{"id":2142,"date":"2026-05-13T01:58:38","date_gmt":"2026-05-13T01:58:38","guid":{"rendered":"https:\/\/www.xkh-ceramics.com\/?p=2142"},"modified":"2026-05-13T01:58:38","modified_gmt":"2026-05-13T01:58:38","slug":"advanced-ceramic-materials-in-semiconductor-manufacturing-high-purity-extreme-heat-resistance-and-ultra-hard-performance","status":"publish","type":"post","link":"https:\/\/www.xkh-ceramics.com\/ko\/advanced-ceramic-materials-in-semiconductor-manufacturing-high-purity-extreme-heat-resistance-and-ultra-hard-performance\/","title":{"rendered":"\ubc18\ub3c4\uccb4 \uc81c\uc870\uc5d0 \uc0ac\uc6a9\ub418\ub294 \ucca8\ub2e8 \uc138\ub77c\ubbf9 \uc7ac\ub8cc: \uace0\uc21c\ub3c4, \uadf9\ud55c\uc758 \ub0b4\uc5f4\uc131 \ubc0f \ucd08\uacbd\ub3c4 \uc131\ub2a5"},"content":{"rendered":"<p class=\"wp-block-paragraph\">\ubc18\ub3c4\uccb4 \uae30\uc220\uc774 \ub354 \uc791\uc740 \ub178\ub4dc, \ub354 \ub192\uc740 \uc9d1\uc801\ub3c4, \ub354 \ubcf5\uc7a1\ud55c \uc81c\uc870 \uacf5\uc815\uc744 \ud5a5\ud574 \uacc4\uc18d \ubc1c\uc804\ud568\uc5d0 \ub530\ub77c \ubc18\ub3c4\uccb4 \uc7a5\ube44 \ub0b4\ubd80\uc758 \ucca8\ub2e8 \uc18c\uc7ac\uc5d0 \ub300\ud55c \uc218\uc694\ub3c4 \uae09\uaca9\ud788 \uc99d\uac00\ud588\uc2b5\ub2c8\ub2e4. \ucd5c\uc2e0 \ubc18\ub3c4\uccb4 \uc81c\uc870 \ud658\uacbd\uc5d0\uc11c\ub294 \uce58\uc218 \uc548\uc815\uc131\uacfc \uc624\uc5fc \uc81c\uc5b4\ub97c \uc720\uc9c0\ud558\uba74\uc11c \uadf9\ud55c\uc758 \uc628\ub3c4, \ubd80\uc2dd\uc131 \ud50c\ub77c\uc988\ub9c8 \ub178\ucd9c, \ucd08\uccad\uc815 \uc9c4\uacf5 \uc870\uac74, \ub192\uc740 \uae30\uacc4\uc801 \uc751\ub825\uc744 \uacac\ub51c \uc218 \uc788\ub294 \uc18c\uc7ac\uac00 \ud544\uc694\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\uc624\ub298\ub0a0 \uc0ac\uc6a9 \uac00\ub2a5\ud55c \ub9ce\uc740 \uc18c\uc7ac \uc194\ub8e8\uc158 \uc911\uc5d0\uc11c \ucca8\ub2e8 \uc138\ub77c\ubbf9\uc740 \uae30\uacc4\uc801, \uc5f4\uc801, \uc804\uae30\uc801, \ud654\ud559\uc801 \ud2b9\uc131\uc758 \ud0c1\uc6d4\ud55c \uc870\ud569\uc73c\ub85c \uc778\ud574 \ubc18\ub3c4\uccb4 \uc81c\uc870 \uc7a5\ube44\uc5d0 \uc5c6\uc5b4\uc11c\ub294 \uc548 \ub420 \ud544\uc218 \uc694\uc18c\ub85c \uc790\ub9ac \uc7a1\uc558\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\uc6e8\uc774\ud37c \ucc98\ub9ac \uc2dc\uc2a4\ud15c\uacfc \uc5d0\uce6d \ucc54\ubc84\ubd80\ud130 \uc99d\ucc29 \uc7a5\ube44\uc640 \uc5f4\ucc98\ub9ac \uc6a9\uad11\ub85c\uc5d0 \uc774\ub974\uae30\uae4c\uc9c0 \ucca8\ub2e8 \uc138\ub77c\ubbf9 \ubd80\ud488\uc740 \ubc18\ub3c4\uccb4 \uc0dd\uc0b0 \uccb4\uc778 \uc804\ubc18\uc5d0 \uac78\uccd0 \ub110\ub9ac \uc0ac\uc6a9\ub418\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<figure class=\"wp-block-image aligncenter size-full\"><img fetchpriority=\"high\" decoding=\"async\" width=\"1000\" height=\"1000\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment.png\" alt=\"\" class=\"wp-image-2114\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment.png 1000w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-300x300.