{"id":2293,"date":"2026-05-22T03:54:59","date_gmt":"2026-05-22T03:54:59","guid":{"rendered":"https:\/\/www.xkh-ceramics.com\/?p=2293"},"modified":"2026-05-22T09:16:18","modified_gmt":"2026-05-22T09:16:18","slug":"manufacturing-challenges-of-complex-structured-ceramic-components-for-semiconductor-equipment","status":"publish","type":"post","link":"https:\/\/www.xkh-ceramics.com\/ja\/manufacturing-challenges-of-complex-structured-ceramic-components-for-semiconductor-equipment\/","title":{"rendered":"\u534a\u5c0e\u4f53\u88c5\u7f6e\u7528\u8907\u96d1\u69cb\u9020\u30bb\u30e9\u30df\u30c3\u30af\u90e8\u54c1\u306e\u88fd\u9020\u4e0a\u306e\u8ab2\u984c"},"content":{"rendered":"

\u6700\u5148\u7aef\u306e\u534a\u5c0e\u4f53\u88fd\u9020\u3067\u306f\u3001\u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0\u3001\u5316\u5b66\u6c17\u76f8\u6210\u9577\uff08CVD\uff09\u3001\u30a4\u30aa\u30f3\u6ce8\u5165\u306a\u3069\u306e\u4e3b\u8981\u306a\u30d7\u30ed\u30bb\u30b9\u30e2\u30b8\u30e5\u30fc\u30eb\u304c\u3001\u9ad8\u30a8\u30cd\u30eb\u30ae\u30fc\u30d7\u30e9\u30ba\u30de\u3001\u8150\u98df\u6027\u30ac\u30b9\u3001\u9ad8\u96fb\u5727\u30d0\u30a4\u30a2\u30b9\u3001\u6025\u901f\u306a\u71b1\u30b5\u30a4\u30af\u30eb\u306a\u3069\u306e\u904e\u9177\u306a\u74b0\u5883\u4e0b\u3067\u52d5\u4f5c\u3057\u307e\u3059\u3002\u3053\u306e\u3088\u3046\u306a\u6761\u4ef6\u4e0b\u3067\u306f\u3001\u8a98\u96fb\u5b89\u5b9a\u6027\u3001\u8010\u8150\u98df\u6027\u3001\u71b1\u9069\u5408\u6027\u3001\u9577\u671f\u5bf8\u6cd5\u4fe1\u983c\u6027\u306a\u3069\u3001\u69cb\u9020\u6750\u6599\u306b\u53b3\u3057\u3044\u8981\u6c42\u304c\u8ab2\u3055\u308c\u307e\u3059\u3002.<\/p>\n\n\n\n

\u5148\u7aef\u30a8\u30f3\u30b8\u30cb\u30a2\u30ea\u30f3\u30b0\u30fb\u30bb\u30e9\u30df\u30c3\u30af\u30b9<\/a>-\u30a2\u30eb\u30df\u30ca(Al\u2082O\u2083)\u3001\u7a92\u5316\u30a2\u30eb\u30df\u30cb\u30a6\u30e0(AlN)\u3001\u70ad\u5316\u30b1\u30a4\u7d20(SiC)\u3001\u7a92\u5316\u30b1\u30a4\u7d20(Si\u2083N_2084)\u306a\u3069\u306e\u30bb\u30e9\u30df\u30c3\u30af\u90e8\u54c1\u306f\u3001\u71b1\u7684\u3001\u96fb\u6c17\u7684\u3001\u5316\u5b66\u7684\u5b89\u5b9a\u6027\u306b\u512a\u308c\u3066\u3044\u308b\u305f\u3081\u3001\u306a\u304f\u3066\u306f\u306a\u3089\u306a\u3044\u3082\u306e\u3068\u306a\u3063\u3066\u3044\u307e\u3059\u3002\u3057\u304b\u3057\u3001\u534a\u5c0e\u4f53\u88c5\u7f6e\u306e\u5c0f\u578b\u5316\u3068\u6a5f\u80fd\u7d71\u5408\u306b\u5411\u3051\u305f\u9032\u5316\u304c\u9032\u3080\u306b\u3064\u308c\u3001\u30bb\u30e9\u30df\u30c3\u30af\u90e8\u54c1\u306f\u5358\u7d14\u306a\u5f62\u72b6\u304b\u3089\u3001\u30de\u30a4\u30af\u30ed\u30c1\u30e3\u30cd\u30eb\u30cd\u30c3\u30c8\u30ef\u30fc\u30af\u3001\u591a\u5b54\u8cea\u30a2\u30ec\u30a4\u3001\u8584\u8089\u69cb\u9020\u3001\u591a\u66f2\u7387\u8868\u9762\u306a\u3069\u306e\u975e\u5e38\u306b\u8907\u96d1\u306a\u69cb\u9020\u3078\u3068\u5909\u5316\u3057\u3066\u3044\u307e\u3059\u3002.<\/p>\n\n\n\n

\u3053\u306e\u3088\u3046\u306a\u5e7e\u4f55\u5b66\u7684\u306a\u8907\u96d1\u3055\u306f\u3001\u30bb\u30e9\u30df\u30c3\u30af\u30b9\u306e\u672c\u8cea\u7684\u306a\u8106\u3055\u3068\u4f4e\u3044\u7834\u58ca\u976d\u6027\u3068\u76f8\u307e\u3063\u3066\u3001\u88fd\u9020\u3092\u30de\u30eb\u30c1\u30b9\u30b1\u30fc\u30eb\u306e\u5de5\u5b66\u7684\u8ab2\u984c\u3078\u3068\u5909\u8c8c\u3055\u305b\u3066\u3044\u308b\u3002\u672c\u7a3f\u3067\u306f\u3001\u6210\u5f62\u3001\u713c\u7d50\u3001\u7cbe\u5bc6\u52a0\u5de5\u306e3\u3064\u306e\u4e2d\u6838\u6bb5\u968e\u306b\u304a\u3051\u308b\u4e3b\u8981\u306a\u6280\u8853\u7684\u30dc\u30c8\u30eb\u30cd\u30c3\u30af\u3068\u305d\u308c\u3092\u53ef\u80fd\u306b\u3059\u308b\u6280\u8853\u306b\u3064\u3044\u3066\u6982\u8aac\u3059\u308b\u3002.<\/p>\n\n\n\n

