{"id":2100,"date":"2026-05-12T03:59:56","date_gmt":"2026-05-12T03:59:56","guid":{"rendered":"https:\/\/www.xkh-ceramics.com\/?post_type=product&#038;p=2100"},"modified":"2026-05-12T03:59:56","modified_gmt":"2026-05-12T03:59:56","slug":"customized-sic-ceramic-end-effector-for-wafer-handling","status":"publish","type":"product","link":"https:\/\/www.xkh-ceramics.com\/ja\/product\/customized-sic-ceramic-end-effector-for-wafer-handling\/","title":{"rendered":"\u30a6\u30a7\u30cf\u30fc\u30cf\u30f3\u30c9\u30ea\u30f3\u30b0\u7528\u30ab\u30b9\u30bf\u30de\u30a4\u30baSiC\u30bb\u30e9\u30df\u30c3\u30af\u30a8\u30f3\u30c9\u30a8\u30d5\u30a7\u30af\u30bf\u30fc"},"content":{"rendered":"<p data-start=\"737\" data-end=\"989\"><img fetchpriority=\"high\" decoding=\"async\" class=\"size-medium wp-image-2101 alignright\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-3-300x300.png\" alt=\"\" width=\"300\" height=\"300\" 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300px\" \/>\u70ad\u5316\u30b1\u30a4\u7d20\uff08SiC\uff09\u30bb\u30e9\u30df\u30c3\u30af\u30a8\u30f3\u30c9\u30a8\u30d5\u30a7\u30af\u30bf\u30fc\u306f\u3001\u30a6\u30a7\u30fc\u30cf\u642c\u9001\u30ed\u30dc\u30c3\u30c8\u3001AMHS\u30b7\u30b9\u30c6\u30e0\u3001EUV\u9732\u5149\u88c5\u7f6e\u3001\u9ad8\u6e29\u30d7\u30ed\u30bb\u30b9\u30c4\u30fc\u30eb\u306a\u3069\u306e\u534a\u5c0e\u4f53\u81ea\u52d5\u5316\u30b7\u30b9\u30c6\u30e0\u7528\u306b\u8a2d\u8a08\u3055\u308c\u305f\u9ad8\u7cbe\u5ea6\u30a6\u30a7\u30fc\u30cf\u30cf\u30f3\u30c9\u30ea\u30f3\u30b0\u90e8\u54c1\u3067\u3059\u3002.<\/p>\n<p data-start=\"991\" data-end=\"1308\">\u9ad8\u7d14\u5ea6CVD SiC\u307e\u305f\u306f\u4eba\u5de5SSiC\u304b\u3089\u4f5c\u3089\u308c\u305f\u3053\u306e\u30a8\u30f3\u30c9\u30a8\u30d5\u30a7\u30af\u30bf\u30fc\u306f\u3001\u5353\u8d8a\u3057\u305f\u525b\u6027\u3001\u8d85\u4f4e\u30d1\u30fc\u30c6\u30a3\u30af\u30eb\u767a\u751f\u3001\u5353\u8d8a\u3057\u305f\u71b1\u7684\u30fb\u5316\u5b66\u7684\u5b89\u5b9a\u6027\u3092\u5b9f\u73fe\u3057\u307e\u3059\u3002\u30b3\u30f3\u30bf\u30df\u30cd\u30fc\u30b7\u30e7\u30f3\u30b3\u30f3\u30c8\u30ed\u30fc\u30eb\u3068\u4f4d\u7f6e\u6c7a\u3081\u7cbe\u5ea6\u304c\u91cd\u8981\u306a300mm\u304a\u3088\u3073\u5148\u7aef\u30ce\u30fc\u30c9\u534a\u5c0e\u4f53\u5de5\u5834\u3067\u5e83\u304f\u4f7f\u7528\u3055\u308c\u3066\u3044\u307e\u3059\u3002.<\/p>\n<p data-start=\"1310\" data-end=\"1470\">\u5f93\u6765\u306e\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\u3084\u77f3\u82f1\u306e\u30a8\u30f3\u30c9\u30a8\u30d5\u30a7\u30af\u30bf\u3068\u6bd4\u8f03\u3057\u3066\u3001SiC\u30bb\u30e9\u30df\u30c3\u30af\u30bd\u30ea\u30e5\u30fc\u30b7\u30e7\u30f3\u306f\u3001\u30d7\u30ed\u30bb\u30b9\u306e\u5b89\u5b9a\u6027\u3001\u30a6\u30a7\u30fc\u30cf\u306e\u5b89\u5168\u6027\u3001\u88c5\u7f6e\u306e\u5bff\u547d\u3092\u5927\u5e45\u306b\u6539\u5584\u3057\u307e\u3059\u3002.