{"id":2266,"date":"2026-05-19T06:27:35","date_gmt":"2026-05-19T06:27:35","guid":{"rendered":"https:\/\/www.xkh-ceramics.com\/?p=2266"},"modified":"2026-05-19T06:28:27","modified_gmt":"2026-05-19T06:28:27","slug":"%e5%8d%8a%e5%b0%8e%e4%bd%93%e8%a3%85%e7%bd%ae%e3%82%a2%e3%83%97%e3%83%aa%e3%82%b1%e3%83%bc%e3%82%b7%e3%83%a7%e3%83%b3%e3%81%ab%e3%81%8a%e3%81%91%e3%82%8b%e5%85%88%e7%ab%af%e3%82%bb%e3%83%a9%e3%83%9f","status":"publish","type":"post","link":"https:\/\/www.xkh-ceramics.com\/ja\/advanced-ceramic-materials-in-semiconductor-equipment-applications-material-comparison\/","title":{"rendered":"\u534a\u5c0e\u4f53\u88c5\u7f6e\u306b\u304a\u3051\u308b\u5148\u9032\u30bb\u30e9\u30df\u30c3\u30af\u6750\u6599\uff1a\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u3068\u6750\u6599\u6bd4\u8f03"},"content":{"rendered":"<p class=\"wp-block-paragraph\">\u6700\u65b0\u306e\u534a\u5c0e\u4f53\u88fd\u9020\u88c5\u7f6e\u3067\u306f\u3001\u30a2\u30c9\u30d0\u30f3\u30b9\u30c8\u30fb\u30bb\u30e9\u30df\u30c3\u30af\u30b9\u306f\u3082\u306f\u3084\u30aa\u30d7\u30b7\u30e7\u30f3\u90e8\u54c1\u3067\u306f\u306a\u304f\u3001\u7cbe\u5ea6\u3001\u5b89\u5b9a\u6027\u3001\u30d7\u30ed\u30bb\u30b9\u306e\u4fe1\u983c\u6027\u3092\u6c7a\u5b9a\u3059\u308b\u91cd\u8981\u306a\u5b9f\u73fe\u6750\u6599\u3068\u306a\u3063\u3066\u3044\u307e\u3059\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0\u30c1\u30e3\u30f3\u30d0\u30fc\u304b\u3089\u30a6\u30a7\u30cf\u30fc\u30cf\u30f3\u30c9\u30ea\u30f3\u30b0\u30b7\u30b9\u30c6\u30e0\u306b\u81f3\u308b\u307e\u3067\u3001\u3055\u307e\u3056\u307e\u306a\u30bb\u30e9\u30df\u30c3\u30af\u6750\u6599\u304c\u71b1\u7684\u3001\u96fb\u6c17\u7684\u3001\u6a5f\u68b0\u7684\u6027\u80fd\u8981\u4ef6\u306b\u57fa\u3065\u3044\u3066\u9078\u629e\u3055\u308c\u3066\u3044\u307e\u3059\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u3053\u306e\u8a18\u4e8b\u3067\u306f\u3001\u6700\u3082\u5e83\u304f\u4f7f\u7528\u3055\u308c\u3066\u3044\u308b\u534a\u5c0e\u4f53\u30b0\u30ec\u30fc\u30c9\u306e\u30bb\u30e9\u30df\u30c3\u30af\u30b9\u3092\u7d39\u4ecb\u3057\u3001\u30a8\u30f3\u30b8\u30cb\u30a2\u30ea\u30f3\u30b0\u3068\u8abf\u9054\u306e\u610f\u601d\u6c7a\u5b9a\u306e\u305f\u3081\u306e\u660e\u78ba\u306a\u6280\u8853\u6bd4\u8f03\u3092\u63d0\u4f9b\u3057\u307e\u3059\u3002.<\/p>\n\n\n\n<figure class=\"wp-block-image aligncenter size-full\"><img fetchpriority=\"high\" decoding=\"async\" width=\"800\" height=\"800\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/pl209530651-silicon_carbide_ceramic_tray_for_semiconductor_wafer_processing_\u526f\u672c.jpg\" alt=\"\" class=\"wp-image-2267\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/pl209530651-silicon_carbide_ceramic_tray_for_semiconductor_wafer_processing_\u526f\u672c.jpg 800w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/pl209530651-silicon_carbide_ceramic_tray_for_semiconductor_wafer_processing_\u526f\u672c-300x300.jpg 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/pl209530651-silicon_carbide_ceramic_tray_for_semiconductor_wafer_processing_\u526f\u672c-150x150.jpg 