{"id":2144,"date":"2026-05-13T02:09:42","date_gmt":"2026-05-13T02:09:42","guid":{"rendered":"https:\/\/www.xkh-ceramics.com\/?p=2144"},"modified":"2026-05-13T02:09:42","modified_gmt":"2026-05-13T02:09:42","slug":"precision-ceramic-components-for-semiconductor-equipment-comprehensive-overview-of-advanced-ceramic-applications","status":"publish","type":"post","link":"https:\/\/www.xkh-ceramics.com\/ja\/precision-ceramic-components-for-semiconductor-equipment-comprehensive-overview-of-advanced-ceramic-applications\/","title":{"rendered":"\u534a\u5c0e\u4f53\u88c5\u7f6e\u7528\u7cbe\u5bc6\u30bb\u30e9\u30df\u30c3\u30af\u90e8\u54c1\uff1a\u5148\u9032\u30bb\u30e9\u30df\u30c3\u30af\u30fb\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306e\u5305\u62ec\u7684\u6982\u8981"},"content":{"rendered":"<p 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class=\"wp-block-paragraph\">\u305d\u306e\u5353\u8d8a\u3057\u305f\u786c\u5ea6\u3001\u71b1\u5b89\u5b9a\u6027\u3001\u8010\u98df\u6027\u3001\u4f4e\u30d1\u30fc\u30c6\u30a3\u30af\u30eb\u767a\u751f\u3001\u96fb\u6c17\u7684\u7279\u6027\u306b\u3088\u308a\u3001\u7cbe\u5bc6\u30bb\u30e9\u30df\u30c3\u30af\u30b9\u306f\u6b21\u4e16\u4ee3\u534a\u5c0e\u4f53\u88fd\u9020\u3092\u53ef\u80fd\u306b\u3059\u308b\u91cd\u8981\u306a\u6750\u6599\u3068\u306a\u3063\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n<figure class=\"wp-block-image aligncenter size-full\"><img fetchpriority=\"high\" decoding=\"async\" width=\"554\" height=\"338\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Precision-Ceramic-Components-for-Semiconductor-Equipment.png\" alt=\"\" class=\"wp-image-2145\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Precision-Ceramic-Components-for-Semiconductor-Equipment.png 554w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Precision-Ceramic-Components-for-Semiconductor-Equipment-300x183.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Precision-Ceramic-Components-for-Semiconductor-Equipment-18x12.png 18w\" sizes=\"(max-width: 554px) 100vw, 554px\" \/><\/figure>\n\n\n\n<h1 class=\"wp-block-heading\">\u534a\u5c0e\u4f53\u88c5\u7f6e\u3067\u7cbe\u5bc6\u30bb\u30e9\u30df\u30c3\u30af\u304c\u91cd\u8981\u306a\u7406\u7531<\/h1>\n\n\n\n<p class=\"wp-block-paragraph\">\u73fe\u4ee3\u306e\u534a\u5c0e\u4f53\u88c5\u7f6e\u306f\u3001\u975e\u5e38\u306b\u53b3\u3057\u3044\u6761\u4ef6\u4e0b\u3067\u52d5\u4f5c\u3057\u3066\u3044\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u9ad8\u771f\u7a7a\u74b0\u5883<\/li>\n\n\n\n<li>\u8840\u6f3f\u66b4\u9732<\/li>\n\n\n\n<li>\u8150\u98df\u6027\u30d7\u30ed\u30bb\u30b9\u30ac\u30b9<\/li>\n\n\n\n<li>\u8d85\u9ad8\u6e05\u6d44\u5ea6\u8981\u6c42<\/li>\n\n\n\n<li>\u6025\u901f\u71b1\u30b5\u30a4\u30af\u30eb<\/li>\n\n\n\n<li>\u30ca\u30ce\u30e1\u30fc\u30c8\u30eb\u30ec\u30d9\u30eb\u306e\u7cbe\u5bc6\u30e2\u30fc\u30b7\u30e7\u30f3<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u5f93\u6765\u306e\u91d1\u5c5e\u6750\u6599\u306f\u3001\u6c5a\u67d3\u306e\u5371\u967a\u6027\u3001\u71b1\u5909\u5f62\u3001\u5316\u5b66\u7684\u4e0d\u5b89\u5b9a\u6027\u306a\u3069\u306e\u305f\u3081\u306b\u3001\u3053\u306e\u3088\u3046\u306a\u6761\u4ef6\u4e0b\u3067\u306f\u3057\u3070\u3057\u3070\u82e6\u6226\u3092\u5f37\u3044\u3089\u308c\u308b\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u5148\u9032\u7684\u306a\u30bb\u30e9\u30df\u30c3\u30af\u6750\u6599\u306f\u3001\u91cd\u8981\u306a\u5229\u70b9\u3092\u63d0\u4f9b\u3059\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u9ad8\u7d14\u5ea6\u3001\u4f4e\u30b3\u30f3\u30bf\u30df\u30cd\u30fc\u30b7\u30e7\u30f3<\/li>\n\n\n\n<li>\u512a\u308c\u305f\u8010\u6469\u8017\u6027<\/li>\n\n\n\n<li>\u512a\u308c\u305f\u8010\u30d7\u30e9\u30ba\u30de\u6027<\/li>\n\n\n\n<li>\u4f4e\u71b1\u81a8\u5f35<\/li>\n\n\n\n<li>\u9ad8\u3044\u525b\u6027