{"id":2116,"date":"2026-05-12T06:50:19","date_gmt":"2026-05-12T06:50:19","guid":{"rendered":"https:\/\/www.xkh-ceramics.com\/?post_type=product&p=2116"},"modified":"2026-05-12T06:51:11","modified_gmt":"2026-05-12T06:51:11","slug":"custom-sic-ceramic-fork-arm-for-wafer-handling-optical-precision-equipment","status":"publish","type":"product","link":"https:\/\/www.xkh-ceramics.com\/hu\/product\/custom-sic-ceramic-fork-arm-for-wafer-handling-optical-precision-equipment\/","title":{"rendered":"Egyedi SiC ker\u00e1mia vill\u00e1s kar a Wafer Handling & Optikai prec\u00edzi\u00f3s berendez\u00e9sekhez"},"content":{"rendered":"

\"\"A SiC ker\u00e1mia villavill\u00e1s kar egy nagy pontoss\u00e1g\u00fa szerkezeti alkatr\u00e9sz, amelyet fejlett szinterezett szil\u00edcium-karbid (SSiC) ker\u00e1mia anyagb\u00f3l gy\u00e1rtanak. A f\u00e9lvezet\u0151-, optikai, \u0171rkutat\u00e1si \u00e9s automatiz\u00e1l\u00e1si ipar\u00e1gak sz\u00e1m\u00e1ra tervezett term\u00e9k \u00f6tv\u00f6zi a rendk\u00edv\u00fcl nagy merevs\u00e9get, a kiv\u00e1l\u00f3 h\u0151stabilit\u00e1st, a k\u00f6nny\u0171 szerkezetet \u00e9s a kiv\u00e1l\u00f3 kop\u00e1s\u00e1ll\u00f3s\u00e1got.<\/p>\n

Ezeket az egyedi tervez\u00e9s\u0171 vill\u00e1s karokat sz\u00e9les k\u00f6rben haszn\u00e1lj\u00e1k ostyakezel\u00e9shez, optikai pozicion\u00e1l\u00e1shoz, robotautomatiz\u00e1l\u00e1shoz \u00e9s prec\u00edzi\u00f3s tart\u00f3rendszerekhez, ahol a szennyez\u0151d\u00e9sek ellen\u0151rz\u00e9se, a m\u00e9retstabilit\u00e1s \u00e9s a hossz\u00fa t\u00e1v\u00fa megb\u00edzhat\u00f3s\u00e1g kritikus fontoss\u00e1g\u00fa.<\/p>\n

A hagyom\u00e1nyos f\u00e9m alkatr\u00e9szekkel \u00f6sszehasonl\u00edtva a SiC-ker\u00e1mia villavill\u00e1k jelent\u0151sen alacsonyabb h\u0151t\u00e1gul\u00e1st, kiv\u00e1l\u00f3 korr\u00f3zi\u00f3\u00e1ll\u00f3s\u00e1got \u00e9s kiv\u00e9teles merevs\u00e9g-t\u00f6meg ar\u00e1nyt biztos\u00edtanak, \u00edgy ide\u00e1lisak a k\u00f6vetkez\u0151 gener\u00e1ci\u00f3s nagy pontoss\u00e1g\u00fa berendez\u00e9sekhez.<\/p>\n

\n

F\u0151bb jellemz\u0151k \u00e9s el\u0151ny\u00f6k<\/span><\/h1>\n

1. Ultra-nagy kem\u00e9nys\u00e9g \u00e9s kop\u00e1s\u00e1ll\u00f3s\u00e1g<\/span><\/h3>\n
    \n
  • Mohs-kem\u00e9nys\u00e9g 9,3-ig<\/li>\n
  • Kiv\u00e9teles kop\u00e1s\u00e1ll\u00f3s\u00e1g \u00e9s r\u00e9szecskek\u00e9pz\u0151d\u00e9ssel szembeni ellen\u00e1ll\u00e1s<\/li>\n
  • Ide\u00e1lis tisztaszobai \u00e9s nagy ciklus\u00fa automatiz\u00e1l\u00e1si k\u00f6rnyezetekhez<\/li>\n<\/ul>\n

