{"id":2018,"date":"2026-05-08T03:14:11","date_gmt":"2026-05-08T03:14:11","guid":{"rendered":"https:\/\/www.xkh-ceramics.com\/?p=2018"},"modified":"2026-05-08T03:14:11","modified_gmt":"2026-05-08T03:14:11","slug":"precision-ceramics-in-semiconductor-equipment-core-roles-and-industry-development-trends","status":"publish","type":"post","link":"https:\/\/www.xkh-ceramics.com\/ja\/precision-ceramics-in-semiconductor-equipment-core-roles-and-industry-development-trends\/","title":{"rendered":"\u534a\u5c0e\u4f53\u88c5\u7f6e\u306b\u304a\u3051\u308b\u7cbe\u5bc6\u30bb\u30e9\u30df\u30c3\u30af\u30b9\uff1a\u4e2d\u6838\u7684\u5f79\u5272\u3068\u7523\u696d\u767a\u5c55\u52d5\u5411"},"content":{"rendered":"<h2 class=\"wp-block-heading\">1.\u306f\u3058\u3081\u306b<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u7cbe\u5bc6\u30bb\u30e9\u30df\u30c3\u30af\u30b9\u3068\u306f\u3001\u9ad8\u6027\u80fd\u30bb\u30e9\u30df\u30c3\u30af\u30b9\u306e\u3053\u3068\u3067\u3042\u308b\u3002 <a href=\"https:\/\/www.xkh-ceramics.com\/ja\/%e8%a3%bd%e5%93%81\/\" data-type=\"page\" data-id=\"1927\">\u5148\u7aef\u30bb\u30e9\u30df\u30c3\u30af\u90e8\u54c1<\/a> \u534a\u5c0e\u4f53\u88fd\u9020\u88c5\u7f6e\u3067\u4f7f\u7528\u3055\u308c\u308b\u3002\u3053\u308c\u3089\u306e\u90e8\u54c1\u306f\u901a\u5e38\u3001\u8907\u96d1\u306a\u69cb\u9020\u3001\u8d85\u9ad8\u7d14\u5ea6\u3001\u6975\u3081\u3066\u53b3\u3057\u3044\u5bf8\u6cd5\u516c\u5dee\u3067\u8a2d\u8a08\u3055\u308c\u3066\u3044\u307e\u3059\u3002\u534a\u5c0e\u4f53\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u306e\u5b89\u5b9a\u6027\u3001\u7cbe\u5ea6\u3001\u4fe1\u983c\u6027\u3092\u78ba\u4fdd\u3059\u308b\u4e0a\u3067\u91cd\u8981\u306a\u5f79\u5272\u3092\u62c5\u3063\u3066\u3044\u307e\u3059\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u4e16\u754c\u306e\u534a\u5c0e\u4f53\u7523\u696d\u304c\u6025\u901f\u306b\u62e1\u5927\u3057\u3001\u30d7\u30ed\u30bb\u30b9\u30ce\u30fc\u30c9\u306e\u5fae\u7d30\u5316\u3001\u9ad8\u96c6\u7a4d\u5316\u3001\u88fd\u9020\u74b0\u5883\u306e\u8907\u96d1\u5316\u304c\u9032\u3080\u306b\u3064\u308c\u3001\u534a\u5c0e\u4f53\u88fd\u9020\u88c5\u7f6e\u306f\u3088\u308a\u9ad8\u7cbe\u5ea6\u3001\u3088\u308a\u904e\u9177\u306a\u4f7f\u7528\u6761\u4ef6\u3078\u3068\u9032\u5316\u3057\u3066\u304d\u307e\u3057\u305f\u3002\u305d\u306e\u7d50\u679c\u3001\u7cbe\u5bc6\u30bb\u30e9\u30df\u30c3\u30af\u90e8\u54c1\u306f\u3001\u73fe\u4ee3\u306e\u534a\u5c0e\u4f53\u88c5\u7f6e\u306b\u6b20\u304b\u305b\u306a\u3044\u300c\u96a0\u308c\u305f\u30b3\u30a2\u90e8\u54c1\u300d\u3068\u306a\u3063\u3066\u3044\u307e\u3059\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u4eca\u65e5\u3001\u7cbe\u5bc6\u30bb\u30e9\u30df\u30c3\u30af\u30b9\u306f\u3001\u534a\u5c0e\u4f53\u88c5\u7f6e\u30b7\u30b9\u30c6\u30e0\u306e\u4fa1\u5024\u306e\u7d0416%\u3092\u5360\u3081\u3066\u304a\u308a\u3001\u30b5\u30d7\u30e9\u30a4\u30c1\u30a7\u30fc\u30f3\u306b\u304a\u3051\u308b\u6226\u7565\u7684\u91cd\u8981\u6027\u3092\u5f37\u8abf\u3057\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n<figure class=\"wp-block-image aligncenter size-full\"><img fetchpriority=\"high\" decoding=\"async\" width=\"600\" height=\"600\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/SiC-ceramic-chuck-1.jpg\" alt=\"\" class=\"wp-image-2019\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/SiC-ceramic-chuck-1.jpg 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/SiC-ceramic-chuck-1-300x300.jpg 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/SiC-ceramic-chuck-1-150x150.jpg 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/SiC-ceramic-chuck-1-12x12.jpg 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/SiC-ceramic-chuck-1-100x100.jpg 100w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/SiC-ceramic-chuck-1-200x200.jpg 200w\" sizes=\"(max-width: 600px) 100vw, 600px\" \/><\/figure>\n\n\n\n<h2 class=\"wp-block-heading\">2.