\"\"<\/figure>\n\n\n\n

1.\u306f\u3058\u3081\u306b\u6a5f\u80fd\u6027\u6750\u6599\u304b\u3089\u69cb\u9020\u7684\u9650\u754c\u307e\u3067<\/h2>\n\n\n\n

\u30bb\u30e9\u30df\u30c3\u30af\u6750\u6599\u306f\u3001\u305d\u306e\u5353\u8d8a\u3057\u305f\u786c\u5ea6\u3001\u9ad8\u5f3e\u6027\u7387\u3001\u512a\u308c\u305f\u8010\u6469\u8017\u6027\u3001\u5316\u5b66\u7684\u4e0d\u6d3b\u6027\u3067\u5e83\u304f\u8a8d\u77e5\u3055\u308c\u3066\u3044\u308b\u3002\u534a\u5c0e\u4f53\u88c5\u7f6e\u3067\u306f\u3001\u9759\u96fb\u30c1\u30e3\u30c3\u30af\uff08ESC\uff09\u3001\u30b7\u30e3\u30ef\u30fc\u30d8\u30c3\u30c9\u3001\u30d5\u30a9\u30fc\u30ab\u30b9\u30ea\u30f3\u30b0\u3001\u7d76\u7e01\u30ea\u30f3\u30b0\u3001\u30bb\u30f3\u30b5\u30fc\u30cf\u30a6\u30b8\u30f3\u30b0\u306a\u3069\u306b\u3088\u304f\u4f7f\u7528\u3055\u308c\u3066\u3044\u307e\u3059\u3002.<\/p>\n\n\n\n

\u3057\u304b\u3057\u3001\u30c7\u30d0\u30a4\u30b9\u30fb\u30a2\u30fc\u30ad\u30c6\u30af\u30c1\u30e3\u304c\u9ad8\u5ea6\u5316\u3059\u308b\u306b\u3064\u308c\u3001\u30bb\u30e9\u30df\u30c3\u30af\u30fb\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u306f\u3082\u306f\u3084\u5358\u7d14\u306a\u30c7\u30a3\u30b9\u30af\u3001\u30ea\u30f3\u30b0\u3001\u30d6\u30ed\u30c3\u30af\u306b\u9650\u5b9a\u3055\u308c\u306a\u304f\u306a\u308a\u307e\u3057\u305f\u3002\u305d\u306e\u4ee3\u308f\u308a\u306b\u3001\u30bb\u30e9\u30df\u30c3\u30af\u90e8\u54c1\u306b\u306f\u6b21\u306e\u3088\u3046\u306a\u8981\u4ef6\u304c\u6c42\u3081\u3089\u308c\u308b\u3088\u3046\u306b\u306a\u308a\u307e\u3057\u305f\uff1a<\/p>\n\n\n\n

    \n
  • \u9ad8\u5bc6\u5ea6\u30de\u30a4\u30af\u30ed\u30db\u30fc\u30eb\u30a2\u30ec\u30a4<\/li>\n\n\n\n
  • \u8584\u8089\u4e2d\u7a7a\u5f62\u72b6<\/li>\n\n\n\n
  • \u8907\u96d1\u306a\u975e\u8ef8\u5bfe\u79f0\u66f2\u9762<\/li>\n\n\n\n
  • \u30ac\u30b9\u307e\u305f\u306f\u51b7\u5374\u6c34\u306e\u6d41\u8def\u3092\u5185\u8535<\/li>\n\n\n\n
  • \u30de\u30eb\u30c1\u30b9\u30b1\u30fc\u30eb\u306e\u6a5f\u80fd\u7684\u30a4\u30f3\u30bf\u30fc\u30d5\u30a7\u30fc\u30b9<\/li>\n<\/ul>\n\n\n\n

    \u3053\u306e\u5909\u5f62\u306f\u3001\u52a0\u5de5\u4e2d\u306e\u308f\u305a\u304b\u306a\u5bc6\u5ea6\u52fe\u914d\u3084\u71b1\u7684\u30df\u30b9\u30de\u30c3\u30c1\u3067\u3055\u3048\u3001\u5272\u308c\u3084\u53cd\u308a\u3001\u81f4\u547d\u7684\u306a\u6545\u969c\u306b\u3064\u306a\u304c\u308b\u305f\u3081\u3001\u88fd\u9020\u306e\u96e3\u6613\u5ea6\u3092\u8457\u3057\u304f\u9ad8\u3081\u308b\u3002.<\/p>\n\n\n\n

    2.\u6210\u5f62\u6280\u8853\uff1a\u8907\u96d1\u5f62\u72b6\u306e\u30cb\u30a2\u30cd\u30c3\u30c8\u30b7\u30a7\u30a4\u30d7\u88fd\u9020\u306b\u5411\u3051\u3066<\/h2>\n\n\n\n

