{"id":2227,"date":"2026-05-18T05:32:59","date_gmt":"2026-05-18T05:32:59","guid":{"rendered":"https:\/\/www.xkh-ceramics.com\/?post_type=product&p=2227"},"modified":"2026-05-18T05:33:00","modified_gmt":"2026-05-18T05:33:00","slug":"%e5%8d%8a%e5%b0%8e%e4%bd%93%e9%ab%98%e6%b8%a9%e8%80%90%e9%a3%9f%e3%82%ad%e3%83%a3%e3%83%aa%e3%82%a2%e7%94%a8%e9%ab%98%e7%b4%94%e5%ba%a6%e3%82%b7%e3%83%83%e3%82%af%e3%82%a6%e3%82%a7%e3%83%8f%e3%83%bc","status":"publish","type":"product","link":"https:\/\/www.xkh-ceramics.com\/ja\/product\/high-purity-sic-wafer-boat-for-semiconductor-high-temperature-corrosion-resistant-carrier\/","title":{"rendered":"\u534a\u5c0e\u4f53\u9ad8\u6e29\u8010\u98df\u30ad\u30e3\u30ea\u30a2\u7528\u9ad8\u7d14\u5ea6SiC\u30a6\u30a7\u30cf\u30dc\u30fc\u30c8"},"content":{"rendered":"

\u306b\u3064\u3044\u3066 \u70ad\u5316\u30b1\u30a4\u7d20\uff08SiC\uff09\u30a6\u30a7\u30cf\u30fc\u30dc\u30fc\u30c8<\/strong> \u306f\u3001\u6700\u5148\u7aef\u306e\u534a\u5c0e\u4f53\u304a\u3088\u3073\u592a\u967d\u96fb\u6c60\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u7528\u306b\u8a2d\u8a08\u3055\u308c\u305f\u9ad8\u6027\u80fd\u30a6\u30a7\u30cf\u30fc\u30ad\u30e3\u30ea\u30a2\u3067\u3059\u3002\u62e1\u6563\u3001\u9178\u5316\u3001LPCVD\u30d7\u30ed\u30bb\u30b9\u3067\u4e00\u822c\u7684\u306b\u898b\u3089\u308c\u308b\u6975\u7aef\u306a\u71b1\u74b0\u5883\u3068\u523a\u6fc0\u7684\u306a\u5316\u5b66\u96f0\u56f2\u6c17\u306b\u8010\u3048\u308b\u3088\u3046\u306b\u8a2d\u8a08\u3055\u308c\u3066\u3044\u307e\u3059\u3002.<\/p>\n

\u5f93\u6765\u306e\u77f3\u82f1\u30a6\u30a7\u30fc\u30cf\u30dc\u30fc\u30c8\u3068\u6bd4\u8f03\u3057\u3066\u3001SiC\u30a6\u30a7\u30fc\u30cf\u30dc\u30fc\u30c8\u306f\u5927\u5e45\u306b\u6539\u5584\u3055\u308c\u3066\u3044\u307e\u3059\u3002 \u71b1\u5b89\u5b9a\u6027\u3001\u8010\u85ac\u54c1\u6027\u3001\u6a5f\u68b0\u7684\u5f37\u5ea6\u3001\u8010\u7528\u5e74\u6570<\/strong>, \u305d\u306e\u305f\u3081\u3001\u6b21\u4e16\u4ee3\u306e\u9ad8\u6e29\u30a6\u30a7\u30fc\u30cf\u30d7\u30ed\u30bb\u30b9\u88c5\u7f6e\u306b\u7406\u60f3\u7684\u306a\u30bd\u30ea\u30e5\u30fc\u30b7\u30e7\u30f3\u3068\u306a\u3063\u3066\u3044\u308b\u3002.<\/p>\n

\"\u534a\u5c0e\u4f53\u9ad8\u6e29\u8010\u98df\u30ad\u30e3\u30ea\u30a2\u7528\u9ad8\u7d14\u5ea6SiC\u30a6\u30a7\u30cf\u30dc\u30fc\u30c8\" \"\u534a\u5c0e\u4f53\u9ad8\u6e29\u8010\u98df\u30ad\u30e3\u30ea\u30a2\u7528\u9ad8\u7d14\u5ea6SiC\u30a6\u30a7\u30cf\u30dc\u30fc\u30c8\" \"\u534a\u5c0e\u4f53\u9ad8\u6e29\u8010\u98df\u30ad\u30e3\u30ea\u30a2\u7528\u9ad8\u7d14\u5ea6SiC\u30a6\u30a7\u30cf\u30dc\u30fc\u30c8\"<\/p>\n

