{"id":2095,"date":"2026-05-12T03:44:27","date_gmt":"2026-05-12T03:44:27","guid":{"rendered":"https:\/\/www.xkh-ceramics.com\/?post_type=product&#038;p=2095"},"modified":"2026-05-12T03:44:27","modified_gmt":"2026-05-12T03:44:27","slug":"high-purity-silicon-carbide-wafer-tray-for-semiconductor-cvd-processing","status":"publish","type":"product","link":"https:\/\/www.xkh-ceramics.com\/ja\/product\/high-purity-silicon-carbide-wafer-tray-for-semiconductor-cvd-processing\/","title":{"rendered":"High Purity Silicon Carbide Wafer Tray for Semiconductor &#038; CVD Processing"},"content":{"rendered":"<p data-start=\"199\" data-end=\"404\"><img fetchpriority=\"high\" decoding=\"async\" class=\"wp-image-2097 alignright\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/CVDSSiC-Silicon-Carbide-Tray-For-Semiconductor-Wafer-Processing-2-300x300.png\" alt=\"\" width=\"288\" height=\"288\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/CVDSSiC-Silicon-Carbide-Tray-For-Semiconductor-Wafer-Processing-2-300x300.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/CVDSSiC-Silicon-Carbide-Tray-For-Semiconductor-Wafer-Processing-2-150x150.png 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/CVDSSiC-Silicon-Carbide-Tray-For-Semiconductor-Wafer-Processing-2-768x768.png 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/CVDSSiC-Silicon-Carbide-Tray-For-Semiconductor-Wafer-Processing-2-12x12.png 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/CVDSSiC-Silicon-Carbide-Tray-For-Semiconductor-Wafer-Processing-2-600x600.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/CVDSSiC-Silicon-Carbide-Tray-For-Semiconductor-Wafer-Processing-2-100x100.png 100w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/CVDSSiC-Silicon-Carbide-Tray-For-Semiconductor-Wafer-Processing-2.png 1000w\" sizes=\"(max-width: 288px) 100vw, 288px\" \/>The silicon carbide wafer tray is a high-performance precision ceramic carrier designed for semiconductor wafer processing, CVD\/PECVD systems, vacuum furnaces, and high-temperature industrial environments.<\/p>\n<p data-start=\"406\" data-end=\"666\">Manufactured from high-purity CVD SiC or SSiC (sintered silicon carbide), this tray offers outstanding thermal stability, mechanical strength, and chemical resistance, ensuring stable wafer handling and consistent process performance in extreme conditions.<\/p>\n<p data-start=\"668\" data-end=\"818\">It is widely used in semiconductor manufacturing, LED epitaxy, sapphire wafer processing, advanced ceramics sintering, and vacuum thermal systems.<\/p>\n<hr data-start=\"820\" data-end=\"823\" \/>\n<h2 data-section-id=\"1ma7m6t\" data-start=\"825\" data-end=\"840\">Key Features<\/h2>\n<h3 data-section-id=\"1mskj6p\" data-start=\"842\" data-end=\"888\">High Temperature Stability (Up to 1600\u00b0C+)<\/h3>\n<p data-start=\"889\" data-end=\"1000\">Maintains structural integrity and performance under continuous high-temperature operation without deformation.<\/p>\n<h3 data-section-id=\"obi2s6\" data-start=\"1002\" data-end=\"1036\">Excellent Thermal Conductivity<\/h3>\n<p data-start=\"1037\" data-end=\"1136\">Ensures fast and uniform heat transfer, reducing temperature gradients and improving process yield.<\/p>\n<h3 data-section-id=\"hstd5z\" data-start=\"1138\" data-end=\"1175\">Superior Thermal Shock Resistance<\/h3>\n<p data-start=\"1176\" data-end=\"1248\">Withstands rapid heating and cooling cycles without cracking or warping.<\/p>\n<h3 data-section-id=\"1wy3za\" data-start=\"1250\" data-end=\"1278\">High Mechanical Strength<\/h3>\n<p data-start=\"1279\" data-end=\"1377\">Reinforced structure provides excellent load-bearing capacity and long-term dimensional stability.