{"id":2147,"date":"2026-05-13T06:33:09","date_gmt":"2026-05-13T06:33:09","guid":{"rendered":"https:\/\/www.xkh-ceramics.com\/?p=2147"},"modified":"2026-05-13T06:33:09","modified_gmt":"2026-05-13T06:33:09","slug":"alumina-ceramic-components-in-semiconductor-equipment-functions-structures-and-advanced-applications","status":"publish","type":"post","link":"https:\/\/www.xkh-ceramics.com\/ko\/alumina-ceramic-components-in-semiconductor-equipment-functions-structures-and-advanced-applications\/","title":{"rendered":"\ubc18\ub3c4\uccb4 \uc7a5\ube44\uc758 \uc54c\ub8e8\ubbf8\ub098 \uc138\ub77c\ubbf9 \ubd80\ud488: \uae30\ub2a5, \uad6c\uc870 \ubc0f \uace0\uae09 \uc751\uc6a9 \ubd84\uc57c"},"content":{"rendered":"<p class=\"wp-block-paragraph\">\ubc18\ub3c4\uccb4 \uc7a5\uce58\uac00 \ub354 \uc791\uc740 \ub178\ub4dc, \ub354 \ub192\uc740 \uc9d1\uc801\ub3c4, \ub354 \ub192\uc740 \ucc98\ub9ac \uc815\ubc00\ub3c4\ub97c \ud5a5\ud574 \uacc4\uc18d \ubc1c\uc804\ud568\uc5d0 \ub530\ub77c \ubc18\ub3c4\uccb4 \uc7a5\ube44 \ub0b4\ubd80\uc758 \ucd08\uccad\uc815, \ub0b4\uc5f4\uc131, \ud50c\ub77c\uc988\ub9c8 \uc548\uc815\uc131\uc744 \uac16\ucd98 \uc18c\uc7ac\uc5d0 \ub300\ud55c \uc218\uc694\uac00 \ud06c\uac8c \uc99d\uac00\ud588\uc2b5\ub2c8\ub2e4. \ucca8\ub2e8 \uc5d4\uc9c0\ub2c8\uc5b4\ub9c1 \uc138\ub77c\ubbf9 \uc911\uc5d0\uc11c\ub3c4 \uace0\uc21c\ub3c4 \uc54c\ub8e8\ubbf8\ub098 \uc138\ub77c\ubbf9(Al\u2082O\u2083)\uc740 \ubc18\ub3c4\uccb4 \uc81c\uc870 \uc2dc\uc2a4\ud15c \uc804\ubc18\uc5d0 \uac78\uccd0 \uac00\uc7a5 \ub110\ub9ac \uc0ac\uc6a9\ub418\ub294 \uc18c\uc7ac \uc911 \ud558\ub098\uc785\ub2c8\ub2e4.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\ud50c\ub77c\uc988\ub9c8 \uc5d0\uce6d \ucc54\ubc84\ubd80\ud130 \uc6e8\uc774\ud37c \ucc98\ub9ac \uc2dc\uc2a4\ud15c \ubc0f \uc5f4\ucc98\ub9ac \uc7a5\ube44\uc5d0 \uc774\ub974\uae30\uae4c\uc9c0 \uc54c\ub8e8\ubbf8\ub098 \uc138\ub77c\ubbf9 \ubd80\ud488\uc740 \uc5f4\uc545\ud55c \uc791\ub3d9 \uc870\uac74\uc5d0\uc11c\ub3c4 \ub6f0\uc5b4\ub09c \uc804\uae30 \uc808\uc5f0\uc131, \uae30\uacc4\uc801 \uc548\uc815\uc131, \ub0b4\ub9c8\ubaa8\uc131 \ubc0f \ubd80\uc2dd \ubc29\uc9c0 \uae30\ub2a5\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\uc624\ub298, <a href=\"https:\/\/www.xkh-ceramics.com\/ko\/%ec%a0%9c%ed%92%88\/\" data-type=\"page\" data-id=\"1921\">\uace0\uc21c\ub3c4 \uc54c\ub8e8\ubbf8\ub098 \uc138\ub77c\ubbf9<\/a> \ub294 \uc5d0\uce6d \uc2dc\uc2a4\ud15c, \uc99d\ucc29 \ud234, CMP \ud50c\ub7ab\ud3fc, \uc774\uc628 \uc8fc\uc785 \uc2dc\uc2a4\ud15c, \ud655\uc0b0\ub85c, \uc6e8\uc774\ud37c \uc774\uc1a1 \ubaa8\ub4c8 \ub4f1 \ubc18\ub3c4\uccb4 \uc81c\uc870 \uc7a5\ube44\uc5d0 \uad11\ubc94\uc704\ud558\uac8c \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/p>\n\n\n\n<figure class=\"wp-block-image aligncenter size-full\"><img fetchpriority=\"high\" decoding=\"async\" width=\"1000\" height=\"300\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/AL2O3.jpg\" alt=\"\" class=\"wp-image-2148\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/AL2O3.jpg 1000w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/AL2O3-300x90.jpg 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/AL2O3-768x230.jpg 