{"id":2041,"date":"2026-05-08T05:45:52","date_gmt":"2026-05-08T05:45:52","guid":{"rendered":"https:\/\/www.xkh-ceramics.com\/?post_type=product&p=2041"},"modified":"2026-05-08T05:45:52","modified_gmt":"2026-05-08T05:45:52","slug":"sic-ceramic-end-effector-for-precision-wafer-handling-in-semiconductor-equipment","status":"publish","type":"product","link":"https:\/\/www.xkh-ceramics.com\/ko\/product\/sic-ceramic-end-effector-for-precision-wafer-handling-in-semiconductor-equipment\/","title":{"rendered":"\ubc18\ub3c4\uccb4 \uc7a5\ube44\uc758 \uc815\ubc00 \uc6e8\uc774\ud37c \ucc98\ub9ac\ub97c \uc704\ud55c SiC \uc138\ub77c\ubbf9 \uc5d4\ub4dc \uc774\ud399\ud130"},"content":{"rendered":"

\"\"\uadf8\ub9ac\uace0 SiC \uc138\ub77c\ubbf9 \uc5d4\ub4dc \uc774\ud399\ud130<\/strong> \ub294 \ubc18\ub3c4\uccb4 \uc790\ub3d9\ud654 \ubc0f \uc815\ubc00 \ub85c\ubd07 \uc2dc\uc2a4\ud15c\uc744 \uc704\ud574 \uc124\uacc4\ub41c \uace0\uc131\ub2a5 \uc6e8\uc774\ud37c \ud578\ub4e4\ub9c1 \ubd80\ud488\uc785\ub2c8\ub2e4. \ucd08\uace0\uc21c\ub3c4 \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc(SiC) \uc138\ub77c\ubbf9\uc73c\ub85c \uc81c\uc870\ub418\uc5b4 \uadf9\ud55c\uc758 \uacf5\uc815 \ud658\uacbd\uc5d0\uc11c\ub3c4 \ub6f0\uc5b4\ub09c \uae30\uacc4\uc801 \uac15\ub3c4, \uc5f4 \uc548\uc815\uc131 \ubc0f \ub0b4\ud654\ud559\uc131\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4.<\/p>\n

\uae30\uc874\uc758 \uc54c\ub8e8\ubbf8\ub284, \uc2a4\ud14c\uc778\ub9ac\uc2a4 \uc2a4\ud2f8 \ub610\ub294 \ucffc\uce20 \uc5d4\ub4dc \uc774\ud399\ud130\uc640 \ube44\uad50\ud558\uba74 SiC \uc138\ub77c\ubbf9 \uc5d4\ub4dc \uc774\ud399\ud130<\/strong> \ub294 \uc785\uc790 \ubc1c\uc0dd\uc774 \ud604\uc800\ud788 \ub0ae\uace0 \uce58\uc218 \uc548\uc815\uc131\uc774 \ub6f0\uc5b4\ub098\uba70 \uc5f4 \ubcc0\ud615\uc5d0 \ub300\ud55c \uc800\ud56d\uc131\uc774 \uc6b0\uc218\ud569\ub2c8\ub2e4. \uc815\ubc00\uc131, \uccad\uacb0\uc131, \uc2e0\ub8b0\uc131\uc774 \uc911\uc694\ud55c \uc6e8\uc774\ud37c \uc774\uc1a1 \uc2dc\uc2a4\ud15c\uc5d0\uc11c \ub110\ub9ac \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/p>\n

\uc774 \uc81c\ud488\uc740 \uc9c4\uacf5 \ucc54\ubc84, \ud50c\ub77c\uc988\ub9c8 \uacf5\uc815 \ubc0f \uace0\uc628 \uc7a5\ube44\ub97c \ud3ec\ud568\ud55c \ucca8\ub2e8 \ubc18\ub3c4\uccb4 \uc81c\uc870 \ud658\uacbd\uc5d0 \uc801\ud569\ud569\ub2c8\ub2e4.<\/p>\n