    2. Kiv\u00e1l\u00f3 h\u0151stabilit\u00e1s<\/span><\/h3>\n
      \n
    • Alacsony h\u0151t\u00e1gul\u00e1si egy\u00fctthat\u00f3: ~4,0 \u00d7 10-\u2076 \/K<\/li>\n
    • Fenntartja a m\u00e9retpontoss\u00e1got h\u0151m\u00e9rs\u00e9klet-ingadoz\u00e1s mellett is<\/li>\n
    • Alkalmas stabil igaz\u00edt\u00e1st ig\u00e9nyl\u0151 f\u00e9lvezet\u0151 \u00e9s optikai rendszerekhez<\/li>\n<\/ul>\n

      3. Kiv\u00e1l\u00f3 h\u0151vezet\u0151 k\u00e9pess\u00e9g<\/span><\/h3>\n
        \n
      • H\u0151vezet\u0151 k\u00e9pess\u00e9g: 120-180 W\/(m-K)<\/li>\n
      • A hat\u00e9kony h\u0151elvezet\u00e9s cs\u00f6kkenti a h\u0151terhel\u00e9s felhalmoz\u00f3d\u00e1s\u00e1t<\/li>\n
      • Jav\u00edtja a rendszer megb\u00edzhat\u00f3s\u00e1g\u00e1t folyamatos m\u0171k\u00f6d\u00e9s k\u00f6zben<\/li>\n<\/ul>\n

        4. K\u00f6nny\u0171 s\u00faly nagy merevs\u00e9ggel<\/span><\/h3>\n
          \n
        • S\u0171r\u0171s\u00e9ge kb. 3,1 g\/cm\u00b3<\/li>\n
        • Young modulus 450 GPa-ig<\/li>\n
        • Kiv\u00e1l\u00f3 merevs\u00e9get biztos\u00edt, mik\u00f6zben minimaliz\u00e1lja a mozg\u00f3 t\u00f6meget<\/li>\n<\/ul>\n

          5. K\u00e9miai \u00e9s korr\u00f3zi\u00f3\u00e1ll\u00f3s\u00e1g<\/span><\/h3>\n
            \n
          • Ellen\u00e1ll a savaknak, l\u00fagoknak, old\u00f3szereknek \u00e9s technol\u00f3giai vegyszereknek.<\/li>\n
          • Kompatibilis a zord f\u00e9lvezet\u0151gy\u00e1rt\u00e1si k\u00f6rnyezetekkel<\/li>\n<\/ul>\n

            6. Tisztaszoba-kompatibilis fel\u00fclet<\/span><\/h3>\n
              \n
            • Alacsony r\u00e9szecskek\u00e9pz\u0151d\u00e9s<\/li>\n
            • V\u00e1laszthat\u00f3 ultrapol\u00edrozott fel\u00fcletek (<0,02 \u03bcm Ra)<\/li>\n
            • Alkalmas 10-1000 oszt\u00e1ly\u00fa tisztat\u00e9ri alkalmaz\u00e1sokhoz<\/li>\n<\/ul>\n
              \n

              M\u0171szaki specifik\u00e1ci\u00f3k<\/span><\/h1>\n
              \n
              \n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
              Ingatlan<\/th>\nTipikus \u00e9rt\u00e9k<\/th>\n<\/tr>\n<\/thead>\n
              Anyag<\/td>\nSzinterezett szil\u00edciumkarbid (SSiC)<\/td>\n<\/tr>\n
              S\u0171r\u0171s\u00e9g<\/td>\n3,10 - 3,15 g\/cm\u00b3<\/td>\n<\/tr>\n
              Kem\u00e9nys\u00e9g<\/td>\n\u22652200 HV0.5<\/td>\n<\/tr>\n
              Hajl\u00edt\u00f3szil\u00e1rds\u00e1g<\/td>\n\u2265400 MPa<\/td>\n<\/tr>\n
              Nyom\u00f3szil\u00e1rds\u00e1g<\/td>\n\u22652000 MPa<\/td>\n<\/tr>\n
              Young modulus<\/td>\n400 - 450 GPa<\/td>\n<\/tr>\n
              H\u0151vezet\u0151 k\u00e9pess\u00e9g<\/td>\n120 - 180 W\/(m-K)<\/td>\n<\/tr>\n
              H\u0151t\u00e1gul\u00e1si egy\u00fctthat\u00f3<\/td>\n~4.0 \u00d7 10-\u2076 \/K<\/td>\n<\/tr>\n
              Maxim\u00e1lis \u00fczemi h\u0151m\u00e9rs\u00e9klet<\/td>\n1400 - 1600\u00b0C<\/td>\n<\/tr>\n
              Elektromos ellen\u00e1ll\u00e1s<\/td>\n>10\u00b9\u2074 \u03a9-cm<\/td>\n<\/tr>\n
              Fel\u00fcleti \u00e9rdess\u00e9g<\/td>\n<0,02 \u03bcm Ra (opcion\u00e1lis)<\/td>\n<\/tr>\n
              Tisztat\u00e9r kompatibilit\u00e1s<\/td>\n10. oszt\u00e1ly - 1000<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n
              \n