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/pl209530651-silicon_carbide_ceramic_tray_for_semiconductor_wafer_processing_\u526f\u672c-768x768.jpg 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/pl209530651-silicon_carbide_ceramic_tray_for_semiconductor_wafer_processing_\u526f\u672c-12x12.jpg 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/pl209530651-silicon_carbide_ceramic_tray_for_semiconductor_wafer_processing_\u526f\u672c-600x600.jpg 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/pl209530651-silicon_carbide_ceramic_tray_for_semiconductor_wafer_processing_\u526f\u672c-100x100.jpg 100w\" sizes=\"(max-width: 800px) 100vw, 800px\" \/><\/figure>\n\n\n\n<h2 class=\"wp-block-heading\">1.\u30bb\u30e9\u30df\u30c3\u30af\u304c\u534a\u5c0e\u4f53\u88c5\u7f6e\u306b\u4e0d\u53ef\u6b20\u306a\u7406\u7531<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u534a\u5c0e\u4f53\u306e\u88fd\u9020\u74b0\u5883\u306b\u306f\u3001\u4ee5\u4e0b\u306e\u3088\u3046\u306a\u3082\u306e\u304c\u3042\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u904e\u9177\u306a\u6e29\u5ea6\uff08\u6700\u9ad81000\u2103\u4ee5\u4e0a\uff09<\/li>\n\n\n\n<li>\u30d7\u30e9\u30ba\u30de\u8150\u98df\u74b0\u5883<\/li>\n\n\n\n<li>\u8d85\u9ad8\u771f\u7a7a\u30b7\u30b9\u30c6\u30e0<\/li>\n\n\n\n<li>\u9ad8\u5727\u96fb\u6c17\u6761\u4ef6<\/li>\n\n\n\n<li>\u30ca\u30ce\u30e1\u30fc\u30c8\u30eb\u30ec\u30d9\u30eb\u306e\u7cbe\u5ea6\u8981\u6c42<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u5f93\u6765\u306e\u91d1\u5c5e\u306f\u3001\u7d76\u7e01\u6027\u3001\u8010\u98df\u6027\u3001\u71b1\u5b89\u5b9a\u6027\u3067\u554f\u984c\u304c\u3042\u308a\u307e\u3057\u305f\u3002\u30a2\u30c9\u30d0\u30f3\u30b9\u30c8\u30fb\u30bb\u30e9\u30df\u30c3\u30af\u30b9\u306f\u3053\u308c\u3089\u306e\u9650\u754c\u3092\u89e3\u6c7a\u3057\u307e\u3059\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">2.\u6700\u3082\u5e83\u304f\u4f7f\u7528\u3055\u308c\u3066\u3044\u308b\u30bb\u30e9\u30df\u30c3\u30af\u6750\u6599<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">2.1 \u30a2\u30eb\u30df\u30ca\uff08Al\u2082O\u2083\uff09-\u696d\u754c\u6a19\u6e96\u6750\u6599<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u30a2\u30eb\u30df\u30ca\u30bb\u30e9\u30df\u30c3\u30af\u306f\u6700\u3082\u5e83\u304f\u4f7f\u7528\u3055\u308c\u3066\u3044\u308b\u6750\u6599\u3067\u3042\u308a\u3001\u305d\u306e\u4f7f\u7528\u91cf\u306f\u7d048\u5272\u3092\u5360\u3081\u308b\u3002 <strong>\u534a\u5c0e\u4f53\u30bb\u30e9\u30df\u30c3\u30af\u7528\u9014\u306e45%<\/strong>.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>\u4e3b\u306a\u7528\u9014<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30a8\u30c3\u30c1\u30f3\u30b0\u30c1\u30e3\u30f3\u30d0\u30fc\u30e9\u30a4\u30ca\u30fc<\/li>\n\n\n\n<li>\u30a6\u30a7\u30cf\u30b5\u30dd\u30fc\u30c8\u30ea\u30f3\u30b0<\/li>\n\n\n\n<li>\u30ac\u30b9\u5206\u914d\u30d7\u30ec\u30fc\u30c8<\/li>\n\n\n\n<li>\u771f\u7a7a\u30c1\u30e3\u30c3\u30af<\/li>\n\n\n\n<li>CMP\u7814\u78e8\u90e8\u54c1<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>\u4e3b\u306a\u5229\u70b9<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u5b89\u5b9a\u3057\u305f\u96fb\u6c17\u7d76\u7e01<\/li>\n\n\n\n<li>\u826f\u597d\u306a\u8010\u71b1\u6027<\/li>\n\n\n\n<li>\u8cbb\u7528\u5bfe\u52b9\u679c\u306e\u9ad8\u3044\u5927\u91cf\u751f\u7523<\/li>\n\n\n\n<li>\u6210\u719f\u3057\u305f\u52a0\u5de5\u6280\u8853<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">2.2 \u30a4\u30c3\u30c8\u30ea\u30a2\uff08Y\u2082O\u2083\uff09 - \u8010\u30d7\u30e9\u30ba\u30de\u30bb\u30e9\u30df\u30c3\u30af<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u30a4\u30c3\u30c8\u30ea\u30a2\u306f\u8010\u98df\u6027\u306b\u512a\u308c\u3066\u3044\u308b\u305f\u3081\u3001\u30d7\u30e9\u30ba\u30de\u3092\u591a\u7528\u3059\u308b\u74b0\u5883\u3067\u5e83\u304f\u4f7f\u7528\u3055\u308c\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>\u4e3b\u306a\u7528\u9014<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30a8\u30c3\u30c1\u30f3\u30b0\u30c1\u30e3\u30f3\u30d0\u30fc\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0<\/li>\n\n\n\n<li>\u5149\u5b66\u30d3\u30e5\u30fc\u30dd\u30fc\u30c8<\/li>\n\n\n\n<li>\u30d7\u30e9\u30ba\u30de\u5bfe\u5411\u90e8\u54c1<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>\u4e3b\u306a\u5229\u70b9<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u512a\u308c\u305f\u8010\u30d7\u30e9\u30ba\u30de\u8150\u98df\u6027 vs Al\u2082O\u2083<\/li>\n\n\n\n<li>\u9ad8\u878d\u70b9 (~2430\u00b0C)<\/li>\n\n\n\n<li>\u30b3\u30b9\u30c8\u524a\u6e1b\u306e\u305f\u3081\u306b\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u5c64\u3068\u3057\u3066\u4f7f\u7528\u3055\u308c\u308b\u3053\u3068\u304c\u591a\u3044\u3002<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">2.3 \u70ad\u5316\u30b1\u30a4\u7d20\uff08SiC\uff09 - \u9ad8\u7cbe\u5ea6\u69cb\u9020\u30bb\u30e9\u30df\u30c3\u30af<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u70ad\u5316\u30b1\u30a4\u7d20\u306f\u5353\u8d8a\u3057\u305f\u525b\u6027\u3068\u71b1\u5b89\u5b9a\u6027\u3092\u6301\u3061\u3001\u7cbe\u5bc6\u6a5f\u5668\u306b\u6700\u9069\u3067\u3059\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>\u4e3b\u306a\u7528\u9014<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u9732\u5149\u6a5f\u30b9\u30c6\u30fc\u30b8<\/li>\n\n\n\n<li>\u30d5\u30a9\u30fc\u30ab\u30b9\u30ea\u30f3\u30b0<\/li>\n\n\n\n<li>\u7cbe\u5bc6\u30ac\u30a4\u30c9\u30ec\u30fc\u30eb<\/li>\n\n\n\n<li>\u30a6\u30a7\u30cf\u30fc\u30c1\u30e3\u30c3\u30af\u3068\u30df\u30e9\u30fc<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>\u4e3b\u306a\u5229\u70b9<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u6975\u3081\u3066\u9ad8\u3044\u525b\u6027<\/li>\n\n\n\n<li>\u4f4e\u71b1\u81a8\u5f35<\/li>\n\n\n\n<li>\u512a\u308c\u305f\u71b1\u4f1d\u5c0e\u6027<\/li>\n\n\n\n<li>\u93e1\u9762\u7814\u78e8\u53ef\u80fd\u306a\u8868\u9762<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">2.4 \u7a92\u5316\u30b1\u30a4\u7d20 (Si\u2083N\u2084) - \u9ad8\u4fe1\u983c\u6027\u30a8\u30f3\u30b8\u30cb\u30a2\u30ea\u30f3\u30b0\u30bb\u30e9\u30df\u30c3\u30af\u30b9<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u7a92\u5316\u30b1\u30a4\u7d20\u306f\u3001\u512a\u308c\u305f\u6a5f\u68b0\u7684\u5f37\u5ea6\u3068\u8010\u71b1\u885d\u6483\u6027\u3067\u77e5\u3089\u308c\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>\u4e3b\u306a\u7528\u9014<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30d9\u30a2\u30ea\u30f3\u30b0<\/li>\n\n\n\n<li>\u30ea\u30cb\u30a2\u30ac\u30a4\u30c9\u30b7\u30b9\u30c6\u30e0<\/li>\n\n\n\n<li>\u30e1\u30ab\u30cb\u30ab\u30eb\u30a2\u30fc\u30e0<\/li>\n\n\n\n<li>\u9ad8\u8377\u91cd\u69cb\u9020\u90e8\u54c1<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>\u4e3b\u306a\u5229\u70b9<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u9ad8\u3044\u7834\u58ca\u976d\u6027<\/li>\n\n\n\n<li>\u512a\u308c\u305f\u8010\u71b1\u885d\u6483\u6027<\/li>\n\n\n\n<li>\u9ad8\u6e29\u3067\u3082\u5b89\u5b9a\u3057\u305f\u6027\u80fd\uff08\u6700\u9ad81200\u2103\u4ee5\u4e0a\uff09<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">2.5 \u7a92\u5316\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\uff08AlN\uff09 - \u6b21\u4e16\u4ee3\u30b5\u30fc\u30de\u30eb\u30bb\u30e9\u30df\u30c3\u30af<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">AlN\u306f\u3001\u305d\u306e\u71b1\u4f1d\u5c0e\u6027\u306e\u512a\u4f4d\u6027\u306b\u3088\u308a\u3001\u30cf\u30a4\u30d1\u30ef\u30fc\u534a\u5c0e\u4f53\u30b7\u30b9\u30c6\u30e0\u3067\u307e\u3059\u307e\u3059\u4f7f\u7528\u3055\u308c\u308b\u3088\u3046\u306b\u306a\u3063\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>\u4e3b\u306a\u7528\u9014<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u9759\u96fb\u30c1\u30e3\u30c3\u30af\uff08ESC\uff09<\/li>\n\n\n\n<li>\u30cf\u30a4\u30d1\u30ef\u30fc\u96fb\u5b50\u57fa\u677f<\/li>\n\n\n\n<li>RF\u304a\u3088\u3073\u30d1\u30ef\u30fc\u30e2\u30b8\u30e5\u30fc\u30eb<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>\u4e3b\u306a\u5229\u70b9<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u9ad8\u3044\u71b1\u4f1d\u5c0e\u7387\uff08Al\u2082O\u2083\u3088\u308a\u306f\u308b\u304b\u306b\u9ad8\u3044\uff09<\/li>\n\n\n\n<li>\u512a\u308c\u305f\u96fb\u6c17\u7d76\u7e01\u6027<\/li>\n\n\n\n<li>\u71b1\u5fdc\u529b\u30df\u30b9\u30de\u30c3\u30c1\u306e\u4f4e\u6e1b<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">3.\u6280\u8853\u6bd4\u8f03\u8868<\/h2>\n\n\n\n<figure class=\"wp-block-table\"><table class=\"has-fixed-layout\"><thead><tr><th>\u7d20\u6750<\/th><th>\u71b1\u4f1d\u5c0e\u7387 (W\/m-K)<\/th><th>\u96fb\u6c17\u7d76\u7e01<\/th><th>\u8010\u71b1\u885d\u6483\u6027<\/th><th>\u30d7\u30e9\u30ba\u30de\u62b5\u6297<\/th><th>\u4e3b\u306a\u4f7f\u7528\u4f8b<\/th><\/tr><\/thead><tbody><tr><td>Al\u2082O\u2083 \uff08\u30a2\u30eb\u30df\u30ca\uff09<\/td><td>20-30<\/td><td>\u7d20\u6674\u3089\u3057\u3044<\/td><td>\u30df\u30c7\u30a3\u30a2\u30e0<\/td><td>\u30df\u30c7\u30a3\u30a2\u30e0<\/td><td>\u4e00\u822c\u69cb\u9020\u90e8\u54c1<\/td><\/tr><tr><td>Y\u2082O\u2083\uff08\u30a4\u30c3\u30c8\u30ea\u30a2\uff09<\/td><td>10-15<\/td><td>\u7d20\u6674\u3089\u3057\u3044<\/td><td>\u30b0\u30c3\u30c9<\/td><td>\u7d20\u6674\u3089\u3057\u3044<\/td><td>\u30d7\u30e9\u30ba\u30de\u30c1\u30e3\u30f3\u30d0\u30fc\u30fb\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0<\/td><\/tr><tr><td>SiC\uff08\u70ad\u5316\u30b1\u30a4\u7d20\uff09<\/td><td>120-200<\/td><td>\u30b0\u30c3\u30c9<\/td><td>\u7d20\u6674\u3089\u3057\u3044<\/td><td>\u30b0\u30c3\u30c9<\/td><td>\u7cbe\u5bc6\u69cb\u9020\u90e8\u54c1<\/td><\/tr><tr><td>Si\u2083N\u2084\uff08\u7a92\u5316\u30b1\u30a4\u7d20\uff09<\/td><td>20-90<\/td><td>\u30b0\u30c3\u30c9<\/td><td>\u7d20\u6674\u3089\u3057\u3044<\/td><td>\u30b0\u30c3\u30c9<\/td><td>\u30d9\u30a2\u30ea\u30f3\u30b0\u3068\u6a5f\u68b0\u30b7\u30b9\u30c6\u30e0<\/td><\/tr><tr><td>AlN\uff08\u7a92\u5316\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\uff09<\/td><td>140-180<\/td><td>\u7d20\u6674\u3089\u3057\u3044<\/td><td>\u30b0\u30c3\u30c9<\/td><td>\u30df\u30c7\u30a3\u30a2\u30e0<\/td><td>\u71b1\u7ba1\u7406\uff08ESC\uff09<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<h2 class=\"wp-block-heading\">4.\u534a\u5c0e\u4f53\u88c5\u7f6e\u306b\u304a\u3051\u308b\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u30de\u30c3\u30d7<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">\u30d5\u30ed\u30f3\u30c8\u30a8\u30f3\u30c9\u30d7\u30ed\u30bb\u30b9\u6a5f\u5668<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30a8\u30c3\u30c1\u30f3\u30b0\u30c1\u30e3\u30f3\u30d0\u30fc \u2192 Al\u2082O\u2083 \/ Y\u2082O\u2083<\/li>\n\n\n\n<li>\u84b8\u7740\u30b7\u30b9\u30c6\u30e0 \u2192 Al\u2082O\u2083 \/ SiC<\/li>\n\n\n\n<li>\u30d7\u30e9\u30ba\u30de\u74b0\u5883\u2192Y\u2082O\u2083\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">\u30a6\u30a7\u30cf\u30fc\u30cf\u30f3\u30c9\u30ea\u30f3\u30b0\u30b7\u30b9\u30c6\u30e0<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30ed\u30dc\u30c3\u30c8\u30a2\u30fc\u30e0 \u2192 Si\u2083N\u2084 \/ SiC<\/li>\n\n\n\n<li>\u771f\u7a7a\u30c1\u30e3\u30c3\u30af \u2192 Al\u2082O\u2083 \/ AlN<\/li>\n\n\n\n<li>\u30ac\u30a4\u30c9\u30ec\u30fc\u30eb\u2192SiC\uff0fSi\u2083N\u2084\u3002<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">\u71b1\u7ba1\u7406\u30b7\u30b9\u30c6\u30e0<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>ESC\uff08\u9759\u96fb\u30c1\u30e3\u30c3\u30af\uff09 \u2192 AlN \/ Al\u2082O\u2083<\/li>\n\n\n\n<li>\u30d2\u30fc\u30c8\u30b9\u30d7\u30ec\u30c3\u30c0 \u2192 AlN<\/li>\n\n\n\n<li>\u7cbe\u5bc6\u51b7\u5374\u30d7\u30ec\u30fc\u30c8 \u2192 Al\u2082O\u2083 \/ SiC<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">5.\u6750\u6599\u9078\u629e\u30ac\u30a4\u30c9\uff08\u30a8\u30f3\u30b8\u30cb\u30a2\u30ea\u30f3\u30b0\u30d3\u30e5\u30fc\uff09<\/h2>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u30b3\u30b9\u30c8\u91cd\u8996\u306e\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3 \u2192 Al\u2082O\u2083<\/strong><\/li>\n\n\n\n<li><strong>\u30d7\u30e9\u30ba\u30de\u8150\u98df\u74b0\u5883 \u2192 Y\u2082O\u2083<\/strong><\/li>\n\n\n\n<li><strong>\u9ad8\u7cbe\u5ea6\u69cb\u9020 \u2192 SiC<\/strong><\/li>\n\n\n\n<li><strong>\u6a5f\u68b0\u7684\u8ca0\u8377\u3068\u8010\u4e45\u6027\u2192Si\u2083N\u2084\u3002<\/strong><\/li>\n\n\n\n<li><strong>\u9ad8\u71b1\u653e\u6563 \u2192 AlN<\/strong><\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">6.