{"id":2142,"date":"2026-05-13T01:58:38","date_gmt":"2026-05-13T01:58:38","guid":{"rendered":"https:\/\/www.xkh-ceramics.com\/?p=2142"},"modified":"2026-05-13T01:58:38","modified_gmt":"2026-05-13T01:58:38","slug":"advanced-ceramic-materials-in-semiconductor-manufacturing-high-purity-extreme-heat-resistance-and-ultra-hard-performance","status":"publish","type":"post","link":"https:\/\/www.xkh-ceramics.com\/ja\/advanced-ceramic-materials-in-semiconductor-manufacturing-high-purity-extreme-heat-resistance-and-ultra-hard-performance\/","title":{"rendered":"\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u304a\u3051\u308b\u5148\u9032\u30bb\u30e9\u30df\u30c3\u30af\u6750\u6599\uff1a\u9ad8\u7d14\u5ea6\u3001\u9ad8\u8010\u71b1\u6027\u3001\u8d85\u786c\u5ea6\u6027\u80fd"},"content":{"rendered":"<p class=\"wp-block-paragraph\">\u534a\u5c0e\u4f53\u6280\u8853\u304c\u3088\u308a\u5c0f\u3055\u306a\u30ce\u30fc\u30c9\u3001\u3088\u308a\u9ad8\u3044\u96c6\u7a4d\u5bc6\u5ea6\u3001\u3088\u308a\u8907\u96d1\u306a\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u306b\u5411\u304b\u3063\u3066\u9032\u5316\u3057\u7d9a\u3051\u308b\u306b\u3064\u308c\u3066\u3001\u534a\u5c0e\u4f53\u88c5\u7f6e\u5185\u90e8\u306e\u5148\u7aef\u6750\u6599\u306b\u5bfe\u3059\u308b\u9700\u8981\u306f\u5287\u7684\u306b\u5897\u52a0\u3057\u3066\u3044\u307e\u3059\u3002\u73fe\u4ee3\u306e\u534a\u5c0e\u4f53\u88fd\u9020\u74b0\u5883\u3067\u306f\u3001\u5bf8\u6cd5\u5b89\u5b9a\u6027\u3068\u6c5a\u67d3\u5236\u5fa1\u3092\u7dad\u6301\u3057\u306a\u304c\u3089\u3001\u6975\u7aef\u306a\u6e29\u5ea6\u3001\u8150\u98df\u6027\u30d7\u30e9\u30ba\u30de\u3078\u306e\u66b4\u9732\u3001\u8d85\u30af\u30ea\u30fc\u30f3\u306a\u771f\u7a7a\u6761\u4ef6\u3001\u9ad8\u3044\u6a5f\u68b0\u7684\u30b9\u30c8\u30ec\u30b9\u306b\u8010\u3048\u308b\u6750\u6599\u304c\u5fc5\u8981\u3068\u3055\u308c\u3066\u3044\u307e\u3059\u3002.<\/p>\n\n\n\n<p 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class=\"wp-block-paragraph\">\u30a6\u30a7\u30cf\u30fc\u30cf\u30f3\u30c9\u30ea\u30f3\u30b0\u30b7\u30b9\u30c6\u30e0\u3084\u30a8\u30c3\u30c1\u30f3\u30b0\u30c1\u30e3\u30f3\u30d0\u30fc\u304b\u3089\u6210\u819c\u88c5\u7f6e\u3084\u71b1\u51e6\u7406\u7089\u306b\u81f3\u308b\u307e\u3067\u3001\u5148\u9032\u7684\u306a\u30bb\u30e9\u30df\u30c3\u30af\u90e8\u54c1\u306f\u534a\u5c0e\u4f53\u88fd\u9020\u30c1\u30a7\u30fc\u30f3\u5168\u4f53\u3067\u5e83\u304f\u4f7f\u7528\u3055\u308c\u3066\u3044\u307e\u3059\u3002.<\/p>\n\n\n\n<figure class=\"wp-block-image aligncenter size-full\"><img fetchpriority=\"high\" decoding=\"async\" width=\"1000\" height=\"1000\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment.png\" alt=\"\" class=\"wp-image-2114\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment.png 1000w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-300x300.