{"id":2210,"date":"2026-05-18T01:20:49","date_gmt":"2026-05-18T01:20:49","guid":{"rendered":"https:\/\/www.xkh-ceramics.com\/?p=2210"},"modified":"2026-05-18T01:21:31","modified_gmt":"2026-05-18T01:21:31","slug":"%e5%8d%8a%e5%b0%8e%e4%bd%93%e8%a3%bd%e9%80%a0%e7%94%a8%e6%a7%8b%e9%80%a0%e3%82%bb%e3%83%a9%e3%83%9f%e3%83%83%e3%82%af%e3%82%b9%e6%9d%90%e6%96%99%e3%81%ae%e7%94%a8%e9%80%94%e3%81%a8%e4%bb%8a%e5%be%8c","status":"publish","type":"post","link":"https:\/\/www.xkh-ceramics.com\/ja\/structural-ceramics-for-semiconductor-manufacturing-materials-applications-and-future-trends\/","title":{"rendered":"\u534a\u5c0e\u4f53\u88fd\u9020\u7528\u69cb\u9020\u30bb\u30e9\u30df\u30c3\u30af\u30b9\uff1a\u6750\u6599\u3001\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u3001\u5c06\u6765\u306e\u52d5\u5411"},"content":{"rendered":"<p 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href=\"https:\/\/www.xkh-ceramics.com\/ja\/%e8%a3%bd%e5%93%81\/\" data-type=\"page\" data-id=\"1921\">\u69cb\u9020\u30bb\u30e9\u30df\u30c3\u30af\u30b9 <\/a>\u306f\u3001\u534a\u5c0e\u4f53\u88c5\u7f6e\u306b\u304a\u3044\u3066\u4e0d\u53ef\u6b20\u306a\u6750\u6599\u3068\u306a\u3063\u3066\u3044\u308b\u3002\u6a5f\u68b0\u7684\u5f37\u5ea6\u3001\u8010\u6469\u8017\u6027\u3001\u71b1\u5b89\u5b9a\u6027\u3001\u8010\u98df\u6027\u3001\u96fb\u6c17\u7279\u6027\u306a\u3069\u306e\u30e6\u30cb\u30fc\u30af\u306a\u7d44\u307f\u5408\u308f\u305b\u306b\u3088\u308a\u3001\u30a6\u30a7\u30cf\u30fc\u30d7\u30ed\u30bb\u30b9\u3001\u30cf\u30f3\u30c9\u30ea\u30f3\u30b0\u3001\u84b8\u7740\u3001\u30a8\u30c3\u30c1\u30f3\u30b0\u3001\u691c\u67fb\u30b7\u30b9\u30c6\u30e0\u306b\u4e0d\u53ef\u6b20\u306a\u6750\u6599\u3068\u306a\u3063\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u3053\u306e\u8a18\u4e8b\u3067\u306f\u3001\u6750\u6599\u306e\u7a2e\u985e\u3001\u91cd\u8981\u306a\u7279\u6027\u3001\u88c5\u7f6e\u306e\u7528\u9014\u3001\u9078\u629e\u57fa\u6e96\u3001\u5c06\u6765\u306e\u696d\u754c\u52d5\u5411\u306a\u3069\u3001\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u4f7f\u7528\u3055\u308c\u308b\u69cb\u9020\u30bb\u30e9\u30df\u30c3\u30af\u306b\u3064\u3044\u3066\u8a73\u3057\u304f\u5206\u6790\u3057\u3066\u3044\u307e\u3059\u3002.<\/p>\n\n\n\n<figure class=\"wp-block-image aligncenter size-large\"><img fetchpriority=\"high\" decoding=\"async\" width=\"1024\" height=\"683\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Structural-Ceramics-for-Semiconductor-Manufacturing-1024x683.png\" alt=\"\" class=\"wp-image-2211\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Structural-Ceramics-for-Semiconductor-Manufacturing-1024x683.png 1024w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Structural-Ceramics-for-Semiconductor-Manufacturing-300x200.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Structural-Ceramics-for-Semiconductor-Manufacturing-768x512.png 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Structural-Ceramics-for-Semiconductor-Manufacturing-18x12.png 18w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Structural-Ceramics-for-Semiconductor-Manufacturing-600x400.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Structural-Ceramics-for-Semiconductor-Manufacturing.png 1536w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<h2 class=\"wp-block-heading\">\u69cb\u9020\u7528\u30bb\u30e9\u30df\u30c3\u30af\u30b9\u3068\u306f\uff1f<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u69cb\u9020\u7528\u30bb\u30e9\u30df\u30c3\u30af\u306f\u3001\u4e3b\u306b\u53b3\u3057\u3044\u4f7f\u7528\u6761\u4ef6\u4e0b\u3067\u306e\u6a5f\u68b0\u7684\u30fb\u6a5f\u80fd\u7684\u6027\u80fd\u306e\u305f\u3081\u306b\u8a2d\u8a08\u3055\u308c\u305f\u4eba\u5de5\u30bb\u30e9\u30df\u30c3\u30af\u6750\u6599\u3067\u3059\u3002\u88c5\u98fe\u7684\u307e\u305f\u306f\u4f1d\u7d71\u7684\u306a\u30bb\u30e9\u30df\u30c3\u30af\u3068\u306f\u7570\u306a\u308a\u3001\u9ad8\u5ea6\u306a\u69cb\u9020\u30bb\u30e9\u30df\u30c3\u30af\u306f\u3001\u9ad8\u5ea6\u306b\u5236\u5fa1\u3055\u308c\u305f\u5fae\u7d30\u69cb\u9020\u3068\u5353\u8d8a\u3057\u305f\u6750\u6599\u7279\u6027\u3092\