              Tipikus alkalmaz\u00e1sok<\/span><\/h1>\n

              F\u00e9lvezet\u0151 osty\u00e1k kezel\u00e9se<\/span><\/h2>\n

              A SiC ker\u00e1mia vill\u00e1skarokat sz\u00e9les k\u00f6rben haszn\u00e1lj\u00e1k a f\u00e9lvezet\u0151 automatiz\u00e1l\u00e1si rendszerekben:<\/p>\n

                \n
              • Wafer transzfer robotok<\/li>\n
              • EFEM \u00e9s FOUP bet\u00f6lt\u0151portok<\/li>\n
              • V\u00e1kuumos pick-and-place rendszerek<\/li>\n
              • 6\u2033, 8\u2033 \u00e9s 12\u2033 ostyakezel\u00e9s<\/li>\n<\/ul>\n

                Alacsony r\u00e9szecske-k\u00e9pz\u0151d\u00e9s\u00fck \u00e9s vegyi ellen\u00e1ll\u00e1suk seg\u00edt fenntartani a folyamat nagyfok\u00fa tisztas\u00e1g\u00e1t \u00e9s az osty\u00e1k hozam\u00e1t.<\/p>\n

                \n

                \"\"Optikai \u00e9s fotonikai berendez\u00e9sek<\/span><\/h2>\n

                A prec\u00edzi\u00f3s optikai rendszerekben a SiC vill\u00e1s karok biztos\u00edtj\u00e1k:<\/p>\n

                  \n
                • T\u00fckr\u00f6k \u00e9s lencs\u00e9k stabil al\u00e1t\u00e1maszt\u00e1sa<\/li>\n
                • H\u0151deform\u00e1ci\u00f3-szab\u00e1lyoz\u00e1s<\/li>\n
                • K\u00f6nny\u0171, nagy merevs\u00e9g\u0171 szerkezetek<\/li>\n<\/ul>\n

                  Tipikus alkalmaz\u00e1sok:<\/p>\n

                    \n
                  • Interferom\u00e9terek<\/li>\n
                  • L\u00e9zerszkennel\u0151 rendszerek<\/li>\n
                  • Prec\u00edzi\u00f3s optikai igaz\u00edt\u00f3 eszk\u00f6z\u00f6k<\/li>\n
                  • \u0170rteleszk\u00f3p szerkezetek<\/li>\n<\/ul>\n
                    \n

                    Robotika \u00e9s automatiz\u00e1l\u00e1s<\/span><\/h2>\n

                    Robotikus v\u00e9gberendez\u00e9sekk\u00e9nt \u00e9s prec\u00edzi\u00f3s poz\u00edcion\u00e1l\u00f3 karokk\u00e9nt haszn\u00e1lj\u00e1k a k\u00f6vetkez\u0151kben:<\/p>\n

                      \n
                    • Tisztaszoba automatiz\u00e1l\u00e1s<\/li>\n
                    • V\u00e1kuumkezel\u0151 rendszerek<\/li>\n
                    • Nagy sebess\u00e9g\u0171 prec\u00edzi\u00f3s \u00f6sszeszerel\u0151 berendez\u00e9s<\/li>\n<\/ul>\n

                      El\u0151nyei k\u00f6z\u00e9 tartozik a hossz\u00fa \u00e9lettartam, az alacsony ki\u00e1raml\u00e1s \u00e9s az elektromos szigetel\u00e9s.<\/p>\n

                      \n

                      Rep\u00fcl\u0151g\u00e9pipar \u00e9s v\u00e9delem<\/span><\/h2>\n

                      A SiC ker\u00e1mia villaszerkezetek ide\u00e1lisak a rep\u00fcl\u0151g\u00e9pipari alkalmaz\u00e1sokhoz a k\u00f6vetkez\u0151k miatt:<\/p>\n

                        \n
                      • Nagy merevs\u00e9g-s\u00faly ar\u00e1ny<\/li>\n
                      • H\u0151sokk\u00e1ll\u00f3s\u00e1g<\/li>\n
                      • M\u00e9retstabilit\u00e1s rezg\u00e9s \u00e9s sug\u00e1rterhel\u00e9s eset\u00e9n<\/li>\n<\/ul>\n