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-150x150.png 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-768x768.png 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-12x12.png 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-600x600.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-100x100.png 100w\" sizes=\"(max-width: 1000px) 100vw, 1000px\" \/><\/figure>\n\n\n\n<h1 class=\"wp-block-heading\">\u30a2\u30c9\u30d0\u30f3\u30b9\u30c8\u30fb\u30bb\u30e9\u30df\u30c3\u30af\u30b9\u304c\u534a\u5c0e\u4f53\u88c5\u7f6e\u306b\u4e0d\u53ef\u6b20\u306a\u7406\u7531<\/h1>\n\n\n\n<p class=\"wp-block-paragraph\">\u534a\u5c0e\u4f53\u88fd\u9020\u88c5\u7f6e\u306f\u3001\u307e\u3059\u307e\u3059\u7cbe\u5bc6\u5316\u30fb\u9ad8\u5ea6\u5316\u3057\u3066\u3044\u308b\u3002\u5f93\u6765\u306e\u91d1\u5c5e\u6750\u6599\u306f\u3001\u30d7\u30e9\u30ba\u30de\u51e6\u7406\u3001\u9ad8\u6e29\u71b1\u30b5\u30a4\u30af\u30eb\u3001\u5316\u5b66\u7684\u306b\u4fb5\u98df\u6027\u306e\u9ad8\u3044\u74b0\u5883\u306a\u3069\u306e\u904e\u9177\u306a\u6761\u4ef6\u4e0b\u3067\u3057\u3070\u3057\u3070\u82e6\u6226\u3092\u5f37\u3044\u3089\u308c\u3066\u3044\u307e\u3059\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u30a2\u30c9\u30d0\u30f3\u30b9\u30c8\u30fb\u30bb\u30e9\u30df\u30c3\u30af\u30b9\u306f\u3001\u3044\u304f\u3064\u304b\u306e\u91cd\u8981\u306a\u5229\u70b9\u3092\u63d0\u4f9b\u3059\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u6975\u3081\u3066\u9ad8\u3044\u786c\u5ea6\u3068\u8010\u6469\u8017\u6027<\/li>\n\n\n\n<li>\u512a\u308c\u305f\u96fb\u6c17\u7d76\u7e01\u6027<\/li>\n\n\n\n<li>\u512a\u308c\u305f\u71b1\u5b89\u5b9a\u6027<\/li>\n\n\n\n<li>\u4f4e\u71b1\u81a8\u5f35<\/li>\n\n\n\n<li>\u512a\u308c\u305f\u8010\u98df\u6027<\/li>\n\n\n\n<li>\u30d1\u30fc\u30c6\u30a3\u30af\u30eb\u306e\u767a\u751f\u304c\u5c11\u306a\u3044<\/li>\n\n\n\n<li>\u771f\u7a7a\u74b0\u5883\u306b\u304a\u3051\u308b\u9ad8\u3044\u5bf8\u6cd5\u5b89\u5b9a\u6027<\/li>\n\n\n\n<li>\u30d7\u30e9\u30ba\u30de\u4fb5\u98df\u306b\u5bfe\u3059\u308b\u8010\u6027<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u3053\u306e\u3088\u3046\u306a\u7279\u6027\u304b\u3089\u3001\u7cbe\u5bc6\u30bb\u30e9\u30df\u30c3\u30af\u90e8\u54c1\u306f\u5e45\u5e83\u304f\u4f7f\u7528\u3055\u308c\u3066\u3044\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30a6\u30a7\u30cf\u30fc\u30cf\u30f3\u30c9\u30ea\u30f3\u30b0\u30b7\u30b9\u30c6\u30e0<\/li>\n\n\n\n<li>\u30a8\u30c3\u30c1\u30f3\u30b0\u88c5\u7f6e<\/li>\n\n\n\n<li>\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u88c5\u7f6e<\/li>\n\n\n\n<li>\u5316\u5b66\u6c17\u76f8\u6210\u9577\uff08CVD\uff09\u88c5\u7f6e<\/li>\n\n\n\n<li>\u7269\u7406\u84b8\u7740\uff08PVD\uff09\u30c1\u30e3\u30f3\u30d0\u30fc<\/li>\n\n\n\n<li>\u30a4\u30aa\u30f3\u6ce8\u5165\u30b7\u30b9\u30c6\u30e0<\/li>\n\n\n\n<li>\u62e1\u6563\u7089\u304a\u3088\u3073\u9178\u5316\u7089<\/li>\n\n\n\n<li>CMP\uff08\u5316\u5b66\u6a5f\u68b0\u7814\u78e8\uff