u6709\u3057\u3066\u3044\u307e\u3059\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u534a\u5c0e\u4f53\u306e\u74b0\u5883\u3067\u306f\u3001\u69cb\u9020\u7528\u30bb\u30e9\u30df\u30c3\u30af\u30b9\u304c\u671f\u5f85\u3055\u308c\u3066\u3044\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u9ad8\u3044\u5bf8\u6cd5\u7cbe\u5ea6<\/li>\n\n\n\n<li>\u512a\u308c\u305f\u71b1\u5b89\u5b9a\u6027<\/li>\n\n\n\n<li>\u30d7\u30e9\u30ba\u30de\u4fb5\u98df\u306b\u5bfe\u3059\u308b\u8010\u6027<\/li>\n\n\n\n<li>\u30d1\u30fc\u30c6\u30a3\u30af\u30eb\u306e\u767a\u751f\u304c\u5c11\u306a\u3044<\/li>\n\n\n\n<li>\u5316\u5b66\u7684\u4e0d\u6d3b\u6027<\/li>\n\n\n\n<li>\u9ad8\u7d14\u5ea6<\/li>\n\n\n\n<li>\u7528\u9014\u306b\u5fdc\u3058\u305f\u96fb\u6c17\u7d76\u7e01\u6027\u307e\u305f\u306f\u5c0e\u96fb\u6027<\/li>\n\n\n\n<li>\u771f\u7a7a\u6761\u4ef6\u4e0b\u3067\u306e\u9577\u671f\u4fe1\u983c\u6027<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u534a\u5c0e\u4f53\u30d7\u30ed\u30bb\u30b9\u304c\u6c5a\u67d3\u306b\u5bfe\u3057\u3066\u307e\u3059\u307e\u3059\u654f\u611f\u306b\u306a\u3063\u3066\u3044\u308b\u305f\u3081\u3001\u5fae\u8996\u7684\u306a\u6750\u6599\u52a3\u5316\u3067\u3055\u3048\u30a6\u30a7\u30cf\u30fc\u306e\u6b69\u7559\u307e\u308a\u306b\u5f71\u97ff\u3092\u4e0e\u3048\u308b\u53ef\u80fd\u6027\u304c\u3042\u308b\u3002.<\/p>\n\n\n\n<h1 class=\"wp-block-heading\">\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u304a\u3044\u3066\u69cb\u9020\u30bb\u30e9\u30df\u30c3\u30af\u30b9\u304c\u91cd\u8981\u306a\u7406\u7531<\/h1>\n\n\n\n<p class=\"wp-block-paragraph\">\u534a\u5c0e\u4f53\u88c5\u7f6e\u306f\u3001\u5f93\u6765\u306e\u7523\u696d\u30b7\u30b9\u30c6\u30e0\u3088\u308a\u3082\u306f\u308b\u304b\u306b\u904e\u9177\u306a\u6761\u4ef6\u4e0b\u3067\u4f5c\u52d5\u3059\u308b\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u4ee3\u8868\u7684\u306a\u74b0\u5883\u306f\u4ee5\u4e0b\u306e\u901a\u308a\uff1a<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">\u6975\u7aef\u306a\u6e29\u5ea6\u30b5\u30a4\u30af\u30eb<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u6025\u901f\u51b7\u6696\u623f<\/li>\n\n\n\n<li>\u6975\u4f4e\u6e29\u304b\u30891600\u00b0C\u4ee5\u4e0a\u306e\u6e29\u5ea6\u307e\u3067\u5bfe\u5fdc<\/li>\n\n\n\n<li>\u71b1\u885d\u6483\u30b9\u30c8\u30ec\u30b9<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">\u7a4d\u6975\u7684\u306a\u5316\u5b66\u7269\u8cea\u3078\u306e\u66b4\u9732<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u9178<\/li>\n\n\n\n<li>\u30a2\u30eb\u30ab\u30ea<\/li>\n\n\n\n<li>\u53cd\u5fdc\u6027\u30ac\u30b9<\/li>\n\n\n\n<li>\u6d17\u6d44\u5316\u5b66\u7269\u8cea<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">\u30d7\u30e9\u30ba\u30de\u51e6\u7406<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u30a8\u30c3\u30c1\u30f3\u30b0\u3068\u84b8\u7740\u30c1\u30e3\u30f3\u30d0\u30fc\u306f\u3001\u5f93\u6765\u306e\u6750\u6599\u306b\u30c0\u30e1\u30fc\u30b8\u3092\u4e0e\u3048\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u9ad8\u30a8\u30cd\u30eb\u30ae\u30fc\u306e\u30d7\u30e9\u30ba\u30de\u3092\u4f7f\u7528\u3059\u308b\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">\u8d85\u30af\u30ea\u30fc\u30f3\u306a\u74b0\u5883<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u30ca\u30ce\u30e1\u30fc\u30c8\u30eb\u5358\u4f4d\u3067\u6e2c\u5b9a\u3055\u308c\u308b\u7c92\u5b50\u306f\u3001\u30c7\u30d0\u30a4\u30b9\u306e\u6027\u80fd\u306b\u5927\u304d\u306a\u5f71\u97ff\u3092\u4e0e\u3048\u308b\u53ef\u80fd\u6027\u304c\u3042\u308b\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">\u771f\u7a7a\u64cd\u4f5c<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u591a\u304f\u306e\u534a\u5c0e\u4f53\u30b7\u30b9\u30c6\u30e0\u306f\u3001\u3053\u306e\u3088\u3046\u306a\u74b0\u5883\u3067\u52d5\u4f5c\u3057\u3066\u3044\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u9ad8\u771f\u7a7a<\/li>\n\n\n\n<li>\u8d85\u9ad8\u771f\u7a7a<\/li>\n\n\n\n<li>\u5236\u5fa1\u3055\u308c\u305f\u5927\u6c17\u74b0\u5883<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u69cb\u9020\u7528\u30bb\u30e9\u30df\u30c3\u30af\u306f\u3001\u8150\u98df\u3001\u5909\u5f62\u3001\u9178\u5316\u3001\u6c5a\u67d3\u306b\u5f37\u3044\u305f\u3081\u3001\u3053\u306e\u3088\u3046\u306a\u72b6\u6cc1\u306e\u591a\u304f\u3067\u91d1\u5c5e\u3092\u51cc\u99d5\u3059\u308b\u3002.