{"id":2041,"date":"2026-05-08T05:45:52","date_gmt":"2026-05-08T05:45:52","guid":{"rendered":"https:\/\/www.xkh-ceramics.com\/?post_type=product&p=2041"},"modified":"2026-05-08T05:45:52","modified_gmt":"2026-05-08T05:45:52","slug":"sic-ceramic-end-effector-for-precision-wafer-handling-in-semiconductor-equipment","status":"publish","type":"product","link":"https:\/\/www.xkh-ceramics.com\/ja\/product\/sic-ceramic-end-effector-for-precision-wafer-handling-in-semiconductor-equipment\/","title":{"rendered":"\u534a\u5c0e\u4f53\u88c5\u7f6e\u306e\u7cbe\u5bc6\u30a6\u30a7\u30cf\u30fc\u30cf\u30f3\u30c9\u30ea\u30f3\u30b0\u7528SiC\u30bb\u30e9\u30df\u30c3\u30af\u30a8\u30f3\u30c9\u30a8\u30d5\u30a7\u30af\u30bf\u30fc"},"content":{"rendered":"

\"\"\u306b\u3064\u3044\u3066 SiC\u30bb\u30e9\u30df\u30c3\u30af\u30a8\u30f3\u30c9\u30a8\u30d5\u30a7\u30af\u30bf\u30fc<\/strong> \u306f\u3001\u534a\u5c0e\u4f53\u30aa\u30fc\u30c8\u30e1\u30fc\u30b7\u30e7\u30f3\u304a\u3088\u3073\u7cbe\u5bc6\u30ed\u30dc\u30c3\u30c8\u30b7\u30b9\u30c6\u30e0\u7528\u306b\u8a2d\u8a08\u3055\u308c\u305f\u9ad8\u6027\u80fd\u30a6\u30a7\u30cf\u30fc\u30cf\u30f3\u30c9\u30ea\u30f3\u30b0\u90e8\u54c1\u3067\u3059\u3002\u8d85\u9ad8\u7d14\u5ea6\u70ad\u5316\u30b1\u30a4\u7d20(SiC)\u30bb\u30e9\u30df\u30c3\u30af\u304b\u3089\u88fd\u9020\u3055\u308c\u3001\u6975\u9650\u306e\u30d7\u30ed\u30bb\u30b9\u74b0\u5883\u306b\u304a\u3044\u3066\u5353\u8d8a\u3057\u305f\u6a5f\u68b0\u7684\u5f37\u5ea6\u3001\u71b1\u5b89\u5b9a\u6027\u3001\u8010\u85ac\u54c1\u6027\u3092\u63d0\u4f9b\u3057\u307e\u3059\u3002.<\/p>\n

\u5f93\u6765\u306e\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\u88fd\u3001\u30b9\u30c6\u30f3\u30ec\u30b9\u88fd\u3001\u77f3\u82f1\u88fd\u306e\u30a8\u30f3\u30c9\u30a4\u30d5\u30a7\u30af\u30bf\u30fc\u3068\u6bd4\u8f03\u3057\u3066 SiC\u30bb\u30e9\u30df\u30c3\u30af\u30a8\u30f3\u30c9\u30a8\u30d5\u30a7\u30af\u30bf\u30fc<\/strong> \u306f\u3001\u30d1\u30fc\u30c6\u30a3\u30af\u30eb\u306e\u767a\u751f\u3092\u5927\u5e45\u306b\u4f4e\u6e1b\u3057\u3001\u512a\u308c\u305f\u5bf8\u6cd5\u5b89\u5b9a\u6027\u3068\u512a\u308c\u305f\u8010\u71b1\u5909\u5f62\u6027\u3092\u63d0\u4f9b\u3057\u307e\u3059\u3002\u7cbe\u5ea6\u3001\u6e05\u6d44\u5ea6\u3001\u4fe1\u983c\u6027\u304c\u91cd\u8981\u8996\u3055\u308c\u308b\u30a6\u30a7\u30cf\u30fc\u642c\u9001\u30b7\u30b9\u30c6\u30e0\u306b\u5e83\u304f\u4f7f\u7528\u3055\u308c\u3066\u3044\u307e\u3059\u3002.<\/p>\n