09\u88c5\u7f6e<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u591a\u304f\u306e\u534a\u5c0e\u4f53\u88fd\u9020\u88c5\u7f6e\u3067\u306f\u3001\u5148\u7aef\u30bb\u30e9\u30df\u30c3\u30af\u90e8\u54c1\u304c\u4e2d\u6838\u6a5f\u80fd\u6750\u6599\u306e\u304b\u306a\u308a\u306e\u90e8\u5206\u3092\u5360\u3081\u3001\u30d7\u30ed\u30bb\u30b9\u306e\u5b89\u5b9a\u6027\u3001\u6b69\u7559\u307e\u308a\u3001\u88c5\u7f6e\u306e\u5bff\u547d\u306b\u76f4\u63a5\u5f71\u97ff\u3092\u53ca\u307c\u3057\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n<h1 class=\"wp-block-heading\">\u534a\u5c0e\u4f53\u30bb\u30e9\u30df\u30c3\u30af\u90e8\u54c1\u306e\u6280\u8853\u7684\u8ab2\u984c<\/h1>\n\n\n\n<p class=\"wp-block-paragraph\">\u534a\u5c0e\u4f53\u696d\u754c\u306e\u8981\u6c42\u3092\u6e80\u305f\u3059\u305f\u3081\u306b\u3001\u5148\u7aef\u30bb\u30e9\u30df\u30c3\u30af\u6750\u6599\u306f3\u3064\u306e\u4e3b\u8981\u306a\u6280\u8853\u7684\u8981\u6c42\u3092\u6e80\u305f\u3055\u306a\u3051\u308c\u3070\u306a\u3089\u306a\u3044\uff1a<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">1.\u6750\u6599\u306e\u6027\u80fd\u8981\u4ef6<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u30bb\u30e9\u30df\u30c3\u30af\u6750\u6599\u306f\u3001\u3053\u306e\u3088\u3046\u306a\u74b0\u5883\u4e0b\u3067\u3082\u5b89\u5b9a\u3057\u305f\u6027\u80fd\u3092\u7dad\u6301\u3057\u306a\u3051\u308c\u3070\u306a\u3089\u306a\u3044\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u9ad8\u6e29<\/li>\n\n\n\n<li>\u6a5f\u68b0\u7684\u30b9\u30c8\u30ec\u30b9<\/li>\n\n\n\n<li>\u8840\u6f3f\u66b4\u9732<\/li>\n\n\n\n<li>\u9178\u304a\u3088\u3073\u30a2\u30eb\u30ab\u30ea\u8150\u98df<\/li>\n\n\n\n<li>\u9ad8\u5468\u6ce2\u96fb\u6c17\u74b0\u5883<\/li>\n\n\n\n<li>\u71b1\u885d\u6483\u6761\u4ef6<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u305d\u306e\u305f\u3081\u306b\u306f\u3001\u6a5f\u68b0\u7279\u6027\u3001\u71b1\u7279\u6027\u3001\u8a98\u96fb\u7279\u6027\u3001\u5316\u5b66\u7279\u6027\u306e\u30d0\u30e9\u30f3\u30b9\u3092\u6700\u9069\u5316\u3059\u308b\u5fc5\u8981\u304c\u3042\u308b\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">2.\u786c\u8106\u6750\u6599\u306e\u7cbe\u5bc6\u52a0\u5de5<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u30a2\u30c9\u30d0\u30f3\u30b9\u30c8\u30fb\u30bb\u30e9\u30df\u30c3\u30af\u30b9\u306f\u3001\u786c\u5ea6\u304c\u9ad8\u304f\u8106\u3044\u305f\u3081\u3001\u6a5f\u68b0\u52a0\u5de5\u304c\u96e3\u3057\u3044\u3053\u3068\u3067\u77e5\u3089\u308c\u3066\u3044\u307e\u3059\u3002\u534a\u5c0e\u4f53\u88c5\u7f6e\u306f\u3001\u8d85\u9ad8\u5bf8\u6cd5\u7cbe\u5ea6\u3001\u53b3\u3057\u3044\u516c\u5dee\u3001\u8907\u96d1\u306a\u5f62\u72b6\u3092\u5fc5\u8981\u3068\u3059\u308b\u305f\u3081\u3001\u7cbe\u5bc6\u6a5f\u68b0\u52a0\u5de5\u306f\u696d\u754c\u6700\u5927\u306e\u8ab2\u984c\u306e\u4e00\u3064\u3068\u306a\u3063\u3066\u3044\u307e\u3059\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">3.