{"id":2100,"date":"2026-05-12T03:59:56","date_gmt":"2026-05-12T03:59:56","guid":{"rendered":"https:\/\/www.xkh-ceramics.com\/?post_type=product&#038;p=2100"},"modified":"2026-05-12T03:59:56","modified_gmt":"2026-05-12T03:59:56","slug":"customized-sic-ceramic-end-effector-for-wafer-handling","status":"publish","type":"product","link":"https:\/\/www.xkh-ceramics.com\/hu\/product\/customized-sic-ceramic-end-effector-for-wafer-handling\/","title":{"rendered":"Testreszabott SiC ker\u00e1mia v\u00e9gfokoz\u00f3 a Wafer kezel\u00e9shez"},"content":{"rendered":"<p data-start=\"737\" data-end=\"989\"><img fetchpriority=\"high\" decoding=\"async\" class=\"size-medium wp-image-2101 alignright\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-3-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-3-300x300.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-3-150x150.png 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-3-768x768.png 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-3-12x12.png 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-3-600x600.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-3-100x100.png 100w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-3.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>A szil\u00edcium-karbid (SiC) ker\u00e1mia v\u00e9gfokoz\u00f3 egy nagy pontoss\u00e1g\u00fa ostyakezel\u0151 alkatr\u00e9sz, amelyet f\u00e9lvezet\u0151 automatiz\u00e1l\u00e1si rendszerekhez terveztek, bele\u00e9rtve az ostyatov\u00e1bb\u00edt\u00f3 robotokat, AMHS rendszereket, EUV litogr\u00e1fiai berendez\u00e9seket \u00e9s magas h\u0151m\u00e9rs\u00e9klet\u0171 technol\u00f3giai eszk\u00f6z\u00f6ket.<\/p>\n<p data-start=\"991\" data-end=\"1308\">A nagy tisztas\u00e1g\u00fa CVD SiC-b\u0151l vagy mesters\u00e9ges SSiC-b\u0151l k\u00e9sz\u00fclt v\u00e9ghat\u00e1s\u00fa eszk\u00f6z kiv\u00e9teles merevs\u00e9get, rendk\u00edv\u00fcl alacsony r\u00e9szecskek\u00e9pz\u0151d\u00e9st \u00e9s kiemelked\u0151 termikus \u00e9s k\u00e9miai stabilit\u00e1st biztos\u00edt. Sz\u00e9les k\u00f6rben haszn\u00e1lj\u00e1k a 300 mm-es \u00e9s a fejlett node-os f\u00e9lvezet\u0151gy\u00e1rt\u00f3 \u00fczemekben, ahol a szennyez\u0151d\u00e9sek ellen\u0151rz\u00e9se \u00e9s a pozicion\u00e1l\u00e1si pontoss\u00e1g kritikus fontoss\u00e1g\u00fa.<\/p>\n<p data-start=\"1310\" data-end=\"1470\">A hagyom\u00e1nyos alum\u00ednium vagy kvarc v\u00e9ghat\u00e1sokhoz k\u00e9pest a SiC-ker\u00e1mia megold\u00e1sok jelent\u0151sen jav\u00edtj\u00e1k a folyamat stabilit\u00e1s\u00e1t, a waferek biztons\u00e1g\u00e1t \u00e9s a berendez\u00e9sek \u00e9lettartam\u00e1t.