\u7cbe\u5bc6\u30bb\u30e9\u30df\u30c3\u30af\u304c\u534a\u5c0e\u4f53\u88c5\u7f6e\u306b\u4e0d\u53ef\u6b20\u306a\u7406\u7531<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u306f\u3001\u9ad8\u6e29\u3001\u30d7\u30e9\u30ba\u30de\u8150\u98df\u3001\u8d85\u30af\u30ea\u30fc\u30f3\u306a\u771f\u7a7a\u72b6\u614b\u3001\u9ad8\u7cbe\u5ea6\u306e\u6a5f\u68b0\u7684\u904b\u52d5\u306a\u3069\u3001\u975e\u5e38\u306b\u53b3\u3057\u3044\u74b0\u5883\u304c\u4f34\u3046\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u91d1\u5c5e\u3084\u30dd\u30ea\u30de\u30fc\u306e\u3088\u3046\u306a\u4f1d\u7d71\u7684\u306a\u7d20\u6750\u306f\u3001\u3053\u306e\u3088\u3046\u306a\u6761\u4ef6\u4e0b\u3067\u306f\u3001\u3057\u3070\u3057\u3070\u4ee5\u4e0b\u306e\u3088\u3046\u306a\u7406\u7531\u3067\u6545\u969c\u3059\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u71b1\u5909\u5f62<\/li>\n\n\n\n<li>\u5316\u5b66\u8150\u98df<\/li>\n\n\n\n<li>\u7c92\u5b50\u6c5a\u67d3<\/li>\n\n\n\n<li>\u5c0e\u96fb\u6027\u306e\u554f\u984c<\/li>\n\n\n\n<li>\u6469\u8017\u3068\u75b2\u52b4<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u3057\u304b\u3057\u3001\u7cbe\u5bc6\u30bb\u30e9\u30df\u30c3\u30af\u30b9\u306f\u30e6\u30cb\u30fc\u30af\u306a\u7279\u6027\u306e\u7d44\u307f\u5408\u308f\u305b\u3092\u63d0\u4f9b\u3059\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u9ad8\u3044\u786c\u5ea6\u3068\u8010\u6469\u8017\u6027<\/li>\n\n\n\n<li>\u512a\u308c\u305f\u96fb\u6c17\u7d76\u7e01\u6027<\/li>\n\n\n\n<li>\u512a\u308c\u305f\u71b1\u5b89\u5b9a\u6027<\/li>\n\n\n\n<li>\u4f4e\u71b1\u81a8\u5f35\u4fc2\u6570<\/li>\n\n\n\n<li>\u5f37\u529b\u306a\u8010\u85ac\u54c1\u6027\u3068\u8010\u30d7\u30e9\u30ba\u30de\u8150\u98df\u6027<\/li>\n\n\n\n<li>\u9ad8\u3044\u69cb\u9020\u525b\u6027\u3068\u5bf8\u6cd5\u5b89\u5b9a\u6027<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u3053\u308c\u3089\u306e\u7279\u6027\u306b\u3088\u308a\u3001\u30bb\u30e9\u30df\u30c3\u30af\u306f\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u3001\u30a8\u30c3\u30c1\u30f3\u30b0\u3001\u84b8\u7740\u3001\u30a4\u30aa\u30f3\u6ce8\u5165\u3001\u71b1\u51e6\u7406\u306a\u3069\u306e\u91cd\u8981\u306a\u534a\u5c0e\u4f53\u30d7\u30ed\u30bb\u30b9\u306b\u7406\u60f3\u7684\u306a\u3082\u306e\u3068\u306a\u3063\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">3.\u534a\u5c0e\u4f53\u7523\u696d\u3067\u4f7f\u7528\u3055\u308c\u308b\u4e3b\u306a\u7cbe\u5bc6\u30bb\u30e9\u30df\u30c3\u30af\u6750\u6599<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">3.1 \u30a2\u30eb\u30df\u30ca\uff08Al\u2082O\u2083\uff09\u30bb\u30e9\u30df\u30c3\u30af\u30b9<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u30a2\u30eb\u30df\u30ca\u30bb\u30e9\u30df\u30c3\u30af\u30b9\u306f\u3001\u305d\u306e\u5b89\u5b9a\u6027\u3001\u8cbb\u7528\u5bfe\u52b9\u679c\u3001\u6210\u719f\u3057\u305f\u52a0\u5de5\u6280\u8853\u306b\u3088\u308a\u3001\u534a\u5c0e\u4f53\u88c5\u7f6e\u3067\u6700\u3082\u5e83\u304f\u4f7f\u7528\u3055\u308c\u3066\u3044\u308b\u6750\u6599\u3067\u3042\u308b\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u4ee3\u8868\u7684\u306a\u7528\u9014\u306f\u4ee5\u4e0b\u306e\u901a\u308a\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30a8\u30