\u8d85\u6e05\u6d44\u8868\u9762\u51e6\u7406<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u591a\u304f\u306e\u30bb\u30e9\u30df\u30c3\u30af\u90e8\u54c1\u306f\u3001\u534a\u5c0e\u4f53\u30a6\u30a7\u30cf\u30fc\u306e\u8fd1\u304f\u306b\u914d\u7f6e\u3055\u308c\u3066\u3044\u308b\u304b\u3001\u76f4\u63a5\u63a5\u89e6\u3057\u3066\u3044\u308b\u3002\u305d\u306e\u305f\u3081\u3001\u53b3\u5bc6\u306a\u7ba1\u7406\u304c\u5fc5\u8981\u3067\u3059\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u91d1\u5c5e\u30a4\u30aa\u30f3\u6c5a\u67d3<\/li>\n\n\n\n<li>\u8868\u9762\u7c97\u3055<\/li>\n\n\n\n<li>\u7c92\u5b50\u751f\u6210<\/li>\n\n\n\n<li>\u8868\u9762\u306e\u6b20\u9665<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u306f\u3001\u6a5f\u68b0\u52a0\u5de5\u3068\u7814\u78e8\u5de5\u7a0b\u306e\u5f8c\u306b\u4e0d\u53ef\u6b20\u3067\u3042\u308b\u3002.<\/p>\n\n\n\n<h1 class=\"wp-block-heading\">\u534a\u5c0e\u4f53\u306b\u4f7f\u7528\u3055\u308c\u308b\u4e3b\u306a\u5148\u7aef\u30bb\u30e9\u30df\u30c3\u30af\u6750\u6599<\/h1>\n\n\n\n<h2 class=\"wp-block-heading\">1.\u30a2\u30eb\u30df\u30ca\uff08Al\u2082O\u2083\uff09<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">\u4e3b\u8981\u7269\u4ef6<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u9ad8\u3044\u786c\u5ea6<\/li>\n\n\n\n<li>\u512a\u308c\u305f\u8010\u6469\u8017\u6027<\/li>\n\n\n\n<li>\u5f37\u529b\u306a\u96fb\u6c17\u7d76\u7e01\u6027<\/li>\n\n\n\n<li>\u9ad8\u6e29\u8010\u6027<\/li>\n\n\n\n<li>\u512a\u308c\u305f\u5316\u5b66\u7684\u5b89\u5b9a\u6027<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">\u4ee3\u8868\u7684\u306a\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30a6\u30a8\u30cf\u30fc\u30dc\u30fc\u30c8<\/li>\n\n\n\n<li>\u96fb\u6c17\u7d76\u7e01\u4f53<\/li>\n\n\n\n<li>CMP\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8<\/li>\n\n\n\n<li>\u534a\u5c0e\u4f53\u30d1\u30c3\u30b1\u30fc\u30b8\u57fa\u677f<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u30a2\u30eb\u30df\u30ca\u306f\u3001\u30d0\u30e9\u30f3\u30b9\u306e\u53d6\u308c\u305f\u6027\u80fd\u3068\u8cbb\u7528\u5bfe\u52b9\u679c\u306e\u9ad8\u3055\u304b\u3089\u3001\u4f9d\u7136\u3068\u3057\u3066\u6700\u3082\u5e83\u304f\u4f7f\u7528\u3055\u308c\u3066\u3044\u308b\u30a8\u30f3\u30b8\u30cb\u30a2\u30ea\u30f3\u30b0\u30fb\u30bb\u30e9\u30df\u30c3\u30af\u30b9\u306e\u4e00\u3064\u3067\u3042\u308b\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">2.\u7a92\u5316\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\uff08AlN\uff09<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">\u4e3b\u8981\u7269\u4ef6<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u6975\u3081\u3066\u9ad8\u3044\u71b1\u4f1d\u5c0e\u6027<\/li>\n\n\n\n<li>\u4f4e\u71b1\u81a8\u5f35\u4fc2\u6570<\/li>\n\n\n\n<li>\u512a\u308c\u305f\u96fb\u6c17\u7d76\u7e01\u6027<\/li>\n\n\n\n<li>\u512a\u308c\u305f\u8010\u71b1\u885d\