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-150x150.png 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-768x768.png 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-12x12.png 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-600x600.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-100x100.png 100w\" sizes=\"(max-width: 1000px) 100vw, 1000px\" \/><\/figure>\n\n\n\n<h1 class=\"wp-block-heading\">\ucca8\ub2e8 \uc138\ub77c\ubbf9\uc774 \ubc18\ub3c4\uccb4 \uc7a5\ube44\uc5d0 \ud544\uc218\uc801\uc778 \uc774\uc720<\/h1>\n\n\n\n<p class=\"wp-block-paragraph\">\ubc18\ub3c4\uccb4 \uc81c\uc870 \uc7a5\ube44\ub294 \uc810\uc810 \ub354 \uc815\ubc00\ud558\uace0 \uc815\uad50\ud574\uc9c0\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uae30\uc874\uc758 \uae08\uc18d \uc7ac\ub8cc\ub294 \ud50c\ub77c\uc988\ub9c8 \ucc98\ub9ac, \uace0\uc628 \uc5f4 \uc21c\ud658, \ud654\ud559\uc801\uc73c\ub85c \uacf5\uaca9\uc801\uc778 \ud658\uacbd\uc5d0\uc11c \ubc1c\uc0dd\ud558\ub294 \uac00\ud639\ud55c \uc870\uac74\uc5d0\uc11c \uc5b4\ub824\uc6c0\uc744 \uacaa\ub294 \uacbd\uc6b0\uac00 \ub9ce\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\uace0\uae09 \uc138\ub77c\ubbf9\uc740 \uba87 \uac00\uc9c0 \uc911\uc694\ud55c \uc774\uc810\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\ub9e4\uc6b0 \ub192\uc740 \uacbd\ub3c4 \ubc0f \ub0b4\ub9c8\ubaa8\uc131<\/li>\n\n\n\n<li>\ub6f0\uc5b4\ub09c \uc804\uae30 \uc808\uc5f0\uc131<\/li>\n\n\n\n<li>\ub6f0\uc5b4\ub09c \uc5f4 \uc548\uc815\uc131<\/li>\n\n\n\n<li>\ub0ae\uc740 \uc5f4 \ud33d\ucc3d<\/li>\n\n\n\n<li>\uc6b0\uc218\ud55c \ub0b4\uc2dd\uc131<\/li>\n\n\n\n<li>\ub0ae\uc740 \ud30c\ud2f0\ud074 \uc0dd\uc131<\/li>\n\n\n\n<li>\uc9c4\uacf5 \ud658\uacbd\uc5d0\uc11c\uc758 \ub192\uc740 \uce58\uc218 \uc548\uc815\uc131<\/li>\n\n\n\n<li>\ud50c\ub77c\uc988\ub9c8 \uce68\uc2dd\uc5d0 \ub300\ud55c \ub0b4\uc131<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\uc774\ub7ec\ud55c \ud2b9\uc131\uc73c\ub85c \uc778\ud574 \uc815\ubc00 \uc138\ub77c\ubbf9 \ubd80\ud488\uc740 \uad11\ubc94\uc704\ud558\uac8c \uc0ac\uc6a9\ub429\ub2c8\ub2e4:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\uc6e8\uc774\ud37c \ucc98\ub9ac \uc2dc\uc2a4\ud15c<\/li>\n\n\n\n<li>\uc5d0\uce6d \uc7a5\ube44<\/li>\n\n\n\n<li>\ub9ac\uc18c\uadf8\ub798\ud53c \uc2dc\uc2a4\ud15c<\/li>\n\n\n\n<li>\ud654\ud559 \uae30\uc0c1 \uc99d\ucc29(CVD) \uc7a5\ube44<\/li>\n\n\n\n<li>\ubb3c\ub9ac\uc801 \uae30\uc0c1 \uc99d\ucc29(PVD) \ucc54\ubc84<\/li>\n\n\n\n<li>\uc774\uc628 \uc8fc\uc785 \uc2dc\uc2a4\ud15c<\/li>\n\n\n\n<li>\ud655\uc0b0 \ubc0f \uc0b0\ud654 \uc6a9\uad11\ub85c<\/li>\n\n\n\n<li>CMP(\ud654\ud559\uc801 \uae30\uacc4 \uc5f0\ub9c8) \uc7a5\ube44<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\ub9ce\uc740 \ubc18\ub3c4\uccb4 \ud234\uc5d0\uc11c \ucca8\ub2e8 \uc138\ub77c\ubbf9 \ubd80\ud488\uc740 \ud575\uc2ec \uae30\ub2a5\uc131 \uc18c\uc7ac\uc758 \uc0c1\ub2f9 \ubd80\ubd84\uc744 \ucc28\uc9c0\ud558\uba70 \uacf5\uc815 \uc548\uc815\uc131, \uc218\uc728 \ubc0f \uc7a5\ube44 \uc218\uba85\uc5d0 \uc9c1\uc811\uc801\uc778 \uc601\ud5a5\uc744 \ubbf8\uce69\ub2c8\ub2e4.