Q3: \u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3055\u308c\u305f\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u30c8\u30ec\u30a4\u3068\u30d5\u30ebCVD SiC\u30c8\u30ec\u30a4\u306e\u9055\u3044\u306f\u4f55\u3067\u3059\u304b\uff1f<\/span><\/h3>\n\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u30c8\u30ec\u30a4\u306f\u3001\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u30b3\u30a2\u306bSiC\u4fdd\u8b77\u5c64\u3092\u65bd\u3057\u305f\u3082\u306e\u3067\u3001\u30d5\u30ebCVD SiC\u30c8\u30ec\u30a4\u306f\u30e2\u30ce\u30ea\u30b7\u30c3\u30af\u69cb\u9020\u3067\u3001\u9ad8\u7d14\u5ea6\u3001\u8010\u98df\u6027\u306b\u512a\u308c\u3001\u9577\u5bff\u547d\u3067\u3042\u308b\u3002.<\/p>","protected":false},"excerpt":{"rendered":"
The SiC ceramic tray plate is a high-performance wafer carrier designed for advanced semiconductor processes such as MOCVD, epitaxy, and ICP etching. It is available in two structures: Graphite substrate with CVD SiC coating Monolithic high-purity CVD SiC tray (\u226599.99%) Compared with conventional graphite carriers, this product offers significantly improved thermal stability, corrosion resistance, and service life, making it ideal for demanding high-temperature semiconductor manufacturing environments. It is widely used in GaN LED production, power semiconductor fabrication, and precision wafer processing systems. Key Features & Advantages 1. Ultra-High Temperature Resistance Stable operation at 1100\u20131200\u00b0C+ Suitable for harsh MOCVD and epitaxial growth environments No deformation under long-term thermal cycling 2. Superior 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![\"\"](\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-3-300x300.png\")
SiC\u30bb\u30e9\u30df\u30c3\u30af\u30c8\u30ec\u30a4\u30fb\u30d7\u30ec\u30fc\u30c8\u306f\u3001MOCVD\u3001\u30a8\u30d4\u30bf\u30ad\u30b7\u30fc\u3001ICP\u30a8\u30c3\u30c1\u30f3\u30b0\u306a\u3069\u306e\u5148\u7aef\u534a\u5c0e\u4f53\u30d7\u30ed\u30bb\u30b9\u7528\u306b\u8a2d\u8a08\u3055\u308c\u305f\u9ad8\u6027\u80fd\u30a6\u30a7\u30fc\u30cf\u30fb\u30ad\u30e3\u30ea\u30a2\u3067\u3059\u30022\u7a2e\u985e\u306e\u69cb\u9020\u304c\u3042\u308a\u307e\u3059\uff1a<\/p>\n![\"\"](\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-300x300.png\")
![\"\"](\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-1-300x300.png\")
![\"\"](\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-2-300x300.png\")
<\/p>\n