    \u6210\u5f62\u6bb5\u968e\u306f\u3001\u30bb\u30e9\u30df\u30c3\u30af\u90e8\u54c1\u306e\u6700\u7d42\u7684\u306a\u5f62\u72b6\u3068\u5185\u90e8\u306e\u5747\u8cea\u6027\u3092\u5b9a\u7fa9\u3059\u308b\u305f\u3081\u306b\u975e\u5e38\u306b\u91cd\u8981\u3067\u3059\u3002\u30c9\u30e9\u30a4\u30d7\u30ec\u30b9\u3084\u30b9\u30ea\u30c3\u30d7\u30ad\u30e3\u30b9\u30c8\u3068\u3044\u3063\u305f\u5f93\u6765\u306e\u5de5\u7a0b\u3067\u306f\u3001\u91d1\u578b\u306e\u5236\u7d04\u3084\u4e0d\u5747\u4e00\u306a\u30b0\u30ea\u30fc\u30f3\u30dc\u30c7\u30a3\u306e\u5bc6\u5ea6\u5206\u5e03\u306e\u305f\u3081\u306b\u3001\u307e\u3059\u307e\u3059\u4e0d\u5341\u5206\u306b\u306a\u3063\u3066\u304d\u3066\u3044\u307e\u3059\u3002.<\/p>\n\n\n\n

    2.1 \u30b2\u30eb\u30ad\u30e3\u30b9\u30c6\u30a3\u30f3\u30b0\uff08\u30b2\u30eb\u5c04\u51fa\u6210\u5f62\uff09<\/h3>\n\n\n\n

    \u30b2\u30eb\u30ad\u30e3\u30b9\u30c6\u30a3\u30f3\u30b0\u306f\u3001\u6709\u6a5f\u30e2\u30ce\u30de\u30fc\u3001\u67b6\u6a4b\u5264\u3001\u304a\u3088\u3073\u958b\u59cb\u5264\u3092\u542b\u3080\u91d1\u578b\u306b\u3001\u4f4e\u7c98\u5ea6\u3067\u56fa\u5f62\u5206\u8ca0\u8377\u306e\u9ad8\u3044\u30bb\u30e9\u30df\u30c3\u30af\u30b9\u30e9\u30ea\u30fc\u3092\u6ce8\u5165\u3059\u308b\u30cb\u30a2\u30cd\u30c3\u30c8\u30b7\u30a7\u30a4\u30d7\u6210\u5f62\u6280\u8853\u3067\u3042\u308b\u3002\u305d\u306e\u5834\u91cd\u5408\u306b\u3088\u308a\u3001\u30bb\u30e9\u30df\u30c3\u30af\u7c92\u5b50\u3092\u5747\u4e00\u306b\u56fa\u5b9a\u5316\u3059\u308b\u4e09\u6b21\u5143\u30b2\u30eb\u30cd\u30c3\u30c8\u30ef\u30fc\u30af\u304c\u5f62\u6210\u3055\u308c\u307e\u3059\u3002.<\/p>\n\n\n\n

    \u4e3b\u306a\u5229\u70b9\u306f\u4ee5\u4e0b\u306e\u901a\u308a\uff1a<\/p>\n\n\n\n

      \n
    • \u4e7e\u71e5\u5909\u5f62\u304c\u5c11\u306a\u304f\u3001\u512a\u308c\u305f\u5f62\u72b6\u4fdd\u6301\u6027<\/li>\n\n\n\n
    • \u4e00\u69d8\u306a\u7dd1\u306e\u5bc6\u5ea6\u5206\u5e03<\/li>\n\n\n\n
    • \u5927\u578b\u3001\u8584\u8089\u3001\u8907\u96d1\u306a\u5f62\u72b6\u3078\u306e\u9069\u5408\u6027<\/li>\n\n\n\n
    • \u713c\u7d50\u5f8c\u306e\u52a0\u5de5\u4ee3\u306e\u4f4e\u6e1b<\/li>\n<\/ul>\n\n\n\n

      \u3053\u306e\u65b9\u6cd5\u306f\u3001\u9ad8\u3044\u5bf8\u6cd5\u7cbe\u5ea6\u304c\u8981\u6c42\u3055\u308c\u308bESC\u57fa\u677f\u3084\u30d7\u30e9\u30ba\u30de\u5bfe\u5411\u90e8\u54c1\u306b\u7279\u306b\u9069\u3057\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n

      2.2 \u30bb\u30e9\u30df\u30c3\u30af\u5c04\u51fa\u6210\u5f62\uff08CIM\uff09<\/h3>\n\n\n\n

      \u30bb\u30e9\u30df\u30c3\u30af\u5c04\u51fa\u6210\u5f62\u306f\u3001\u30bb\u30e9\u30df\u30c3\u30af\u7c89\u672b\u3068\u30dd\u30ea\u30de\u30fc\u30d0\u30a4\u30f3\u30c0\u30fc\u3092\u4e00\u4f53\u5316\u3057\u3066\u71b1\u53ef\u5851\u6027\u6a39\u8102\u539f\u6599\u3092\u5f62\u6210\u3057\u3001\u3053\u308c\u3092\u5727\u529b\u4e0b\u3067\u91d1\u5c5e\u91d1\u578b\u306b\u5c04\u51fa\u3059\u308b\u3002.<\/p>\n\n\n\n

      \u5f93\u6765\u306e\u30d7\u30ec\u30b9\u65b9\u6cd5\u3068\u6bd4\u8f03\u3057\u3066\u3001CIM\u306f\u4ee5\u4e0b\u3092\u63d0\u4f9b\u3059\u308b\uff1a<\/p>\n\n\n\n

        \n
      • \u9ad8\u3044\u5e7e\u4f55\u5b66\u7684\u8907\u96d1\u6027\u80fd\u529b<\/li>\n\n\n\n
      • \u30b0\u30ea\u30fc\u30f3\u5bc6\u5ea6\u306e\u5747\u4e00\u6027\u5411\u4e0a<\/li>\n\n\n\n
      • \u5927\u91cf\u751f\u7523\u306e\u305f\u3081\u306e\u9ad8\u3044\u751f\u7523\u6027<\/li>\n\n\n\n
      • \u30bb\u30f3\u30b5\u30fc\u30cf\u30a6\u30b8\u30f3\u30b0\u3084\u7d76\u7e01\u30ea\u30f3\u30b0\u306e\u3088\u3046\u306a\u5c0f\u578b\u3067\u8907\u96d1\u306a\u90e8\u54c1\u306b\u9069\u3057\u3066\u3044\u308b\u3002<\/li>\n<\/ul>\n\n\n\n