\u4eca\u5f8c\u306e\u30c8\u30ec\u30f3\u30c9\uff1a\u30cf\u30a4\u30d6\u30ea\u30c3\u30c9\u30fb\u30bb\u30e9\u30df\u30c3\u30af\u30fb\u30b7\u30b9\u30c6\u30e0<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u6b21\u4e16\u4ee3\u534a\u5c0e\u4f53\u88c5\u7f6e\u306f\u3001\u3053\u306e\u65b9\u5411\u3078\u30b7\u30d5\u30c8\u3057\u3066\u3044\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u30bb\u30e9\u30df\u30c3\u30af\u7cfb\uff08Al\u2082O\u2083 + Y\u2082O\u2083\uff09<\/li>\n\n\n\n<li>SiC\u69cb\u9020\u30d7\u30e9\u30c3\u30c8\u30d5\u30a9\u30fc\u30e0<\/li>\n\n\n\n<li>AlN\u71b1\u7ba1\u7406\u7d71\u5408<\/li>\n\n\n\n<li>\u30de\u30eb\u30c1\u30de\u30c6\u30ea\u30a2\u30eb\u30cf\u30a4\u30d6\u30ea\u30c3\u30c9\u30bb\u30e9\u30df\u30c3\u30af\u30a2\u30bb\u30f3\u30d6\u30ea<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u3053\u306e\u50be\u5411\u306f\u3001\u88c5\u7f6e\u306e\u5bff\u547d\u3068\u30d7\u30ed\u30bb\u30b9\u306e\u5b89\u5b9a\u6027\u3092\u5927\u5e45\u306b\u5411\u4e0a\u3055\u305b\u308b\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">\u7d50\u8ad6<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u30a2\u30c9\u30d0\u30f3\u30b9\u30c8\u30fb\u30bb\u30e9\u30df\u30c3\u30af\u30b9\u306f\u3001\u534a\u5c0e\u4f53\u88fd\u9020\u88c5\u7f6e\u306e\u57fa\u5e79\u3068\u306a\u3063\u3066\u3044\u307e\u3059\u3002\u5404\u6750\u6599\u306f\u3001\u69cb\u9020\u652f\u6301\u304b\u3089\u8010\u30d7\u30e9\u30ba\u30de\u6027\u3001\u71b1\u7ba1\u7406\u307e\u3067\u3001\u5c02\u9580\u7684\u306a\u5f79\u5272\u3092\u679c\u305f\u3057\u3066\u3044\u307e\u3059\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u9069\u5207\u306a\u30bb\u30e9\u30df\u30c3\u30af\u6750\u6599\u3092\u9078\u629e\u3059\u308b\u3053\u3068\u306f\u3001\u76f4\u63a5\u7684\u306b\u5f71\u97ff\u3059\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u8a2d\u5099\u5bff\u547d<\/li>\n\n\n\n<li>\u30d7\u30ed\u30bb\u30b9\u306e\u5b89\u5b9a\u6027<\/li>\n\n\n\n<li>\u6b69\u7559\u307e\u308a<\/li>\n\n\n\n<li>\u7dad\u6301\u8cbb<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">\u30ea\u30af\u30a8\u30b9\u30c8 <a href=\"https:\/\/www.xkh-ceramics.com\/ja\/%e8%a3%bd%e5%93%81\/\"><mark style=\"background-color:rgba(0, 0, 0, 0);color:#0693e3\" class=\"has-inline-color\">\u30ab\u30b9\u30bf\u30e0\u30bb\u30e9\u30df\u30c3\u30af\u90e8\u54c1<\/mark><\/a><\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u79c1\u305f\u3061\u306f\u63d0\u4f9b\u3059\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30a2\u30eb\u30df\u30ca\u30bb\u30e9\u30df\u30c3\u30af\u90e8\u54c1\uff08Al\u2082O\u2083\uff09<\/li>\n\n\n\n<li>\u70ad\u5316\u30b1\u30a4\u7d20\u7cbe\u5bc6\u90e8\u54c1\uff08SiC\uff09<\/li>\n\n\n\n<li>\u7a92\u5316\u30b1\u30a4\u7d20\u69cb\u9020\u90e8\u54c1 (Si\u2083N\u2084)<\/li>\n\n\n\n<li>\u7a92\u5316\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\u71b1\u57fa\u677f\uff08AlN\uff09<\/li>\n\n\n\n<li>\u30a4\u30c3\u30c8\u30ea\u30a2\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u6eb6\u6db2(Y\u2082O\u2083)<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u7279\u6ce8\u30b5\u30a4\u30ba\u3001\u6a5f\u68b0\u52a0\u5de5\u3001\u7814\u78e8\u3001\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3001\u30a8\u30f3\u30b8\u30cb\u30a2\u30ea\u30f3\u30b0\u30fb\u30b5\u30dd\u30fc\u30c8\u304c\u53ef\u80fd\u3002.