<\/p>\n<h3 data-section-id=\"1cdcof9\" data-start=\"1379\" data-end=\"1411\">Chemical &amp; Plasma Resistance<\/h3>\n<p data-start=\"1412\" data-end=\"1521\">Highly resistant to acids, alkalis, corrosive gases, and plasma environments used in semiconductor processes.<\/p>\n<h3 data-section-id=\"1vb1ood\" data-start=\"1523\" data-end=\"1557\">Ultra-High Precision Machining<\/h3>\n<p data-start=\"1558\" data-end=\"1663\">CNC grinding ensures tight tolerances, flatness, and smooth wafer contact surfaces for automated systems.<\/p>\n<hr data-start=\"1665\" data-end=\"1668\" \/>\n<h2 data-section-id=\"1lh3gui\" data-start=\"1670\" data-end=\"1690\">Structural Design<\/h2>\n<h3 data-section-id=\"1s8wich\" data-start=\"1692\" data-end=\"1726\">Multi-Zone Annular Slot Design<\/h3>\n<ul data-start=\"1727\" data-end=\"1850\">\n<li data-section-id=\"gkdwm3\" data-start=\"1727\" data-end=\"1745\">Reduces weight<\/li>\n<li data-section-id=\"18issq2\" data-start=\"1746\" data-end=\"1777\">Improves thermal uniformity<\/li>\n<li data-section-id=\"l3j2gw\" data-start=\"1778\" data-end=\"1807\">Enhances heat dissipation<\/li>\n<li data-section-id=\"1tnc39l\" data-start=\"1808\" data-end=\"1850\">Minimizes thermal stress concentration<\/li>\n<\/ul>\n<p data-start=\"1852\" data-end=\"1942\">This structure is optimized for high-temperature wafer processing and vacuum applications.<\/p>\n<hr data-start=\"1944\" data-end=\"1947\" \/>\n<h3 data-section-id=\"10p8bw6\" data-start=\"1949\" data-end=\"1984\">Radial Reinforcement Rib System<\/h3>\n<ul data-start=\"1985\" data-end=\"2144\">\n<li data-section-id=\"93l2pt\" data-start=\"1985\" data-end=\"2018\">Increases mechanical rigidity<\/li>\n<li data-section-id=\"xmgkcx\" data-start=\"2019\" data-end=\"2054\">Prevents deformation under load<\/li>\n<li data-section-id=\"16xz56l\" data-start=\"2055\" data-end=\"2088\">Improves rotational stability<\/li>\n<li data-section-id=\"1i3nv5f\" data-start=\"2089\" data-end=\"2144\">Extends service life in cyclic thermal environments<\/li>\n<\/ul>\n<hr data-start=\"2146\" data-end=\"2149\" \/>\n<h3 data-section-id=\"erqgsk\" data-start=\"2151\" data-end=\"2181\">Precision Machined Surface<\/h3>\n<ul data-start=\"2182\" data-end=\"2334\">\n<li data-section-id=\"tdalbr\" data-start=\"2182\" data-end=\"2215\">High flatness and consistency<\/li>\n<li data-section-id=\"1jpgedk\" data-start=\"2216\" data-end=\"2250\">Smooth wafer contact interface<\/li>\n<li data-section-id=\"muk23v\" data-start=\"2251\" data-end=\"2297\">Compatible with robotic automation systems<\/li>\n<li data-section-id=\"t302yy\" data-start=\"2298\" data-end=\"2334\">Reduces particle generation risk<\/li>\n<\/ul>\n<hr data-start=\"2336\" data-end=\"2339\" \/>\n<h3 data-section-id=\"1jxpmtp\" data-start=\"2341\" data-end=\"2371\">Central Mounting Interface<\/h3>\n<p data-start=\"2372\" data-end=\"2415\">Precision-drilled center structure ensures:<\/p>\n<ul data-start=\"2416\" data-end=\"2541\">\n<li data-section-id=\"1prbs8w\" data-start=\"2416\" data-end=\"2441\">Stable shaft mounting<\/li>\n<li data-section-id=\"cemghk\" data-start=\"2442\" data-end=\"2483\">Accurate alignment in furnace systems<\/li>\n<li data-section-id=\"pxfn4\" data-start=\"2484\" data-end=\"2541\">Compatibility with automated wafer handling equipment<\/li>\n<\/ul>\n<hr data-start=\"2543\" data-end=\"2546\" \/>\n<h3 data-section-id=\"gqycxw\" data-start=\"2548\" data-end=\"2573\">Reinforced Outer Ring<\/h3>\n<ul data-start=\"2574\" data-end=\"2688\">\n<li