<\/p>\n<hr data-start=\"1472\" data-end=\"1475\" \/>\n<h2 data-section-id=\"ruuu6i\" data-start=\"1477\" data-end=\"1494\">\u4e3b\u306a\u5229\u70b9<\/h2>\n<h3 data-section-id=\"1igp1it\" data-start=\"1496\" data-end=\"1532\">\u8d85\u4f4e\u30d1\u30fc\u30c6\u30a3\u30af\u30eb\u6c5a\u67d3<\/h3>\n<ul data-start=\"1533\" data-end=\"1664\">\n<li data-section-id=\"1lx1qmw\" data-start=\"1533\" data-end=\"1587\">\u30d1\u30fc\u30c6\u30a3\u30af\u30eb\u306e\u767a\u751f&lt;0.1\/cm\u00b2 (SEMI F57\u6e96\u62e0)<\/li>\n<li data-section-id=\"8gkyog\" data-start=\"1588\" data-end=\"1618\">\u91d1\u5c5e\u30a4\u30aa\u30f3\u6c5a\u67d3\u306a\u3057<\/li>\n<li data-section-id=\"m28nyw\" data-start=\"1619\" data-end=\"1664\">EUV\u304a\u3088\u3073\u5148\u7aef\u30ce\u30fc\u30c9\u30d7\u30ed\u30bb\u30b9\u306b\u6700\u9069<\/li>\n<\/ul>\n<hr data-start=\"1666\" data-end=\"1669\" \/>\n<h3 data-section-id=\"nha58o\" data-start=\"1671\" data-end=\"1710\">\u9ad8\u3044\u525b\u6027\u3068\u7cbe\u5bc6\u5b89\u5b9a\u6027<\/h3>\n<ul data-start=\"1711\" data-end=\"1837\">\n<li data-section-id=\"n58wtx\" data-start=\"1711\" data-end=\"1740\">\u30e4\u30f3\u30b0\u7387\uff1a\uff5e420GPa<\/li>\n<li data-section-id=\"wiw01d\" data-start=\"1741\" data-end=\"1790\">\u632f\u52d5\u306b\u3088\u308b\u30a6\u30a7\u30cf\u306e\u4f4d\u7f6e\u305a\u308c\u3092\u9632\u6b62<\/li>\n<li data-section-id=\"kx1hzh\" data-start=\"1791\" data-end=\"1837\">\u5b89\u5b9a\u3057\u305f\u9ad8\u901f\u30ed\u30dc\u30c3\u30c8\u642c\u9001\u3092\u5b9f\u73fe<\/li>\n<\/ul>\n<hr data-start=\"1839\" data-end=\"1842\" \/>\n<h3 data-section-id=\"2ge170\" data-start=\"1844\" data-end=\"1875\">\u512a\u308c\u305f\u71b1\u5b89\u5b9a\u6027<\/h3>\n<ul data-start=\"1876\" data-end=\"2015\">\n<li data-section-id=\"ibg0yp\" data-start=\"1876\" data-end=\"1927\">\u4f7f\u7528\u6e29\u5ea6\uff1a\u6700\u9ad81600\u2103\uff08\u9178\u5316\u6027\uff09<\/li>\n<li data-section-id=\"1e7mmjn\" data-start=\"1928\" data-end=\"1963\">1950\u2103\u307e\u3067\uff08\u4e0d\u6d3b\u6027\u96f0\u56f2\u6c17\uff09<\/li>\n<li data-section-id=\"j5ees9\" data-start=\"1964\" data-end=\"2015\">\u904e\u9177\u306a\u534a\u5c0e\u4f53\u74b0\u5883\u306b\u6700\u9069<\/li>\n<\/ul>\n<hr data-start=\"2017\" data-end=\"2020\" \/>\n<h3 data-section-id=\"1twxua8\" data-start=\"2022\" data-end=\"2063\">\u512a\u308c\u305f\u8010\u85ac\u54c1\u6027\u3068\u8010\u30d7\u30e9\u30ba\u30de\u6027<\/h3>\n<ul data-start=\"2064\" data-end=\"2212\">\n<li data-section-id=\"x6lsw\" data-start=\"2064\" data-end=\"2120\">\u9178\u3001\u30a2\u30eb\u30ab\u30ea\u3001\u30d7\u30e9\u30ba\u30de\u74b0\u5883\u306b\u5f37\u3044<\/li>\n<li data-section-id=\"1c1d6qm\" data-start=\"2121\" data-end=\"2169\">CVD\/PVD\/\u30a8\u30c3\u30c1\u30f3\u30b0\u30c1\u30e3\u30f3\u30d0\u30fc\u5185\u3067\u306e\u8150\u98df\u306a\u3057<\/li>\n<li data-section-id=\"1o7zcce\" data-start=\"2170\" data-end=\"2212\">SiH\u2084\u3001NH\u2083\u3001HCl\u30d7\u30ed\u30bb\u30b9\u30ac\u30b9\u306b\u5b89\u5b9a<\/li>\n<\/ul>\n<hr data-start=\"2214\" data-end=\"2217\" \/>\n<h3 data-section-id=\"14bamzt\" data-start=\"2219\" data-end=\"2252\">\u78e8\u8017\u30d5\u30ea\u30fc\uff06\u9577\u5bff\u547d<\/h3>\n<ul data-start=\"2253\" data-end=\"2380\">\n<li data-section-id=\"10g9b8f\" data-start=\"2253\" data-end=\"2283\">\u30d3\u30c3\u30ab\u30fc\u30b9\u786c\u5ea6\uff1a\uff5e2800HV<\/li>\n<li data-section-id=\"14dvdy4\" data-start=\"2284\" data-end=\"2335\">\u9577\u6642\u9593\u306e\u904b\u8ee2\u3067\u3082\u30d1\u30fc\u30c6\u30a3\u30af\u30eb\u306e\u8131\u843d\u304c\u306a\u3044<\/li>\n<li