{"id":2018,"date":"2026-05-08T03:14:11","date_gmt":"2026-05-08T03:14:11","guid":{"rendered":"https:\/\/www.xkh-ceramics.com\/?p=2018"},"modified":"2026-05-08T03:14:11","modified_gmt":"2026-05-08T03:14:11","slug":"precision-ceramics-in-semiconductor-equipment-core-roles-and-industry-development-trends","status":"publish","type":"post","link":"https:\/\/www.xkh-ceramics.com\/ko\/precision-ceramics-in-semiconductor-equipment-core-roles-and-industry-development-trends\/","title":{"rendered":"\ubc18\ub3c4\uccb4 \uc7a5\ube44\uc758 \uc815\ubc00 \uc138\ub77c\ubbf9: \ud575\uc2ec \uc5ed\ud560\uacfc \uc0b0\uc5c5 \ubc1c\uc804 \ub3d9\ud5a5"},"content":{"rendered":"<h2 class=\"wp-block-heading\">1. \uc18c\uac1c<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\uc815\ubc00 \uc138\ub77c\ubbf9\uc740 \uace0\uc131\ub2a5 \uc138\ub77c\ubbf9\uc744 \uc758\ubbf8\ud569\ub2c8\ub2e4. <a href=\"https:\/\/www.xkh-ceramics.com\/ko\/%ec%a0%9c%ed%92%88\/\" data-type=\"page\" data-id=\"1927\">\uace0\uae09 \uc138\ub77c\ubbf9 \ubd80\ud488<\/a> \ubc18\ub3c4\uccb4 \uc81c\uc870 \uc7a5\ube44\uc5d0 \uc0ac\uc6a9\ub429\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uad6c\uc131 \uc694\uc18c\ub294 \uc77c\ubc18\uc801\uc73c\ub85c \ubcf5\uc7a1\ud55c \uad6c\uc870, \ucd08\uace0\uc21c\ub3c4, \ub9e4\uc6b0 \uc5c4\uaca9\ud55c \uce58\uc218 \uacf5\ucc28\ub85c \uc124\uacc4\ub429\ub2c8\ub2e4. \ubc18\ub3c4\uccb4 \uc81c\uc870 \uacf5\uc815\uc758 \uc548\uc815\uc131, \uc815\ud655\uc131, \uc2e0\ub8b0\uc131\uc744 \ubcf4\uc7a5\ud558\ub294 \ub370 \uc911\uc694\ud55c \uc5ed\ud560\uc744 \ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\uc804 \uc138\uacc4 \ubc18\ub3c4\uccb4 \uc0b0\uc5c5\uc774 \uae09\uc18d\ub3c4\ub85c \ud655\uc7a5\ub418\uace0 \uacf5\uc815 \ub178\ub4dc\uc758 \uc18c\ud615\ud654, \uace0\uc9d1\uc801\ud654, \ubcf5\uc7a1\ud55c \uc81c\uc870 \ud658\uacbd\uc774 \uc9c0\uc18d\uc801\uc73c\ub85c \ucd94\uc9c4\ub428\uc5d0 \ub530\ub77c \ubc18\ub3c4\uccb4 \uc7a5\ube44\ub294 \ub354 \ub192\uc740 \uc815\ubc00\ub3c4\uc640 \uac00\ud639\ud55c \uc791\ub3d9 \uc870\uac74\uc73c\ub85c \uc9c4\ud654\ud574 \uc654\uc2b5\ub2c8\ub2e4. \uadf8 \uacb0\uacfc, \uc815\ubc00 \uc138\ub77c\ubbf9 \ubd80\ud488\uc740 \ucd5c\uc2e0 \ubc18\ub3c4\uccb4 \uc7a5\ube44\uc5d0\uc11c \uc5c6\uc5b4\uc11c\ub294 \uc548 \ub420 \u201c\uc228\uaca8\uc9c4 \ud575\uc2ec \ubd80\ud488'\uc774 \ub418\uc5c8\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\uc624\ub298\ub0a0 \uc815\ubc00 \uc138\ub77c\ubbf9\uc740 \ubc18\ub3c4\uccb4 \uc7a5\ube44 \uc2dc\uc2a4\ud15c\uc5d0\uc11c \uc57d 16%\uc758 \uac00\uce58\ub97c \ucc28\uc9c0\ud558\uba70 \uacf5\uae09\ub9dd\uc5d0\uc11c \uadf8 \uc804\ub7b5\uc801 \uc911\uc694\uc131\uc744 \uac15\uc870\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<figure class=\"wp-block-image aligncenter size-full\"><img fetchpriority=\"high\" decoding=\"async\" width=\"600\" height=\"600\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/SiC-ceramic-chuck-1.jpg\" alt=\"\" class=\"wp-image-2019\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/SiC-ceramic-chuck-1.jpg 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/SiC-ceramic-chuck-1-300x300.jpg 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/SiC-ceramic-chuck-1-150x150.jpg 