\u4e3b\u306a\u5229\u70b9<\/h2>\n

\u512a\u308c\u305f\u9ad8\u6e29\u5b89\u5b9a\u6027<\/h3>\n

\u6700\u9ad8\u6e29\u5ea6\u3067\u306e\u5b89\u5b9a\u3057\u305f\u52d5\u4f5c 1650\u00b0C<\/strong>, \u5909\u5f62\u3001\u3072\u3073\u5272\u308c\u3001\u69cb\u9020\u7684\u52a3\u5316\u306f\u306a\u3044\u3002.<\/p>\n

\u512a\u308c\u305f\u8010\u85ac\u54c1\u6027<\/h3>\n

\u306a\u3069\u306e\u8150\u98df\u6027\u30ac\u30b9\u306b\u9ad8\u3044\u8010\u6027\u3092\u6301\u3064\u3002 HCl, Cl\u2082, NH\u2083<\/strong>, \u30d7\u30ed\u30bb\u30b9\u30c1\u30e3\u30f3\u30d0\u30fc\u5185\u306e\u6c5a\u67d3\u3092\u6700\u5c0f\u9650\u306b\u6291\u3048\u308b\u3002.<\/p>\n

\u9ad8\u3044\u6a5f\u68b0\u7684\u5f37\u5ea6<\/h3>\n

\u71b1\u81a8\u5f35\u4fc2\u6570\u304c\u4f4e\u304f\u3001\u71b1\u30b5\u30a4\u30af\u30eb\u3092\u7e70\u308a\u8fd4\u3057\u3066\u3082\u69cb\u9020\u7684\u5b8c\u5168\u6027\u304c\u9ad8\u3044\u3002.<\/p>\n

\u8d85\u4f4e\u767a\u5875<\/h3>\n

\u93e1\u9762\u7814\u78e8\u3055\u308c\u305f\u8868\u9762\uff08Ra < 5 nm\uff09\u306f\u3001\u30d1\u30fc\u30c6\u30a3\u30af\u30eb\u306e\u8131\u843d\u3092\u5927\u5e45\u306b\u4f4e\u6e1b\u3057\u3001\u30a6\u30a7\u30fc\u30cf\u306e\u6b69\u7559\u307e\u308a\u3092\u5411\u4e0a\u3055\u305b\u307e\u3059\u3002.<\/p>\n

\u8010\u7528\u5e74\u6570\u306e\u5ef6\u9577<\/h3>\n

\u6700\u5f8c \u77f3\u82f1\u30a6\u30a7\u30cf\u30fc\u30dc\u30fc\u30c8\u306e2\uff5e5\u500d\u306e\u5bff\u547d<\/strong>, \u30e1\u30f3\u30c6\u30ca\u30f3\u30b9\u983b\u5ea6\u3068\u7dcf\u6240\u6709\u30b3\u30b9\u30c8\u3092\u524a\u6e1b\u3059\u308b\u3002.<\/p>\n

\u30ab\u30b9\u30bf\u30e0\u30fb\u30a8\u30f3\u30b8\u30cb\u30a2\u30ea\u30f3\u30b0\u30fb\u30c7\u30b6\u30a4\u30f3<\/h3>\n

\u4ee5\u4e0b\u306e\u3088\u3046\u306a\u8907\u6570\u306e\u69cb\u6210\u3067\u5229\u7528\u53ef\u80fd\uff1a<\/p>\n

    \n
  • \u30d5\u30e9\u30c3\u30c8\u30bf\u30a4\u30d7<\/li>\n
  • V\u5b57\u578b<\/li>\n
  • \u591a\u6bb5\/\u30b9\u30bf\u30c3\u30af\u30fb\u30c7\u30b6\u30a4\u30f3<\/li>\n
  • \u30ab\u30b9\u30bf\u30e0\u30b9\u30ed\u30c3\u30c8\u306e\u9593\u9694\u3068\u5f62\u72b6<\/li>\n<\/ul>\n
    \n

    \u7d20\u6750\u3068\u88fd\u9020\u5de5\u7a0b<\/h2>\n

    \u9ad8\u7d14\u5ea6\u539f\u6599\u306e\u9078\u629e<\/h3>\n
      \n
    • SiC\u306e\u7d14\u5ea6\uff1a >99.9%<\/strong><\/li>\n
    • \u7c92\u5ea6\u5206\u5e03\u3092\u53b3\u5bc6\u306b\u5236\u5fa1\u3057\u3001\u5747\u4e00\u306a\u5bc6\u5ea6\u3092\u5b9f\u73fe<\/li>\n<\/ul>\n

      \u6210\u5f62\u30d7\u30ed\u30bb\u30b9<\/h3>\n
        \n
      • \u51b7\u9593\u9759\u6c34\u5727\u30d7\u30ec\u30b9\uff08CIP\uff09<\/li>\n
      • \u7cbe\u5bc6\u6210\u5f62\u307e\u305f\u306f\u7a4d\u5c64\u9020\u5f62<\/li>\n
      • \u4e80\u88c2\u306e\u306a\u3044\u30b0\u30ea\u30fc\u30f3\u30dc\u30c7\u30a3\u69cb\u9020\u3092\u78ba\u4fdd<\/li>\n<\/ul>\n