<\/p>\n<hr data-start=\"1472\" data-end=\"1475\" \/>\n<h2 data-section-id=\"ruuu6i\" data-start=\"1477\" data-end=\"1494\">Legfontosabb el\u0151ny\u00f6k<\/h2>\n<h3 data-section-id=\"1igp1it\" data-start=\"1496\" data-end=\"1532\">Ultra-alacsony r\u00e9szecskeszennyez\u00e9s<\/h3>\n<ul data-start=\"1533\" data-end=\"1664\">\n<li data-section-id=\"1lx1qmw\" data-start=\"1533\" data-end=\"1587\">R\u00e9szecske gener\u00e1l\u00e1s: &lt;cm\u00b2 (SEMI F57 szabv\u00e1nynak megfelel\u0151)<\/li>\n<li data-section-id=\"8gkyog\" data-start=\"1588\" data-end=\"1618\">Nincs f\u00e9mion-szennyez\u00e9s<\/li>\n<li data-section-id=\"m28nyw\" data-start=\"1619\" data-end=\"1664\">Ide\u00e1lis EUV \u00e9s fejlett csom\u00f3ponti folyamatokhoz<\/li>\n<\/ul>\n<hr data-start=\"1666\" data-end=\"1669\" \/>\n<h3 data-section-id=\"nha58o\" data-start=\"1671\" data-end=\"1710\">Nagy merevs\u00e9g \u00e9s prec\u00edzi\u00f3s stabilit\u00e1s<\/h3>\n<ul data-start=\"1711\" data-end=\"1837\">\n<li data-section-id=\"n58wtx\" data-start=\"1711\" data-end=\"1740\">Young modulus: ~420 GPa<\/li>\n<li data-section-id=\"wiw01d\" data-start=\"1741\" data-end=\"1790\">Megakad\u00e1lyozza a rezg\u00e9s okozta f\u00e9lre\u00e1ll\u00e1st a szeleteken<\/li>\n<li data-section-id=\"kx1hzh\" data-start=\"1791\" data-end=\"1837\">Stabil, nagy sebess\u00e9g\u0171 robottranszfert biztos\u00edt<\/li>\n<\/ul>\n<hr data-start=\"1839\" data-end=\"1842\" \/>\n<h3 data-section-id=\"2ge170\" data-start=\"1844\" data-end=\"1875\">Kiv\u00e1l\u00f3 h\u0151stabilit\u00e1s<\/h3>\n<ul data-start=\"1876\" data-end=\"2015\">\n<li data-section-id=\"ibg0yp\" data-start=\"1876\" data-end=\"1927\">\u00dczemi h\u0151m\u00e9rs\u00e9klet: 1600\u00b0C-ig (oxid\u00e1l\u00f3)<\/li>\n<li data-section-id=\"1e7mmjn\" data-start=\"1928\" data-end=\"1963\">1950\u00b0C-ig (inert atmoszf\u00e9ra)<\/li>\n<li data-section-id=\"j5ees9\" data-start=\"1964\" data-end=\"2015\">Alkalmas sz\u00e9ls\u0151s\u00e9ges f\u00e9lvezet\u0151 k\u00f6rnyezethez<\/li>\n<\/ul>\n<hr data-start=\"2017\" data-end=\"2020\" \/>\n<h3 data-section-id=\"1twxua8\" data-start=\"2022\" data-end=\"2063\">Kiv\u00e1l\u00f3 vegyszer- \u00e9s plazma\u00e1ll\u00f3s\u00e1g<\/h3>\n<ul data-start=\"2064\" data-end=\"2212\">\n<li data-section-id=\"x6lsw\" data-start=\"2064\" data-end=\"2120\">Ellen\u00e1ll savaknak, l\u00fagoknak \u00e9s plazmak\u00f6rnyezetnek<\/li>\n<li data-section-id=\"1c1d6qm\" data-start=\"2121\" data-end=\"2169\">Nincs korr\u00f3zi\u00f3 a CVD \/ PVD \/ marat\u00e1si kamr\u00e1kban<\/li>\n<li data-section-id=\"1o7zcce\" data-start=\"2170\" data-end=\"2212\">Stabil SiH\u2084, NH\u2083, HCl technol\u00f3giai g\u00e1zokban<\/li>\n<\/ul>\n<hr data-start=\"2214\" data-end=\"2217\" \/>\n<h3 data-section-id=\"14bamzt\" data-start=\"2219\" data-end=\"2252\">Kop\u00e1smentes \u00e9s hossz\u00fa \u00e9lettartam<\/h3>\n<ul data-start=\"2253\" data-end=\"2380\">\n<li data-section-id=\"10g9b8f\" data-start=\"2253\" data-end=\"2283\">Vickers-kem\u00e9nys\u00e9g: ~2800 HV<\/li>\n<li data-section-id=\"14dvdy4\" data-start=\"2284\" data-end=\"2335\">Nincs r\u00e9szecskekidob\u00f3d\u00e1s hossz\u00fa t\u00e1v\u00fa m\u0171k\u00f6d\u00e9s sor\u00e1n<\/li>\n<li data-section-id=\"12rqc97\" data-start=\"2336\" data-end=\"2380\">Kiv\u00e1l\u00f3 