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/AL2O3-18x5.jpg 18w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/AL2O3-600x180.jpg 600w\" sizes=\"(max-width: 1000px) 100vw, 1000px\" \/><\/figure>\n\n\n\n<h1 class=\"wp-block-heading\">\ubc18\ub3c4\uccb4 \uc81c\uc870\uc5d0\uc11c \uc54c\ub8e8\ubbf8\ub098 \uc138\ub77c\ubbf9\uc774 \uc911\uc694\ud55c \uc774\uc720<\/h1>\n\n\n\n<p class=\"wp-block-paragraph\">\ubc18\ub3c4\uccb4 \uc81c\uc870\uc5d0\ub294 \ub2e4\uc74c\uacfc \uac19\uc774 \uace0\ub3c4\ub85c \uc81c\uc5b4\ub418\ub294 \uc5ec\ub7ec \uacf5\uc815\uc774 \ud3ec\ud568\ub429\ub2c8\ub2e4:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\ud50c\ub77c\uc988\ub9c8 \uc5d0\uce6d<\/li>\n\n\n\n<li>\ubc15\ub9c9 \uc99d\ucc29<\/li>\n\n\n\n<li>\ud3ec\ud1a0\ub9ac\uc18c\uadf8\ub798\ud53c<\/li>\n\n\n\n<li>\ud654\ud559\uc801 \uae30\uacc4 \uc5f0\ub9c8(CMP)<\/li>\n\n\n\n<li>\uc774\uc628 \uc8fc\uc785<\/li>\n\n\n\n<li>\uc5f4 \uc5b4\ub2d0\ub9c1<\/li>\n\n\n\n<li>\uc0b0\ud654 \ubc0f \ud655\uc0b0<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\uc774\ub7ec\ud55c \ud504\ub85c\uc138\uc2a4\uc5d0\uc11c\ub294 \ub0b4\ubd80 \uc7a5\ube44 \uad6c\uc131 \uc694\uc18c\uac00 \ub178\ucd9c\ub429\ub2c8\ub2e4:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\uace0\uc5d0\ub108\uc9c0 \ud50c\ub77c\uc988\ub9c8<\/li>\n\n\n\n<li>\uc9c4\uacf5 \ud658\uacbd<\/li>\n\n\n\n<li>\ubd80\uc2dd\uc131 \uac00\uc2a4 \ubc0f \ud654\ud559 \ubb3c\uc9c8<\/li>\n\n\n\n<li>\ub192\uc740 \uc628\ub3c4<\/li>\n\n\n\n<li>\uae30\uacc4\uc801 \ub9c8\ubaa8 \ubc0f \uc9c4\ub3d9<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\uae30\uc874\uc758 \uae08\uc18d \uc18c\uc7ac\ub294 \uc624\uc5fc \uc704\ud5d8, \uc5f4\ud33d\ucc3d \ub610\ub294 \ud654\ud559\uc801 \ubd88\uc548\uc815\uc131 \ub54c\ubb38\uc5d0 \uc774\ub7ec\ud55c \ud658\uacbd\uc5d0\uc11c \uc5b4\ub824\uc6c0\uc744 \uacaa\ub294 \uacbd\uc6b0\uac00 \ub9ce\uc2b5\ub2c8\ub2e4. \uace0\uc21c\ub3c4 \uc54c\ub8e8\ubbf8\ub098 \uc138\ub77c\ubbf9\uc740 \uace0\uc720\ud55c \ud2b9\uc131 \uc870\ud569\uc744 \ud1b5\ud574 \uc774\ub7ec\ud55c \ub9ce\uc740 \ubb38\uc81c\ub97c \ud574\uacb0\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<h1 class=\"wp-block-heading\">\uace0\uc21c\ub3c4 \uc54c\ub8e8\ubbf8\ub098 \uc138\ub77c\ubbf9\uc758 \uc8fc\uc694 \ud2b9\uc131<\/h1>\n\n\n\n<p class=\"wp-block-paragraph\">\ubc18\ub3c4\uccb4 \uc7a5\ube44\uc5d0 \uc0ac\uc6a9\ub418\ub294 \uace0\uc21c\ub3c4 \uc54c\ub8e8\ubbf8\ub098\ub294 \uc77c\ubc18\uc801\uc73c\ub85c 99.5% \uc774\uc0c1\uc758 \uc21c\ub3c4\ub97c \uc81c\uacf5\ud569\ub2c8\ub2e4:<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">\ub6f0\uc5b4\ub09c \uc804\uae30 \uc808\uc5f0\uc131<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\uc54c\ub8e8\ubbf8\ub098\ub294 \ub192\uc740 \uc628\ub3c4\uc5d0\uc11c\ub3c4 \ub192\uc740 \uc804\uae30 \uc800\ud56d\uc744 \uc720\uc9c0\ud558\ubbc0\ub85c \ud50c\ub77c\uc988\ub9c8 \ucc54\ubc84 \ubc0f \uc815\uc804\uae30 \uc2dc\uc2a4\ud15c\uc5d0 \uc774\uc0c1\uc801\uc785\ub2c8\ub2e4.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">\ub6f0\uc5b4\ub09c \ud50c\ub77c\uc988\ub9c8 \ub0b4\uc131<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\uc774 \uc18c\uc7ac\ub294 \ubd88\uc18c \ubc0f \uc5fc\uc18c \uae30\ubc18 \ud658\uacbd\uc5d0\uc11c \ud50c\ub77c\uc988\ub9c8 \uce68\uc2dd \ubc0f \ud654\ud559\uc801 \uacf5\uaca9\uc5d0 \ub300\ud55c \uac15\ub825\ud55c \uc800\ud56d\uc131\uc744 \ubcf4\uc5ec\uc90d\ub2c8\ub2e4.