\u3068\u5bf8\u6cd5\u5b89\u5b9a\u6027<\/li>\n\n\n\n<li>\u512a\u308c\u305f\u8a98\u96fb\u7279\u6027<\/li>\n\n\n\n<li>\u512a\u308c\u305f\u8010\u71b1\u6027<\/li>\n\n\n\n<li>\u30d1\u30fc\u30c6\u30a3\u30af\u30eb\u306e\u767a\u751f\u304c\u5c11\u306a\u3044<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u305d\u306e\u7d50\u679c\u3001\u7cbe\u5bc6\u30bb\u30e9\u30df\u30c3\u30af\u90e8\u54c1\u306f\u3001\u534a\u5c0e\u4f53\u30d7\u30ed\u30bb\u30b9\u30c1\u30e3\u30f3\u30d0\u30fc\u3084\u30a6\u30a7\u30cf\u30fc\u30cf\u30f3\u30c9\u30ea\u30f3\u30b0\u30b7\u30b9\u30c6\u30e0\u306e\u5185\u90e8\u3067\u5e83\u304f\u4f7f\u7528\u3055\u308c\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n<h1 class=\"wp-block-heading\">\u30d5\u30ed\u30f3\u30c8\u30a8\u30f3\u30c9\u534a\u5c0e\u4f53\u88fd\u9020\u88c5\u7f6e\u306b\u304a\u3051\u308b\u7cbe\u5bc6\u30bb\u30e9\u30df\u30c3\u30af\u30b9<\/h1>\n\n\n\n<h2 class=\"wp-block-heading\">1.\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30b7\u30b9\u30c6\u30e0<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u30cf\u30a4\u30a8\u30f3\u30c9\u306e\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u88c5\u7f6e\u3067\u306f\u3001\u30ca\u30ce\u30e1\u30fc\u30c8\u30eb\u30b9\u30b1\u30fc\u30eb\u306e\u30d1\u30bf\u30fc\u30cb\u30f3\u30b0\u7cbe\u5ea6\u3092\u9054\u6210\u3059\u308b\u305f\u3081\u306b\u3001\u8d85\u7cbe\u5bc6\u30e2\u30fc\u30b7\u30e7\u30f3\u30b7\u30b9\u30c6\u30e0\u3068\u69cb\u9020\u7684\u306b\u5b89\u5b9a\u3057\u305f\u6750\u6599\u304c\u5fc5\u8981\u3068\u3055\u308c\u308b\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u4ee3\u8868\u7684\u306a\u30bb\u30e9\u30df\u30c3\u30af\u90e8\u54c1\u306b\u306f\u4ee5\u4e0b\u306e\u3088\u3046\u306a\u3082\u306e\u304c\u3042\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u9759\u96fb\u30c1\u30e3\u30c3\u30af\uff08ESC\uff09<\/li>\n\n\n\n<li>\u771f\u7a7a\u30c1\u30e3\u30c3\u30af<\/li>\n\n\n\n<li>\u30e2\u30fc\u30b7\u30e7\u30f3\u30b9\u30c6\u30fc\u30b8<\/li>\n\n\n\n<li>\u30ac\u30a4\u30c9\u30ec\u30fc\u30eb<\/li>\n\n\n\n<li>\u30ef\u30fc\u30af\u30c6\u30fc\u30d6\u30eb<\/li>\n\n\n\n<li>\u30de\u30b9\u30af\u30b9\u30c6\u30fc\u30b8<\/li>\n\n\n\n<li>\u51b7\u5374\u30d7\u30ec\u30fc\u30c8<\/li>\n\n\n\n<li>\u69cb\u9020\u30d6\u30ed\u30c3\u30af<\/li>\n\n\n\n<li>\u30df\u30e9\u30fc\u306e\u652f\u6301\u69cb\u9020<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">\u9759\u96fb\u30c1\u30e3\u30c3\u30af\uff08ESC\uff09<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u9759\u96fb\u30c1\u30e3\u30c3\u30af\u306f\u3001\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u304a\u3044\u3066\u6700\u3082\u91cd\u8981\u306a\u30bb\u30e9\u30df\u30c3\u30af\u90e8\u54c1\u306e\u4e00\u3064\u3067\u3059\u3002\u4ee5\u4e0b\u306e\u3088\u3046\u306a\u30d7\u30e9\u30ba\u30de\u3084\u771f\u7a7a\u30d9\u30fc\u30b9\u306e\u30d7\u30ed\u30bb\u30b9\u306b\u304a\u3044\u3066\u3001\u30a6\u30a7\u30fc\u30cf\u3092\u78ba\u5b9f\u306b\u4fdd\u6301\u3057\u3001\u642c\u9001\u3059\u308b\u305f\u3081\u306b\u4f7f\u7528\u3055\u308c\u307e\u3059\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0<\/li>\n\n\n\n<li>\u5316\u5b66\u6c17\u76f8\u6210\u9577\u6cd5\uff08CVD\uff09<\/li>\n\n\n\n<li>\u30a4\u30aa\u30f3\u6ce8\u5165<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">\u4e00\u822c\u7684\u306a\u30bb\u30e9\u30df\u30c3\u30af\u6750\u6599<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30a2\u30eb\u30df\u30ca\uff08Al\u2082O\u2083\uff09<\/li>\n\n\n\n<li>\u7a92\u5316\u30b1\u30a4\u7d20 (Si\u2083N\u2084)<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">\u88fd\u9020\u306e\u8ab2\u984c<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u8907\u96d1\u306a\u5185\u90e8\u69cb\u9020<\/li>\n\n\n\n<li>\u9ad8\u7d14\u5ea6\u539f\u6599\u306e\u6e96\u5099<\/li>\n\n\n\n<li>\u7cbe\u5bc6\u713c\u7d50\u5236\u5fa1<\/li>\n\n\n\n<li>\u8d85\u5e73\u5766\u9762\u52a0\u5de5<\/li>\n\n\n\n<li>\u57cb\u3081\u8fbc\u307f\u96fb\u6975\u306e\u7d71\u5408<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">\u7cbe\u5bc6\u30e2\u30fc\u30b7\u30e7\u30f3\u30b9\u30c6\u30fc\u30b8<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fb\u30b9\u30c6\u30fc\u30b8\u306f\u3001\u6025\u52a0\u901f\u6642\u306e\u5909\u5f62\u3092\u6700\u5c0f\u9650\u306b\u6291\u3048\u306a\u304c\u3089\u3001\u6975\u3081\u3066\u9ad8\u901f\u3067\u4f4d\u7f6e\u6c7a\u3081\u7cbe\u5ea6\u3092\u9054\u6210\u3057\u306a\u3051\u308c\u3070\u306a\u3089\u306a\u3044\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">\u6750\u6599\u8981\u4ef6<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u9ad8\u3044\u6bd4\u525b\u6027<\/li>\n\n\n\n<li>\u4f4e\u5bc6\u5ea6<\/li>\n\n\n\n<li>\u4f4e\u71b1\u81a8\u5f35<\/li>\n\n\n\n<li>\u512a\u308c\u305f\u5bf8\u6cd5\u5b89\u5b9a\u6027<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">\u4e00\u822c\u7684\u306a\u30bb\u30e9\u30df\u30c3\u30af\u6750\u6599<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30b3\u30fc\u30c7\u30a3\u30a8\u30e9\u30a4\u30c8\u30fb\u30bb\u30e9\u30df\u30c3\u30af\u30b9<\/li>\n\n\n\n<li>\u70ad\u5316\u30b1\u30a4\u7d20\uff08SiC\uff09<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u70ad\u5316\u30b1\u30a4\u7d20\u306f\u3001\u305d\u306e\u8efd\u91cf\u69cb\u9020\u3001\u9ad8\u3044\u525b\u6027\u3001\u512a\u308c\u305f\u71b1\u5b89\u5b9a\u6027\u306b\u3088\u308a\u3001\u7279\u306b\u9b45\u529b\u7684\u3067\u3042\u308b\u3002.<\/p>\n\n\n\n<h1 class=\"wp-block-heading\">2.\u30a8\u30c3\u30c1\u30f3\u30b0\u88c5\u7f6e<\/h1>\n\n\n\n<p class=\"wp-block-paragraph\">\u30a8\u30c3\u30c1\u30f3\u30b0\u30b7\u30b9\u30c6\u30e0\u306f\u3001\u56de\u8def\u30d1\u30bf\u30fc\u30f3\u3092\u30de\u30b9\u30af\u304b\u3089\u30a6\u30a7\u30cf\u30fc\u4e0a\u306b\u8ee2\u5199\u3057\u3001\u8150\u98df\u6027\u306e\u9ad8\u3044\u30d7\u30e9\u30ba\u30de\u74b0\u5883\u4e0b\u3067\u52d5\u4f5c\u3059\u308b\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u4e00\u822c\u7684\u306b\u4f7f\u7528\u3055\u308c\u308b\u30bb\u30e9\u30df\u30c3\u30af\u90e8\u54c1\u306f\u4ee5\u4e0b\u306e\u901a\u308a\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30d7\u30ed\u30bb\u30b9\u30c1\u30e3\u30f3\u30d0\u30fc<\/li>\n\n\n\n<li>\u30d3\u30e5\u30fc\u30dd\u30fc\u30c8<\/li>\n\n\n\n<li>\u30ac\u30b9\u5206\u914d\u30d7\u30ec\u30fc\u30c8<\/li>\n\n\n\n<li>\u30ce\u30ba\u30eb<\/li>\n\n\n\n<li>\u30d5\u30a9\u30fc\u30ab\u30b9\u30ea\u30f3\u30b0<\/li>\n\n\n\n<li>\u7d76\u7e01\u30ea\u30f3\u30b0<\/li>\n\n\n\n<li>\u30c1\u30e3\u30f3\u30d0\u30fc\u30ab\u30d0\u30fc<\/li>\n\n\n\n<li>\u9759\u96fb\u30c1\u30e3\u30c3\u30af<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">\u30a8\u30c3\u30c1\u30f3\u30b0\u30c1\u30e3\u30f3\u30d0\u30fc\u90e8\u54c1<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u30c7\u30d0\u30a4\u30b9\u5f62\u72b6\u306e\u5fae\u7d30\u5316\u304c\u9032\u3080\u306b\u3064\u308c\u3001\u30b3\u30f3\u30bf\u30df\u30cd\u30fc\u30b7\u30e7\u30f3\u30fb\u30b3\u30f3\u30c8\u30ed\u30fc\u30eb\u306f\u307e\u3059\u307e\u3059\u91cd\u8981\u306b\u306a\u3063\u3066\u304d\u3066\u3044\u308b\u3002\u591a\u304f\u306e\u30c1\u30e3\u30f3\u30d0\u30fc\u30fb\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306b\u304a\u3044\u3066\u3001\u30bb\u30e9\u30df\u30c3\u30af\u6750\u6599\u306f\u5f90\u3005\u306b\u91d1\u5c5e\u306b\u53d6\u3063\u3066\u4ee3\u308f\u308a\u3064\u3064\u3042\u308a\u307e\u3059\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">\u4e3b\u8981\u6750\u6599\u8981\u4ef6<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u8d85\u9ad8\u7d14\u5ea6<\/li>\n\n\n\n<li>\u4f4e\u91d1\u5c5e\u30b3\u30f3\u30bf\u30df\u30cd\u30fc\u30b7\u30e7\u30f3<\/li>\n\n\n\n<li>\u512a\u308c\u305f\u8010\u30d7\u30e9\u30ba\u30de\u6027<\/li>\n\n\n\n<li>\u9ad8\u5bc6\u5ea6\u30