u6483\u6027<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">\u4ee3\u8868\u7684\u306a\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u534a\u5c0e\u4f53\u30d1\u30c3\u30b1\u30fc\u30b8\u57fa\u677f<\/li>\n\n\n\n<li>\u30d2\u30fc\u30c8\u30b7\u30f3\u30af<\/li>\n\n\n\n<li>\u30cf\u30a4\u30d1\u30ef\u30fc\u96fb\u5b50\u6a5f\u5668<\/li>\n\n\n\n<li>\u8584\u819c\u84b8\u7740\u30d2\u30fc\u30bf\u30fc<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u7a92\u5316\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\u306f\u3001\u8fc5\u901f\u306a\u71b1\u653e\u6563\u304c\u91cd\u8981\u306a\u71b1\u7ba1\u7406\u7528\u9014\u3067\u7279\u306b\u4fa1\u5024\u304c\u3042\u308b\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">3.\u70ad\u5316\u30b1\u30a4\u7d20\uff08SiC\uff09<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">\u4e3b\u8981\u7269\u4ef6<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u8d85\u9ad8\u786c\u5ea6<\/li>\n\n\n\n<li>\u512a\u308c\u305f\u9ad8\u6e29\u5b89\u5b9a\u6027<\/li>\n\n\n\n<li>\u9ad8\u3044\u71b1\u4f1d\u5c0e\u6027<\/li>\n\n\n\n<li>\u512a\u308c\u305f\u8010\u98df\u6027<\/li>\n\n\n\n<li>\u512a\u308c\u305f\u8010\u30d7\u30e9\u30ba\u30de\u6027<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">\u4ee3\u8868\u7684\u306a\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30a8\u30c3\u30c1\u30f3\u30b0\u30c1\u30e3\u30f3\u30d0\u30fc\u90e8\u54c1<\/li>\n\n\n\n<li>\u30a6\u30a7\u30cf\u30fc\u30b5\u30bb\u30d7\u30bf\u30fc<\/li>\n\n\n\n<li>\u9ad8\u6e29\u30d2\u30fc\u30bf\u30fc<\/li>\n\n\n\n<li>\u30a6\u30a7\u30cf\u30fc\u30cf\u30f3\u30c9\u30ea\u30f3\u30b0\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8<\/li>\n\n\n\n<li>\u30d1\u30ef\u30fc\u534a\u5c0e\u4f53\u57fa\u677f<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u70ad\u5316\u30b1\u30a4\u7d20\u306f\u3001\u7279\u306b\u30d7\u30e9\u30ba\u30de\u3092\u591a\u7528\u3059\u308b\u74b0\u5883\u306b\u304a\u3051\u308b\u5148\u7aef\u534a\u5c0e\u4f53\u30d7\u30ed\u30bb\u30b9\u306b\u304a\u3044\u3066\u3001\u6700\u3082\u91cd\u8981\u306a\u6750\u6599\u306e\u3072\u3068\u3064\u3068\u306a\u3063\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">4.\u7a92\u5316\u30b1\u30a4\u7d20 (Si\u2083N\u2084)<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">\u4e3b\u8981\u7269\u4ef6<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u9ad8\u3044\u6a5f\u68b0\u7684\u5f37\u5ea6<\/li>\n\n\n\n<li>\u512a\u308c\u305f\u7834\u58ca\u976d\u6027<\/li>\n\n\n\n<li>\u512a\u308c\u305f\u8010\u71b1\u885d\u6483\u6027<\/li>\n\n\n\n<li>\u512a\u308c\u305f\u8010\u6469\u8017\u6027<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">\u4ee3\u8868\u7684\u306a\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u69cb\u9020\u90e8\u54c1<\/li>\n\n\n\n<li>\u534a\u5c0e\u4f53\u30ad\u30e3\u30ea\u30a2\u30b7\u30b9\u30c6\u30e0<\/li>\n\n\n\n<li>\u9ad8\u4fe1\u983c\u6027\u5305\u88c5\u6750\u6599<\/li>\n\n\n\n<li>\u71b1\u7ba1\u7406\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u7a92\u5316\u30b1\u30a4\u7d20\u306f\u3001\u53b3\u3057\u3044\u4f7f\u7528\u6761\u4ef6\u4e0b\u3067\u5f37\u5ea6\u3068\u4fe1\u983c\u6027\u306e\u4e21\u65b9\u304c\u8981\u6c42\u3055\u308c\u308b\u5834\u5408\u306b\u5e83\u304f\u4f7f\u7528\u3055\u308c\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">5.