<\/p>\n\n\n\n<h1 class=\"wp-block-heading\">\u534a\u5c0e\u4f53\u88c5\u7f6e\u306b\u4f7f\u7528\u3055\u308c\u308b\u4e3b\u306a\u69cb\u9020\u30bb\u30e9\u30df\u30c3\u30af\u6750\u6599<\/h1>\n\n\n\n<p class=\"wp-block-paragraph\">\u30d7\u30ed\u30bb\u30b9\u8981\u4ef6\u306b\u5fdc\u3058\u3066\u3001\u3055\u307e\u3056\u307e\u306a\u30bb\u30e9\u30df\u30c3\u30af\u6750\u6599\u304c\u9078\u629e\u3055\u308c\u308b\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">\u70ad\u5316\u30b1\u30a4\u7d20\uff08SiC\uff09<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u70ad\u5316\u30b1\u30a4\u7d20\u306f\u6700\u3082\u91cd\u8981\u306a\u534a\u5c0e\u4f53\u69cb\u9020\u30bb\u30e9\u30df\u30c3\u30af\u30b9\u306e\u3072\u3068\u3064\u3067\u3042\u308b\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u4e3b\u306a\u7279\u6027<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u6975\u3081\u3066\u9ad8\u3044\u786c\u5ea6<\/li>\n\n\n\n<li>\u9ad8\u3044\u71b1\u4f1d\u5c0e\u6027<\/li>\n\n\n\n<li>\u512a\u308c\u305f\u8010\u6469\u8017\u6027<\/li>\n\n\n\n<li>\u30d7\u30e9\u30ba\u30de\u62b5\u6297<\/li>\n\n\n\n<li>\u9ad8\u6e29\u5b89\u5b9a\u6027<\/li>\n\n\n\n<li>\u4f4e\u71b1\u81a8\u5f35<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30a6\u30a7\u30cf\u30fc\u30ad\u30e3\u30ea\u30a2<\/li>\n\n\n\n<li>\u771f\u7a7a\u30c1\u30e3\u30c3\u30af<\/li>\n\n\n\n<li>\u30b5\u30bb\u30d7\u30bf\u30fc<\/li>\n\n\n\n<li>\u30d7\u30ed\u30bb\u30b9\u30c8\u30ec\u30a4<\/li>\n\n\n\n<li>\u30ed\u30dc\u30c3\u30c8\u30a2\u30fc\u30e0<\/li>\n\n\n\n<li>\u30a6\u30a7\u30cf\u652f\u6301\u69cb\u9020<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u53cd\u5fdc\u7d50\u5408SiC\u3068\u518d\u7d50\u6676SiC\u306f\u3001\u71b1\u51e6\u7406\u30b7\u30b9\u30c6\u30e0\u3067\u4e00\u822c\u7684\u306b\u4f7f\u7528\u3055\u308c\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u5229\u70b9\u304c\u3042\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u512a\u308c\u305f\u5bf8\u6cd5\u5b89\u5b9a\u6027<\/li>\n\n\n\n<li>\u7c92\u5b50\u6c5a\u67d3\u306e\u4f4e\u6e1b<\/li>\n\n\n\n<li>\u9577\u5bff\u547d<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">\u30a2\u30eb\u30df\u30ca (Al2O3)<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u30a2\u30eb\u30df\u30ca\u306f\u3001\u30b3\u30b9\u30c8\u30d1\u30d5\u30a9\u30fc\u30de\u30f3\u30b9\u306e\u30d0\u30e9\u30f3\u30b9\u304b\u3089\u3001\u4f9d\u7136\u3068\u3057\u3066\u6700\u3082\u5e83\u304f\u4f7f\u7528\u3055\u308c\u3066\u3044\u308b\u30bb\u30e9\u30df\u30c3\u30af\u6750\u6599\u306e\u4e00\u3064\u3067\u3042\u308b\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u5178\u578b\u7684\u306a\u7279\u6027\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u96fb\u6c17\u7d76\u7e01<\/li>\n\n\n\n<li>\u9ad8\u3044\u786c\u5ea6<\/li>\n\n\n\n<li>\u826f\u597d\u306a\u8010\u98df\u6027<\/li>\n\n\n\n<li>\u4f4e\u30b3\u30b9\u30c8<\/li>\n\n\n\n<li>\u9ad8\u7d14\u5ea6\u30a2\u30d9\u30a4\u30e9\u30d3\u30ea\u30c6\u30a3<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30bb\u30e9\u30df\u30c3\u30af\u7d76\u7e01\u4f53<\/li>\n\n\n\n<li>\u30ce\u30ba\u30eb<\/li>\n\n\n\n<li>\u30ac\u30a4\u30c9\u90e8\u54c1<\/li>\n\n\n\n<li>\u30c1\u30e3\u30f3\u30d0\u30fc\u90e8\u54c1<\/li>\n\n\n\n<li>\u30dd\u30b8\u30b7\u30e7\u30cb\u30f3\u30b0\u30fb\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u7d14\u5ea6\u30ec\u30d9\u30eb\u306f\u3057\u3070\u3057\u3070\u305d\u308c\u3092\u8d85\u3048\u308b\uff1a<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">99.5%<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u8d85\u9ad8\u7d14\u5ea6\u30b0\u30ec\u30fc\u30c9\u306f\u305d\u308c\u3092\u8d85\u3048\u308b\u5834\u5408\u304c\u3042\u308b\uff1a<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">99.9%<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u7d14\u5ea6\u304c\u9ad8\u3044\u305f\u3081\u3001\u30b3\u30f3\u30bf\u30df\u30cd\u30fc\u30b7\u30e7\u30f3\u306e\u30ea\u30b9\u30af\u