data-section-id=\"12rqc97\" data-start=\"2336\" data-end=\"2380\">\u512a\u308c\u305f\u8868\u9762\u8010\u4e45\u6027\uff08Ra &lt; 0.2 \u03bcm\uff09<\/li>\n<\/ul>\n<hr data-start=\"2382\" data-end=\"2385\" \/>\n<h2 data-section-id=\"1xqplm3\" data-start=\"2387\" data-end=\"2418\">\u69cb\u9020\u3068\u30c7\u30b6\u30a4\u30f3\u306e\u7279\u5fb4<\/h2>\n<h3 data-section-id=\"1nh5g76\" data-start=\"2420\" data-end=\"2457\">\u9ad8\u7cbe\u5ea6\u30a6\u30a7\u30cf\u30fc\u30cf\u30f3\u30c9\u30ea\u30f3\u30b0\u30fb\u30b8\u30aa\u30e1\u30c8\u30ea\u30fc<\/h3>\n<p data-start=\"2458\" data-end=\"2467\">\u30b5\u30dd\u30fc\u30c8\u3059\u308b\uff1a<\/p>\n<ul data-start=\"2468\" data-end=\"2596\">\n<li data-section-id=\"15tpg53\" data-start=\"2468\" data-end=\"2508\">150mm \/ 200mm \/ 300mm \/ 450mm\u30a6\u30a7\u30cf<\/li>\n<li data-section-id=\"1rnwp5m\" data-start=\"2509\" data-end=\"2563\">\u30a8\u30c3\u30b8\u30b0\u30ea\u30c3\u30d7\/\u30ce\u30c3\u30c1\u30a2\u30e9\u30a4\u30e1\u30f3\u30c8\/\u30d5\u30e9\u30c3\u30c8\u30b5\u30dd\u30fc\u30c8\u30c7\u30b6\u30a4\u30f3<\/li>\n<li data-section-id=\"qm27un\" data-start=\"2564\" data-end=\"2596\">\u30ab\u30b9\u30bf\u30e0\u30ed\u30dc\u30c3\u30c8\u30a2\u30fc\u30e0\u306e\u7d71\u5408<\/li>\n<\/ul>\n<hr data-start=\"2598\" data-end=\"2601\" \/>\n<h3 data-section-id=\"1yw23gm\" data-start=\"2603\" data-end=\"2643\">\u9ad8\u525b\u6027\u8efd\u91cf\u69cb\u9020<\/h3>\n<ul data-start=\"2644\" data-end=\"2768\">\n<li data-section-id=\"tt3pyh\" data-start=\"2644\" data-end=\"2677\">\u9ad8\u3044\u525b\u6027\u91cd\u91cf\u6bd4<\/li>\n<li data-section-id=\"1sb17em\" data-start=\"2678\" data-end=\"2721\">\u9ad8\u901f\u30ed\u30dc\u30c3\u30c8\u30b7\u30b9\u30c6\u30e0\u306b\u6700\u9069<\/li>\n<li data-section-id=\"1j6yie2\" data-start=\"2722\" data-end=\"2768\">\u52d5\u4f5c\u4e2d\u306e\u52d5\u7684\u305f\u308f\u307f\u3092\u6700\u5c0f\u5316<\/li>\n<\/ul>\n<hr data-start=\"2770\" data-end=\"2773\" \/>\n<h3 data-section-id=\"97w9la\" data-start=\"2775\" data-end=\"2809\">\u8d85\u30af\u30ea\u30fc\u30f3\u306a\u8868\u9762\u52a0\u5de5<\/h3>\n<ul data-start=\"2810\" data-end=\"2905\">\n<li data-section-id=\"1lu1i7j\" data-start=\"2810\" data-end=\"2844\">\u7cbe\u5bc6\u7814\u524a\u30fb\u7814\u78e8<\/li>\n<li data-section-id=\"1amctgl\" data-start=\"2845\" data-end=\"2870\">\u4f4e\u3044\u8868\u9762\u7c97\u3055<\/li>\n<li data-section-id=\"1js4nxo\" data-start=\"2871\" data-end=\"2905\">\u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0\u5bfe\u5fdc\u69cb\u9020<\/li>\n<\/ul>\n<hr data-start=\"2907\" data-end=\"2910\" \/>\n<h3 data-section-id=\"50i47d\" data-start=\"2912\" data-end=\"2944\">\u30ab\u30b9\u30bf\u30e0\u30fb\u30a8\u30f3\u30b8\u30cb\u30a2\u30ea\u30f3\u30b0\u30fb\u30a4\u30f3\u30bf\u30fc\u30d5\u30a7\u30fc\u30b9<\/h3>\n<ul data-start=\"2945\" data-end=\"3063\">\n<li data-section-id=\"1dle0c1\" data-start=\"2945\" data-end=\"2981\">\u30ed\u30dc\u30c3\u30c8\u30a2\u30fc\u30e0\u53d6\u308a\u4ed8\u3051\u4e92\u63db\u6027<\/li>\n<li data-section-id=\"19fhsyz\" data-start=\"2982\" data-end=\"3018\">AMHS\u30b7\u30b9\u30c6\u30e0\u306eOEM\u7d71\u5408<\/li>\n<li