\u30b8\u30eb\u30b3\u30cb\u30a2 (ZrO\u2082)<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">\u4e3b\u8981\u7269\u4ef6<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u9ad8\u3044\u7834\u58ca\u976d\u6027<\/li>\n\n\n\n<li>\u512a\u308c\u305f\u8010\u6469\u8017\u6027<\/li>\n\n\n\n<li>\u5f37\u3044\u5316\u5b66\u7684\u5b89\u5b9a\u6027<\/li>\n\n\n\n<li>\u826f\u597d\u306a\u9ad8\u6e29\u6027\u80fd<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">\u4ee3\u8868\u7684\u306a\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>CMP\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8<\/li>\n\n\n\n<li>\u8010\u6469\u8017\u534a\u5c0e\u4f53\u90e8\u54c1<\/li>\n\n\n\n<li>\u9ad8\u6e29\u30bb\u30f3\u30b5\u30fc<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u5909\u614b\u5f37\u976d\u5316\u30e1\u30ab\u30cb\u30ba\u30e0\u306b\u3088\u308a\u3001\u30b8\u30eb\u30b3\u30cb\u30a2\u306f\u4ed6\u306e\u591a\u304f\u306e\u30bb\u30e9\u30df\u30c3\u30af\u3068\u6bd4\u8f03\u3057\u3066\u3001\u4e80\u88c2\u4f1d\u64ad\u306b\u5bfe\u3059\u308b\u512a\u308c\u305f\u8010\u6027\u3092\u63d0\u4f9b\u3059\u308b\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">6.\u9178\u5316\u30d9\u30ea\u30ea\u30a6\u30e0(BeO)<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">\u4e3b\u8981\u7269\u4ef6<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u6975\u3081\u3066\u9ad8\u3044\u71b1\u4f1d\u5c0e\u6027<\/li>\n\n\n\n<li>\u512a\u308c\u305f\u96fb\u6c17\u7d76\u7e01\u6027<\/li>\n\n\n\n<li>\u4f4e\u8a98\u96fb\u7387<\/li>\n\n\n\n<li>\u9ad8\u6e29\u5b89\u5b9a\u6027<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">\u4ee3\u8868\u7684\u306a\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30cf\u30a4\u30d1\u30ef\u30fc\u534a\u5c0e\u4f53\u30d1\u30c3\u30b1\u30fc\u30b8<\/li>\n\n\n\n<li>RF\u304a\u3088\u3073\u30de\u30a4\u30af\u30ed\u6ce2\u57fa\u677f<\/li>\n\n\n\n<li>\u71b1\u7ba1\u7406\u30b7\u30b9\u30c6\u30e0<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u9178\u5316\u30d9\u30ea\u30ea\u30a6\u30e0\u306f\u3001\u91d1\u5c5e\u306e\u3088\u3046\u306a\u71b1\u4f1d\u5c0e\u6027\u3068\u30bb\u30e9\u30df\u30c3\u30af\u7d76\u7e01\u6027\u3092\u517c\u306d\u5099\u3048\u3066\u304a\u308a\u3001\u7279\u6b8a\u306a\u96fb\u5b50\u6a5f\u5668\u7528\u9014\u3067\u9ad8\u3044\u52b9\u679c\u3092\u767a\u63ee\u3059\u308b\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">7.