\u3053\u306e\u88fd\u54c1\u306f\u3001\u771f\u7a7a\u30c1\u30e3\u30f3\u30d0\u30fc\u3001\u30d7\u30e9\u30ba\u30de\u30d7\u30ed\u30bb\u30b9\u3001\u9ad8\u6e29\u88c5\u7f6e\u306a\u3069\u306e\u9ad8\u5ea6\u306a\u534a\u5c0e\u4f53\u88fd\u9020\u74b0\u5883\u306b\u9069\u3057\u3066\u3044\u307e\u3059\u3002.<\/p>\n

\n

\u6280\u8853\u4ed5\u69d8<\/h2>\n
\n
\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
\u30d7\u30ed\u30d1\u30c6\u30a3<\/th>\n\u5358\u4f4d<\/th>\n\u4fa1\u5024<\/th>\n<\/tr>\n<\/thead>\n
\u7d50\u6676\u69cb\u9020<\/td>\n-<\/td>\nFCC \u03b2 \u30d5\u30a7\u30fc\u30ba<\/td>\n<\/tr>\n
\u5bc6\u5ea6<\/td>\ng\/cm\u00b3<\/td>\n3.21<\/td>\n<\/tr>\n
\u5316\u5b66\u7684\u7d14\u5ea6<\/td>\n%<\/td>\n99.99995<\/td>\n<\/tr>\n
\u786c\u5ea6<\/td>\nHV<\/td>\n2500<\/td>\n<\/tr>\n
\u66f2\u3052\u5f37\u5ea6<\/td>\nMPa<\/td>\n415<\/td>\n<\/tr>\n
\u30e4\u30f3\u30b0\u7387<\/td>\nGPa<\/td>\n430<\/td>\n<\/tr>\n
\u71b1\u4f1d\u5c0e\u7387<\/td>\nW\/m-K<\/td>\n300<\/td>\n<\/tr>\n
\u71b1\u81a8\u5f35\u4fc2\u6570<\/td>\n10-\u2076\/K<\/td>\n4.5<\/td>\n<\/tr>\n
\u6700\u9ad8\u4f7f\u7528\u6e29\u5ea6<\/td>\n\u00b0C<\/td>\n2700<\/td>\n<\/tr>\n
\u71b1\u5bb9\u91cf<\/td>\nJ-kg-\u00b9-K-\u00b9<\/td>\n640<\/td>\n<\/tr>\n
\u7c92\u5ea6<\/td>\n\u03bcm<\/td>\n2-10<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n
\n

\"\"\u4e3b\u306a\u7279\u5fb4<\/h2>\n

\u8d85\u9ad8\u7d14\u5ea6\u7d20\u6750<\/strong>
\u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0\u74b0\u5883\u3067\u306e\u7c92\u5b50\u6c5a\u67d3\u3092\u6700\u5c0f\u9650\u306b\u6291\u3048\u307e\u3059\u3002.<\/p>\n

\u512a\u308c\u305f\u71b1\u5b89\u5b9a\u6027<\/strong>
\u7e70\u308a\u8fd4\u3055\u308c\u308b\u71b1\u30b5\u30a4\u30af\u30eb\u3084\u9ad8\u6e29\u51e6\u7406\u4e0b\u3067\u3082\u69cb\u9020\u7684\u5b8c\u5168\u6027\u3092\u7dad\u6301\u3002.<\/p>\n

\u4f4e\u71b1\u81a8\u5f35<\/strong>
\u30a6\u30a7\u30fc\u30cf\u642c\u9001\u6642\u306b\u9ad8\u3044\u5bf8\u6cd5\u7cbe\u5ea6\u3092\u63d0\u4f9b\u3057\u307e\u3059\u3002.<\/p>\n