304c\u4f4e\u6e1b\u3055\u308c\u308b\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">\u30b8\u30eb\u30b3\u30cb\u30a2\uff08ZrO2\uff09<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u30b8\u30eb\u30b3\u30cb\u30a2\u306f\u5353\u8d8a\u3057\u305f\u7834\u58ca\u976d\u6027\u3092\u63d0\u4f9b\u3057\u307e\u3059\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u7279\u5fb4<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u9ad8\u3044\u66f2\u3052\u5f37\u5ea6<\/li>\n\n\n\n<li>\u8010\u6469\u8017\u6027<\/li>\n\n\n\n<li>\u71b1\u4f1d\u5c0e\u7387\u304c\u4f4e\u3044<\/li>\n\n\n\n<li>\u512a\u308c\u305f\u8010\u30af\u30e9\u30c3\u30af\u6027<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u7cbe\u5bc6\u78e8\u8017\u90e8\u54c1<\/li>\n\n\n\n<li>\u30d9\u30a2\u30ea\u30f3\u30b0<\/li>\n\n\n\n<li>\u30d0\u30eb\u30d6\u90e8\u54c1<\/li>\n\n\n\n<li>\u30dd\u30b8\u30b7\u30e7\u30cb\u30f3\u30b0\u30b7\u30b9\u30c6\u30e0<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u5909\u614b\u5f37\u976d\u5316\u30e1\u30ab\u30cb\u30ba\u30e0\u306b\u3088\u308a\u3001\u6a5f\u68b0\u7684\u7834\u58ca\u306b\u5bfe\u3059\u308b\u8010\u6027\u304c\u5411\u4e0a\u3059\u308b\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">\u7a92\u5316\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\uff08AlN\uff09<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u7a92\u5316\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\u306f\u3001\u305d\u306e\u71b1\u4f1d\u5c0e\u6027\u304b\u3089\u307e\u3059\u307e\u3059\u91cd\u8981\u6027\u3092\u5897\u3057\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u30d7\u30ed\u30d1\u30c6\u30a3<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u9ad8\u3044\u71b1\u4f1d\u5c0e\u6027<\/li>\n\n\n\n<li>\u96fb\u6c17\u7d76\u7e01<\/li>\n\n\n\n<li>\u30b7\u30ea\u30b3\u30f3\u306b\u8fd1\u3044\u71b1\u81a8\u5f35<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u9759\u96fb\u30c1\u30e3\u30c3\u30af\u57fa\u677f<\/li>\n\n\n\n<li>\u71b1\u7ba1\u7406\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8<\/li>\n\n\n\n<li>\u534a\u5c0e\u4f53\u30d2\u30fc\u30bf\u30fc<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">AlN\u306f\u4f1d\u71b1\u80fd\u529b\u3068\u96fb\u6c17\u7684\u7d76\u7e01\u3092\u517c\u306d\u5099\u3048\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">\u77f3\u82f1\u3068\u6eb6\u878d\u30b7\u30ea\u30ab<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u6280\u8853\u7684\u306b\u306f\u69cb\u9020\u7528\u30bb\u30e9\u30df\u30c3\u30af\u30b9\u3068\u306f\u7570\u306a\u308b\u304c\u3001\u3053\u308c\u3089\u306e\u6750\u6599\u304c\u4e0d\u53ef\u6b20\u3067\u3042\u308b\u3053\u3068\u306b\u5909\u308f\u308a\u306f\u306a\u3044\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u7528\u9014\u306f\u4ee5\u4e0b\u306e\u901a\u308a\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30d7\u30ed\u30bb\u30b9\u30c1\u30e5\u30fc\u30d6<\/li>\n\n\n\n<li>\u30a6\u30a8\u30cf\u30fc\u30dc\u30fc\u30c8<\/li>\n\n\n\n<li>\u62e1\u6563\u88c5\u7f6e<\/li>\n\n\n\n<li>\u5149\u5b66\u90e8\u54c1<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u5229\u70b9\u304c\u3042\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u9ad8\u7d14\u5ea6<\/li>\n\n\n\n<li>\u4f4e\u71b1\u81a8\u5f35<\/li>\n\n\n\n<li>\u900f\u660e\u6027<\/li>\n<\/ul>\n\n\n\n<h1 class=\"wp-block-heading\">\u534a\u5c0e\u4f53\u88c5\u7f6e\u306b\u304a\u3051\u308b\u69cb\u9020\u30bb\u30e9\u30df\u30c3\u30af\u30b9\u306e\u4e3b\u306a\u7528\u9014<\/h1>\n\n\n\n<p class=\"wp-block-paragraph\">\u69cb\u9020\u7528\u30bb\u30e9\u30df\u30c3\u30af\u30b9\u306f\u3001\u534a\u5c0e\u4f53\u306e\u88fd\u9020\u30e9\u30a4\u30f3\u306e\u3044\u305f\u308b\u3068\u3053\u308d\u306b\u767b\u5834\u3059\u308b\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">\u30a6\u30a7\u30cf\u30fc\u30cf\u30f3\u30c9\u30ea\u30f3\u30b0\u30b7\u30b9\u30c6\u30e0<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u30a6\u30a7\u30cf\u30fc\u642c\u9001\u30b7\u30b9\u30c6\u30e0\u306b\u306f\u3001\u4ee5\u4e0b\u306e\u3053\u3068\u304c\u8981\u6c42\u3055\u308c\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u5bf8\u6cd5\u7cbe\u5ea6<