\n

\uae30\uc220 \uc0ac\uc591<\/h2>\n
\n
\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
\uc18d\uc131<\/th>\n\ub2e8\uc704<\/th>\n\uac00\uce58<\/th>\n<\/tr>\n<\/thead>\n
\uacb0\uc815 \uad6c\uc870<\/td>\n-<\/td>\nFCC \u03b2 \uc704\uc0c1<\/td>\n<\/tr>\n
\ubc00\ub3c4<\/td>\ng\/cm\u00b3<\/td>\n3.21<\/td>\n<\/tr>\n
\ud654\ud559\uc801 \uc21c\ub3c4<\/td>\n%<\/td>\n99.99995<\/td>\n<\/tr>\n
\uacbd\ub3c4<\/td>\nHV<\/td>\n2500<\/td>\n<\/tr>\n
\uad74\uace1 \uac15\ub3c4<\/td>\nMPa<\/td>\n415<\/td>\n<\/tr>\n
\uc601\uc758 \uacc4\uc218<\/td>\nGPa<\/td>\n430<\/td>\n<\/tr>\n
\uc5f4 \uc804\ub3c4\uc131<\/td>\nW\/m-K<\/td>\n300<\/td>\n<\/tr>\n
\uc5f4\ud33d\ucc3d \uacc4\uc218<\/td>\n10-\u2076\/K<\/td>\n4.5<\/td>\n<\/tr>\n
\ucd5c\ub300 \uc791\ub3d9 \uc628\ub3c4<\/td>\n\u00b0C<\/td>\n2700<\/td>\n<\/tr>\n
\uc5f4 \uc6a9\ub7c9<\/td>\nJ-kg-\u00b9-K-\u00b9<\/td>\n640<\/td>\n<\/tr>\n
\uc785\uc790 \ud06c\uae30<\/td>\n\u03bcm<\/td>\n2-10<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n
\n

\"\"\uc8fc\uc694 \uae30\ub2a5<\/h2>\n

\ucd08\uace0\uc21c\ub3c4 \uc18c\uc7ac<\/strong>
\ud074\ub9b0\ub8f8 \ud658\uacbd\uc5d0\uc11c \uc785\uc790 \uc624\uc5fc\uc744 \ucd5c\uc18c\ud654\ud569\ub2c8\ub2e4.<\/p>\n

\ub6f0\uc5b4\ub09c \uc5f4 \uc548\uc815\uc131<\/strong>
\ubc18\ubcf5\uc801\uc778 \uc5f4 \uc21c\ud658 \ubc0f \uace0\uc628 \ucc98\ub9ac \uc2dc\uc5d0\ub3c4 \uad6c\uc870\uc801 \ubb34\uacb0\uc131\uc744 \uc720\uc9c0\ud569\ub2c8\ub2e4.<\/p>\n

\ub0ae\uc740 \uc5f4 \ud33d\ucc3d<\/strong>
\uc6e8\uc774\ud37c \uc774\uc1a1 \uc791\uc5c5 \uc2dc \ub192\uc740 \uce58\uc218 \uc815\ud655\ub3c4\ub97c \uc81c\uacf5\ud569\ub2c8\ub2e4.<\/p>\n

\ub192\uc740 \uae30\uacc4\uc801 \uac15\ub3c4<\/strong>
\uc5f0\uc18d \uc0dd\uc0b0 \uc2dc\uc2a4\ud15c\uc5d0\uc11c \ud30c\uc190, \ub9c8\ubaa8 \ubc0f \uc7a5\uae30\uc801\uc778 \ud53c\ub85c\uc5d0 \uac15\ud569\ub2c8\ub2e4.<\/p>\n

\ub0b4\ud654\ud559\uc131<\/strong>
\ud50c\ub77c\uc988\ub9c8, \ubd80\uc2dd\uc131 \uac00\uc2a4, \uc9c4\uacf5 \ud658\uacbd\uc5d0\uc11c\ub3c4 \uc548\uc815\uc801\uc785\ub2c8\ub2e4.<\/p>\n