<\/p>\n\n\n\n<h1 class=\"wp-block-heading\">\ubc18\ub3c4\uccb4 \uc138\ub77c\ubbf9 \ubd80\ud488\uc758 \uae30\uc220\uc801 \uacfc\uc81c<\/h1>\n\n\n\n<p class=\"wp-block-paragraph\">\ubc18\ub3c4\uccb4 \uc0b0\uc5c5\uc758 \uc694\uad6c \uc0ac\ud56d\uc744 \ucda9\uc871\ud558\uae30 \uc704\ud574 \ucca8\ub2e8 \uc138\ub77c\ubbf9 \uc18c\uc7ac\ub294 \uc138 \uac00\uc9c0 \uc8fc\uc694 \uae30\uc220 \uc694\uad6c \uc0ac\ud56d\uc744 \ucda9\uc871\ud574\uc57c \ud569\ub2c8\ub2e4:<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">1. \uc7ac\ub8cc \uc131\ub2a5 \uc694\uad6c \uc0ac\ud56d<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\uc138\ub77c\ubbf9 \uc18c\uc7ac\ub294 \uc544\ub798 \uc870\uac74\uc5d0\uc11c \uc548\uc815\uc801\uc778 \uc131\ub2a5\uc744 \uc720\uc9c0\ud574\uc57c \ud569\ub2c8\ub2e4:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\ub192\uc740 \uc628\ub3c4<\/li>\n\n\n\n<li>\uae30\uacc4\uc801 \uc2a4\ud2b8\ub808\uc2a4<\/li>\n\n\n\n<li>\ud50c\ub77c\uc988\ub9c8 \ub178\ucd9c<\/li>\n\n\n\n<li>\uc0b0 \ubc0f \uc54c\uce7c\ub9ac \ubd80\uc2dd<\/li>\n\n\n\n<li>\uace0\uc8fc\ud30c \uc804\uae30 \ud658\uacbd<\/li>\n\n\n\n<li>\uc5f4 \ucda9\uaca9 \uc870\uac74<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\uc774\ub97c \uc704\ud574\uc11c\ub294 \uae30\uacc4\uc801, \uc5f4\uc801, \uc720\uc804\uccb4\uc801, \ud654\ud559\uc801 \ud2b9\uc131\uc758 \ucd5c\uc801\ud654\ub41c \uade0\ud615\uc774 \ud544\uc694\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">2. \ub2e8\ub2e8\ud558\uace0 \ubd80\uc11c\uc9c0\uae30 \uc26c\uc6b4 \uc7ac\ub8cc\uc758 \uc815\ubc00 \uac00\uacf5<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\uace0\uae09 \uc138\ub77c\ubbf9\uc740 \ub192\uc740 \uacbd\ub3c4\uc640 \ucde8\uc131\uc73c\ub85c \uc778\ud574 \uac00\uacf5\uc774 \uae4c\ub2e4\ub86d\uae30\ub85c \uc545\uba85\uc774 \ub192\uc2b5\ub2c8\ub2e4. \ubc18\ub3c4\uccb4 \uc7a5\ube44\ub294 \ub9e4\uc6b0 \ub192\uc740 \uce58\uc218 \uc815\ud655\ub3c4, \uc5c4\uaca9\ud55c \uacf5\ucc28, \ubcf5\uc7a1\ud55c \ud615\uc0c1\uc744 \uc694\uad6c\ud558\uae30 \ub54c\ubb38\uc5d0 \uc815\ubc00 \uac00\uacf5\uc740 \uc5c5\uacc4\uc5d0\uc11c \uac00\uc7a5 \ud070 \ub3c4\uc804 \uacfc\uc81c \uc911 \ud558\ub098\uc785\ub2c8\ub2e4.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">3. \ub9e4\uc6b0 \uae68\ub057\ud55c \ud45c\uba74 \ucc98\ub9ac<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\ub9ce\uc740 \uc138\ub77c\ubbf9 \ubd80\ud488\uc774 \ubc18\ub3c4\uccb4 \uc6e8\uc774\ud37c \uadfc\ucc98\uc5d0 \uc788\uac70\ub098 \uc9c1\uc811 \uc811\ucd09\ud558\ub294 \uacf3\uc5d0 \uc704\uce58\ud569\ub2c8\ub2e4. \ub530\ub77c\uc11c \ub2e4\uc74c\uacfc \uac19\uc740 \uc5c4\uaca9\ud55c \uad00\ub9ac\uac00 \ud544\uc694\ud569\ub2c8\ub2e4:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\uae08\uc18d \uc774\uc628 \uc624\uc5fc<\/li>\n\n\n\n<li>\ud45c\uba74 \uac70\uce60\uae30<\/li>\n\n\n\n<li>\ud30c\ud2f0\ud074 \uc0dd\uc131<\/li>\n\n\n\n<li>\ud45c\uba74 \uacb0\ud568<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\ub294 \uac00\uacf5 \ubc0f \uc5f0\ub9c8 \uacf5\uc815 \ud6c4\uc5d0 \ud544\uc218\uc801\uc785\ub2c8\ub2e4.