        \u3057\u304b\u3057\u3001\u3053\u306e\u30d7\u30ed\u30bb\u30b9\u306b\u306f\u91cd\u8981\u306a\u8131\u30d0\u30a4\u30f3\u30c0\u30fc\u5de5\u7a0b\u3068\u713c\u7d50\u5de5\u7a0b\u304c\u3042\u308a\u3001\u30d0\u30a4\u30f3\u30c0\u30fc\u306e\u9664\u53bb\u3092\u6ce8\u610f\u6df1\u304f\u7ba1\u7406\u3057\u306a\u3044\u3068\u3001\u5272\u308c\u3084\u6b6a\u307f\u306a\u3069\u306e\u6b20\u9665\u304c\u767a\u751f\u3059\u308b\u53ef\u80fd\u6027\u304c\u3042\u308b\u3002.<\/p>\n\n\n\n

        2.3 \u51b7\u9593\u9759\u6c34\u5727\u30d7\u30ec\u30b9\uff08CIP\uff09<\/h3>\n\n\n\n

        \u30d5\u30a9\u30fc\u30ab\u30b9\u30ea\u30f3\u30b0\u306e\u3088\u3046\u306a\u8ef8\u5bfe\u79f0\u90e8\u54c1\u306e\u5834\u5408\u3001CIP\u306f\u6d41\u4f53\u5a92\u4f53\u3092\u901a\u3057\u3066\u5747\u4e00\u306a\u9759\u6c34\u5727\u3092\u304b\u3051\u3001\u30d5\u30ec\u30ad\u30b7\u30d6\u30eb\u306a\u91d1\u578b\u5185\u3067\u7c89\u672b\u3092\u5727\u7e2e\u3057\u307e\u3059\u3002.<\/p>\n\n\n\n

        \u5229\u70b9\u306f\u4ee5\u4e0b\u306e\u901a\u308a\uff1a<\/p>\n\n\n\n

          \n
        • \u5168\u65b9\u5411\u306b\u5747\u4e00\u306a\u5bc6\u5ea6\u5206\u5e03<\/li>\n\n\n\n
        • \u713c\u7d50\u6642\u306e\u7570\u65b9\u6027\u53ce\u7e2e\u306e\u4f4e\u6e1b<\/li>\n\n\n\n
        • \u56de\u8ee2\u5bfe\u79f0\u90e8\u54c1\u306e\u69cb\u9020\u7684\u5b8c\u5168\u6027\u306e\u5411\u4e0a<\/li>\n<\/ul>\n\n\n\n

          2.4 \u30a2\u30c7\u30a3\u30c6\u30a3\u30d6\u30fb\u30de\u30cb\u30e5\u30d5\u30a1\u30af\u30c1\u30e3\u30ea\u30f3\u30b0\uff08\u30bb\u30e9\u30df\u30c3\u30af3D\u30d7\u30ea\u30f3\u30c6\u30a3\u30f3\u30b0\uff09<\/h3>\n\n\n\n

          \u30c7\u30b8\u30bf\u30eb\u30fb\u30e9\u30a4\u30c8\u30fb\u30d7\u30ed\u30bb\u30c3\u30b7\u30f3\u30b0\uff08DLP\uff09\u3084\u30c0\u30a4\u30ec\u30af\u30c8\u30fb\u30a4\u30f3\u30af\u30fb\u30e9\u30a4\u30c6\u30a3\u30f3\u30b0\uff08DIW\uff09\u306a\u3069\u306e\u7a4d\u5c64\u9020\u5f62\u6280\u8853\u306f\u3001\u5f93\u6765\u306e\u91d1\u578b\u3067\u306f\u4e0d\u53ef\u80fd\u306a\u5185\u90e8\u5f62\u72b6\u306e\u88fd\u9020\u3092\u53ef\u80fd\u306b\u3059\u308b\u3002.<\/p>\n\n\n\n

          \u4ee3\u8868\u7684\u306a\u7528\u9014\u306f\u4ee5\u4e0b\u306e\u901a\u308a\uff1a<\/p>\n\n\n\n

            \n
          • \u51b7\u5374\u30c1\u30e3\u30f3\u30cd\u30eb\u3092\u7d44\u307f\u8fbc\u3093\u3060ESC\u30d7\u30ed\u30c8\u30bf\u30a4\u30d7<\/li>\n\n\n\n
          • \u8907\u96d1\u306a\u5185\u90e8\u30d5\u30ed\u30fc\u30fb\u30a2\u30fc\u30ad\u30c6\u30af\u30c1\u30e3<\/li>\n<\/ul>\n\n\n\n

            \u3057\u304b\u3057\u3001\u73fe\u5728\u306e\u9650\u754c\u3068\u3057\u3066\u306f\u3001\u56fa\u5f62\u5206\u8ca0\u8377\u304c\u6bd4\u8f03\u7684\u4f4e\u3044\u305f\u3081\u3001\u713c\u7d50\u5f8c\u306e\u53ce\u7e2e\u304c\u5927\u304d\u304f\u3001\u6700\u7d42\u5bc6\u5ea6\u304c\u4f4e\u4e0b\u3059\u308b\u3053\u3068\u304c\u6319\u3052\u3089\u308c\u308b\u3002.<\/p>\n\n\n\n