fb\u4f4e\u6c17\u5b54\u7387<\/li>\n\n\n\n<li>\u7d30\u7c92\u69cb\u9020<\/li>\n\n\n\n<li>\u5b89\u5b9a\u3057\u305f\u8a98\u96fb\u7279\u6027<\/li>\n\n\n\n<li>\u826f\u597d\u306a\u52a0\u5de5\u6027<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">\u4e00\u822c\u7684\u306a\u30bb\u30e9\u30df\u30c3\u30af\u6750\u6599<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u77f3\u82f1\uff08SiO\uff09<\/li>\n\n\n\n<li>\u70ad\u5316\u30b1\u30a4\u7d20\uff08SiC\uff09<\/li>\n\n\n\n<li>\u7a92\u5316\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\uff08AlN\uff09<\/li>\n\n\n\n<li>\u30a2\u30eb\u30df\u30ca\uff08Al\u2082O\u2083\uff09<\/li>\n\n\n\n<li>\u7a92\u5316\u30b1\u30a4\u7d20 (Si\u2083N\u2084)<\/li>\n\n\n\n<li>\u30a4\u30c3\u30c8\u30ea\u30a2\uff08Y\u2082O\u2083\uff09<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">\u30ac\u30b9\u5206\u914d\u30d7\u30ec\u30fc\u30c8\uff08\u30b7\u30e3\u30ef\u30fc\u30d8\u30c3\u30c9\uff09<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u30ac\u30b9\u5206\u914d\u30d7\u30ec\u30fc\u30c8\u306b\u306f\u3001\u30a6\u30a7\u30fc\u30cf\u8868\u9762\u306b\u30d7\u30ed\u30bb\u30b9\u30ac\u30b9\u3092\u5747\u4e00\u306b\u5206\u914d\u3059\u308b\u305f\u3081\u306b\u8a2d\u8a08\u3055\u308c\u305f\u3001\u6570\u767e\u304b\u3089\u6570\u5343\u306e\u7cbe\u5bc6\u306a\u5fae\u7d30\u7a74\u304c\u3042\u308a\u307e\u3059\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u5747\u4e00\u306a\u30ac\u30b9\u306e\u6d41\u308c\u304c\u76f4\u63a5\u5f71\u97ff\u3059\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u819c\u539a\u5747\u4e00\u6027<\/li>\n\n\n\n<li>\u30a8\u30c3\u30c1\u30f3\u30b0\u306e\u5b89\u5b9a\u6027<\/li>\n\n\n\n<li>\u6b69\u7559\u307e\u308a<\/li>\n\n\n\n<li>\u30d7\u30ed\u30bb\u30b9\u306e\u5b89\u5b9a\u6027<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">\u6280\u8853\u7684\u8ab2\u984c<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30de\u30a4\u30af\u30ed\u30db\u30fc\u30eb\u5bf8\u6cd5\u306e\u4e00\u8cab\u6027<\/li>\n\n\n\n<li>\u30d0\u30ea\u306e\u306a\u3044\u5185\u9762<\/li>\n\n\n\n<li>\u8d85\u30af\u30ea\u30fc\u30f3\u52a0\u5de5<\/li>\n\n\n\n<li>\u8010\u98df\u6027<\/li>\n\n\n\n<li>\u9ad8\u3044\u5e73\u5766\u6027<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">\u4e00\u822c\u7684\u306a\u30bb\u30e9\u30df\u30c3\u30af\u6750\u6599<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>CVD\u70ad\u5316\u30b1\u30a4\u7d20 (CVD-SiC)<\/li>\n\n\n\n<li>\u30a2\u30eb\u30df\u30ca\u30bb\u30e9\u30df\u30c3\u30af\u30b9<\/li>\n\n\n\n<li>\u7a92\u5316\u30b1\u30a4\u7d20\u30bb\u30e9\u30df\u30c3\u30af\u30b9<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">\u30d5\u30a9\u30fc\u30ab\u30b9\u30ea\u30f3\u30b0<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u30d5\u30a9\u30fc\u30ab\u30b9\u30ea\u30f3\u30b0\u306f\u3001\u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0\u30d7\u30ed\u30bb\u30b9\u306b\u304a\u3044\u3066\u3001\u30a6\u30a7\u30cf\u30fc\u306e\u5468\u56f2\u306b\u5747\u4e00\u306a\u30d7\u30e9\u30ba\u30de\u5206\u5e03\u3092\u7dad\u6301\u3059\u308b\u306e\u306b\u5f79\u7acb\u3061\u307e\u3059\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u5f93\u6765\u306e\u5c0e\u96fb\u6027\u30b7\u30ea\u30b3\u30f3\u30ea\u30f3\u30b0\u306f\u3001\u30d5\u30c3\u7d20\u30d7\u30e9\u30ba\u30de\u306b\u3088\u308b\u4fb5\u98df\u304c\u6025\u901f\u306b\u9032\u884c\u3059\u308b\u305f\u3081\u3001\u52d5\u4f5c\u5bff\u547d\u304c\u77ed\u3044\u3068\u3044\u3046\u554f\u984c\u304c\u3042\u3063\u305f\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u70ad\u5316\u30b1\u30a4\u7d20\u306e\u30aa\u30d5\u30a1\u30fc<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30b7\u30ea\u30b3\u30f3\u306b\u4f3c\u305f\u5c0e\u96fb\u6027<\/li>\n\n\n\n<li>\u512a\u308c\u305f\u8010\u30d7\u30e9\u30ba\u30de\u6027<\/li>\n\n\n\n<li>\u9577\u5bff\u547d<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">\u4e00\u822c\u6750\u6599<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u70ad\u5316\u30b1\u30a4\u7d20\uff08SiC\uff09<\/li>\n<\/ul>\n\n\n\n<h1 class=\"wp-block-heading\">3.