{"id":2266,"date":"2026-05-19T06:27:35","date_gmt":"2026-05-19T06:27:35","guid":{"rendered":"https:\/\/www.xkh-ceramics.com\/?p=2266"},"modified":"2026-05-19T06:28:27","modified_gmt":"2026-05-19T06:28:27","slug":"%eb%b0%98%eb%8f%84%ec%b2%b4-%ec%9e%a5%eb%b9%84-%ec%9d%91%ec%9a%a9-%eb%b6%84%ec%95%bc%ec%9d%98-%ec%b2%a8%eb%8b%a8-%ec%84%b8%eb%9d%bc%eb%af%b9-%ec%9e%ac%eb%a3%8c-%ec%9e%ac%eb%a3%8c-%eb%b9%84%ea%b5%90","status":"publish","type":"post","link":"https:\/\/www.xkh-ceramics.com\/ko\/advanced-ceramic-materials-in-semiconductor-equipment-applications-material-comparison\/","title":{"rendered":"\ubc18\ub3c4\uccb4 \uc7a5\ube44\uc758 \ucca8\ub2e8 \uc138\ub77c\ubbf9 \uc7ac\ub8cc: \uc751\uc6a9 \ubd84\uc57c \ubc0f \uc7ac\ub8cc \ube44\uad50"},"content":{"rendered":"<p class=\"wp-block-paragraph\">\ucd5c\uc2e0 \ubc18\ub3c4\uccb4 \uc81c\uc870 \uc7a5\ube44\uc5d0\uc11c \ucca8\ub2e8 \uc138\ub77c\ubbf9\uc740 \ub354 \uc774\uc0c1 \uc120\ud0dd\uc801 \ubd80\ud488\uc774 \uc544\ub2c8\ub77c \uc815\ubc00\ub3c4, \uc548\uc815\uc131 \ubc0f \uacf5\uc815 \uc2e0\ub8b0\uc131\uc744 \uacb0\uc815\ud558\ub294 \ud575\uc2ec \uc694\uc18c\uc785\ub2c8\ub2e4.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\ud50c\ub77c\uc988\ub9c8 \uc5d0\uce6d \ucc54\ubc84\uc5d0\uc11c \uc6e8\uc774\ud37c \ucc98\ub9ac \uc2dc\uc2a4\ud15c\uc5d0 \uc774\ub974\uae30\uae4c\uc9c0 \uc5f4, \uc804\uae30 \ubc0f \uae30\uacc4\uc801 \uc131\ub2a5 \uc694\uad6c \uc0ac\ud56d\uc5d0 \ub530\ub77c \ub2e4\uc591\ud55c \uc138\ub77c\ubbf9 \uc18c\uc7ac\uac00 \uc120\ud0dd\ub429\ub2c8\ub2e4.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\uc774 \ubb38\uc11c\uc5d0\uc11c\ub294 \uac00\uc7a5 \ub110\ub9ac \uc0ac\uc6a9\ub418\ub294 \ubc18\ub3c4\uccb4 \ub4f1\uae09 \uc138\ub77c\ubbf9\uc744 \uc18c\uac1c\ud558\uace0 \uc5d4\uc9c0\ub2c8\uc5b4\ub9c1 \ubc0f \uc870\ub2ec \uc758\uc0ac \uacb0\uc815\uc744 \uc704\ud55c \uba85\ud655\ud55c \uae30\uc220 \ube44\uad50\ub97c \uc81c\uacf5\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<figure class=\"wp-block-image aligncenter size-full\"><img fetchpriority=\"high\" decoding=\"async\" width=\"800\" height=\"800\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/pl209530651-silicon_carbide_ceramic_tray_for_semiconductor_wafer_processing_\u526f\u672c.jpg\" alt=\"\" class=\"wp-image-2267\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/pl209530651-silicon_carbide_ceramic_tray_for_semiconductor_wafer_processing_\u526f\u672c.jpg 800w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/pl209530651-silicon_carbide_ceramic_tray_for_semiconductor_wafer_processing_\u526f\u672c-300x300.jpg 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/pl209530651-silicon_carbide_ceramic_tray_for_semiconductor_wafer_processing_\u526f\u672c-150x150.jpg 