            3.\u713c\u7d50\u306e\u8ab2\u984c\u53ce\u7e2e\u3068\u7d44\u7e54\u9032\u5316\u306e\u5236\u5fa1<\/h2>\n\n\n\n

            \u713c\u7d50\u306f\u3001\u30b0\u30ea\u30fc\u30f3\u30dc\u30c7\u30a3\u3092\u7dfb\u5bc6\u306a\u30bb\u30e9\u30df\u30c3\u30af\u90e8\u54c1\u306b\u5909\u3048\u307e\u3059\u304c\u3001\u4e00\u822c\u7684\u306b15\uff5e25%\u306e\u7bc4\u56f2\u3067\u8457\u3057\u3044\u7dda\u53ce\u7e2e\u3092\u4f34\u3044\u307e\u3059\u3002.<\/p>\n\n\n\n

            \u8907\u96d1\u306a\u5f62\u72b6\u3067\u306f\u3001\u4e0d\u5747\u4e00\u306a\u539a\u307f\u304c\u9ad8\u5bc6\u5ea6\u5316\u7387\u306e\u7a7a\u9593\u7684\u306a\u3070\u3089\u3064\u304d\u306b\u3064\u306a\u304c\u308a\u3001\u305d\u306e\u7d50\u679c\u751f\u3058\u308b\uff1a<\/p>\n\n\n\n

              \n
            • \u53ce\u7e2e\u7387\u306e\u9055\u3044<\/li>\n\n\n\n
            • \u3086\u304c\u307f\u3068\u6b6a\u307f<\/li>\n\n\n\n
            • \u4e80\u88c2\u306e\u767a\u751f\u3068\u4f1d\u64ad<\/li>\n<\/ul>\n\n\n\n

              3.1 \u30db\u30c3\u30c8\u30d7\u30ec\u30b9\u713c\u7d50<\/h3>\n\n\n\n

              \u713c\u7d50\u6642\u306b\u4e00\u8ef8\u307e\u305f\u306f\u7b49\u65b9\u5727\u306e\u5916\u90e8\u5727\u529b\u3092\u52a0\u3048\u308b\u3053\u3068\u3067\u3001\u7269\u8cea\u8f38\u9001\u3092\u4fc3\u9032\u3057\u3001\u7dfb\u5bc6\u5316\u6e29\u5ea6\u3092\u4e0b\u3052\u3001\u7d50\u6676\u7c92\u306e\u6210\u9577\u3092\u6291\u5236\u3059\u308b\u3002\u3053\u306e\u65b9\u6cd5\u306f\u3001ESC\u3084\u30d7\u30e9\u30ba\u30de\u30b7\u30e3\u30ef\u30fc\u30d8\u30c3\u30c9\u306e\u5bf8\u6cd5\u5fe0\u5b9f\u6027\u3092\u7dad\u6301\u3059\u308b\u306e\u306b\u6709\u52b9\u3067\u3042\u308b\u3002.<\/p>\n\n\n\n

              3.2 \u30ac\u30b9\u5727\u713c\u7d50<\/h3>\n\n\n\n

              \u4e0d\u6d3b\u6027\u30ac\u30b9\uff08\u7a92\u7d20\u3084\u30a2\u30eb\u30b4\u30f3\u306a\u3069\uff09\u306e\u5727\u529b\u3092\u9ad8\u6e29\u3067\u304b\u3051\u308b\u3053\u3068\u3067\u3001\u63ee\u767a\u3092\u6291\u5236\u3057\u3001\u7279\u306b\u9ad8\u6e29\u3067\u5206\u89e3\u3057\u3084\u3059\u3044\u6750\u6599\u3067\u306f\u5747\u4e00\u306a\u7dfb\u5bc6\u5316\u3092\u4fc3\u9032\u3059\u308b\u3002.<\/p>\n\n\n\n

              3.3 \u30b9\u30d1\u30fc\u30af\u30d7\u30e9\u30ba\u30de\u713c\u7d50\uff08SPS\uff09<\/h3>\n\n\n\n

              SPS\u306f\u30d1\u30eb\u30b9\u76f4\u6d41\u96fb\u6d41\u3068\u30d7\u30e9\u30ba\u30de\u30a2\u30b7\u30b9\u30c8\u306b\u3088\u308b\u5c40\u6240\u52a0\u71b1\u3092\u5229\u7528\u3057\u3001\u8fc5\u901f\u306a\u9ad8\u5bc6\u5ea6\u5316\u3092\u5b9f\u73fe\u3059\u308b\u3002\u7570\u306a\u308b\u9818\u57df\u3092\u307b\u307c\u540c\u6642\u306b\u9ad8\u5bc6\u5ea6\u5316\u3059\u308b\u3053\u3068\u3067\u3001\u53ce\u7e2e\u52fe\u914d\u3092\u6700\u5c0f\u9650\u306b\u6291\u3048\u307e\u3059\u3002.<\/p>\n\n\n\n

              \u88c5\u7f6e\u306e\u30c1\u30e3\u30f3\u30d0\u30fc\u5bf8\u6cd5\u306b\u3088\u308b\u30b5\u30a4\u30ba\u306e\u5236\u7d04\u304c\u3042\u308a\u3001\u4e3b\u306b\u5c0f\u578b\u7cbe\u5bc6\u90e8\u54c1\u306b\u9069\u3057\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n