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/SiC-ceramic-chuck-1-12x12.jpg 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/SiC-ceramic-chuck-1-100x100.jpg 100w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/SiC-ceramic-chuck-1-200x200.jpg 200w\" sizes=\"(max-width: 600px) 100vw, 600px\" \/><\/figure>\n\n\n\n<h2 class=\"wp-block-heading\">2. \ubc18\ub3c4\uccb4 \uc7a5\ube44\uc5d0 \uc815\ubc00 \uc138\ub77c\ubbf9\uc774 \ud544\uc218\uc801\uc778 \uc774\uc720 2.<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\ubc18\ub3c4\uccb4 \uc81c\uc870\uc5d0\ub294 \uace0\uc628, \ud50c\ub77c\uc988\ub9c8 \ubd80\uc2dd, \ucd08\uccad\uc815 \uc9c4\uacf5 \uc870\uac74, \uace0\uc815\ubc00 \uae30\uacc4 \ub3d9\uc791 \ub4f1 \ub9e4\uc6b0 \uae4c\ub2e4\ub85c\uc6b4 \ud658\uacbd\uc774 \uc218\ubc18\ub429\ub2c8\ub2e4.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\uae08\uc18d \ubc0f \ud3f4\ub9ac\uba38\uc640 \uac19\uc740 \uae30\uc874 \uc18c\uc7ac\ub294 \ub2e4\uc74c\uacfc \uac19\uc740 \uc774\uc720\ub85c \uc774\ub7ec\ud55c \uc870\uac74\uc5d0\uc11c \uc885\uc885 \uc2e4\ud328\ud569\ub2c8\ub2e4:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\uc5f4 \ubcc0\ud615<\/li>\n\n\n\n<li>\ud654\ud559\uc801 \ubd80\uc2dd<\/li>\n\n\n\n<li>\uc785\uc790 \uc624\uc5fc<\/li>\n\n\n\n<li>\uc804\uae30 \uc804\ub3c4\uc131 \ubb38\uc81c<\/li>\n\n\n\n<li>\ub9c8\ubaa8\uc640 \ud53c\ub85c<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\uadf8\ub7ec\ub098 \uc815\ubc00 \uc138\ub77c\ubbf9\uc740 \ub3c5\ud2b9\ud55c \ud2b9\uc131\uc744 \uac00\uc9c0\uace0 \uc788\uc2b5\ub2c8\ub2e4:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\ub192\uc740 \uacbd\ub3c4 \ubc0f \ub0b4\ub9c8\ubaa8\uc131<\/li>\n\n\n\n<li>\ub6f0\uc5b4\ub09c \uc804\uae30 \uc808\uc5f0\uc131<\/li>\n\n\n\n<li>\ub6f0\uc5b4\ub09c \uc5f4 \uc548\uc815\uc131<\/li>\n\n\n\n<li>\ub0ae\uc740 \uc5f4\ud33d\ucc3d \uacc4\uc218<\/li>\n\n\n\n<li>\uac15\ub825\ud55c \ub0b4\ud654\ud559\uc131 \ubc0f \ud50c\ub77c\uc988\ub9c8 \ub0b4\uc2dd\uc131<\/li>\n\n\n\n<li>\ub192\uc740 \uad6c\uc870\uc801 \uac15\uc131 \ubc0f \uce58\uc218 \uc548\uc815\uc131<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\uc774\ub7ec\ud55c \ud2b9\uc131\uc73c\ub85c \uc778\ud574 \uc138\ub77c\ubbf9\uc740 \ub9ac\uc18c\uadf8\ub798\ud53c, \uc5d0\uce6d, \uc99d\ucc29, \uc774\uc628 \uc8fc\uc785, \uc5f4\ucc98\ub9ac\uc640 \uac19\uc740 \uc911\uc694\ud55c \ubc18\ub3c4\uccb4 \uacf5\uc815\uc5d0 \uc774\uc0c1\uc801\uc785\ub2c8\ub2e4.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">3. \ubc18\ub3c4\uccb4 \uc0b0\uc5c5\uc5d0\uc11c \uc0ac\uc6a9\ub418\ub294 \uc8fc\uc694 \uc815\ubc00 \uc138\ub77c\ubbf9 \uc18c\uc7ac<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">3.1 \uc54c\ub8e8\ubbf8\ub098(Al\u2082O\u2083) \uc138\ub77c\ubbf9<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\uc54c\ub8e8\ubbf8\ub098 \uc138\ub77c\ubbf9\uc740 \uc548\uc815\uc131, \ube44\uc6a9 \ud6a8\uc728\uc131 \ubc0f \uc131\uc219\ud55c \uacf5\uc815 \uae30\uc220\ub85c \uc778\ud574 \ubc18\ub3c4\uccb4 \uc7a5\ube44\uc5d0 \uac00\uc7a5 \ub110\ub9ac \uc0ac\uc6a9\ub418\ub294 \uc18c\uc7ac\uc785\ub2c8\ub2e4.