fel\u00fcleti tart\u00f3ss\u00e1g (Ra &lt; 0,2 \u03bcm)<\/li>\n<\/ul>\n<hr data-start=\"2382\" data-end=\"2385\" \/>\n<h2 data-section-id=\"1xqplm3\" data-start=\"2387\" data-end=\"2418\">Szerkezeti \u00e9s tervez\u00e9si jellemz\u0151k<\/h2>\n<h3 data-section-id=\"1nh5g76\" data-start=\"2420\" data-end=\"2457\">Prec\u00edzi\u00f3s ostyakezel\u00e9si geometria<\/h3>\n<p data-start=\"2458\" data-end=\"2467\">T\u00e1mogatja:<\/p>\n<ul data-start=\"2468\" data-end=\"2596\">\n<li data-section-id=\"15tpg53\" data-start=\"2468\" data-end=\"2508\">150mm \/ 200mm \/ 300mm \/ 450mm-es osty\u00e1k<\/li>\n<li data-section-id=\"1rnwp5m\" data-start=\"2509\" data-end=\"2563\">\u00c9lmegfog\u00e1s \/ bev\u00e1g\u00e1s igaz\u00edt\u00e1s \/ lapos al\u00e1t\u00e1maszt\u00e1si kialak\u00edt\u00e1sok<\/li>\n<li data-section-id=\"qm27un\" data-start=\"2564\" data-end=\"2596\">Egyedi robotkar integr\u00e1ci\u00f3<\/li>\n<\/ul>\n<hr data-start=\"2598\" data-end=\"2601\" \/>\n<h3 data-section-id=\"1yw23gm\" data-start=\"2603\" data-end=\"2643\">Nagy merevs\u00e9g\u0171 k\u00f6nny\u0171szerkezetes szerkezet<\/h3>\n<ul data-start=\"2644\" data-end=\"2768\">\n<li data-section-id=\"tt3pyh\" data-start=\"2644\" data-end=\"2677\">Nagy merevs\u00e9g-t\u00f6meg ar\u00e1ny<\/li>\n<li data-section-id=\"1sb17em\" data-start=\"2678\" data-end=\"2721\">Alkalmas nagy sebess\u00e9g\u0171 robotrendszerekhez<\/li>\n<li data-section-id=\"1j6yie2\" data-start=\"2722\" data-end=\"2768\">Minim\u00e1lja a dinamikus elhajl\u00e1st mozg\u00e1s k\u00f6zben<\/li>\n<\/ul>\n<hr data-start=\"2770\" data-end=\"2773\" \/>\n<h3 data-section-id=\"97w9la\" data-start=\"2775\" data-end=\"2809\">Ultratiszta fel\u00fcletkezel\u00e9s<\/h3>\n<ul data-start=\"2810\" data-end=\"2905\">\n<li data-section-id=\"1lu1i7j\" data-start=\"2810\" data-end=\"2844\">Prec\u00edzi\u00f3s csiszol\u00e1s \u00e9s pol\u00edroz\u00e1s<\/li>\n<li data-section-id=\"1amctgl\" data-start=\"2845\" data-end=\"2870\">Alacsony fel\u00fcleti \u00e9rdess\u00e9g<\/li>\n<li data-section-id=\"1js4nxo\" data-start=\"2871\" data-end=\"2905\">Tisztaszoba-kompatibilis szerkezet<\/li>\n<\/ul>\n<hr data-start=\"2907\" data-end=\"2910\" \/>\n<h3 data-section-id=\"50i47d\" data-start=\"2912\" data-end=\"2944\">Egyedi m\u00e9rn\u00f6ki interf\u00e9sz<\/h3>\n<ul data-start=\"2945\" data-end=\"3063\">\n<li data-section-id=\"1dle0c1\" data-start=\"2945\" data-end=\"2981\">Robotkar szerel\u00e9si kompatibilit\u00e1s<\/li>\n<li data-section-id=\"19fhsyz\" data-start=\"2982\" data-end=\"3018\">OEM integr\u00e1ci\u00f3 az AMHS rendszerekhez<\/li>\n<li data-section-id=\"3wahd3\" data-start=\"3019\" data-end=\"3063\">Egyedi furatpoz\u00edci\u00f3k \u00e9s r\u00f6gz\u00edt\u0151elemek kialak\u00edt\u00e1sa<\/li>\n<\/ul>\n<hr data-start=\"3065\" data-end=\"3068\" \/>\n<h2 data-section-id=\"rb24ym\" data-start=\"3070\" data-end=\"3089\">Anyagi lehet\u0151s\u00e9gek<\/h2>\n<h3 data-section-id=\"87v3o9\" data-start=\"3091\" data-end=\"3124\">CVD