data-section-id=\"3wahd3\" data-start=\"3019\" data-end=\"3063\">\u7279\u6ce8\u306e\u7a74\u4f4d\u7f6e\u3068\u6cbb\u5177\u8a2d\u8a08<\/li>\n<\/ul>\n<hr data-start=\"3065\" data-end=\"3068\" \/>\n<h2 data-section-id=\"rb24ym\" data-start=\"3070\" data-end=\"3089\">\u7d20\u6750\u30aa\u30d7\u30b7\u30e7\u30f3<\/h2>\n<h3 data-section-id=\"87v3o9\" data-start=\"3091\" data-end=\"3124\">CVD\u70ad\u5316\u30b1\u30a4\u7d20 (CVD SiC)<\/h3>\n<ul data-start=\"3125\" data-end=\"3232\">\n<li data-section-id=\"1qjlbs6\" data-start=\"3125\" data-end=\"3146\">\u8d85\u9ad8\u7d14\u5ea6<\/li>\n<li data-section-id=\"1856ohe\" data-start=\"3147\" data-end=\"3198\">EUV\/\u5148\u7aef\u534a\u5c0e\u4f53\u30d7\u30ed\u30bb\u30b9\u306b\u6700\u9069<\/li>\n<li data-section-id=\"1lwpzbt\" data-start=\"3199\" data-end=\"3232\">\u8d85\u4f4e\u6c5a\u67d3\u30ec\u30d9\u30eb<\/li>\n<\/ul>\n<hr data-start=\"3234\" data-end=\"3237\" \/>\n<h3 data-section-id=\"gwj4n0\" data-start=\"3239\" data-end=\"3274\">\u713c\u7d50\u70ad\u5316\u30b1\u30a4\u7d20\uff08SSiC\uff09<\/h3>\n<ul data-start=\"3275\" data-end=\"3402\">\n<li data-section-id=\"1hi8oju\" data-start=\"3275\" data-end=\"3312\">\u9ad8\u3044\u5f37\u5ea6\u3068\u8010\u6469\u8017\u6027<\/li>\n<li data-section-id=\"1rnk9x7\" data-start=\"3313\" data-end=\"3363\">\u7523\u696d\u7528\u30a6\u30a7\u30cf\u30fc\u30cf\u30f3\u30c9\u30ea\u30f3\u30b0\u30b7\u30b9\u30c6\u30e0\u306b\u6700\u9069<\/li>\n<li data-section-id=\"67fp04\" data-start=\"3364\" data-end=\"3402\">\u512a\u308c\u305f\u30b3\u30b9\u30c8\u30d1\u30d5\u30a9\u30fc\u30de\u30f3\u30b9<\/li>\n<\/ul>\n<hr data-start=\"3404\" data-end=\"3407\" \/>\n<h2 data-section-id=\"1cgu054\" data-start=\"3409\" data-end=\"3436\">\u6280\u8853\u4ed5\u69d8<\/h2>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"3438\" data-end=\"3888\">\n<thead data-start=\"3438\" data-end=\"3462\">\n<tr data-start=\"3438\" data-end=\"3462\">\n<th class=\"last:pe-10\" data-start=\"3438\" data-end=\"3445\" data-col-size=\"sm\">\u9805\u76ee<\/th>\n<th class=\"last:pe-10\" data-start=\"3445\" data-end=\"3462\" data-col-size=\"sm\">\u4ed5\u69d8<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"3487\" data-end=\"3888\">\n<tr data-start=\"3487\" data-end=\"3516\">\n<td data-start=\"3487\" data-end=\"3498\" data-col-size=\"sm\">\u7d20\u6750<\/td>\n<td data-col-size=\"sm\" data-start=\"3498\" data-end=\"3516\">CVD SiC \/ SSiC<\/td>\n<\/tr>\n<tr data-start=\"3517\" data-end=\"3536\">\n<td data-start=\"3517\" data-end=\"3526\" data-col-size=\"sm\">\u7d14\u5ea6<\/td>\n<td data-start=\"3526\" data-end=\"3536\" data-col-size=\"sm\">&gt;99.5%<\/td>\n<\/tr>\n<tr data-start=\"3537\" data-end=\"3561\">\n<td data-start=\"3537\" data-end=\"3550\" data-col-size=\"sm\">\u7c92\u5ea6<\/td>\n<td data-col-size=\"sm\" data-start=\"3550\" data-end=\"3561\">4-10 \u03bcm<\/td>\n<\/tr>\n<tr data-start=\"3562\" data-end=\"3587\">\n<td data-start=\"3562\" data-end=\"3572\" data-col-size=\"sm\">\u5bc6\u5ea6<\/td>\n<td data-col-size=\"sm\" data-start=\"3572\" data-end=\"3587\">&gt;3.14 g\/cm\u00b3 \u4ee5\u4e0a<\/td>\n<\/tr>\n<tr data-start=\"3588\" data-end=\"3611\">\n<td