\/li>\n\n\n\n<li>\u4f4e\u30d1\u30fc\u30c6\u30a3\u30af\u30eb\u767a\u751f<\/li>\n\n\n\n<li>\u8010\u6469\u8017\u6027<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30ed\u30dc\u30c3\u30c8\u30a8\u30f3\u30c9\u30a8\u30d5\u30a7\u30af\u30bf\u30fc<\/li>\n\n\n\n<li>\u30d0\u30ad\u30e5\u30fc\u30e0\u30a2\u30fc\u30e0<\/li>\n\n\n\n<li>\u30ac\u30a4\u30c9\u30ec\u30fc\u30eb<\/li>\n\n\n\n<li>\u30b5\u30dd\u30fc\u30c8\u30d4\u30f3<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u30bb\u30e9\u30df\u30c3\u30af\u306f\u6469\u8017\u3084\u6c5a\u67d3\u3092\u4f4e\u6e1b\u3059\u308b\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">\u9759\u96fb\u30c1\u30e3\u30c3\u30af<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u9759\u96fb\u30c1\u30e3\u30c3\u30af\u306f\u51e6\u7406\u4e2d\u306e\u30a6\u30a7\u30cf\u30fc\u3092\u56fa\u5b9a\u3057\u307e\u3059\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u5fc5\u8981\u6761\u4ef6<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u5236\u5fa1\u3055\u308c\u305f\u96fb\u6c17\u7684\u7279\u6027<\/li>\n\n\n\n<li>\u71b1\u5747\u4e00\u6027<\/li>\n\n\n\n<li>\u30d7\u30e9\u30ba\u30de\u62b5\u6297<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u4e00\u822c\u7684\u306a\u7d20\u6750\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u7a92\u5316\u30a2\u30eb\u30df\u30cb\u30a6\u30e0<\/li>\n\n\n\n<li>SiC<\/li>\n\n\n\n<li>\u30a2\u30eb\u30df\u30ca\u8907\u5408\u6750\u6599<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u6027\u80fd\u306f\u30d7\u30ed\u30bb\u30b9\u306e\u5747\u4e00\u6027\u306b\u76f4\u63a5\u5f71\u97ff\u3059\u308b\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">\u30a8\u30c3\u30c1\u30f3\u30b0\u88c5\u7f6e\u90e8\u54c1<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0\u30c1\u30e3\u30f3\u30d0\u30fc\u306f\u3001\u6750\u6599\u3092\u9ad8\u30a8\u30cd\u30eb\u30ae\u30fc\u306e\u30a4\u30aa\u30f3\u3084\u53cd\u5fdc\u7a2e\u306b\u3055\u3089\u3059\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u30bb\u30e9\u30df\u30c3\u30af\u90e8\u54c1\u306f\u4ee5\u4e0b\u306e\u901a\u308a\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30d5\u30a9\u30fc\u30ab\u30b9\u30ea\u30f3\u30b0<\/li>\n\n\n\n<li>\u30ac\u30b9\u5206\u914d\u30d7\u30ec\u30fc\u30c8<\/li>\n\n\n\n<li>\u30c1\u30e3\u30f3\u30d0\u30fc\u30e9\u30a4\u30ca\u30fc<\/li>\n\n\n\n<li>\u30a8\u30c3\u30b8\u30ea\u30f3\u30b0<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u3053\u308c\u3089\u306e\u7528\u9014\u3067\u306f\u3001SiC\u3068\u9ad8\u7d14\u5ea6\u30a2\u30eb\u30df\u30ca\u304c\u5927\u534a\u3092\u5360\u3081\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">CVD\u304a\u3088\u3073\u30a8\u30d4\u30bf\u30ad\u30b7\u30fc\u88c5\u7f6e<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u5316\u5b66\u84b8\u7740\u30d7\u30ed\u30bb\u30b9\u306f\u9ad8\u6e29\u3092\u4f34\u3046\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u30bb\u30e9\u30df\u30c3\u30af\u7528\u9014\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30b5\u30bb\u30d7\u30bf\u30fc<\/li>\n\n\n\n<li>\u30d7\u30ed\u30bb\u30b9\u30c8\u30ec\u30a4<\/li>\n\n\n\n<li>\u30a6\u30a8\u30cf\u30ad\u30e3\u30ea\u30a2<\/li>\n\n\n\n<li>\u30b5\u30fc\u30de\u30eb\u30fb\u30b7\u30fc\u30eb\u30c9<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u71b1\u5b89\u5b9a\u6027\u304c\u91cd\u8981\u306b\u306a\u308b\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">CMP\u30b7\u30b9\u30c6\u30e0\u30ba<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u5316\u5b66\u6a5f\u68b0\u7422\u78e8\u306b\u306f\u3001\u5316\u5b66\u3068\u6469\u8017\u306e\u4e21\u65b9\u306b\u8010\u6027\u306e\u3042\u308b\u90e8\u54c1\u304c\u5fc5\u8981\u3067\u3059\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30ea\u30f3\u30b0<\/li>\n\n\n\n<li>\u7cbe\u5bc6\u30d9\u30a2\u30ea\u30f3\u30b0<\/li>\n\n\n\n<li>\u6d41\u4f53\u51e6\u7406\u90e8\u54c1<\/li>\n<\/ul>\n\n\n\n<h1 class=\"wp-block-heading\">\u4e3b\u8981\u534a\u5c0e\u4f53\u69cb\u9020\u30bb\u30e9\u30df\u30c3\u30af\u30b9\u306e\u6bd4\u8f03<\/h1>\n\n\n\n<figure class=\"wp-block-table\"><table