                        Az alkalmaz\u00e1sok k\u00f6z\u00e9 tartoznak az optikai tart\u00f3szerkezetek, a hasznos teher tart\u00f3szerkezetek \u00e9s a prec\u00edzi\u00f3s mozg\u00e1srendszerek.<\/p>\n

                        \n

                        \"\"Gy\u00e1rt\u00e1si folyamat<\/span><\/h1>\n

                        A SiC-ker\u00e1mia villavill\u00e1k gy\u00e1rt\u00e1sa fejlett ker\u00e1miafeldolgoz\u00e1si technol\u00f3gi\u00e1kat ig\u00e9nyel:<\/p>\n

                          \n
                        1. Nagy tisztas\u00e1g\u00fa por el\u0151\u00e1ll\u00edt\u00e1sa<\/li>\n
                        2. Prec\u00edzi\u00f3s alak\u00edt\u00e1s (izosztatikus pr\u00e9sel\u00e9s \/ \u00f6nt\u00e9s \/ sz\u00e1raz pr\u00e9sel\u00e9s)<\/li>\n
                        3. Magas h\u0151m\u00e9rs\u00e9klet\u0171 szinterez\u00e9s<\/li>\n
                        4. CNC-csiszol\u00e1s \u00e9s l\u00e9zeres megmunk\u00e1l\u00e1s<\/li>\n
                        5. Fel\u00fcletpol\u00edroz\u00e1s \u00e9s prec\u00edzi\u00f3s ut\u00f3munka<\/li>\n
                        6. M\u00e9retellen\u0151rz\u00e9s \u00e9s tisztat\u00e9ri csomagol\u00e1s<\/li>\n<\/ol>\n

                          Ez az elj\u00e1r\u00e1s kiv\u00e1l\u00f3 m\u00e9retbeli konzisztenci\u00e1t \u00e9s rendk\u00edv\u00fcl magas szerkezeti megb\u00edzhat\u00f3s\u00e1got biztos\u00edt.<\/p>\n

                          \n

                          Testreszab\u00e1si lehet\u0151s\u00e9gek<\/span><\/h1>\n

                          Mint prec\u00edzi\u00f3s, nem szabv\u00e1nyos ker\u00e1mia alkatr\u00e9sz, a SiC vill\u00e1s kar teljes m\u00e9rt\u00e9kben testre szabhat\u00f3 az \u00fcgyf\u00e9l rajzai \u00e9s alkalmaz\u00e1si k\u00f6vetelm\u00e9nyei szerint.<\/p>\n

                          A testreszabhat\u00f3 opci\u00f3k k\u00f6z\u00e9 tartoznak:<\/p>\n

                            \n
                          • Teljes m\u00e9retek \u00e9s vastags\u00e1g<\/li>\n
                          • Villanyny\u00edl\u00e1s geometria<\/li>\n
                          • Szerel\u0151furatok \u00e9s -r\u00e9sek<\/li>\n
                          • Fel\u00fclet \u00e9rdess\u00e9ge \u00e9s pol\u00edroz\u00e1si fokozat<\/li>\n
                          • Kompatibilis ostyam\u00e9ret (6\u2033, 8\u2033, 12\u2033)<\/li>\n
                          • Speci\u00e1lis bevonatok vagy l\u00e9zeres jel\u00f6l\u00e9s<\/li>\n<\/ul>\n

                            A m\u00e9rn\u00f6ki t\u00e1mogat\u00f3 szolg\u00e1ltat\u00e1sok k\u00f6z\u00e9 tartoznak:<\/p>\n

                              \n
                            • Rajzol\u00e1s fel\u00fclvizsg\u00e1lata<\/li>\n
                            • FEM szerkezeti elemz\u00e9s<\/li>\n
                            • Protot\u00edpus fejleszt\u00e9s<\/li>\n
                            • Alkalmaz\u00e1s optimaliz\u00e1l\u00e1s<\/li>\n<\/ul>\n
                              \n

                              Mi\u00e9rt v\u00e1lassza a SiC ker\u00e1mia villasz\u00e1rakat?<\/span><\/h1>\n

                              Az alum\u00edniummal, rozsdamentes ac\u00e9llal vagy hagyom\u00e1nyos ker\u00e1mi\u00e1val \u00f6sszehasonl\u00edtva a SiC ker\u00e1mia villavill\u00e1k:<\/p>\n