data-start=\"3588\" data-end=\"3599\" data-col-size=\"sm\">\u786c\u5ea6<\/td>\n<td data-col-size=\"sm\" data-start=\"3599\" data-end=\"3611\">~2800 HV<\/td>\n<\/tr>\n<tr data-start=\"3612\" data-end=\"3643\">\n<td data-start=\"3612\" data-end=\"3632\" data-col-size=\"sm\">\u66f2\u3052\u5f37\u5ea6<\/td>\n<td data-col-size=\"sm\" data-start=\"3632\" data-end=\"3643\">450 MPa<\/td>\n<\/tr>\n<tr data-start=\"3644\" data-end=\"3673\">\n<td data-start=\"3644\" data-end=\"3662\" data-col-size=\"sm\">\u5f3e\u6027\u4fc2\u6570<\/td>\n<td data-col-size=\"sm\" data-start=\"3662\" data-end=\"3673\">420 GPa<\/td>\n<\/tr>\n<tr data-start=\"3674\" data-end=\"3710\">\n<td data-start=\"3674\" data-end=\"3697\" data-col-size=\"sm\">\u71b1\u4f1d\u5c0e\u7387<\/td>\n<td data-col-size=\"sm\" data-start=\"3697\" data-end=\"3710\">160 W\/m-K<\/td>\n<\/tr>\n<tr data-start=\"3711\" data-end=\"3768\">\n<td data-start=\"3711\" data-end=\"3729\" data-col-size=\"sm\">\u6700\u9ad8\u6e29\u5ea6<\/td>\n<td data-col-size=\"sm\" data-start=\"3729\" data-end=\"3768\">1600\u00b0C (\u9178\u5316) \/ 1950\u00b0C (\u4e0d\u6d3b\u6027)<\/td>\n<\/tr>\n<tr data-start=\"3769\" data-end=\"3810\">\n<td data-start=\"3769\" data-end=\"3794\" data-col-size=\"sm\">\u96fb\u6c17\u62b5\u6297\u7387<\/td>\n<td data-col-size=\"sm\" data-start=\"3794\" data-end=\"3810\">10\u2076-10\u2078 \u03a9-cm<\/td>\n<\/tr>\n<tr data-start=\"3811\" data-end=\"3851\">\n<td data-start=\"3811\" data-end=\"3828\" data-col-size=\"sm\">\u8868\u9762\u4ed5\u4e0a\u3052<\/td>\n<td data-col-size=\"sm\" data-start=\"3828\" data-end=\"3851\">\u6975\u7d30\u7814\u78e8<\/td>\n<\/tr>\n<tr data-start=\"3852\" data-end=\"3888\">\n<td data-start=\"3852\" data-end=\"3859\" data-col-size=\"sm\">\u30b5\u30a4\u30ba<\/td>\n<td data-start=\"3859\" data-end=\"3888\" data-col-size=\"sm\">\u30ab\u30b9\u30bf\u30e0\uff08150-450mm\u30a6\u30a7\u30cf\uff09<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"3890\" data-end=\"3893\" \/>\n<h2 data-section-id=\"mu966k\" data-start=\"3895\" data-end=\"3910\">\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3<\/h2>\n<h3 data-section-id=\"6yu2ul\" data-start=\"3912\" data-end=\"3943\">\u534a\u5c0e\u4f53\u88fd\u9020<\/h3>\n<ul data-start=\"3944\" data-end=\"4097\">\n<li data-section-id=\"49bdmt\" data-start=\"3944\" data-end=\"3978\">EUV\u9732\u5149\u30a6\u30a7\u30cf\u30cf\u30f3\u30c9\u30ea\u30f3\u30b0<\/li>\n<li data-section-id=\"11xdzhh\" data-start=\"3979\" data-end=\"4017\">300mm\u30a6\u30a7\u30cf\u30fc\u30ed\u30dc\u30c3\u30c8\u642c\u9001\u30b7\u30b9\u30c6\u30e0<\/li>\n<li data-section-id=\"ox84z0\" data-start=\"4018\" data-end=\"4060\">CVD\/PVD\/\u30a8\u30c3\u30c1\u30f3\u30b0\u30c1\u30e3\u30f3\u30d0\u30fc\u306e\u81ea\u52d5\u5316<\/li>\n<li data-section-id=\"teg2xm\" data-start=\"4061\" data-end=\"4097\">\u30a4\u30aa\u30f3\u6ce8\u5165\u30a6\u30a7\u30cf\u30fc\u642c\u9001<\/li>\n<\/ul>\n<hr data-start=\"4099\" data-end=\"4102\" \/>\n<h3 data-section-id=\"sf9357\" data-start=\"4104\" data-end=\"4140\">\u5148\u7aef\u534a\u5c0e\u4f53\u6750\u6599<\/h3>\n<ul data-start=\"4141\" data-end=\"4248\">\n<li