data-section-id=\"17dniqy\" data-start=\"2574\" data-end=\"2605\">Enhances structural balance<\/li>\n<li data-section-id=\"yaoils\" data-start=\"2606\" data-end=\"2639\">Improves vibration resistance<\/li>\n<li data-section-id=\"16bzx41\" data-start=\"2640\" data-end=\"2688\">Strengthens edge durability during operation<\/li>\n<\/ul>\n<hr data-start=\"2690\" data-end=\"2693\" \/>\n<h2 data-section-id=\"rb24ym\" data-start=\"2695\" data-end=\"2714\">Material Options<\/h2>\n<h3 data-section-id=\"87v3o9\" data-start=\"2716\" data-end=\"2749\">CVD Silicon Carbide (CVD SiC)<\/h3>\n<ul data-start=\"2750\" data-end=\"2880\">\n<li data-section-id=\"1qjlbs6\" data-start=\"2750\" data-end=\"2771\">Ultra-high purity<\/li>\n<li data-section-id=\"ujmjxb\" data-start=\"2772\" data-end=\"2803\">Extremely low contamination<\/li>\n<li data-section-id=\"1529x9w\" data-start=\"2804\" data-end=\"2833\">Excellent surface quality<\/li>\n<li data-section-id=\"3atv6m\" data-start=\"2834\" data-end=\"2880\">Ideal for advanced semiconductor processes<\/li>\n<\/ul>\n<hr data-start=\"2882\" data-end=\"2885\" \/>\n<h3 data-section-id=\"gwj4n0\" data-start=\"2887\" data-end=\"2922\">Sintered Silicon Carbide (SSiC)<\/h3>\n<ul data-start=\"2923\" data-end=\"3068\">\n<li data-section-id=\"16na2wg\" data-start=\"2923\" data-end=\"2952\">High strength and density<\/li>\n<li data-section-id=\"v14n1q\" data-start=\"2953\" data-end=\"2982\">Excellent wear resistance<\/li>\n<li data-section-id=\"1s1u32c\" data-start=\"2983\" data-end=\"3015\">Stable in harsh environments<\/li>\n<li data-section-id=\"1586k58\" data-start=\"3016\" data-end=\"3068\">Suitable for industrial high-temperature systems<\/li>\n<\/ul>\n<hr data-start=\"3070\" data-end=\"3073\" \/>\n<h3 data-section-id=\"129y1qt\" data-start=\"3075\" data-end=\"3106\">Reaction-Bonded SiC (RBSiC)<\/h3>\n<ul data-start=\"3107\" data-end=\"3214\">\n<li data-section-id=\"rz6j8a\" data-start=\"3107\" data-end=\"3134\">Cost-effective solution<\/li>\n<li data-section-id=\"dvvzgf\" data-start=\"3135\" data-end=\"3168\">Good thermal shock resistance<\/li>\n<li data-section-id=\"ag3lnk\" data-start=\"3169\" data-end=\"3214\">Suitable for mass industrial applications<\/li>\n<\/ul>\n<hr data-start=\"3216\" data-end=\"3219\" \/>\n<h2 data-section-id=\"1cgu054\" data-start=\"3221\" data-end=\"3248\">Technical Specifications<\/h2>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"3250\" data-end=\"3636\">\n<thead data-start=\"3250\" data-end=\"3274\">\n<tr data-start=\"3250\" data-end=\"3274\">\n<th class=\"last:pe-10\" data-start=\"3250\" data-end=\"3257\" data-col-size=\"sm\">Item<\/th>\n<th class=\"last:pe-10\" data-start=\"3257\" data-end=\"3274\" data-col-size=\"sm\">Specification<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"3299\" data-end=\"3636\">\n<tr data-start=\"3299\" data-end=\"3336\">\n<td data-start=\"3299\" data-end=\"3310\" data-col-size=\"sm\">Material<\/td>\n<td data-start=\"3310\" data-end=\"3336\" data-col-size=\"sm\">CVD SiC \/ SSiC \/ RBSiC<\/td>\n<\/tr>\n<tr data-start=\"3337\" data-end=\"3361\">\n<td data-start=\"3337\" data-end=\"3346\" data-col-size=\"sm\">Purity<\/td>\n<td data-start=\"3346\" data-end=\"3361\" data-col-size=\"sm\">Up to 99.9%<\/td>\n<\/tr>\n<tr data-start=\"3362\" data-end=\"3398\">\n<td data-start=\"3362\" data-end=\"3386\" data-col-size=\"sm\">Operating Temperature<\/td>\n<td data-start=\"3386\" data-end=\"3398\" data-col-size=\"sm\">\u2264 1600\u00b0C<\/td>\n<\/tr>\n<tr data-start=\"3399\" data-end=\"3428\">\n<td data-start=\"3399\" data-end=\"3409\" data-col-size=\"sm\">Density<\/td>\n<td