccb4 \uc7ac\ub8cc<\/h3>\n<ul data-start=\"4141\" data-end=\"4248\">\n<li data-section-id=\"iiuum6\" data-start=\"4141\" data-end=\"4176\">SiC \uc804\ub825 \ub514\ubc14\uc774\uc2a4 \uc6e8\uc774\ud37c \ucde8\uae09<\/li>\n<li data-section-id=\"se94ot\" data-start=\"4177\" data-end=\"4211\">GaN \uc5d0\ud53c\ud0dd\uc2dc \uc0dd\uc0b0 \uc2dc\uc2a4\ud15c<\/li>\n<li data-section-id=\"3yciq1\" data-start=\"4212\" data-end=\"4248\">\uace0\uc628 MOCVD \uacf5\uc815<\/li>\n<\/ul>\n<hr data-start=\"4250\" data-end=\"4253\" \/>\n<h3 data-section-id=\"11khwnl\" data-start=\"4255\" data-end=\"4286\">\ud0dc\uc591\uad11 \ubc0f LED \uc0b0\uc5c5<\/h3>\n<ul data-start=\"4287\" data-end=\"4389\">\n<li data-section-id=\"q29bxq\" data-start=\"4287\" data-end=\"4319\">\ud0dc\uc591\uad11 \uc6e8\uc774\ud37c \uc790\ub3d9\ud654 \ub77c\uc778<\/li>\n<li data-section-id=\"10mww1v\" data-start=\"4320\" data-end=\"4361\">\ub9c8\uc774\ud06c\ub85c LED \/ \ubbf8\ub2c8 LED \uc804\uc1a1 \uc2dc\uc2a4\ud15c<\/li>\n<li data-section-id=\"dp5vhg\" data-start=\"4362\" data-end=\"4389\">\uc0ac\ud30c\uc774\uc5b4 \uc6e8\uc774\ud37c \ucc98\ub9ac<\/li>\n<\/ul>\n<hr data-start=\"4391\" data-end=\"4394\" \/>\n<h3 data-section-id=\"j366yc\" data-start=\"4396\" data-end=\"4428\">\uc790\ub3d9\ud654 \ubc0f \ub85c\ubcf4\ud2f1\uc2a4(AMHS)<\/h3>\n<ul data-start=\"4429\" data-end=\"4533\">\n<li data-section-id=\"fpj2it\" data-start=\"4429\" data-end=\"4459\">\uc6e8\uc774\ud37c \uc774\uc1a1 \ub85c\ubd07 \ud314<\/li>\n<li data-section-id=\"e4e8u3\" data-start=\"4460\" data-end=\"4492\">\ud074\ub9b0\ub8f8 \uc790\ub3d9\ud654 \uc2dc\uc2a4\ud15c<\/li>\n<li data-section-id=\"k0rhy6\" data-start=\"4493\" data-end=\"4533\">\uace0\uc18d \uc790\uc7ac \ucde8\uae09 \uc2dc\uc2a4\ud15c<\/li>\n<\/ul>\n<hr data-start=\"4535\" data-end=\"4538\" \/>\n<h3 data-section-id=\"1c5bbdr\" data-start=\"4540\" data-end=\"4573\">\uc5f0\uad6c \ubc0f \ud558\uc774\uc5d4\ub4dc \uc7a5\ube44<\/h3>\n<ul data-start=\"4574\" data-end=\"4679\">\n<li data-section-id=\"1sbej07\" data-start=\"4574\" data-end=\"4604\">\uc591\uc790 \ub514\ubc14\uc774\uc2a4 \uc81c\uc791<\/li>\n<li data-section-id=\"5u37w7\" data-start=\"4605\" data-end=\"4641\">\uadf9\uc800\uc628 \uc6e8\uc774\ud37c \ucc98\ub9ac \uc2dc\uc2a4\ud15c<\/li>\n<li data-section-id=\"i12e24\" data-start=\"4642\" data-end=\"4679\">\uace0\uae09 \ud328\ud0a4\uc9d5(3D IC\/MEMS)<\/li>\n<\/ul>\n<hr data-start=\"4681\" data-end=\"4684\" \/>\n<h2 data-section-id=\"vm5qii\" data-start=\"4686\" data-end=\"4715\">\uc81c\ud488 \uc7a5\uc810 \uc694\uc57d<\/h2>\n<ul data-start=\"4717\" data-end=\"4996\">\n<li data-section-id=\"r4wmoo\" data-start=\"4717\" data-end=\"4750\">\uae08\uc18d \uc624\uc5fc \uc704\ud5d8 \uc81c\ub85c<\/li>\n<li data-section-id=\"w80eyq\" data-start=\"4751\" data-end=\"4797\">\uc815\ubc00\ud55c \ud578\ub4e4\ub9c1\uc744 \uc704\ud55c \ub9e4\uc6b0 \ub192\uc740 \uac15\uc131<\/li>\n<li data-section-id=\"ovhb2l\" data-start=\"4798\" data-end=\"4842\">\ub6f0\uc5b4\ub09c \uc5f4 \ubc0f \ud654\ud559\uc801 \uc548\uc815\uc131<\/li>\n<li data-section-id=\"1pry50x\" data-start=\"4843\" data-end=\"4878\">\ucd5c\uc18c\ud55c\uc758 \ub9c8\ubaa8\ub85c \uae34 \uc218\uba85<\/li>\n<li data-section-id=\"16clm2x\" data-start=\"4879\" data-end=\"4919\">\ud074\ub9b0\ub8f8 \uc790\ub3d9\ud654\uc640 \ud638\ud658<\/li>\n<li data-section-id=\"1usfebt\" data-start=\"4920\" data-end=\"4956\">\ubaa8\ub4e0 \uc6e8\uc774\ud37c \ud06c\uae30\uc5d0 \ub9de\uac8c \ub9de\ucda4\ud654 \uac00\ub2a5<\/li>\n<li data-section-id=\"whnxc2\" data-start=\"4957\" data-end=\"4996\">EUV \ubc0f \uace0\uae09 \ub178\ub4dc\uc5d0 \uc801\ud569<\/li>\n<\/ul>\n<hr data-start=\"4998\" data-end=\"5001\" \/>\n<h2 data-section-id=\"rnyyeg\" data-start=\"5003\" data-end=\"5027\">\uc0ac\uc6a9\uc790 \uc9c0\uc815 \uc635\uc158<img decoding=\"async\" class=\"size-medium wp-image-2102 alignright\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2-300x300.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2-150x150.png 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2-768x768.png 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2-12x12.png 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2-600x600.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2-100x100.png 100w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/h2>\n<p data-start=\"5029\" data-end=\"5067\">\uc644\ubcbd\ud55c OEM\/ODM \ucee4\uc2a4\ud130\ub9c8\uc774\uc9d5\uc744 \uc9c0\uc6d0\ud569\ub2c8\ub2e4:<\/p>\n<ul data-start=\"5069\" data-end=\"5319\">\n<li data-section-id=\"pzy3qt\" data-start=\"5069\" data-end=\"5127\">\uc5d4\ub4dc \uc774\ud399\ud130 \uc9c0\uc624\uba54\ud2b8\ub9ac(\ud50c\ub7ab\/\uc5d0\uc9c0 \uadf8\ub9bd\/\ub178\uce58 \uc815\ub82c)<\/li>\n<li data-section-id=\"173oufn\" data-start=\"5128\" data-end=\"5168\">\uc6e8\uc774\ud37c \ud06c\uae30 \ud638\ud658\uc131(150-450mm)<\/li>\n<li data-section-id=\"1sh3bgb\" data-start=\"5169\" data-end=\"5195\">\ub85c\ubd07 \uc778\ud130\ud398\uc774\uc2a4 \ub514\uc790\uc778<\/li>\n<li data-section-id=\"1ma3ck\" data-start=\"5196\" data-end=\"5252\">\ud45c\uba74 \ucf54\ud305(\uc815\uc804\uae30 \ubc29\uc9c0\/\uc18c\uc218\uc131 \uc635\uc158)<\/li>\n<li data-section-id=\"7mw706\" data-start=\"5253\" data-end=\"5289\">\uc815\ubc00\ub3c4 \uc624\ucc28 \ucd5c\uc801\ud654<\/li>\n<li data-section-id=\"w4j63d\" data-start=\"5290\" data-end=\"5319\">\ud074\ub9b0\ub8f8 \ub4f1\uae09 \ub9c8\uac10<\/li>\n<\/ul>\n<hr data-start=\"5321\" data-end=\"5324\" \/>\n<h2 data-section-id=\"1hryhf7\" data-start=\"5326\" data-end=\"5332\">\uc790\uc8fc \ubb3b\ub294 \uc9c8\ubb38<\/h2>\n<h3 data-section-id=\"1mpzh4o\" data-start=\"5334\" data-end=\"5384\">Q1: \uc54c\ub8e8\ubbf8\ub284\uc774\ub098 \uc11d\uc601 \ub300\uc2e0 SiC\ub97c \uc0ac\uc6a9\ud558\ub294 \uc774\uc720\ub294 \ubb34\uc5c7\uc778\uac00\uc694?<\/h3>\n<ul data-start=\"5385\" data-end=\"5556\">\n<li data-section-id=\"1xvhlf0\" data-start=\"5385\" data-end=\"5437\">\uc54c\ub8e8\ubbf8\ub284: \uc785\uc790 \uc0dd\uc131 + \uc0b0\ud654 \ubb38\uc81c<\/li>\n<li data-section-id=\"1q7gghy\" data-start=\"5438\" data-end=\"5489\">\uc11d\uc601: \uae68\uc9c0\uae30 \uc26c\uc6c0 + \uc5f4\ucda9\uaca9 \uc800\ud56d\uc131 \uc800\ud558<\/li>\n<li data-section-id=\"vgt2b3\" data-start=\"5490\" data-end=\"5556\">SiC: \uac15\uc131, \uccad\uacb0\uc131, \ub0b4\uad6c\uc131\uc758 \ucd5c\uc0c1\uc758 \uc870\ud569<\/li>\n<\/ul>\n<hr data-start=\"5558\" data-end=\"5561\" \/>\n<h3 data-section-id=\"1cxfupn\" data-start=\"5563\" data-end=\"5599\">Q2: 450mm \uc6e8\uc774\ud37c\ub97c \uc9c0\uc6d0\ud560 \uc218 \uc788\ub098\uc694?