szil\u00edcium-karbid (CVD SiC)<\/h3>\n<ul data-start=\"3125\" data-end=\"3232\">\n<li data-section-id=\"1qjlbs6\" data-start=\"3125\" data-end=\"3146\">Ultra-nagy tisztas\u00e1g\u00fa<\/li>\n<li data-section-id=\"1856ohe\" data-start=\"3147\" data-end=\"3198\">A legjobb az EUV \/ fejlett f\u00e9lvezet\u0151 elj\u00e1r\u00e1sokhoz<\/li>\n<li data-section-id=\"1lwpzbt\" data-start=\"3199\" data-end=\"3232\">Rendk\u00edv\u00fcl alacsony szennyezetts\u00e9gi szint<\/li>\n<\/ul>\n<hr data-start=\"3234\" data-end=\"3237\" \/>\n<h3 data-section-id=\"gwj4n0\" data-start=\"3239\" data-end=\"3274\">Szinterezett szil\u00edciumkarbid (SSiC)<\/h3>\n<ul data-start=\"3275\" data-end=\"3402\">\n<li data-section-id=\"1hi8oju\" data-start=\"3275\" data-end=\"3312\">Nagy szil\u00e1rds\u00e1g \u00e9s kop\u00e1s\u00e1ll\u00f3s\u00e1g<\/li>\n<li data-section-id=\"1rnk9x7\" data-start=\"3313\" data-end=\"3363\">Alkalmas ipari ostyakezel\u0151 rendszerekhez<\/li>\n<li data-section-id=\"67fp04\" data-start=\"3364\" data-end=\"3402\">Kiv\u00e1l\u00f3 \u00e1r-\u00e9rt\u00e9k ar\u00e1ny<\/li>\n<\/ul>\n<hr data-start=\"3404\" data-end=\"3407\" \/>\n<h2 data-section-id=\"1cgu054\" data-start=\"3409\" data-end=\"3436\">M\u0171szaki specifik\u00e1ci\u00f3k<\/h2>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"3438\" data-end=\"3888\">\n<thead data-start=\"3438\" data-end=\"3462\">\n<tr data-start=\"3438\" data-end=\"3462\">\n<th class=\"last:pe-10\" data-start=\"3438\" data-end=\"3445\" data-col-size=\"sm\">T\u00e9tel<\/th>\n<th class=\"last:pe-10\" data-start=\"3445\" data-end=\"3462\" data-col-size=\"sm\">Specifik\u00e1ci\u00f3<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"3487\" data-end=\"3888\">\n<tr data-start=\"3487\" data-end=\"3516\">\n<td data-start=\"3487\" data-end=\"3498\" data-col-size=\"sm\">Anyag<\/td>\n<td data-col-size=\"sm\" data-start=\"3498\" data-end=\"3516\">CVD SiC \/ SSiC<\/td>\n<\/tr>\n<tr data-start=\"3517\" data-end=\"3536\">\n<td data-start=\"3517\" data-end=\"3526\" data-col-size=\"sm\">Tisztas\u00e1g<\/td>\n<td data-start=\"3526\" data-end=\"3536\" data-col-size=\"sm\">&gt;99,5%<\/td>\n<\/tr>\n<tr data-start=\"3537\" data-end=\"3561\">\n<td data-start=\"3537\" data-end=\"3550\" data-col-size=\"sm\">Szemcsem\u00e9ret<\/td>\n<td data-col-size=\"sm\" data-start=\"3550\" data-end=\"3561\">4-10 \u03bcm<\/td>\n<\/tr>\n<tr data-start=\"3562\" data-end=\"3587\">\n<td data-start=\"3562\" data-end=\"3572\" data-col-size=\"sm\">S\u0171r\u0171s\u00e9g<\/td>\n<td data-col-size=\"sm\" data-start=\"3572\" data-end=\"3587\">&gt;3,14 g\/cm\u00b3<\/td>\n<\/tr>\n<tr data-start=\"3588\" data-end=\"3611\">\n<td data-start=\"3588\" data-end=\"3599\" data-col-size=\"sm\">Kem\u00e9nys\u00e9g<\/td>\n<td data-col-size=\"sm\" data-start=\"3599\" data-end=\"3611\">~2800 HV<\/td>\n<\/tr>\n<tr data-start=\"3612\" data-end=\"3643\">\n<td data-start=\"3612\" data-end=\"3632\" data-col-size=\"sm\">Hajl\u00edt\u00f3szil\u00e1rds\u00e1g<\/td>\n<td