data-section-id=\"iiuum6\" data-start=\"4141\" data-end=\"4176\">SiC\u30d1\u30ef\u30fc\u30c7\u30d0\u30a4\u30b9\u306e\u30a6\u30a7\u30cf\u30fc\u30cf\u30f3\u30c9\u30ea\u30f3\u30b0<\/li>\n<li data-section-id=\"se94ot\" data-start=\"4177\" data-end=\"4211\">GaN\u30a8\u30d4\u30bf\u30ad\u30b7\u30fc\u88fd\u9020\u88c5\u7f6e<\/li>\n<li data-section-id=\"3yciq1\" data-start=\"4212\" data-end=\"4248\">\u9ad8\u6e29MOCVD\u30d7\u30ed\u30bb\u30b9<\/li>\n<\/ul>\n<hr data-start=\"4250\" data-end=\"4253\" \/>\n<h3 data-section-id=\"11khwnl\" data-start=\"4255\" data-end=\"4286\">\u592a\u967d\u5149\u767a\u96fb\u3068LED\u7523\u696d<\/h3>\n<ul data-start=\"4287\" data-end=\"4389\">\n<li data-section-id=\"q29bxq\" data-start=\"4287\" data-end=\"4319\">\u30bd\u30fc\u30e9\u30fc\u30a6\u30a7\u30fc\u30cf\u81ea\u52d5\u5316\u30e9\u30a4\u30f3<\/li>\n<li data-section-id=\"10mww1v\" data-start=\"4320\" data-end=\"4361\">\u30de\u30a4\u30af\u30edLED\/\u30df\u30cbLED\u642c\u9001\u30b7\u30b9\u30c6\u30e0<\/li>\n<li data-section-id=\"dp5vhg\" data-start=\"4362\" data-end=\"4389\">\u30b5\u30d5\u30a1\u30a4\u30a2\u30a6\u30a7\u30cf\u30fc\u30cf\u30f3\u30c9\u30ea\u30f3\u30b0<\/li>\n<\/ul>\n<hr data-start=\"4391\" data-end=\"4394\" \/>\n<h3 data-section-id=\"j366yc\" data-start=\"4396\" data-end=\"4428\">\u30aa\u30fc\u30c8\u30e1\u30fc\u30b7\u30e7\u30f3\uff06\u30ed\u30dc\u30c6\u30a3\u30af\u30b9 (AMHS)<\/h3>\n<ul data-start=\"4429\" data-end=\"4533\">\n<li data-section-id=\"fpj2it\" data-start=\"4429\" data-end=\"4459\">\u30a6\u30a7\u30cf\u642c\u9001\u30ed\u30dc\u30c3\u30c8\u30a2\u30fc\u30e0<\/li>\n<li data-section-id=\"e4e8u3\" data-start=\"4460\" data-end=\"4492\">\u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0\u30aa\u30fc\u30c8\u30e1\u30fc\u30b7\u30e7\u30f3\u30b7\u30b9\u30c6\u30e0<\/li>\n<li data-section-id=\"k0rhy6\" data-start=\"4493\" data-end=\"4533\">\u9ad8\u901f\u30de\u30c6\u30ea\u30a2\u30eb\u30cf\u30f3\u30c9\u30ea\u30f3\u30b0\u30b7\u30b9\u30c6\u30e0<\/li>\n<\/ul>\n<hr data-start=\"4535\" data-end=\"4538\" \/>\n<h3 data-section-id=\"1c5bbdr\" data-start=\"4540\" data-end=\"4573\">\u7814\u7a76\uff06\u30cf\u30a4\u30a8\u30f3\u30c9\u6a5f\u5668<\/h3>\n<ul data-start=\"4574\" data-end=\"4679\">\n<li data-section-id=\"1sbej07\" data-start=\"4574\" data-end=\"4604\">\u91cf\u5b50\u30c7\u30d0\u30a4\u30b9\u88fd\u9020<\/li>\n<li data-section-id=\"5u37w7\" data-start=\"4605\" data-end=\"4641\">\u6975\u4f4e\u6e29\u30a6\u30a7\u30cf\u30fc\u30cf\u30f3\u30c9\u30ea\u30f3\u30b0\u30b7\u30b9\u30c6\u30e0<\/li>\n<li data-section-id=\"i12e24\" data-start=\"4642\" data-end=\"4679\">\u30a2\u30c9\u30d0\u30f3\u30b9\u30c8\u30fb\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0\uff083D IC \/ MEMS\uff09<\/li>\n<\/ul>\n<hr data-start=\"4681\" data-end=\"4684\" \/>\n<h2 data-section-id=\"vm5qii\" data-start=\"4686\" data-end=\"4715\">\u88fd\u54c1\u306e\u5229\u70b9 \u6982\u8981<\/h2>\n<ul data-start=\"4717\" data-end=\"4996\">\n<li data-section-id=\"r4wmoo\" data-start=\"4717\" data-end=\"4750\">\u91d1\u5c5e\u6c5a\u67d3\u30ea\u30b9\u30af\u30bc\u30ed<\/li>\n<li data-section-id=\"w80eyq\" data-start=\"4751\" data-end=\"4797\">\u7cbe\u5bc6\u306a\u30cf\u30f3\u30c9\u30ea\u30f3\u30b0\u306e\u305f\u3081\u306e\u8d85\u9ad8\u525b\u6027<\/li>\n<li