<\/p>\n\n\n\n<h1 class=\"wp-block-heading\">\ubc18\ub3c4\uccb4\uc5d0 \uc0ac\uc6a9\ub418\ub294 \uc8fc\uc694 \ucca8\ub2e8 \uc138\ub77c\ubbf9 \uc7ac\ub8cc<\/h1>\n\n\n\n<h2 class=\"wp-block-heading\">1. \uc54c\ub8e8\ubbf8\ub098(Al\u2082O\u2083)<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">\uc8fc\uc694 \uc18d\uc131<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\ub192\uc740 \uacbd\ub3c4<\/li>\n\n\n\n<li>\ub6f0\uc5b4\ub09c \ub0b4\ub9c8\ubaa8\uc131<\/li>\n\n\n\n<li>\uac15\ub825\ud55c \uc804\uae30 \uc808\uc5f0<\/li>\n\n\n\n<li>\uace0\uc628 \ub0b4\uc131<\/li>\n\n\n\n<li>\ub6f0\uc5b4\ub09c \ud654\ud559\uc801 \uc548\uc815\uc131<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">\uc77c\ubc18\uc801\uc778 \uc560\ud50c\ub9ac\ucf00\uc774\uc158<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\uc6e8\uc774\ud37c \ubcf4\ud2b8<\/li>\n\n\n\n<li>\uc804\uae30 \uc808\uc5f0\uccb4<\/li>\n\n\n\n<li>CMP \uad6c\uc131 \uc694\uc18c<\/li>\n\n\n\n<li>\ubc18\ub3c4\uccb4 \ud328\ud0a4\uc9d5 \uae30\ud310<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\uc54c\ub8e8\ubbf8\ub098\ub294 \uade0\ud615 \uc7a1\ud78c \uc131\ub2a5\uacfc \ube44\uc6a9 \ud6a8\uc728\uc131\uc73c\ub85c \uc778\ud574 \uc5ec\uc804\ud788 \uac00\uc7a5 \ub110\ub9ac \uc0ac\uc6a9\ub418\ub294 \uc5d4\uc9c0\ub2c8\uc5b4\ub9c1 \uc138\ub77c\ubbf9 \uc911 \ud558\ub098\uc785\ub2c8\ub2e4.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">2. \uc9c8\ud654 \uc54c\ub8e8\ubbf8\ub284(AlN)<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">\uc8fc\uc694 \uc18d\uc131<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\ub9e4\uc6b0 \ub192\uc740 \uc5f4 \uc804\ub3c4\uc131<\/li>\n\n\n\n<li>\ub0ae\uc740 \uc5f4\ud33d\ucc3d \uacc4\uc218<\/li>\n\n\n\n<li>\ub6f0\uc5b4\ub09c \uc804\uae30 \uc808\uc5f0\uc131<\/li>\n\n\n\n<li>\uc6b0\uc218\ud55c \uc5f4 \ucda9\uaca9 \uc800\ud56d\uc131<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">\uc77c\ubc18\uc801\uc778 \uc560\ud50c\ub9ac\ucf00\uc774\uc158<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\ubc18\ub3c4\uccb4 \ud328\ud0a4\uc9d5 \uae30\ud310<\/li>\n\n\n\n<li>\ubc29\uc5f4\ud310<\/li>\n\n\n\n<li>\uace0\uc804\ub825 \uc804\uc790 \uc7a5\uce58<\/li>\n\n\n\n<li>\ubc15\ub9c9 \uc99d\ucc29 \ud788\ud130<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\uc9c8\ud654 \uc54c\ub8e8\ubbf8\ub284\uc740 \ube60\ub978 \uc5f4 \ubc29\ucd9c\uc774 \uc911\uc694\ud55c \uc5f4 \uad00\ub9ac \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0\uc11c \ud2b9\ud788 \uc720\uc6a9\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">3. \ud0c4\ud654\uaddc\uc18c(SiC)<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">\uc8fc\uc694 \uc18d\uc131<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\ucd08\uace0\uacbd\ub3c4<\/li>\n\n\n\n<li>\ub6f0\uc5b4\ub09c \uace0\uc628 \uc548\uc815\uc131<\/li>\n\n\n\n<li>\ub192\uc740 \uc5f4 \uc804\ub3c4\uc131<\/li>\n\n\n\n<li>\ub6f0\uc5b4\ub09c \ub0b4\uc2dd\uc131<\/li>\n\n\n\n<li>\ub6f0\uc5b4\ub09c \ud50c\ub77c\uc988\ub9c8 \ub0b4\uc131<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">\uc77c\ubc18\uc801\uc778 \uc560\ud50c\ub9ac\ucf00\uc774\uc158<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\uc5d0\uce6d \ucc54\ubc84 \uad6c\uc131 \uc694\uc18c<\/li>\n\n\n\n<li>\uc6e8\uc774\ud37c \uac10\uc9c0\uae30<\/li>\n\n\n\n<li>\uace0\uc628 \ud788\ud130<\/li>\n\n\n\n<li>\uc6e8\uc774\ud37c \ucc98\ub9ac \uad6c\uc131 \uc694\uc18c<\/li>\n\n\n\n<li>\uc804\ub825 \ubc18\ub3c4\uccb4 \uae30\ud310<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc\ub294 \ucca8\ub2e8 \ubc18\ub3c4\uccb4 \uacf5\uc815, \ud2b9\ud788 \ud50c\ub77c\uc988\ub9c8 \uc9d1\uc57d\uc801\uc778 \ud658\uacbd\uc5d0\uc11c \uac00\uc7a5 \uc911\uc694\ud55c \uc7ac\ub8cc \uc911 \ud558\ub098\uac00 \ub418\uc5c8\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">4. \uc9c8\ud654\uaddc\uc18c(Si\u2083N\u2084) 4.<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">\uc8fc\uc694 \uc18d\uc131<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\ub192\uc740 \uae30\uacc4\uc801 \uac15\ub3c4<\/li>\n\n\n\n<li>\ub6f0\uc5b4\ub09c \uace8\uc808 \uc778\uc131<\/li>\n\n\n\n<li>\ub6f0\uc5b4\ub09c \uc5f4 \ucda9\uaca9 \uc800\ud56d\uc131<\/li>\n\n\n\n<li>\ub6f0\uc5b4\ub09c \ub0b4\ub9c8\ubaa8\uc131<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">\uc77c\ubc18\uc801\uc778 \uc560\ud50c\ub9ac\ucf00\uc774\uc158<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\uad6c\uc870\uc801 \uad6c\uc131 \uc694\uc18c<\/li>\n\n\n\n<li>\ubc18\ub3c4\uccb4 \uce90\ub9ac\uc5b4 \uc2dc\uc2a4\ud15c<\/li>\n\n\n\n<li>\uc2e0\ub8b0\uc131 \ub192\uc740 \ud3ec\uc7a5\uc7ac<\/li>\n\n\n\n<li>\uc5f4 \uad00\ub9ac \uad6c\uc131 \uc694\uc18c<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\uc2e4\ub9ac\ucf58 \uc9c8\ud654\ubb3c\uc740 \uac00\ud639\ud55c \uc791\ub3d9 \uc870\uac74\uc5d0\uc11c \uac15\ub3c4\uc640 \uc2e0\ub8b0\uc131\uc774 \ubaa8\ub450 \uc694\uad6c\ub418\ub294 \uacf3\uc5d0\uc11c \ub110\ub9ac \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">5. \uc9c0\ub974\ucf54\ub2c8\uc544(ZrO\u2082)<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">\uc8fc\uc694 \uc18d\uc131<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\ub192\uc740 \uace8\uc808 \uc778\uc131<\/li>\n\n\n\n<li>\ub6f0\uc5b4\ub09c \ub0b4\ub9c8\ubaa8\uc131<\/li>\n\n\n\n<li>\uac15\ub825\ud55c \ud654\ud559\uc801 \uc548\uc815\uc131<\/li>\n\n\n\n<li>\uc6b0\uc218\ud55c \uace0\uc628 \uc131\ub2a5<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">\uc77c\ubc18\uc801\uc778 \uc560\ud50c\ub9ac\ucf00\uc774\uc158<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>CMP \uad6c\uc131 \uc694\uc18c<\/li>\n\n\n\n<li>\ub0b4\ub9c8\ubaa8\uc131 \ubc18\ub3c4\uccb4 \ubd80\ud488<\/li>\n\n\n\n<li>\uace0\uc628 \uc13c\uc11c<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\uc9c0\ub974\ucf54\ub2c8\uc544\ub294 \ubcc0\ud615 \uac15\ud654 \uba54\ucee4\ub2c8\uc998 \ub355\ubd84\uc5d0 \ub2e4\ub978 \uc138\ub77c\ubbf9\uc5d0 \ube44\ud574 \uade0\uc5f4 \uc804\ud30c\uc5d0 \ub300\ud55c \uc800\ud56d\ub825\uc774 \ub6f0\uc5b4\ub0a9\ub2c8\ub2e4.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">6. \ubca0\ub9b4\ub968 \uc0b0\ud654\ubb3c(BeO)<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">\uc8fc\uc694 \uc18d\uc131<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\ub9e4\uc6b0 \ub192\uc740 \uc5f4 \uc804\ub3c4\uc131<\/li>\n\n\n\n<li>\ub6f0\uc5b4\ub09c \uc804\uae30 \uc808\uc5f0\uc131<\/li>\n\n\n\n<li>\ub0ae\uc740 \uc720\uc804 \uc0c1\uc218<\/li>\n\n\n\n<li>\uace0\uc628 \uc548\uc815\uc131<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">\uc77c\ubc18\uc801\uc778 \uc560\ud50c\ub9ac\ucf00\uc774\uc158<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\uace0\uc804\ub825 \ubc18\ub3c4\uccb4 \ud328\ud0a4\uc9d5<\/li>\n\n\n\n<li>RF \ubc0f \ub9c8\uc774\ud06c\ub85c\ud30c \uae30\ud310<\/li>\n\n\n\n<li>\uc5f4 \uad00\ub9ac \uc2dc\uc2a4\ud15c<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\ubca0\ub9b4\ub968 \uc0b0\ud654\ubb3c\uc740 \uae08\uc18d\uacfc \uac19\uc740 \uc5f4 \uc804\ub3c4\uc131\uacfc \uc138\ub77c\ubbf9 \uc808\uc5f0 \ud2b9\uc131\uc744 \uacb0\ud569\ud558\uc5ec \ud2b9\uc218 \uc804\uc790 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \ub9e4\uc6b0 \ud6a8\uacfc\uc801\uc785\ub2c8\ub2e4.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">7. \uc555\uc804 \uc138\ub77c\ubbf9(PZT)<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">\uc8fc\uc694 \uc18d\uc131<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\ub6f0\uc5b4\ub09c \uc555\uc804 \uc751\ub2f5<\/li>\n\n\n\n<li>\uace0\uac10\ub3c4<\/li>\n\n\n\n<li>\ube60\ub978 \uc791\ub3d9 \uae30\ub2a5<\/li>\n\n\n\n<li>\uc6b0\uc218\ud55c \uc628\ub3c4 \uc548\uc815\uc131<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">\uc77c\ubc18\uc801\uc778 \uc560\ud50c\ub9ac\ucf00\uc774\uc158<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\uc815\ubc00 \ud3ec\uc9c0\uc154\ub2dd \uc2dc\uc2a4\ud15c<\/li>\n\n\n\n<li>\ubc18\ub3c4\uccb4 \uc13c\uc11c<\/li>\n\n\n\n<li>\uc74c\ud30c \uc7a5\uce58<\/li>\n\n\n\n<li>\uc815\ubc00 \uc561\ucd94\uc5d0\uc774\ud130<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\uc555\uc804 \uc138\ub77c\ubbf9\uc740 \ubc18\ub3c4\uccb4 \uc81c\uc870\uc5d0 \uc0ac\uc6a9\ub418\ub294 \ucd08\uc815\ubc00 \ubaa8\uc158 \uc81c\uc5b4 \uc2dc\uc2a4\ud15c\uc5d0\uc11c \uc911\uc694\ud55c \uc5ed\ud560\uc744 \ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">8. \uc11d\uc601 \uc138\ub77c\ubbf9(SiO\u2082)<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">\uc8fc\uc694 \uc18d\uc131<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\ucd08\uace0\uc21c\ub3c4<\/li>\n\n\n\n<li>\ub9e4\uc6b0 \ub0ae\uc740 \uc5f4\ud33d\ucc3d<\/li>\n\n\n\n<li>\ub6f0\uc5b4\ub09c \ub0b4\uc5f4\uc131<\/li>\n\n\n\n<li>\ub6f0\uc5b4\ub09c \ud654\ud559\uc801 \uc548\uc815\uc131<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">\uc77c\ubc18\uc801\uc778 \uc560\ud50c\ub9ac\ucf00\uc774\uc158<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\ud655\uc0b0\ub85c \ud29c\ube0c<\/li>\n\n\n\n<li>\ub9ac\uc18c\uadf8\ub798\ud53c \uc2dc\uc2a4\ud15c \uad6c\uc131 \uc694\uc18c<\/li>\n\n\n\n<li>\uc6e8\uc774\ud37c \uce90\ub9ac\uc5b4<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\uc11d\uc601 \uc18c\uc7ac\ub294 \ub9e4\uc6b0 \uae68\ub057\ud558\uace0 \uace0\uc628\uc758 \ubc18\ub3c4\uccb4 \ud658\uacbd\uc5d0\uc11c \ud2b9\ud788 \uc911\uc694\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">9. \uc9c8\ud654 \ubd95\uc18c(BN)<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">\uc8fc\uc694 \uc18d\uc131<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\ub192\uc740 \uc5f4 \uc804\ub3c4\uc131<\/li>\n\n\n\n<li>\ub0ae\uc740 \uc720\uc804 \uc0c1\uc218<\/li>\n\n\n\n<li>\ub6f0\uc5b4\ub09c \uc724\ud65c \ud2b9\uc131<\/li>\n\n\n\n<li>\ub6f0\uc5b4\ub09c \uc5f4 \ucda9\uaca9 \uc800\ud56d\uc131<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">\uc77c\ubc18\uc801\uc778 \uc560\ud50c\ub9ac\ucf00\uc774\uc158<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\uace0\uc628 \ub2e8\uc5f4<\/li>\n\n\n\n<li>\uc5f4 \uad00\ub9ac \uad6c\uc131 \uc694\uc18c<\/li>\n\n\n\n<li>\ubc18\ub3c4\uccb4 \uc7a5\ube44\uc758 \ubd80\ud488 \uc724\ud65c<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\uc9c8\ud654 \ubd95\uc18c\ub294 \uc5f4 \uc548\uc815\uc131\uacfc \ube44\ubc18\uc751\uc131 \ub3d9\uc791\uc774 \ubaa8\ub450 \ud544\uc694\ud55c \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \ud2b9\ud788 \uc720\uc6a9\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<h1 class=\"wp-block-heading\">\ubc18\ub3c4\uccb4 \uc81c\uc870\uc5d0\uc11c \ucca8\ub2e8 \uc138\ub77c\ubbf9\uc758 \ubbf8\ub798<\/h1>\n\n\n\n<p class=\"wp-block-paragraph\">\ubc18\ub3c4\uccb4 \uc81c\uc870\uac00 \ubc1c\uc804\ud568\uc5d0 \ub530\ub77c<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\ub354 \uc791\uc740 \ud504\ub85c\uc138\uc2a4 \ub178\ub4dc<\/li>\n\n\n\n<li>\ub354 \ub192\uc740 \uc6e8\uc774\ud37c \ucc98\ub9ac\ub7c9<\/li>\n\n\n\n<li>\ubcf4\ub2e4 \uacf5\uaca9\uc801\uc778 \ud50c\ub77c\uc988\ub9c8 \ucc98\ub9ac<\/li>\n\n\n\n<li>\uace0\uae09 \ud328\ud0a4\uc9d5 \uae30\uc220<\/li>\n\n\n\n<li>\uc640\uc774\ub4dc \ubc34\ub4dc\uac2d \ubc18\ub3c4\uccb4<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\uc138\ub77c\ubbf9 \uc18c\uc7ac\uc5d0 \ub300\ud55c \uc131\ub2a5 \uc694\uad6c \uc0ac\ud56d\uc740 \uacc4\uc18d \uc99d\uac00\ud560 \uac83\uc785\ub2c8\ub2e4.