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">\ub192\uc740 \uae30\uacc4\uc801 \uac15\ub3c4<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\uc54c\ub8e8\ubbf8\ub098 \uc138\ub77c\ubbf9\uc740 \uae4c\ub2e4\ub85c\uc6b4 \uc791\ub3d9 \uc870\uac74\uc5d0\uc11c\ub3c4 \ub6f0\uc5b4\ub09c \uac15\uc131, \uacbd\ub3c4 \ubc0f \uad6c\uc870\uc801 \uc548\uc815\uc131\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">\ub6f0\uc5b4\ub09c \ub0b4\ub9c8\ubaa8\uc131<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\ub0ae\uc740 \ub9c8\ubaa8 \ud2b9\uc131\uc73c\ub85c \uc778\ud574 \uc54c\ub8e8\ubbf8\ub098\ub294 \uc6c0\uc9c1\uc774\ub294 \uae30\uacc4 \uc5b4\uc148\ube14\ub9ac \ubc0f \uc6e8\uc774\ud37c \uc811\ucd09 \ubd80\ud488\uc5d0 \uc801\ud569\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">\ub192\uc740 \uc628\ub3c4 \uc548\uc815\uc131<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\uc54c\ub8e8\ubbf8\ub098\ub294 \ubc18\ub3c4\uccb4 \uc7a5\ube44\uc5d0\uc11c \ud754\ud788 \ubcfc \uc218 \uc788\ub294 \uc9c4\uacf5 \ubc0f \uace0\uc628 \ucc98\ub9ac \ud658\uacbd\uc5d0\uc11c\ub3c4 \uc548\uc815\uc801\uc73c\ub85c \uc791\ub3d9\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<h1 class=\"wp-block-heading\">\ubc18\ub3c4\uccb4 \uacf5\uc815\uc5d0\uc11c \uc54c\ub8e8\ubbf8\ub098 \uc138\ub77c\ubbf9\uc758 \uc8fc\uc694 \uc751\uc6a9 \ubd84\uc57c<\/h1>\n\n\n\n<h2 class=\"wp-block-heading\">1. \ud50c\ub77c\uc988\ub9c8 \uc5d0\uce6d \uc2dc\uc2a4\ud15c<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\ud50c\ub77c\uc988\ub9c8 \uc5d0\uce6d \uc7a5\ube44\uc5d0\ub294 \uc77c\ubc18\uc801\uc73c\ub85c \uc54c\ub8e8\ubbf8\ub098 \uc138\ub77c\ubbf9\uc774 \uc0ac\uc6a9\ub429\ub2c8\ub2e4:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\ucc54\ubc84 \ub77c\uc774\ub108<\/li>\n\n\n\n<li>\ud50c\ub77c\uc988\ub9c8 \uc274\ub4dc<\/li>\n\n\n\n<li>\ucd08\uc810 \ub9c1<\/li>\n\n\n\n<li>\uc5e3\uc9c0 \ubcf4\ud638 \uad6c\uc131 \uc694\uc18c<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\uc774\ub7ec\ud55c \ubd80\ud488\uc740 \uc624\uc5fc\uc744 \uc904\uc774\uace0 \ud50c\ub77c\uc988\ub9c8 \uce68\uc2dd\uc73c\ub85c\ubd80\ud130 \ucc54\ubc84 \uad6c\uc870\ub97c \ubcf4\ud638\ud558\ub294 \ub370 \ub3c4\uc6c0\uc774 \ub429\ub2c8\ub2e4.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">2. \ubc15\ub9c9 \uc99d\ucc29 \uc7a5\ube44<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">CVD, PECVD \ubc0f PVD \uc2dc\uc2a4\ud15c\uc5d0\uc11c \uc54c\ub8e8\ubbf8\ub098 \uc138\ub77c\ubbf9\uc740 \ub110\ub9ac \uc0ac\uc6a9\ub429\ub2c8\ub2e4:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\uc815\uc804\uae30 \ucc99(ESC)<\/li>\n\n\n\n<li>\uc138\ub77c\ubbf9 \ud788\ud130<\/li>\n\n\n\n<li>\ucc54\ubc84 \ub2e8\uc5f4 \uad6c\uc870<\/li>\n\n\n\n<li>\uac00\uc2a4 \ubd84\ubc30 \uc5b4\uc148\ube14\ub9ac<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\uc5f4 \uc548\uc815\uc131\uacfc \ub2e8\uc5f4 \uc131\ub2a5\uc740 \uade0\uc77c\ud55c \uc99d\ucc29 \uc870\uac74\uc744 \uc720\uc9c0\ud558\ub294 \ub370 \ub3c4\uc6c0\uc774 \ub429\ub2c8\ub2e4.