data-section-id=\"ovhb2l\" data-start=\"4798\" data-end=\"4842\">\u512a\u308c\u305f\u71b1\u5b89\u5b9a\u6027\u3068\u5316\u5b66\u7684\u5b89\u5b9a\u6027<\/li>\n<li data-section-id=\"1pry50x\" data-start=\"4843\" data-end=\"4878\">\u78e8\u8017\u3092\u6700\u5c0f\u9650\u306b\u6291\u3048\u305f\u9577\u5bff\u547d<\/li>\n<li data-section-id=\"16clm2x\" data-start=\"4879\" data-end=\"4919\">\u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0\u30aa\u30fc\u30c8\u30e1\u30fc\u30b7\u30e7\u30f3\u306b\u5bfe\u5fdc<\/li>\n<li data-section-id=\"1usfebt\" data-start=\"4920\" data-end=\"4956\">\u3042\u3089\u3086\u308b\u30a6\u30a7\u30cf\u30fc\u30b5\u30a4\u30ba\u306b\u30ab\u30b9\u30bf\u30de\u30a4\u30ba\u53ef\u80fd<\/li>\n<li data-section-id=\"whnxc2\" data-start=\"4957\" data-end=\"4996\">EUV\u304a\u3088\u3073\u5148\u7aef\u30ce\u30fc\u30c9\u306b\u6700\u9069<\/li>\n<\/ul>\n<hr data-start=\"4998\" data-end=\"5001\" \/>\n<h2 data-section-id=\"rnyyeg\" data-start=\"5003\" data-end=\"5027\">\u30ab\u30b9\u30bf\u30de\u30a4\u30ba\u30fb\u30aa\u30d7\u30b7\u30e7\u30f3<img decoding=\"async\" class=\"size-medium wp-image-2102 alignright\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2-300x300.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2-150x150.png 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2-768x768.png 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2-12x12.png 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2-600x600.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2-100x100.png 100w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/h2>\n<p data-start=\"5029\" data-end=\"5067\">\u5b8c\u5168\u306aOEM\/ODM\u306e\u30ab\u30b9\u30bf\u30de\u30a4\u30ba\u3092\u30b5\u30dd\u30fc\u30c8\u3057\u307e\u3059\uff1a<\/p>\n<ul data-start=\"5069\" data-end=\"5319\">\n<li data-section-id=\"pzy3qt\" data-start=\"5069\" data-end=\"5127\">\u30a8\u30f3\u30c9\u30a8\u30d5\u30a7\u30af\u30bf\u30fc\u306e\u5f62\u72b6\uff08\u30d5\u30e9\u30c3\u30c8\uff0f\u30a8\u30c3\u30b8\u30b0\u30ea\u30c3\u30d7\uff0f\u30ce\u30c3\u30c1\u30a2\u30e9\u30a4\u30e1\u30f3\u30c8\uff09<\/li>\n<li data-section-id=\"173oufn\" data-start=\"5128\" data-end=\"5168\">\u30a6\u30a7\u30fc\u30cf\u30b5\u30a4\u30ba\u5bfe\u5fdc (150-450mm)<\/li>\n<li data-section-id=\"1sh3bgb\" data-start=\"5169\" data-end=\"5195\">\u30ed\u30dc\u30c3\u30c8\u30fb\u30a4\u30f3\u30bf\u30fc\u30d5\u30a7\u30fc\u30b9\u30fb\u30c7\u30b6\u30a4\u30f3<\/li>\n<li data-section-id=\"1ma3ck\" data-start=\"5196\" data-end=\"5252\">\u8868\u9762\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\uff08\u5e2f\u96fb\u9632\u6b62\/\u758e\u6c34\u6027\u30aa\u30d7\u30b7\u30e7\u30f3\uff09<\/li>\n<li data-section-id=\"7mw706\" data-start=\"5253\" data-end=\"5289\">\u7cbe\u5bc6\u516c\u5dee\u306e\u6700\u9069\u5316<\/li>\n<li data-section-id=\"w4j63d\" data-start=\"5290\" data-end=\"5319\">\u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0\u4ed5\u69d8\u306e\u4ed5\u4e0a\u3052<\/li>\n<\/ul>\n<hr data-start=\"5321\" data-end=\"5324\" \/>\n<h2 data-section-id=\"1hryhf7\" data-start=\"5326\" data-end=\"5332\">\u3088\u304f\u3042\u308b\u3054\u8cea\u554f<\/h2>\n<h3 