\u5727\u96fb\u30bb\u30e9\u30df\u30c3\u30af\u30b9\uff08PZT\uff09<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">\u4e3b\u8981\u7269\u4ef6<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u512a\u308c\u305f\u5727\u96fb\u5fdc\u7b54<\/li>\n\n\n\n<li>\u9ad8\u611f\u5ea6<\/li>\n\n\n\n<li>\u9ad8\u901f\u4f5c\u52d5\u80fd\u529b<\/li>\n\n\n\n<li>\u826f\u597d\u306a\u6e29\u5ea6\u5b89\u5b9a\u6027<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">\u4ee3\u8868\u7684\u306a\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u7cbe\u5bc6\u4f4d\u7f6e\u6c7a\u3081\u30b7\u30b9\u30c6\u30e0<\/li>\n\n\n\n<li>\u534a\u5c0e\u4f53\u30bb\u30f3\u30b5\u30fc<\/li>\n\n\n\n<li>\u97f3\u97ff\u6ce2\u30c7\u30d0\u30a4\u30b9<\/li>\n\n\n\n<li>\u7cbe\u5bc6\u30a2\u30af\u30c1\u30e5\u30a8\u30fc\u30bf<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u5727\u96fb\u30bb\u30e9\u30df\u30c3\u30af\u30b9\u306f\u3001\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u4f7f\u7528\u3055\u308c\u308b\u8d85\u7cbe\u5bc6\u30e2\u30fc\u30b7\u30e7\u30f3\u30b3\u30f3\u30c8\u30ed\u30fc\u30eb\u30b7\u30b9\u30c6\u30e0\u3067\u91cd\u8981\u306a\u5f79\u5272\u3092\u679c\u305f\u3057\u3066\u3044\u307e\u3059\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">8.\u77f3\u82f1\u30bb\u30e9\u30df\u30c3\u30af\uff08SiO\uff09<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">\u4e3b\u8981\u7269\u4ef6<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u8d85\u9ad8\u7d14\u5ea6<\/li>\n\n\n\n<li>\u975e\u5e38\u306b\u4f4e\u3044\u71b1\u81a8\u5f35<\/li>\n\n\n\n<li>\u512a\u308c\u305f\u8010\u71b1\u6027<\/li>\n\n\n\n<li>\u512a\u308c\u305f\u5316\u5b66\u7684\u5b89\u5b9a\u6027<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">\u4ee3\u8868\u7684\u306a\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u62e1\u6563\u7089\u7ba1<\/li>\n\n\n\n<li>\u9732\u5149\u88c5\u7f6e\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8<\/li>\n\n\n\n<li>\u30a6\u30a7\u30cf\u30fc\u30ad\u30e3\u30ea\u30a2<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u77f3\u82f1\u6750\u6599\u306f\u3001\u8d85\u30af\u30ea\u30fc\u30f3\u3067\u9ad8\u6e29\u306e\u534a\u5c0e\u4f53\u74b0\u5883\u306b\u304a\u3044\u3066\u7279\u306b\u91cd\u8981\u3067\u3042\u308b\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">9.\u7a92\u5316\u30db\u30a6\u7d20\uff08BN\uff09<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">\u4e3b\u8981\u7269\u4ef6<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u9ad8\u3044\u71b1\u4f1d\u5c0e\u6027<\/li>\n\n\n\n<li>\u4f4e\u8a98\u96fb\u7387<\/li>\n\n\n\n<li>\u512a\u308c\u305f\u6f64\u6ed1\u7279\u6027<\/li>\n\n\n\n<li>\u512a\u308c\u305f\u8010\u71b1\u885d\u6483\u6027<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">\u4ee3\u8868\u7684\u306a\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u9ad8\u6e29\u7d76\u7e01<\/li>\n\n\n\n<li>\u71b1\u7ba1\u7406\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8<\/li>\n\n\n\n<li>\u534a\u5c0e\u4f53\u88c5\u7f6e\u306e\u6f64\u6ed1\u90e8\u54c1<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u7a92\u5316\u30db\u30a6\u7d20\u306f\u3001\u71b1\u5b89\u5b9a\u6027\u3068\u975e\u53cd\u5fdc\u6027\u306e\u4e21\u65b9\u3092\u5fc5\u8981\u3068\u3059\u308b\u7528\u9014\u3067\u7279\u306b\u6709\u7528\u3067\u3042\u308b\u3002.