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\uc77c\ubc18\uc801\uc778 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc740 \ub2e4\uc74c\uacfc \uac19\uc2b5\ub2c8\ub2e4:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\ucc54\ubc84 \ub77c\uc774\ub108 \ubc0f \ubcf4\ud638 \ubd80\ud488 \uc5d0\uce6d<\/li>\n\n\n\n<li>\uac00\uc2a4 \ubd84\ubc30\ud310<\/li>\n\n\n\n<li>\uc6e8\uc774\ud37c \ucc99 \ubc0f \uc9c4\uacf5 \ubd80\ud488<\/li>\n\n\n\n<li>\uc5f0\ub9c8\ud310 \ubc0f CMP \uc2dc\uc2a4\ud15c<\/li>\n\n\n\n<li>\uc808\uc5f0 \ub9c1 \ubc0f \uad6c\uc870\uc801 \uc9c0\uc9c0\ub300<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\uc624\uc5fc \uc81c\uc5b4\uac00 \uc911\uc694\ud55c \ucca8\ub2e8 \ubc18\ub3c4\uccb4 \ud658\uacbd\uc5d0\ub294 \uace0\uc21c\ub3c4 \uc54c\ub8e8\ubbf8\ub098(\ucd5c\ub300 99.9%)\uac00 \ud544\uc694\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">3.2 \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc(SiC) \uc138\ub77c\ubbf9<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc\ub294 \ubc18\ub3c4\uccb4 \uc7a5\ube44\uc758 \uac00\uc7a5 \uc9c4\ubcf4\ub41c \uad6c\uc870\uc6a9 \uc138\ub77c\ubbf9 \uc18c\uc7ac \uc911 \ud558\ub098\ub85c \uaf3d\ud799\ub2c8\ub2e4.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\uc8fc\uc694 \uc18d\uc131\uc740 \ub2e4\uc74c\uacfc \uac19\uc2b5\ub2c8\ub2e4:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\ub9e4\uc6b0 \ub192\uc740 \uac15\uc131(\ud0c4\uc131 \uacc4\uc218)<\/li>\n\n\n\n<li>\ub6f0\uc5b4\ub09c \uc5f4 \uc804\ub3c4\uc131<\/li>\n\n\n\n<li>\ub9e4\uc6b0 \ub0ae\uc740 \uc5f4\ud33d\ucc3d<\/li>\n\n\n\n<li>\uad11\ud559 \ub4f1\uae09 \ud45c\uba74\uc744 \uc704\ud55c \ub6f0\uc5b4\ub09c \uac00\uacf5\uc131<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">SiC\ub294 \ub2e4\uc74c\uacfc \uac19\uc740 \ubd84\uc57c\uc5d0\uc11c \ub110\ub9ac \uc0ac\uc6a9\ub429\ub2c8\ub2e4:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\ub9ac\uc18c\uadf8\ub798\ud53c \uae30\uacc4 \ub2e8\uacc4<\/li>\n\n\n\n<li>\uc815\ubc00 \ubaa8\uc158 \ud50c\ub7ab\ud3fc<\/li>\n\n\n\n<li>\uc6e8\uc774\ud37c \ucc98\ub9ac \uad6c\uc131 \uc694\uc18c<\/li>\n\n\n\n<li>\ud50c\ub77c\uc988\ub9c8 \uc2dc\uc2a4\ud15c\uc758 \ucd08\uc810 \ub9c1 \ubc0f \uad6c\uc870 \ubd80\ud488<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\ud558\uc774\uc5d4\ub4dc \ub9ac\uc18c\uadf8\ub798\ud53c \uc2dc\uc2a4\ud15c\uc5d0\uc11c SiC \uae30\ubc18 \ubd80\ud488\uc740 \ub098\ub178\ubbf8\ud130 \uc218\uc900\uc758 \uc704\uce58 \uc815\ud655\ub3c4\ub97c \uc720\uc9c0\ud558\ub294 \ub370 \ub9e4\uc6b0 \uc911\uc694\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">3.3 \uc9c8\ud654\uaddc\uc18c(Si\u2083N\u2084) \uc138\ub77c\ubbf9<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\uc2e4\ub9ac\ucf58 \uc9c8\ud654\ubb3c\uc740 \uac15\ub3c4, \uc778\uc131 \ubc0f \uc5f4\ucda9\uaca9 \uc800\ud56d\uc131\uc774 \ub6f0\uc5b4\ub09c \uac83\uc73c\ub85c \uc54c\ub824\uc838 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">1200\u00b0C \uc774\uc0c1\uc758 \uc628\ub3c4\uc5d0\uc11c\ub3c4 \uc548\uc815\uc801\uc778 \uc131\ub2a5\uc744 \uc720\uc9c0\ud558\ubbc0\ub85c \uc5f4\uc545\ud55c \uc5f4 \ud658\uacbd\uc5d0\ub3c4 \uc801\ud569\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0\ub294 \ub2e4\uc74c\uc774 \ud3ec\ud568\ub429\ub2c8\ub2e4:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\uace0\uc18d \uc138\ub77c\ubbf9 \ubca0\uc5b4\ub9c1<\/li>\n\n\n\n<li>\uac00\uc774\ub4dc \ub808\uc77c \ubc0f \ubaa8\uc158 \uc2dc\uc2a4\ud15c<\/li>\n\n\n\n<li>\ubc18\ub3c4\uccb4 \uc6e8\uc774\ud37c \ucc98\ub9ac \ubd80\ud488<\/li>\n\n\n\n<li>\uace0\uac15\ub3c4 \uad6c\uc870 \ubd80\ud488<\/li>\n\n\n\n<li>\uc804\ub825 \ubaa8\ub4c8 \uae30\ud310<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\ucd5c\uace0\uc758 \ub9cc\ub2a5 \uc5d4\uc9c0\ub2c8\uc5b4\ub9c1 \uc138\ub77c\ubbf9 \uc911 \ud558\ub098\ub85c \ub110\ub9ac \uc54c\ub824\uc838 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">3.4 \uc9c8\ud654 \uc54c\ub8e8\ubbf8\ub284(AlN) \uc138\ub77c\ubbf9<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\uc9c8\ud654 \uc54c\ub8e8\ubbf8\ub284\uc740 \uc8fc\ub85c \uadf8 \ud2b9\uc131\uc73c\ub85c \uc778\ud574 \uac00\uce58\uac00 \ub192\uc2b5\ub2c8\ub2e4:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\ub9e4\uc6b0 \ub192\uc740 \uc5f4 \uc804\ub3c4\uc131<\/li>\n\n\n\n<li>\ub6f0\uc5b4\ub09c \uc804\uae30 \uc808\uc5f0\uc131<\/li>\n\n\n\n<li>\uc2e4\ub9ac\ucf58\uacfc \uc6b0\uc218\ud55c \uc5f4\ud33d\ucc3d \ub9e4\uce6d<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\ubc18\ub3c4\uccb4 \uc7a5\ube44\uc5d0\uc11c AlN\uc740 \uc810\uc810 \ub354 \ub9ce\uc740 \ubd84\uc57c\uc5d0\uc11c \uc0ac\uc6a9\ub418\uace0 \uc788\uc2b5\ub2c8\ub2e4:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\uc815\uc804\uae30 \ucc99(ESC)<\/li>\n\n\n\n<li>\uc804\ub825 \uc804\uc790 \uae30\ud310<\/li>\n\n\n\n<li>\uace0\uc131\ub2a5 \uc5f4 \uad00\ub9ac \uad6c\uc131 \uc694\uc18c<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\uc5c5\uacc4\uc758 \uc8fc\uc694 \ud2b8\ub80c\ub4dc\ub294 \ubc29\uc5f4 \uc694\uad6c \uc0ac\ud56d\uc774 \ub192\uc544\uc9d0\uc5d0 \ub530\ub77c \uc54c\ub8e8\ubbf8\ub098 \uae30\ubc18 ESC\ub97c \uc9c8\ud654 \uc54c\ub8e8\ubbf8\ub284\uc73c\ub85c \uc810\uc9c4\uc801\uc73c\ub85c \ub300\uccb4\ud558\ub294 \uac83\uc785\ub2c8\ub2e4.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">4. \uc815\ubc00 \uc138\ub77c\ubbf9\uc73c\ub85c \ub9cc\ub4e0 \uc8fc\uc694 \ubc18\ub3c4\uccb4 \uc7a5\ube44 \ubd80\ud488<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\uc815\ubc00 \uc138\ub77c\ubbf9\uc740 \uac70\uc758 \ubaa8\ub4e0 \uc8fc\uc694 \ubc18\ub3c4\uccb4 \ub3c4\uad6c\uc5d0 \ub110\ub9ac \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">4.1 \ub9ac\uc18c\uadf8\ub798\ud53c \uc7a5\ube44<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\uc815\uc804\uae30 \ucc99(E-\ucc99)<\/li>\n\n\n\n<li>\uc9c4\uacf5 \ucc99<\/li>\n\n\n\n<li>\uc815\ubc00 \ub2e8\uacc4<\/li>\n\n\n\n<li>\uac70\uc6b8 \ubc0f \uad11\ud559 \uc9c0\uc9c0 \uad6c\uc870<\/li>\n\n\n\n<li>\uc218\ub0c9\uc2dd \uc138\ub77c\ubbf9 \ud50c\ub7ab\ud3fc<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\uc774\ub7ec\ud55c \uad6c\uc131 \uc694\uc18c\ub294 \uc5f4 \ubcc0\ud615\uc774 \ub9e4\uc6b0 \uc801\uace0 \uc704\uce58 \uc548\uc815\uc131\uc774 \ub9e4\uc6b0 \ub192\uc544\uc57c \ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">4.2 \uc5d0\uce6d \uc7a5\ube44<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\ucd08\uc810 \ub9c1<\/li>\n\n\n\n<li>\uac00\uc2a4 \ubd84\ubc30\ud310<\/li>\n\n\n\n<li>\ub178\uc990 \ubc0f \uc778\uc81d\ud130<\/li>\n\n\n\n<li>\ucc54\ubc84 \ub77c\uc774\ub108<\/li>\n\n\n\n<li>\ud50c\ub77c\uc988\ub9c8 \ub0b4\uc131 \ucc3d<\/li>\n\n\n\n<li>\uc808\uc5f0 \ub9c1<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\uc5ec\uae30\uc5d0 \uc0ac\uc6a9\ub418\ub294 \uc138\ub77c\ubbf9\uc740 \uac00\ud639\ud55c \ud50c\ub77c\uc988\ub9c8 \ud658\uacbd\uacfc \ud654\ud559\uc801 \ubd80\uc2dd\uc744 \uacac\ub38c\ub0b4\uc57c \ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">4.3 \uc6e8\uc774\ud37c \ucc98\ub9ac \uc2dc\uc2a4\ud15c<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>CMP \uc5f0\ub9c8\ud310<\/li>\n\n\n\n<li>\uc138\ub77c\ubbf9 \uc6e8\uc774\ud37c \uce90\ub9ac\uc5b4<\/li>\n\n\n\n<li>\ub85c\ubd07 \ud578\ub4e4\ub9c1 \uc554<\/li>\n\n\n\n<li>\uc815\ub82c \uace0\uc815 \uc7a5\uce58<\/li>\n\n\n\n<li>\uc9c4\uacf5 \ud761\ucc29 \uad6c\uc131 \uc694\uc18c<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\uc774\ub7ec\ud55c \ubd80\ud488\uc5d0\ub294 \uae30\uacc4\uc801 \uc815\ubc00\ub3c4\uc640 \ub9e4\uc6b0 \uae68\ub057\ud55c \ud45c\uba74\uc774 \ubaa8\ub450 \ud544\uc694\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">5. \uae00\ub85c\ubc8c \uc0b0\uc5c5 \ud658\uacbd<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\uc815\ubc00 \uc138\ub77c\ubbf9 \uc0b0\uc5c5\uc740 \uace0\ub3c4\ub85c \uc9d1\uc911\ub418\uace0 \uae30\uc220 \uc9d1\uc57d\uc801\uc778 \uc0b0\uc5c5\uc785\ub2c8\ub2e4.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\ud604\uc7ac \uae00\ub85c\ubc8c \uc2dc\uc7a5\uc740 \ub2e4\uc74c \uad6d\uac00\uc758 \uae30\uc5c5\ub4e4\uc774 \uc8fc\ub3c4\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\uc77c\ubcf8<\/li>\n\n\n\n<li>\ubbf8\uad6d<\/li>\n\n\n\n<li>\uc720\ub7fd<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\uc120\ub3c4 \uae30\uc5c5\uc5d0\ub294 \ubd84\ub9d0 \ud569\uc131, \uc18c\uacb0, \uc815\ubc00 \uac00\uacf5, \ubc18\ub3c4\uccb4\uae09 \uccad\uacb0\ub3c4 \uad00\ub9ac \ubd84\uc57c\uc5d0\uc11c \uac15\ub825\ud55c \uc5ed\ub7c9\uc744 \uac16\ucd98 \uae30\uc874 \uc138\ub77c\ubbf9 \uc81c\uc870\uc5c5\uccb4\uac00 \ud3ec\ud568\ub429\ub2c8\ub2e4.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\uc77c\ubcf8\uc740 \uc815\ubc00 \uc138\ub77c\ubbf9, \ud2b9\ud788 \uc804\uc790 \ubc0f \uad6c\uc870\uc6a9 \uc138\ub77c\ubbf9 \ubd84\uc57c\uc5d0\uc11c \uae00\ub85c\ubc8c \uc120\ub450\ub97c \uc720\uc9c0\ud558\uace0 \uc788\uc73c\uba70, \ubbf8\uad6d\uc740 \uace0\uc628 \ubc0f \uad6c\uc870\uc6a9 \uc138\ub77c\ubbf9\uc5d0 \uc8fc\ub825\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uc720\ub7fd(\ud2b9\ud788 \ub3c5\uc77c\uacfc \ud504\ub791\uc2a4)\uc740 \uc5d0\ub108\uc9c0 \ubc0f \ud56d\uacf5\uc6b0\uc8fc \uc2dc\uc2a4\ud15c\uc6a9 \ucca8\ub2e8 \uad6c\uc870\uc6a9 \uc138\ub77c\ubbf9\uc744 \uac15\uc870\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">6. \uc911\uad6d \ub0b4 \uac1c\ubc1c \ud604\ud669<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\uc911\uad6d\uc740 \uc7a5\uae30\uc801\uc778 \uad6d\uac00 \uc5f0\uad6c \ud504\ub85c\uadf8\ub7a8\uacfc \uc0b0\uc5c5 \uac1c\ubc1c \uc774\ub2c8\uc154\ud2f0\ube0c\ub97c \ud1b5\ud574 \uc815\ubc00 \uc138\ub77c\ubbf9 \uae30\uc220 \ubd84\uc57c\uc5d0\uc11c \uc0c1\ub2f9\ud55c \uc9c4\uc804\uc744 \uc774\ub8e8\uc5c8\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\uc8fc\uc694 \uc131\uacfc\ub294 \ub2e4\uc74c\uacfc \uac19\uc2b5\ub2c8\ub2e4:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\ucca8\ub2e8 \ubd84\ub9d0 \uc81c\uc870 \ubc29\ubc95 \uac1c\ubc1c(\uace0\uccb4, \uc561\uc0c1, \uc99d\uae30\uc0c1 \ud569\uc131)<\/li>\n\n\n\n<li>\uc0ac\ucd9c \uc131\ud615 \ubc0f \ud14c\uc774\ud504 \uc8fc\uc870\uc640 \uac19\uc740 \uadf8\ubb3c\ub9dd\uc5d0 \uac00\uae4c\uc6b4 \uc131\ud615 \uae30\uc220 \uc801\uc6a9<\/li>\n\n\n\n<li>\uc5f4\uac04 \ud504\ub808\uc2a4(HP) \ubc0f \uac00\uc2a4 \uc555\ub825 \uc18c\uacb0(GPS)\uc744 \ud3ec\ud568\ud55c \uc18c\uacb0 \uae30\uc220\uc758 \ubc1c\uc804<\/li>\n\n\n\n<li>\ub300\ud615 \uc9c8\ud654\uaddc\uc18c \uc18c\uacb0\uc758 \ud68d\uae30\uc801\uc778 \ubc1c\uc804<\/li>\n\n\n\n<li>EDM, \ub808\uc774\uc800 \uac00\uacf5 \ubc0f \ucd08\uc74c\ud30c \uac00\uacf5\uacfc \uac19\uc740 \uc815\ubc00 \uac00\uacf5 \uae30\uc220\uc758 \ucc44\ud0dd \uc99d\uac00<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\uc774\ub7ec\ud55c \ubc1c\uc804\uc5d0\ub3c4 \ubd88\uad6c\ud558\uace0 \ud558\uc774\uc5d4\ub4dc \ubc18\ub3c4\uccb4\uae09 \uc138\ub77c\ubbf9\uc740 \uc5ec\uc804\ud788 \ub300\ub7c9 \uc0dd\uc0b0\uc758 \uc548\uc815\uc131\uacfc \uc77c\uad00\uc131 \uce21\uba74\uc5d0\uc11c \uc5b4\ub824\uc6c0\uc744 \uacaa\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">7. \uc5c5\uacc4\uac00 \uc9c1\uba74\ud55c \uc8fc\uc694 \uacfc\uc81c<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\uc911\uad6d\uc740 \uc911\uc800\uac00 \uc138\ub77c\ubbf9 \ubd84\uc57c\uc5d0\uc11c \uac15\ub825\ud55c \uc5ed\ub7c9\uc744 \uac1c\ubc1c\ud588\uc9c0\ub9cc \uba87 \uac00\uc9c0 \ubcd1\ubaa9 \ud604\uc0c1\uc774 \ub0a8\uc544 \uc788\uc2b5\ub2c8\ub2e4:<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">7.1 \uc218\uc785 \uace0\uae09 \ud30c\uc6b0\ub354\uc5d0 \ub300\ud55c \uc758\uc874\ub3c4<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\ub2e4\uc74c\uacfc \uac19\uc740 \uace0\uc131\ub2a5 \ud30c\uc6b0\ub354:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\uc9c8\ud654\uaddc\uc18c(Si\u2083N\u2084)<\/li>\n\n\n\n<li>\uc9c8\ud654 \uc54c\ub8e8\ubbf8\ub284(AlN)<\/li>\n\n\n\n<li>\ucd08\uace0\uc21c\ub3c4 \uc54c\ub8e8\ubbf8\ub098<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\ub294 \uc5ec\uc804\ud788 \ub300\ubd80\ubd84 \uc77c\ubcf8\uacfc \uc720\ub7fd\uc5d0\uc11c \uc218\uc785\ub418\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">7.2 \ud558\uc774\uc5d4\ub4dc \ucc98\ub9ac\uc758 \uc5b4\ub824\uc6c0<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\ubc18\ub3c4\uccb4 \uc138\ub77c\ubbf9\uc5d0\ub294 \ub2e4\uc74c\uc774 \ud544\uc694\ud569\ub2c8\ub2e4:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\uc11c\ube0c \ub9c8\uc774\ud06c\ub860 \uc815\ubc00 \uac00\uacf5<\/li>\n\n\n\n<li>\ub9e4\uc6b0 \ub0ae\uc740 \ud45c\uba74 \uac70\uce60\uae30<\/li>\n\n\n\n<li>\uacb0\ud568 \uc5c6\ub294 \ud45c\uba74<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\uc774\ub294 \uc5ec\uc804\ud788 \uae30\uc220\uc801\uc73c\ub85c \uc5b4\ub835\uace0 \ube44\uc6a9\uc774 \ub9ce\uc774 \ub4dc\ub294 \uc791\uc5c5\uc785\ub2c8\ub2e4.