c3\u30c1\u30f3\u30b0\u30c1\u30e3\u30f3\u30d0\u30fc\u30e9\u30a4\u30ca\u30fc\u3068\u4fdd\u8b77\u90e8\u54c1<\/li>\n\n\n\n<li>\u30ac\u30b9\u5206\u914d\u30d7\u30ec\u30fc\u30c8<\/li>\n\n\n\n<li>\u30a6\u30a7\u30cf\u30fc\u30c1\u30e3\u30c3\u30af\u3068\u771f\u7a7a\u90e8\u54c1<\/li>\n\n\n\n<li>\u30dd\u30ea\u30c3\u30b7\u30f3\u30b0\u30d7\u30ec\u30fc\u30c8\u3068CMP\u30b7\u30b9\u30c6\u30e0<\/li>\n\n\n\n<li>\u65ad\u71b1\u30ea\u30f3\u30b0\u3068\u69cb\u9020\u30b5\u30dd\u30fc\u30c8<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u9ad8\u7d14\u5ea6\u30a2\u30eb\u30df\u30ca\uff08\u6700\u9ad899.9%\uff09\u306f\u3001\u30b3\u30f3\u30bf\u30df\u30cd\u30fc\u30b7\u30e7\u30f3\u30b3\u30f3\u30c8\u30ed\u30fc\u30eb\u304c\u91cd\u8981\u306a\u6700\u5148\u7aef\u534a\u5c0e\u4f53\u74b0\u5883\u3067\u5fc5\u8981\u3068\u3055\u308c\u307e\u3059\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">3.2 \u70ad\u5316\u30b1\u30a4\u7d20\uff08SiC\uff09\u30bb\u30e9\u30df\u30c3\u30af\u30b9<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u70ad\u5316\u30b1\u30a4\u7d20\u306f\u3001\u534a\u5c0e\u4f53\u88c5\u7f6e\u7528\u306e\u6700\u5148\u7aef\u69cb\u9020\u30bb\u30e9\u30df\u30c3\u30af\u6750\u6599\u306e\u3072\u3068\u3064\u3068\u8003\u3048\u3089\u308c\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u4e3b\u306a\u7269\u4ef6\u306f\u4ee5\u4e0b\u306e\u901a\u308a\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u6975\u3081\u3066\u9ad8\u3044\u525b\u6027\uff08\u5f3e\u6027\u7387\uff09<\/li>\n\n\n\n<li>\u512a\u308c\u305f\u71b1\u4f1d\u5c0e\u6027<\/li>\n\n\n\n<li>\u975e\u5e38\u306b\u4f4e\u3044\u71b1\u81a8\u5f35<\/li>\n\n\n\n<li>\u5149\u5b66\u30b0\u30ec\u30fc\u30c9\u306e\u8868\u9762\u306b\u5bfe\u3059\u308b\u5353\u8d8a\u3057\u305f\u52a0\u5de5\u6027<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">SiC\u306f\u5e83\u304f\u4f7f\u7528\u3055\u308c\u3066\u3044\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u9732\u5149\u6a5f\u30b9\u30c6\u30fc\u30b8<\/li>\n\n\n\n<li>\u7cbe\u5bc6\u30e2\u30fc\u30b7\u30e7\u30f3\u30d7\u30e9\u30c3\u30c8\u30d5\u30a9\u30fc\u30e0<\/li>\n\n\n\n<li>\u30a6\u30a7\u30cf\u30fc\u30cf\u30f3\u30c9\u30ea\u30f3\u30b0\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8<\/li>\n\n\n\n<li>\u30d7\u30e9\u30ba\u30de\u30b7\u30b9\u30c6\u30e0\u306e\u30d5\u30a9\u30fc\u30ab\u30b9\u30ea\u30f3\u30b0\u3068\u69cb\u9020\u90e8\u54c1<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u30cf\u30a4\u30a8\u30f3\u30c9\u306e\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30b7\u30b9\u30c6\u30e0\u3067\u306f\u3001SiC\u30d9\u30fc\u30b9\u306e\u90e8\u54c1\u304c\u30ca\u30ce\u30e1\u30fc\u30c8\u30eb\u30ec\u30d9\u30eb\u306e\u4f4d\u7f6e\u6c7a\u3081\u7cbe\u5ea6\u3092\u7dad\u6301\u3059\u308b\u305f\u3081\u306b\u4e0d\u53ef\u6b20\u3067\u3042\u308b\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">3.3 \u7a92\u5316\u30b1\u30a4\u7d20\uff08Si\u2083N\u2084\uff09\u30bb\u30e9\u30df\u30c3\u30af\u30b9<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u7a92\u5316\u30b1\u30a4\u7d20\u306f\u3001\u5f37\u5ea6\u3001\u976d\u6027\u3001\u8010\u71b1\u885d\u6483\u6027\u306e\u512a\u308c\u305f\u7d44\u307f\u5408\u308f\u305b\u3067\u77e5\u3089\u308c\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u305d\u306e\u6027\u80fd\u306f1200\u2103\u3092\u8d85\u3048\u308b\u6e29\u5ea6\u3067\u3082\u5b89\u5b9a\u3057\u3066\u304a\u308a\u3001\u904e\u9177\u306a\u71b1\u74b0\u5883\u306b\u9069\u3057\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u7528\u9014\u306f\u4ee5\u4e0b\u306e\u901a\u308a\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