              3.4 \u30de\u30a4\u30af\u30ed\u6ce2\u713c\u7d50<\/h3>\n\n\n\n

              \u30de\u30a4\u30af\u30ed\u6ce2\u30a8\u30cd\u30eb\u30ae\u30fc\u306f\u3001\u8a98\u96fb\u640d\u5931\u3068\u4f1d\u5c0e\u640d\u5931\u3092\u901a\u3057\u3066\u4f53\u7a4d\u52a0\u71b1\u3092\u8a98\u767a\u3057\u3001\u6025\u901f\u3067\u5747\u4e00\u306a\u6e29\u5ea6\u5206\u5e03\u3092\u3082\u305f\u3089\u3057\u307e\u3059\u3002\u3053\u308c\u306f\u3001\u71b1\u52fe\u914d\u3092\u6e1b\u5c11\u3055\u305b\u3001\u5909\u5f62\u3084\u30af\u30e9\u30c3\u30af\u306e\u5371\u967a\u6027\u3092\u8457\u3057\u304f\u4f4e\u4e0b\u3055\u305b\u307e\u3059\u3002.<\/p>\n\n\n\n

              4.\u7cbe\u5bc6\u52a0\u5de5\uff1a\u8106\u6027\u7834\u58ca\u304b\u3089\u8d85\u7cbe\u5bc6\u8868\u9762\u5de5\u5b66\u307e\u3067<\/h2>\n\n\n\n

              \u713c\u7d50\u5f8c\u306e\u30bb\u30e9\u30df\u30c3\u30af\u90e8\u54c1\u306f\u901a\u5e38\u3001\u30b5\u30d6\u30df\u30af\u30ed\u30f3\u306e\u5bf8\u6cd5\u516c\u5dee\u3068\u30ca\u30ce\u30e1\u30fc\u30c8\u30eb\u30b9\u30b1\u30fc\u30eb\u306e\u8868\u9762\u7c97\u3055\u3092\u9054\u6210\u3059\u308b\u305f\u3081\u306b\u7cbe\u5bc6\u6a5f\u68b0\u52a0\u5de5\u3092\u5fc5\u8981\u3068\u3059\u308b\u3002.<\/p>\n\n\n\n

              \u3057\u304b\u3057\u3001\u30bb\u30e9\u30df\u30c3\u30af\u30b9\u306e\u672c\u8cea\u7684\u306a\u3082\u308d\u3055\u306f\u3001\u5927\u304d\u306a\u8ab2\u984c\u3092\u3082\u305f\u3089\u3059\uff1a<\/p>\n\n\n\n

                \n
              • \u5de5\u5177\u306e\u6469\u8017\u304c\u65e9\u3044<\/li>\n\n\n\n
              • \u30a8\u30c3\u30b8\u30fb\u30c1\u30c3\u30d4\u30f3\u30b0\u3068\u30b5\u30d6\u30b5\u30fc\u30d5\u30a7\u30b9\u30fb\u30c0\u30e1\u30fc\u30b8<\/li>\n\n\n\n
              • \u6a5f\u68b0\u7684\u5fdc\u529b\u4e0b\u3067\u306e\u30de\u30a4\u30af\u30ed\u30af\u30e9\u30c3\u30af\u5f62\u6210<\/li>\n<\/ul>\n\n\n\n

                \u5fae\u7d30\u7a74\u30a2\u30ec\u30a4\u3084\u8584\u8089\u5f62\u72b6\u306e\u3088\u3046\u306a\u8907\u96d1\u306a\u69cb\u9020\u3067\u306f\u3001\u5f93\u6765\u306e\u7814\u524a\u65b9\u6cd5\u3067\u306f\u4e0d\u5341\u5206\u306a\u3053\u3068\u304c\u591a\u3044\u3002.<\/p>\n\n\n\n

                4.1 \u30a2\u30d6\u30ec\u30a4\u30b7\u30d6\u30fb\u30d5\u30ed\u30fc\u30fb\u30de\u30b7\u30cb\u30f3\u30b0\uff08AFM\uff09<\/h3>\n\n\n\n

                \u7c98\u5f3e\u6027\u7814\u78e8\u5a92\u4f53\u3092\u5727\u529b\u4e0b\u3067\u5185\u90e8\u306e\u6e9d\u3084\u5fae\u7d30\u5b54\u306b\u62bc\u3057\u8fbc\u3080\u3053\u3068\u3067\u3001\u5747\u4e00\u306a\u6750\u6599\u9664\u53bb\u3084\u624b\u306e\u5c4a\u304b\u306a\u3044\u90e8\u5206\u306e\u30d0\u30ea\u9664\u53bb\u304c\u53ef\u80fd\u306b\u306a\u308a\u307e\u3059\u3002.<\/p>\n\n\n\n

                4.2 \u30ec\u30fc\u30b6\u30fc\u52a0\u5de5<\/h3>\n\n\n\n

                \u30d5\u30a7\u30e0\u30c8\u79d2\u304a\u3088\u3073\u30d4\u30b3\u79d2\u30ec\u30fc\u30b6\u30fc\u306f\u3001\u6700\u5c0f\u306e\u71b1\u640d\u50b7\u9818\u57df\uff08<0.01 \u03bcm\uff09\u3067\u8d85\u7cbe\u5bc6\u306a\u7a74\u3042\u3051\u3084\u8868\u9762\u6539\u8cea\u3092\u53ef\u80fd\u306b\u3057\u307e\u3059\u3002\u3053\u306e\u6280\u8853\u306f\u3001\u5fae\u5c0f\u6b20\u9665\u306e\u4fee\u6b63\u3084\u5185\u90e8\u7a7a\u6d1e\u306e\u52a0\u5de5\u306b\u7279\u306b\u9069\u3057\u3066\u3044\u307e\u3059\u3002.<\/p>\n\n\n\n

                4.3 \u78c1\u5834\u30a2\u30b7\u30b9\u30c8\u4ed5\u4e0a\u3052<\/h3>\n\n\n\n

                \u78c1\u6c17\u30ec\u30aa\u30ed\u30b8\u30fc\u7814\u78e8\u6db2\u306f\u3001\u78c1\u5834\u4e0b\u3067\u5236\u5fa1\u53ef\u80fd\u306a\u300c\u30d5\u30ec\u30ad\u30b7\u30d6\u30eb\u30c4\u30fc\u30eb\u300d\u3092\u5f62\u6210\u3057\u3001\u66f2\u9762\u3001\u8584\u8089\u9762\u3001\u5185\u9762\u306a\u3069\u306e\u9ad8\u7cbe\u5ea6\u4ed5\u4e0a\u3052\u3092\u53ef\u80fd\u306b\u3059\u308b\u3002.<\/p>\n\n\n\n