data-col-size=\"sm\" data-start=\"3632\" data-end=\"3643\">450 MPa<\/td>\n<\/tr>\n<tr data-start=\"3644\" data-end=\"3673\">\n<td data-start=\"3644\" data-end=\"3662\" data-col-size=\"sm\">Rugalmass\u00e1gi modulus<\/td>\n<td data-col-size=\"sm\" data-start=\"3662\" data-end=\"3673\">420 GPa<\/td>\n<\/tr>\n<tr data-start=\"3674\" data-end=\"3710\">\n<td data-start=\"3674\" data-end=\"3697\" data-col-size=\"sm\">H\u0151vezet\u0151 k\u00e9pess\u00e9g<\/td>\n<td data-col-size=\"sm\" data-start=\"3697\" data-end=\"3710\">160 W\/m-K<\/td>\n<\/tr>\n<tr data-start=\"3711\" data-end=\"3768\">\n<td data-start=\"3711\" data-end=\"3729\" data-col-size=\"sm\">Maxim\u00e1lis h\u0151m\u00e9rs\u00e9klet<\/td>\n<td data-col-size=\"sm\" data-start=\"3729\" data-end=\"3768\">1600\u00b0C (oxid\u00e1ci\u00f3) \/ 1950\u00b0C (inert)<\/td>\n<\/tr>\n<tr data-start=\"3769\" data-end=\"3810\">\n<td data-start=\"3769\" data-end=\"3794\" data-col-size=\"sm\">Elektromos ellen\u00e1ll\u00e1s<\/td>\n<td data-col-size=\"sm\" data-start=\"3794\" data-end=\"3810\">10\u2076-10\u2078 \u03a9-cm<\/td>\n<\/tr>\n<tr data-start=\"3811\" data-end=\"3851\">\n<td data-start=\"3811\" data-end=\"3828\" data-col-size=\"sm\">Fel\u00fcletkezel\u00e9s<\/td>\n<td data-col-size=\"sm\" data-start=\"3828\" data-end=\"3851\">Ultra-finom csiszolt<\/td>\n<\/tr>\n<tr data-start=\"3852\" data-end=\"3888\">\n<td data-start=\"3852\" data-end=\"3859\" data-col-size=\"sm\">M\u00e9ret<\/td>\n<td data-start=\"3859\" data-end=\"3888\" data-col-size=\"sm\">Egyedi (150-450 mm-es osty\u00e1k)<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"3890\" data-end=\"3893\" \/>\n<h2 data-section-id=\"mu966k\" data-start=\"3895\" data-end=\"3910\">Alkalmaz\u00e1sok<\/h2>\n<h3 data-section-id=\"6yu2ul\" data-start=\"3912\" data-end=\"3943\">F\u00e9lvezet\u0151gy\u00e1rt\u00e1s<\/h3>\n<ul data-start=\"3944\" data-end=\"4097\">\n<li data-section-id=\"49bdmt\" data-start=\"3944\" data-end=\"3978\">EUV litogr\u00e1fia ostyakezel\u00e9s<\/li>\n<li data-section-id=\"11xdzhh\" data-start=\"3979\" data-end=\"4017\">300 mm-es wafer robot transzfer rendszerek<\/li>\n<li data-section-id=\"ox84z0\" data-start=\"4018\" data-end=\"4060\">CVD \/ PVD \/ marat\u00e1si kamra automatiz\u00e1l\u00e1s<\/li>\n<li data-section-id=\"teg2xm\" data-start=\"4061\" data-end=\"4097\">Ionimplant\u00e1ci\u00f3s ostyasz\u00e1ll\u00edt\u00e1s<\/li>\n<\/ul>\n<hr data-start=\"4099\" data-end=\"4102\" \/>\n<h3 data-section-id=\"sf9357\" data-start=\"4104\" data-end=\"4140\">Fejlett f\u00e9lvezet\u0151 anyagok<\/h3>\n<ul data-start=\"4141\" data-end=\"4248\">\n<li data-section-id=\"iiuum6\" data-start=\"4141\" data-end=\"4176\">SiC teljes\u00edtm\u00e9ny\u0171 eszk\u00f6z\u00f6k ostyakezel\u00e9se<\/li>\n<li data-section-id=\"se94ot\" data-start=\"4177\" data-end=\"4211\">GaN epitaktikai gy\u00e1rt\u00f3rendszerek<\/li>\n<li data-section-id=\"3yciq1\" data-start=\"4212\" data-end=\"4248\">Magas