u9ad8\u901f\u30bb\u30e9\u30df\u30c3\u30af\u30fb\u30d9\u30a2\u30ea\u30f3\u30b0<\/li>\n\n\n\n<li>\u30ac\u30a4\u30c9\u30ec\u30fc\u30eb\u3068\u30e2\u30fc\u30b7\u30e7\u30f3\u30b7\u30b9\u30c6\u30e0<\/li>\n\n\n\n<li>\u534a\u5c0e\u4f53\u30a6\u30a7\u30cf\u30fc\u30cf\u30f3\u30c9\u30ea\u30f3\u30b0\u90e8\u54c1<\/li>\n\n\n\n<li>\u9ad8\u5f37\u5ea6\u69cb\u9020\u90e8\u54c1<\/li>\n\n\n\n<li>\u30d1\u30ef\u30fc\u30e2\u30b8\u30e5\u30fc\u30eb\u57fa\u677f<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u6700\u9ad8\u306e\u30aa\u30fc\u30eb\u30e9\u30a6\u30f3\u30c9\u30fb\u30a8\u30f3\u30b8\u30cb\u30a2\u30ea\u30f3\u30b0\u30fb\u30bb\u30e9\u30df\u30c3\u30af\u30b9\u306e\u3072\u3068\u3064\u3068\u5e83\u304f\u8a55\u4fa1\u3055\u308c\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">3.4 \u7a92\u5316\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\uff08AlN\uff09\u30bb\u30e9\u30df\u30c3\u30af\u30b9<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u7a92\u5316\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\u306f\u4e3b\u306b\u305d\u306e\u4fa1\u5024\u304c\u8a8d\u3081\u3089\u308c\u3066\u3044\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u6975\u3081\u3066\u9ad8\u3044\u71b1\u4f1d\u5c0e\u6027<\/li>\n\n\n\n<li>\u512a\u308c\u305f\u96fb\u6c17\u7d76\u7e01\u6027<\/li>\n\n\n\n<li>\u30b7\u30ea\u30b3\u30f3\u3068\u306e\u71b1\u81a8\u5f35\u7387\u306e\u30de\u30c3\u30c1\u30f3\u30b0\u304c\u826f\u3044<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u534a\u5c0e\u4f53\u88c5\u7f6e\u3067\u306f\u3001AlN\u306f\u307e\u3059\u307e\u3059\u4f7f\u7528\u3055\u308c\u308b\u3088\u3046\u306b\u306a\u3063\u3066\u3044\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u9759\u96fb\u30c1\u30e3\u30c3\u30af\uff08ESC\uff09<\/li>\n\n\n\n<li>\u30d1\u30ef\u30fc\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u57fa\u677f<\/li>\n\n\n\n<li>\u9ad8\u6027\u80fd\u71b1\u7ba1\u7406\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u696d\u754c\u306e\u5927\u304d\u306a\u50be\u5411\u3068\u3057\u3066\u3001\u653e\u71b1\u8981\u6c42\u304c\u9ad8\u3044\u305f\u3081\u3001\u30a2\u30eb\u30df\u30ca\u30d9\u30fc\u30b9\u306eESC\u304c\u5f90\u3005\u306b\u7a92\u5316\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\u306b\u7f6e\u304d\u63db\u3048\u3089\u308c\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">4.\u7cbe\u5bc6\u30bb\u30e9\u30df\u30c3\u30af\u30b9\u3067\u4f5c\u3089\u308c\u305f\u534a\u5c0e\u4f53\u88c5\u7f6e\u4e3b\u8981\u90e8\u54c1<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u7cbe\u5bc6\u30bb\u30e9\u30df\u30c3\u30af\u30b9\u306f\u3001\u307b\u307c\u3059\u3079\u3066\u306e\u4e3b\u8981\u306a\u534a\u5c0e\u4f53\u88c5\u7f6e\u3067\u5e83\u304f\u4f7f\u7528\u3055\u308c\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">4.1 \u9732\u5149\u88c5\u7f6e<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u9759\u96fb\u30c1\u30e3\u30c3\u30af\uff08E\u30c1\u30e3\u30c3\u30af\uff09<\/li>\n\n\n\n<li>\u771f\u7a7a\u30c1\u30e3\u30c3\u30af<\/li>\n\n\n\n<li>\u7cbe\u5bc6\u30b9\u30c6\u30fc\u30b8<\/li>\n\n\n\n<li>\u30df\u30e9\u30fc\u304a\u3088\u3073\u5149\u5b66\u652f\u6301\u69cb\u9020<\/li>\n\n\n\n<li>\u6c34\u51b7\u30bb\u30e9\u30df\u30c3\u30af\u30fb\u30d7\u30e9\u30c3\u30c8\u30d5\u30a9\u30fc\u30e0<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u3053\u308c\u3089\u306e\u90e8\u54c1\u306f\u3001\u8d85\u4f4e\u71b1\u5909\u5f62\u3068\u6975\u3081\u3066\u9ad8\u3044\u4f4d\u7f6e\u5b89\u5b9a\u6027\u304c\u8981\u6c42\u3055\u308c\u308b\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">4.2 \u30a8\u30c3\u30c1\u30f3\u30b0\u88c5\u7f6e<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30d5\u30a9\u30fc\u30ab\u30b9\u30ea\u30f3\u30b0<\/li>\n\n\n\n<li>\u30ac\u30b9\u5206\u914d\u30d7\u30ec\u30fc\u30c8<\/li>\n\n\n\n<li>\u30ce\u30ba\u30eb\u3068\u30a4\u30f3\u30b8\u30a7\u30af\u30bf\u30fc<\/li>\n\n\n\n<li>\u30c1\u30e3\u30f3\u30d0\u30fc\u30e9\u30a4\u30ca\u30fc<\/li>\n\n\n\n<li>\u30d7\u30e9\u30ba\u30de\u8010\u6027\u30a6\u30a3\u30f3\u30c9\u30a6<\/li>\n\n\n\n<li>\u7d76\u7e01\u30ea\u30f3\u30b0<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u3053\u3053\u3067\u4f7f\u7528\u3055\u308c\u308b\u30bb\u30e9\u30df\u30c3\u30af\u306f\u3001\u653b\u6483\u7684\u306a\u30d7\u30e9\u30ba\u30de\u74b0\u5883\u3084\u5316\u5b66\u8150\u98df\u306b\u8010\u3048\u306a\u3051\u308c\u3070\u306a\u3089\u306a\u3044\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">4.3 \u30a6\u30a7\u30cf\u30fc\u51e6\u7406\u30b7\u30b9\u30c6\u30e0<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>CMP\u7814\u78e8\u30d7\u30ec\u30fc\u30c8<\/li>\n\n\n\n<li>\u30bb\u30e9\u30df\u30c3\u30af\u30a6\u30a7\u30fc\u30cf\u30ad\u30e3\u30ea\u30a2<\/li>\n\n\n\n<li>\u30ed\u30dc\u30c3\u30c8\u30cf\u30f3\u30c9\u30ea\u30f3\u30b0\u30a2\u30fc\u30e0<\/li>\n\n\n\n<li>\u30a2\u30e9\u30a4\u30e1\u30f3\u30c8\u6cbb\u5177<\/li>\n\n\n\n<li>\u771f\u7a7a\u5438\u7740\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u3053\u308c\u3089\u306e\u90e8\u54c1\u306b\u306f\u3001\u6a5f\u68b0\u7684\u7cbe\u5ea6\u3068\u8d85\u6e05\u6d44\u8868\u9762\u306e\u4e21\u65b9\u304c\u8981\u6c42\u3055\u308c\u308b\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">5.\u4e16\u754c\u306e\u7523\u696d\u6982\u6cc1<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u7cbe\u5bc6\u30bb\u30e9\u30df\u30c3\u30af\u30b9\u7523\u696d\u306f\u9ad8\u5ea6\u306b\u96c6\u4e2d\u3057\u3001\u6280\u8853\u96c6\u7d04\u7684\u3067\u3042\u308b\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u73fe\u5728\u3001\u4e16\u754c\u5e02\u5834\u3092\u652f\u914d\u3057\u3066\u3044\u308b\u306e\u306f\u3001\u4ee5\u4e0b\u306e\u4f01\u696d\u3067\u3042\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u65e5\u672c<\/li>\n\n\n\n<li>\u7c73\u56fd<\/li>\n\n\n\n<li>\u30e8\u30fc\u30ed\u30c3\u30d1<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u5927\u624b\u4f01\u696d\u306b\u306f\u3001\u7c89\u672b\u5408\u6210\u3001\u713c\u7d50\u3001\u7cbe\u5bc6\u6a5f\u68b0\u52a0\u5de5\u3001\u534a\u5c0e\u4f53\u30b0\u30ec\u30fc\u30c9\u306e\u6e05\u6d44\u5ea6\u7ba1\u7406\u3067\u5f37\u529b\u306a\u80fd\u529b\u3092\u6301\u3064\u8001\u8217\u30bb\u30e9\u30df\u30c3\u30af\u30e1\u30fc\u30ab\u30fc\u304c\u542b\u307e\u308c\u308b\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u65e5\u672c\u306f\u7cbe\u5bc6\u30bb\u30e9\u30df\u30c3\u30af\u30b9\u3001\u7279\u306b\u96fb\u5b50\u30bb\u30e9\u30df\u30c3\u30af\u30b9\u3068\u69cb\u9020\u30bb\u30e9\u30df\u30c3\u30af\u30b9\u306b\u304a\u3044\u3066\u4e16\u754c\u7684\u306a\u30ea\u30fc\u30c0\u30fc\u3067\u3042\u308a\u7d9a\u3051\u3001\u7c73\u56fd\u306f\u9ad8\u6e29\u3068\u69cb\u9020\u7528\u9014\u306b\u91cd\u70b9\u3092\u7f6e\u3044\u3066\u3044\u308b\u3002\u30e8\u30fc\u30ed\u30c3\u30d1\uff08\u7279\u306b\u30c9\u30a4\u30c4\u3068\u30d5\u30e9\u30f3\u30b9\uff09\u306f\u3001\u30a8\u30cd\u30eb\u30ae\u30fc\u3068\u822a\u7a7a\u5b87\u5b99\u30b7\u30b9\u30c6\u30e0\u7528\u306e\u9ad8\u5ea6\u306a\u69cb\u9020\u30bb\u30e9\u30df\u30c3\u30af\u30b9\u3092\u91cd\u8996\u3057\u3066\u3044\u307e\u3059\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">6.