\u9ad8\u3044\u6a5f\u68b0\u7684\u5f37\u5ea6<\/strong>
\u9023\u7d9a\u751f\u7523\u30b7\u30b9\u30c6\u30e0\u3067\u306e\u7834\u58ca\u3001\u6469\u8017\u3001\u9577\u671f\u75b2\u52b4\u306b\u5f37\u3044\u3002.<\/p>\n

\u8010\u85ac\u54c1\u6027<\/strong>
\u30d7\u30e9\u30ba\u30de\u3001\u8150\u98df\u6027\u30ac\u30b9\u3001\u771f\u7a7a\u74b0\u5883\u3067\u3082\u5b89\u5b9a\u3002.<\/p>\n

\u30a6\u30eb\u30c8\u30e9\u30b9\u30e0\u30fc\u30b9\u30fb\u30b5\u30fc\u30d5\u30a7\u30b9\u30fb\u30d5\u30a3\u30cb\u30c3\u30b7\u30e5<\/strong>
\u30a6\u30a7\u30cf\u30fc\u306e\u30b9\u30af\u30e9\u30c3\u30c1\u3092\u6e1b\u3089\u3057\u3001\u30cf\u30f3\u30c9\u30ea\u30f3\u30b0\u306e\u5b89\u5168\u6027\u3092\u5411\u4e0a\u3055\u305b\u307e\u3059\u3002.<\/p>\n

\u9577\u5bff\u547d<\/strong>
\u9ad8\u30b9\u30eb\u30fc\u30d7\u30c3\u30c8\u534a\u5c0e\u4f53\u88fd\u9020\u30b7\u30b9\u30c6\u30e0\u5411\u3051\u306b\u8a2d\u8a08\u3002.<\/p>\n

\n

\u88fd\u9020\u5de5\u7a0b<\/h2>\n

\u306b\u3064\u3044\u3066 SiC\u30bb\u30e9\u30df\u30c3\u30af\u30a8\u30f3\u30c9\u30a8\u30d5\u30a7\u30af\u30bf\u30fc<\/strong> \u306f\u9ad8\u5ea6\u306a\u30bb\u30e9\u30df\u30c3\u30af\u5de5\u5b66\u6280\u8853\u3092\u7528\u3044\u3066\u88fd\u9020\u3055\u308c\u3066\u3044\u308b\u3002.<\/p>\n

\u9ad8\u7d14\u5ea6\u306e\u70ad\u5316\u30b1\u30a4\u7d20\u7c89\u672b\u3092\u9078\u5225\u3057\u3001\u6750\u6599\u306e\u4e00\u8cab\u6027\u3092\u78ba\u4fdd\u3059\u308b\u305f\u3081\u306b\u53b3\u5bc6\u306b\u7ba1\u7406\u3055\u308c\u3066\u3044\u307e\u3059\u3002.<\/p>\n

\u8907\u96d1\u306a\u5f62\u72b6\u3092\u5b9f\u73fe\u3059\u308b\u305f\u3081\u306b\u3001\u51b7\u9593\u9759\u6c34\u5727\u30d7\u30ec\u30b9\u3084\u5c04\u51fa\u6210\u5f62\u3092\u7528\u3044\u3066\u7cbe\u5bc6\u6210\u5f62\u304c\u884c\u308f\u308c\u308b\u3002.<\/p>\n

2000\u2103\u4ee5\u4e0a\u306e\u9ad8\u6e29\u713c\u7d50\u306b\u3088\u308a\u3001\u5b8c\u5168\u306a\u9ad8\u5bc6\u5ea6\u5316\u3068\u69cb\u9020\u5b89\u5b9a\u6027\u304c\u4fdd\u8a3c\u3055\u308c\u308b\u3002.<\/p>\n

CNC\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u52a0\u5de5\u306b\u3088\u308a\u3001\u30df\u30af\u30ed\u30f3\u5358\u4f4d\u306e\u7cbe\u5ea6\u3068\u30a6\u30a7\u30fc\u30cf\u30b0\u30ec\u30fc\u30c9\u306e\u5e73\u5766\u5ea6\u3092\u5b9f\u73fe\u3002.<\/p>\n