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">7.3 \uae34 \uc778\uc99d \uc8fc\uae30<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\uc7ac\ub8cc\uac00 \uc0ac\uc591\uc744 \ucda9\uc871\ud558\ub354\ub77c\ub3c4 \ubc18\ub3c4\uccb4 \uace0\uac1d\uc740 \ub2e4\uc74c\uacfc \uac19\uc740 \uc7a5\uae30\uc801\uc778 \uac80\uc99d\uc744 \uc694\uad6c\ud569\ub2c8\ub2e4:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\ud50c\ub77c\uc988\ub9c8 \uc800\ud56d \ud14c\uc2a4\ud2b8<\/li>\n\n\n\n<li>\uc5f4 \uc21c\ud658 \uc2e0\ub8b0\uc131<\/li>\n\n\n\n<li>\uccad\uacb0 \uc778\uc99d<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\uc774\ub85c \uc778\ud574 \uc0c1\uc6a9\ud654 \uc18d\ub3c4\uac00 \uc0c1\ub2f9\ud788 \ub290\ub824\uc9d1\ub2c8\ub2e4.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">8. \uc5c5\uacc4 \ub3d9\ud5a5 \ubc0f \ud5a5\ud6c4 \uc804\ub9dd<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">8.1 \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc\uc640 3\uc138\ub300 \ubc18\ub3c4\uccb4\uc758 \uae09\uc18d\ud55c \uc131\uc7a5<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\uc804\uae30 \uc790\ub3d9\ucc28, \uc7ac\uc0dd \uc5d0\ub108\uc9c0, \uace0\uc804\ub825 \uc804\uc790\uc81c\ud488\uc758 \ud655\ub300\ub85c SiC \uae30\ubc18 \uc18c\uc7ac \ubc0f \ubd80\ud488\uc5d0 \ub300\ud55c \uc218\uc694\uac00 \uae09\uc99d\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">8.2 \ubc18\ub3c4\uccb4 \uc7a5\ube44 \uacf5\uae09\ub9dd\uc758 \ud604\uc9c0\ud654<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\uad6d\ub0b4 \ubc18\ub3c4\uccb4 \uc7a5\ube44 \uc81c\uc870\uc5c5\uccb4\uac00 \uc131\uc7a5\ud568\uc5d0 \ub530\ub77c \uad6d\uc0b0\ud654\ud55c \uc815\ubc00 \uc138\ub77c\ubbf9 \ubd80\ud488\uc5d0 \ub300\ud55c \uc218\uc694\uac00 \uac00\uc18d\ud654\ub418\uace0 \uc788\uc2b5\ub2c8\ub2e4:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\uc815\uc804\uae30 \ucc99<\/li>\n\n\n\n<li>\ucd08\uc810 \ub9c1<\/li>\n\n\n\n<li>\uc138\ub77c\ubbf9 \ub85c\ubd07 \ud314<\/li>\n\n\n\n<li>\ud558\uc774\uc5d4\ub4dc SiC \uad6c\uc870<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">8.3 \ub354 \ud06c\uace0 \uc815\ubc00\ud55c \uad6c\uc131 \uc694\uc18c\ub85c\uc758 \uc804\ud658<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\ubbf8\ub798\uc758 \ubc18\ub3c4\uccb4 \ub178\ub4dc\uc5d0\ub294 \ub2e4\uc74c\uc774 \ud544\uc694\ud569\ub2c8\ub2e4:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\ub354 \ud070 \uc138\ub77c\ubbf9 \uad6c\uc870<\/li>\n\n\n\n<li>\ub354 \ub192\uc740 \ucc28\uc6d0 \uc548\uc815\uc131<\/li>\n\n\n\n<li>\ub0ae\uc740 \uc5f4\ud33d\ucc3d<\/li>\n\n\n\n<li>\ub354 \ub192\uc740 \uccad\uacb0 \uae30\uc900<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\uc774\ub97c \ud1b5\ud574 \uc138\ub77c\ubbf9 \uc81c\uc870\ub294 \ub354\uc6b1 \ubc1c\uc804\ub41c \uae30\uc220\uc744 \ud5a5\ud574 \ub098\uc544\uac00\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">9. \uacb0\ub860<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\uc815\ubc00 \uc138\ub77c\ubbf9\uc740 \ub354 \uc774\uc0c1 \ubc18\ub3c4\uccb4 \uc7a5\ube44\uc758 \ubcf4\uc870 \uc7ac\ub8cc\uac00 \uc544\ub2c8\ub77c \uc7a5\ube44 \uc131\ub2a5\uacfc \uce69 \uc81c\uc870 \ud488\uc9c8\uc744 \uc9c1\uc811\uc801\uc73c\ub85c \uacb0\uc815\ud558\ub294 \uae30\ubcf8 \uad6c\uc131 \uc694\uc18c\uc785\ub2c8\ub2e4.