\u4e2d\u56fd\u306b\u304a\u3051\u308b\u958b\u767a\u72b6\u6cc1<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u4e2d\u56fd\u306f\u3001\u9577\u671f\u7684\u306a\u56fd\u5bb6\u7814\u7a76\u30d7\u30ed\u30b0\u30e9\u30e0\u3084\u7523\u696d\u958b\u767a\u30a4\u30cb\u30b7\u30a2\u30c6\u30a3\u30d6\u3092\u901a\u3058\u3066\u3001\u7cbe\u5bc6\u30bb\u30e9\u30df\u30c3\u30af\u6280\u8853\u3067\u5927\u304d\u306a\u9032\u6b69\u3092\u9042\u3052\u3066\u304d\u305f\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u4e3b\u306a\u696d\u7e3e\u306f\u4ee5\u4e0b\u306e\u901a\u308a\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u9ad8\u5ea6\u306a\u7c89\u672b\u8abf\u88fd\u6cd5\uff08\u56fa\u76f8\u3001\u6db2\u76f8\u3001\u6c17\u76f8\u5408\u6210\u6cd5\uff09\u306e\u958b\u767a<\/li>\n\n\n\n<li>\u5c04\u51fa\u6210\u5f62\u3084\u30c6\u30fc\u30d7\u30ad\u30e3\u30b9\u30c6\u30a3\u30f3\u30b0\u306e\u3088\u3046\u306a\u30cb\u30a2\u30cd\u30c3\u30c8\u6210\u5f62\u6280\u8853\u306e\u5fdc\u7528<\/li>\n\n\n\n<li>\u30db\u30c3\u30c8\u30d7\u30ec\u30b9\uff08HP\uff09\u3084\u30ac\u30b9\u5727\u713c\u7d50\uff08GPS\uff09\u306a\u3069\u306e\u713c\u7d50\u6280\u8853\u306e\u9032\u6b69<\/li>\n\n\n\n<li>\u5927\u578b\u7a92\u5316\u30b1\u30a4\u7d20\u713c\u7d50\u306e\u30d6\u30ec\u30fc\u30af\u30b9\u30eb\u30fc<\/li>\n\n\n\n<li>EDM\u3001\u30ec\u30fc\u30b6\u30fc\u52a0\u5de5\u3001\u8d85\u97f3\u6ce2\u52a0\u5de5\u306a\u3069\u306e\u7cbe\u5bc6\u52a0\u5de5\u6280\u8853\u306e\u63a1\u7528\u304c\u62e1\u5927<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u3053\u3046\u3057\u305f\u9032\u6b69\u306b\u3082\u304b\u304b\u308f\u3089\u305a\u3001\u30cf\u30a4\u30a8\u30f3\u30c9\u306e\u534a\u5c0e\u4f53\u30b0\u30ec\u30fc\u30c9\u30fb\u30bb\u30e9\u30df\u30c3\u30af\u30b9\u306f\u3001\u5927\u91cf\u751f\u7523\u306e\u5b89\u5b9a\u6027\u3068\u4e00\u8cab\u6027\u3068\u3044\u3046\u8ab2\u984c\u306b\u76f4\u9762\u3057\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">7.\u696d\u754c\u304c\u76f4\u9762\u3059\u308b\u4e3b\u306a\u8ab2\u984c<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u4e2d\u56fd\u306f\u4e2d\u4f4e\u7d1a\u30bb\u30e9\u30df\u30c3\u30af\u30b9\u3067\u5f37\u529b\u306a\u80fd\u529b\u3092\u958b\u767a\u3057\u3066\u304d\u305f\u304c\u3001\u3044\u304f\u3064\u304b\u306e\u30dc\u30c8\u30eb\u30cd\u30c3\u30af\u304c\u6b8b\u3063\u3066\u3044\u308b\uff1a<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">7.1 \u8f38\u5165\u9ad8\u7d1a\u7c89\u672b\u3078\u306e\u4f9d\u5b58<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u306a\u3069\u306e\u9ad8\u6027\u80fd\u30d1\u30a6\u30c0\u30fc\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u7a92\u5316\u30b1\u30a4\u7d20 (Si\u2083N\u2084)<\/li>\n\n\n\n<li>\u7a92\u5316\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\uff08AlN\uff09<\/li>\n\n\n\n<li>\u8d85\u9ad8\u7d14\u5ea6\u30a2\u30eb\u30df\u30ca<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u306f\u3001\u7279\u306b\u65e5\u672c\u3084\u30e8\u30fc\u30ed\u30c3\u30d1\u304b\u3089\u306e\u8f38\u5165\u306b\u983c\u3063\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">7.2 \u30cf\u30a4\u30a8\u30f3\u30c9\u51e6\u7406\u306e\u96e3\u3057\u3055<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u534a\u5c0e\u4f53\u30bb\u30e9\u30df\u30c3\u30af\u30b9\u306b\u306f\u305d\u308c\u304c\u5fc5\u8981\u3060\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30b5\u30d6\u30df\u30af\u30ed\u30f3\u7cbe\u5bc6\u52a0\u5de5<\/li>\n\n\n\n<li>\u8d85\u4f4e\u8868\u9762\u7c97\u3055<\/li>\n\n\n\n<li>\u6b20\u9665\u306e\u306a\u3044\u8868\u9762<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u3053\u308c\u306f\u6280\u8853\u7684\u306b\u96e3\u3057\u304f\u3001\u30b3\u30b9\u30c8\u3082\u304b\u304b\u308b\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">7.3 \u9577\u3044\u4e88\u9078\u30b5\u30a4\u30af\u30eb<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u6750\u6599\u304c\u4ed5\u69d8\u3092\u6e80\u305f\u3057\u3066\u3044\u3066\u3082\u3001\u534a\u5c0e\u4f53\u306e\u9867\u5ba2\u306f\u9577\u671f\u7684\u306a\u691c\u8a3c\u3092\u8981\u6c42\u3059\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30d7\u30e9\u30ba\u30de\u62b5\u6297\u8a66\u9a13<\/li>\n\n\n\n<li>\u71b1\u30b5\u30a4\u30af\u30eb\u4fe1\u983c\u6027<\/li>\n\n\n\n<li>\u6e05\u6d44\u5ea6\u8a3c\u660e<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u3053\u308c\u3067\u306f\u5546\u54c1\u5316\u304c\u5927\u5e45\u306b\u9045\u308c\u308b\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">8.\u696d\u754c\u52d5\u5411\u3068\u5c06\u6765\u5c55\u671b<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">8.1 \u70ad\u5316\u30b1\u30a4\u7d20\u3068\u7b2c3\u4e16\u4ee3\u534a\u5c0e\u4f53\u306e\u6025\u6210\u9577<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u96fb\u6c17\u81ea\u52d5\u8eca\u3001\u518d\u751f\u53ef\u80fd\u30a8\u30cd\u30eb\u30ae\u30fc\u3001\u30cf\u30a4\u30d1\u30ef\u30fc\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u306e\u62e1\u5927\u304c\u3001SiC\u30d9\u30fc\u30b9\u306e\u6750\u6599\u3068\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u306e\u65fa\u76db\u306a\u9700\u8981\u3092\u727d\u5f15\u3057\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">8.2 \u534a\u5c0e\u4f53\u88fd\u9020\u88c5\u7f6e\u30b5\u30d7\u30e9\u30a4\u30c1\u30a7\u30fc\u30f3\u306e\u73fe\u5730\u5316<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u56fd\u5185\u306e\u534a\u5c0e\u4f53\u88fd\u9020\u88c5\u7f6e\u30e1\u30fc\u30ab\u30fc\u304c\u6210\u9577\u3059\u308b\u306b\u3064\u308c\u3001\u7cbe\u5bc6\u30bb\u30e9\u30df\u30c3\u30af\u90e8\u54c1\u306e\u9700\u8981\u304c\u52a0\u901f\u3057\u3066\u3044\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u9759\u96fb\u30c1\u30e3\u30c3\u30af<\/li>\n\n\n\n<li>\u30d5\u30a9\u30fc\u30ab\u30b9\u30ea\u30f3\u30b0<\/li>\n\n\n\n<li>\u30bb\u30e9\u30df\u30c3\u30af\u88fd\u30ed\u30dc\u30c3\u30c8\u30a2\u30fc\u30e0<\/li>\n\n\n\n<li>\u30cf\u30a4\u30a8\u30f3\u30c9SiC\u69cb\u9020<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">8.3 \u3088\u308a\u5927\u304d\u304f\u3001\u3088\u308a\u7cbe\u5bc6\u306a\u90e8\u54c1\u3078\u306e\u79fb\u884c<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u5c06\u6765\u306e\u534a\u5c0e\u4f53\u30ce\u30fc\u30c9\u306b\u5fc5\u8981\u306a\u3082\u306e<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u3088\u308a\u5927\u304d\u306a\u30bb\u30e9\u30df\u30c3\u30af\u69cb\u9020<\/li>\n\n\n\n<li>\u9ad8\u6b21\u5143\u306e\u5b89\u5b9a\u6027<\/li>\n\n\n\n<li>\u4f4e\u71b1\u81a8\u5f35<\/li>\n\n\n\n<li>\u3088\u308a\u9ad8\u3044\u6e05\u6d44\u5ea6\u57fa\u6e96<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u3053\u308c\u306f\u30bb\u30e9\u30df\u30c3\u30af\u88fd\u9020\u3092\u3088\u308a\u9ad8\u5ea6\u306a\u6280\u8853\u3078\u3068\u62bc\u3057\u9032\u3081\u308b\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">9.