\u8584\u819c\u84b8\u7740\u88c5\u7f6e<\/h1>\n\n\n\n<p class=\"wp-block-paragraph\">PVD\u30b7\u30b9\u30c6\u30e0\u3082CVD\u30b7\u30b9\u30c6\u30e0\u3082\u3001\u305d\u306e\u71b1\u5b89\u5b9a\u6027\u3068\u30d7\u30e9\u30ba\u30de\u5b89\u5b9a\u6027\u304b\u3089\u3001\u7cbe\u5bc6\u30bb\u30e9\u30df\u30c3\u30af\u90e8\u54c1\u3092\u5e83\u304f\u5229\u7528\u3057\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u4ee3\u8868\u7684\u306a\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u306f\u4ee5\u4e0b\u306e\u901a\u308a\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u9759\u96fb\u30c1\u30e3\u30c3\u30af<\/li>\n\n\n\n<li>\u30bb\u30e9\u30df\u30c3\u30af\u30d2\u30fc\u30bf\u30fc<\/li>\n\n\n\n<li>\u30ac\u30b9\u5206\u914d\u30d7\u30ec\u30fc\u30c8<\/li>\n\n\n\n<li>\u30c1\u30e3\u30f3\u30d0\u30fc\u30e9\u30a4\u30ca\u30fc<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">\u30bb\u30e9\u30df\u30c3\u30af\u30d2\u30fc\u30bf\u30fc<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u30bb\u30e9\u30df\u30c3\u30af\u30d2\u30fc\u30bf\u30fc\u306f\u30a6\u30a7\u30cf\u30fc\u306b\u76f4\u63a5\u63a5\u89e6\u3057\u3001\u84b8\u7740\u4e2d\u306b\u5b89\u5b9a\u3057\u305f\u5747\u4e00\u306a\u30d7\u30ed\u30bb\u30b9\u6e29\u5ea6\u3092\u63d0\u4f9b\u3057\u307e\u3059\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u3053\u308c\u3089\u306e\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u306f\u5fc5\u8981\u4e0d\u53ef\u6b20\u3067\u3042\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u6e29\u5ea6\u306e\u5747\u4e00\u6027<\/li>\n\n\n\n<li>\u8584\u819c\u306e\u54c1\u8cea<\/li>\n\n\n\n<li>\u30d7\u30ed\u30bb\u30b9\u306e\u518d\u73fe\u6027<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">\u4e00\u822c\u7684\u306a\u30bb\u30e9\u30df\u30c3\u30af\u6750\u6599<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u7a92\u5316\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\uff08AlN\uff09<\/li>\n\n\n\n<li>\u30a2\u30eb\u30df\u30ca\uff08Al\u2082O\u2083\uff09<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u7a92\u5316\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\u306f\u71b1\u4f1d\u5c0e\u7387\u3068\u96fb\u6c17\u7d76\u7e01\u6027\u304c\u9ad8\u3044\u305f\u3081\u3001\u7279\u306b\u597d\u307e\u308c\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n<h1 class=\"wp-block-heading\">\u30d0\u30c3\u30af\u30a8\u30f3\u30c9\u534a\u5c0e\u4f53\u30d7\u30ed\u30bb\u30b9\u306b\u304a\u3051\u308b\u7cbe\u5bc6\u30bb\u30e9\u30df\u30c3\u30af\u30b9<\/h1>\n\n\n\n<h2 class=\"wp-block-heading\">1.CMP\uff08\u5316\u5b66\u6a5f\u68b0\u7814\u78e8\uff09\u88c5\u7f6e<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">CMP\u30b7\u30b9\u30c6\u30e0\u306f\u30bb\u30e9\u30df\u30c3\u30af\u6750\u6599\u3092\u4f7f\u7528\u3059\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u7814\u78e8\u30d7\u30ec\u30fc\u30c8<\/li>\n\n\n\n<li>\u30a6\u30a7\u30cf\u30fc\u30ad\u30e3\u30ea\u30a2<\/li>\n\n\n\n<li>\u771f\u7a7a\u30c1\u30e3\u30c3\u30af<\/li>\n\n\n\n<li>\u6821\u6b63\u30d7\u30e9\u30c3\u30c8\u30d5\u30a9\u30fc\u30e0<\/li>\n\n\n\n<li>\u30ed\u30dc\u30c3\u30c8\u642c\u9001\u30a2\u30fc\u30e0<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u30bb\u30e9\u30df\u30c3\u30af\u6750\u6599\u306f\u3001\u9577\u6642\u9593\u306e\u7814\u78e8\u4f5c\u696d\u306b\u304a\u3044\u3066\u512a\u308c\u305f\u5bf8\u6cd5\u5b89\u5b9a\u6027\u3068\u8010\u6469\u8017\u6027\u3092\u767a\u63ee\u3057\u307e\u3059\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">2.