data-start=\"3409\" data-end=\"3428\" data-col-size=\"sm\">2.3 \u2013 3.9 g\/cm\u00b3<\/td>\n<\/tr>\n<tr data-start=\"3429\" data-end=\"3469\">\n<td data-start=\"3429\" data-end=\"3456\" data-col-size=\"sm\">Thermal Shock Resistance<\/td>\n<td data-start=\"3456\" data-end=\"3469\" data-col-size=\"sm\">Excellent<\/td>\n<\/tr>\n<tr data-start=\"3470\" data-end=\"3518\">\n<td data-start=\"3470\" data-end=\"3487\" data-col-size=\"sm\">Surface Finish<\/td>\n<td data-start=\"3487\" data-end=\"3518\" data-col-size=\"sm\">Precision Ground \/ Polished<\/td>\n<\/tr>\n<tr data-start=\"3519\" data-end=\"3560\">\n<td data-start=\"3519\" data-end=\"3527\" data-col-size=\"sm\">Shape<\/td>\n<td data-start=\"3527\" data-end=\"3560\" data-col-size=\"sm\">Custom (Round \/ Ring \/ Plate)<\/td>\n<\/tr>\n<tr data-start=\"3561\" data-end=\"3588\">\n<td data-start=\"3561\" data-end=\"3568\" data-col-size=\"sm\">Size<\/td>\n<td data-start=\"3568\" data-end=\"3588\" data-col-size=\"sm\">Custom Available<\/td>\n<\/tr>\n<tr data-start=\"3589\" data-end=\"3636\">\n<td data-start=\"3589\" data-end=\"3603\" data-col-size=\"sm\">Application<\/td>\n<td data-start=\"3603\" data-end=\"3636\" data-col-size=\"sm\">Semiconductor \/ CVD \/ Furnace<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"3638\" data-end=\"3641\" \/>\n<h2 data-section-id=\"mu966k\" data-start=\"3643\" data-end=\"3658\">Applications<\/h2>\n<h3 data-section-id=\"1eipr13\" data-start=\"3660\" data-end=\"3686\">Semiconductor Industry<\/h3>\n<ul data-start=\"3687\" data-end=\"3849\">\n<li data-section-id=\"13x15us\" data-start=\"3687\" data-end=\"3728\">Wafer carrier for CVD \/ PECVD systems<\/li>\n<li data-section-id=\"1ox36e0\" data-start=\"3729\" data-end=\"3774\">Diffusion, oxidation, annealing processes<\/li>\n<li data-section-id=\"1t8nanb\" data-start=\"3775\" data-end=\"3811\">RTP and epitaxial growth systems<\/li>\n<li data-section-id=\"1jzl031\" data-start=\"3812\" data-end=\"3849\">Wafer transfer and handling trays<\/li>\n<\/ul>\n<hr data-start=\"3851\" data-end=\"3854\" \/>\n<h3 data-section-id=\"l1oj08\" data-start=\"3856\" data-end=\"3881\">LED &amp; Optoelectronics<\/h3>\n<ul data-start=\"3882\" data-end=\"3982\">\n<li data-section-id=\"dgfruo\" data-start=\"3882\" data-end=\"3911\">Sapphire wafer processing<\/li>\n<li data-section-id=\"fwvbk7\" data-start=\"3912\" data-end=\"3943\">LED epitaxy carrier systems<\/li>\n<li data-section-id=\"1gl4kjt\" data-start=\"3944\" data-end=\"3982\">High-temperature substrate support<\/li>\n<\/ul>\n<hr data-start=\"3984\" data-end=\"3987\" \/>\n<h3 data-section-id=\"480g89\" data-start=\"3989\" data-end=\"4018\">Vacuum &amp; Thermal Furnaces<\/h3>\n<ul data-start=\"4019\" data-end=\"4115\">\n<li data-section-id=\"kqy2l\" data-start=\"4019\" data-end=\"4055\">High-temperature sintering trays<\/li>\n<li data-section-id=\"jgks7q\" data-start=\"4056\" data-end=\"4083\">Vacuum furnace carriers<\/li>\n<li data-section-id=\"1c2tpui\" data-start=\"4084\" data-end=\"4115\">Thermal processing fixtures<\/li>\n<\/ul>\n<hr data-start=\"4117\" data-end=\"4120\" \/>\n<h3 data-section-id=\"1owf0zc\" data-start=\"4122\" data-end=\"4148\">Advanced Manufacturing<\/h3>\n<ul data-start=\"4149\" data-end=\"4255\">\n<li data-section-id=\"odfyg7\" data-start=\"4149\" data-end=\"4181\">Precision ceramic processing<\/li>\n<li data-section-id=\"1kui91r\" data-start=\"4182\" data-end=\"4215\">Automation equipment fixtures<\/li>\n<li data-section-id=\"135k87d\" data-start=\"4216\" data-end=\"4255\">High-stability mechanical platforms<\/li>\n<\/ul>\n<hr data-start=\"4257\" data-end=\"4260\" \/>\n<h2 data-section-id=\"dysc5y\" data-start=\"4262\" data-end=\"4283\"><img decoding=\"async\" class=\"wp-image-2098 alignright\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/CVDSSiC-Silicon-Carbide-Tray-For-Semiconductor-Wafer-Processing-1-300x300.png\" alt=\"\" width=\"276\" height=\"276\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/CVDSSiC-Silicon-Carbide-Tray-For-Semiconductor-Wafer-Processing-1-300x300.