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">3. \ud654\ud559\uc801 \uae30\uacc4 \uc5f0\ub9c8(CMP)<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">CMP \ud504\ub85c\uc138\uc2a4\uc5d0\ub294 \ub2e4\uc74c\uacfc \uac19\uc740 \uad6c\uc131 \uc694\uc18c\uac00 \ud544\uc694\ud569\ub2c8\ub2e4:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\ub0ae\uc740 \ub9c8\ubaa8\uc728<\/li>\n\n\n\n<li>\ub0b4\ud654\ud559\uc131<\/li>\n\n\n\n<li>\uce58\uc218 \uc548\uc815\uc131<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">CMP \uc7a5\ube44\uc5d0 \uc0ac\uc6a9\ub418\ub294 \uc54c\ub8e8\ubbf8\ub098 \uc138\ub77c\ubbf9 \ubd80\ud488\uc5d0\ub294 \ub2e4\uc74c\uc774 \ud3ec\ud568\ub429\ub2c8\ub2e4:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\uc5f0\ub9c8 \ud50c\ub808\uc774\ud2b8<\/li>\n\n\n\n<li>\uc9c4\uacf5 \ucc99<\/li>\n\n\n\n<li>\ud314 \uc62e\uae30\uae30<\/li>\n\n\n\n<li>\uac00\uc774\ub4dc \uad6c\uc870<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">4. \uc774\uc628 \uc8fc\uc785 \ubc0f \uc5f4 \ucc98\ub9ac<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\uc774\uc628 \uc8fc\uc785, \uc5b4\ub2d0\ub9c1, \uc0b0\ud654 \ubc0f \ud655\uc0b0 \uc2dc\uc2a4\ud15c\uc5d0\uc11c \uc54c\ub8e8\ubbf8\ub098 \uc138\ub77c\ubbf9\uc740 \uadf8 \ud2b9\uc131 \ub54c\ubb38\uc5d0 \uc0ac\uc6a9\ub429\ub2c8\ub2e4:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\ub0b4\uc5f4\uc131<\/li>\n\n\n\n<li>\uc804\uae30 \uc808\uc5f0<\/li>\n\n\n\n<li>\uad6c\uc870\uc801 \uc2e0\ub8b0\uc131<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\uc774\ub7ec\ud55c \ud2b9\uc131\uc740 \uace0\uc628 \uc870\uac74\uc5d0\uc11c \uc548\uc815\uc801\uc778 \uc6e8\uc774\ud37c \ucc98\ub9ac\ub97c \uc9c0\uc6d0\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<h1 class=\"wp-block-heading\">\ubc18\ub3c4\uccb4 \uc7a5\ube44\uc5d0 \uc0ac\uc6a9\ub418\ub294 \uc77c\ubc18\uc801\uc778 \uc54c\ub8e8\ubbf8\ub098 \uc138\ub77c\ubbf9 \ubd80\ud488<\/h1>\n\n\n\n<h2 class=\"wp-block-heading\">\ub9c1 \ubc0f \uc6d0\ud1b5\ud615 \ubd80\ud488<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\uc774 \uce74\ud14c\uace0\ub9ac\uc5d0\ub294 \ub2e4\uc74c\uc774 \ud3ec\ud568\ub429\ub2c8\ub2e4:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\ucd08\uc810 \ub9c1<\/li>\n\n\n\n<li>\uc5e3\uc9c0 \ub9c1<\/li>\n\n\n\n<li>\ubcf4\ud638 \ub9c1<\/li>\n\n\n\n<li>\ucc54\ubc84 \ub77c\uc774\ub108<\/li>\n\n\n\n<li>\ub2e8\uc5f4 \uc2e4\ub9b0\ub354<\/li>\n\n\n\n<li>\uc5f4 \ubcf4\ud638 \ud29c\ube0c<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\uc774\ub7ec\ud55c \uad6c\uc131 \uc694\uc18c\ub294 \uc8fc\ub85c \ub2e4\uc74c\uacfc \uac19\uc740 \uc6a9\ub3c4\ub85c \uc0ac\uc6a9\ub429\ub2c8\ub2e4:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\ud50c\ub77c\uc988\ub9c8 \ubd84\ud3ec \uc81c\uc5b4<\/li>\n\n\n\n<li>\ucc54\ubc84 \uad6c\uc870 \ubcf4\ud638<\/li>\n\n\n\n<li>\ud504\ub85c\uc138\uc2a4 \uc548\uc815\uc131 \ud5a5\uc0c1<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">\uac00\uc2a4 \ud750\ub984 \uad00\ub9ac \uad6c\uc131 \uc694\uc18c<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">\uc138\ub77c\ubbf9 \ub178\uc990<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\uc99d\ucc29 \ubc0f \uc2dd\uac01 \ucc54\ubc84\uc5d0\uc11c \uacf5\uc815 \uac00\uc2a4 \uacf5\uae09 \ubc0f \ubc29\ud5a5\uc131 \uac00\uc2a4 \uc81c\uc5b4\uc5d0 \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">\uac00\uc2a4 \ubd84\ubc30\ud310<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\uc6e8\uc774\ud37c \ud45c\uba74 \uc804\uccb4\uc5d0 \uac78\uccd0 \uade0\uc77c\ud55c \uac00\uc2a4 \ud750\ub984\uacfc \uc548\uc815\uc801\uc778 \ud50c\ub77c\uc988\ub9c8 \ubc00\ub3c4\ub97c \uc720\uc9c0\ud558\ub3c4\ub85d \uc9c0\uc6d0\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">\ub178\uc990 \ucee4\ubc84<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\uac00\uc2a4 \uc8fc\uc785 \uc5b4\uc148\ube14\ub9ac\ub97c \uc9c0\uc6d0\ud558\ub294 \ub3d9\uc2dc\uc5d0 \ucc54\ubc84 \ub0b4\ubd80\uc5d0 \uc794\ub958\ubb3c\uc774 \uc313\uc774\ub294 \uac83\uc744 \uc904\uc785\ub2c8\ub2e4.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">\uad6c\uc870 \ubc0f \uc9c0\uc6d0 \uad6c\uc131 \uc694\uc18c<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">\uc6e8\uc774\ud37c \uc9c0\uc6d0 \ud50c\ub7ab\ud3fc<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\uacf5\uc815 \uc911 \uc6e8\uc774\ud37c\uc758 \uce90\ub9ac\uc5b4 \uad6c\uc870\ub85c \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">\ub9ac\ud504\ud2b8 \ud540<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\ubc18\ub3c4\uccb4 \ucc54\ubc84 \ub0b4\ubd80\uc5d0\uc11c \uc6e8\uc774\ud37c \ub85c\ub529 \ubc0f \uc5b8\ub85c\ub529\uc744 \ud65c\uc131\ud654\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">\uc138\ub77c\ubbf9 \uac00\uc774\ub4dc \ub808\uc77c \ubc0f \ubca0\uc5b4\ub9c1<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\ub0b4\ub9c8\ubaa8\uc131\uacfc \ub2e8\uc5f4\uc131\uc744 \uc720\uc9c0\ud558\uba74\uc11c \uc815\ubc00\ud55c \uae30\uacc4\uc801 \uc6c0\uc9c1\uc784\uc744 \uc9c0\uc6d0\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">\uc138\ub77c\ubbf9 \ud328\uc2a4\ub108<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\uc138\ub77c\ubbf9 \ub098\uc0ac \ubc0f \uace0\uc815 \ubd80\ud488\uc740 \uace0\uc628 \ub610\ub294 \uc804\uae30\uc801\uc73c\ub85c \uace0\ub9bd\ub41c \uc601\uc5ed\uc5d0\uc11c \uae08\uc18d\uc744 \ub300\uccb4\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">\uc6e8\uc774\ud37c \ucde8\uae09 \ubc0f \uc808\uc5f0 \ubd80\ud488<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">\uc6e8\uc774\ud37c \ud578\ub4e4\ub9c1 \uc554<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\uace0\uac15\ub3c4 \uc138\ub77c\ubbf9 \ub85c\ubd07 \ud314\uc740 \uc9c4\uacf5 \ud658\uacbd \ub0b4\uc5d0\uc11c \uc6e8\uc774\ud37c\ub97c \uc774\uc1a1\ud558\ub294 \ub370 \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">\uc138\ub77c\ubbf9 \ub2e8\uc5f4\ud310<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\ucc54\ubc84 \uad6c\uc870\ubb3c \uc0ac\uc774\uc758 \uc6d0\uce58 \uc54a\ub294 \uc804\uae30 \uc804\ub3c4\ub97c \ubc29\uc9c0\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">\uc138\ub77c\ubbf9 \ubc29\uc5f4 \ubd80\ud488<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\uc5f4 \uad00\ub9ac \ubc0f \uad6d\uc18c \ub0c9\uac01\uc744 \uc9c0\uc6d0\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<h1 