                4.4 \u30d7\u30e9\u30ba\u30de\u30a2\u30b7\u30b9\u30c8\u7814\u78e8\uff08PAP\uff09<\/h3>\n\n\n\n

                PAP\u306f\u3001\u30d7\u30e9\u30ba\u30de\u6d3b\u6027\u5316\u3092\u7528\u3044\u3066\u30bb\u30e9\u30df\u30c3\u30af\u8868\u9762\u3092\u3088\u308a\u67d4\u3089\u304b\u3044\u53cd\u5fdc\u5c64\u3078\u3068\u6539\u8cea\u3057\u3001\u6b21\u3044\u3067\u4f4e\u529b\u7814\u78e8\u3092\u884c\u3044\u307e\u3059\u3002\u3053\u306e\u30cf\u30a4\u30d6\u30ea\u30c3\u30c9\u30e1\u30ab\u30cb\u30ba\u30e0\u306b\u3088\u308a\u3001\u8868\u9762\u4e0b\u306e\u640d\u50b7\u3092\u6700\u5c0f\u9650\u306b\u6291\u3048\u306a\u304c\u3089\u3001\u539f\u5b50\u30ec\u30d9\u30eb\u306e\u8868\u9762\u5e73\u6ed1\u6027\u3092\u5b9f\u73fe\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002.<\/p>\n\n\n\n

                5.\u7d50\u8ad6<\/h2>\n\n\n\n

                \u534a\u5c0e\u4f53\u30bb\u30e9\u30df\u30c3\u30af\u90e8\u54c1\u304c\u5358\u7d14\u306a\u5f62\u72b6\u304b\u3089\u8907\u96d1\u306a\u30de\u30eb\u30c1\u30b9\u30b1\u30fc\u30eb\u30a2\u30fc\u30ad\u30c6\u30af\u30c1\u30e3\u30fc\u306b\u79fb\u884c\u3057\u305f\u3053\u3068\u3067\u3001\u88fd\u9020\u8981\u4ef6\u304c\u6839\u672c\u7684\u306b\u518d\u5b9a\u7fa9\u3055\u308c\u305f\u3002.<\/p>\n\n\n\n

                \u6210\u5f62\u3001\u713c\u7d50\u3001\u7cbe\u5bc6\u6a5f\u68b0\u52a0\u5de5\u306e\u5404\u6bb5\u968e\u306b\u304a\u3044\u3066\u3001\u4e2d\u5fc3\u7684\u306a\u8ab2\u984c\u306f\u305d\u306e\u77db\u76fe\u3092\u7ba1\u7406\u3059\u308b\u3053\u3068\u306b\u3042\u308b\uff1a<\/p>\n\n\n\n

                  \n
                • \u9ad8\u3044\u5e7e\u4f55\u5b66\u7684\u8907\u96d1\u6027<\/li>\n\n\n\n
                • \u30bb\u30e9\u30df\u30c3\u30af\u30b9\u306e\u672c\u8cea\u7684\u306a\u8106\u3055<\/li>\n\n\n\n
                • \u30de\u30eb\u30c1\u30d5\u30a3\u30fc\u30eb\u30c9\u9023\u6210\u52a0\u5de5\u52b9\u679c\uff08\u71b1\u3001\u6a5f\u68b0\u3001\u5316\u5b66\uff09<\/li>\n<\/ul>\n\n\n\n

                  \u4eca\u5f8c\u306e\u9032\u6b69\u306f\u3001\u30c7\u30b8\u30bf\u30eb\u8a2d\u8a08\u3001\u30cb\u30a2\u30cd\u30c3\u30c8\u30b7\u30a7\u30a4\u30d7\u6210\u5f62\u3001\u30de\u30eb\u30c1\u30d5\u30a3\u30fc\u30eb\u30c9\u713c\u7d50\u5236\u5fa1\u3001\u8d85\u7cbe\u5bc6\u30cf\u30a4\u30d6\u30ea\u30c3\u30c9\u52a0\u5de5\u6280\u8853\u306e\u7d71\u5408\u306b\u304b\u304b\u3063\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n

                  \u3053\u308c\u3089\u306e\u30d7\u30ed\u30bb\u30b9\u6bb5\u968e\u3092\u7cfb\u7d71\u7684\u306b\u8abf\u6574\u3059\u308b\u3053\u3068\u306b\u3088\u3063\u3066\u306e\u307f\u3001\u30a2\u30c9\u30d0\u30f3\u30b9\u30c8\u30fb\u30bb\u30e9\u30df\u30c3\u30af\u30b9\u306f\u3001\u6b21\u4e16\u4ee3\u534a\u5c0e\u4f53\u88c5\u7f6e\u306b\u304a\u3044\u3066\u305d\u306e\u53ef\u80fd\u6027\u3092\u5341\u5206\u306b\u767a\u63ee\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u3002.<\/p>\n\n\n\n

                  \u3088\u304f\u3042\u308b\u3054\u8cea\u554f<\/h2>\n\n\n
                  \n
                  \n
                  \n

                  \u306a\u305c\u534a\u5c0e\u4f53\u88c5\u7f6e\u90e8\u54c1\u3067\u306f\u91d1\u5c5e\u3088\u308a\u3082\u30bb\u30e9\u30df\u30c3\u30af\u30b9\u304c\u597d\u307e\u308c\u308b\u306e\u304b\uff1f<\/h3>\n
                  \n\n