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/CVDSSiC-Silicon-Carbide-Tray-For-Semiconductor-Wafer-Processing-1-150x150.png 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/CVDSSiC-Silicon-Carbide-Tray-For-Semiconductor-Wafer-Processing-1-768x768.png 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/CVDSSiC-Silicon-Carbide-Tray-For-Semiconductor-Wafer-Processing-1-12x12.png 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/CVDSSiC-Silicon-Carbide-Tray-For-Semiconductor-Wafer-Processing-1-600x600.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/CVDSSiC-Silicon-Carbide-Tray-For-Semiconductor-Wafer-Processing-1-100x100.png 100w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/CVDSSiC-Silicon-Carbide-Tray-For-Semiconductor-Wafer-Processing-1.png 1000w\" sizes=\"(max-width: 276px) 100vw, 276px\" \/>Product Advantages<\/h2>\n<ul data-start=\"4285\" data-end=\"4537\">\n<li data-section-id=\"an6nuo\" data-start=\"4285\" data-end=\"4326\">Excellent high-temperature resistance<\/li>\n<li data-section-id=\"1rm14qx\" data-start=\"4327\" data-end=\"4360\">Superior thermal conductivity<\/li>\n<li data-section-id=\"wx5di6\" data-start=\"4361\" data-end=\"4391\">High dimensional stability<\/li>\n<li data-section-id=\"ymf61l\" data-start=\"4392\" data-end=\"4413\">Long service life<\/li>\n<li data-section-id=\"1v5rrzz\" data-start=\"4414\" data-end=\"4440\">Low contamination risk<\/li>\n<li data-section-id=\"ddezgg\" data-start=\"4441\" data-end=\"4472\">Strong corrosion resistance<\/li>\n<li data-section-id=\"xmyntv\" data-start=\"4473\" data-end=\"4507\">Compatible with vacuum systems<\/li>\n<li data-section-id=\"1ijrpkq\" data-start=\"4508\" data-end=\"4537\">Fully customizable design<\/li>\n<\/ul>\n<hr data-start=\"4539\" data-end=\"4542\" \/>\n<h2 data-section-id=\"1lwg0so\" data-start=\"4544\" data-end=\"4571\"><img decoding=\"async\" class=\"wp-image-2096 alignright\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/CVDSSiC-Silicon-Carbide-Tray-For-Semiconductor-Wafer-Processing-3-300x300.png\" alt=\"\" width=\"280\" height=\"280\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/CVDSSiC-Silicon-Carbide-Tray-For-Semiconductor-Wafer-Processing-3-300x300.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/CVDSSiC-Silicon-Carbide-Tray-For-Semiconductor-Wafer-Processing-3-150x150.png 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/CVDSSiC-Silicon-Carbide-Tray-For-Semiconductor-Wafer-Processing-3-768x768.png 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/CVDSSiC-Silicon-Carbide-Tray-For-Semiconductor-Wafer-Processing-3-12x12.png 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/CVDSSiC-Silicon-Carbide-Tray-For-Semiconductor-Wafer-Processing-3-600x600.