h\u0151m\u00e9rs\u00e9klet\u0171 MOCVD elj\u00e1r\u00e1sok<\/li>\n<\/ul>\n<hr data-start=\"4250\" data-end=\"4253\" \/>\n<h3 data-section-id=\"11khwnl\" data-start=\"4255\" data-end=\"4286\">Fotovoltaikus \u00e9s LED ipar<\/h3>\n<ul data-start=\"4287\" data-end=\"4389\">\n<li data-section-id=\"q29bxq\" data-start=\"4287\" data-end=\"4319\">Solar wafer automatiz\u00e1l\u00e1si sorok<\/li>\n<li data-section-id=\"10mww1v\" data-start=\"4320\" data-end=\"4361\">Micro-LED \/ Mini-LED \u00e1tviteli rendszerek<\/li>\n<li data-section-id=\"dp5vhg\" data-start=\"4362\" data-end=\"4389\">Zaf\u00edr ostya kezel\u00e9se<\/li>\n<\/ul>\n<hr data-start=\"4391\" data-end=\"4394\" \/>\n<h3 data-section-id=\"j366yc\" data-start=\"4396\" data-end=\"4428\">Automatiz\u00e1l\u00e1s \u00e9s robotika (AMHS)<\/h3>\n<ul data-start=\"4429\" data-end=\"4533\">\n<li data-section-id=\"fpj2it\" data-start=\"4429\" data-end=\"4459\">Szeletsz\u00e1ll\u00edt\u00f3 robotkarok<\/li>\n<li data-section-id=\"e4e8u3\" data-start=\"4460\" data-end=\"4492\">Tisztaszoba automatiz\u00e1l\u00e1si rendszerek<\/li>\n<li data-section-id=\"k0rhy6\" data-start=\"4493\" data-end=\"4533\">Nagy sebess\u00e9g\u0171 anyagmozgat\u00f3 rendszerek<\/li>\n<\/ul>\n<hr data-start=\"4535\" data-end=\"4538\" \/>\n<h3 data-section-id=\"1c5bbdr\" data-start=\"4540\" data-end=\"4573\">Kutat\u00e1s \u00e9s cs\u00facskateg\u00f3ri\u00e1s berendez\u00e9sek<\/h3>\n<ul data-start=\"4574\" data-end=\"4679\">\n<li data-section-id=\"1sbej07\" data-start=\"4574\" data-end=\"4604\">Kvantum eszk\u00f6z\u00f6k gy\u00e1rt\u00e1sa<\/li>\n<li data-section-id=\"5u37w7\" data-start=\"4605\" data-end=\"4641\">Kriog\u00e9n ostyakezel\u0151 rendszerek<\/li>\n<li data-section-id=\"i12e24\" data-start=\"4642\" data-end=\"4679\">Fejlett csomagol\u00e1s (3D IC \/ MEMS)<\/li>\n<\/ul>\n<hr data-start=\"4681\" data-end=\"4684\" \/>\n<h2 data-section-id=\"vm5qii\" data-start=\"4686\" data-end=\"4715\">A term\u00e9k el\u0151nyeinek \u00f6sszefoglal\u00e1sa<\/h2>\n<ul data-start=\"4717\" data-end=\"4996\">\n<li data-section-id=\"r4wmoo\" data-start=\"4717\" data-end=\"4750\">Nulla f\u00e9mszennyez\u00e9si kock\u00e1zat<\/li>\n<li data-section-id=\"w80eyq\" data-start=\"4751\" data-end=\"4797\">Rendk\u00edv\u00fcl nagy merevs\u00e9g a prec\u00edz kezel\u00e9s\u00e9rt<\/li>\n<li data-section-id=\"ovhb2l\" data-start=\"4798\" data-end=\"4842\">Kiv\u00e1l\u00f3 termikus \u00e9s k\u00e9miai stabilit\u00e1s<\/li>\n<li data-section-id=\"1pry50x\" data-start=\"4843\" data-end=\"4878\">Hossz\u00fa \u00e9lettartam minim\u00e1lis kop\u00e1ssal<\/li>\n<li data-section-id=\"16clm2x\" data-start=\"4879\" data-end=\"4919\">Kompatibilis a tisztat\u00e9r automatiz\u00e1l\u00e1s\u00e1val<\/li>\n<li data-section-id=\"1usfebt\" data-start=\"4920\" data-end=\"4956\">Testreszabhat\u00f3 minden ostyam\u00e9rethez<\/li>\n<li data-section-id=\"whnxc2\" data-start=\"4957\" data-end=\"4996\">Alkalmas EUV \u00e9s fejlett csom\u00f3pontok sz\u00e1m\u00e1ra<\/li>\n<\/ul>\n<hr data-start=\"4998\" data-end=\"5001\" \/>\n<h2 data-section-id=\"rnyyeg\" data-start=\"5003\" data-end=\"5027\">Testreszab\u00e1si lehet\u0151s\u00e9gek<img decoding=\"async\" class=\"size-medium wp-image-2102 alignright\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2-300x300.