data-section-id=\"1mpzh4o\" data-start=\"5334\" data-end=\"5384\">Q1\uff1a\u306a\u305c\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\u3084\u77f3\u82f1\u3067\u306f\u306a\u304fSiC\u306a\u306e\u3067\u3059\u304b\uff1f<\/h3>\n<ul data-start=\"5385\" data-end=\"5556\">\n<li data-section-id=\"1xvhlf0\" data-start=\"5385\" data-end=\"5437\">\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\uff1a\u30d1\u30fc\u30c6\u30a3\u30af\u30eb\u306e\u767a\u751f\u3068\u9178\u5316\u306e\u554f\u984c<\/li>\n<li data-section-id=\"1q7gghy\" data-start=\"5438\" data-end=\"5489\">\u77f3\u82f1\uff1a\u3082\u308d\u3044\uff0b\u8010\u71b1\u885d\u6483\u6027\u306b\u52a3\u308b<\/li>\n<li data-section-id=\"vgt2b3\" data-start=\"5490\" data-end=\"5556\">SiC\uff1a\u525b\u6027\u3001\u6e05\u6d44\u6027\u3001\u8010\u4e45\u6027\u306e\u6700\u9ad8\u306e\u7d44\u307f\u5408\u308f\u305b<\/li>\n<\/ul>\n<hr data-start=\"5558\" data-end=\"5561\" \/>\n<h3 data-section-id=\"1cxfupn\" data-start=\"5563\" data-end=\"5599\">Q2: 450mm\u30a6\u30a7\u30cf\u30fc\u306b\u5bfe\u5fdc\u3067\u304d\u307e\u3059\u304b\uff1f<\/h3>\n<p data-start=\"5600\" data-end=\"5667\">\u306f\u3044\u3001450mm\u30a6\u30a7\u30fc\u30cf\u30cf\u30f3\u30c9\u30ea\u30f3\u30b0\u30b7\u30b9\u30c6\u30e0\u306e\u30ab\u30b9\u30bf\u30e0\u8a2d\u8a08\u304c\u53ef\u80fd\u3067\u3059\u3002.<\/p>\n<hr data-start=\"5669\" data-end=\"5672\" \/>\n<h3 data-section-id=\"a4nxop\" data-start=\"5674\" data-end=\"5717\">Q3: EUV\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fc\u306b\u9069\u3057\u3066\u3044\u307e\u3059\u304b\uff1f<\/h3>\n<p data-start=\"5718\" data-end=\"5803\">\u306f\u3044\u3002SiC\u30a8\u30f3\u30c9\u30a4\u30d5\u30a7\u30af\u30bf\u30fc\u306f\u3001\u8d85\u4f4e\u30d1\u30fc\u30c6\u30a3\u30af\u30eb\u304a\u3088\u3073\u771f\u7a7a\u306e\u4e92\u63db\u6027\u8981\u4ef6\u3092\u6e80\u305f\u3057\u3066\u3044\u307e\u3059\u3002.<\/p>\n<hr data-start=\"5805\" data-end=\"5808\" \/>\n<h3 data-section-id=\"1ajqsm3\" data-start=\"5810\" data-end=\"5872\">Q4\uff1a\u771f\u7a7a\u3084\u9ad8\u6e29\u306e\u30b7\u30b9\u30c6\u30e0\u3067\u3082\u4f7f\u7528\u3067\u304d\u307e\u3059\u304b\uff1f<\/h3>\n<p data-start=\"5873\" data-end=\"5951\">\u306f\u3044\u3002SiC\u306f\u771f\u7a7a\u3001\u30d7\u30e9\u30ba\u30de\u3001\u9ad8\u6e29\u306e\u74b0\u5883\u3067\u3082\u5b89\u5b9a\u3057\u305f\u6027\u80fd\u3092\u767a\u63ee\u3057\u307e\u3059\u3002.<\/p>","protected":false},"excerpt":{"rendered":"<p>The Silicon Carbide (SiC) Ceramic End Effector is a high-precision wafer handling component designed for semiconductor automation systems, including wafer transfer robots, AMHS systems, EUV lithography equipment, and high-temperature process tools. Made from high-purity CVD SiC or engineered SSiC, this end effector delivers exceptional rigidity, ultra-low particle generation, and outstanding thermal and chemical stability. It is widely used in 300mm and advanced node semiconductor fabs, where contamination control and positioning accuracy are critical. Compared with traditional aluminum or quartz end effectors, SiC ceramic solutions significantly improve process stability, wafer safety, and equipment lifetime. 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