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/pl209530651-silicon_carbide_ceramic_tray_for_semiconductor_wafer_processing_\u526f\u672c-768x768.jpg 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/pl209530651-silicon_carbide_ceramic_tray_for_semiconductor_wafer_processing_\u526f\u672c-12x12.jpg 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/pl209530651-silicon_carbide_ceramic_tray_for_semiconductor_wafer_processing_\u526f\u672c-600x600.jpg 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/pl209530651-silicon_carbide_ceramic_tray_for_semiconductor_wafer_processing_\u526f\u672c-100x100.jpg 100w\" sizes=\"(max-width: 800px) 100vw, 800px\" \/><\/figure>\n\n\n\n<h2 class=\"wp-block-heading\">1. \uc138\ub77c\ubbf9\uc774 \ubc18\ub3c4\uccb4 \uc7a5\ube44\uc5d0 \ud544\uc218\uc801\uc778 \uc774\uc720 1.<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\ubc18\ub3c4\uccb4 \uc0dd\uc0b0 \ud658\uacbd\uc740 \ub2e4\uc74c\uacfc \uac19\uc2b5\ub2c8\ub2e4:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\uadf9\ud55c\uc758 \uc628\ub3c4(\ucd5c\ub300 1000\u00b0C \uc774\uc0c1)<\/li>\n\n\n\n<li>\ud50c\ub77c\uc988\ub9c8 \ubd80\uc2dd \ud658\uacbd<\/li>\n\n\n\n<li>\ucd08\uace0\uc9c4\uacf5 \uc2dc\uc2a4\ud15c<\/li>\n\n\n\n<li>\uace0\uc804\uc555 \uc804\uae30 \uc870\uac74<\/li>\n\n\n\n<li>\ub098\ub178\ubbf8\ud130 \uc218\uc900\uc758 \uc815\ubc00\ub3c4 \uc694\uad6c \uc0ac\ud56d<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\uae30\uc874 \uae08\uc18d\uc740 \ub2e8\uc5f4\uc131, \ub0b4\uc2dd\uc131 \ub610\ub294 \uc5f4 \uc548\uc815\uc131\uc774 \ub5a8\uc5b4\uc9d1\ub2c8\ub2e4. \ucca8\ub2e8 \uc138\ub77c\ubbf9\uc740 \uc774\ub7ec\ud55c \ud55c\uacc4\ub97c \ud574\uacb0\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">2. \uac00\uc7a5 \ub110\ub9ac \uc0ac\uc6a9\ub418\ub294 \uc138\ub77c\ubbf9 \uc18c\uc7ac<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">2.1 \uc54c\ub8e8\ubbf8\ub098(Al\u2082O\u2083) - \uc5c5\uacc4 \ud45c\uc900 \uc18c\uc7ac<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\uc54c\ub8e8\ubbf8\ub098 \uc138\ub77c\ubbf9\uc740 \uac00\uc7a5 \ub110\ub9ac \uc0ac\uc6a9\ub418\ub294 \uc7ac\ub8cc\ub85c, \uc57d <strong>45%\uc758 \ubc18\ub3c4\uccb4 \uc138\ub77c\ubbf9 \uc560\ud50c\ub9ac\ucf00\uc774\uc158<\/strong>.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>\uc8fc\uc694 \uc560\ud50c\ub9ac\ucf00\uc774\uc158:<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\uc5d0\uce6d \ucc54\ubc84 \ub77c\uc774\ub108<\/li>\n\n\n\n<li>\uc6e8\uc774\ud37c \uc9c0\uc9c0 \ub9c1<\/li>\n\n\n\n<li>\uac00\uc2a4 \ubd84\ubc30\ud310<\/li>\n\n\n\n<li>\uc9c4\uacf5 \ucc99<\/li>\n\n\n\n<li>CMP \ud3f4\ub9ac\uc2f1 \uad6c\uc131 \uc694\uc18c<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>\uc8fc\uc694 \uc774\uc810:<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\uc548\uc815\uc801\uc778 \uc804\uae30 \uc808\uc5f0<\/li>\n\n\n\n<li>\uc6b0\uc218\ud55c \ub0b4\uc5f4\uc131<\/li>\n\n\n\n<li>\ube44\uc6a9 \ud6a8\uc728\uc801\uc778 \ub300\ub7c9 \uc0dd\uc0b0<\/li>\n\n\n\n<li>\uc131\uc219\ud55c \ucc98\ub9ac \uae30\uc220<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">2.2 \uc774\ud2b8\ub9ac\uc544(Y\u2082O\u2083) - \ud50c\ub77c\uc988\ub9c8 \ub0b4\uc131 \uc138\ub77c\ubbf9<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\uc774\ud2b8\ub9ac\uc544\ub294 \uc6b0\uc218\ud55c \ub0b4\uc2dd\uc131\uc73c\ub85c \uc778\ud574 \ud50c\ub77c\uc988\ub9c8 \uc9d1\uc57d\uc801\uc778 \ud658\uacbd\uc5d0\uc11c \ub110\ub9ac \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>\uc8fc\uc694 \uc560\ud50c\ub9ac\ucf00\uc774\uc158:<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\uc5d0\uce6d \ucc54\ubc84 \ucf54\ud305<\/li>\n\n\n\n<li>\uad11\ud559 \ubdf0\ud3ec\ud2b8<\/li>\n\n\n\n<li>\ud50c\ub77c\uc988\ub9c8\ub97c \ud5a5\ud55c \uad6c\uc131 \uc694\uc18c<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>\uc8fc\uc694 \uc774\uc810:<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Al\u2082O\u2083 \ub300\ube44 \uc6b0\uc218\ud55c \ud50c\ub77c\uc988\ub9c8 \ub0b4\uc2dd\uc131<\/li>\n\n\n\n<li>\ub192\uc740 \uc735\uc810(~2430\u00b0C)<\/li>\n\n\n\n<li>\ube44\uc6a9 \uc808\uac10\uc744 \uc704\ud55c \ucf54\ud305\uce35\uc73c\ub85c \uc790\uc8fc \uc0ac\uc6a9\ub428<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">2.3 \ud0c4\ud654\uaddc\uc18c(SiC) - \uace0\uc815\ubc00 \uad6c\uc870\uc6a9 \uc138\ub77c\ubbf9<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc\ub294 \ub6f0\uc5b4\ub09c \uac15\uc131\uacfc \uc5f4 \uc548\uc815\uc131\uc744 \uc81c\uacf5\ud558\uc5ec \uc815\ubc00 \uc7a5\ube44\uc5d0 \uc774\uc0c1\uc801\uc785\ub2c8\ub2e4.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>\uc8fc\uc694 \uc560\ud50c\ub9ac\ucf00\uc774\uc158:<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\ub9ac\uc18c\uadf8\ub798\ud53c \uae30\uacc4 \ub2e8\uacc4<\/li>\n\n\n\n<li>\ucd08\uc810 \ub9c1<\/li>\n\n\n\n<li>\uc815\ubc00 \uac00\uc774\ub4dc \ub808\uc77c<\/li>\n\n\n\n<li>\uc6e8\uc774\ud37c \ucc99 \ubc0f \ubbf8\ub7ec<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>\uc8fc\uc694 \uc774\uc810:<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\ub9e4\uc6b0 \ub192\uc740 \uac15\uc131<\/li>\n\n\n\n<li>\ub0ae\uc740 \uc5f4 \ud33d\ucc3d<\/li>\n\n\n\n<li>\ub6f0\uc5b4\ub09c \uc5f4 \uc804\ub3c4\uc131<\/li>\n\n\n\n<li>\uac70\uc6b8\ub85c \ub2e6\uc744 \uc218 \uc788\ub294 \ud45c\uba74<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">2.4 \uc9c8\ud654\uaddc\uc18c(Si\u2083N\u2084) - \uace0\uc2e0\ub8b0\uc131 \uc5d4\uc9c0\ub2c8\uc5b4\ub9c1 \uc138\ub77c\ubbf9<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\uc2e4\ub9ac\ucf58 \uc9c8\ud654\ubb3c\uc740 \uae30\uacc4\uc801 \uac15\ub3c4\uc640 \uc5f4\ucda9\uaca9 \uc800\ud56d\uc131\uc774 \ub6f0\uc5b4\ub09c \uac83\uc73c\ub85c \uc54c\ub824\uc838 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>\uc8fc\uc694 \uc560\ud50c\ub9ac\ucf00\uc774\uc158:<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\ubca0\uc5b4\ub9c1<\/li>\n\n\n\n<li>\uc120\ud615 \uac00\uc774\ub4dc \uc2dc\uc2a4\ud15c<\/li>\n\n\n\n<li>\uae30\uacc4\uc2dd \uc554<\/li>\n\n\n\n<li>\uace0\ud558\uc911 \uad6c\uc870 \ubd80\ud488<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>\uc8fc\uc694 \uc774\uc810:<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\ub192\uc740 \uace8\uc808 \uc778\uc131<\/li>\n\n\n\n<li>\ub6f0\uc5b4\ub09c \uc5f4 \ucda9\uaca9 \uc800\ud56d\uc131<\/li>\n\n\n\n<li>\uace0\uc628(\ucd5c\ub300 1200\u00b0C \uc774\uc0c1)\uc5d0\uc11c \uc548\uc815\uc801\uc778 \uc131\ub2a5 \uc81c\uacf5<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">2.5 \uc9c8\ud654 \uc54c\ub8e8\ubbf8\ub284(AlN) - \ucc28\uc138\ub300 \uc5f4 \uc138\ub77c\ubbf9<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">AlN\uc740 \uc5f4\uc804\ub3c4\uc728\uc758 \uc7a5\uc810\uc73c\ub85c \uc778\ud574 \uace0\uc804\ub825 \ubc18\ub3c4\uccb4 \uc2dc\uc2a4\ud15c\uc5d0\uc11c \uc810\uc810 \ub354 \ub9ce\uc774 \uc0ac\uc6a9\ub418\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>\uc8fc\uc694 \uc560\ud50c\ub9ac\ucf00\uc774\uc158:<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\uc815\uc804\uae30 \ucc99(ESC)<\/li>\n\n\n\n<li>\uace0\uc804\ub825 \uc804\uc790 \uae30\ud310<\/li>\n\n\n\n<li>RF \ubc0f \uc804\ub825 \ubaa8\ub4c8<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>\uc8fc\uc694 \uc774\uc810:<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\ub192\uc740 \uc5f4 \uc804\ub3c4\uc131(Al\u2082O\u2083\ubcf4\ub2e4 \ud6e8\uc52c \ub192\uc74c)<\/li>\n\n\n\n<li>\ub6f0\uc5b4\ub09c \uc804\uae30 \uc808\uc5f0\uc131<\/li>\n\n\n\n<li>\uc5f4 \uc2a4\ud2b8\ub808\uc2a4 \ubd88\uc77c\uce58 \uac10\uc18c<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">3. \uae30\uc220 \ube44\uad50 \ud45c<\/h2>\n\n\n\n<figure class=\"wp-block-table\"><table class=\"has-fixed-layout\"><thead><tr><th>\uc7ac\ub8cc<\/th><th>\uc5f4 \uc804\ub3c4\uc131(W\/m-K)<\/th><th>\uc804\uae30 \uc808\uc5f0<\/th><th>\uc5f4 \ucda9\uaca9 \uc800\ud56d<\/th><th>\ud50c\ub77c\uc988\ub9c8 \uc800\ud56d<\/th><th>\uc8fc\uc694 \uc0ac\uc6a9 \uc0ac\ub840<\/th><\/tr><\/thead><tbody><tr><td>Al\u2082O\u2083(\uc54c\ub8e8\ubbf8\ub098)<\/td><td>20-30<\/td><td>\uc6b0\uc218<\/td><td>Medium<\/td><td>Medium<\/td><td>\uc77c\ubc18 \uad6c\uc870 \ubd80\ud488<\/td><\/tr><tr><td>Y\u2082O\u2083(\uc774\ud2b8\ub9ac\uc544)<\/td><td>10-15<\/td><td>\uc6b0\uc218<\/td><td>Good<\/td><td>\uc6b0\uc218<\/td><td>\ud50c\ub77c\uc988\ub9c8 \ucc54\ubc84 \ucf54\ud305<\/td><\/tr><tr><td>SiC(\uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc)<\/td><td>120-200<\/td><td>Good<\/td><td>\uc6b0\uc218<\/td><td>Good<\/td><td>\uc815\ubc00 \uad6c\uc870 \ubd80\ud488<\/td><\/tr><tr><td>Si\u2083N\u2084(\uc9c8\ud654\uaddc\uc18c)<\/td><td>20-90<\/td><td>Good<\/td><td>\uc6b0\uc218<\/td><td>Good<\/td><td>\ubca0\uc5b4\ub9c1 \ubc0f \uae30\uacc4 \uc2dc\uc2a4\ud15c<\/td><\/tr><tr><td>AlN(\uc9c8\ud654 \uc54c\ub8e8\ubbf8\ub284)<\/td><td>140-180<\/td><td>\uc6b0\uc218<\/td><td>Good<\/td><td>Medium<\/td><td>\uc5f4 \uad00\ub9ac(ESC)<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<h2 class=\"wp-block-heading\">4. \ubc18\ub3c4\uccb4 \uc7a5\ube44\uc758 \uc560\ud50c\ub9ac\ucf00\uc774\uc158 \ub9f5<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">\ud504\ub7f0\ud2b8 \uc5d4\ub4dc \ud504\ub85c\uc138\uc2a4 \uc7a5\ube44<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\uc5d0\uce6d \ucc54\ubc84 \u2192 Al\u2082O\u2083 \/ Y\u2082O\u2083<\/li>\n\n\n\n<li>\uc99d\ucc29 \uc2dc\uc2a4\ud15c \u2192 Al\u2082O\u2083\/SiC<\/li>\n\n\n\n<li>\ud50c\ub77c\uc988\ub9c8 \ud658\uacbd \u2192 Y\u2082O\u2083 \ucf54\ud305<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">\uc6e8\uc774\ud37c \ucc98\ub9ac \uc2dc\uc2a4\ud15c<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\ub85c\ubd07 \ud314 \u2192 Si\u2083N\u2084\/SiC<\/li>\n\n\n\n<li>\uc9c4\uacf5 \ucc99 \u2192 Al\u2082O\u2083 \/ AlN<\/li>\n\n\n\n<li>\uac00\uc774\ub4dc \ub808\uc77c \u2192 SiC\/Si\u2083N\u2084<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">\uc5f4 \uad00\ub9ac \uc2dc\uc2a4\ud15c<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>ESC(\uc815\uc804\uae30 \ucc99) \u2192 AlN \/ Al\u2082O\u2083<\/li>\n\n\n\n<li>\ud788\ud2b8 \uc2a4\ud504\ub808\ub354 \u2192 AlN<\/li>\n\n\n\n<li>\uc815\ubc00 \ub0c9\uac01\ud310 \u2192 Al\u2082O\u2083\/SiC<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">5. \uc7ac\ub8cc \uc120\ud0dd \uac00\uc774\ub4dc(\uc5d4\uc9c0\ub2c8\uc5b4\ub9c1 \ubcf4\uae30)<\/h2>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\ube44\uc6a9\uc5d0 \ubbfc\uac10\ud55c \uc560\ud50c\ub9ac\ucf00\uc774\uc158 \u2192 Al\u2082O\u2083<\/strong><\/li>\n\n\n\n<li><strong>\ud50c\ub77c\uc988\ub9c8 \ubd80\uc2dd \ud658\uacbd \u2192 Y\u2082O\u2083<\/strong><\/li>\n\n\n\n<li><strong>\uace0\uc815\ubc00 \uad6c\uc870 \u2192 SiC<\/strong><\/li>\n\n\n\n<li><strong>\uae30\uacc4\uc801 \ubd80\ud558 \ubc0f \ub0b4\uad6c\uc131 \u2192 Si\u2083N\u2084<\/strong><\/li>\n\n\n\n<li><strong>\ub192\uc740 \uc5f4 \ubc29\ucd9c \u2192 AlN<\/strong><\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">6. \ubbf8\ub798 \ud2b8\ub80c\ub4dc: \ud558\uc774\ube0c\ub9ac\ub4dc \uc138\ub77c\ubbf9 \uc2dc\uc2a4\ud15c<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\ucc28\uc138\ub300 \ubc18\ub3c4\uccb4 \uc7a5\ube44\ub294 \ub2e4\uc74c\uacfc \uac19\uc740 \ubc29\ud5a5\uc73c\ub85c \ubcc0\ud654\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\ucf54\ud305 \uc138\ub77c\ubbf9 \uc2dc\uc2a4\ud15c(Al\u2082O\u2083 + Y\u2082O\u2083)<\/li>\n\n\n\n<li>SiC \uad6c\uc870 \ud50c\ub7ab\ud3fc<\/li>\n\n\n\n<li>AlN \uc5f4 \uad00\ub9ac \ud1b5\ud569<\/li>\n\n\n\n<li>\ub2e4\uc911 \uc7ac\ub8cc \ud558\uc774\ube0c\ub9ac\ub4dc \uc138\ub77c\ubbf9 \uc5b4\uc148\ube14\ub9ac<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\uc774\ub7ec\ud55c \ucd94\uc138\ub294 \uc7a5\ube44 \uc218\uba85\uacfc \ud504\ub85c\uc138\uc2a4 \uc548\uc815\uc131\uc744 \ud06c\uac8c \ud5a5\uc0c1\uc2dc\ud0b5\ub2c8\ub2e4.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">\uacb0\ub860<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\ucca8\ub2e8 \uc138\ub77c\ubbf9\uc740 \ubc18\ub3c4\uccb4 \uc81c\uc870 \uc7a5\ube44\uc758 \uadfc\uac04\uc774 \ub418\uc5c8\uc2b5\ub2c8\ub2e4. \uac01 \uc18c\uc7ac\ub294 \uad6c\uc870\uc801 \uc9c0\uc9c0\ubd80\ud130 \ud50c\ub77c\uc988\ub9c8 \uc800\ud56d \ubc0f \uc5f4 \uad00\ub9ac\uc5d0 \uc774\ub974\uae30\uae4c\uc9c0 \ud2b9\ud654\ub41c \uc5ed\ud560\uc744 \uc218\ud589\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\uc62c\ubc14\ub978 \uc138\ub77c\ubbf9 \uc18c\uc7ac\ub97c \uc120\ud0dd\ud558\ub294 \uac83\uc740 \uc9c1\uc811\uc801\uc778 \uc601\ud5a5\uc744 \ubbf8\uce69\ub2c8\ub2e4:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\uc7a5\ube44 \uc218\uba85<\/li>\n\n\n\n<li>\ud504\ub85c\uc138\uc2a4 \uc548\uc815\uc131<\/li>\n\n\n\n<li>\uc218\uc775\ub960<\/li>\n\n\n\n<li>\uc720\uc9c0 \uad00\ub9ac \ube44\uc6a9<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">\uc694\uccad <a href=\"https:\/\/www.xkh-ceramics.com\/ko\/%ec%a0%9c%ed%92%88\/\"><mark style=\"background-color:rgba(0, 0, 0, 0);color:#0693e3\" class=\"has-inline-color\">\ub9de\ucda4\ud615 \uc138\ub77c\ubbf9 \ubd80\ud488<\/mark><\/a><\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\ub2f9\uc0ac\uac00 \uc81c\uacf5\ud569\ub2c8\ub2e4:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\uc54c\ub8e8\ubbf8\ub098 \uc138\ub77c\ubbf9 \ubd80\ud488(Al\u2082O\u2083)<\/li>\n\n\n\n<li>\uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc \uc815\ubc00 \ubd80\ud488(SiC)<\/li>\n\n\n\n<li>\uc9c8\ud654\uaddc\uc18c \uad6c\uc870 \ubd80\ud488(Si\u2083N\u2084)<\/li>\n\n\n\n<li>\uc9c8\ud654 \uc54c\ub8e8\ubbf8\ub284 \uc5f4 \uae30\ud310(AlN)<\/li>\n\n\n\n<li>\uc774\ud2b8\ub9ac\uc544 \ucf54\ud305 \uc194\ub8e8\uc158(Y\u2082O\u2083)<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\ub9de\ucda4\ud615 \ud06c\uae30, \uac00\uacf5, \uc5f0\ub9c8, \ucf54\ud305 \ubc0f \uc5d4\uc9c0\ub2c8\uc5b4\ub9c1 \uc9c0\uc6d0 \uac00\ub2a5.