class=\"has-fixed-layout\"><thead><tr><th>\u30d7\u30ed\u30d1\u30c6\u30a3<\/th><th>SiC<\/th><th>\u30a2\u30eb\u30df\u30ca<\/th><th>\u30b8\u30eb\u30b3\u30cb\u30a2<\/th><th>\u7a92\u5316\u30a2\u30eb\u30df\u30cb\u30a6\u30e0<\/th><\/tr><\/thead><tbody><tr><td>\u786c\u5ea6<\/td><td>\u975e\u5e38\u306b\u9ad8\u3044<\/td><td>\u9ad8\u3044<\/td><td>\u30df\u30c7\u30a3\u30a2\u30e0<\/td><td>\u30df\u30c7\u30a3\u30a2\u30e0<\/td><\/tr><tr><td>\u71b1\u4f1d\u5c0e\u7387<\/td><td>\u7d20\u6674\u3089\u3057\u3044<\/td><td>\u4f4e\u3044<\/td><td>\u4f4e\u3044<\/td><td>\u7d20\u6674\u3089\u3057\u3044<\/td><\/tr><tr><td>\u96fb\u6c17\u7d76\u7e01<\/td><td>\u4e2d\u7a0b\u5ea6<\/td><td>\u7d20\u6674\u3089\u3057\u3044<\/td><td>\u7d20\u6674\u3089\u3057\u3044<\/td><td>\u7d20\u6674\u3089\u3057\u3044<\/td><\/tr><tr><td>\u30d7\u30e9\u30ba\u30de\u62b5\u6297<\/td><td>\u7d20\u6674\u3089\u3057\u3044<\/td><td>\u30b0\u30c3\u30c9<\/td><td>\u4e2d\u7a0b\u5ea6<\/td><td>\u30b0\u30c3\u30c9<\/td><\/tr><tr><td>\u7834\u58ca\u976d\u6027<\/td><td>\u4e2d\u7a0b\u5ea6<\/td><td>\u4e2d\u7a0b\u5ea6<\/td><td>\u7d20\u6674\u3089\u3057\u3044<\/td><td>\u4e2d\u7a0b\u5ea6<\/td><\/tr><tr><td>\u8010\u6469\u8017\u6027<\/td><td>\u7d20\u6674\u3089\u3057\u3044<\/td><td>\u30b0\u30c3\u30c9<\/td><td>\u7d20\u6674\u3089\u3057\u3044<\/td><td>\u4e2d\u7a0b\u5ea6<\/td><\/tr><tr><td>\u8010\u71b1\u885d\u6483\u6027<\/td><td>\u7d20\u6674\u3089\u3057\u3044<\/td><td>\u4e2d\u7a0b\u5ea6<\/td><td>\u30b0\u30c3\u30c9<\/td><td>\u30b0\u30c3\u30c9<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<p class=\"wp-block-paragraph\">\u5358\u4e00\u306e\u30bb\u30e9\u30df\u30c3\u30af\u6750\u6599\u3067\u3059\u3079\u3066\u306e\u5de5\u5b66\u7684\u8ab2\u984c\u3092\u89e3\u6c7a\u3067\u304d\u308b\u308f\u3051\u3067\u306f\u3042\u308a\u307e\u305b\u3093\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u9078\u8003\u306f\u4ee5\u4e0b\u306b\u3088\u3063\u3066\u884c\u308f\u308c\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30d7\u30ed\u30bb\u30b9\u74b0\u5883<\/li>\n\n\n\n<li>\u6e29\u5ea6<\/li>\n\n\n\n<li>\u30d7\u30e9\u30ba\u30de\u5f37\u5ea6<\/li>\n\n\n\n<li>\u6a5f\u68b0\u7684\u8ca0\u8377<\/li>\n\n\n\n<li>\u6c5a\u67d3\u8981\u4ef6<\/li>\n\n\n\n<li>\u88c5\u7f6e\u30a2\u30fc\u30ad\u30c6\u30af\u30c1\u30e3<\/li>\n<\/ul>\n\n\n\n<h1 class=\"wp-block-heading\">\u534a\u5c0e\u4f53\u69cb\u9020\u30bb\u30e9\u30df\u30c3\u30af\u30b9\u306e\u88fd\u9020\u8ab2\u984c<\/h1>\n\n\n\n<p class=\"wp-block-paragraph\">\u534a\u5c0e\u4f53\u30b0\u30ec\u30fc\u30c9\u306e\u30bb\u30e9\u30df\u30c3\u30af\u30b9\u306e\u88fd\u9020\u306f\u3001\u5f93\u6765\u306e\u5de5\u696d\u7528\u30bb\u30e9\u30df\u30c3\u30af\u30b9\u3088\u308a\u3082\u304b\u306a\u308a\u8907\u96d1\u3067\u3042\u308b\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u8ab2\u984c\u306f\u4ee5\u4e0b\u306e\u901a\u308a\uff1a<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">\u8d85\u9ad8\u7d14\u5ea6\u8981\u6c42<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u5fae\u91cf\u306e\u6c5a\u67d3\u306f\u30c1\u30c3\u30d7\u306e\u6b69\u7559\u307e\u308a\u306b\u5f71\u97ff\u3059\u308b\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u591a\u304f\u306e\u5834\u5408\u3001\u4e0d\u7d14\u7269\u306fppm\u30ec\u30d9\u30eb\u4ee5\u4e0b\u306b\u4fdd\u305f\u308c\u306a\u3051\u308c\u3070\u306a\u3089\u306a\u3044\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">\u7cbe\u5bc6\u6a5f\u68b0\u52a0\u5de5<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u516c\u5dee\u306f\u983b\u7e41\u306b\u9054\u3059\u308b\uff1a<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u00b10.005 