\u30a6\u30a7\u30fc\u30cf\u30c0\u30a4\u30b7\u30f3\u30b0\u304a\u3088\u3073\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0\u88c5\u7f6e<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">\u4e3b\u8981\u30bb\u30e9\u30df\u30c3\u30af\u90e8\u54c1<\/h3>\n\n\n\n<h4 class=\"wp-block-heading\">\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u30bb\u30e9\u30df\u30c3\u30af\u30b3\u30f3\u30dd\u30b8\u30c3\u30c8\u30c0\u30a4\u30b7\u30f3\u30b0\u30d6\u30ec\u30fc\u30c9<\/h4>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u9ad8\u3044\u5207\u65ad\u901f\u5ea6<\/li>\n\n\n\n<li>\u30a6\u30a7\u30cf\u30fc\u306e\u6b20\u3051\u3092\u6700\u5c0f\u9650\u306b\u6291\u3048\u308b<\/li>\n\n\n\n<li>\u512a\u308c\u305f\u8010\u6469\u8017\u6027<\/li>\n<\/ul>\n\n\n\n<h4 class=\"wp-block-heading\">\u30bb\u30e9\u30df\u30c3\u30af\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0\u30d8\u30c3\u30c9<\/h4>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u7a92\u5316\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\u30fb\u30bb\u30e9\u30df\u30c3\u30af\u30b9<\/li>\n\n\n\n<li>\u9ad8\u3044\u71b1\u4f1d\u5c0e\u6027<\/li>\n\n\n\n<li>\u6b63\u78ba\u306a\u6e29\u5ea6\u5747\u4e00\u6027<\/li>\n<\/ul>\n\n\n\n<h4 class=\"wp-block-heading\">\u30bb\u30e9\u30df\u30c3\u30af\u30d1\u30c3\u30b1\u30fc\u30b8\u57fa\u677f<\/h4>\n\n\n\n<ul class=\"wp-block-list\">\n<li>LTCC\uff08\u4f4e\u6e29\u540c\u6642\u713c\u6210\u30bb\u30e9\u30df\u30c3\u30af\u30b9\uff09<\/li>\n\n\n\n<li>\u7e4a\u7d30\u306a\u914d\u7dda\u80fd\u529b<\/li>\n\n\n\n<li>\u9ad8\u5468\u6ce2\u4fe1\u53f7\u5bfe\u5fdc<\/li>\n<\/ul>\n\n\n\n<h4 class=\"wp-block-heading\">\u30bb\u30e9\u30df\u30c3\u30af\u6bdb\u7d30\u7ba1\u5de5\u5177<\/h4>\n\n\n\n<p class=\"wp-block-paragraph\">\u30ef\u30a4\u30e4\u30fc\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0\u5de5\u7a0b\u3067\u4f7f\u7528\u3055\u308c\u308b\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">\u4e00\u822c\u6750\u6599<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30a2\u30eb\u30df\u30ca\u30bb\u30e9\u30df\u30c3\u30af\u30b9<\/li>\n\n\n\n<li>\u30b8\u30eb\u30b3\u30cb\u30a2\u5f37\u5316\u30a2\u30eb\u30df\u30ca\uff08ZTA\uff09<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">3.\u534a\u5c0e\u4f53\u30d7\u30ed\u30fc\u30d6\u30b9\u30c6\u30fc\u30b7\u30e7\u30f3\u3068\u30c6\u30b9\u30c8\u88c5\u7f6e<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">\u4e3b\u8981\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8<\/h3>\n\n\n\n<h4 class=\"wp-block-heading\">\u30bb\u30e9\u30df\u30c3\u30af\u30a4\u30f3\u30bf\u30fc\u30dd\u30fc\u30b6\u30fc\u57fa\u677f<\/h4>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u9178\u5316\u30d9\u30ea\u30ea\u30a6\u30e0 (BeO)<\/li>\n\n\n\n<li>\u7a92\u5316\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\uff08AlN\uff09<\/li>\n<\/ul>\n\n\n\n<h4 class=\"wp-block-heading\">\u9ad8\u5468\u6ce2\u8a66\u9a13\u6cbb\u5177<\/h4>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u7a92\u5316\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\u30fb\u30bb\u30e9\u30df\u30c3\u30af\u30b9<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u3053\u308c\u3089\u306e\u6750\u6599\u306f\u3001\u71b1\u5b89\u5b9a\u6027\u3092\u7dad\u6301\u3057\u306a\u304c\u3089\u9ad8\u5468\u6ce2\u4fe1\u53f7\u4f1d\u9001\u3092\u30b5\u30dd\u30fc\u30c8\u3059\u308b\u3002.<\/p>\n\n\n\n<h1 class=\"wp-block-heading\">\u30a6\u30a7\u30cf\u30fc\u30cf\u30f3\u30c9\u30ea\u30f3\u30b0\u3068\u30af\u30ea\u30fc\u30f3\u74b0\u5883\u306b\u304a\u3051\u308b\u30bb\u30e9\u30df\u30c3\u30af\u90e8\u54c1<\/h1>\n\n\n\n<h2 class=\"wp-block-heading\">1.