                                \n
                              • Nagyobb merevs\u00e9g<\/li>\n
                              • Alacsonyabb termikus deform\u00e1ci\u00f3<\/li>\n
                              • Jobb kop\u00e1s\u00e1ll\u00f3s\u00e1g<\/li>\n
                              • Kiemelked\u0151 tisztat\u00e9ri teljes\u00edtm\u00e9ny<\/li>\n
                              • Hosszabb m\u0171k\u00f6d\u00e9si \u00e9lettartam<\/li>\n<\/ul>\n

                                Ide\u00e1lis megold\u00e1st jelentenek a fejlett f\u00e9lvezet\u0151-, optikai \u00e9s prec\u00edzi\u00f3s automatiz\u00e1l\u00e1si ipar\u00e1gak sz\u00e1m\u00e1ra, amelyek rendk\u00edv\u00fcl nagy megb\u00edzhat\u00f3s\u00e1got \u00e9s stabilit\u00e1st ig\u00e9nyelnek.<\/p>\n

                                \n

                                GYIK<\/span><\/h1>\n

                                1. k\u00e9rd\u00e9s: Mi\u00e9rt el\u0151ny\u00f6sek a SiC ker\u00e1mia vill\u00e1skarok a szeletkezel\u0151 rendszerekhez?<\/span><\/h3>\n

                                A SiC-ker\u00e1mia vill\u00e1skarok rendk\u00edv\u00fcl alacsony r\u00e9szecske-k\u00e9pz\u0151d\u00e9ssel rendelkeznek, kiv\u00e1l\u00f3 h\u0151stabilit\u00e1st biztos\u00edtanak, \u00e9s ellen\u00e1llnak a k\u00e9miai korr\u00f3zi\u00f3nak, \u00edgy ide\u00e1lisak a tisztat\u00e9ri f\u00e9lvezet\u0151 ostyatranszfer alkalmaz\u00e1sokhoz.<\/p>\n

                                \n

                                2. k\u00e9rd\u00e9s: A SiC vill\u00e1s kar testre szabhat\u00f3 a k\u00fcl\u00f6nb\u00f6z\u0151 m\u00e9ret\u0171 osty\u00e1khoz?<\/span><\/h3>\n

                                Igen. A vill\u00e1s kar testre szabhat\u00f3 6, 8 \u00e9s 12 h\u00fcvelykes osty\u00e1khoz, bele\u00e9rtve a m\u00e9reteket, a ny\u00edl\u00e1sok kialak\u00edt\u00e1s\u00e1t, a r\u00f6gz\u00edt\u0151szerkezeteket \u00e9s a fel\u00fcletkezel\u00e9seket.<\/p>\n

                                \n

                                3. k\u00e9rd\u00e9s: Milyen el\u0151ny\u00f6ket k\u00edn\u00e1l a SiC-ker\u00e1mia a f\u00e9mvill\u00e1s karokkal szemben?<\/span><\/h3>\n

                                A f\u00e9mes anyagokkal \u00f6sszehasonl\u00edtva a SiC-ker\u00e1mia nagyobb merevs\u00e9get, kisebb h\u0151t\u00e1gul\u00e1st, jobb korr\u00f3zi\u00f3\u00e1ll\u00f3s\u00e1got, kisebb s\u00falyt \u00e9s jobb m\u00e9retstabilit\u00e1st biztos\u00edt sz\u00e9ls\u0151s\u00e9ges \u00fczemi k\u00f6r\u00fclm\u00e9nyek k\u00f6z\u00f6tt.<\/p>","protected":false},"excerpt":{"rendered":"

                                A SiC ker\u00e1mia villavill\u00e1s kar egy nagy pontoss\u00e1g\u00fa szerkezeti alkatr\u00e9sz, amelyet fejlett szinterezett szil\u00edcium-karbid (SSiC) ker\u00e1mia anyagb\u00f3l gy\u00e1rtanak. A f\u00e9lvezet\u0151-, optikai, \u0171rkutat\u00e1si \u00e9s automatiz\u00e1l\u00e1si ipar\u00e1gak sz\u00e1m\u00e1ra tervezett term\u00e9k \u00f6tv\u00f6zi a rendk\u00edv\u00fcl nagy merevs\u00e9get, a kiv\u00e1l\u00f3 h\u0151stabilit\u00e1st, a k\u00f6nny\u0171 szerkezetet \u00e9s a kiv\u00e1l\u00f3 kop\u00e1s\u00e1ll\u00f3s\u00e1got.<\/p>","protected":false},"featured_media":2117,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center 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