mm<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u3042\u308b\u3044\u306f\u3082\u3063\u3068\u304d\u3064\u3044\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u30d7\u30ed\u30bb\u30b9\u306f\u4ee5\u4e0b\u306e\u901a\u308a\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>CNC\u52a0\u5de5<\/li>\n\n\n\n<li>\u7cbe\u5bc6\u7814\u524a<\/li>\n\n\n\n<li>\u30e9\u30c3\u30d4\u30f3\u30b0<\/li>\n\n\n\n<li>\u7814\u78e8<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">\u8868\u9762\u54c1\u8cea\u7ba1\u7406<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u8868\u9762\u306e\u6b20\u9665\u306f\u7c92\u5b50\u3092\u767a\u751f\u3055\u305b\u308b\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u91cd\u8981\u306a\u30d1\u30e9\u30e1\u30fc\u30bf\u30fc\u306f\u4ee5\u4e0b\u306e\u901a\u308a\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u8868\u9762\u7c97\u3055<\/li>\n\n\n\n<li>\u5e73\u3089<\/li>\n\n\n\n<li>\u30a8\u30c3\u30b8\u30af\u30aa\u30ea\u30c6\u30a3<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u30b5\u30d6\u30df\u30af\u30ed\u30f3\u306e\u5e73\u5766\u5ea6\u304c\u8981\u6c42\u3055\u308c\u308b\u7528\u9014\u3082\u3042\u308b\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">\u8907\u96d1\u306a\u5f62\u72b6<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u6700\u8fd1\u306e\u534a\u5c0e\u4f53\u88c5\u7f6e\u3067\u306f\u3001\u30ab\u30b9\u30bf\u30de\u30a4\u30ba\u3055\u308c\u305f\u90e8\u54c1\u304c\u4f7f\u308f\u308c\u308b\u3053\u3068\u304c\u591a\u304f\u306a\u3063\u3066\u3044\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u771f\u7a7a\u30c1\u30e3\u30f3\u30cd\u30eb<\/li>\n\n\n\n<li>\u5fae\u7d30\u69cb\u9020<\/li>\n\n\n\n<li>\u591a\u6a5f\u80fd\u30a2\u30bb\u30f3\u30d6\u30ea<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u9ad8\u5ea6\u306a\u30bb\u30e9\u30df\u30c3\u30af\u52a0\u5de5\u6280\u8853\u304c\u4e0d\u53ef\u6b20\u3067\u3042\u308b\u3002.<\/p>\n\n\n\n<h1 class=\"wp-block-heading\">\u534a\u5c0e\u4f53\u69cb\u9020\u30bb\u30e9\u30df\u30c3\u30af\u30b9\u306e\u65b0\u6f6e\u6d41<\/h1>\n\n\n\n<p class=\"wp-block-paragraph\">\u696d\u754c\u306f\u6025\u901f\u306b\u9032\u5316\u3057\u7d9a\u3051\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u3044\u304f\u3064\u304b\u306e\u30c8\u30ec\u30f3\u30c9\u304c\u30bb\u30e9\u30df\u30c3\u30af\u958b\u767a\u3092\u518d\u69cb\u7bc9\u3057\u3066\u3044\u308b\uff1a<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">\u3088\u308a\u5927\u304d\u306a\u30a6\u30a7\u30cf\u30fc\u30d5\u30a9\u30fc\u30de\u30c3\u30c8<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u88c5\u7f6e\u304c\u3088\u308a\u5927\u304d\u306a\u30a6\u30a7\u30cf\u30fc\u3084\u9ad8\u5ea6\u306a\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0\u306b\u79fb\u884c\u3059\u308b\u306b\u3064\u308c\u3001\u3088\u308a\u5927\u304d\u306a\u30bb\u30e9\u30df\u30c3\u30af\u69cb\u9020\u304c\u5fc5\u8981\u306b\u306a\u308b\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">\u3088\u308a\u9ad8\u3044\u30d7\u30e9\u30ba\u30de\u5bc6\u5ea6<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u5c06\u6765\u306e\u30a8\u30c3\u30c1\u30f3\u30b0\u6280\u8853\u306b\u306f\u3001\u30d7\u30e9\u30ba\u30de\u306e\u8010\u4e45\u6027\u3092\u5411\u4e0a\u3055\u305b\u305f\u6750\u6599\u304c\u5fc5\u8981\u3067\u3042\u308b\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">\u30cf\u30a4\u30d6\u30ea\u30c3\u30c9\u30fb\u30bb\u30e9\u30df\u30c3\u30af\u6750\u6599<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u8907\u5408\u30b7\u30b9\u30c6\u30e0\u3092\u7d44\u307f\u5408\u308f\u305b\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>SiC<\/li>\n\n\n\n<li>\u7a92\u5316\u30a2\u30eb\u30df\u30cb\u30a6\u30e0<\/li>\n\n\n\n<li>\u30bb\u30e9\u30df\u30c3\u30af\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u304c\u4f7f\u308f\u308c\u308b\u3088\u3046\u306b\u306a\u3063\u3066\u304d\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">\u7a4d\u5c64\u9020\u5f62<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">3D\u30d7\u30ea\u30f3\u30bf\u30fc\u3067\u4f5c\u3089\u308c\u305f\u30bb\u30e9\u30df\u30c3\u30af\u306f\u3001\u305d\u308c\u3092\u53ef\u80fd\u306b\u3059\u308b\u304b\u3082\u3057\u308c\u306a\u3044\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u8efd\u91cf\u69cb\u9020\u7269<\/li>\n\n\n\n<li>\u8907\u5408\u30c1\u30e3\u30f3\u30cd\u30eb<\/li>\n\n\n\n<li>\u7d44\u307f\u7acb\u3066\u306e\u624b\u9593\u304c\u7701\u3051\u308b<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">\u9ad8\u5ea6\u8868\u9762\u5de5\u5b66<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u8868\u9762\u51e6\u7406\u306f\u6539\u5584\u3067\u304d\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u8010\u6c5a\u67d3\u6027<\/li>\n\n\n\n<li>\u6469\u8017\u6319\u52d5<\/li>\n\n\n\n<li>\u30d7\u30ed\u30bb\u30b9\u30e9\u30a4\u30d5<\/li>\n<\/ul>\n\n\n\n<h1 