\u30a6\u30a7\u30fc\u30cf\u642c\u9001\u30ed\u30dc\u30c3\u30c8<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u534a\u5c0e\u4f53\u30ed\u30dc\u30c3\u30c8\u30b7\u30b9\u30c6\u30e0\u306b\u306f\u3001\u305d\u308c\u304c\u5fc5\u8981\u3060\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u9ad8\u7cbe\u5ea6<\/li>\n\n\n\n<li>\u30d1\u30fc\u30c6\u30a3\u30af\u30eb\u306e\u767a\u751f\u304c\u5c11\u306a\u3044<\/li>\n\n\n\n<li>\u9577\u5bff\u547d<\/li>\n\n\n\n<li>\u771f\u7a7a\u9069\u5408\u6027<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">\u4e3b\u8981\u30bb\u30e9\u30df\u30c3\u30af\u90e8\u54c1<\/h3>\n\n\n\n<h4 class=\"wp-block-heading\">\u30ed\u30dc\u30c3\u30c8\u30a2\u30fc\u30e0<\/h4>\n\n\n\n<h3 class=\"wp-block-heading\">\u4e00\u822c\u6750\u6599<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30a2\u30eb\u30df\u30ca\u30bb\u30e9\u30df\u30c3\u30af\u30b9<\/li>\n\n\n\n<li>\u70ad\u5316\u30b1\u30a4\u7d20\u30bb\u30e9\u30df\u30c3\u30af\u30b9<\/li>\n<\/ul>\n\n\n\n<h4 class=\"wp-block-heading\">\u30b8\u30e7\u30a4\u30f3\u30c8\u30fb\u30d9\u30a2\u30ea\u30f3\u30b0<\/h4>\n\n\n\n<h3 class=\"wp-block-heading\">\u4e00\u822c\u6750\u6599<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30b8\u30eb\u30b3\u30cb\u30a2\u30bb\u30e9\u30df\u30c3\u30af\u30dc\u30fc\u30eb<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">\u30e1\u30ea\u30c3\u30c8<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u6975\u3081\u3066\u4f4e\u3044\u6469\u64e6\u4fc2\u6570<\/li>\n\n\n\n<li>\u9577\u5bff\u547d<\/li>\n\n\n\n<li>\u512a\u308c\u305f\u8010\u6469\u8017\u6027<\/li>\n<\/ul>\n\n\n\n<h4 class=\"wp-block-heading\">\u30a8\u30f3\u30c9\u30a8\u30d5\u30a7\u30af\u30bf\u30fc \/ \u30a6\u30a7\u30cf\u30fc\u30d5\u30a3\u30f3\u30ac\u30fc<\/h4>\n\n\n\n<h3 class=\"wp-block-heading\">\u4e00\u822c\u6750\u6599<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u70ad\u5316\u30b1\u30a4\u7d20\u30bb\u30e9\u30df\u30c3\u30af\u30b9<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">\u30d1\u30d5\u30a9\u30fc\u30de\u30f3\u30b9\u306e\u5229\u70b9<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u9ad8\u6e29\u8010\u6027<\/li>\n\n\n\n<li>\u8d85\u4f4e\u30d1\u30fc\u30c6\u30a3\u30af\u30eb\u30ea\u30ea\u30fc\u30b9<\/li>\n\n\n\n<li>\u512a\u308c\u305f\u5bf8\u6cd5\u5b89\u5b9a\u6027<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">2.\u8d85\u7d14\u6c34\u304a\u3088\u3073\u30ac\u30b9\u4f9b\u7d66\u30b7\u30b9\u30c6\u30e0<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u30bb\u30e9\u30df\u30c3\u30af\u6750\u6599\u306f\u5316\u5b66\u7269\u8cea\u9001\u9054\u30b7\u30b9\u30c6\u30e0\u306b\u304a\u3044\u3066\u3082\u91cd\u8981\u3067\u3042\u308b\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">\u4ee3\u8868\u7684\u306a\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30d0\u30eb\u30d6\u30b7\u30fc\u30eb\u90e8\u54c1<\/li>\n\n\n\n<li>\u30d1\u30a4\u30d7\u30e9\u30a4\u30ca\u30fc<\/li>\n\n\n\n<li>\u8010\u8150\u98df\u6027\u30d5\u30ed\u30fc\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">\u4e00\u822c\u6750\u6599<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u7a92\u5316\u30b1\u30a4\u7d20\u30bb\u30e9\u30df\u30c3\u30af\u30b9<\/li>\n\n\n\n<li>\u9ad8\u5bc6\u5ea6\u30a2\u30eb\u30df\u30ca\u30fb\u30bb\u30e9\u30df\u30c3\u30af\u30b9<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u3053\u308c\u3089\u306e\u6750\u6599\u306f\u3001\u30d5\u30c3\u5316\u6c34\u7d20\u9178\u306e\u3088\u3046\u306a\u8150\u98df\u6027\u306e\u5316\u5b66\u85ac\u54c1\u306b\u5bfe\u3057\u3066\u512a\u308c\u305f\u8010\u6027\u3092\u767a\u63ee\u3059\u308b\u3002.<\/p>\n\n\n\n<h1 class=\"wp-block-heading\">\u534a\u5c0e\u4f53\u88c5\u7f6e\u306b\u4f7f\u7528\u3055\u308c\u308b\u4e3b\u8981\u5148\u7aef\u30bb\u30e9\u30df\u30c3\u30af\u6750\u6599<\/h1>\n\n\n\n<figure class=\"wp-block-table\"><table