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\ud5a5\ud6c4 \ud2b8\ub80c\ub4dc\uc5d0\ub294 \ub2e4\uc74c\uc774 \ud3ec\ud568\ub429\ub2c8\ub2e4:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\uace0\uc21c\ub3c4 \uc138\ub77c\ubbf9 \uc18c\uc7ac<\/li>\n\n\n\n<li>\ud5a5\uc0c1\ub41c \ud50c\ub77c\uc988\ub9c8 \uc800\ud56d\uc131 \ucf54\ud305<\/li>\n\n\n\n<li>\ucd08\uc800\uc785\uc790 \uc0dd\uc131 \ud45c\uba74<\/li>\n\n\n\n<li>\ub354 \ud06c\uace0 \ubcf5\uc7a1\ud55c \uc138\ub77c\ubbf9 \uad6c\uc870<\/li>\n\n\n\n<li>\uace0\uae09 \ubcf5\ud569 \uc138\ub77c\ubbf9 \uc2dc\uc2a4\ud15c<\/li>\n\n\n\n<li>AI \uae30\ubc18 \uc81c\uc870 \uc7a5\ube44\uc640\uc758 \ud1b5\ud569 \uac15\ud654<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\ucca8\ub2e8 \uc138\ub77c\ubbf9\uc740 \ub354 \uc774\uc0c1 \ub2e8\uc21c\ud55c \ubcf4\uc870 \uc7ac\ub8cc\uac00 \uc544\ub2c8\ub77c \ucc28\uc138\ub300 \ubc18\ub3c4\uccb4 \uc81c\uc870\ub97c \uc704\ud55c \ud575\uc2ec \uae30\uc220\uc774 \ub418\uc5c8\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<h1 class=\"wp-block-heading\">\uacb0\ub860<\/h1>\n\n\n\n<p class=\"wp-block-paragraph\">\ucca8\ub2e8 \uc138\ub77c\ubbf9 \uc18c\uc7ac\ub294 \uc5f4 \uc548\uc815\uc131, \uc804\uae30 \uc808\uc5f0\uc131, \uae30\uacc4\uc801 \uac15\ub3c4 \ubc0f \ub0b4\ud654\ud559\uc131\uc758 \ud0c1\uc6d4\ud55c \uc870\ud569\uc73c\ub85c \uc778\ud574 \ud604\ub300 \ubc18\ub3c4\uccb4 \uc7a5\ube44\uc758 \uae30\ubcf8\uc774 \ub418\uc5c8\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\uc54c\ub8e8\ubbf8\ub098, \uc9c8\ud654 \uc54c\ub8e8\ubbf8\ub284, \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc, \uc2e4\ub9ac\ucf58 \uc9c8\ud654\ubb3c, \uc9c0\ub974\ucf54\ub2c8\uc544, \uc11d\uc601 \ubc0f \uc9c8\ud654 \ubd95\uc18c\uc640 \uac19\uc740 \uc7ac\ub8cc\ub294 \uac01\uac01 \ud2b9\uc815 \ubc18\ub3c4\uccb4 \uc81c\uc870 \uacf5\uc815\uc5d0 \uace0\uc720\ud55c \uc774\uc810\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\ubc18\ub3c4\uccb4 \uc0b0\uc5c5\uc774 \uacc4\uc18d\ud574\uc11c \ub354 \ub192\uc740 \uc815\ubc00\ub3c4, \ub354 \ub192\uc740 \ud6a8\uc728\uc131, \ub354 \ub192\uc740 \uc2e0\ub8b0\uc131\uc744 \ucd94\uad6c\ud568\uc5d0 \ub530\ub77c \ucca8\ub2e8 \uc138\ub77c\ubbf9\uc740 \uae30\uc220 \ud601\uc2e0\uacfc \uc7a5\ube44 \uac1c\ubc1c\uc758 \uc911\uc2ec\uc774 \ub420 \uac83\uc785\ub2c8\ub2e4.<\/p>","protected":false},"excerpt":{"rendered":"<p>As semiconductor technology continues to evolve toward smaller nodes, higher integration density, and more complex manufacturing processes, the demand for advanced materials inside semiconductor equipment has increased dramatically. Modern semiconductor fabrication environments require materials capable of withstanding extreme temperatures, corrosive plasma exposure, ultra-clean vacuum conditions, and high mechanical stress while maintaining dimensional stability and contamination [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":2114,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center 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