<\/p>","protected":false},"excerpt":{"rendered":"<p>In modern semiconductor manufacturing equipment, advanced ceramics are no longer optional components\u2014they are critical enabling materials that determine precision, stability, and process reliability. From plasma etching chambers to wafer handling systems, different ceramic materials are selected based on thermal, electrical, and mechanical performance requirements. This article introduces the most widely used semiconductor-grade ceramics and provides a clear technical comparison for engineering and procurement decision-making. 1. Why Ceramics Are Essential in Semiconductor Equipment Semiconductor production environments involve: Traditional metals fail in insulation, corrosion resistance, or thermal stability. Advanced ceramics solve these limitations. 2. Most Widely Used Ceramic Materials 2.1 Alumina (Al\u2082O\u2083) \u2013 The Industry Standard Material Alumina ceramic is the most [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":2267,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[3],"tags":[469,465,466,472,460,470,464,459,84,463,471,310,251,303,468,461,322,462,467],"class_list":["post-2266","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-industry-news","tag-advanced-ceramic-materials","tag-alumina-ceramic-al2o3","tag-aluminum-nitride-aln","tag-ceramic-comparison-table","tag-electrical-insulation-ceramics","tag-esc-ceramic-chuck","tag-etching-chamber-ceramics","tag-high-temperature-ceramics","tag-high-thermal-conductivity-ceramics","tag-industrial-technical-ceramics","tag-plasma-resistant-ceramics","tag-precision-ceramic-components","tag-semiconductor-ceramics","tag-semiconductor-equipment-materials","tag-semiconductor-manufacturing-materials","tag-silicon-carbide-sic","tag-silicon-nitride-si3n4","tag-wafer-processing-materials","tag-yttria-y2o3"],"_links":{"self":[{"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/posts\/2266","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/comments?post=2266"}],"version-history":[{"count":2,"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/posts\/2266\/revisions"}],"predecessor-version":[{"id":2270,"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/posts\/2266\/revisions\/2270"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/media\/2267"}],"wp:attachment":[{"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/media?parent=2266"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/categories?post=2266"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/tags?post=2266"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}