<\/p>","protected":false},"excerpt":{"rendered":"<p>In modern semiconductor manufacturing equipment, advanced ceramics are no longer optional components\u2014they are critical enabling materials that determine precision, stability, and process reliability. From plasma etching chambers to wafer handling systems, different ceramic materials are selected based on thermal, electrical, and mechanical performance requirements. This article introduces the most widely used semiconductor-grade ceramics and provides [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":2267,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[3],"tags":[469,465,466,472,460,470,464,459,84,463,471,310,251,303,468,461,322,462,467],"class_list":["post-2266","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-industry-news","tag-advanced-ceramic-materials","tag-alumina-ceramic-al2o3","tag-aluminum-nitride-aln","tag-ceramic-comparison-table","tag-electrical-insulation-ceramics","tag-esc-ceramic-chuck","tag-etching-chamber-ceramics","tag-high-temperature-ceramics","tag-high-thermal-conductivity-ceramics","tag-industrial-technical-ceramics","tag-plasma-resistant-ceramics","tag-precision-ceramic-components","tag-semiconductor-ceramics","tag-semiconductor-equipment-materials","tag-semiconductor-manufacturing-materials","tag-silicon-carbide-sic","tag-silicon-nitride-si3n4","tag-wafer-processing-materials","tag-yttria-y2o3"],"_links":{"self":[{"href":"https:\/\/www.xkh-ceramics.com\/ko\/wp-json\/wp\/v2\/posts\/2266","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.xkh-ceramics.com\/ko\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.xkh-ceramics.com\/ko\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ko\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ko\/wp-json\/wp\/v2\/comments?post=2266"}],"version-history":[{"count":2,"href":"https:\/\/www.xkh-ceramics.com\/ko\/wp-json\/wp\/v2\/posts\/2266\/revisions"}],"predecessor-version":[{"id":2270,"href":"https:\/\/www.xkh-ceramics.com\/ko\/wp-json\/wp\/v2\/posts\/2266\/revisions\/2270"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ko\/wp-json\/wp\/v2\/media\/2267"}],"wp:attachment":[{"href":"https:\/\/www.xkh-ceramics.com\/ko\/wp-json\/wp\/v2\/media?parent=2266"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ko\/wp-json\/wp\/v2\/categories?post=2266"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ko\/wp-json\/wp\/v2\/tags?post=2266"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}