class=\"has-fixed-layout\"><thead><tr><th>\u30bb\u30e9\u30df\u30c3\u30af\u7d20\u6750<\/th><th>\u4e3b\u306a\u5229\u70b9<\/th><th>\u4ee3\u8868\u7684\u306a\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3<\/th><\/tr><\/thead><tbody><tr><td>\u30a2\u30eb\u30df\u30ca\uff08Al\u2082O\u2083\uff09<\/td><td>\u7d76\u7e01\u6027\u3001\u8010\u6469\u8017\u6027<\/td><td>ESC\u3001\u30a4\u30f3\u30b7\u30e5\u30ec\u30fc\u30bf\u30fc\u3001\u30ed\u30dc\u30c3\u30c8\u30a2\u30fc\u30e0<\/td><\/tr><tr><td>\u7a92\u5316\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\uff08AlN\uff09<\/td><td>\u9ad8\u3044\u71b1\u4f1d\u5c0e\u6027<\/td><td>\u30bb\u30e9\u30df\u30c3\u30af\u30d2\u30fc\u30bf\u30fc\u3001\u57fa\u677f<\/td><\/tr><tr><td>\u70ad\u5316\u30b1\u30a4\u7d20\uff08SiC\uff09<\/td><td>\u8010\u30d7\u30e9\u30ba\u30de\u6027\u3001\u525b\u6027<\/td><td>\u30d5\u30a9\u30fc\u30ab\u30b9\u30ea\u30f3\u30b0\u3001\u30b9\u30c6\u30fc\u30b8\u3001\u30a6\u30a7\u30cf\u30fc\u30d5\u30a3\u30f3\u30ac\u30fc<\/td><\/tr><tr><td>\u7a92\u5316\u30b1\u30a4\u7d20 (Si\u2083N\u2084)<\/td><td>\u5f37\u5ea6\u3001\u8010\u71b1\u885d\u6483\u6027<\/td><td>\u69cb\u9020\u90e8\u54c1\u3001\u30b7\u30fc\u30eb<\/td><\/tr><tr><td>\u30b8\u30eb\u30b3\u30cb\u30a2 (ZrO\u2082)<\/td><td>\u9ad8\u3044\u976d\u6027<\/td><td>\u30d9\u30a2\u30ea\u30f3\u30b0\u3001\u6469\u8017\u90e8\u54c1<\/td><\/tr><tr><td>\u77f3\u82f1\uff08SiO\uff09<\/td><td>\u9ad8\u7d14\u5ea6<\/td><td>\u30c1\u30e3\u30f3\u30d0\u30fc\u3001\u7089\u5fc3\u7ba1<\/td><\/tr><tr><td>\u30a4\u30c3\u30c8\u30ea\u30a2\uff08Y\u2082O\u2083\uff09<\/td><td>\u30d7\u30e9\u30ba\u30de\u8010\u98df\u6027<\/td><td>\u30c1\u30e3\u30f3\u30d0\u30fc\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0<\/td><\/tr><tr><td>\u7a92\u5316\u30db\u30a6\u7d20\uff08BN\uff09<\/td><td>\u71b1\u5b89\u5b9a\u6027\u3001\u6f64\u6ed1<\/td><td>\u7d76\u7e01\u4f53\u3001\u71b1\u90e8\u54c1<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<h1 class=\"wp-block-heading\">\u534a\u5c0e\u4f53\u30bb\u30e9\u30df\u30c3\u30af\u90e8\u54c1\u306e\u5c06\u6765\u52d5\u5411<\/h1>\n\n\n\n<p 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throughout semiconductor fabrication equipment. Advanced ceramics are widely used in lithography, etching, thin-film deposition, ion implantation, CMP, packaging, and wafer handling systems. These ceramic components serve critical functions including wafer support, plasma resistance, insulation, gas distribution, thermal management, contamination control, and precision motion guidance. Due to their exceptional hardness, thermal stability, corrosion resistance, low particle generation, and electrical properties, precision ceramics have become key enabling materials for next-generation semiconductor manufacturing. Why Precision Ceramics Matter in Semiconductor Equipment Modern semiconductor equipment operates under extremely demanding conditions: Traditional metallic materials often [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":2145,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[3],"tags":[46,258,251,263,90,81,264],"class_list":["post-2144","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-industry-news","tag-advanced-ceramics","tag-precision-ceramics","tag-semiconductor-ceramics","tag-semiconductor-components","tag-semiconductor-equipment","tag-semiconductor-manufacturing","tag-semiconductor-process-equipment"],"_links":{"self":[{"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/posts\/2144","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/comments?post=2144"}],"version-history":[{"count":1,"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/posts\/2144\/revisions"}],"predecessor-version":[{"id":2146,"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/posts\/2144\/revisions\/2146"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/media\/2145"}],"wp:attachment":[{"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/media?parent=2144"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/categories?post=2144"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/tags?post=2144"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}