\ub9e4\uc6b0 \ub9e4\ub044\ub7ec\uc6b4 \ud45c\uba74 \ub9c8\uac10<\/strong>
\uc6e8\uc774\ud37c \uae01\ud798\uc744 \uc904\uc774\uace0 \ucde8\uae09 \uc548\uc804\uc131\uc744 \uac1c\uc120\ud569\ub2c8\ub2e4.<\/p>\n

\uae34 \uc11c\ube44\uc2a4 \uc218\uba85<\/strong>
\ucc98\ub9ac\ub7c9\uc774 \ub9ce\uc740 \ubc18\ub3c4\uccb4 \uc81c\uc870 \uc2dc\uc2a4\ud15c\uc744 \uc704\ud574 \uc124\uacc4\ub418\uc5c8\uc2b5\ub2c8\ub2e4.<\/p>\n

\n

\uc81c\uc870 \ud504\ub85c\uc138\uc2a4<\/h2>\n

\uadf8\ub9ac\uace0 SiC \uc138\ub77c\ubbf9 \uc5d4\ub4dc \uc774\ud399\ud130<\/strong> \ub294 \ucca8\ub2e8 \uc138\ub77c\ubbf9 \uc5d4\uc9c0\ub2c8\uc5b4\ub9c1 \uae30\uc220\uc744 \uc0ac\uc6a9\ud558\uc5ec \uc0dd\uc0b0\ub429\ub2c8\ub2e4.<\/p>\n

\uace0\uc21c\ub3c4 \ud0c4\ud654\uaddc\uc18c \ubd84\ub9d0\uc744 \uc5c4\uc120\ud558\uace0 \uc5c4\uaca9\ud558\uac8c \uad00\ub9ac\ud558\uc5ec \uc7ac\ub8cc\uc758 \uc77c\uad00\uc131\uc744 \ubcf4\uc7a5\ud569\ub2c8\ub2e4.<\/p>\n

\ubcf5\uc7a1\ud55c \ud615\uc0c1\uc744 \uad6c\ud604\ud558\uae30 \uc704\ud574 \ub0c9\uac04 \ub4f1\ubc29\uc131 \ud504\ub808\uc2a4 \ub610\ub294 \uc0ac\ucd9c \uc131\ud615\uc744 \uc0ac\uc6a9\ud558\uc5ec \uc815\ubc00 \uc131\ud615\uc774 \uc218\ud589\ub429\ub2c8\ub2e4.<\/p>\n

2000\u00b0C \uc774\uc0c1\uc758 \uace0\uc628 \uc18c\uacb0\uc740 \uc644\uc804\ud55c \uce58\ubc00\ud654\uc640 \uad6c\uc870\uc801 \uc548\uc815\uc131\uc744 \ubcf4\uc7a5\ud569\ub2c8\ub2e4.<\/p>\n

CNC \ub2e4\uc774\uc544\ubaac\ub4dc \uac00\uacf5\uc774 \uc801\uc6a9\ub418\uc5b4 \ubbf8\ud06c\ub860 \uc218\uc900\uc758 \uc815\ubc00\ub3c4\uc640 \uc6e8\uc774\ud37c \uc218\uc900\uc758 \ud3c9\ud0c4\ub3c4\ub97c \ub2ec\uc131\ud569\ub2c8\ub2e4.<\/p>\n

\ucd5c\uc885 \uc5f0\ub9c8 \ubc0f \uac80\uc0ac\ub97c \ud1b5\ud574 \ubc18\ub3c4\uccb4 \ub4f1\uae09 \ud45c\uc900\uc744 \uc900\uc218\ud569\ub2c8\ub2e4.<\/p>\n

\uac01 \uc81c\ud488\uc740 \ubc30\uc1a1 \uc804\uc5d0 \uc5c4\uaca9\ud55c \uce58\uc218 \uac80\uc0ac, \ud45c\uba74 \ud488\uc9c8 \ud14c\uc2a4\ud2b8, \ube44\ud30c\uad34 \ud3c9\uac00\ub97c \uac70\uce69\ub2c8\ub2e4.<\/p>\n