\u7d50\u8ad6<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u7cbe\u5bc6\u30bb\u30e9\u30df\u30c3\u30af\u30b9\u306f\u3001\u3082\u306f\u3084\u534a\u5c0e\u4f53\u88c5\u7f6e\u306e\u5358\u306a\u308b\u88dc\u52a9\u6750\u6599\u3067\u306f\u306a\u304f\u3001\u88c5\u7f6e\u306e\u6027\u80fd\u3068\u30c1\u30c3\u30d7\u88fd\u9020\u306e\u54c1\u8cea\u3092\u76f4\u63a5\u5de6\u53f3\u3059\u308b\u57fa\u790e\u90e8\u54c1\u3067\u3059\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fb\u30b7\u30b9\u30c6\u30e0\u304b\u3089\u30d7\u30e9\u30ba\u30de\u30fb\u30a8\u30c3\u30c1\u30f3\u30b0\u30fb\u30c4\u30fc\u30eb\u306b\u81f3\u308b\u307e\u3067\u3001\u7cbe\u5bc6\u30bb\u30e9\u30df\u30c3\u30af\u306f\u3001\u534a\u5c0e\u4f53\u7523\u696d\u5168\u4f53\u3092\u53ef\u80fd\u306b\u3059\u308b\u4e0a\u3067\u3001\u9759\u304b\u3060\u304c\u91cd\u8981\u306a\u5f79\u5272\u3092\u679c\u305f\u3057\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u4e16\u754c\u306e\u534a\u5c0e\u4f53\u88fd\u9020\u304c\u9032\u5316\u3057\u7d9a\u3051\u308b\u4e2d\u3001\u7cbe\u5bc6\u30bb\u30e9\u30df\u30c3\u30af\u30b9\u306f\u3001\u6280\u8853\u9769\u65b0\u3068\u30b5\u30d7\u30e9\u30a4\u30c1\u30a7\u30fc\u30f3\u306e\u73fe\u5730\u5316\u306e\u4e21\u9762\u3067\u6a5f\u4f1a\u3092\u62e1\u5927\u3057\u306a\u304c\u3089\u3001\u6700\u3082\u6226\u7565\u7684\u306b\u91cd\u8981\u306a\u5148\u7aef\u6750\u6599\u306e\u4e00\u3064\u3067\u3042\u308a\u7d9a\u3051\u308b\u3060\u308d\u3046\u3002.<\/p>","protected":false},"excerpt":{"rendered":"<p>1. Introduction Precision ceramics refer to high-performance advanced ceramic components used in semiconductor manufacturing equipment. These components are typically designed with complex structures, ultra-high purity, and extremely tight dimensional tolerances. They play a critical role in ensuring the stability, accuracy, and reliability of semiconductor fabrication processes. With the rapid expansion of the global semiconductor industry and the continuous push toward smaller process nodes, higher integration, and more complex manufacturing environments, semiconductor equipment has evolved toward higher precision and harsher operating conditions. As a result, precision ceramic components have become indispensable \u201chidden core parts\u201d in modern semiconductor equipment. Today, precision ceramics account for approximately 16% of the value in semiconductor equipment [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":2019,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[6],"tags":[53,52,51,68,56,66,67,60,69,65,57,61,63,55,64,58,62,54,59],"class_list":["post-2018","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-applications-cases","tag-advanced-materials","tag-automation","tag-cleanroom","tag-electrostatic-chuck","tag-high-tech-factory","tag-industrial-equipment","tag-laboratory","tag-lithography-equipment","tag-metal-machinery","tag-microfabrication","tag-precision-engineering","tag-precision-manufacturing","tag-robotics","tag-semiconductor","tag-semiconductor-fabrication","tag-silicon-wafer","tag-sterile-environment","tag-vacuum-chuck","tag-wafer"],"_links":{"self":[{"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/posts\/2018","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/comments?post=2018"}],"version-history":[{"count":1,"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/posts\/2018\/revisions"}],"predecessor-version":[{"id":2020,"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/posts\/2018\/revisions\/2020"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/media\/2019"}],"wp:attachment":[{"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/media?parent=2018"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/categories?post=2018"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ja\/wp-json\/wp\/v2\/tags?post=2018"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}