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2-150x150.png 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2-768x768.png 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2-12x12.png 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2-600x600.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2-100x100.png 100w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/h2>\n<p data-start=\"5029\" data-end=\"5067\">T\u00e1mogatjuk a teljes OEM\/ODM testreszab\u00e1st:<\/p>\n<ul data-start=\"5069\" data-end=\"5319\">\n<li data-section-id=\"pzy3qt\" data-start=\"5069\" data-end=\"5127\">V\u00e9grehajt\u00f3 geometria (lapos \/ peremfog\u00e1s \/ rov\u00e1tkolt igaz\u00edt\u00e1s)<\/li>\n<li data-section-id=\"173oufn\" data-start=\"5128\" data-end=\"5168\">Wafer m\u00e9ret kompatibilit\u00e1s (150-450mm)<\/li>\n<li data-section-id=\"1sh3bgb\" data-start=\"5169\" data-end=\"5195\">Robot interf\u00e9sz tervez\u00e9se<\/li>\n<li data-section-id=\"1ma3ck\" data-start=\"5196\" data-end=\"5252\">Fel\u00fcleti bevonat (antisztatikus \/ hidrof\u00f3b v\u00e1laszthat\u00f3)<\/li>\n<li data-section-id=\"7mw706\" data-start=\"5253\" data-end=\"5289\">Prec\u00edzi\u00f3s t\u0171r\u00e9soptimaliz\u00e1l\u00e1s<\/li>\n<li data-section-id=\"w4j63d\" data-start=\"5290\" data-end=\"5319\">Tisztaszobai kivitelez\u00e9s<\/li>\n<\/ul>\n<hr data-start=\"5321\" data-end=\"5324\" \/>\n<h2 data-section-id=\"1hryhf7\" data-start=\"5326\" data-end=\"5332\">GYIK<\/h2>\n<h3 data-section-id=\"1mpzh4o\" data-start=\"5334\" data-end=\"5384\">1. k\u00e9rd\u00e9s: Mi\u00e9rt haszn\u00e1ljunk SiC-et alum\u00ednium vagy kvarc helyett?<\/h3>\n<ul data-start=\"5385\" data-end=\"5556\">\n<li data-section-id=\"1xvhlf0\" data-start=\"5385\" data-end=\"5437\">Alum\u00ednium: r\u00e9szecskek\u00e9pz\u0151d\u00e9s + oxid\u00e1ci\u00f3s probl\u00e9m\u00e1k<\/li>\n<li data-section-id=\"1q7gghy\" data-start=\"5438\" data-end=\"5489\">Kvarc: t\u00f6r\u00e9keny + gyenge h\u0151\u00e1ll\u00f3s\u00e1g<\/li>\n<li data-section-id=\"vgt2b3\" data-start=\"5490\" data-end=\"5556\">SiC: a merevs\u00e9g, a tisztas\u00e1g \u00e9s a tart\u00f3ss\u00e1g legjobb kombin\u00e1ci\u00f3ja<\/li>\n<\/ul>\n<hr data-start=\"5558\" data-end=\"5561\" \/>\n<h3 data-section-id=\"1cxfupn\" data-start=\"5563\" data-end=\"5599\">2. k\u00e9rd\u00e9s: T\u00e1mogatja a 450 mm-es osty\u00e1kat?<\/h3>\n<p data-start=\"5600\" data-end=\"5667\">Igen, 450 mm-es ostyakezel\u0151 rendszerekhez egyedi tervek is rendelkez\u00e9sre \u00e1llnak.<\/p>\n<hr data-start=\"5669\" data-end=\"5672\" \/>\n<h3 data-section-id=\"a4nxop\" data-start=\"5674\" data-end=\"5717\">3. k\u00e9rd\u00e9s: Alkalmas az EUV litogr\u00e1fi\u00e1hoz?