\n

\uc560\ud50c\ub9ac\ucf00\uc774\uc158<\/h2>\n

\uadf8\ub9ac\uace0 SiC \uc138\ub77c\ubbf9 \uc5d4\ub4dc \uc774\ud399\ud130<\/strong> \ub294 \ubc18\ub3c4\uccb4 \ubc0f \uace0\uc815\ubc00 \uc790\ub3d9\ud654 \uc2dc\uc2a4\ud15c\uc5d0\uc11c \ub110\ub9ac \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/p>\n

6\uc778\uce58, 8\uc778\uce58 \ubc0f 12\uc778\uce58 \uc6e8\uc774\ud37c\uc6a9 \uc6e8\uc774\ud37c \uc774\uc1a1 \uc2dc\uc2a4\ud15c<\/p>\n

\uc9c4\uacf5 \ucc54\ubc84\uc758 \ub85c\ubd07 \uc6e8\uc774\ud37c \ucc98\ub9ac \uc2dc\uc2a4\ud15c<\/p>\n

CVD, ALD, \uc2dd\uac01 \ubc0f \uc99d\ucc29 \uc7a5\ube44<\/p>\n

FOUP \ubc0f FOSB \uc790\ub3d9 \ub85c\ub529 \ubc0f \uc5b8\ub85c\ub4dc \uc2dc\uc2a4\ud15c<\/p>\n

\ud074\ub9b0\ub8f8 \uc6e8\uc774\ud37c \uc790\ub3d9\ud654 \uc0dd\uc0b0 \ub77c\uc778<\/p>\n

\ub808\uc774\uc800 \uac00\uacf5 \ubc0f \uc5f4 \uc5b4\ub2d0\ub9c1 \uc2dc\uc2a4\ud15c<\/p>\n

\"\"<\/p>\n

\n

\uae30\uc874 \uc18c\uc7ac\uc640 \ube44\uad50\ud55c \uc7a5\uc810<\/h2>\n

SiC \uc138\ub77c\ubbf9\uc740 \uc54c\ub8e8\ubbf8\ub284 \uc5d4\ub4dc \uc774\ud399\ud130\uc5d0 \ube44\ud574 \uc5f4 \uc548\uc815\uc131\uc774 \uc6b0\uc218\ud558\uace0 \uae08\uc18d \uc624\uc5fc \uc704\ud5d8\uc774 \uc5c6\uc2b5\ub2c8\ub2e4.<\/p>\n

\ucffc\uce20\uc5d0 \ube44\ud574 \uae30\uacc4\uc801 \uac15\ub3c4\uac00 \ub192\uace0 \uc785\uc790 \ubc1c\uc0dd\uc774 \uc801\uc2b5\ub2c8\ub2e4.<\/p>\n

\uc2a4\ud14c\uc778\ub9ac\uc2a4 \uc2a4\ud2f8\uc5d0 \ube44\ud574 \ud50c\ub77c\uc988\ub9c8 \ubc0f \uace0\uc628 \ud658\uacbd\uc5d0\uc11c \ub354 \uc548\uc815\uc801\uc73c\ub85c \uc791\ub3d9\ud569\ub2c8\ub2e4.<\/p>\n

\n

\uc790\uc8fc \ubb3b\ub294 \uc9c8\ubb38<\/h2>\n

\uba54\ud0c8\uc774\ub098 \ucffc\uce20 \ub300\uc2e0 SiC \uc138\ub77c\ubbf9 \uc5d4\ub4dc \uc774\ud399\ud130\ub97c \uc120\ud0dd\ud558\ub294 \uc774\uc720\ub294 \ubb34\uc5c7\uc778\uac00\uc694?<\/strong>
SiC \uc138\ub77c\ubbf9\uc740 \ub6f0\uc5b4\ub09c \uc5f4 \uc548\uc815\uc131, \ub0b4\ud654\ud559\uc131, \ucd08\uc800\uc785\uc790 \uc0dd\uc131\uc73c\ub85c \ucca8\ub2e8 \ubc18\ub3c4\uccb4 \uacf5\uc815\uc5d0 \uc774\uc0c1\uc801\uc785\ub2c8\ub2e4.<\/p>\n