class=\"wp-block-heading\">\uace0\uae09 \uc54c\ub8e8\ubbf8\ub098 \uc138\ub77c\ubbf9 \ubaa8\ub4c8<\/h1>\n\n\n\n<h2 class=\"wp-block-heading\">\uc9c4\uacf5 \ucc99<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\uc9c4\uacf5 \ucc99\uc740 \uc9c4\uacf5 \ud761\uc785\uc744 \ud1b5\ud574 \uc6e8\uc774\ud37c\ub97c \ud3c9\ud3c9\ud558\uac8c \uc720\uc9c0\ud569\ub2c8\ub2e4:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\uc5d0\uce6d<\/li>\n\n\n\n<li>CMP<\/li>\n\n\n\n<li>\uac80\uc0ac \ud504\ub85c\uc138\uc2a4<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\ud1b5\ud569 \ub0c9\uac01 \ucc44\ub110\uc740 \uc5f4 \uc81c\uc5b4 \ubc0f \ud504\ub85c\uc138\uc2a4 \uc77c\uad00\uc131\uc744 \uac1c\uc120\ud558\ub294 \ub370 \ub3c4\uc6c0\uc774 \ub429\ub2c8\ub2e4.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">\uc815\uc804\uae30 \ucc99(ESC)<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\uc815\uc804\uae30 \ucc99\uc740 \uc815\uc804\uae30\ub825\uc744 \uc0ac\uc6a9\ud558\uc5ec \ud50c\ub77c\uc988\ub9c8 \ucc98\ub9ac \uc911\uc5d0 \uc6e8\uc774\ud37c\ub97c \uace0\uc815\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\uc54c\ub8e8\ubbf8\ub098 \uc138\ub77c\ubbf9\uc774 \ub110\ub9ac \uc0ac\uc6a9\ub418\ub294 \uc774\uc720\ub294 \ub2e4\uc74c\uacfc \uac19\uc2b5\ub2c8\ub2e4:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\uc804\uae30 \uc808\uc5f0<\/li>\n\n\n\n<li>\ud50c\ub77c\uc988\ub9c8 \uc800\ud56d<\/li>\n\n\n\n<li>\uc5f4 \uc548\uc815\uc131<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">ESC \uc2dc\uc2a4\ud15c\uc740 \uace0\uae09 \uc5d0\uce6d \ubc0f \uc99d\ucc29 \uc7a5\ube44\uc5d0 \ud544\uc218\uc801\uc785\ub2c8\ub2e4.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">\uc138\ub77c\ubbf9 \ud788\ud130<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\uc138\ub77c\ubbf9 \ud788\ud130\ub294 \uc548\uc815\uc801\uc774\uace0 \uade0\uc77c\ud55c \uc6e8\uc774\ud37c \uac00\uc5f4\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\uc99d\ucc29 \uc2dc\uc2a4\ud15c<\/li>\n\n\n\n<li>\uc5b4\ub2d0\ub9c1 \uc7a5\ube44<\/li>\n\n\n\n<li>\uc5f4\ucc98\ub9ac \ub3c4\uad6c<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\uc54c\ub8e8\ubbf8\ub098\uac00 \ub110\ub9ac \uc0ac\uc6a9\ub418\uc9c0\ub9cc, \ub354 \ub192\uc740 \uc5f4 \uc804\ub3c4\uc131\uc774 \ud544\uc694\ud55c \uacbd\uc6b0 \uc9c8\ud654 \uc54c\ub8e8\ubbf8\ub284(AlN) \ud788\ud130\ub97c \uc120\ud0dd\ud558\ub294 \uacbd\uc6b0\uac00 \ub9ce\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">CMP \uc5f0\ub9c8 \ud50c\ub808\uc774\ud2b8<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\uc54c\ub8e8\ubbf8\ub098 \uc5f0\ub9c8 \ubd80\ud488\uc740 \uc7a5\uc2dc\uac04 \uc5f0\ub9c8 \uc791\uc5c5 \uc2dc\uc5d0\ub3c4 \uc6b0\uc218\ud55c \ud3c9\ud0c4\ub3c4\uc640 \ub0b4\ub9c8\ubaa8\uc131\uc744 \uc720\uc9c0\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<h1 class=\"wp-block-heading\">\ubc18\ub3c4\uccb4 \uc7a5\ube44\uc5d0 \uace0\uc21c\ub3c4 \uc138\ub77c\ubbf9\uc744 \uc0ac\uc6a9\ud558\ub294 \uc774\uc720<\/h1>\n\n\n\n<p class=\"wp-block-paragraph\">\uae30\uc874 \uc5d4\uc9c0\ub2c8\uc5b4\ub9c1 \uc18c\uc7ac\uc5d0 \ube44\ud574 \ucca8\ub2e8 \uc138\ub77c\ubbf9\uc740 \uba87 \uac00\uc9c0 \uc7a5\uc810\uc774 \uc788\uc2b5\ub2c8\ub2e4:<\/p>\n\n\n\n<figure class=\"wp-block-table\"><table class=\"has-fixed-layout\"><thead><tr><th>\uc18d\uc131<\/th><th>\uc54c\ub8e8\ubbf8\ub098 \uc138\ub77c\ubbf9\uc758 \uc7a5\uc810<\/th><\/tr><\/thead><tbody><tr><td>\uc804\uae30 \uc808\uc5f0<\/td><td>\uc6b0\uc218<\/td><\/tr><tr><td>\ud50c\ub77c\uc988\ub9c8 \uc800\ud56d<\/td><td>\ub192\uc74c<\/td><\/tr><tr><td>\ub0b4\ub9c8\ubaa8\uc131<\/td><td>\uc6b0\uc218<\/td><\/tr><tr><td>\uc5f4 \uc548\uc815\uc131<\/td><td>Strong<\/td><\/tr><tr><td>\ub0b4\ud654\ud559\uc131<\/td><td>\uc6b0\uc218<\/td><\/tr><tr><td>\ud30c\ud2f0\ud074 \uc81c\uc5b4<\/td><td>\ub0ae\uc740 \uc624\uc5fc\ub3c4<\/td><\/tr><tr><td>\uc9c4\uacf5 \ud638\ud658\uc131<\/td><td>\uc6b0\uc218<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<p class=\"wp-block-paragraph\">\uc774\ub7ec\ud55c \uc7a5\uc810\uc73c\ub85c \uc778\ud574 \uc54c\ub8e8\ubbf8\ub098 \uc138\ub77c\ubbf9\uc740 \ucd5c\uc2e0 \ubc18\ub3c4\uccb4 \uc7a5\ube44\uc5d0 \uc5c6\uc5b4\uc11c\ub294 \uc548 \ub420 \ud544\uc218 \uc694\uc18c\uc785\ub2c8\ub2e4.<\/p>\n\n\n\n<h1 class=\"wp-block-heading\">\uc2dc\uc7a5 \ub3d9\ud5a5 \ubc0f \uc5c5\uacc4 \uc804\ub9dd<\/h1>\n\n\n\n<p class=\"wp-block-paragraph\">\ubc18\ub3c4\uccb4 \uc81c\uc870\ub294 \uacc4\uc18d \ubc1c\uc804\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\uace0\uae09 \ud504\ub85c\uc138\uc2a4 \ub178\ub4dc<\/li>\n\n\n\n<li>\ub354 \ub192\uc740 \uc6e8\uc774\ud37c \ucc98\ub9ac\ub7c9<\/li>\n\n\n\n<li>\ubcf4\ub2e4 \uacf5\uaca9\uc801\uc778 \ud50c\ub77c\uc988\ub9c8 \ud654\ud559 \ubb3c\uc9c8<\/li>\n\n\n\n<li>\ub354 \uae68\ub057\ud55c \ud504\ub85c\uc138\uc2a4 \ud658\uacbd<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\uc815\ubc00 \uc138\ub77c\ubbf9 \ubd80\ud488\uc5d0 \ub300\ud55c \uc218\uc694\ub294 \uafb8\uc900\ud788 \uc99d\uac00\ud560 \uac83\uc73c\ub85c \uc608\uc0c1\ub429\ub2c8\ub2e4.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\ubc18\ub3c4\uccb4 \ub4f1\uae09 \uc54c\ub8e8\ubbf8\ub098 \ubd80\ud488\uc744 \uc81c\uc870\ud558\ub824\uba74 \ub2e4\uc74c\uc774 \ud544\uc694\ud569\ub2c8\ub2e4:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\uace0\uc21c\ub3c4 \uc6d0\ub8cc<\/li>\n\n\n\n<li>\uc815\ubc00 \uac00\uacf5 \uae30\ub2a5<\/li>\n\n\n\n<li>\uc5c4\uaca9\ud55c \uc624\uc5fc \uc81c\uc5b4<\/li>\n\n\n\n<li>\uace0\uae09 \uc138\ub77c\ubbf9 \ucc98\ub9ac \uae30\uc220<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\uc774\ub7ec\ud55c \ub192\uc740 \uae30\uc220 \uc7a5\ubcbd\uc73c\ub85c \uc778\ud574 \ubc18\ub3c4\uccb4 \uc138\ub77c\ubbf9 \ubd80\ud488\uc740 \uc5ec\uc804\ud788 \uc804\ubb38\uc801\uc774\uace0 \uae30\uc220 \uc9d1\uc57d\uc801\uc778 \uc2dc\uc7a5\uc73c\ub85c \ub0a8\uc544 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<h1 class=\"wp-block-heading\">\uacb0\ub860<\/h1>\n\n\n\n<p class=\"wp-block-paragraph\">\uace0\uc21c\ub3c4 \uc54c\ub8e8\ubbf8\ub098 \uc138\ub77c\ubbf9 \ubd80\ud488\uc740 \ubc18\ub3c4\uccb4 \uc81c\uc870 \uc7a5\ube44 \uc804\ubc18\uc5d0 \uac78\uccd0 \ud544\uc218\uc801\uc778 \uc7ac\ub8cc\uac00 \ub418\uc5c8\uc2b5\ub2c8\ub2e4. \ub6f0\uc5b4\ub09c \uc808\uc5f0 \uc131\ub2a5, \ud50c\ub77c\uc988\ub9c8 \uc800\ud56d\uc131, \ub0b4\ub9c8\ubaa8\uc131, \uc5f4 \uc548\uc815\uc131 \ub355\ubd84\uc5d0 \ubc18\ub3c4\uccb4 \uacf5\uad6c\ub294 \uadf9\ud55c\uc758 \uacf5\uc815 \ud658\uacbd\uc5d0\uc11c\ub3c4 \uc548\uc815\uc801\uc73c\ub85c \uc791\ub3d9\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\ud50c\ub77c\uc988\ub9c8 \uc5d0\uce6d \ucc54\ubc84\uc640 \uc815\uc804\uae30 \ucc99\ubd80\ud130 \uc6e8\uc774\ud37c \ud578\ub4e4\ub9c1 \uc554\uacfc \uc138\ub77c\ubbf9 \ud788\ud130\uc5d0 \uc774\ub974\uae30\uae4c\uc9c0 \uc54c\ub8e8\ubbf8\ub098 \uc138\ub77c\ubbf9\uc740 \uc548\uc815\uc801\uc774\uace0 \uc815\ubc00\ud558\uba70 \uc624\uc5fc\uc774 \uc81c\uc5b4\ub41c \ubc18\ub3c4\uccb4 \uc0dd\uc0b0\uc744 \uac00\ub2a5\ud558\uac8c \ud558\ub294 \ub370 \uc911\uc694\ud55c \uc5ed\ud560\uc744 \uacc4\uc18d\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\ubc18\ub3c4\uccb4 \uae30\uc220\uc774 \uacc4\uc18d \ubc1c\uc804\ud568\uc5d0 \ub530\ub77c \ubc18\ub3c4\uccb4 \uc7a5\ube44\uc5d0\uc11c \ucca8\ub2e8 \uc138\ub77c\ubbf9 \uc18c\uc7ac\uc758 \uc911\uc694\uc131\uc740 \uacc4\uc18d \ub192\uc544\uc9c8 \uac83\uc785\ub2c8\ub2e4.<\/p>","protected":false},"excerpt":{"rendered":"<p>As semiconductor devices continue evolving toward smaller nodes, higher integration density, and greater processing precision, the demand for ultra-clean, heat-resistant, and plasma-stable materials inside semiconductor equipment has increased significantly. Among advanced engineering ceramics, high-purity alumina ceramic (Al\u2082O\u2083) remains one of the most widely used materials across semiconductor manufacturing systems. From plasma etching chambers to wafer [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":2148,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[3],"tags":[269,268,266,267,270,271,265],"class_list":["post-2147","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-industry-news","tag-and-wafer-handling-systems-learn-about-their-properties","tag-ceramic-heaters","tag-cmp","tag-deposition","tag-discover-how-high-purity-alumina-ceramic-components-are-used-in-semiconductor-manufacturing-equipment-including-plasma-etching","tag-electrostatic-chucks","tag-functions"],"_links":{"self":[{"href":"https:\/\/www.xkh-ceramics.com\/ko\/wp-json\/wp\/v2\/posts\/2147","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.xkh-ceramics.com\/ko\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.xkh-ceramics.com\/ko\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ko\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ko\/wp-json\/wp\/v2\/comments?post=2147"}],"version-history":[{"count":1,"href":"https:\/\/www.xkh-ceramics.com\/ko\/wp-json\/wp\/v2\/posts\/2147\/revisions"}],"predecessor-version":[{"id":2149,"href":"https:\/\/www.xkh-ceramics.com\/ko\/wp-json\/wp\/v2\/posts\/2147\/revisions\/2149"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ko\/wp-json\/wp\/v2\/media\/2148"}],"wp:attachment":[{"href":"https:\/\/www.xkh-ceramics.com\/ko\/wp-json\/wp\/v2\/media?parent=2147"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ko\/wp-json\/wp\/v2\/categories?post=2147"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ko\/wp-json\/wp\/v2\/tags?post=2147"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}