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/CVDSSiC-Silicon-Carbide-Tray-For-Semiconductor-Wafer-Processing-3-100x100.png 100w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/CVDSSiC-Silicon-Carbide-Tray-For-Semiconductor-Wafer-Processing-3.png 1000w\" sizes=\"(max-width: 280px) 100vw, 280px\" \/>Customization Capability<\/h2>\n<p data-start=\"4573\" data-end=\"4649\">We support full customization based on drawings or application requirements:<\/p>\n<ul data-start=\"4651\" data-end=\"4883\">\n<li data-section-id=\"1i7bvpn\" data-start=\"4651\" data-end=\"4689\">Diameter \/ thickness customization<\/li>\n<li data-section-id=\"dmyogn\" data-start=\"4690\" data-end=\"4720\">Slot geometry optimization<\/li>\n<li data-section-id=\"19luai6\" data-start=\"4721\" data-end=\"4749\">Precision mounting holes<\/li>\n<li data-section-id=\"r5ngym\" data-start=\"4750\" data-end=\"4781\">Surface polishing \/ lapping<\/li>\n<li data-section-id=\"c4ihff\" data-start=\"4782\" data-end=\"4818\">Ultra-flat wafer-grade machining<\/li>\n<li data-section-id=\"1lf2kpf\" data-start=\"4819\" data-end=\"4853\">High-purity material selection<\/li>\n<li data-section-id=\"881e6f\" data-start=\"4854\" data-end=\"4883\">Complex structural design<\/li>\n<\/ul>\n<p data-start=\"4885\" data-end=\"4956\">OEM &amp; ODM services available for semiconductor equipment manufacturers.<\/p>\n<hr data-start=\"4958\" data-end=\"4961\" \/>\n<h2 data-section-id=\"1hryhf7\" data-start=\"4963\" data-end=\"4969\">FAQ<\/h2>\n<h3 data-section-id=\"1rw8tyo\" data-start=\"4971\" data-end=\"5025\">Q1: What is a silicon carbide wafer tray used for?<\/h3>\n<p data-start=\"5026\" data-end=\"5173\">It is used to support and transport wafers during semiconductor processes such as CVD, PECVD, diffusion, oxidation, and high-temperature annealing.<\/p>\n<hr data-start=\"5175\" data-end=\"5178\" \/>\n<h3 data-section-id=\"8sm145\" data-start=\"5180\" data-end=\"5230\">Q2: Why use SiC instead of quartz or graphite?<\/h3>\n<p data-start=\"5231\" data-end=\"5244\">SiC provides:<\/p>\n<ul data-start=\"5245\" data-end=\"5391\">\n<li data-section-id=\"66suke\" data-start=\"5245\" data-end=\"5278\">Higher temperature resistance<\/li>\n<li data-section-id=\"1k27992\" data-start=\"5279\" data-end=\"5309\">Better mechanical strength<\/li>\n<li data-section-id=\"1y67fsp\" data-start=\"5310\" data-end=\"5337\">Lower thermal expansion<\/li>\n<li data-section-id=\"1kygjim\" data-start=\"5338\" data-end=\"5361\">Longer service life<\/li>\n<li data-section-id=\"d0e53t\" data-start=\"5362\" data-end=\"5391\">Better chemical stability<\/li>\n<\/ul>\n<hr data-start=\"5393\" data-end=\"5396\" \/>\n<h3 data-section-id=\"c1126k\" data-start=\"5398\" data-end=\"5433\">Q3: Can the tray be customized?<\/h3>\n<p data-start=\"5434\" data-end=\"5527\">Yes. We provide full customization including size, structure, thickness, and mounting design.<\/p>\n<hr data-start=\"5529\" data-end=\"5532\" \/>\n<h3 data-section-id=\"4sy20p\" data-start=\"5534\" data-end=\"5587\">Q4: Is it suitable for rapid heating and cooling?<\/h3>\n<p data-start=\"5588\" data-end=\"5686\">Yes. SiC has excellent thermal shock resistance, making it suitable for thermal cycling processes.<\/p>","protected":false},"excerpt":{"rendered":"<p data-start=\"199\" data-end=\"404\">The silicon carbide wafer tray is a high-performance precision ceramic carrier designed for semiconductor wafer processing, CVD\/PECVD systems, vacuum furnaces, and high-temperature industrial environments.<\/p>\n<p data-start=\"406\" data-end=\"666\">Manufactured from high-purity CVD SiC or SSiC (sintered silicon carbide), this tray offers outstanding thermal stability, mechanical strength, and chemical resistance, ensuring stable wafer handling and consistent process performance in extreme conditions.<\/p>","protected":false},"featured_media":2097,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center 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