\uc0ac\uc6a9\uc790 \uc9c0\uc815\ud560 \uc218 \uc788\ub098\uc694?<\/strong>
\uc608, \ud615\uc0c1, \uc554 \uae38\uc774, \ub9c8\uc6b4\ud305 \uc778\ud130\ud398\uc774\uc2a4 \ubc0f \uc6e8\uc774\ud37c \ud06c\uae30 \ud638\ud658\uc131\uc744 \ud3ec\ud568\ud55c \uc804\uccb4 \uc0ac\uc6a9\uc790 \uc9c0\uc815\uc744 \uc9c0\uc6d0\ud569\ub2c8\ub2e4.<\/p>\n

\uc9c4\uacf5 \ubc0f \ud50c\ub77c\uc988\ub9c8 \uc2dc\uc2a4\ud15c\uc5d0 \uc801\ud569\ud569\ub2c8\uae4c?<\/strong>
\uc608, SiC \uc138\ub77c\ubbf9\uc740 \ud654\ud559\uc801\uc73c\ub85c \ubd88\ud65c\uc131\uc774\uba70 \ucd08\uace0\uc9c4\uacf5 \ubc0f \ud50c\ub77c\uc988\ub9c8 \ud658\uacbd\uc5d0\uc11c \uc548\uc815\uc801\uc73c\ub85c \uc791\ub3d9\ud569\ub2c8\ub2e4.<\/p>\n

\uc11c\ube44\uc2a4 \uc218\uba85\uc740 \uc5b4\ub5bb\uac8c \ub418\ub098\uc694?<\/strong>
\ud45c\uc900 \uc791\ub3d9 \uc870\uac74\uc5d0\uc11c \uae30\uc874\uc758 \uae08\uc18d \ub610\ub294 \uc11d\uc601 \uc5d4\ub4dc \uc774\ud399\ud130\uc5d0 \ube44\ud574 \ud6e8\uc52c \ub354 \uae34 \uc218\uba85\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4.<\/p>\n

\uac80\uc0ac \ubcf4\uace0\uc11c\ub97c \uc81c\uacf5\ud558\ub098\uc694?<\/strong>
\uc608, \uc694\uccad \uc2dc \uce58\uc218 \ubcf4\uace0\uc11c, \uc790\uc7ac \uc778\uc99d\uc11c \ubc0f \ud488\uc9c8 \uac80\uc0ac \ubb38\uc11c\ub97c \uc81c\uacf5\ud569\ub2c8\ub2e4.<\/p>","protected":false},"excerpt":{"rendered":"

\uadf8\ub9ac\uace0 SiC \uc138\ub77c\ubbf9 \uc5d4\ub4dc \uc774\ud399\ud130<\/strong> \ub294 \ubc18\ub3c4\uccb4 \uc790\ub3d9\ud654 \ubc0f \uc815\ubc00 \ub85c\ubd07 \uc2dc\uc2a4\ud15c\uc744 \uc704\ud574 \uc124\uacc4\ub41c \uace0\uc131\ub2a5 \uc6e8\uc774\ud37c \ud578\ub4e4\ub9c1 \ubd80\ud488\uc785\ub2c8\ub2e4. \ucd08\uace0\uc21c\ub3c4 \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc(SiC) \uc138\ub77c\ubbf9\uc73c\ub85c \uc81c\uc870\ub418\uc5b4 \uadf9\ud55c\uc758 \uacf5\uc815 \ud658\uacbd\uc5d0\uc11c\ub3c4 \ub6f0\uc5b4\ub09c \uae30\uacc4\uc801 \uac15\ub3c4, \uc5f4 \uc548\uc815\uc131 \ubc0f \ub0b4\ud654\ud559\uc131\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4.<\/p>","protected":false},"featured_media":2045,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center 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