        \u9ad8\u6e29\u713c\u7d50<\/h3>\n
          \n
        • \u4e0a\u8a18\u306e\u713c\u7d50 2000\u00b0C<\/strong> \u4e0d\u6d3b\u6027\/\u771f\u7a7a\u96f0\u56f2\u6c17\u4e2d<\/li>\n
        • \u7dfb\u5bc6\u3067\u5b89\u5b9a\u3057\u305fSiC\u69cb\u9020\u3092\u5f62\u6210<\/li>\n<\/ul>\n

          CVD\/CVI\u88dc\u5f37<\/h3>\n
            \n
          • \u8868\u9762\u306e\u5bc6\u5ea6\u3068\u7d14\u5ea6\u3092\u9ad8\u3081\u308b<\/li>\n
          • \u30a6\u30a7\u30cf\u30fc\u51e6\u7406\u4e2d\u306e\u30d1\u30fc\u30c6\u30a3\u30af\u30eb\u653e\u51fa\u3092\u4f4e\u6e1b<\/li>\n<\/ul>\n

            \u7cbe\u5bc6CNC\u52a0\u5de5<\/h3>\n
              \n
            • \u5bf8\u6cd5\u516c\u5dee\uff1a \u00b10.01 mm<\/strong><\/li>\n
            • \u8907\u96d1\u306a\u30a6\u30a7\u30cf\u30fc\u642d\u8f09\u69cb\u9020\u306b\u6700\u9069<\/li>\n<\/ul>\n

              \u93e1\u9762\u7814\u78e8<\/h3>\n
                \n
              • \u5316\u5b66\u6a5f\u68b0\u7814\u78e8\uff08CMP\uff09<\/li>\n
              • \u8868\u9762\u7c97\u3055\u3092\u5b9f\u73fe\uff1a Ra < 5 nm<\/strong><\/li>\n<\/ul>\n

                \u6700\u7d42\u691c\u67fb<\/h3>\n
                  \n
                • \u5bc6\u5ea6\u8a66\u9a13<\/li>\n
                • \u8010\u71b1\u885d\u6483\u8a66\u9a13<\/li>\n
                • \u7c92\u5b50\u6c5a\u67d3\u5206\u6790<\/li>\n
                • \u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0\u5305\u88c5<\/li>\n<\/ul>\n
                  \n

                  \u5fdc\u7528\u5206\u91ce<\/h2>\n
                    \n
                  • \u534a\u5c0e\u4f53\u30a6\u30a7\u30cf\u30fc\u62e1\u6563\u30d7\u30ed\u30bb\u30b9<\/li>\n
                  • LPCVD\/\u9178\u5316\u7089\u30b7\u30b9\u30c6\u30e0<\/li>\n
                  • SiC\u304a\u3088\u3073GaN\u30a8\u30d4\u30bf\u30ad\u30b7\u30fc\u88fd\u9020<\/li>\n
                  • \u592a\u967d\u96fb\u6c60\u306e\u71b1\u51e6\u7406<\/li>\n
                  • \u9ad8\u6e29\u5b9f\u9a13\u5ba4\u3067\u306e\u7814\u7a76<\/li>\n<\/ul>\n
                    \n

                    \u4ee3\u8868\u7684\u306a\u4ed5\u69d8\uff08\u30ab\u30b9\u30bf\u30e0\u53ef\u80fd\uff09<\/h2>\n
                    \n
                    \n\n\n\n\n\n\n\n\n\n\n
                    \u30d1\u30e9\u30e1\u30fc\u30bf<\/th>\n\u4fa1\u5024<\/th>\n<\/tr>\n<\/thead>\n
                    \u30a6\u30a8\u30cf\u30fc\u30b5\u30a4\u30ba<\/td>\n6\u201d \/ 8\u201d \/ 12\u201d<\/td>\n<\/tr>\n
                    \u7d20\u6750<\/td>\nSiC\uff08\u70ad\u5316\u30b1\u30a4\u7d20\uff09<\/td>\n<\/tr>\n
                    \u7d14\u5ea6<\/td>\n>99.9%<\/td>\n<\/tr>\n
                    \u6700\u9ad8\u4f7f\u7528\u6e29\u5ea6<\/td>\n\u22641650\u00b0C<\/td>\n<\/tr>\n
                    \u8868\u9762\u7c97\u3055<\/td>\nRa < 5 nm<\/td>\n<\/tr>\n
                    \u8010\u7528\u5e74\u6570<\/td>\n2-5\u00d7\u77f3\u82f1\u30a6\u30a7\u30cf\u30fc\u30dc\u30fc\u30c8<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n
                    \n