<\/h3>\n<p data-start=\"5600\" data-end=\"5667\">\uc608, 450mm \uc6e8\uc774\ud37c \ucc98\ub9ac \uc2dc\uc2a4\ud15c\uc5d0\ub294 \ub9de\ucda4\ud615 \uc124\uacc4\uac00 \uac00\ub2a5\ud569\ub2c8\ub2e4.<\/p>\n<hr data-start=\"5669\" data-end=\"5672\" \/>\n<h3 data-section-id=\"a4nxop\" data-start=\"5674\" data-end=\"5717\">Q3: EUV \ub9ac\uc18c\uadf8\ub798\ud53c\uc5d0 \uc801\ud569\ud569\ub2c8\uae4c?<\/h3>\n<p data-start=\"5718\" data-end=\"5803\">\uc608. SiC \uc5d4\ub4dc \uc774\ud399\ud130\ub294 \ucd08\uc800\uc785\uc790 \ubc0f \uc9c4\uacf5 \ud638\ud658\uc131 \uc694\uad6c \uc0ac\ud56d\uc744 \ucda9\uc871\ud569\ub2c8\ub2e4.<\/p>\n<hr data-start=\"5805\" data-end=\"5808\" \/>\n<h3 data-section-id=\"1ajqsm3\" data-start=\"5810\" data-end=\"5872\">Q4: \uc9c4\uacf5 \ubc0f \uace0\uc628 \uc2dc\uc2a4\ud15c\uc5d0\uc11c \uc0ac\uc6a9\ud560 \uc218 \uc788\ub098\uc694?<\/h3>\n<p data-start=\"5873\" data-end=\"5951\">\uc608. SiC\ub294 \uc9c4\uacf5, \ud50c\ub77c\uc988\ub9c8 \ubc0f \uace0\uc628 \ud658\uacbd\uc5d0\uc11c\ub3c4 \uc548\uc815\uc801\uc73c\ub85c \uc791\ub3d9\ud569\ub2c8\ub2e4.<\/p>","protected":false},"excerpt":{"rendered":"<p>The Silicon Carbide (SiC) Ceramic End Effector is a high-precision wafer handling component designed for semiconductor automation systems, including wafer transfer robots, AMHS systems, EUV lithography equipment, and high-temperature process tools. Made from high-purity CVD SiC or engineered SSiC, this end effector delivers exceptional rigidity, ultra-low particle generation, and outstanding thermal and chemical stability. It [&hellip;]<\/p>\n","protected":false},"featured_media":2104,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}}},"product_brand":[],"product_cat":[23],"product_tag":[192,191,190,193,194,195,188,104,189,187],"class_list":["post-2100","product","type-product","status-publish","has-post-thumbnail","product_cat-silicon-carbide-sic","product_tag-300mm-wafer-robot-arm","product_tag-amhs-wafer-transfer-tool","product_tag-cvd-sic-end-effector","product_tag-euv-wafer-handling-component","product_tag-high-precision-ceramic-end-effector","product_tag-semiconductor-automation-parts","product_tag-semiconductor-robot-arm","product_tag-sic-ceramic-end-effector","product_tag-silicon-carbide-wafer-handler","product_tag-wafer-handling-end-effector","desktop-align-left","tablet-align-left","mobile-align-left","first","instock","shipping-taxable","product-type-simple"],"_links":{"self":[{"href":"https:\/\/www.xkh-ceramics.com\/ko\/wp-json\/wp\/v2\/product\/2100","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.xkh-ceramics.com\/ko\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/www.xkh-ceramics.com\/ko\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ko\/wp-json\/wp\/v2\/comments?post=2100"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ko\/wp-json\/wp\/v2\/media\/2104"}],"wp:attachment":[{"href":"https:\/\/www.xkh-ceramics.com\/ko\/wp-json\/wp\/v2\/media?parent=2100"}],"wp:term":[{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ko\/wp-json\/wp\/v2\/product_brand?post=2100"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ko\/wp-json\/wp\/v2\/product_cat?post=2100"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ko\/wp-json\/wp\/v2\/product_tag?post=2100"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}