\u6700\u7d42\u7684\u306a\u7814\u78e8\u3068\u691c\u67fb\u306b\u3088\u308a\u3001\u534a\u5c0e\u4f53\u30b0\u30ec\u30fc\u30c9\u306e\u898f\u683c\u306b\u6e96\u62e0\u3057\u3066\u3044\u308b\u3002.<\/p>\n

\u5404\u88fd\u54c1\u306f\u3001\u7d0d\u54c1\u524d\u306b\u53b3\u3057\u3044\u5bf8\u6cd5\u691c\u67fb\u3001\u8868\u9762\u54c1\u8cea\u691c\u67fb\u3001\u975e\u7834\u58ca\u691c\u67fb\u3092\u53d7\u3051\u3066\u3044\u308b\u3002.<\/p>\n

\n

\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3<\/h2>\n

\u306b\u3064\u3044\u3066 SiC\u30bb\u30e9\u30df\u30c3\u30af\u30a8\u30f3\u30c9\u30a8\u30d5\u30a7\u30af\u30bf\u30fc<\/strong> \u306f\u3001\u534a\u5c0e\u4f53\u304a\u3088\u3073\u9ad8\u7cbe\u5ea6\u30aa\u30fc\u30c8\u30e1\u30fc\u30b7\u30e7\u30f3\u30fb\u30b7\u30b9\u30c6\u30e0\u3067\u5e83\u304f\u4f7f\u7528\u3055\u308c\u3066\u3044\u308b\u3002.<\/p>\n

6\u30a4\u30f3\u30c1\u30018\u30a4\u30f3\u30c1\u300112\u30a4\u30f3\u30c1\u30a6\u30a7\u30fc\u30cf\u7528\u30a6\u30a7\u30fc\u30cf\u642c\u9001\u30b7\u30b9\u30c6\u30e0<\/p>\n

\u771f\u7a7a\u30c1\u30e3\u30f3\u30d0\u30fc\u306b\u304a\u3051\u308b\u30ed\u30dc\u30c3\u30c8\u30fb\u30a6\u30a7\u30cf\u30fc\u30fb\u30cf\u30f3\u30c9\u30ea\u30f3\u30b0\u30fb\u30b7\u30b9\u30c6\u30e0<\/p>\n

CVD\u3001ALD\u3001\u30a8\u30c3\u30c1\u30f3\u30b0\u3001\u84b8\u7740\u88c5\u7f6e<\/p>\n

FOUP\u304a\u3088\u3073FOSB\u81ea\u52d5\u8377\u5f79\u30b7\u30b9\u30c6\u30e0<\/p>\n

\u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0\u30fb\u30a6\u30a7\u30cf\u81ea\u52d5\u5316\u751f\u7523\u30e9\u30a4\u30f3<\/p>\n

\u30ec\u30fc\u30b6\u30fc\u52a0\u5de5\u30fb\u71b1\u51e6\u7406\u30b7\u30b9\u30c6\u30e0<\/p>\n

\"\"<\/p>\n

\n

\u5f93\u6765\u306e\u7d20\u6750\u3068\u6bd4\u8f03\u3057\u305f\u5229\u70b9<\/h2>\n

\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\u88fd\u30a8\u30f3\u30c9\u30a8\u30d5\u30a7\u30af\u30bf\u30fc\u3068\u6bd4\u8f03\u3057\u3066\u3001SiC\u30bb\u30e9\u30df\u30c3\u30af\u306f\u71b1\u5b89\u5b9a\u6027\u306b\u512a\u308c\u3001\u91d1\u5c5e\u6c5a\u67d3\u306e\u30ea\u30b9\u30af\u3092\u6392\u9664\u3057\u307e\u3059\u3002.<\/p>\n

\u77f3\u82f1\u306b\u6bd4\u3079\u3066\u6a5f\u68b0\u7684\u5f37\u5ea6\u304c\u9ad8\u304f\u3001\u30d1\u30fc\u30c6\u30a3\u30af\u30eb\u306e\u767a\u751f\u304c\u5c11\u306a\u3044\u3002.<\/p>\n