<\/h3>\n<p data-start=\"5718\" data-end=\"5803\">Igen. A SiC v\u00e9ghat\u00e1sok megfelelnek a rendk\u00edv\u00fcl alacsony r\u00e9szecske- \u00e9s v\u00e1kuumkompatibilit\u00e1si k\u00f6vetelm\u00e9nyeknek.<\/p>\n<hr data-start=\"5805\" data-end=\"5808\" \/>\n<h3 data-section-id=\"1ajqsm3\" data-start=\"5810\" data-end=\"5872\">4. k\u00e9rd\u00e9s: Haszn\u00e1lhat\u00f3 v\u00e1kuum- \u00e9s magas h\u0151m\u00e9rs\u00e9klet\u0171 rendszerekben?<\/h3>\n<p data-start=\"5873\" data-end=\"5951\">Igen. A SiC stabilan m\u0171k\u00f6dik v\u00e1kuumban, plazm\u00e1ban \u00e9s magas h\u0151m\u00e9rs\u00e9klet\u0171 k\u00f6rnyezetben.<\/p>","protected":false},"excerpt":{"rendered":"<p>The Silicon Carbide (SiC) Ceramic End Effector is a high-precision wafer handling component designed for semiconductor automation systems, including wafer transfer robots, AMHS systems, EUV lithography equipment, and high-temperature process tools. Made from high-purity CVD SiC or engineered SSiC, this end effector delivers exceptional rigidity, ultra-low particle generation, and outstanding thermal and chemical stability. It [&hellip;]<\/p>\n","protected":false},"featured_media":2104,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}}},"product_brand":[],"product_cat":[23],"product_tag":[192,191,190,193,194,195,188,104,189,187],"class_list":["post-2100","product","type-product","status-publish","has-post-thumbnail","product_cat-silicon-carbide-sic","product_tag-300mm-wafer-robot-arm","product_tag-amhs-wafer-transfer-tool","product_tag-cvd-sic-end-effector","product_tag-euv-wafer-handling-component","product_tag-high-precision-ceramic-end-effector","product_tag-semiconductor-automation-parts","product_tag-semiconductor-robot-arm","product_tag-sic-ceramic-end-effector","product_tag-silicon-carbide-wafer-handler","product_tag-wafer-handling-end-effector","desktop-align-left","tablet-align-left","mobile-align-left","first","instock","shipping-taxable","product-type-simple"],"_links":{"self":[{"href":"https:\/\/www.xkh-ceramics.com\/hu\/wp-json\/wp\/v2\/product\/2100","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.xkh-ceramics.com\/hu\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/www.xkh-ceramics.com\/hu\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/hu\/wp-json\/wp\/v2\/comments?post=2100"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/hu\/wp-json\/wp\/v2\/media\/2104"}],"wp:attachment":[{"href":"https:\/\/www.xkh-ceramics.com\/hu\/wp-json\/wp\/v2\/media?parent=2100"}],"wp:term":[{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/hu\/wp-json\/wp\/v2\/product_brand?post=2100"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/hu\/wp-json\/wp\/v2\/product_cat?post=2100"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/hu\/wp-json\/wp\/v2\/product_tag?post=2100"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}