                    SiC\u30a6\u30a7\u30cf\u30fc\u30dc\u30fc\u30c8\u3092\u9078\u3076\u7406\u7531<\/h2>\n

                    SiC\u30a6\u30a7\u30cf\u30fc\u30dc\u30fc\u30c8\u306f\u3001\u6c5a\u67d3\u30ea\u30b9\u30af\u3092\u6700\u5c0f\u9650\u306b\u6291\u3048\u306a\u304c\u3089\u3001\u904e\u9177\u306a\u6761\u4ef6\u4e0b\u3067\u3082\u69cb\u9020\u7684\u5b89\u5b9a\u6027\u3092\u7dad\u6301\u3067\u304d\u308b\u305f\u3081\u3001\u5148\u7aef\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u304a\u3044\u3066\u597d\u307e\u3057\u3044\u9078\u629e\u80a2\u3068\u306a\u308a\u3064\u3064\u3042\u308b\u3002SiC\u30a6\u30a7\u30fc\u30cf\u30dc\u30fc\u30c8\u306f\u3001\u7279\u306b\u9ad8\u6e29\u30fb\u8150\u98df\u74b0\u5883\u306b\u304a\u3044\u3066\u3001\u30d7\u30ed\u30bb\u30b9\u306e\u4fe1\u983c\u6027\u3068\u30a6\u30a7\u30fc\u30cf\u306e\u6b69\u7559\u307e\u308a\u3092\u5927\u5e45\u306b\u5411\u4e0a\u3055\u305b\u307e\u3059\u3002.<\/p>\n

                    \n

                    \u3088\u304f\u3042\u308b\u3054\u8cea\u554f<\/h2>\n

                    1.\u30a6\u30a7\u30cf\u30fc\u30dc\u30fc\u30c8\u306b\u304a\u3044\u3066\u3001SiC\u306f\u77f3\u82f1\u3088\u308a\u3069\u306e\u3088\u3046\u306b\u512a\u308c\u3066\u3044\u307e\u3059\u304b\uff1f<\/h3>\n

                    SiC\u306f\u3001\u3088\u308a\u9ad8\u3044\u6e29\u5ea6\u8010\u6027\u3001\u3088\u308a\u5f37\u3044\u5316\u5b66\u7684\u5b89\u5b9a\u6027\u3001\u3088\u308a\u9577\u3044\u5bff\u547d\u3092\u63d0\u4f9b\u3057\u3001\u9ad8\u5ea6\u306a\u534a\u5c0e\u4f53\u30d7\u30ed\u30bb\u30b9\u306b\u3088\u308a\u9069\u3057\u3066\u3044\u308b\u3002.<\/p>\n

                    2.\u30ab\u30b9\u30bf\u30de\u30a4\u30ba\u30c7\u30b6\u30a4\u30f3\u306f\u53ef\u80fd\u3067\u3059\u304b\uff1f<\/h3>\n

                    \u30a6\u30a7\u30fc\u30cf\u30b5\u30a4\u30ba\u3001\u7089\u306e\u30bf\u30a4\u30d7\u3001\u30d7\u30ed\u30bb\u30b9\u8981\u4ef6\u306b\u57fa\u3065\u304f\u30d5\u30eb\u30ab\u30b9\u30bf\u30de\u30a4\u30ba\u306b\u5bfe\u5fdc\u3057\u3066\u3044\u307e\u3059\u3002.<\/p>\n

                    3.\u8868\u9762\u54c1\u8cea\u57fa\u6e96\u3068\u306f\u4f55\u3067\u3059\u304b\uff1f<\/h3>\n

                    \u8868\u9762\u306f\u93e1\u9762\u4ed5\u4e0a\u3052\u3002 Ra < 5 nm<\/strong>, \u8d85\u4f4e\u30d1\u30fc\u30c6\u30a3\u30af\u30eb\u6c5a\u67d3\u3092\u4fdd\u8a3c\u3059\u308b\u3002.<\/p>\n

                    4.\u4e00\u822c\u7684\u306a\u5bff\u547d\u306f\uff1f<\/h3>\n

                    \u4e00\u822c\u7684\u306b \u77f3\u82f1\u30a6\u30a7\u30cf\u30fc\u30dc\u30fc\u30c8\u306e2\uff5e5\u500d\u306e\u5bff\u547d<\/strong>, \u30d7\u30ed\u30bb\u30b9\u6761\u4ef6\u306b\u3088\u3063\u3066\u7570\u306a\u308b\u3002.<\/p>","protected":false},"excerpt":{"rendered":"

                    \u306b\u3064\u3044\u3066 \u70ad\u5316\u30b1\u30a4\u7d20\uff08SiC\uff09\u30a6\u30a7\u30cf\u30fc\u30dc\u30fc\u30c8<\/strong> 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