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\ub9ac\uc18c\uadf8\ub798\ud53c \uc2dc\uc2a4\ud15c\uc5d0\uc11c \ud50c\ub77c\uc988\ub9c8 \uc5d0\uce6d \ub3c4\uad6c\uc5d0 \uc774\ub974\uae30\uae4c\uc9c0 \uc815\ubc00 \uc138\ub77c\ubbf9\uc740 \uc804\uccb4 \ubc18\ub3c4\uccb4 \uc0b0\uc5c5\uc744 \ud65c\uc131\ud654\ud558\ub294 \ub370 \uc18c\ub9ac \uc5c6\uc774 \uc911\uc694\ud55c \uc5ed\ud560\uc744 \ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\uae00\ub85c\ubc8c \ubc18\ub3c4\uccb4 \uc81c\uc870\uac00 \uacc4\uc18d \ubc1c\uc804\ud568\uc5d0 \ub530\ub77c \uc815\ubc00 \uc138\ub77c\ubbf9\uc740 \uae30\uc220 \ud601\uc2e0\uacfc \uacf5\uae09\ub9dd \ud604\uc9c0\ud654 \ubd84\uc57c\uc5d0\uc11c \uae30\ud68c\uac00 \ucee4\uc9c0\uba74\uc11c \uc804\ub7b5\uc801\uc73c\ub85c \uac00\uc7a5 \uc911\uc694\ud55c \ucca8\ub2e8 \uc18c\uc7ac \uc911 \ud558\ub098\ub85c \ub0a8\uc744 \uac83\uc785\ub2c8\ub2e4.<\/p>","protected":false},"excerpt":{"rendered":"<p>1. Introduction Precision ceramics refer to high-performance advanced ceramic components used in semiconductor manufacturing equipment. These components are typically designed with complex structures, ultra-high purity, and extremely tight dimensional tolerances. They play a critical role in ensuring the stability, accuracy, and reliability of semiconductor fabrication processes. With the rapid expansion of the global semiconductor industry [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":2019,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[6],"tags":[53,52,51,68,56,66,67,60,69,65,57,61,63,55,64,58,62,54,59],"class_list":["post-2018","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-applications-cases","tag-advanced-materials","tag-automation","tag-cleanroom","tag-electrostatic-chuck","tag-high-tech-factory","tag-industrial-equipment","tag-laboratory","tag-lithography-equipment","tag-metal-machinery","tag-microfabrication","tag-precision-engineering","tag-precision-manufacturing","tag-robotics","tag-semiconductor","tag-semiconductor-fabrication","tag-silicon-wafer","tag-sterile-environment","tag-vacuum-chuck","tag-wafer"],"_links":{"self":[{"href":"https:\/\/www.xkh-ceramics.com\/ko\/wp-json\/wp\/v2\/posts\/2018","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.xkh-ceramics.com\/ko\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.xkh-ceramics.com\/ko\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ko\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ko\/wp-json\/wp\/v2\/comments?post=2018"}],"version-history":[{"count":1,"href":"https:\/\/www.xkh-ceramics.com\/ko\/wp-json\/wp\/v2\/posts\/2018\/revisions"}],"predecessor-version":[{"id":2020,"href":"https:\/\/www.xkh-ceramics.com\/ko\/wp-json\/wp\/v2\/posts\/2018\/revisions\/2020"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ko\/wp-json\/wp\/v2\/media\/2019"}],"wp:attachment":[{"href":"https:\/\/www.xkh-ceramics.com\/ko\/wp-json\/wp\/v2\/media?parent=2018"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ko\/wp-json\/wp\/v2\/categories?post=2018"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ko\/wp-json\/wp\/v2\/tags?post=2018"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}