\u30b9\u30c6\u30f3\u30ec\u30b9\u92fc\u306b\u6bd4\u3079\u3001\u30d7\u30e9\u30ba\u30de\u3084\u9ad8\u6e29\u74b0\u5883\u4e0b\u3067\u3082\u9ad8\u3044\u4fe1\u983c\u6027\u3092\u767a\u63ee\u3059\u308b\u3002.<\/p>\n

\n

\u3088\u304f\u3042\u308b\u3054\u8cea\u554f<\/h2>\n

\u306a\u305c\u91d1\u5c5e\u3084\u77f3\u82f1\u3067\u306f\u306a\u304fSiC\u30bb\u30e9\u30df\u30c3\u30af\u88fd\u30a8\u30f3\u30c9\u30a8\u30d5\u30a7\u30af\u30bf\u30fc\u3092\u9078\u3076\u306e\u304b\uff1f<\/strong>
SiC\u30bb\u30e9\u30df\u30c3\u30af\u306f\u3001\u512a\u308c\u305f\u71b1\u5b89\u5b9a\u6027\u3001\u8010\u85ac\u54c1\u6027\u3001\u8d85\u4f4e\u30d1\u30fc\u30c6\u30a3\u30af\u30eb\u767a\u751f\u3092\u5b9f\u73fe\u3057\u3001\u5148\u7aef\u534a\u5c0e\u4f53\u30d7\u30ed\u30bb\u30b9\u306b\u6700\u9069\u3067\u3059\u3002.<\/p>\n

\u30ab\u30b9\u30bf\u30de\u30a4\u30ba\u306f\u53ef\u80fd\u304b\uff1f<\/strong>
\u30b8\u30aa\u30e1\u30c8\u30ea\u3001\u30a2\u30fc\u30e0\u306e\u9577\u3055\u3001\u30de\u30a6\u30f3\u30c8\u30a4\u30f3\u30bf\u30fc\u30d5\u30a7\u30fc\u30b9\u3001\u30a6\u30a7\u30fc\u30cf\u30b5\u30a4\u30ba\u4e92\u63db\u6027\u306a\u3069\u3001\u30d5\u30eb\u30ab\u30b9\u30bf\u30de\u30a4\u30ba\u306b\u5bfe\u5fdc\u3057\u3066\u3044\u307e\u3059\u3002.<\/p>\n

\u771f\u7a7a\u30b7\u30b9\u30c6\u30e0\u3084\u30d7\u30e9\u30ba\u30de\u30b7\u30b9\u30c6\u30e0\u306b\u9069\u3057\u3066\u3044\u307e\u3059\u304b\uff1f<\/strong>
\u306f\u3044\u3001SiC\u30bb\u30e9\u30df\u30c3\u30af\u306f\u5316\u5b66\u7684\u306b\u4e0d\u6d3b\u6027\u3067\u3001\u8d85\u9ad8\u771f\u7a7a\u3084\u30d7\u30e9\u30ba\u30de\u74b0\u5883\u3067\u3082\u78ba\u5b9f\u306b\u6a5f\u80fd\u3057\u307e\u3059\u3002.<\/p>\n

\u8010\u7528\u5e74\u6570\u306f\uff1f<\/strong>
\u6a19\u6e96\u7684\u306a\u4f7f\u7528\u6761\u4ef6\u4e0b\u3067\u306f\u3001\u5f93\u6765\u306e\u91d1\u5c5e\u88fd\u307e\u305f\u306f\u77f3\u82f1\u88fd\u306e\u30a8\u30f3\u30c9\u30a4\u30d5\u30a7\u30af\u30bf\u30fc\u306b\u6bd4\u3079\u3066\u3001\u8010\u7528\u5e74\u6570\u304c\u5927\u5e45\u306b\u9577\u304f\u306a\u3063\u3066\u3044\u307e\u3059\u3002.<\/p>\n

\u691c\u67fb\u5831\u544a\u66f8\u306f\u3042\u308a\u307e\u3059\u304b\uff1f<\/strong>
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