class=\"wp-block-heading\">\u7d50\u8ad6<\/h1>\n\n\n\n<p class=\"wp-block-paragraph\">\u69cb\u9020\u30bb\u30e9\u30df\u30c3\u30af\u30b9\u306f\u3001\u534a\u5c0e\u4f53\u88fd\u9020\u88c5\u7f6e\u306b\u304a\u3051\u308b\u57fa\u672c\u7684\u306a\u5b9f\u73fe\u6750\u6599\u3068\u306a\u3063\u3066\u3044\u307e\u3059\u3002\u71b1\u5b89\u5b9a\u6027\u3001\u8010\u6469\u8017\u6027\u3001\u8010\u98df\u6027\u3001\u7d14\u5ea6\u3001\u304a\u3088\u3073\u6a5f\u68b0\u7684\u6027\u80fd\u306e\u5353\u8d8a\u3057\u305f\u7d44\u307f\u5408\u308f\u305b\u306b\u3088\u308a\u3001\u5f93\u6765\u306e\u6750\u6599\u306e\u80fd\u529b\u3092\u8d85\u3048\u308b\u74b0\u5883\u3067\u3082\u4f7f\u7528\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u534a\u5c0e\u4f53\u6280\u8853\u304c\u30d7\u30ed\u30bb\u30b9\u30ce\u30fc\u30c9\u306e\u5fae\u7d30\u5316\u3084\u88fd\u9020\u6761\u4ef6\u306e\u53b3\u3057\u3055\u3092\u5897\u3059\u4e2d\u3067\u3001\u69cb\u9020\u7528\u30bb\u30e9\u30df\u30c3\u30af\u30b9\u306f\u3001\u30d7\u30ed\u30bb\u30b9\u306e\u5b89\u5b9a\u6027\u3001\u6b69\u7559\u307e\u308a\u3001\u88c5\u7f6e\u306e\u4fe1\u983c\u6027\u3092\u5411\u4e0a\u3055\u305b\u308b\u4e0a\u3067\u3001\u3055\u3089\u306b\u5927\u304d\u306a\u5f79\u5272\u3092\u679c\u305f\u3059\u3053\u3068\u306b\u306a\u308b\u3067\u3057\u3087\u3046\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u30bb\u30e9\u30df\u30c3\u30af\u6750\u6599\u3001\u88fd\u9020\u7cbe\u5ea6\u3001\u6a5f\u80fd\u7d71\u5408\u306e\u5c06\u6765\u7684\u306a\u767a\u5c55\u304c\u3001\u6b21\u4e16\u4ee3\u306e\u534a\u5c0e\u4f53\u88c5\u7f6e\u306e\u6280\u8853\u9769\u65b0\u3092\u5de6\u53f3\u3059\u308b\u3068\u601d\u308f\u308c\u308b\u3002.<\/p>","protected":false},"excerpt":{"rendered":"<p>Modern semiconductor manufacturing requires unprecedented levels of precision, cleanliness, thermal stability, and reliability. As chip architectures continue to evolve toward smaller nodes, higher power density, and advanced packaging technologies, conventional metallic materials increasingly face limitations in process environments involving plasma exposure, ultra-high vacuum, aggressive chemicals, and extreme temperatures. Structural ceramics have therefore become indispensable materials in semiconductor equipment. Their unique combination of mechanical strength, wear resistance, thermal stability, corrosion resistance, and electrical properties makes them essential for wafer processing, handling, deposition, etching, and inspection systems. This article provides an in-depth analysis of structural ceramics used in semiconductor manufacturing, including material types, critical properties, equipment applications, selection criteria, and future industry [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":2211,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[3],"tags":[304,37,68,303,81,38,305,306,40],"class_list":["post-2210","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-industry-news","tag-aln-ceramics","tag-alumina-ceramics","tag-electrostatic-chuck","tag-semiconductor-equipment-materials","tag-semiconductor-manufacturing","tag-silicon-carbide-ceramics","tag-structural-ceramics","tag-wafer-handling-components","tag-zirconia-ceramics"],"_links":{"self":[{"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/posts\/2210","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/comments?post=2210"}],"version-history":[{"count":2,"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/posts\/2210\/revisions"}],"predecessor-version":[{"id":2213,"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/posts\/2210\/revisions\/2213"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/media\/2211"}],"wp:attachment":[{"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/media?parent=2210"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/categories?post=2210"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/tags?post=2210"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}