<\/p>\n\n\n\n<h1 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evolve toward smaller nodes, higher integration density, and more complex manufacturing processes, the demand for advanced materials inside semiconductor equipment has increased dramatically. Modern semiconductor fabrication environments require materials capable of withstanding extreme temperatures, corrosive plasma exposure, ultra-clean vacuum conditions, and high mechanical stress while maintaining dimensional stability and contamination control. Among the many material solutions available today, advanced ceramics have become indispensable in semiconductor manufacturing equipment due to their exceptional combination of mechanical, thermal, electrical, and chemical properties. From wafer handling systems and etching chambers to deposition equipment and thermal processing furnaces, advanced ceramic components are widely used throughout the semiconductor production chain. Why [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":2114,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[3],"tags":[46,252,253,102,255,262,259,254,257,258,260,251,90,261,81,256,247,78,250,79,249,99,248],"class_list":["post-2142","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-industry-news","tag-advanced-ceramics","tag-aln-ceramic","tag-alumina-ceramic","tag-aluminum-nitride","tag-beo-ceramic","tag-boron-nitride","tag-cmp-components","tag-engineering-ceramics","tag-plasma-resistant-materials","tag-precision-ceramics","tag-quartz-ceramic","tag-semiconductor-ceramics","tag-semiconductor-equipment","tag-semiconductor-etching","tag-semiconductor-manufacturing","tag-si3n4-ceramic","tag-sic-ceramic","tag-silicon-carbide","tag-silicon-nitride","tag-thermal-management-materials","tag-wafer-boat","tag-wafer-handling","tag-zirconia-ceramic"],"_links":{"self":[{"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/posts\/2142","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/comments?post=2142"}],"version-history":[{"count":1,"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/posts\/2142\/revisions"}],"predecessor-version":[{"id":2143,"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/posts\/2142\/revisions\/2143"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/media\/2114"}],"wp:attachment":[{"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/media?parent=2142"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/categories?post=2142"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/tags?post=2142"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}