                  Al\u2082O\u2083\u3001AlN\u3001SiC\u3001Si\u2083N\u2084\u306a\u3069\u306e\u30bb\u30e9\u30df\u30c3\u30af\u30b9\u306f\u3001\u307b\u3068\u3093\u3069\u306e\u91d1\u5c5e\u3068\u6bd4\u8f03\u3057\u3066\u3001\u512a\u308c\u305f\u8a98\u96fb\u7d76\u7e01\u6027\u3001\u8010\u30d7\u30e9\u30ba\u30de\u8150\u98df\u6027\u3001\u71b1\u5b89\u5b9a\u6027\u3092\u63d0\u4f9b\u3057\u307e\u3059\u3002\u30d7\u30e9\u30ba\u30de\u306e\u591a\u3044\u534a\u5c0e\u4f53\u74b0\u5883\u3067\u306f\u3001\u91d1\u5c5e\u306f\u6d78\u98df\u3001\u6c5a\u67d3\u3001\u96fb\u6c17\u7684\u4e0d\u5b89\u5b9a\u306b\u60a9\u307e\u3055\u308c\u308b\u50be\u5411\u304c\u3042\u308a\u307e\u3059\u304c\u3001\u30bb\u30e9\u30df\u30c3\u30af\u306f\u9577\u671f\u9593\u306e\u52d5\u4f5c\u30b5\u30a4\u30af\u30eb\u306b\u308f\u305f\u3063\u3066\u69cb\u9020\u7684\u30fb\u5316\u5b66\u7684\u5b8c\u5168\u6027\u3092\u7dad\u6301\u3057\u307e\u3059\u3002.<\/p>\n\n<\/div>\n<\/div>\n

                  \n

                  \u8907\u96d1\u306a\u30bb\u30e9\u30df\u30c3\u30af\u5f62\u72b6\u306e\u88fd\u9020\u306b\u304a\u3051\u308b\u6700\u5927\u306e\u8ab2\u984c\u306f\u4f55\u3067\u3057\u3087\u3046\u304b\uff1f<\/h3>\n
                  \n\n

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                  \n

                  \u7a4d\u5c64\u9020\u5f62\u306f\u5f93\u6765\u306e\u30bb\u30e9\u30df\u30c3\u30af\u6210\u5f62\u6cd5\u306b\u5b8c\u5168\u306b\u53d6\u3063\u3066\u4ee3\u308f\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u306e\u304b\uff1f<\/h3>\n
                  \n\n

                  \u73fe\u6642\u70b9\u3067\u306f\u305d\u3046\u3067\u306f\u3042\u308a\u307e\u305b\u3093\u3002\u30bb\u30e9\u30df\u30c3\u30af3D\u30d7\u30ea\u30f3\u30c6\u30a3\u30f3\u30b0\u306f\u3001\u6bd4\u985e\u306e\u306a\u3044\u5e7e\u4f55\u5b66\u7684\u81ea\u7531\u5ea6\uff08\u5185\u90e8\u30c1\u30e3\u30cd\u30eb\u3084\u683c\u5b50\u69cb\u9020\u306a\u3069\uff09\u3092\u53ef\u80fd\u306b\u3057\u307e\u3059\u304c\u3001\u6bd4\u8f03\u7684\u4f4e\u3044\u56fa\u4f53\u8ca0\u8377\u3001\u9ad8\u3044\u53ce\u7e2e\u7387\u3001\u304a\u3088\u3073\u713c\u7d50\u5f8c\u306e\u5bc6\u5ea6\u5236\u7d04\u306b\u3088\u3063\u3066\u307e\u3060\u5236\u9650\u3055\u308c\u3066\u3044\u307e\u3059\u3002\u73fe\u6642\u70b9\u3067\u306f\u3001\u672c\u683c\u7684\u306a\u5927\u91cf\u751f\u7523\u3067\u306f\u306a\u304f\u3001\u30d7\u30ed\u30c8\u30bf\u30a4\u30d4\u30f3\u30b0\u3084\u9ad8\u5ea6\u306b\u7279\u6b8a\u306a\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u306b\u4f7f\u7528\u3059\u308b\u306e\u304c\u6700\u9069\u3067\u3059\u3002.<\/p>\n\n<\/div>\n<\/div>\n<\/div>\n<\/div>","protected":false},"excerpt":{"rendered":"

                  In advanced semiconductor manufacturing, key process modules such as plasma etching, chemical vapor deposition (CVD), and ion implantation operate under extreme environments involving high-energy plasma, corrosive gases, high voltage bias, and rapid thermal cycling. These conditions impose stringent requirements on structural materials in terms of dielectric stability, corrosion resistance, thermal compatibility, and long-term dimensional reliability. Advanced engineering ceramics\u2014such as alumina (Al\u2082O\u2083), aluminum nitride (AlN), silicon carbide (SiC), and silicon nitride (Si\u2083N\u2084)\u2014have become indispensable due to their excellent combination of thermal, electrical, and chemical stability. However, the ongoing evolution of semiconductor equipment toward miniaturization and functional integration has driven ceramic components from simple geometries to highly complex architectures, including micro-channel networks, […]<\/p>\n","protected":false},"author":1,"featured_media":2294,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[3],"tags":[48,511,90],"class_list":["post-2293","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-industry-news","tag-ceramic-components","tag-complex-structured-ceramic-components","tag-semiconductor-equipment"],"_links":{"self":[{"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/posts\/2293","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/comments?post=2293"}],"version-history":[{"count":1,"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/posts\/2293\/revisions"}],"predecessor-version":[{"id":2295,"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/posts\/2293\/revisions\/2295"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/media\/2294"}],"wp:attachment":[{"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/media?parent=2293"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/categories?post=2293"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/tags?post=2293"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}